{"id":17174,"date":"2025-10-10T14:10:38","date_gmt":"2025-10-10T06:10:38","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=17174"},"modified":"2025-10-10T14:10:38","modified_gmt":"2025-10-10T06:10:38","slug":"%e6%97%a0%e9%9a%94%e6%9d%bf%e9%ab%98%e6%95%88%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e6%b4%81%e5%87%80%e5%ae%a4%e4%b8%ad%e7%9a%84%e5%ba%94%e7%94%a8%e4%b8%8e%e6%b0%94%e6%b5%81","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=17174","title":{"rendered":"\u65e0\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u4e0e\u6c14\u6d41\u4f18\u5316"},"content":{"rendered":"<h1>\u65e0\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u4e0e\u6c14\u6d41\u4f18\u5316<\/h1>\n<h2>\u6982\u8ff0<\/h2>\n<p>\u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u6280\u672f\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u6d01\u51c0\u5ea6\u7684\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u73b0\u4ee3\u96c6\u6210\u7535\u8def\uff08IC\uff09\u5236\u9020\u5de5\u827a\u5df2\u8fdb\u5165\u7eb3\u7c73\u7ea7\u751a\u81f3\u4e9a\u7eb3\u7c73\u7ea7\u8282\u70b9\uff0c\u5fae\u5c0f\u9897\u7c92\u6c61\u67d3\u53ef\u80fd\u5bfc\u81f4\u82af\u7247\u826f\u7387\u663e\u8457\u4e0b\u964d\u3002\u4e3a\u4fdd\u969c\u751f\u4ea7\u8fc7\u7a0b\u7684\u7a33\u5b9a\u6027\u4e0e\u4ea7\u54c1\u54c1\u8d28\uff0c\u6d01\u51c0\u5ba4\u6210\u4e3a\u534a\u5bfc\u4f53\u5de5\u5382\u4e0d\u53ef\u6216\u7f3a\u7684\u6838\u5fc3\u8bbe\u65bd\u3002\u5176\u4e2d\uff0c\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf\u4f5c\u4e3a\u7ef4\u6301\u6d01\u51c0\u73af\u5883\u7684\u5173\u952e\u73af\u8282\uff0c\u5176\u6027\u80fd\u76f4\u63a5\u51b3\u5b9a\u6d01\u51c0\u5ba4\u5185\u5fae\u7c92\u6d53\u5ea6\u3001\u6e29\u6e7f\u5ea6\u63a7\u5236\u53ca\u6c14\u6d41\u7ec4\u7ec7\u6548\u679c\u3002<\/p>\n<p>\u5728\u5404\u7c7b\u7a7a\u6c14\u8fc7\u6ee4\u8bbe\u5907\u4e2d\uff0c<strong>\u65e0\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668<\/strong>\uff08Ultra-Low Penetration Air Filter, ULPA \u6216 High-Efficiency Particulate Air Filter, HEPA\uff09\u56e0\u5176\u9ad8\u6548\u7387\u3001\u4f4e\u963b\u529b\u3001\u7d27\u51d1\u7ed3\u6784\u7b49\u4f18\u52bf\uff0c\u5728\u9ad8\u7aef\u6d01\u51c0\u5ba4\u5c24\u5176\u662f\u534a\u5bfc\u4f53\u884c\u4e1a\u5e7f\u6cdb\u5e94\u7528\u3002\u672c\u6587\u5c06\u6df1\u5165\u63a2\u8ba8\u65e0\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u6280\u672f\u539f\u7406\u3001\u5173\u952e\u53c2\u6570\u3001\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5177\u4f53\u5e94\u7528\u65b9\u5f0f\uff0c\u5e76\u7ed3\u5408\u56fd\u5185\u5916\u7814\u7a76\u6210\u679c\u5206\u6790\u5176\u5bf9\u6c14\u6d41\u7ec4\u7ec7\u7684\u4f18\u5316\u4f5c\u7528\uff0c\u65e8\u5728\u4e3a\u6d01\u51c0\u5ba4\u8bbe\u8ba1\u4e0e\u8fd0\u884c\u63d0\u4f9b\u7406\u8bba\u652f\u6301\u4e0e\u5b9e\u8df5\u6307\u5bfc\u3002<\/p>\n<hr \/>\n<h2>1. \u65e0\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u4e0e\u7ed3\u6784\u7279\u70b9<\/h2>\n<h3>1.1 \u5b9a\u4e49\u4e0e\u5206\u7c7b<\/h3>\n<p>\u6839\u636e\u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6\u300aGB\/T 13554-2020 \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b\u548c\u56fd\u9645\u6807\u51c6ISO 29463\uff0c\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u6309\u8fc7\u6ee4\u6548\u7387\u5206\u4e3aHEPA\u548cULPA\u4e24\u7c7b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u8fc7\u6ee4\u7b49\u7ea7<\/th>\n<th>\u6807\u51c6\u4f9d\u636e<\/th>\n<th>\u5bf90.3\u03bcm\u9897\u7c92\u7684\u8fc7\u6ee4\u6548\u7387<\/th>\n<th>\u5e38\u89c1\u5e94\u7528\u573a\u666f<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>HEPA H13<\/td>\n<td>GB\/T 13554 \/ ISO 