{"id":17069,"date":"2025-09-26T13:23:21","date_gmt":"2025-09-26T05:23:21","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=17069"},"modified":"2025-09-26T13:23:21","modified_gmt":"2025-09-26T05:23:21","slug":"%e9%ab%98%e6%95%88%e9%a2%97%e7%b2%92%e7%a9%ba%e6%b0%94%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e6%b4%81%e5%87%80%e5%ae%a4%e4%b8%ad%e7%9a%84%e5%ba%94%e7%94%a8%e4%b8%8e%e6%80%a7","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=17069","title":{"rendered":"\u9ad8\u6548\u9897\u7c92\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u4e0e\u6027\u80fd\u5206\u6790"},"content":{"rendered":"<h1>\u9ad8\u6548\u9897\u7c92\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u4e0e\u6027\u80fd\u5206\u6790<\/h1>\n<h2>\u5f15\u8a00<\/h2>\n<p>\u968f\u7740\u96c6\u6210\u7535\u8def\uff08IC\uff09\u5236\u9020\u5de5\u827a\u4e0d\u65ad\u5411\u7eb3\u7c73\u7ea7\u63a8\u8fdb\uff0c\u534a\u5bfc\u4f53\u751f\u4ea7\u5bf9\u73af\u5883\u6d01\u51c0\u5ea6\u7684\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u5fae\u5c0f\u7684\u5c18\u57c3\u9897\u7c92\u3001\u91d1\u5c5e\u79bb\u5b50\u6216\u6709\u673a\u6c61\u67d3\u7269\u5747\u53ef\u80fd\u5bfc\u81f4\u82af\u7247\u7f3a\u9677\uff0c\u964d\u4f4e\u826f\u54c1\u7387\uff0c\u751a\u81f3\u9020\u6210\u6574\u6279\u4ea7\u54c1\u62a5\u5e9f\u3002\u4e3a\u786e\u4fdd\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u4e2d\u7684\u9ad8\u6d01\u51c0\u5ea6\u73af\u5883\uff0c\u9ad8\u6548\u9897\u7c92\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08High-Efficiency Particulate Air Filter, \u7b80\u79f0HEPA\uff09\u88ab\u5e7f\u6cdb\u5e94\u7528\u4e8e\u6d01\u51c0\u5ba4\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\u4e2d\u3002\u5c24\u5176\u5728Class 1\u81f3Class 100\u7ea7\u522b\u7684\u6d01\u51c0\u5ba4\uff08ISO Class 3\u20135\uff09\uff0cHEPA\u8fc7\u6ee4\u5668\u4f5c\u4e3a\u6838\u5fc3\u51c0\u5316\u8bbe\u5907\uff0c\u53d1\u6325\u7740\u4e0d\u53ef\u66ff\u4ee3\u7684\u4f5c\u7528\u3002<\/p>\n<p>\u672c\u6587\u5c06\u7cfb\u7edf\u63a2\u8ba8\u9ad8\u6548\u9897\u7c92\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u80cc\u666f\u3001\u5de5\u4f5c\u539f\u7406\u3001\u5173\u952e\u6027\u80fd\u53c2\u6570\u3001\u9009\u578b\u6807\u51c6\u3001\u5b9e\u9645\u8fd0\u884c\u6848\u4f8b\u4ee5\u53ca\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\uff0c\u5e76\u7ed3\u5408\u6743\u5a01\u6587\u732e\u4e0e\u884c\u4e1a\u6570\u636e\uff0c\u5168\u9762\u5206\u6790\u5176\u5728\u4fdd\u969c\u534a\u5bfc\u4f53\u5236\u9020\u73af\u5883\u4e2d\u7684\u6280\u672f\u4f18\u52bf\u4e0e\u6311\u6218\u3002<\/p>\n<hr \/>\n<h2>\u4e00\u3001HEPA\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u4e0e\u5206\u7c7b<\/h2>\n<h3>1.1 HEPA\u8fc7\u6ee4\u673a\u5236<\/h3>\n<p>\u9ad8\u6548\u9897\u7c92\u7a7a\u6c14\u8fc7\u6ee4\u5668\u901a\u8fc7\u7269\u7406\u62e6\u622a\u3001\u60ef\u6027\u78b0\u649e\u3001\u6269\u6563\u6548\u5e94\u548c\u9759\u7535\u5438\u9644\u7b49\u591a\u79cd\u673a\u5236\u53bb\u9664\u7a7a\u6c14\u4e2d\u60ac\u6d6e\u7684\u5fae\u7c92\u3002\u5176\u4e3b\u8981\u8fc7\u6ee4\u673a\u5236\u5305\u62ec\uff1a<\/p>\n<ul>\n<li><strong>\u62e6\u622a\u4f5c\u7528<\/strong>\uff1a\u5f53\u7c92\u5b50\u968f\u6c14\u6d41\u8fd0\u52a8\u65f6\uff0c\u82e5\u5176\u8def\u5f84\u63a5\u8fd1\u7ea4\u7ef4\u8868\u9762\uff0c\u53ef\u80fd\u56e0\u63a5\u89e6\u800c\u88ab\u6355\u83b7\u3002<\/li>\n<li><strong>\u60ef\u6027\u78b0\u649e<\/strong>\uff1a\u8f83\u5927\u7c92\u5b50\u56e0\u8d28\u91cf\u5927\uff0c\u5728\u6c14\u6d41\u65b9\u5411\u6539\u53d8\u65f6\u65e0\u6cd5\u53ca\u65f6\u8ddf\u968f\uff0c\u649e\u51fb\u7ea4\u7ef4\u88ab\u6355\u96c6\u3002<\/li>\n<li><strong>\u6269\u6563\u6548\u5e94<\/strong>\uff1a\u5bf9\u4e8e\u4e9a\u5fae\u7c73\u7ea7\u7c92\u5b50\uff08&lt;0.1 \u03bcm\uff09\uff0c\u5e03\u6717\u8fd0\u52a8\u663e\u8457\u589e\u5f3a\uff0c\u4f7f\u5176\u66f4\u6613\u4e0e\u7ea4\u7ef4\u63a5\u89e6\u5e76\u88ab\u6355\u83b7\u3002<\/li>\n<li><strong>\u9759\u7535\u5438\u9644<\/strong>\uff1a\u90e8\u5206HEPA\u6ee4\u6750\u5e26\u6709\u9759\u7535\uff0c\u53ef\u589e\u5f3a\u5bf9\u5fae\u5c0f\u5e26\u7535\u7c92\u5b50\u7684\u6355\u83b7\u80fd\u529b\u3002<\/li>\n<\/ul>\n<p>\u6839\u636e\u7f8e\u56fd\u80fd\u6e90\u90e8\u6807\u51c6DOE-STD-3020-97\u53ca\u56fd\u9645\u6807\u51c6ISO 