{"id":17250,"date":"2025-10-13T18:45:34","date_gmt":"2025-10-13T10:45:34","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=17250"},"modified":"2025-10-13T18:45:34","modified_gmt":"2025-10-13T10:45:34","slug":"%e9%ab%98%e6%95%88%e7%a9%ba%e6%b0%94%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e6%b4%81%e5%87%80%e5%ae%a4%e4%b8%ad%e7%9a%84pm0-1%e6%8e%a7%e5%88%b6%e6%8a%80%e6%9c%af","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=17250","title":{"rendered":"\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684PM0.1\u63a7\u5236\u6280\u672f"},"content":{"rendered":"

\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684PM0.1\u63a7\u5236\u6280\u672f<\/h1>\n

\u5f15\u8a00<\/h2>\n

\u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u82af\u7247\u5236\u7a0b\u8282\u70b9\u5df2\u8fdb\u51655nm\u30013nm\u751a\u81f3\u66f4\u5c0f\u5c3a\u5ea6\u3002\u5728\u6b64\u80cc\u666f\u4e0b\uff0c\u5fae\u7c92\u6c61\u67d3\uff08Particulate Matter, PM\uff09\u5bf9\u751f\u4ea7\u826f\u7387\u7684\u5f71\u54cd\u6108\u53d1\u663e\u8457\uff0c\u5c24\u5176\u662f\u7c92\u5f84\u5c0f\u4e8e0.1\u5fae\u7c73\uff08\u5373PM0.1\uff09\u7684\u8d85\u7ec6\u9897\u7c92\u7269\uff0c\u5df2\u6210\u4e3a\u5236\u7ea6\u5148\u8fdb\u5236\u7a0b\u7a33\u5b9a\u6027\u7684\u5173\u952e\u56e0\u7d20\u4e4b\u4e00\u3002\u4e3a\u786e\u4fdd\u6676\u5706\u8868\u9762\u4e0d\u53d7\u6c61\u67d3\uff0c\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u5fc5\u987b\u7ef4\u6301\u6781\u9ad8\u7684\u7a7a\u6c14\u6d01\u51c0\u5ea6\u6807\u51c6\uff0c\u901a\u5e38\u9700\u8fbe\u5230ISO Class 1\u6216\u66f4\u9ad8\u6c34\u5e73\u3002\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08High-Efficiency Particulate Air Filter, HEPA\uff09\u4e0e\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08Ultra-Low Penetration Air Filter, ULPA\uff09\u4f5c\u4e3a\u6d01\u51c0\u5ba4\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\u7684\u6838\u5fc3\u7ec4\u4ef6\uff0c\u5728PM0.1\u63a7\u5236\u4e2d\u53d1\u6325\u7740\u4e0d\u53ef\u66ff\u4ee3\u7684\u4f5c\u7528\u3002<\/p>\n

\u672c\u6587\u5c06\u7cfb\u7edf\u9610\u8ff0\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u5bf9PM0.1\u7684\u63a7\u5236\u673a\u5236\u3001\u5173\u952e\u6280\u672f\u53c2\u6570\u3001\u5b9e\u9645\u5e94\u7528\u6848\u4f8b\u4ee5\u53ca\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\uff0c\u5e76\u7ed3\u5408\u5177\u4f53\u4ea7\u54c1\u6027\u80fd\u6570\u636e\u8fdb\u884c\u5206\u6790\uff0c\u5168\u9762\u5c55\u793a\u5176\u5728\u73b0\u4ee3\u534a\u5bfc\u4f53\u5236\u9020\u73af\u5883\u4e2d\u7684\u91cd\u8981\u5730\u4f4d\u3002<\/p>\n

\n

\u4e00\u3001PM0.1\u7684\u6765\u6e90\u4e0e\u5371\u5bb3<\/h2>\n

1.1 PM0.1\u7684\u5b9a\u4e49\u4e0e\u7279\u6027<\/h3>\n

PM0.1\u6307\u7a7a\u6c14\u4e2d\u7a7a\u6c14\u52a8\u529b\u5b66\u76f4\u5f84\u5c0f\u4e8e\u6216\u7b49\u4e8e0.1\u5fae\u7c73\uff08100\u7eb3\u7c73\uff09\u7684\u60ac\u6d6e\u9897\u7c92\u7269\u3002\u8fd9\u7c7b\u9897\u7c92\u7531\u4e8e\u5c3a\u5bf8\u6781\u5c0f\uff0c\u5177\u6709\u5e03\u6717\u8fd0\u52a8\u663e\u8457\u3001\u6c89\u964d\u901f\u5ea6\u6162\u3001\u6613\u7a7f\u900f\u4f20\u7edf\u8fc7\u6ee4\u4ecb\u8d28\u7b49\u7279\u70b9\uff0c\u96be\u4ee5\u901a\u8fc7\u5e38\u89c4\u624b\u6bb5\u53bb\u9664\u3002\u6839\u636e\u7f8e\u56fd\u73af\u5883\u4fdd\u62a4\u7f72\uff08EPA\uff09\u5206\u7c7b\uff0cPM0.1\u5c5e\u4e8e\u8d85\u7ec6\u9897\u7c92\u7269\u8303\u7574\uff0c\u5176\u884c\u4e3a\u66f4\u63a5\u8fd1\u6c14\u6eb6\u80f6\u800c\u975e\u56fa\u4f53\u5c18\u57c3\u3002<\/p>\n