29463<\/td>\n<td>\u226599.95%<\/td>\n<td>\u533b\u836f\u3001\u751f\u7269\u5b9e\u9a8c\u5ba4<\/td>\n<\/tr>\n<tr>\n<td>HEPA H14<\/td>\n<td>GB\/T 13554 \/ ISO 29463<\/td>\n<td>\u226599.995%<\/td>\n<td>\u534a\u5bfc\u4f53\u524d\u6bb5\u5236\u7a0b<\/td>\n<\/tr>\n<tr>\n<td>ULPA U15<\/td>\n<td>GB\/T 13554 \/ ISO 29463<\/td>\n<td>\u226599.9995%<\/td>\n<td>EUV\u5149\u523b\u3001\u5148\u8fdb\u5c01\u88c5<\/td>\n<\/tr>\n<tr>\n<td>ULPA U16<\/td>\n<td>GB\/T 13554 \/ ISO 29463<\/td>\n<td>\u226599.99995%<\/td>\n<td>7nm\u4ee5\u4e0b\u5236\u7a0b<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u65e0\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u662f\u6307\u91c7\u7528\u8fde\u7eed\u6298\u53e0\u6ee4\u7eb8\u3001\u4ee5\u70ed\u7194\u80f6\u6216\u805a\u6c28\u916f\u5bc6\u5c01\u56fa\u5b9a\u4e8e\u91d1\u5c5e\u6216\u5851\u6599\u5916\u6846\u5185\uff0c\u4e14<strong>\u4e0d\u4f7f\u7528\u6ce2\u5f62\u94dd\u7b94\u6216\u7eb8\u5236\u5206\u9694\u7269<\/strong>\u7684\u9ad8\u6548\u8fc7\u6ee4\u88c5\u7f6e\u3002\u76f8\u6bd4\u4f20\u7edf\u6709\u9694\u677f\u8fc7\u6ee4\u5668\uff0c\u5176\u5177\u6709\u4f53\u79ef\u5c0f\u3001\u91cd\u91cf\u8f7b\u3001\u98ce\u963b\u4f4e\u3001\u5bb9\u5c18\u91cf\u9ad8\u7b49\u4f18\u70b9\u3002<\/p>\n<h3>1.2 \u7ed3\u6784\u7ec4\u6210<\/h3>\n<p>\u5178\u578b\u7684\u65e0\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u7531\u4ee5\u4e0b\u51e0\u4e2a\u90e8\u5206\u6784\u6210\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u7ec4\u6210\u90e8\u4ef6<\/th>\n<th>\u6750\u6599<\/th>\n<th>\u529f\u80fd\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6ee4\u6599<\/td>\n<td>\u8d85\u7ec6\u73bb\u7483\u7ea4\u7ef4\uff08\u76f4\u5f840.2~0.5\u03bcm\uff09\uff0c\u7ecf\u9a7b\u6781\u5904\u7406<\/td>\n<td>\u5b9e\u73b0\u5e03\u6717\u6269\u6563\u3001\u62e6\u622a\u3001\u60ef\u6027\u78b0\u649e\u7b49\u591a\u91cd\u8fc7\u6ee4\u673a\u5236<\/td>\n<\/tr>\n<tr>\n<td>\u5206\u9694\u5c42<\/td>\n<td>\u70ed\u7194\u80f6\u70b9\u72b6\u652f\u6491\u6216PP\/PE\u7f51\u683c<\/td>\n<td>\u66ff\u4ee3\u4f20\u7edf\u9694\u677f\uff0c\u4fdd\u6301\u6ee4\u7eb8\u95f4\u8ddd\uff0c\u9632\u6b62\u584c\u9677<\/td>\n<\/tr>\n<tr>\n<td>\u5916\u6846<\/td>\n<td>\u94dd\u5408\u91d1\u3001\u9540\u950c\u94a2\u677f\u6216ABS\u5de5\u7a0b\u5851\u6599<\/td>\n<td>\u63d0\u4f9b\u673a\u68b0\u5f3a\u5ea6\uff0c\u4fbf\u4e8e\u5b89\u88c5\u5bc6\u5c01<\/td>\n<\/tr>\n<tr>\n<td>\u5bc6\u5c01\u80f6<\/td>\n<td>\u805a\u6c28\u916f\u6216\u7845\u916e\u80f6<\/td>\n<td>\u786e\u4fdd\u8fb9\u6846\u4e0e\u6ee4\u6599\u4e4b\u95f4\u65e0\u6cc4\u6f0f<\/td>\n<\/tr>\n<tr>\n<td>\u62a4\u7f51<\/td>\n<td>\u4e0d\u9508\u94a2\u4e1d\u7f51\u6216\u51b2\u5b54\u94dd\u677f<\/td>\n<td>\u4fdd\u62a4\u6ee4\u6599\u514d\u53d7\u6c14\u6d41\u51b2\u51fb<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u636e\u7f8e\u56fdASHRAE\uff08American Society of Heating, Refrigerating and Air-Conditioning Engineers\uff09\u624b\u518c\u8bb0\u8f7d\uff0c\u65e0\u9694\u677f\u8bbe\u8ba1\u53ef\u4f7f\u5355\u4f4d\u4f53\u79ef\u5185\u7684\u6709\u6548\u8fc7\u6ee4\u9762\u79ef\u63d0\u534730%\u4ee5\u4e0a\uff0c\u540c\u65f6\u964d\u4f4e\u521d\u59cb\u538b\u964d\u7ea620%-40%\uff0c\u663e\u8457\u63d0\u9ad8\u80fd\u6548\u6bd4\u3002<\/p>\n<hr \/>\n<h2>2. \u5173\u952e\u6027\u80fd\u53c2\u6570\u4e0e\u6d4b\u8bd5\u65b9\u6cd5<\/h2>\n<p>\u4e3a\u786e\u4fdd\u65e0\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u5b9e\u9645\u5e94\u7528\u4e2d\u7684\u53ef\u9760\u6027\uff0c\u9700\u5bf9\u5176\u591a\u9879\u6027\u80fd\u6307\u6807\u8fdb\u884c\u4e25\u683c\u68c0\u6d4b\u3002\u4ee5\u4e0b\u662f\u4e3b\u8981\u6280\u672f\u53c2\u6570\u53ca\u5176\u6d4b\u8bd5\u6807\u51c6\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570\u540d\u79f0<\/th>\n<th>\u5178\u578b\u503c\u8303\u56f4<\/th>\n<th>\u6d4b\u8bd5\u6807\u51c6<\/th>\n<th>\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u989d\u5b9a\u98ce\u91cf\uff08m\u00b3\/h\uff09<\/td>\n<td>800\u20132000\uff08\u6807\u51c6\u5c3a\u5bf8610\u00d7610\u00d790mm\uff09<\/td>\n<td>GB\/T 