29463\uff0cHEPA\u8fc7\u6ee4\u5668\u9700\u5bf9\u7c92\u5f84\u22650.3 \u03bcm\u7684\u9897\u7c92\u5b9e\u73b0\u81f3\u5c1199.97%\u7684\u8fc7\u6ee4\u6548\u7387\u3002<\/p>\n<h3>1.2 HEPA\u4e0eULPA\u7684\u533a\u522b<\/h3>\n<p>\u5728\u534a\u5bfc\u4f53\u884c\u4e1a\u4e2d\uff0c\u9664HEPA\u5916\uff0c\u8d85\u9ad8\u6548\u9897\u7c92\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08ULPA, Ultra-Low Penetration Air Filter\uff09\u4e5f\u88ab\u5e7f\u6cdb\u5e94\u7528\u3002\u4e24\u8005\u4e3b\u8981\u533a\u522b\u5982\u4e0b\u8868\u6240\u793a\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>HEPA\u8fc7\u6ee4\u5668<\/th>\n<th>ULPA\u8fc7\u6ee4\u5668<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6807\u51c6\u4f9d\u636e<\/td>\n<td>IEST-RP-CC001, ISO 29463 H13-H14<\/td>\n<td>ISO 29463 U15-U17<\/td>\n<\/tr>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387\uff080.3 \u03bcm\uff09<\/td>\n<td>\u226599.97%<\/td>\n<td>\u226599.999%<\/td>\n<\/tr>\n<tr>\n<td>\u5bf9\u5e94\u7a7f\u900f\u7387<\/td>\n<td>\u22640.03%<\/td>\n<td>\u22640.001%<\/td>\n<\/tr>\n<tr>\n<td>\u5178\u578b\u5e94\u7528\u573a\u666f<\/td>\n<td>Class 100\uff08ISO 5\uff09\u6d01\u51c0\u5ba4<\/td>\n<td>Class 10\u53ca\u4ee5\u4e0b\uff08ISO 4\u20133\uff09\u6d01\u51c0\u5ba4<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u59cb\u963b\u529b\uff08Pa\uff09<\/td>\n<td>180\u2013250<\/td>\n<td>220\u2013300<\/td>\n<\/tr>\n<tr>\n<td>\u4f7f\u7528\u5bff\u547d\uff08\u5e74\uff09<\/td>\n<td>3\u20135<\/td>\n<td>2\u20134<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1aIEST (Institute of Environmental Sciences and Technology), 2021; GB\/T 13554-2020\u300a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b<\/p>\n<\/blockquote>\n<p>ULPA\u8fc7\u6ee4\u5668\u9002\u7528\u4e8e\u5149\u523b\u3001\u8680\u523b\u7b49\u5bf9\u6d01\u51c0\u5ea6\u8981\u6c42\u6781\u9ad8\u7684\u5de5\u827a\u73af\u8282\uff0c\u800cHEPA\u5219\u591a\u7528\u4e8e\u4e00\u822c\u6d01\u51c0\u533a\u57df\u6216\u4f5c\u9884\u8fc7\u6ee4\u4f7f\u7528\u3002<\/p>\n<hr \/>\n<h2>\u4e8c\u3001\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u7684\u73af\u5883\u8981\u6c42<\/h2>\n<h3>2.1 \u6d01\u51c0\u5ba4\u7b49\u7ea7\u6807\u51c6<\/h3>\n<p>\u56fd\u9645\u901a\u7528\u7684\u6d01\u51c0\u5ba4\u5206\u7ea7\u6807\u51c6\u7531ISO 14644-1\u5b9a\u4e49\uff0c\u5176\u4f9d\u636e\u5355\u4f4d\u4f53\u79ef\u7a7a\u6c14\u4e2d\u5141\u8bb8\u7684\u6700\u5927\u7c92\u5b50\u6d53\u5ea6\u5212\u5206\u7b49\u7ea7\u3002\u534a\u5bfc\u4f53\u5236\u9020\u901a\u5e38\u8981\u6c42\u8fbe\u5230ISO Class 3\u81f3Class 5\u7ea7\u522b\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>ISO\u7b49\u7ea7<\/th>\n<th>\u6700\u5927\u5141\u8bb8\u7c92\u5b50\u6570\uff08\u22650.1 \u03bcm\uff09\/m\u00b3<\/th>\n<th>\u5178\u578b\u5e94\u7528<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>ISO 3<\/td>\n<td>1,000<\/td>\n<td>EUV\u5149\u523b\u3001\u6676\u5706\u642c\u8fd0<\/td>\n<\/tr>\n<tr>\n<td>ISO 4<\/td>\n<td>10,000<\/td>\n<td>\u8584\u819c\u6c89\u79ef\u3001\u79bb\u5b50\u6ce8\u5165<\/td>\n<\/tr>\n<tr>\n<td>ISO 5<\/td>\n<td>100,000<\/td>\n<td>\u6269\u6563\u3001\u6e05\u6d17\u3001\u5305\u88c5<\/td>\n<\/tr>\n<tr>\n<td>ISO 6<\/td>\n<td>1,000,000<\/td>\n<td>\u8bbe\u5907\u7ef4\u62a4\u533a<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u53c2\u8003\uff1aISO 14644-1:2015\u300a\u6d01\u51c0\u5ba4\u53ca\u76f8\u5173\u53d7\u63a7\u73af\u5883 \u7b2c1\u90e8\u5206\uff1a\u6309\u7c92\u5b50\u6d53\u5ea6\u5206\u7ea7\u300b<\/p>\n<\/blockquote>\n<p>\u4ee5\u53f0\u79ef\u75355nm\u5236\u7a0b\u4e3a\u4f8b\uff0c\u5176\u524d\u6bb5\u5de5\u827a\u6d01\u51c0\u5ba4\u666e\u904d\u7ef4\u6301\u5728ISO Class 3\u6c34\u5e73\uff0c\u8981\u6c42\u6bcf\u7acb\u65b9\u7c73\u7a7a\u6c14\u4e2d0.1 \u03bcm\u4ee5\u4e0a\u9897\u7c92\u4e0d\u8d85\u8fc71000\u4e2a\uff0c\u8fd9\u5bf9HEPA\/ULPA\u7cfb\u7edf\u7684\u7a33\u5b9a\u6027\u63d0\u51fa\u4e86\u6781\u9ad8\u8981\u6c42\u3002<\/p>\n<h3>2.2 \u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u7684\u6c61\u67d3\u6e90<\/h3>\n<p>\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u7684\u4e3b\u8981\u6c61\u67d3\u6e90\u5305\u62ec\uff1a<\/p>\n<ul>\n<li>\u4eba\u5458\u6d3b\u52a8\u4ea7\u751f\u7684\u76ae\u5c51\u3001\u7ea4\u7ef4\uff1b<\/li>\n<li>\u5de5\u827a\u8bbe\u5907\u8fd0\u884c\u65f6\u91ca\u653e\u7684\u6325\u53d1\u6027\u6709\u673a\u7269\uff08VOCs\uff09\u4e0e\u91d1\u5c5e\u84b8\u6c14\uff1b<\/li>\n<li>\u5efa\u7b51\u6750\u6599\u8001\u5316\u8131\u843d\u7684\u5fae\u7c92\uff1b<\/li>\n<li>\u5916\u90e8\u65b0\u98ce\u643a\u5e26\u7684PM2.5\u3001\u82b1\u7c89\u7b49\u3002<\/li>\n<\/ul>\n<p>\u636e\u6e05\u534e\u5927\u5b66\u6d01\u51c0\u6280\u672f\u7814\u7a76\u4e2d\u5fc3\uff082022\uff09\u7814\u7a76\u663e\u793a\uff0c\u5728\u672a\u914d\u5907\u9ad8\u6548\u8fc7\u6ee4\u7cfb\u7edf\u7684\u6d01\u51c0\u5ba4\u5185\uff0c\u4eba\u5458\u884c\u8d70\u4e00\u6b21\u53ef\u4ea7\u751f\u8d85\u8fc710\u2076\u4e2a\u22650.3 \u03bcm\u7684\u9897\u7c92\u3002\u56e0\u6b64\uff0c\u9ad8\u6548\u7684\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf\u662f\u63a7\u5236\u8fd9\u4e9b\u6c61\u67d3\u7684\u5173\u952e\u624b\u6bb5\u3002<\/p>\n<hr \/>\n<h2>\u4e09\u3001HEPA\u8fc7\u6ee4\u5668\u7684\u5173\u952e\u6027\u80fd\u53c2\u6570<\/h2>\n<h3>3.1 \u4e3b\u8981\u6280\u672f\u6307\u6807<\/h3>\n<p>\u4e3a\u8bc4\u4f30HEPA\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u9002\u7528\u6027\uff0c\u9700\u5173\u6ce8\u4ee5\u4e0b\u6838\u5fc3\u53c2\u6570\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u5b9a\u4e49<\/th>\n<th>\u6d4b\u8bd5\u6807\u51c6<\/th>\n<th>\u5178\u578b\u503c\u8303\u56f4<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387<\/td>\n<td>\u5bf9\u7279\u5b9a\u7c92\u5f84\u9897\u7c92\u7684\u53bb\u9664\u7387<\/td>\n<td>DOP\u6cd5\uff080.3 \u03bcm\uff09\u6216PSL\u6cd5<\/td>\n<td>H13: \u226599.97%<br \/>H14: \u226599.995%<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u59cb\u963b\u529b<\/td>\n<td>\u65b0\u6ee4\u82af\u5728\u989d\u5b9a\u98ce\u91cf\u4e0b\u7684\u538b\u964d<\/td>\n<td>EN 779 \/ ISO 5011<\/td>\n<td>180\u2013250 Pa<\/td>\n<\/tr>\n<tr>\n<td>\u7ec8\u963b\u529b<\/td>\n<td>\u66f4\u6362\u524d\u6700\u5927\u5141\u8bb8\u538b\u964d<\/td>\n<td>\u540c\u4e0a<\/td>\n<td>450\u2013600 Pa<\/td>\n<\/tr>\n<tr>\n<td>\u989d\u5b9a\u98ce\u91cf<\/td>\n<td>\u8bbe\u8ba1\u901a\u8fc7\u98ce\u91cf\uff08m\u00b3\/h\uff09<\/td>\n<td>\u7528\u6237\u5b9a\u5236<\/td>\n<td>500\u20132000 m\u00b3\/h<\/td>\n<\/tr>\n<tr>\n<td>\u5bb9\u5c18\u91cf<\/td>\n<td>\u53ef\u5bb9\u7eb3\u9897\u7c92\u603b\u91cf\uff08g\uff09<\/td>\n<td>JIS Z 8122<\/td>\n<td>300\u2013800 g<\/td>\n<\/tr>\n<tr>\n<td>\u6cc4\u6f0f\u7387<\/td>\n<td>\u5c40\u90e8\u6cc4\u6f0f\u5141\u8bb8\u503c<\/td>\n<td>\u626b\u63cf\u6cd5\uff08MPPS\u70b9\uff09<\/td>\n<td>\u22640.01% per filter<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1a\u4e2d\u56fd\u5efa\u7b51\u79d1\u5b66\u7814\u7a76\u9662\u300a\u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303\u300bGB 50073-2013\uff1bCamfil AB Technical Report, 2020<\/p>\n<\/blockquote>\n<p>\u5176\u4e2d\uff0c<strong>\u6700\u6613\u7a7f\u900f\u7c92\u5f84<\/strong>\uff08Most Penetrating Particle Size, MPPS\uff09\u662f\u8861\u91cfHEPA\u6027\u80fd\u7684\u6838\u5fc3\u6307\u6807\u3002\u7814\u7a76\u8868\u660e\uff0cHEPA\u6ee4\u6750\u5bf90.1\u20130.3 \u03bcm\u9897\u7c92\u7684\u8fc7\u6ee4\u6548\u7387\u6700\u4f4e\uff0c\u56e0\u6b64\u6d4b\u8bd5\u5e38\u4ee5\u6b64\u533a\u95f4\u4e3a\u57fa\u51c6\u3002<\/p>\n<h3>3.2 \u6750\u6599\u4e0e\u7ed3\u6784\u7c7b\u578b<\/h3>\n<p>HEPA\u8fc7\u6ee4\u5668\u901a\u5e38\u91c7\u7528\u8d85\u7ec6\u73bb\u7483\u7ea4\u7ef4\uff08Glass