1.2 \u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2dPM0.1\u7684\u4e3b\u8981\u6765\u6e90<\/h3>\n\n\n\n\n\n\n\n\n\n
\u6765\u6e90\u7c7b\u522b<\/th>\n\u5177\u4f53\u6765\u6e90<\/th>\n\u7c92\u5f84\u8303\u56f4\uff08\u03bcm\uff09<\/th>\n<\/tr>\n<\/thead>\n
\u5de5\u827a\u8bbe\u5907\u6392\u653e<\/td>\n\u5149\u523b\u673a\u3001\u8680\u523b\u673a\u3001CVD\/PVD\u8bbe\u5907\u8fd0\u884c\u65f6\u4ea7\u751f\u7684\u526f\u4ea7\u7269<\/td>\n0.03\u20130.15<\/td>\n<\/tr>\n
\u4eba\u5458\u6d3b\u52a8<\/td>\n\u64cd\u4f5c\u5458\u547c\u5438\u3001\u8863\u7269\u7ea4\u7ef4\u8131\u843d\u3001\u76ae\u80a4\u5c51<\/td>\n0.05\u20130.2<\/td>\n<\/tr>\n
\u5efa\u7b51\u6750\u6599\u91ca\u653e<\/td>\n\u9694\u5899\u3001\u5730\u677f\u3001\u5bc6\u5c01\u80f6\u6325\u53d1\u6027\u6709\u673a\u7269\u51dd\u7ed3\u6210\u6838<\/td>\n0.02\u20130.1<\/td>\n<\/tr>\n
\u5916\u90e8\u7a7a\u6c14\u6e17\u900f<\/td>\n\u65b0\u98ce\u7cfb\u7edf\u672a\u5b8c\u5168\u8fc7\u6ee4\u7684\u5916\u754c\u6c61\u67d3\u7269<\/td>\n0.01\u20130.1<\/td>\n<\/tr>\n
\u5316\u5b66\u53cd\u5e94\u751f\u6210<\/td>\n\u5ba4\u5185VOCs\u4e0e\u81ed\u6c27\u53d1\u751f\u5747\u76f8\u6210\u6838\u53cd\u5e94<\/td>\n<0.1<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\u636e\u65e5\u672c\u4e1c\u4eac\u7535\u5b50\uff08Tokyo Electron\uff092022\u5e74\u53d1\u5e03\u7684\u7814\u7a76\u62a5\u544a\u6307\u51fa\uff0c\u572828nm\u4ee5\u4e0b\u5de5\u827a\u8282\u70b9\u4e2d\uff0c\u6bcf\u589e\u52a0\u4e00\u4e2aPM0.1\u7c92\u5b50\/\u5347\uff0c\u6676\u5706\u7f3a\u9677\u7387\u5e73\u5747\u4e0a\u53470.7%\u3002\u97e9\u56fd\u4e09\u661f\u7535\u5b50\u4ea6\u5728\u5176\u300aAdvanced Process Control White Paper\u300b\u4e2d\u5f3a\u8c03\uff0cPM0.1\u6d53\u5ea6\u8d85\u8fc70.001 particles\/L\uff08\u22650.1\u03bcm\uff09\u65f6\uff0cFinFET\u7ed3\u6784\u6781\u6613\u56e0\u5c40\u90e8\u6c89\u79ef\u5bfc\u81f4\u6805\u6781\u77ed\u8def\u3002<\/p>\n

\n

\u4e8c\u3001\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u6280\u672f\u539f\u7406<\/h2>\n

2.1 \u8fc7\u6ee4\u673a\u5236\u6982\u8ff0<\/h3>\n

\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u4e3b\u8981\u4f9d\u9760\u56db\u79cd\u7269\u7406\u673a\u5236\u6355\u83b7\u5fae\u7c92\uff1a<\/p>\n

    \n
  • \u62e6\u622a\u6548\u5e94<\/strong>\uff08Interception\uff09\uff1a\u5f53\u9897\u7c92\u9760\u8fd1\u7ea4\u7ef4\u8868\u9762\u65f6\u88ab\u76f4\u63a5\u5438\u9644\u3002<\/li>\n
  • \u60ef\u6027\u78b0\u649e<\/strong>\uff08Inertial Impaction\uff09\uff1a\u5927\u9897\u7c92\u56e0\u6c14\u6d41\u65b9\u5411\u6539\u53d8\u800c\u649e\u51fb\u7ea4\u7ef4\u3002<\/li>\n
  • \u6269\u6563\u6548\u5e94<\/strong>\uff08Diffusion\uff09\uff1a\u5c0f\u9897\u7c92\u53d7\u5e03\u6717\u8fd0\u52a8\u5f71\u54cd\u4e0e\u7ea4\u7ef4\u63a5\u89e6\u3002<\/li>\n
  • \u9759\u7535\u5438\u5f15<\/strong>\uff08Electrostatic Attraction\uff09\uff1a\u5e26\u7535\u7ea4\u7ef4\u589e\u5f3a\u5bf9\u4e9a\u5fae\u7c73\u9897\u7c92\u7684\u6355\u83b7\u80fd\u529b\u3002<\/li>\n<\/ul>\n

    \u5bf9\u4e8ePM0.1\u9897\u7c92\u800c\u8a00\uff0c\u5176\u8d28\u91cf\u6781\u8f7b\uff0c\u60ef\u6027\u6548\u5e94\u5f31\uff0c\u4e3b\u8981\u4f9d\u8d56\u6269\u6563\u6548\u5e94<\/strong>\u548c\u9759\u7535\u5438\u9644<\/strong>\u5b9e\u73b0\u9ad8\u6548\u53bb\u9664\u3002\u7814\u7a76\u8868\u660e\uff0c\u5f53\u9897\u7c92\u7c92\u5f84\u5904\u4e8e0.1\u20130.3\u03bcm\u533a\u95f4\u65f6\uff0c\u603b\u8fc7\u6ee4\u6548\u7387\u6700\u4f4e\uff0c\u79f0\u4e3a\u201c\u6700\u6613\u7a7f\u900f\u7c92\u5f84\u201d\uff08Most Penetrating Particle Size, MPPS\uff09\u3002ULPA\u8fc7\u6ee4\u5668\u7684\u8bbe\u8ba1\u76ee\u6807\u6b63\u662f\u9488\u5bf9MPPS\u4f18\u5316\uff0c\u4ee5\u786e\u4fdd\u5bf9PM0.1\u7684\u6709\u6548\u62e6\u622a\u3002<\/p>\n