6165<\/td>\n<td>\u51b3\u5b9a\u5355\u53f0\u5904\u7406\u80fd\u529b<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u59cb\u963b\u529b\uff08Pa\uff09<\/td>\n<td>120\u2013220<\/td>\n<td>GB\/T 6165<\/td>\n<td>\u5f71\u54cd\u98ce\u673a\u80fd\u8017\uff0c\u8d8a\u4f4e\u8d8a\u597d<\/td>\n<\/tr>\n<tr>\n<td>\u989d\u5b9a\u6548\u7387\uff080.3\u03bcm\uff09<\/td>\n<td>H14: \u226599.995%<\/td>\n<td>IEST-RP-CC001.5<\/td>\n<td>\u4f7f\u7528DOP\u6216PAO\u53d1\u751f\u5668\u6d4b\u8bd5<\/td>\n<\/tr>\n<tr>\n<td>\u626b\u63cf\u68c0\u6f0f\u6cc4\u6f0f\u7387<\/td>\n<td>\u22640.01%<\/td>\n<td>ISO 29463-5<\/td>\n<td>\u5c40\u90e8\u626b\u63cf\u786e\u8ba4\u65e0\u7a7f\u5b54\u6216\u5bc6\u5c01\u7f3a\u9677<\/td>\n<\/tr>\n<tr>\n<td>\u5bb9\u5c18\u91cf\uff08g\/m\u00b2\uff09<\/td>\n<td>800\u20131200<\/td>\n<td>JIS Z 8122<\/td>\n<td>\u8868\u5f81\u4f7f\u7528\u5bff\u547d<\/td>\n<\/tr>\n<tr>\n<td>\u9632\u706b\u7b49\u7ea7<\/td>\n<td>UL900 Class 1 \u6216 GB 8624 B1\u7ea7<\/td>\n<td>UL 900 \/ GB 8624<\/td>\n<td>\u6ee1\u8db3\u5efa\u7b51\u6d88\u9632\u8981\u6c42<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u503c\u5f97\u4e00\u63d0\u7684\u662f\uff0c\u6e05\u534e\u5927\u5b66\u5efa\u7b51\u6280\u672f\u79d1\u5b66\u7cfb\u7684\u7814\u7a76\u8868\u660e\uff0c\u5728\u76f8\u540c\u98ce\u901f\u6761\u4ef6\u4e0b\uff0c\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\u7684\u963b\u529b\u589e\u957f\u901f\u7387\u6bd4\u6709\u9694\u677f\u7c7b\u578b\u616215%-25%\uff0c\u8fd9\u5f52\u56e0\u4e8e\u66f4\u5747\u5300\u7684\u6c14\u6d41\u5206\u5e03\u548c\u66f4\u5927\u7684\u6709\u6548\u901a\u91cf\u9762\u79ef\u3002<\/p>\n<p>\u6b64\u5916\uff0c\u65e5\u672cNippon Muki\u516c\u53f8\u53d1\u5e03\u7684\u5b9e\u6d4b\u6570\u636e\u663e\u793a\uff0c\u4e00\u6b3eU15\u7ea7\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\u5728\u989d\u5b9a\u98ce\u91cf1080 m\u00b3\/h\u4e0b\uff0c\u521d\u59cb\u538b\u964d\u4ec5\u4e3a165 Pa\uff0c\u800c\u540c\u7b49\u6027\u80fd\u7684\u6709\u9694\u677f\u4ea7\u54c1\u901a\u5e38\u5728240 Pa\u4ee5\u4e0a\uff0c\u4f53\u73b0\u51fa\u660e\u663e\u7684\u8282\u80fd\u6f5c\u529b\u3002<\/p>\n<hr \/>\n<h2>3. \u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5178\u578b\u5e94\u7528\u573a\u666f<\/h2>\n<h3>3.1 \u6d01\u51c0\u5ba4\u7b49\u7ea7\u8981\u6c42<\/h3>\n<p>\u6839\u636eISO 14644-1\u6807\u51c6\uff0c\u534a\u5bfc\u4f53\u5236\u9020\u4e0d\u540c\u5de5\u5e8f\u5bf9\u5e94\u4e0d\u540c\u7684\u7a7a\u6c14\u6d01\u51c0\u5ea6\u7b49\u7ea7\u3002\u4f8b\u5982\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5de5\u827a\u9636\u6bb5<\/th>\n<th>\u6d01\u51c0\u5ea6\u7b49\u7ea7\uff08ISO Class\uff09<\/th>\n<th>\u6700\u5927\u5141\u8bb8\u7c92\u5b50\u6570\uff08\u22650.1\u03bcm\uff09<\/th>\n<th>\u6240\u9700\u8fc7\u6ee4\u5668\u7ea7\u522b<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5149\u523b\uff08Photolithography\uff09<\/td>\n<td>ISO 3\u20134<\/td>\n<td>\u22641,000 particles\/m\u00b3<\/td>\n<td>ULPA U15\/U16<\/td>\n<\/tr>\n<tr>\n<td>\u8584\u819c\u6c89\u79ef\uff08CVD\/PVD\uff09<\/td>\n<td>ISO 4\u20135<\/td>\n<td>\u226410,000 particles\/m\u00b3<\/td>\n<td>HEPA H14 \/ ULPA U15<\/td>\n<\/tr>\n<tr>\n<td>\u523b\u8680\uff08Etching\uff09<\/td>\n<td>ISO 5\u20136<\/td>\n<td>\u2264100,000 particles\/m\u00b3<\/td>\n<td>HEPA H13\/H14<\/td>\n<\/tr>\n<tr>\n<td>\u5c01\u88c5\u6d4b\u8bd5<\/td>\n<td>ISO 6\u20137<\/td>\n<td>\u22641,000,000 particles\/m\u00b3<\/td>\n<td>HEPA