Fiber\uff09\u4f5c\u4e3a\u6ee4\u6599\uff0c\u5177\u6709\u8010\u9ad8\u6e29\u3001\u5316\u5b66\u7a33\u5b9a\u6027\u597d\u7b49\u7279\u70b9\u3002\u5e38\u89c1\u7ed3\u6784\u5f62\u5f0f\u5305\u62ec\uff1a<\/p>\n<ul>\n<li><strong>\u6709\u9694\u677f\u578b<\/strong>\uff1a\u4f7f\u7528\u94dd\u7b94\u6216\u7eb8\u677f\u5206\u9694\u6ee4\u7eb8\uff0c\u8936\u8ddd\u5747\u5300\uff0c\u5bb9\u5c18\u91cf\u5927\uff0c\u9002\u5408\u5927\u98ce\u91cf\u7cfb\u7edf\u3002<\/li>\n<li><strong>\u65e0\u9694\u677f\u578b<\/strong>\uff1a\u91c7\u7528\u70ed\u7194\u80f6\u56fa\u5b9a\u6ce2\u5f62\u6ee4\u7eb8\uff0c\u4f53\u79ef\u5c0f\u3001\u91cd\u91cf\u8f7b\uff0c\u9002\u7528\u4e8e\u7a7a\u95f4\u53d7\u9650\u573a\u5408\u3002<\/li>\n<\/ul>\n<table>\n<thead>\n<tr>\n<th>\u7ed3\u6784\u7c7b\u578b<\/th>\n<th>\u4f18\u70b9<\/th>\n<th>\u7f3a\u70b9<\/th>\n<th>\u9002\u7528\u573a\u666f<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6709\u9694\u677fHEPA<\/td>\n<td>\u9ad8\u5bb9\u5c18\u3001\u957f\u5bff\u547d<\/td>\n<td>\u4f53\u79ef\u5927\u3001\u6210\u672c\u9ad8<\/td>\n<td>\u5927\u578bFFU\u7cfb\u7edf<\/td>\n<\/tr>\n<tr>\n<td>\u65e0\u9694\u677fHEPA<\/td>\n<td>\u7d27\u51d1\u3001\u4f4e\u963b\u529b<\/td>\n<td>\u5bb9\u5c18\u7565\u4f4e<\/td>\n<td>Mini-environment\u3001SMIF Pod<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u5f15\u7528\uff1a\u5f20\u4f1f\u7b49\uff0c\u300a\u6d01\u51c0\u5ba4\u7528\u9ad8\u6548\u8fc7\u6ee4\u5668\u7ed3\u6784\u4f18\u5316\u7814\u7a76\u300b\uff0c\u300a\u6696\u901a\u7a7a\u8c03\u300b\uff0c2021\u5e74\u7b2c51\u5377\u7b2c6\u671f<\/p>\n<\/blockquote>\n<hr \/>\n<h2>\u56db\u3001HEPA\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5178\u578b\u5e94\u7528\u6a21\u5f0f<\/h2>\n<h3>4.1 FFU\uff08Fan Filter Unit\uff09\u7cfb\u7edf\u96c6\u6210<\/h3>\n<p>\u5728\u73b0\u4ee3\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\uff0cHEPA\u8fc7\u6ee4\u5668\u591a\u4ee5<strong>\u98ce\u673a\u8fc7\u6ee4\u5355\u5143<\/strong>\uff08FFU\uff09\u5f62\u5f0f\u5b89\u88c5\u4e8e\u5929\u82b1\u677f\uff0c\u5f62\u6210\u5782\u76f4\u5355\u5411\u6d41\uff08Vertical Laminar Flow\uff09\u3002FFU\u96c6\u6210\u4e86\u98ce\u673a\u3001\u9884\u8fc7\u6ee4\u5668\u3001HEPA\/ULPA\u6a21\u5757\u548c\u63a7\u5236\u7cfb\u7edf\uff0c\u5177\u5907\u72ec\u7acb\u8c03\u63a7\u98ce\u901f\u7684\u80fd\u529b\u3002<\/p>\n<p>\u5178\u578bFFU\u914d\u7f6e\u53c2\u6570\u5982\u4e0b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u9879\u76ee<\/th>\n<th>\u53c2\u6570<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5c3a\u5bf8\uff08mm\uff09<\/td>\n<td>1200\u00d7600 \u6216 1200\u00d71200<\/td>\n<\/tr>\n<tr>\n<td>\u98ce\u91cf\uff08m\u00b3\/h\uff09<\/td>\n<td>800\u20131200<\/td>\n<\/tr>\n<tr>\n<td>\u9759\u538b\uff08Pa\uff09<\/td>\n<td>120\u2013150<\/td>\n<\/tr>\n<tr>\n<td>\u566a\u97f3\uff08dB\uff09<\/td>\n<td>&lt;55<\/td>\n<\/tr>\n<tr>\n<td>\u63a7\u5236\u65b9\u5f0f<\/td>\n<td>RS485\/Modbus\u8054\u7f51\u63a7\u5236<\/td>\n<\/tr>\n<tr>\n<td>\u8fc7\u6ee4\u7b49\u7ea7<\/td>\n<td>H14\u6216U15<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1aAAF International Product Catalogue, 2023<\/p>\n<\/blockquote>\n<p>\u4e09\u661f\u7535\u5b50\u5e73\u6cfd\u5de5\u5382\u5728\u51767nm\u4ea7\u7ebf\u4e2d\u90e8\u7f72\u4e86\u8d85\u8fc72\u4e07\u53f0FFU\uff0c\u6784\u6210\u5168\u8986\u76d6\u5f0f\u5c42\u6d41\u7cfb\u7edf\uff0c\u786e\u4fdd\u6676\u5706\u8868\u9762\u9897\u7c92\u6c61\u67d3\u5bc6\u5ea6\u4f4e\u4e8e0.01 particles\/cm\u00b2\/h\uff08Lee et al., <em>Journal of Semiconductor Technology<\/em>, 2020\uff09\u3002<\/p>\n<h3>4.2 \u5c40\u90e8\u51c0\u5316\u88c5\u7f6e<\/h3>\n<p>\u9664\u6574\u4f53\u6d01\u51c0\u5ba4\u5916\uff0c\u8bb8\u591a\u5173\u952e\u5de5\u827a\u8bbe\u5907\uff08\u5982\u5149\u523b\u673a\u3001CVD\u53cd\u5e94\u8154\uff09\u914d\u5907<strong>\u5fae\u73af\u5883\u7cfb\u7edf<\/strong>\uff08Mini-environment\uff09\uff0c\u5185\u90e8\u96c6\u6210ULPA\u8fc7\u6ee4\u5668\uff0c\u5f62\u6210\u5c40\u90e8ISO Class 1\u73af\u5883\u3002\u4f8b\u5982ASML\u7684NXE:3400B EUV\u5149\u523b\u673a\uff0c\u5176\u6676\u5706\u4f20\u8f93\u901a\u9053\u5185\u7a7a\u6c14\u7ecf\u4e09\u7ea7\u8fc7\u6ee4\uff08G4+F8+U15\uff09\uff0c\u786e\u4fdd\u5149\u5b66\u5143\u4ef6\u514d\u53d7\u6c61\u67d3\u3002<\/p>\n<p>\u6b64\u5916\uff0c<strong>SMIF<\/strong>\uff08Standard Mechanical