{"id":17024,"date":"2025-09-26T11:35:42","date_gmt":"2025-09-26T03:35:42","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=17024"},"modified":"2025-09-26T11:35:42","modified_gmt":"2025-09-26T03:35:42","slug":"%e8%b6%85%e9%ab%98%e6%95%88%e6%97%a0%e9%9a%94%e6%9d%bf%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e6%b4%81%e5%87%80%e5%ae%a4%e4%b8%ad%e7%9a%84%e5%ba%94%e7%94%a8%e4%b8%8e%e6%80%a7","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=17024","title":{"rendered":"\u8d85\u9ad8\u6548\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u4e0e\u6027\u80fd\u5206\u6790"},"content":{"rendered":"<h1>\u8d85\u9ad8\u6548\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u4e0e\u6027\u80fd\u5206\u6790<\/h1>\n<h2>1. \u5f15\u8a00<\/h2>\n<p>\u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u6280\u672f\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u96c6\u6210\u7535\u8def\uff08IC\uff09\u5236\u7a0b\u8282\u70b9\u5df2\u8fdb\u51655nm\u53ca\u4ee5\u4e0b\u6c34\u5e73\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u63d0\u51fa\u4e86\u524d\u6240\u672a\u6709\u7684\u4e25\u82db\u8981\u6c42\u3002\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4f5c\u4e3a\u82af\u7247\u5236\u9020\u7684\u6838\u5fc3\u573a\u6240\uff0c\u5176\u7a7a\u6c14\u8d28\u91cf\u76f4\u63a5\u5173\u7cfb\u5230\u4ea7\u54c1\u826f\u7387\u3001\u8bbe\u5907\u5bff\u547d\u4ee5\u53ca\u5de5\u827a\u7a33\u5b9a\u6027\u3002\u5728\u6b64\u80cc\u666f\u4e0b\uff0c<strong>\u8d85\u9ad8\u6548\u65e0\u9694\u677f\u8fc7\u6ee4\u5668<\/strong>\uff08Ultra-Low Penetration Air Filter, ULPA Filter without Separator\uff09\u56e0\u5176\u5353\u8d8a\u7684\u9897\u7c92\u6355\u96c6\u6548\u7387\u548c\u4f4e\u963b\u529b\u7279\u6027\uff0c\u6210\u4e3a\u73b0\u4ee3\u9ad8\u7b49\u7ea7\u6d01\u51c0\u5ba4\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\u7684\u5173\u952e\u7ec4\u4ef6\u3002<\/p>\n<p>\u672c\u6587\u7cfb\u7edf\u9610\u8ff0\u8d85\u9ad8\u6548\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u3001\u7ed3\u6784\u7279\u70b9\u3001\u5173\u952e\u6027\u80fd\u53c2\u6570\uff0c\u5e76\u7ed3\u5408\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\uff0c\u6df1\u5165\u5206\u6790\u5176\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5b9e\u9645\u5e94\u7528\u8868\u73b0\u4e0e\u6027\u80fd\u4f18\u5316\u7b56\u7565\uff0c\u65e8\u5728\u4e3a\u6d01\u51c0\u5ba4\u8bbe\u8ba1\u3001\u8fd0\u7ef4\u53ca\u7a7a\u6c14\u8fc7\u6ee4\u6280\u672f\u53d1\u5c55\u63d0\u4f9b\u7406\u8bba\u652f\u6301\u4e0e\u5b9e\u8df5\u53c2\u8003\u3002<\/p>\n<hr \/>\n<h2>2. \u8d85\u9ad8\u6548\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\u6982\u8ff0<\/h2>\n<h3>2.1 \u5b9a\u4e49\u4e0e\u5206\u7c7b<\/h3>\n<p>\u6839\u636e\u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6 <strong>GB\/T 