    2.2 HEPA\u4e0eULPA\u8fc7\u6ee4\u5668\u7684\u533a\u522b<\/h3>\n\n\n\n\n\n\n\n\n\n\n\n
    \u53c2\u6570\u9879<\/th>\nHEPA\u8fc7\u6ee4\u5668<\/th>\nULPA\u8fc7\u6ee4\u5668<\/th>\n<\/tr>\n<\/thead>\n
    \u6807\u51c6\u4f9d\u636e<\/td>\nEN 1822:2009 \/ IEST RP-CC001<\/td>\nEN 1822:2009 \/ IEST RP-CC001<\/td>\n<\/tr>\n
    \u8fc7\u6ee4\u7b49\u7ea7<\/td>\nH13\u2013H14<\/td>\nU15\u2013U17<\/td>\n<\/tr>\n
    \u5bf9MPPS\uff08\u22480.12\u03bcm\uff09\u7684\u6700\u4f4e\u6548\u7387<\/td>\n\u226599.95%\uff08H13\uff09\uff0c\u226599.995%\uff08H14\uff09<\/td>\n\u226599.999%\uff08U15\uff09\uff0c\u226599.9995%\uff08U16\uff09\uff0c\u226599.9999%\uff08U17\uff09<\/td>\n<\/tr>\n
    \u521d\u59cb\u963b\u529b\uff08Pa\uff09<\/td>\n180\u2013250<\/td>\n220\u2013300<\/td>\n<\/tr>\n
    \u4f7f\u7528\u5bff\u547d\uff08h\uff09<\/td>\n8,000\u201312,000<\/td>\n6,000\u201310,000\uff08\u56e0\u66f4\u9ad8\u5bc6\u5ea6\u4ecb\u8d28\uff09<\/td>\n<\/tr>\n
    \u9002\u7528\u6d01\u51c0\u7b49\u7ea7<\/td>\nISO Class 5\u20136<\/td>\nISO Class 1\u20134<\/td>\n<\/tr>\n
    \u5178\u578b\u5e94\u7528\u573a\u666f<\/td>\n\u751f\u7269\u5b9e\u9a8c\u5ba4\u3001\u4e00\u822c\u6d01\u51c0\u8f66\u95f4<\/td>\n\u534a\u5bfc\u4f53\u5149\u523b\u533a\u3001GigaFab\u6838\u5fc3\u533a\u57df<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

    \u8d44\u6599\u6765\u6e90\uff1aEuropean Committee for Standardization (CEN), EN 1822:2009 High Efficiency Air Filters (HEPA and ULPA)<\/em>\uff1bIEST, Recommended Practice CC001.5<\/em><\/p>\n

    \u503c\u5f97\u6ce8\u610f\u7684\u662f\uff0cULPA\u8fc7\u6ee4\u5668\u867d\u5177\u5907\u66f4\u9ad8\u7684\u8fc7\u6ee4\u6548\u7387\uff0c\u4f46\u5176\u538b\u964d\u8f83\u5927\u3001\u80fd\u8017\u9ad8\u3001\u66f4\u6362\u6210\u672c\u6602\u8d35\uff0c\u56e0\u6b64\u5728\u5b9e\u9645\u90e8\u7f72\u4e2d\u9700\u7ed3\u5408\u6c14\u6d41\u7ec4\u7ec7\u8bbe\u8ba1\u8fdb\u884c\u5408\u7406\u914d\u7f6e\u3002<\/p>\n

    \n

    \u4e09\u3001ULPA\u8fc7\u6ee4\u5668\u5728PM0.1\u63a7\u5236\u4e2d\u7684\u6838\u5fc3\u6280\u672f\u53c2\u6570<\/h2>\n

    3.1 \u5173\u952e\u6027\u80fd\u6307\u6807\u8be6\u89e3<\/h3>\n\n\n\n\n\n\n\n\n\n\n\n
    \u6280\u672f\u53c2\u6570<\/th>\n\u5b9a\u4e49\u8bf4\u660e<\/th>\n\u534a\u5bfc\u4f53\u5e94\u7528\u8981\u6c42<\/th>\n<\/tr>\n<\/thead>\n
    \u8fc7\u6ee4\u6548\u7387\uff08Efficiency @ MPPS\uff09<\/td>\n\u5728\u6700\u6613\u7a7f\u900f\u7c92\u5f84\u4e0b\u7684\u9897\u7c92\u53bb\u9664\u7387<\/td>\n\u226599.999%\uff08U15\u53ca\u4ee5\u4e0a\uff09<\/td>\n<\/tr>\n
    \u989d\u5b9a\u98ce\u91cf\uff08Rated Airflow\uff09<\/td>\n\u8fc7\u6ee4\u5668\u8bbe\u8ba1\u8fd0\u884c\u7684\u6700\u5927\u6c14\u6d41\u91cf\uff08m\u00b3\/h\uff09<\/td>\n\u901a\u5e38\u5339\u914dFFU\u98ce\u673a\u5bb9\u91cf\uff0c\u59821,000\u20131,500 m\u00b3\/h<\/td>\n<\/tr>\n
    \u521d\u963b\u529b\uff08Initial Pressure Drop\uff09<\/td>\n\u65b0\u88c5\u72b6\u6001\u4e0b\u901a\u8fc7\u8fc7\u6ee4\u5668\u7684\u538b\u964d\uff08Pa\uff09<\/td>\n\u2264280 Pa\uff0c\u907f\u514d\u589e\u52a0\u98ce\u673a\u8d1f\u8377<\/td>\n<\/tr>\n
    \u5bb9\u5c18\u91cf\uff08Dust Holding Capacity\uff09<\/td>\n\u53ef\u5bb9\u7eb3\u9897\u7c92\u603b\u91cf\u76f4\u81f3\u538b\u964d\u8d85\u6807\uff08g\/m\u00b2\uff09<\/td>\n>500 g\/m\u00b2\uff0c\u5ef6\u957f\u66f4\u6362\u5468\u671f<\/td>\n<\/tr>\n
    \u5fae\u751f\u7269\u7a7f\u900f\u7387\uff08Biological Penetration\uff09<\/td>\n\u5bf9\u7ec6\u83cc\u3001\u75c5\u6bd2\u7b49\u751f\u7269\u6c14\u6eb6\u80f6\u7684\u963b\u9694\u80fd\u529b<\/td>\n<0.001%\uff0c\u9632\u6b62\u4ea4\u53c9\u6c61\u67d3<\/td>\n<\/tr>\n
    \u6e29\u6e7f\u5ea6\u8010\u53d7\u6027<\/td>\n\u5728\u76f8\u5bf9\u6e7f\u5ea680%\u3001\u6e29\u5ea640\u2103\u4e0b\u957f\u671f\u8fd0\u884c\u7a33\u5b9a\u6027<\/td>\n\u5fc5\u987b\u6ee1\u8db3ASME BPE\u6807\u51c6<\/td>\n<\/tr>\n
    \u7ed3\u6784\u5b8c\u6574\u6027\uff08Integrity Test Pass Rate\uff09<\/td>\n\u626b\u63cf\u68c0\u6f0f\u6d4b\u8bd5\u65e0\u6cc4\u6f0f\u70b9<\/td>\n\u6cc4\u6f0f\u7387<0.01% of upstream concentration<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