Interface\uff09Pod\u4e5f\u5185\u7f6eHEPA\u5faa\u73af\u7cfb\u7edf\uff0c\u53ef\u5728\u5f00\u76d6\u77ac\u95f4\u7ef4\u6301\u5185\u90e8\u6d01\u51c0\u5ea6\uff0c\u9632\u6b62\u6676\u5706\u66b4\u9732\u4e8e\u4e3b\u6d01\u51c0\u5ba4\u7a7a\u6c14\u4e2d\u3002<\/p>\n<hr \/>\n<h2>\u4e94\u3001\u56fd\u5185\u5916\u4e3b\u6d41HEPA\u4ea7\u54c1\u5bf9\u6bd4\u5206\u6790<\/h2>\n<p>\u4e0b\u8868\u5217\u4e3e\u4e86\u5168\u7403\u53ca\u4e2d\u56fd\u4e3b\u8981\u5382\u5546\u7684\u4ee3\u8868\u6027HEPA\u4ea7\u54c1\u6027\u80fd\u53c2\u6570\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u54c1\u724c<\/th>\n<th>\u578b\u53f7<\/th>\n<th>\u8fc7\u6ee4\u7b49\u7ea7<\/th>\n<th>\u521d\u59cb\u963b\u529b\uff08Pa\uff09<\/th>\n<th>\u989d\u5b9a\u98ce\u91cf\uff08m\u00b3\/h\uff09<\/th>\n<th>\u9002\u7528\u6807\u51c6<\/th>\n<th>\u56fd\u522b<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>Camfil<\/td>\n<td>Hi-Flo ES<\/td>\n<td>H14<\/td>\n<td>190<\/td>\n<td>900<\/td>\n<td>ISO 29463<\/td>\n<td>\u745e\u5178<\/td>\n<\/tr>\n<tr>\n<td>Donaldson<\/td>\n<td>Ultra-Web Z<\/td>\n<td>H13<\/td>\n<td>175<\/td>\n<td>850<\/td>\n<td>ASME N509<\/td>\n<td>\u7f8e\u56fd<\/td>\n<\/tr>\n<tr>\n<td>AAF<\/td>\n<td>FX-MAX<\/td>\n<td>H14<\/td>\n<td>210<\/td>\n<td>1000<\/td>\n<td>GB\/T 13554<\/td>\n<td>\u7f8e\u56fd\uff08\u4e2d\u56fd\u751f\u4ea7\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u82cf\u5dde\u4e9a\u592b<\/td>\n<td>YF-HEPA-1200<\/td>\n<td>H14<\/td>\n<td>200<\/td>\n<td>950<\/td>\n<td>GB\/T 13554-2020<\/td>\n<td>\u4e2d\u56fd<\/td>\n<\/tr>\n<tr>\n<td>\u6df1\u5733\u91d1\u7530\u8c6a<\/td>\n<td>JTH-ULPA<\/td>\n<td>U15<\/td>\n<td>240<\/td>\n<td>800<\/td>\n<td>ISO 29463<\/td>\n<td>\u4e2d\u56fd<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6574\u7406\u81ea\u5404\u516c\u53f8\u5b98\u7f51\u6280\u672f\u624b\u518c\uff082023\u5e74\u66f4\u65b0\uff09<\/p>\n<\/blockquote>\n<p>\u4ece\u6027\u80fd\u4e0a\u770b\uff0c\u6b27\u7f8e\u54c1\u724c\u5728\u6ee4\u6750\u5747\u5300\u6027\u3001\u5bc6\u5c01\u6027\u548c\u957f\u671f\u7a33\u5b9a\u6027\u65b9\u9762\u4ecd\u5177\u4f18\u52bf\uff0c\u4f46\u56fd\u4ea7HEPA\u8fd1\u5e74\u6765\u8fdb\u6b65\u663e\u8457\u3002\u636e\u4e2d\u56fd\u7535\u5b50\u5b66\u4f1a\u6d01\u51c0\u6280\u672f\u5206\u4f1a\u7edf\u8ba1\uff0c2022\u5e74\u4e2d\u56fd\u672c\u571fHEPA\u5728\u65b0\u5efa\u534a\u5bfc\u4f53\u9879\u76ee\u4e2d\u7684\u5e02\u573a\u5360\u6709\u7387\u5df2\u8fbe42%\uff0c\u8f832018\u5e74\u768418%\u5927\u5e45\u63d0\u5347\uff08\u300a\u4e2d\u56fd\u6d01\u51c0\u4ea7\u4e1a\u767d\u76ae\u4e66\u300b\uff0c2023\uff09\u3002<\/p>\n<hr \/>\n<h2>\u516d\u3001HEPA\u7cfb\u7edf\u8fd0\u884c\u7ef4\u62a4\u4e0e\u6027\u80fd\u76d1\u6d4b<\/h2>\n<h3>6.1 \u6027\u80fd\u8870\u51cf\u56e0\u7d20<\/h3>\n<p>HEPA\u8fc7\u6ee4\u5668\u5728\u957f\u671f\u8fd0\u884c\u4e2d\u4f1a\u56e0\u4ee5\u4e0b\u539f\u56e0\u5bfc\u81f4\u6027\u80fd\u4e0b\u964d\uff1a<\/p>\n<ul>\n<li><strong>\u79ef\u5c18\u5835\u585e<\/strong>\uff1a\u9897\u7c92\u5806\u79ef\u589e\u52a0\u963b\u529b\uff0c\u964d\u4f4e\u98ce\u91cf\uff1b<\/li>\n<li><strong>\u6e7f\u5ea6\u5f71\u54cd<\/strong>\uff1a\u9ad8\u6e7f\u73af\u5883\u53ef\u80fd\u5bfc\u81f4\u73bb\u7483\u7ea4\u7ef4\u5438\u6c34\u53d8\u5f62\uff1b<\/li>\n<li><strong>\u673a\u68b0\u635f\u4f24<\/strong>\uff1a\u5b89\u88c5\u4e0d\u5f53\u6216\u632f\u52a8\u5f15\u53d1\u6ee4\u7eb8\u7834\u635f\uff1b<\/li>\n<li><strong>\u5fae\u751f\u7269\u6ecb\u751f<\/strong>\uff1a\u5728\u6e29\u6e7f\u6761\u4ef6\u4e0b\u53ef\u80fd\u6ecb\u751f\u771f\u83cc\uff0c\u5f71\u54cd\u7a7a\u6c14\u8d28\u91cf\u3002<\/li>\n<\/ul>\n<p>\u65e5\u672c\u4e1c\u4eac\u5de5\u4e1a\u5927\u5b66\u7684\u4e00\u9879\u7814\u7a76\u8868\u660e\uff0c\u5f53HEPA\u963b\u529b\u4e0a\u5347\u81f3\u521d\u59cb\u503c\u76841.8\u500d\u65f6\uff0c\u5176\u8fc7\u6ee4\u6548\u7387\u53ef\u80fd\u4e0b\u964d0.5%\u4ee5\u4e0a\uff08Tanaka et al., <em>Indoor Air<\/em>, 2019\uff09\u3002<\/p>\n<h3>6.2 \u5728\u7ebf\u76d1\u6d4b\u6280\u672f<\/h3>\n<p>\u4e3a\u5b9e\u65f6\u638c\u63e1HEPA\u72b6\u6001\uff0c\u73b0\u4ee3\u6d01\u51c0\u5ba4\u666e\u904d\u91c7\u7528\u4ee5\u4e0b\u76d1\u6d4b\u624b\u6bb5\uff1a<\/p>\n<ul>\n<li><strong>\u538b\u5dee\u4f20\u611f\u5668<\/strong>\uff1a\u76d1\u6d4b\u521d\u6548\u3001\u4e2d\u6548\u4e0eHEPA\u4e4b\u95f4\u7684\u538b\u5dee\u53d8\u5316\uff0c\u5224\u65ad\u5835\u585e\u7a0b\u5ea6\uff1b<\/li>\n<li><strong>\u7c92\u5b50\u8ba1\u6570\u5668<\/strong>\uff1a\u5b9a\u671f\u626b\u63cf\u4e0b\u6e38\u7c92\u5b50\u6d53\u5ea6\uff0c\u9a8c\u8bc1\u8fc7\u6ee4\u6548\u7387\uff1b<\/li>\n<li><strong>\u6c14\u6eb6\u80f6\u5149\u5ea6\u8ba1<\/strong>\uff1a\u4f7f\u7528DOP\u6216PAO\u53d1\u751f\u5668\u8fdb\u884c\u6cc4\u6f0f\u6d4b\u8bd5\uff0c\u7cbe\u5ea6\u53ef\u8fbe0.001%\uff1b<\/li>\n<li><strong>\u667a\u80fdFFU\u7cfb\u7edf<\/strong>\uff1a\u96c6\u6210IoT\u6a21\u5757\uff0c\u8fdc\u7a0b\u76d1\u63a7\u98ce\u901f\u3001\u80fd\u8017\u4e0e\u6545\u969c\u62a5\u8b66\u3002<\/li>\n<\/ul>\n<p>\u6839\u636eSEMI F57\u6807\u51c6\uff0c\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u5e94\u6bcf6\u4e2a\u6708\u8fdb\u884c\u4e00\u6b21\u5b8c\u6574\u7684HEPA\u6cc4\u6f0f\u626b\u63cf\uff0c\u786e\u4fdd\u65e0\u5c40\u90e8\u7a7f\u5b54\u6216\u5bc6\u5c01\u5931\u6548\u3002<\/p>\n<hr \/>\n<h2>\u4e03\u3001\u524d\u6cbf\u6280\u672f\u53d1\u5c55\u4e0e\u6311\u6218<\/h2>\n<h3>7.1 \u65b0\u578b\u6ee4\u6750\u7814\u53d1<\/h3>\n<p>\u4f20\u7edf\u73bb\u7483\u7ea4\u7ef4\u5b58\u5728\u8106\u6027\u5927\u3001\u4e0d\u53ef\u964d\u89e3\u7b49\u95ee\u9898\u3002\u8fd1\u5e74\u6765\uff0c\u56fd\u5185\u5916\u5b66\u8005\u81f4\u529b\u4e8e\u5f00\u53d1\u65b0\u578b\u590d\u5408\u6ee4\u6750\uff1a<\/p>\n<ul>\n<li><strong>\u7eb3\u7c73\u7ea4\u7ef4\u6d82\u5c42<\/strong>\uff1a\u5728\u57fa\u6750\u8868\u9762\u7535\u7eba\u805a\u4e19\u70ef\u8148\uff08PAN\uff09\u6216\u805a\u4e73\u9178\uff08PLA\uff09\u7eb3\u7c73\u7ea4\u7ef4\uff0c\u63d0\u5347\u5bf9&lt;0.1 \u03bcm\u9897\u7c92\u7684\u6355\u83b7\u80fd\u529b\uff08Zhang et al., <em>ACS Nano<\/em>, 2021\uff09\uff1b<\/li>\n<li><strong>\u77f3\u58a8\u70ef\u589e\u5f3a\u6ee4\u7eb8<\/strong>\uff1a\u5229\u7528\u77f3\u58a8\u70ef\u7684\u9ad8\u6bd4\u8868\u9762\u79ef\u4e0e\u6297\u83cc\u7279\u6027\uff0c\u5ef6\u957f\u4f7f\u7528\u5bff\u547d\uff08\u4e2d\u79d1\u9662\u82cf\u5dde\u7eb3\u7c73\u6240\uff0c2022\uff09\uff1b<\/li>\n<li><strong>\u9a7b\u6781\u4f53\u6750\u6599<\/strong>\uff1a\u901a\u8fc7\u7535\u6655\u5145\u7535\u4f7f\u6ee4\u6750\u6301\u4e45\u5e26\u7535\uff0c\u589e\u5f3a\u9759\u7535\u5438\u9644\u6548\u5e94\uff0c\u5df2\u5728\u90e8\u5206ULPA\u4ea7\u54c1\u4e2d\u5e94\u7528\u3002<\/li>\n<\/ul>\n<h3>7.2 \u667a\u80fd\u5316\u4e0e\u8282\u80fd\u8d8b\u52bf<\/h3>\n<p>\u968f\u7740\u201c\u53cc\u78b3\u201d\u76ee\u6807\u63a8\u8fdb\uff0cHEPA\u7cfb\u7edf\u7684\u80fd\u8017\u95ee\u9898\u53d7\u5230\u5173\u6ce8\u3002\u7814\u7a76\u663e\u793a\uff0c\u6d01\u51c0\u5ba4\u7a7a\u8c03\u7cfb\u7edf\u5360\u534a\u5bfc\u4f53\u5de5\u5382\u603b\u80fd\u8017\u768440%\u4ee5\u4e0a\uff0c\u5176\u4e2d\u98ce\u673a\u529f\u8017\u5360\u6bd4\u8fbe60%\uff08IEA, 2022\uff09\u3002\u4e3a\u6b64\uff0c\u884c\u4e1a\u6b63\u63a8\u52a8\uff1a<\/p>\n<ul>\n<li><strong>\u53d8\u9891FFU\u63a7\u5236<\/strong>\uff1a\u6839\u636e\u6d01\u51c0\u5ea6\u9700\u6c42\u52a8\u6001\u8c03\u8282\u98ce\u901f\uff0c\u8282\u80fd\u53ef\u8fbe30%\uff1b<\/li>\n<li><strong>AI\u9884\u6d4b\u7ef4\u62a4<\/strong>\uff1a\u57fa\u4e8e\u5386\u53f2\u6570\u636e\u9884\u6d4b\u6ee4\u7f51\u66f4\u6362\u5468\u671f\uff0c\u907f\u514d\u8fc7\u65e9\u66f4\u6362\u9020\u6210\u6d6a\u8d39\uff1b<\/li>\n<li><strong>\u70ed\u56de\u6536\u7cfb\u7edf<\/strong>\uff1a\u5728\u65b0\u98ce\u5904\u7406\u6bb5\u52a0\u88c5\u70ed\u4ea4\u6362\u5668\uff0c\u964d\u4f4e\u51b7\u70ed\u8d1f\u8377\u3002<\/li>\n<\/ul>\n<p>\u53f0\u79ef\u7535\u5357\u79d1\u5382\u533a\u5df2\u8bd5\u70b9AI\u9a71\u52a8\u7684\u6d01\u51c0\u5ba4\u7ba1\u7406\u7cfb\u7edf\uff0c\u901a\u8fc7\u673a\u5668\u5b66\u4e60\u4f18\u5316FFU\u7fa4\u63a7\u7b56\u7565\uff0c\u5e74\u8282\u7535\u8d85\u8fc71200\u4e07\u5ea6\uff08TSMC Sustainability Report, 2023\uff09\u3002<\/p>\n<hr \/>\n<h2>\u516b\u3001\u5178\u578b\u6848\u4f8b\u5206\u6790\uff1a\u4e2d\u82af\u56fd\u9645\u5317\u4eac12\u82f1\u5bf8\u5382<\/h2>\n<p>\u4e2d\u82af\u56fd\u9645\u5728\u5317\u4eac\u5efa\u8bbe\u768412\u82f1\u5bf8\u903b\u8f91\u82af\u7247\u751f\u4ea7\u7ebf\uff0c\u91c7\u7528\u5168HEPA\u8986\u76d6\u7684ISO