13554-2020\u300a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b<\/strong> \u7684\u5b9a\u4e49\uff0c\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08ULPA\uff09\u662f\u6307\u5bf9\u7c92\u5f84\u22650.12\u03bcm\u7684\u7c92\u5b50\u8fc7\u6ee4\u6548\u7387\u4e0d\u4f4e\u4e8e99.999%\u7684\u7a7a\u6c14\u8fc7\u6ee4\u5668\u3002\u800c\u201c\u65e0\u9694\u677f\u201d\u6307\u7684\u662f\u6ee4\u82af\u7ed3\u6784\u4e2d\u4e0d\u91c7\u7528\u4f20\u7edf\u6ce2\u7eb9\u72b6\u94dd\u7b94\u6216\u7eb8\u9694\u677f\u6765\u652f\u6491\u6ee4\u6599\uff0c\u800c\u662f\u901a\u8fc7\u70ed\u7194\u80f6\u5206\u9694\u6210V\u578b\u6216W\u578b\u6298\u53e0\u7ed3\u6784\uff0c\u4ece\u800c\u5b9e\u73b0\u66f4\u7d27\u51d1\u7684\u8bbe\u8ba1\u4e0e\u66f4\u9ad8\u7684\u5bb9\u5c18\u91cf\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u8fc7\u6ee4\u5668\u7c7b\u578b<\/th>\n<th>\u6548\u7387\u6807\u51c6\uff080.3\u03bcm\uff09<\/th>\n<th>\u6807\u51c6\u4f9d\u636e<\/th>\n<th>\u5e94\u7528\u7b49\u7ea7<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>HEPA H13<\/td>\n<td>\u226599.97%<\/td>\n<td>GB\/T 13554<\/td>\n<td>ISO 6\u7ea7<\/td>\n<\/tr>\n<tr>\n<td>HEPA H14<\/td>\n<td>\u226599.995%<\/td>\n<td>GB\/T 13554<\/td>\n<td>ISO 5\u7ea7<\/td>\n<\/tr>\n<tr>\n<td>ULPA U15<\/td>\n<td>\u226599.999%<\/td>\n<td>GB\/T 13554<\/td>\n<td>ISO 4\u7ea7<\/td>\n<\/tr>\n<tr>\n<td>ULPA U16<\/td>\n<td>\u226599.9995%<\/td>\n<td>GB\/T 13554<\/td>\n<td>ISO 3\u7ea7<\/td>\n<\/tr>\n<tr>\n<td>ULPA U17<\/td>\n<td>\u226599.9999%<\/td>\n<td>GB\/T 13554<\/td>\n<td>ISO 2\u7ea7\u53ca\u4ee5\u4e0a<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6ce8\uff1aISO 14644-1\u4e3a\u56fd\u9645\u901a\u7528\u6d01\u51c0\u5ba4\u5206\u7ea7\u6807\u51c6\u3002<\/p>\n<\/blockquote>\n<p>\u8d85\u9ad8\u6548\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\u901a\u5e38\u5bf9\u5e94U15\u81f3U17\u7b49\u7ea7\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u534a\u5bfc\u4f53\u5149\u523b\u3001\u8584\u819c\u6c89\u79ef\u3001\u79bb\u5b50\u6ce8\u5165\u7b49\u6838\u5fc3\u5de5\u827a\u533a\u57df\u3002<\/p>\n<h3>2.2 \u7ed3\u6784\u7ec4\u6210<\/h3>\n<p>\u5178\u578b\u7684\u8d85\u9ad8\u6548\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\u7531\u4ee5\u4e0b\u51e0\u4e2a\u90e8\u5206\u6784\u6210\uff1a<\/p>\n<ul>\n<li><strong>\u6ee4\u6599<\/strong>\uff1a\u91c7\u7528\u8d85\u7ec6\u73bb\u7483\u7ea4\u7ef4\uff08\u76f4\u5f84\u7ea60.3~0.5\u03bcm\uff09\uff0c\u7ecf\u7279\u6b8a\u5de5\u827a\u5904\u7406\u5f62\u6210\u4e09\u7ef4\u7f51\u7edc\u7ed3\u6784\uff0c\u5177\u5907\u9ad8\u6bd4\u8868\u9762\u79ef\u4e0e\u9759\u7535\u9a7b\u6781\u529f\u80fd\u3002<\/li>\n<li><strong>\u5206\u9694\u7269<\/strong>\uff1a\u4f7f\u7528\u70ed\u7194\u80f6\u70b9\u72b6\u6d82\u5e03\u66ff\u4ee3\u91d1\u5c5e\u6216\u5851\u6599\u9694\u677f\uff0c\u964d\u4f4e\u98ce\u963b\u5e76\u63d0\u9ad8\u586b\u5145\u5bc6\u5ea6\u3002<\/li>\n<