    3.2 \u4e3b\u6d41ULPA\u8fc7\u6ee4\u5668\u4ea7\u54c1\u5bf9\u6bd4\u8868\uff082024\u5e74\u5e02\u573a\u4e3b\u6d41\u578b\u53f7\uff09<\/h3>\n\n\n\n\n\n\n\n\n\n\n
    \u54c1\u724c<\/th>\n\u578b\u53f7<\/th>\n\u8fc7\u6ee4\u7b49\u7ea7<\/th>\nMPPS\u6548\u7387<\/th>\n\u5c3a\u5bf8\uff08mm\uff09<\/th>\n\u989d\u5b9a\u98ce\u91cf\uff08m\u00b3\/h\uff09<\/th>\n\u521d\u963b\u529b\uff08Pa\uff09<\/th>\n\u9002\u7528FFU\u7c7b\u578b<\/th>\n\u56fd\u4ea7\/\u8fdb\u53e3<\/th>\n<\/tr>\n<\/thead>\n
    Camfil<\/td>\nHi-Flo ULPA<\/td>\nU16<\/td>\n99.9995%<\/td>\n1170\u00d7570\u00d790<\/td>\n1,300<\/td>\n240<\/td>\nFan Filter Unit<\/td>\n\u8fdb\u53e3<\/td>\n<\/tr>\n
    Donaldson<\/td>\nUltiGuard XA<\/td>\nU17<\/td>\n99.9999%<\/td>\n1200\u00d7600\u00d790<\/td>\n1,450<\/td>\n275<\/td>\nCeiling-mounted FFU<\/td>\n\u8fdb\u53e3<\/td>\n<\/tr>\n
    AAF International<\/td>\nAerostar ULPA<\/td>\nU15<\/td>\n99.999%<\/td>\n1170\u00d7570\u00d769<\/td>\n1,200<\/td>\n220<\/td>\nModular FFU<\/td>\n\u8fdb\u53e3<\/td>\n<\/tr>\n
    \u82cf\u5dde\u5b89\u6cf0\u7a7a\u6c14\u6280\u672f<\/td>\nAT-ULPA-90<\/td>\nU16<\/td>\n99.9995%<\/td>\n1170\u00d7570\u00d790<\/td>\n1,350<\/td>\n250<\/td>\n\u56fd\u4ea7FFU\u517c\u5bb9<\/td>\n\u56fd\u4ea7<\/td>\n<\/tr>\n
    \u76c8\u5cf0\u73af\u5883<\/td>\nYK-ULPA-60<\/td>\nU15<\/td>\n99.999%<\/td>\n1170\u00d7570\u00d760<\/td>\n1,100<\/td>\n210<\/td>\n\u8282\u80fd\u578bFFU<\/td>\n\u56fd\u4ea7<\/td>\n<\/tr>\n
    Honeywell<\/td>\nNanoShield Pro<\/td>\nU17<\/td>\n99.9999%<\/td>\n1210\u00d7610\u00d790<\/td>\n1,500<\/td>\n280<\/td>\n\u9ad8\u7aef\u5149\u523b\u95f4\u4e13\u7528<\/td>\n\u8fdb\u53e3<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

    \u6ce8\uff1a\u4ee5\u4e0a\u6570\u636e\u7efc\u5408\u81ea\u5404\u5382\u5546\u5b98\u7f51\u6280\u672f\u624b\u518c\u53ca\u7b2c\u4e09\u65b9\u68c0\u6d4b\u62a5\u544a\uff08\u5982SGS\u3001T\u00dcV\uff09<\/p>\n

    \u56fd\u4ea7ULPA\u8fd1\u5e74\u6765\u53d1\u5c55\u8fc5\u901f\uff0c\u4ee5\u82cf\u5dde\u5b89\u6cf0\u3001\u76c8\u5cf0\u73af\u5883\u4e3a\u4ee3\u8868\u7684\u672c\u571f\u4f01\u4e1a\u5df2\u5728\u6750\u6599\u914d\u65b9\u3001\u5206\u9694\u677f\u6210\u578b\u5de5\u827a\u3001\u81ea\u52a8\u5316\u5c01\u88c5\u7b49\u65b9\u9762\u53d6\u5f97\u7a81\u7834\uff0c\u90e8\u5206\u4ea7\u54c1\u6027\u80fd\u5df2\u63a5\u8fd1\u56fd\u9645\u4e00\u7ebf\u54c1\u724c\uff0c\u4e14\u5177\u5907\u4ef7\u683c\u4f18\u52bf\uff08\u7ea6\u4e3a\u8fdb\u53e3\u4ea7\u54c1\u768460\u201375%\uff09\uff0c\u6b63\u9010\u6b65\u5728\u4e2d\u82af\u56fd\u9645\u3001\u534e\u8679\u5b8f\u529b\u7b49\u6676\u5706\u5382\u63a8\u5e7f\u4f7f\u7528\u3002<\/p>\n

    \n

    \u56db\u3001PM0.1\u63a7\u5236\u7cfb\u7edf\u7684\u6574\u4f53\u67b6\u6784\u8bbe\u8ba1<\/h2>\n

    4.1 \u6d01\u51c0\u5ba4\u6c14\u6d41\u7ec4\u7ec7\u6a21\u5f0f<\/h3>\n

    \u5728\u5148\u8fdb\u534a\u5bfc\u4f53\u5de5\u5382\u4e2d\uff0cPM0.1\u63a7\u5236\u4e0d\u4ec5\u4f9d\u8d56\u5355\u4e00\u8fc7\u6ee4\u5668\u6027\u80fd\uff0c\u8fd8\u9700\u7ed3\u5408\u6574\u4f53\u6c14\u6d41\u7ec4\u7ec7\u8bbe\u8ba1\u3002\u5e38\u89c1\u7684\u4e09\u79cd\u6a21\u5f0f\u5982\u4e0b\uff1a<\/p>\n\n\n\n\n\n\n\n
    \u6c14\u6d41\u6a21\u5f0f<\/th>\n\u7279\u70b9<\/th>\n\u9002\u7528\u573a\u666f<\/th>\n<\/tr>\n<\/thead>\n
    \u5782\u76f4\u6d41\u5355\u5411\u6d41\uff08Vertical Laminar Flow\uff09<\/td>\n\u7a7a\u6c14\u4ece\u9876\u90e8ULPA\u8fc7\u6ee4\u540e\u5782\u76f4\u5411\u4e0b\u6d41\u52a8\uff0c\u5f62\u6210\u6d3b\u585e\u6548\u5e94<\/td>\n\u5149\u523b\u533a\u3001EUV\u66dd\u5149\u5ba4<\/td>\n<\/tr>\n
    \u6c34\u5e73\u5355\u5411\u6d41\uff08Horizontal Laminar Flow\uff09<\/td>\n\u7a7a\u6c14\u4ece\u4e00\u4fa7\u9001\u5165\uff0c\u53e6\u4e00\u4fa7\u56de\u98ce\uff0c\u51cf\u5c11\u9876\u90e8\u969c\u788d\u7269\u5e72\u6270<\/td>\n\u5c0f\u578b\u6d01\u51c0\u5de5\u4f5c\u53f0<\/td>\n<\/tr>\n
    \u975e\u5355\u5411\u6d41\uff08Mixed Flow\uff09<\/td>\n\u91c7\u7528\u591a\u70b9\u9001\u98ce\u4e0e\u56de\u98ce\uff0c\u914d\u5408\u9ad8\u6362\u6c14\u6b21\u6570\u7a00\u91ca\u6c61\u67d3\u7269<\/td>\n\u524d\u6bb5\u6e05\u6d17\u533a\u3001\u5305\u88c5\u533a<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