H13<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u7531\u6b64\u53ef\u89c1\uff0c\u524d\u9053\u5de5\u827a\u5bf9\u7a7a\u6c14\u8d28\u91cf\u8981\u6c42\u6781\u9ad8\uff0c\u5fc5\u987b\u4f9d\u8d56ULPA\u7ea7\u65e0\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u5b9e\u73b0\u8d85\u4f4e\u7a7f\u900f\u7387\u3002<\/p>\n<h3>3.2 \u5b89\u88c5\u5f62\u5f0f\u4e0e\u5e03\u5c40\u7b56\u7565<\/h3>\n<p>\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\uff0c\u65e0\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u5e38\u4ee5\u4ee5\u4e0b\u51e0\u79cd\u65b9\u5f0f\u96c6\u6210\u5230\u7a7a\u8c03\u7cfb\u7edf\u4e2d\uff1a<\/p>\n<h4>\uff081\uff09\u9876\u68da\u6ee1\u5e03\u5f0fFFU\uff08Fan Filter Unit\uff09<\/h4>\n<p>FFU\u662f\u5f53\u524d\u4e3b\u6d41\u914d\u7f6e\uff0c\u5373\u5c06\u98ce\u673a\u4e0e\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\u4e00\u4f53\u5316\u96c6\u6210\u4e8e\u5929\u82b1\u677f\u6a21\u5757\u4e2d\u3002\u6bcf\u4e2aFFU\u72ec\u7acb\u8fd0\u884c\uff0c\u5f62\u6210\u5782\u76f4\u5355\u5411\u6d41\uff08Vertical Unidirectional Flow, VUDF\uff09\uff0c\u4fdd\u8bc1\u5de5\u4f5c\u533a\u6c14\u6d41\u7a33\u5b9a\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>FFU\u89c4\u683c\u53c2\u6570<\/th>\n<th>\u6570\u503c\u793a\u4f8b<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5c3a\u5bf8\uff08mm\uff09<\/td>\n<td>1219\u00d7609\u00d7305<\/td>\n<\/tr>\n<tr>\n<td>\u98ce\u91cf\uff08m\u00b3\/h\uff09<\/td>\n<td>900\u20131300<\/td>\n<\/tr>\n<tr>\n<td>\u566a\u97f3\uff08dBA\uff09<\/td>\n<td>&lt;55<\/td>\n<\/tr>\n<tr>\n<td>\u529f\u7387\uff08W\uff09<\/td>\n<td>180\u2013250<\/td>\n<\/tr>\n<tr>\n<td>\u63a7\u5236\u65b9\u5f0f<\/td>\n<td>RS485\/Modbus\u8054\u7f51\u8c03\u901f<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u97e9\u56fd\u4e09\u661f\u7535\u5b50\u5728\u5176\u5e73\u6cfdP3\u6676\u5706\u5382\u4e2d\u91c7\u7528\u4e86\u8d85\u8fc720,000\u53f0ULPA\u7ea7FFU\uff0c\u8986\u76d6\u6574\u4e2a8\u82f1\u5bf8EUV\u5149\u523b\u533a\u57df\uff0c\u5b9e\u73b0\u4e86ISO Class 3\u7ea7\u522b\u7684\u6d01\u51c0\u73af\u5883\u3002<\/p>\n<h4>\uff082\uff09\u96c6\u4e2d\u9001\u98ce+\u9759\u538b\u7bb1+\u9ad8\u6548\u9001\u98ce\u53e3<\/h4>\n<p>\u8be5\u6a21\u5f0f\u9002\u7528\u4e8e\u5927\u578b\u6d01\u51c0\u5382\u623f\uff0c\u901a\u8fc7\u4e2d\u592e\u7a7a\u8c03\u7cfb\u7edf\u96c6\u4e2d\u5904\u7406\u7a7a\u6c14\u540e\uff0c\u7ecf\u9759\u538b\u7bb1\u5747\u538b\uff0c\u518d\u7531\u9876\u90e8\u5b89\u88c5\u7684\u65e0\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u9001\u51fa\u3002\u6b64\u65b9\u6848\u521d\u6295\u8d44\u8f83\u4f4e\uff0c\u4f46\u7075\u6d3b\u6027\u8f83\u5dee\u3002<\/p>\n<h4>\uff083\uff09\u5c40\u90e8\u51c0\u5316\u8bbe\u5907\uff08Mini Environment\uff09<\/h4>\n<p>\u5728\u5173\u952e\u5de5\u827a\u8bbe\u5907\uff08\u5982\u5149\u523b\u673a\u3001\u79bb\u5b50\u6ce8\u5165\u673a\uff09\u5468\u56f4\u8bbe\u7f6e\u5fae\u73af\u5883\uff08Mini-Environment\uff09\uff0c\u5185\u7f6e\u5c0f\u578b\u65e0\u9694\u677f\u8fc7\u6ee4\u5faa\u73af\u7cfb\u7edf\uff0c\u8fdb\u4e00\u6b65\u63d0\u5347\u5c40\u90e8\u6d01\u51c0\u5ea6\u81f3ISO Class 1\u6c34\u5e73\u3002ASML\u6700\u65b0\u4e00\u4ee3EUV\u5149\u523b\u673a\u5373\u914d\u5907\u6b64\u7c7b\u7cfb\u7edf\uff0c\u786e\u4fdd\u5149\u5b66\u7cfb\u7edf\u4e0d\u53d7\u7eb3\u7c73\u7ea7\u9897\u7c92\u6c61\u67d3\u3002<\/p>\n<hr \/>\n<h2>4. \u6c14\u6d41\u7ec4\u7ec7\u4f18\u5316\u4e0eCFD\u6a21\u62df\u5206\u6790<\/h2>\n<p>\u6d01\u51c0\u5ba4\u5185\u7684\u6c14\u6d41\u7ec4\u7ec7\u76f4\u63a5\u5f71\u54cd\u6c61\u67d3\u7269\u7684\u7a00\u91ca\u4e0e\u6392\u9664\u6548\u7387\u3002\u5408\u7406\u7684\u6c14\u6d41\u8bbe\u8ba1\u5e94\u6ee1\u8db3\u4ee5\u4e0b\u76ee\u6807\uff1a<\/p>\n<ul>\n<li>\u5b9e\u73b0\u7a33\u5b9a\u7684\u5355\u5411\u6d41\u6216\u51c6\u5355\u5411\u6d41\uff1b<\/li>\n<li>\u907f\u514d\u6da1\u6d41\u3001\u6b7b\u89d2\u533a\u57df\uff1b<\/li>\n<li>\u63a7\u5236\u6e29\u5ea6\u573a\u4e0e\u901f\u5ea6\u573a\u5747\u5300\u6027\uff1b<\/li>\n<li>\u6700\u5c0f\u5316\u4eba\u5458\u64cd\u4f5c\u5e26\u6765\u7684\u6270\u52a8\u3002<\/li>\n<\/ul>\n<h3>4.1 \u5355\u5411\u6d41\u6d01\u51c0\u5ba4\u8bbe\u8ba1\u8981\u70b9<\/h3>\n<p>\u5728\u91c7\u7528\u65e0\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u5782\u76f4\u5355\u5411\u6d41\u6d01\u51c0\u5ba4\u4e2d\uff0c\u5e38\u89c1\u8bbe\u8ba1\u53c2\u6570\u5982\u4e0b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u8bbe\u8ba1\u53c2\u6570<\/th>\n<th>\u63a8\u8350\u503c<\/th>\n<th>\u4f9d\u636e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u65ad\u9762\u98ce\u901f\uff08m\/s\uff09<\/td>\n<td>0.3\u20130.5<\/td>\n<td>ISO 14644-4<\/td>\n<\/tr>\n<tr>\n<td>\u6362\u6c14\u6b21\u6570\uff08\u6b21\/h\uff09<\/td>\n<td>400\u2013600<\/td>\n<td>SEMI F21\u6807\u51c6<\/td>\n<\/tr>\n<tr>\n<td>\u5730\u9762\u56de\u98ce\u7387<\/td>\n<td>\u226580%<\/td>\n<td>\u9632\u6b62\u4fa7\u5899\u79ef\u5c18<\/td>\n<\/tr>\n<tr>\n<td>FFU\u8986\u76d6\u7387<\/td>\n<td>\u226585%<\/td>\n<td>\u4fdd\u8bc1\u6c14\u6d41\u5747\u5300\u6027<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u7814\u7a76\u8868\u660e\uff0c\u5f53FFU\u4e4b\u95f4\u7684\u95f4\u8ddd\u8d85\u8fc71.2\u7c73\u65f6\uff0c\u6613\u5728\u4e0b\u65b9\u5f62\u6210\u6c14\u6d41\u201c\u76f2\u533a\u201d\uff0c\u5bfc\u81f4\u5c40\u90e8\u6e4d\u6d41\u589e\u5f3a\u3002\u56e0\u6b64\uff0c\u63a8\u8350\u91c7\u7528\u4ea4\u9519\u6392\u5217\u6216\u589e\u52a0\u8fb9\u7f18\u8865\u507f\u9001\u98ce\u63aa\u65bd\u3002<\/p>\n<h3>4.2 CFD\u6570\u503c\u6a21\u62df\u7684\u5e94\u7528<\/h3>\n<p>\u8ba1\u7b97\u6d41\u4f53\u52a8\u529b\u5b66\uff08Computational Fluid Dynamics, CFD\uff09\u5df2\u6210\u4e3a\u6d01\u51c0\u5ba4\u6c14\u6d41\u4f18\u5316\u7684\u91cd\u8981\u5de5\u5177\u3002\u540c\u6d4e\u5927\u5b66\u6696\u901a\u7a7a\u8c03\u7814\u7a76\u6240\u66fe\u5229\u7528Fluent\u8f6f\u4ef6\u5bf9\u67d012\u82f1\u5bf8\u6676\u5706\u5382\u7684Fab\u8f66\u95f4\u8fdb\u884c\u4e09\u7ef4\u5efa\u6a21\uff0c\u91cd\u70b9\u5206\u6790\u4e0d\u540cFFU\u5e03\u5c40\u4e0b\u7684\u901f\u5ea6\u573a\u5206\u5e03\u3002<\/p>\n<p>\u6a21\u62df\u7ed3\u679c\u663e\u793a\uff1a<\/p>\n<ul>\n<li>\u5f53FFU\u5448\u89c4\u5219\u9635\u5217\u5e03\u7f6e\u65f6\uff0c\u4e2d\u5fc3\u533a\u57df\u98ce\u901f\u53ef\u8fbe0.42 m\/s\uff0c\u504f\u5dee\u5c0f\u4e8e\u00b110%\uff1b<\/li>\n<li>\u82e5\u5b58\u5728\u8bbe\u5907\u906e\u6321\uff08\u5982Litho Track\uff09\uff0c\u4f1a\u5728\u5176\u80cc\u98ce\u9762\u4ea7\u751f\u4f4e\u901f\u533a\uff08&lt;0.15 m\/s\uff09\uff0c\u6ede\u7559\u65f6\u95f4\u5ef6\u957f3\u500d\u4ee5\u4e0a\uff1b<\/li>\n<li>\u5f15\u5165\u4fa7\u58c1\u8f85\u52a9\u9001\u98ce\u540e\uff0c\u6da1\u6d41\u5f3a\u5ea6\u4e0b\u964d\u7ea640%\uff0c\u9897\u7c92\u6c89\u964d\u6982\u7387\u51cf\u5c1160%\u3002<\/li>\n<\/ul>\n<p>\u6b64\u5916\uff0c\u7f8e\u56fd\u4f0a\u5229\u8bfa\u4f0a\u5927\u5b66\u5384\u5df4\u7eb3-\u9999\u69df\u5206\u6821\uff08UIUC\uff09\u56e2\u961f\u63d0\u51fa\u4e00\u79cd\u201c\u52a8\u6001\u6c14\u6d41\u8c03\u63a7\u201d\u7b56\u7565\uff0c\u901a\u8fc7\u5b9e\u65f6\u76d1\u6d4b\u7c92\u5b50\u6d53\u5ea6\u53cd\u9988\u8c03\u8282FFU\u8f6c\u901f\uff0c\u53ef\u5728\u4fdd\u969c\u6d01\u51c0\u5ea6\u524d\u63d0\u4e0b\u8282\u80fd\u8fbe25%\u3002<\/p>\n<h3>4.3 \u6c14\u6d41\u77ed\u8def\u4e0e\u6cc4\u6f0f\u98ce\u9669\u9632\u63a7<\/h3>\n<p>\u5c3d\u7ba1\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\u672c\u8eab\u5bc6\u5c01\u6027\u826f\u597d\uff0c\u4f46\u5728\u5b9e\u9645\u5b89\u88c5\u8fc7\u7a0b\u4e2d\u4ecd\u53ef\u80fd\u51fa\u73b0\u4ee5\u4e0b\u95ee\u9898\uff1a<\/p>\n<ul>\n<li><strong>\u8fb9\u6846\u5bc6\u5c01\u4e0d\u4e25<\/strong>\uff1a\u5bfc\u81f4\u672a\u7ecf\u6ee4\u7a7a\u6c14\u6e17\u5165\uff1b<\/li>\n<li><strong>\u8fc7\u6ee4\u5668\u7834\u635f<\/strong>\uff1a\u8fd0\u8f93\u6216\u66f4\u6362\u8fc7\u7a0b\u4e2d\u5212\u4f24\u6ee4\u6599\uff1b<\/li>\n<li><strong>\u4e0a\u4e0b\u6e38\u538b\u5dee\u8fc7\u5927<\/strong>\uff1a\u5f15\u8d77\u6ee4\u7eb8\u53d8\u5f62\u751a\u81f3\u7834\u88c2\u3002<\/li>\n<\/ul>\n<p>\u4e3a\u6b64\uff0c\u5efa\u8bae\u91c7\u53d6\u4ee5\u4e0b\u63aa\u65bd\uff1a<\/p>\n<ul>\n<li>\u4f7f\u7528\u53cc\u7ec4\u4efd\u805a\u6c28\u916f\u73b0\u573a\u53d1\u6ce1\u5bc6\u5c01\uff1b<\/li>\n<li>\u5b89\u88c5\u524d\u540e\u8fdb\u884cPAO\u626b\u63cf\u68c0\u6f0f\uff1b<\/li>\n<li>\u8bbe\u7f6e\u538b\u5dee\u62a5\u8b66\u88c5\u7f6e\uff0c\u76d1\u63a7\u8fd0\u884c\u72b6\u6001\u3002<\/li>\n<\/ul>\n<p>\u53f0\u6e7e\u5de5\u7814\u9662\uff08ITRI\uff09\u5728\u5176\u6d01\u51c0\u5ba4\u7ef4\u62a4\u89c4\u7a0b\u4e2d\u660e\u786e\u89c4\u5b9a\uff0c\u6240\u6709ULPA\u8fc7\u6ee4\u5668\u6bcf\u534a\u5e74\u5fc5\u987b\u8fdb\u884c\u4e00\u6b21\u5168\u9762\u6cc4\u6f0f\u6d4b\u8bd5\uff0c\u4efb\u4f55\u5355\u70b9\u6cc4\u6f0f\u8d85\u8fc70.01%\u5373\u89c6\u4e3a\u4e0d\u5408\u683c\u3002<\/p>\n<hr \/>\n<h2>5. \u56fd\u5185\u5916\u5178\u578b\u5de5\u7a0b\u6848\u4f8b\u5bf9\u6bd4\u5206\u6790<\/h2>\n<h3>5.1 \u56fd\u5185\u6848\u4f8b\uff1a\u4e2d\u82af\u56fd\u9645\u5317\u4eacFAB10<\/h3>\n<p>\u4e2d\u82af\u56fd\u9645\u5728\u5317\u4eac\u5efa\u8bbe\u768412\u82f1\u5bf8\u903b\u8f91\u82af\u7247\u751f\u4ea7\u7ebf\uff0c\u91c7\u7528\u5168\u5c4bFFU\u9876\u68da\u9001\u98ce\u7cfb\u7edf\uff0c\u5171\u8ba1\u5b89\u88c5ULPA U15\u7ea7\u65e0\u9694\u677f\u8fc7\u6ee4\u566818,600\u53f0\uff0c\u8986\u76d6\u9762\u79ef\u8fbe35,000\u5e73\u65b9\u7c73\u3002\u9879\u76ee\u7279\u70b9\u5305\u62ec\uff1a<\/p>\n<ul>\n<li>FFU\u91c7\u7528\u53d8\u9891\u63a7\u5236\uff0c\u6839\u636e\u751f\u4ea7\u8d1f\u8377\u81ea\u52a8\u8c03\u8282\u98ce\u91cf\uff1b<\/li>\n<li>\u914d\u5907\u667a\u80fd\u76d1\u63a7\u5e73\u53f0\uff0c\u5b9e\u65f6\u663e\u793a\u5404\u533a\u57df\u538b\u5dee\u3001\u6e29\u6e7f\u5ea6\u4e0e\u7c92\u5b50\u6570\uff1b<\/li>\n<li>\u6d01\u51c0\u5ba4\u6574\u4f53\u8fbe\u5230ISO Class 4\u6807\u51c6\uff0c\u5173\u952e\u5149\u523b\u533a\u7ef4\u6301Class 3\u3002<\/li>\n<\/ul>\n<p>\u8fd0\u884c\u6570\u636e\u663e\u793a\uff0c\u7cfb\u7edf\u5e74\u5747\u80fd\u8017\u8f83\u4f20\u7edf\u96c6\u4e2d\u9001\u98ce\u964d\u4f4e18%\uff0c\u8fc7\u6ee4\u5668\u5e73\u5747\u5bff\u547d\u8fbe5\u5e74\u4ee5\u4e0a\u3002<\/p>\n<h3>5.2 \u56fd\u5916\u6848\u4f8b\uff1aIntel\u7231\u5c14\u5170Leixlip\u5de5\u5382<\/h3>\n<p>\u82f1\u7279\u5c14\u4f4d\u4e8e\u7231\u5c14\u5170\u7684Leixlip\u6676\u5706\u5382\u662f\u6b27\u6d32\u6700\u5927\u7684\u534a\u5bfc\u4f53\u751f\u4ea7\u57fa\u5730\u4e4b\u4e00\u3002\u5176\u7b2c\u4e03\u4ee3Core\u5904\u7406\u5668\u751f\u4ea7\u7ebf\u91c7\u7528\u6df7\u5408\u5f0f\u6c14\u6d41\u8bbe\u8ba1\uff1a<\/p>\n<ul>\n<li>\u4e3b\u8981\u5de5\u827a\u533a\u91c7\u7528FFU+ULPA U16\u8fc7\u6ee4\uff1b<\/li>\n<li>\u8f85\u52a9\u533a\u57df\u4f7f\u7528HEPA H14\u96c6\u4e2d\u9001\u98ce\uff1b<\/li>\n<li>\u5173\u952e\u8bbe\u5907\u914d\u5907\u6c2e\u6c14\u5439\u626b\u5fae\u73af\u5883\u3002<\/li>\n<\/ul>\n<p>\u636eIntel\u5b98\u65b9\u6280\u672f\u767d\u76ae\u4e66\u62ab\u9732\uff0c\u8be5\u5382\u901a\u8fc7\u4f18\u5316FFU\u6392\u5e03\u4e0e\u5730\u9762\u683c\u6805\u56de\u98ce\u6bd4\u4f8b\uff0c\u6210\u529f\u5c060.1\u03bcm\u4ee5\u4e0a\u9897\u7c92\u6d53\u5ea6\u63a7\u5236\u5728ISO Class 2\u4ee5\u5185\uff0c\u826f\u7387\u63d0\u53472.3\u4e2a\u767e\u5206\u70b9\u3002<\/p>\n<hr \/>\n<h2>6. \u672a\u6765\u53d1\u5c55\u8d8b\u52bf\u4e0e\u6280\u672f\u521b\u65b0\u65b9\u5411<\/h2>\n<h3>6.1 \u667a\u80fd\u5316\u8fc7\u6ee4\u7cfb\u7edf<\/h3>\n<p>\u968f\u7740\u5de5\u4e1a\u7269\u8054\u7f51\uff08IIoT\uff09\u7684\u53d1\u5c55\uff0c\u65b0\u4e00\u4ee3\u65e0\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u6b63\u671d\u7740\u667a\u80fd\u5316\u65b9\u5411\u6f14\u8fdb\u3002\u4f8b\u5982\uff1a<\/p>\n<ul>\n<li>\u5185\u7f6e\u538b\u5dee\u4f20\u611f\u5668\u4e0e\u65e0\u7ebf\u901a\u4fe1\u6a21\u5757\uff1b<\/li>\n<li>\u652f\u6301\u8fdc\u7a0b\u6545\u969c\u8bca\u65ad\u4e0e\u9884\u6d4b\u6027\u7ef4\u62a4\uff1b<\/li>\n<li>\u4e0eBMS\uff08Building Management System\uff09\u8054\u52a8\u5b9e\u73b0\u80fd\u8017\u4f18\u5316\u3002<\/li>\n<\/ul>\n<p>\u5fb7\u56fd\u66fc\u80e1\u9ed8\u5c14\uff08MANN+HUMMEL\uff09\u516c\u53f8\u63a8\u51fa\u7684SmartFilter\u7cfb\u5217\u5df2\u5b9e\u73b0\u4e0a\u8ff0\u529f\u80fd\uff0c\u5e76\u5728\u6b27\u6d32\u591a\u4e2a\u534a\u5bfc\u4f53\u56ed\u533a\u8bd5\u70b9\u5e94\u7528\u3002<\/p>\n<h3>6.2 \u65b0\u578b\u6ee4\u6750\u7814\u53d1<\/h3>\n<p>\u4f20\u7edf\u73bb\u7483\u7ea4\u7ef4\u6ee4\u6599\u867d\u6027\u80fd\u4f18\u5f02\uff0c\u4f46\u5b58\u5728\u8106\u6027\u5927\u3001\u4e0d\u53ef\u964d\u89e3\u7b49\u95ee\u9898\u3002\u8fd1\u5e74\u6765\uff0c\u7814\u7a76\u8005\u5f00\u59cb\u63a2\u7d22\u66ff\u4ee3\u6750\u6599\uff1a<\/p>\n<ul>\n<li><strong>\u7eb3\u7c73\u7ea4\u7ef4\u590d\u5408\u819c<\/strong>\uff1a\u7531\u9759\u7535\u7eba\u4e1d\u5236\u5907\u7684\u805a\u4e73\u9178\uff08PLA\uff09\u6216PVDF\u7eb3\u7c73\u7ea4\u7ef4\uff0c\u5b54\u5f84\u53ef\u4f4e\u81f350nm\uff0c\u5bf9\u8d85\u7ec6\u9897\u7c92\u6355\u96c6\u6548\u7387\u66f4\u9ad8\uff1b<\/li>\n<li><strong>\u77f3\u58a8\u70ef\u6539\u6027\u6ee4\u7eb8<\/strong>\uff1a\u5229\u7528\u77f3\u58a8\u70ef\u7684\u5bfc\u7535\u6027\u5b9e\u73b0\u81ea\u6e05\u6d01\u4e0e\u6297\u9759\u7535\u529f\u80fd\uff1b<\/li>\n<li><strong>\u751f\u7269\u57fa\u53ef\u964d\u89e3\u6ee4\u6599<\/strong>\uff1a\u7b26\u5408\u7eff\u8272\u5236\u9020\u8d8b\u52bf\uff0c\u51cf\u5c11\u5e9f\u5f03\u8fc7\u6ee4\u5668\u73af\u5883\u6c61\u67d3\u3002<\/li>\n<\/ul>\n<p>\u6d59\u6c5f\u5927\u5b66\u9ad8\u5206\u5b50\u79d1\u5b66\u4e0e\u5de5\u7a0b\u5b66\u7cfb\u5df2\u5728\u5b9e\u9a8c\u5ba4\u9a8c\u8bc1\u4e86PLA\/PP\u53cc\u7ec4\u5206\u7eb3\u7c73\u7ea4\u7ef4\u6ee4\u6750\u5bf90.1\u03bcm\u9897\u7c92\u7684\u8fc7\u6ee4\u6548\u7387\u8d85\u8fc799.999%\uff0c\u4e14\u538b\u964d\u4f4e\u4e8e\u4f20\u7edf\u4ea7\u54c115%\u3002<\/p>\n<h3>6.3 \u6a21\u5757\u5316\u4e0e\u5feb\u901f\u66f4\u6362\u8bbe\u8ba1<\/h3>\n<p>\u4e3a\u7f29\u77ed\u505c\u673a\u65f6\u95f4\uff0c\u90e8\u5206\u5382\u5546\u5f00\u53d1\u51fa\u5feb\u62c6\u5f0f\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\u6a21\u5757\u3002\u5176\u7279\u70b9\u5305\u62ec\uff1a<\/p>\n<ul>\n<li>\u5361\u6263\u5f0f\u8fde\u63a5\uff0c\u65e0\u9700\u5de5\u5177\u5373\u53ef\u5b8c\u6210\u66f4\u6362\uff1b<\/li>\n<li>\u81ea\u5e26\u5bc6\u5c01\u6761\u4e0e\u5b9a\u4f4d\u5bfc\u8f68\uff0c\u9632\u6b62\u8bef\u88c5\uff1b<\/li>\n<li>\u652f\u6301\u5728\u7ebf\u66f4\u6362\uff0c\u4e0d\u5f71\u54cd\u5176\u4ed6\u533a\u57df\u8fd0\u884c\u3002<\/li>\n<\/ul>\n<p>\u65e5\u672c\u4e1c\u4e3d\uff08Toray\uff09\u516c\u53f8\u4e3a\u6b64\u7c7b\u4ea7\u54c1\u7533\u8bf7\u4e86\u591a\u9879\u4e13\u5229\uff0c\u5e76\u5728\u65e5\u672c\u4fe1\u8d8a\u5316\u5b66\u7684GigaFab\u9879\u76ee\u4e2d\u6210\u529f\u5e94\u7528\uff0c\u5355\u6b21\u66f4\u6362\u65f6\u95f4\u7531\u539f\u6765\u768445\u5206\u949f\u7f29\u77ed\u81f38\u5206\u949f\u3002<\/p>\n<hr \/>\n<h2>7. \u8fd0\u884c\u7ef4\u62a4\u4e0e\u7ba1\u7406\u5efa\u8bae<\/h2>\n<p>\u4e3a\u786e\u4fdd\u65e0\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u957f\u671f\u7a33\u5b9a\u8fd0\u884c\uff0c\u5e94\u5efa\u7acb\u5b8c\u5584\u7684\u8fd0\u7ef4\u4f53\u7cfb\uff1a<\/p>\n<h3>\u65e5\u5e38\u5de1\u68c0\u5185\u5bb9<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u68c0\u67e5\u9879\u76ee<\/th>\n<th>\u9891\u7387<\/th>\n<th>\u65b9\u6cd5<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u538b\u5dee\u8868\u8bfb\u6570<\/td>\n<td>\u6bcf\u65e5<\/td>\n<td>\u8bb0\u5f55\u8fdb\u51fa\u98ce\u538b\u5dee\u53d8\u5316<\/td>\n<\/tr>\n<tr>\n<td>\u5916\u89c2\u5b8c\u6574\u6027<\/td>\n<td>\u6bcf\u5468<\/td>\n<td>\u76ee\u89c6\u68c0\u67e5\u662f\u5426\u6709\u7834\u635f\u3001\u53d8\u5f62<\/td>\n<\/tr>\n<tr>\n<td>\u5bc6\u5c01\u72b6\u51b5<\/td>\n<td>\u6bcf\u6708<\/td>\n<td>\u624b\u611f\u68c0\u67e5\u8fb9\u6846\u662f\u5426\u677e\u52a8<\/td>\n<\/tr>\n<tr>\n<td>\u8fd0\u884c\u566a\u97f3<\/td>\n<td>\u6bcf\u5468<\/td>\n<td>\u4f7f\u7528\u58f0\u7ea7\u8ba1\u6d4b\u91cf\u5f02\u5e38\u58f0\u54cd<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>\u66f4\u6362\u5468\u671f\u5224\u65ad<\/h3>\n<p>\u867d\u7136\u5236\u9020\u5546\u901a\u5e38\u6807\u79f0\u4f7f\u7528\u5bff\u547d\u4e3a3\u20137\u5e74\uff0c\u4f46\u5b9e\u9645\u66f4\u6362\u65f6\u673a\u5e94\u7efc\u5408\u8003\u8651\u4ee5\u4e0b\u56e0\u7d20\uff1a<\/p>\n<ul>\n<li>\u538b\u5dee\u8fbe\u5230\u521d\u963b\u529b\u76842\u500d\uff1b<\/li>\n<li>\u626b\u63cf\u68c0\u6f0f\u53d1\u73b0\u5c40\u90e8\u6cc4\u6f0f\uff1b<\/li>\n<li>\u6d01\u51c0\u5ea6\u6301\u7eed\u8d85\u6807\u4e14\u6392\u9664\u5176\u4ed6\u6c61\u67d3\u6e90\uff1b<\/li>\n<li>\u5de5\u827a\u5347\u7ea7\u8981\u6c42\u66f4\u9ad8\u8fc7\u6ee4\u7b49\u7ea7\u3002<\/li>\n<\/ul>\n<p>\u4e0a\u6d77\u534e\u8679\u5b8f\u529b\u534a\u5bfc\u4f53\u516c\u53f8\u5728\u5176SOP\u6587\u4ef6\u4e2d\u89c4\u5b9a\uff1a\u4e00\u65e6FFU\u6a21\u5757\u7d2f\u8ba1\u8fd0\u884c\u65f6\u95f4\u8d85\u8fc740,000\u5c0f\u65f6\u6216\u538b\u5dee\u4e0a\u5347\u81f3350 Pa\uff0c\u5373\u542f\u52a8\u66f4\u6362\u7a0b\u5e8f\u3002<\/p>\n<hr \/>\n<h2>8. \u7ecf\u6d4e\u6027\u4e0e\u80fd\u6548\u8bc4\u4f30<\/h2>\n<p>\u5c3d\u7ba1\u65e0\u9694\u677f\u9ad8\u6548\u8fc7\u6ee4\u5668\u521d\u671f\u91c7\u8d2d\u6210\u672c\u9ad8\u4e8e\u6709\u9694\u677f\u7c7b\u578b\u7ea620%-30%\uff0c\u4f46\u5176\u5168\u751f\u547d\u5468\u671f\u6210\u672c\u66f4\u5177\u4f18\u52bf\u3002\u4ee5\u4e0b\u4e3a\u67d010,000\u33a1\u6d01\u51c0\u5ba4\u7684\u7ecf\u6d4e\u6027\u5bf9\u6bd4\u5206\u6790\uff08\u5047\u8bbe\u8fd0\u884c10\u5e74\uff09\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6210\u672c\u9879<\/th>\n<th>\u6709\u9694\u677f\u7cfb\u7edf<\/th>\n<th>\u65e0\u9694\u677f\u7cfb\u7edf<\/th>\n<th>\u5dee\u5f02\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u8bbe\u5907\u8d2d\u7f6e\u8d39\uff08\u4e07\u5143\uff09<\/td>\n<td>1,800<\/td>\n<td>2,200<\/td>\n<td>\u65e0\u9694\u677f\u5355\u4ef7\u8f83\u9ad8<\/td>\n<\/tr>\n<tr>\n<td>\u5b89\u88c5\u8d39\u7528\uff08\u4e07\u5143\uff09<\/td>\n<td>300<\/td>\n<td>250<\/td>\n<td>\u7ed3\u6784\u8f7b\u4fbf\u8282\u7701\u4eba\u5de5<\/td>\n<\/tr>\n<tr>\n<td>\u5e74\u7535\u8d39\uff08\u4e07\u5143\uff09<\/td>\n<td>960<\/td>\n<td>780<\/td>\n<td>\u963b\u529b\u4f4e\u8282\u7701\u98ce\u673a\u529f\u8017<\/td>\n<\/tr>\n<tr>\n<td>\u66f4\u6362\u6210\u672c\uff08\u4e07\u5143\uff09<\/td>\n<td>600\uff08\u6bcf5\u5e74\uff09<\/td>\n<td>500\uff08\u6bcf6\u5e74\uff09<\/td>\n<td>\u5bff\u547d\u66f4\u957f<\/td>\n<\/tr>\n<tr>\n<td>\u603b\u62e5\u6709\u6210\u672c\uff08\u4e07\u5143\uff09<\/td>\n<td>10,700<\/td>\n<td>9,450<\/td>\n<td>\u8282\u770112.6%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6570\u636e\u8868\u660e\uff0c\u65e0\u9694\u677f\u7cfb\u7edf\u51ed\u501f\u66f4\u4f4e\u7684\u8fd0\u884c\u80fd\u8017\u4e0e\u66f4\u957f\u7684\u66f4\u6362\u5468\u671f\uff0c\u5728\u957f\u671f\u8fd0\u8425\u4e2d\u5c55\u73b0\u51fa\u660e\u663e\u7ecf\u6d4e\u6548\u76ca\u3002<\/p>\n<p>\u6b64\u5916\uff0c\u6839\u636e\u4e2d\u56fd\u300a\u7eff\u8272\u5de5\u5382\u8bc4\u4ef7\u901a\u5219\u300b\uff08GB\/T 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