Class 4\u6d01\u51c0\u5ba4\uff0c\u603b\u9762\u79ef\u8fbe5\u4e07\u5e73\u65b9\u7c73\u3002\u8be5\u9879\u76ee\u9009\u7528AAF\u63d0\u4f9b\u7684H14\u7ea7\u65e0\u9694\u677fHEPA\u6a21\u5757\uff0c\u5171\u8ba1\u5b89\u88c5FFU\u7ea61.5\u4e07\u53f0\u3002<\/p>\n<p>\u8fd0\u884c\u6570\u636e\u663e\u793a\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6307\u6807<\/th>\n<th>\u5b9e\u6d4b\u503c<\/th>\n<th>\u6807\u51c6\u8981\u6c42<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>0.1 \u03bcm\u7c92\u5b50\u6d53\u5ea6<\/td>\n<td>8,200 #\/m\u00b3<\/td>\n<td>\u226410,000<\/td>\n<\/tr>\n<tr>\n<td>\u5e73\u5747\u98ce\u901f\uff08m\/s\uff09<\/td>\n<td>0.38<\/td>\n<td>0.35\u20130.45<\/td>\n<\/tr>\n<tr>\n<td>FFU\u5e73\u5747\u963b\u529b<\/td>\n<td>215 Pa<\/td>\n<td>&lt;250 Pa<\/td>\n<\/tr>\n<tr>\n<td>\u5e74\u66f4\u6362\u7387<\/td>\n<td>3.2%<\/td>\n<td>&lt;5%<\/td>\n<\/tr>\n<tr>\n<td>\u6676\u5706\u7f3a\u9677\u5bc6\u5ea6<\/td>\n<td>0.035 defects\/cm\u00b2<\/td>\n<td>&lt;0.05<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1a\u4e2d\u82af\u56fd\u9645\u5de5\u7a0b\u6280\u672f\u90e8\u5185\u90e8\u62a5\u544a\uff082022\uff09<\/p>\n<\/blockquote>\n<p>\u8be5\u7cfb\u7edf\u8fde\u7eed\u8fd0\u884c\u4e09\u5e74\u672a\u53d1\u751f\u91cd\u5927\u6c61\u67d3\u4e8b\u4ef6\uff0c\u8bc1\u660eHEPA\u5728\u5927\u89c4\u6a21\u534a\u5bfc\u4f53\u751f\u4ea7\u4e2d\u7684\u53ef\u9760\u6027\u3002\u540c\u65f6\uff0c\u901a\u8fc7\u5f15\u5165\u667a\u80fd\u76d1\u63a7\u5e73\u53f0\uff0c\u5b9e\u73b0\u4e86\u5bf9\u6bcf\u4e00\u53f0FFU\u7684\u5b9e\u65f6\u72b6\u6001\u8ffd\u8e2a\uff0c\u5927\u5e45\u63d0\u5347\u4e86\u8fd0\u7ef4\u6548\u7387\u3002<\/p>\n<hr \/>\n<h2>\u4e5d\u3001\u56fd\u5185\u5916\u6807\u51c6\u4e0e\u8ba4\u8bc1\u4f53\u7cfb<\/h2>\n<p>\u4e3a\u786e\u4fddHEPA\u4ea7\u54c1\u8d28\u91cf\uff0c\u5404\u56fd\u5efa\u7acb\u4e86\u4e25\u683c\u7684\u6d4b\u8bd5\u4e0e\u8ba4\u8bc1\u4f53\u7cfb\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u56fd\u5bb6\/\u7ec4\u7ec7<\/th>\n<th>\u6807\u51c6\u540d\u79f0<\/th>\n<th>\u4e3b\u8981\u5185\u5bb9<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u4e2d\u56fd<\/td>\n<td>GB\/T 13554-2020<\/td>\n<td>\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u6027\u80fd\u6d4b\u8bd5\u65b9\u6cd5<\/td>\n<\/tr>\n<tr>\n<td>\u7f8e\u56fd<\/td>\n<td>DOE-STD-3020-97<\/td>\n<td>HEPA\u8fc7\u6ee4\u5668\u8bbe\u8ba1\u4e0e\u9a8c\u6536\u6807\u51c6<\/td>\n<\/tr>\n<tr>\n<td>\u6b27\u76df<\/td>\n<td>EN 1822:2009<\/td>\n<td>\u5206\u7ea7\u81f3E10\u2013U17\uff0c\u5f3a\u8c03MPPS\u6d4b\u8bd5<\/td>\n<\/tr>\n<tr>\n<td>\u56fd\u9645<\/td>\n<td>ISO 29463<\/td>\n<td>\u7edf\u4e00\u5168\u7403HEPA\/ULPA\u6d4b\u8bd5\u89c4\u8303<\/td>\n<\/tr>\n<tr>\n<td>\u65e5\u672c<\/td>\n<td>JIS Z 8122<\/td>\n<td>\u89c4\u5b9a\u626b\u63cf\u68c0\u6f0f\u7a0b\u5e8f<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u5728\u4e2d\u56fd\uff0c\u56fd\u5bb6\u7a7a\u8c03\u8bbe\u5907\u8d28\u91cf\u76d1\u7763\u68c0\u9a8c\u4e2d\u5fc3\uff08NCLAC\uff09\u8d1f\u8d23HEPA\u4ea7\u54c1\u7684\u578b\u5f0f\u68c0\u9a8c\uff0c\u6240\u6709\u8fdb\u5165\u534a\u5bfc\u4f53\u9879\u76ee\u7684\u8fc7\u6ee4\u5668\u5fc5\u987b\u63d0\u4f9b\u7b2c\u4e09\u65b9\u68c0\u6d4b\u62a5\u544a\u3002<\/p>\n<hr \/>\n<h2>\u5341\u3001\u7ecf\u6d4e\u6027\u4e0e\u751f\u547d\u5468\u671f\u6210\u672c\u5206\u6790<\/h2>\n<p>\u5c3d\u7ba1HEPA\u521d\u671f\u6295\u8d44\u8f83\u9ad8\uff0c\u4f46\u5176\u5728\u63d0\u5347\u826f\u7387\u65b9\u9762\u7684\u56de\u62a5\u663e\u8457\u3002\u4ee5\u4e00\u5ea7\u6708\u4ea75\u4e07\u724712\u82f1\u5bf8\u6676\u5706\u7684Fab\u4e3a\u4f8b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6210\u672c\u9879<\/th>\n<th>\u5e74\u8d39\u7528\uff08\u4e07\u5143\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>HEPA\u91c7\u8d2d\u4e0e\u5b89\u88c5<\/td>\n<td>6,800<\/td>\n<\/tr>\n<tr>\n<td>\u8fd0\u884c\u7535\u8d39\uff08FFU\uff09<\/td>\n<td>12,500<\/td>\n<\/tr>\n<tr>\n<td>\u7ef4\u62a4\u4e0e\u66f4\u6362<\/td>\n<td>2,200<\/td>\n<\/tr>\n<tr>\n<td>\u56e0\u6c61\u67d3\u5bfc\u81f4\u7684\u826f\u7387\u635f\u5931\uff08\u65e0HEPA\uff09<\/td>\n<td>\u224830,000<\/td>\n<\/tr>\n<tr>\n<td>\u5b9e\u9645\u826f\u7387\u635f\u5931\uff08\u914d\u5907HEPA\uff09<\/td>\n<td>\u22483,000<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u4f30\u7b97\u57fa\u4e8e\u884c\u4e1a\u5e73\u5747\u503c\uff0c\u53c2\u8003Semiconductor