    \u6839\u636e\u300a\u4e2d\u56fd\u7535\u5b50\u5de5\u7a0b\u8bbe\u8ba1\u9662\u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303 GB 50073-2023\u300b\uff0c\u5bf9\u4e8eISO Class 1\u6d01\u51c0\u5ba4\uff0c\u5efa\u8bae\u91c7\u7528\u5782\u76f4\u5355\u5411\u6d41\uff0c\u65ad\u9762\u98ce\u901f\u63a7\u5236\u57280.3\u20130.5 m\/s\uff0c\u6362\u6c14\u6b21\u6570>600\u6b21\/\u5c0f\u65f6\u3002<\/p>\n

    4.2 \u591a\u7ea7\u8fc7\u6ee4\u7cfb\u7edf\u914d\u7f6e<\/h3>\n

    \u5178\u578b\u7684\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\u91c7\u7528\u56db\u7ea7\u8fc7\u6ee4\u7ed3\u6784\uff1a<\/p>\n\n\n\n\n\n\n\n\n
    \u8fc7\u6ee4\u5c42\u7ea7<\/th>\n\u8fc7\u6ee4\u5668\u7c7b\u578b<\/th>\n\u76ee\u6807\u7c92\u5f84<\/th>\n\u6548\u7387\u8981\u6c42<\/th>\n\u529f\u80fd\u5b9a\u4f4d<\/th>\n<\/tr>\n<\/thead>\n
    \u7b2c\u4e00\u7ea7<\/td>\nG4\u521d\u6548\u8fc7\u6ee4\u5668<\/td>\n>5\u03bcm<\/td>\n\u226590%<\/td>\n\u53bb\u9664\u5927\u9897\u7c92\u7070\u5c18\uff0c\u4fdd\u62a4\u540e\u7eed\u8bbe\u5907<\/td>\n<\/tr>\n
    \u7b2c\u4e8c\u7ea7<\/td>\nF8\u4e2d\u6548\u8fc7\u6ee4\u5668<\/td>\n>1\u03bcm<\/td>\n\u226595%<\/td>\n\u62e6\u622a\u68c9\u7d6e\u3001\u82b1\u7c89\u7b49\u4e2d\u7b49\u9897\u7c92<\/td>\n<\/tr>\n
    \u7b2c\u4e09\u7ea7<\/td>\nHEPA\u8fc7\u6ee4\u5668\uff08H13\/H14\uff09<\/td>\n>0.3\u03bcm<\/td>\n\u226599.995%<\/td>\n\u4e3b\u8981\u5c4f\u969c\uff0c\u9632\u6b62\u5916\u90e8\u6c61\u67d3\u4fb5\u5165<\/td>\n<\/tr>\n
    \u7b2c\u56db\u7ea7<\/td>\nULPA\u8fc7\u6ee4\u5668\uff08U15\u2013U17\uff09<\/td>\n\u22650.1\u03bcm<\/td>\n\u226599.999%<\/td>\n\u7ec8\u7aef\u7cbe\u8fc7\u6ee4\uff0c\u4e13\u63a7PM0.1<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

    \u8be5\u4f53\u7cfb\u9075\u5faa\u201c\u9010\u7ea7\u51c0\u5316\u201d\u539f\u5219\uff0c\u6709\u6548\u5ef6\u957fULPA\u4f7f\u7528\u5bff\u547d\u5e76\u964d\u4f4e\u7cfb\u7edf\u6574\u4f53\u80fd\u8017\u3002\u7f8e\u56fdASHRAE Standard 189.1\u660e\u786e\u6307\u51fa\uff0c\u7f3a\u5c11\u524d\u7ea7\u4fdd\u62a4\u7684ULPA\u8fc7\u6ee4\u5668\u5bff\u547d\u53ef\u80fd\u7f29\u77ed40%\u4ee5\u4e0a\u3002<\/p>\n

    \n

    \u4e94\u3001ULPA\u8fc7\u6ee4\u5668\u7684\u73b0\u573a\u9a8c\u8bc1\u4e0e\u76d1\u6d4b\u6280\u672f<\/h2>\n

    5.1 \u626b\u63cf\u68c0\u6f0f\u6d4b\u8bd5\uff08Scan Test\uff09<\/h3>\n

    \u4f9d\u636eEN 1822\u6807\u51c6\uff0cULPA\u8fc7\u6ee4\u5668\u5b89\u88c5\u524d\u540e\u5fc5\u987b\u8fdb\u884c\u626b\u63cf\u68c0\u6f0f\u6d4b\u8bd5\uff0c\u4f7f\u7528\u51b7\u53d1\u7898\u5316\u94a0\uff08NaI\uff09\u6216\u90bb\u82ef\u4e8c\u7532\u9178\u4e8c\u8f9b\u916f\uff08DEHS\uff09\u6c14\u6eb6\u80f6\u4f5c\u4e3a\u6311\u6218\u7c92\u5b50\uff0c\u5728MPPS\u7c92\u5f84\uff08\u901a\u5e380.1\u20130.2\u03bcm\uff09\u4e0b\u4ee51 cm\/s\u901f\u5ea6\u626b\u63cf\u6574\u4e2a\u8fc7\u6ee4\u9762\u3002<\/p>\n

      \n
    • \u5408\u683c\u6807\u51c6<\/strong>\uff1a\u5c40\u90e8\u7a7f\u900f\u7387\u4e0d\u5f97\u8d85\u8fc7\u989d\u5b9a\u7a7f\u900f\u7387\u76842\u500d\uff1b<\/li>\n
    • \u5178\u578b\u4eea\u5668<\/strong>\uff1aATI PortaCount Pro+\u3001TSI AeroTrak 9000\u7cfb\u5217\uff1b<\/li>\n
    • \u68c0\u6d4b\u9891\u7387<\/strong>\uff1a\u65b0\u88c5\u65f6\u5fc5\u505a\uff0c\u8fd0\u884c\u4e2d\u6bcf6\u4e2a\u6708\u4e00\u6b21\uff0c\u91cd\u5927\u7ef4\u62a4\u540e\u91cd\u6d4b\u3002<\/li>\n<\/ul>\n

      5.2 \u5b9e\u65f6PM0.1\u5728\u7ebf\u76d1\u6d4b\u7cfb\u7edf<\/h3>\n

      \u73b0\u4ee3GigaFab\u666e\u904d\u90e8\u7f72\u5206\u5e03\u5f0f\u7eb3\u7c73\u9897\u7c92\u76d1\u6d4b\u7f51\u7edc\uff0c\u5e38\u89c1\u8bbe\u5907\u5305\u62ec\uff1a<\/p>\n\n\n\n\n\n\n\n\n
      \u8bbe\u5907\u578b\u53f7<\/th>\n\u5236\u9020\u5546<\/th>\n\u6d4b\u91cf\u539f\u7406<\/th>\n\u7c92\u5f84\u8303\u56f4<\/th>\n\u6570\u636e\u8f93\u51fa\u63a5\u53e3<\/th>\n<\/tr>\n<\/thead>\n
      P-Trak Ultra 9003<\/td>\nTSI Inc.<\/td>\n\u51dd\u7ed3\u7c92\u5b50\u8ba1\u6570\u6cd5\uff08CPC\uff09<\/td>\n0.01\u20131.0 \u03bcm<\/td>\nEthernet, Modbus<\/td>\n<\/tr>\n
      Climet ICAM 7D<\/td>\nClimet Instruments<\/td>\n\u5149\u6563\u5c04\u6cd5<\/td>\n0.1, 0.3, 0.5 \u03bcm\u901a\u9053<\/td>\nRS-485, Wi-Fi<\/td>\n<\/tr>\n
      Kanomax APSS-3000<\/td>\nKanomax Japan<\/td>\n\u53cc\u675f\u6fc0\u5149\u6563\u5c04<\/td>\n0.1\u20135.0 \u03bcm<\/td>\nUSB, SD\u5361\u5b58\u50a8<\/td>\n<\/tr>\n
      \u8d5b\u9ed8\u98deAQMesh PM0.1<\/td>\nThermo Fisher<\/td>\n\u03b2\u5c04\u7ebf\u5438\u6536+\u5149\u6563\u5c04\u878d\u5408\u7b97\u6cd5<\/td>\n0.05\u20130.3 \u03bcm<\/td>\n4G\/NB-IoT\u8fdc\u7a0b\u4f20\u8f93<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

      \u8fd9\u4e9b\u4f20\u611f\u5668\u901a\u5e38\u5e03\u7f6e\u5728\u5173\u952e\u5de5\u827a\u8bbe\u5907\u4e0a\u65b9\u3001FFU\u51fa\u98ce\u53e3\u4e0b\u65b9\u53ca\u4eba\u5458\u64cd\u4f5c\u533a\uff0c\u5b9e\u73b0\u6bcf\u5206\u949f\u7ea7\u7684\u6570\u636e\u91c7\u96c6\u4e0e\u5f02\u5e38\u62a5\u8b66\u3002\u53f0\u79ef\u7535\u5728\u51763nm\u751f\u4ea7\u7ebf\u4e2d\u5df2\u5b9e\u73b0\u6bcf20\u5e73\u65b9\u7c73\u5e03\u8bbe\u4e00\u4e2aPM0.1\u76d1\u6d4b\u70b9\uff0c\u6784\u5efa\u4e86\u8986\u76d6\u9762\u79ef\u8fbe10\u4e07\u5e73\u65b9\u7c73\u7684\u667a\u80fd\u76d1\u63a7\u5e73\u53f0\u3002<\/p>\n

      \n

      \u516d\u3001\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u4e0e\u6280\u672f\u521b\u65b0<\/h2>\n

      6.1 \u56fd\u5916\u524d\u6cbf\u6280\u672f\u52a8\u6001<\/h3>\n
        \n
      • \u7f8e\u56fd\u80fd\u6e90\u90e8\u52b3\u4f26\u65af\u4f2f\u514b\u5229\u56fd\u5bb6\u5b9e\u9a8c\u5ba4\uff08LBNL\uff09<\/strong>\u4e8e2023\u5e74\u63d0\u51fa\u201c\u7eb3\u7c73\u7ea4\u7ef4\u68af\u5ea6\u7ed3\u6784\u8fc7\u6ee4\u4ecb\u8d28\u201d\uff0c\u91c7\u7528\u9759\u7535\u7eba\u4e1d\u6280\u672f\u5236\u5907\u591a\u5c42\u805a\u4e19\u70ef\/\u78b3\u7eb3\u7c73\u7ba1\u590d\u5408\u819c\uff0c\u4f7fPM0.1\u8fc7\u6ee4\u6548\u7387\u63d0\u5347\u81f399.99995%\uff0c\u540c\u65f6\u538b\u964d\u4f4e\u4e8e200Pa\uff08Nature Materials, 2023\uff09\u3002<\/li>\n
      • \u5fb7\u56fd\u5f17\u52b3\u6069\u970d\u592b\u7814\u7a76\u6240\uff08Fraunhofer IBP\uff09<\/strong>\u5f00\u53d1\u51fa\u5e26\u6709\u4e3b\u52a8\u7535\u8377\u589e\u5f3a\u529f\u80fd\u7684\u201cSmart ULPA\u201d\uff0c\u53ef\u901a\u8fc7\u65bd\u52a0\u4f4e\u7535\u538b\uff08<5kV\uff09\u4f7f\u4ecb\u8d28\u8868\u9762\u6301\u7eed\u5e26\u7535\uff0c\u663e\u8457\u63d0\u9ad8\u5bf9\u4e2d\u6027\u8d85\u7ec6\u9897\u7c92\u7684\u6355\u83b7\u7387\uff08Journal of Aerosol Science, 2022\uff09\u3002<\/li>\n
      • \u65e5\u672c\u65e5\u4e1c\u7535\u5de5\uff08Nitto Denko\uff09<\/strong>\u63a8\u51fa\u201cSelf-Cleaning ULPA\u201d\uff0c\u96c6\u6210\u5149\u50ac\u5316TiO\u2082\u6d82\u5c42\uff0c\u53ef\u5728\u7d2b\u5916\u7167\u5c04\u4e0b\u964d\u89e3\u9644\u7740\u7684\u6709\u673a\u6c61\u67d3\u7269\uff0c\u5ef6\u957f\u4f7f\u7528\u5bff\u547d\u8fbe30%\u4ee5\u4e0a\uff08IEEE Semiconductor Manufacturing Conference, 2023\uff09\u3002<\/li>\n<\/ul>\n