Engineering, 2021<\/p>\n<\/blockquote>\n<p>\u53ef\u89c1\uff0cHEPA\u7cfb\u7edf\u6bcf\u5e74\u53ef\u51cf\u5c11\u7ea62.7\u4ebf\u5143\u7684\u6f5c\u5728\u635f\u5931\uff0c\u6295\u8d44\u56de\u6536\u671f\u4e0d\u8db3\u4e00\u5e74\u3002\u6b64\u5916\uff0c\u968f\u7740\u56fd\u4ea7\u5316\u8fdb\u7a0b\u52a0\u5feb\uff0cHEPA\u5355\u4ef7\u8f83\u4e94\u5e74\u524d\u4e0b\u964d\u7ea635%\uff0c\u8fdb\u4e00\u6b65\u589e\u5f3a\u4e86\u5176\u7ecf\u6d4e\u53ef\u884c\u6027\u3002<\/p>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>ISO 14644-1:2015, <em>Cleanrooms and associated controlled environments \u2014 Part 1: Classification of air cleanliness by particle concentration<\/em>.  <\/li>\n<li>GB\/T 13554-2020, \u300a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b. \u4e2d\u56fd\u6807\u51c6\u51fa\u7248\u793e.  <\/li>\n<li>Camfil. (2020). <em>Technical Guide for HEPA Filtration in Critical Environments<\/em>. Stockholm: Camfil AB.  <\/li>\n<li>Lee, J., Kim, S., &amp; Park, H. (2020). &quot;Airborne Particle Control in Advanced Lithography Tools&quot;. <em>Journal of Semiconductor Technology<\/em>, 37(4), 112\u2013119.  <\/li>\n<li>Zhang, Y., et al. (2021). &quot;Electrospun Nanofiber-Based Composite Filters for Sub-100 nm Particle Removal&quot;. <em>ACS Nano<\/em>, 15(3), 4567\u20134578.  <\/li>\n<li>\u4e2d\u56fd\u7535\u5b50\u5b66\u4f1a. (2023). \u300a\u4e2d\u56fd\u6d01\u51c0\u4ea7\u4e1a\u5e74\u5ea6\u53d1\u5c55\u62a5\u544a\u300b. \u5317\u4eac.  <\/li>\n<li>IEA. (2022). <em>Energy Efficiency in Semiconductor Manufacturing<\/em>. International Energy Agency.  <\/li>\n<li>TSMC. (2023). <em>Sustainability Report 2022<\/em>. Taiwan Semiconductor Manufacturing Company.  <\/li>\n<li>Tanaka, M., et al. (2019). &quot;Performance Degradation of HEPA Filters under High Humidity Conditions&quot;. <em>Indoor Air<\/em>, 29(2), 234\u2013245.  <\/li>\n<li>\u5f20\u4f1f, \u674e\u5f3a. (2021). &quot;\u6d01\u51c0\u5ba4\u7528\u9ad8\u6548\u8fc7\u6ee4\u5668\u7ed3\u6784\u4f18\u5316\u7814\u7a76&quot;. \u300a\u6696\u901a\u7a7a\u8c03\u300b, 51(6), 88\u201393.<\/li>\n<\/ol>\n<hr \/>\n<p>\uff08\u5168\u6587\u7ea63,650\u5b57\uff09<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u9ad8\u6548\u9897\u7c92\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u4e0e\u6027\u80fd\u5206\u6790 \u5f15\u8a00 \u968f\u7740\u96c6\u6210\u7535\u8def\uff08IC\uff09\u5236\u9020\u5de5\u827a\u4e0d\u65ad\u5411\u7eb3\u7c73\u7ea7\u63a8\u8fdb\uff0c\u534a\u5bfc\u4f53\u751f\u4ea7\u5bf9\u73af\u5883\u6d01\u51c0\u5ea6\u7684\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u5fae\u5c0f\u7684\u5c18\u57c3\u9897\u7c92\u3001\u91d1\u5c5e\u79bb\u5b50\u6216\u6709\u673a\u6c61\u67d3\u7269\u5747\u53ef\u80fd\u5bfc\u81f4\u82af\u7247\u7f3a\u9677\uff0c\u964d\u4f4e\u826f\u54c1\u7387\uff0c\u751a\u81f3\u9020\u6210\u6574\u6279\u4ea7\u54c1\u62a5\u5e9f\u3002\u4e3a\u786e\u4fdd\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u4e2d\u7684\u9ad8\u6d01\u51c0\u5ea6\u73af\u5883\uff0c\u9ad8\u6548\u9897\u7c92\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08High-Efficiency Particulate Air Fil&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-17069","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/17069","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=17069"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/17069\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=17069"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=17069"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=17069"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}