        6.2 \u56fd\u5185\u79d1\u7814\u6210\u679c\u4e0e\u4ea7\u4e1a\u5316\u8fdb\u5c55<\/h3>\n
          \n
        • \u6e05\u534e\u5927\u5b66\u73af\u5883\u5b66\u9662<\/strong>\u5f20\u5f6d\u4e49\u6559\u6388\u56e2\u961f\u7814\u53d1\u51fa\u57fa\u4e8e\u77f3\u58a8\u70ef\u6c27\u5316\u7269\uff08GO\uff09\u4fee\u9970\u7684\u7194\u55b7\u975e\u7ec7\u9020\u5e03\uff0c\u5b9e\u9a8c\u8bc1\u660e\u57280.1\u03bcm\u7c92\u5f84\u4e0b\u8fc7\u6ee4\u6548\u7387\u8fbe99.9998%\uff0c\u4e14\u6c34\u6d17\u540e\u6027\u80fd\u6062\u590d\u7387\u8fbe95%\uff08\u300a\u73af\u5883\u79d1\u5b66\u300b2023\u5e74\u7b2c4\u671f\uff09\u3002<\/li>\n
        • \u4e2d\u79d1\u9662\u8fc7\u7a0b\u5de5\u7a0b\u7814\u7a76\u6240<\/strong>\u5f00\u53d1\u51fa\u201c\u4e09\u7ef4\u4eff\u751f\u8702\u7a9d\u72b6\u8fc7\u6ee4\u7ed3\u6784\u201d\uff0c\u6a21\u4eff\u6606\u866b\u6c14\u7ba1\u5206\u652f\u5f62\u6001\uff0c\u5927\u5e45\u63d0\u5347\u5355\u4f4d\u4f53\u79ef\u5185\u7684\u6709\u6548\u8fc7\u6ee4\u9762\u79ef\uff0c\u5df2\u5728\u4e2d\u82af\u5317\u65b912\u82f1\u5bf8\u5382\u8bd5\u70b9\u5e94\u7528\u3002<\/li>\n
        • \u534e\u4e3a\u677e\u5c71\u6e56\u5b9e\u9a8c\u5ba4<\/strong>\u8054\u5408\u4e1c\u839e\u7406\u5de5\u5b66\u9662\u5efa\u6210\u56fd\u5185\u9996\u6761\u201cPM0.1\u53ef\u63a7\u6a21\u62df\u6d4b\u8bd5\u5e73\u53f0\u201d\uff0c\u53ef\u7cbe\u786e\u751f\u62100.05\u20130.15\u03bcm\u5355\u5206\u6563\u6c14\u6eb6\u80f6\uff0c\u7528\u4e8e\u8bc4\u4f30\u65b0\u578b\u8fc7\u6ee4\u6750\u6599\u7684\u771f\u5b9e\u6548\u80fd\u3002<\/li>\n<\/ul>\n

          \u6b64\u5916\uff0c\u4e2d\u56fd\u6807\u51c6\u5316\u7814\u7a76\u9662\u6b63\u5728\u7275\u5934\u5236\u5b9a\u300a\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u7528\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u6280\u672f\u89c4\u8303\u300b\uff08\u8ba1\u5212\u53f7\uff1a20231267-T-604\uff09\uff0c\u6709\u671b\u586b\u8865\u6211\u56fd\u5728\u8be5\u9886\u57df\u9ad8\u7aef\u4ea7\u54c1\u6807\u51c6\u7684\u7a7a\u767d\u3002<\/p>\n

          \n

          \u4e03\u3001\u5b9e\u9645\u5e94\u7528\u6848\u4f8b\u5206\u6790<\/h2>\n

          \u6848\u4f8b\u4e00\uff1a\u4e2d\u82af\u56fd\u9645\u5317\u4eacFab B12\u9879\u76ee<\/h3>\n
            \n
          • \u5de5\u827a\u8282\u70b9<\/strong>\uff1a14nm Logic + 28nm HKMG<\/li>\n
          • \u6d01\u51c0\u5ba4\u9762\u79ef<\/strong>\uff1a8.5\u4e07\u5e73\u65b9\u7c73<\/li>\n
          • FFU\u6570\u91cf<\/strong>\uff1a\u7ea618,000\u53f0<\/li>\n
          • \u8fc7\u6ee4\u65b9\u6848<\/strong>\uff1a\u5168\u90e8\u91c7\u7528U16\u7b49\u7ea7ULPA\uff08\u82cf\u5dde\u5b89\u6cf0AT-ULPA-90\uff09<\/li>\n
          • PM0.1\u63a7\u5236\u6548\u679c<\/strong>\uff1a\n
              \n
            • \u65e5\u5e38\u80cc\u666f\u6d53\u5ea6\uff1a<0.0008 particles\/L\uff08\u22650.1\u03bcm\uff09<\/li>\n
            • \u5e74\u5747\u8bbe\u5907\u6545\u969c\u7387\u4e0b\u964d22%<\/li>\n
            • \u5149\u523b\u5de5\u5e8f\u826f\u7387\u63d0\u53471.3\u4e2a\u767e\u5206\u70b9<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n

              \u8be5\u9879\u76ee\u901a\u8fc7\u5f15\u5165\u201c\u8fc7\u6ee4\u5668\u751f\u547d\u5468\u671f\u7ba1\u7406\u7cfb\u7edf\u201d\uff08FLMS\uff09\uff0c\u5b9e\u65f6\u76d1\u63a7\u6bcf\u53f0FFU\u7684\u538b\u5dee\u3001\u7d2f\u8ba1\u98ce\u91cf\u4e0e\u9884\u6d4b\u5269\u4f59\u5bff\u547d\uff0c\u5b9e\u73b0\u4e86\u4ece\u88ab\u52a8\u66f4\u6362\u5230\u4e3b\u52a8\u8fd0\u7ef4\u7684\u8f6c\u53d8\u3002<\/p>\n

              \u6848\u4f8b\u4e8c\uff1aSK\u6d77\u529b\u58eb\u65e0\u9521M8\u5de5\u5382\u6269\u4ea7\u5de5\u7a0b<\/h3>\n
                \n
              • \u6295\u8d44\u89c4\u6a21<\/strong>\uff1a36\u4ebf\u7f8e\u5143<\/li>\n
              • \u6d01\u51c0\u7b49\u7ea7\u8981\u6c42<\/strong>\uff1aISO Class 1\uff08\u5c40\u90e8Class 0.1\uff09<\/li>\n
              • \u5173\u952e\u63aa\u65bd<\/strong>\uff1a\n
                  \n
                • \u91c7\u7528Donaldson UltiGuard XA\uff08U17\uff09\u4f5c\u4e3a\u4e3b\u8fc7\u6ee4\u5355\u5143\uff1b<\/li>\n
                • \u914d\u7f6eTSI P-Trak 9003\u8fdb\u884c\u5168\u5929\u5019PM0.1\u76d1\u6d4b\uff1b<\/li>\n
                • \u8bbe\u7f6e\u53cc\u5c42\u6c14\u95f8\u7f13\u51b2\u95f4\uff0c\u9632\u6b62\u5f00\u95e8\u77ac\u95f4\u6c61\u67d3\u5165\u4fb5\uff1b<\/li>\n<\/ul>\n<\/li>\n
                • \u8fd0\u884c\u6570\u636e<\/strong>\uff1a\n
                    \n
                  • MPPS\u7a7f\u900f\u7387\u5b9e\u6d4b\u503c\uff1a0.00008%<\/li>\n
                  • \u5e74\u5747\u8fc7\u6ee4\u5668\u66f4\u6362\u6210\u672c\u8282\u7ea617%<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n
                    \n

                    \u516b\u3001\u672a\u6765\u53d1\u5c55\u8d8b\u52bf\u5c55\u671b<\/h2>\n

                    \u968f\u7740EUV\u5149\u523b\u30013D NAND\u5806\u53e0\u3001GAA\u6676\u4f53\u7ba1\u7b49\u65b0\u6280\u672f\u5e7f\u6cdb\u5e94\u7528\uff0c\u534a\u5bfc\u4f53\u5236\u9020\u5bf9PM0.1\u7684\u5bb9\u5fcd\u5ea6\u5c06\u8fdb\u4e00\u6b65\u8d8b\u8fd1\u4e8e\u96f6\u3002\u672a\u6765\u7684\u7a7a\u6c14\u8fc7\u6ee4\u6280\u672f\u5c06\u671d\u7740\u4ee5\u4e0b\u51e0\u4e2a\u65b9\u5411\u6f14\u8fdb\uff1a<\/p>\n

                      \n
                    1. \u667a\u80fd\u5316<\/strong>\uff1a\u96c6\u6210IoT\u4f20\u611f\u5668\u4e0eAI\u9884\u6d4b\u6a21\u578b\uff0c\u5b9e\u73b0\u8fc7\u6ee4\u5668\u5065\u5eb7\u72b6\u6001\u81ea\u8bca\u65ad\uff1b<\/li>\n
                    2. \u4f4e\u78b3\u5316<\/strong>\uff1a\u5f00\u53d1\u4f4e\u963b\u9ad8\u6027\u80fd\u4ecb\u8d28\uff0c\u964d\u4f4eFFU\u80fd\u8017\uff08\u76ee\u6807<150W\/unit\uff09\uff1b<\/li>\n
                    3. \u591a\u529f\u80fd\u5316<\/strong>\uff1a\u878d\u5408VOCs\u5206\u89e3\u3001\u5fae\u751f\u7269\u706d\u6d3b\u3001\u9759\u7535\u6d88\u9664\u7b49\u529f\u80fd\u4e8e\u4e00\u4f53\uff1b<\/li>\n
                    4. \u53ef\u518d\u751f\u5316<\/strong>\uff1a\u63a2\u7d22\u53ef\u6c34\u6d17\u3001\u53ef\u56de\u6536\u7684\u7eff\u8272\u8fc7\u6ee4\u6750\u6599\uff0c\u51cf\u5c11\u5e9f\u5f03\u7269\u6392\u653e\uff1b<\/li>\n
                    5. \u5fae\u578b\u5316<\/strong>\uff1a\u4e3aChiplet\u5c01\u88c5\u3001\u5148\u8fdb\u5c01\u88c5\uff08Fan-Out, 2.5D\/3D\uff09\u63d0\u4f9b\u5c40\u90e8\u8d85\u51c0\u5fae\u73af\u5883\u6a21\u5757\u3002<\/li>\n<\/ol>\n

                      \u4e0e\u6b64\u540c\u65f6\uff0c\u4e2d\u56fd\u6b63\u52a0\u5feb\u6784\u5efa\u81ea\u4e3b\u53ef\u63a7\u7684\u9ad8\u7aef\u8fc7\u6ee4\u4ea7\u4e1a\u94fe\uff0c\u9884\u8ba1\u52302027\u5e74\uff0c\u56fd\u4ea7ULPA\u5728\u65b0\u5efa\u6676\u5706\u5382\u4e2d\u7684\u5e02\u573a\u5360\u6709\u7387\u6709\u671b\u7a81\u783450%\uff0c\u5f7b\u5e95\u6253\u7834\u957f\u671f\u4f9d\u8d56\u8fdb\u53e3\u7684\u5c40\u9762\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

                      \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684PM0.1\u63a7\u5236\u6280\u672f \u5f15\u8a00 \u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u82af\u7247\u5236\u7a0b\u8282\u70b9\u5df2\u8fdb\u51655nm\u30013nm\u751a\u81f3\u66f4\u5c0f\u5c3a\u5ea6\u3002\u5728\u6b64\u80cc\u666f\u4e0b\uff0c\u5fae\u7c92\u6c61\u67d3\uff08Particulate Matter, PM\uff09\u5bf9\u751f\u4ea7\u826f\u7387\u7684\u5f71\u54cd\u6108\u53d1\u663e\u8457\uff0c\u5c24\u5176\u662f\u7c92\u5f84\u5c0f\u4e8e0.1\u5fae\u7c73\uff08\u5373PM0.1\uff09\u7684\u8d85\u7ec6\u9897\u7c92\u7269\uff0c\u5df2\u6210\u4e3a\u5236\u7ea6\u5148\u8fdb\u5236\u7a0b\u7a33\u5b9a\u6027\u7684\u5173\u952e\u56e0\u7d20\u4e4b\u4e00\u3002\u4e3a\u786e\u4fdd\u6676\u5706\u8868\u9762\u4e0d\u53d7\u6c61\u67d3\uff0c\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u5fc5…<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-17250","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/17250","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=17250"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/17250\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=17250"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=17250"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=17250"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}