li><strong>\u5916\u6846<\/strong>\uff1a\u591a\u91c7\u7528\u94dd\u5408\u91d1\u3001\u9540\u950c\u94a2\u677f\u6216\u4e0d\u9508\u94a2\u6750\u8d28\uff0c\u786e\u4fdd\u7ed3\u6784\u5f3a\u5ea6\u4e0e\u8010\u8150\u8680\u6027\u3002<\/li>\n<li><strong>\u5bc6\u5c01\u6750\u6599<\/strong>\uff1a\u805a\u6c28\u916f\u53d1\u6ce1\u80f6\u6216\u7845\u80f6\u5bc6\u5c01\u6761\uff0c\u9632\u6b62\u65c1\u901a\u6cc4\u6f0f\u3002<\/li>\n<li><strong>\u62a4\u7f51<\/strong>\uff1a\u53cc\u9762\u52a0\u88c5\u4e0d\u9508\u94a2\u4e1d\u7f51\uff0c\u9632\u6b62\u6ee4\u6599\u53d8\u5f62\u3002<\/li>\n<\/ul>\n<p>\u8be5\u7ed3\u6784\u8bbe\u8ba1\u4f7f\u5f97\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\u76f8\u6bd4\u4f20\u7edf\u6709\u9694\u677fULPA\uff0c\u5728\u76f8\u540c\u98ce\u91cf\u4e0b\u4f53\u79ef\u51cf\u5c11\u7ea630%-40%\uff0c\u663e\u8457\u63d0\u5347\u5b89\u88c5\u7075\u6d3b\u6027\u3002<\/p>\n<hr \/>\n<h2>3. \u5173\u952e\u6027\u80fd\u53c2\u6570\u5206\u6790<\/h2>\n<h3>3.1 \u8fc7\u6ee4\u6548\u7387<\/h3>\n<p>\u8fc7\u6ee4\u6548\u7387\u662f\u8861\u91cfULPA\u8fc7\u6ee4\u5668\u6027\u80fd\u7684\u6838\u5fc3\u6307\u6807\u3002\u76ee\u524d\u56fd\u9645\u901a\u884c\u6d4b\u8bd5\u65b9\u6cd5\u5305\u62ec\uff1a<\/p>\n<ul>\n<li><strong>DOP\u6cd5<\/strong>\uff08Di-Octyl Phthalate\uff0c\u90bb\u82ef\u4e8c\u7532\u9178\u4e8c\u8f9b\u916f\uff09\u2014\u2014\u9002\u7528\u4e8eHEPA\/ULPA\u5b9a\u6027\u68c0\u6d4b\uff1b<\/li>\n<li><strong>\u94a0\u7130\u6cd5<\/strong>\u2014\u2014\u4e2d\u56fd\u65e9\u671f\u5e38\u7528\u65b9\u6cd5\uff1b<\/li>\n<li><strong>MPPS\u6cd5<\/strong>\uff08Most Penetrating Particle Size\uff0c\u6700\u6613\u7a7f\u900f\u7c92\u5f84\uff09\u2014\u2014\u73b0\u884cIEC 60335-2-65\u4e0eEN 1822\u6807\u51c6\u63a8\u8350\u65b9\u6cd5\u3002<\/li>\n<\/ul>\n<p>\u7814\u7a76\u8868\u660e\uff0cULPA\u8fc7\u6ee4\u5668\u7684\u6700\u6613\u7a7f\u900f\u7c92\u5f84\u96c6\u4e2d\u5728<strong>0.12~0.15\u03bcm<\/strong>\u533a\u95f4\u3002\u7f8e\u56fdASHRAE Standard 52.2\u6307\u51fa\uff0c\u5728\u6b64\u7c92\u5f84\u4e0bU15\u7ea7\u8fc7\u6ee4\u5668\u7a7f\u900f\u7387\u5e94\u22640.001%\uff0c\u5373\u6548\u7387\u226599.999%\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570\u9879<\/th>\n<th>\u5178\u578b\u503c\u8303\u56f4<\/th>\n<th>\u6d4b\u8bd5\u6807\u51c6<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u521d\u59cb\u6548\u7387\uff080.12\u03bcm\uff09<\/td>\n<td>\u226599.999% (U15) \u81f3 \u226599.9999% (U17)<\/td>\n<td>EN 1822:2009<\/td>\n<\/tr>\n<tr>\n<td>\u963b\u529b\uff08\u989d\u5b9a\u98ce\u901f\uff09<\/td>\n<td>180~280 Pa<\/td>\n<td>IEST-RP-CC001.5<\/td>\n<\/tr>\n<tr>\n<td>\u989d\u5b9a\u98ce\u901f<\/td>\n<td>0.45 m\/s<\/td>\n<td>GB\/T 13554-2020<\/td>\n<\/tr>\n<tr>\n<td>\u5bb9\u5c18\u91cf<\/td>\n<td>\u226580 g\/m\u00b2<\/td>\n<td>JIS Z 8122<\/td>\n<\/tr>\n<tr>\n<td>\u6cc4\u6f0f\u7387\uff08\u626b\u63cf\u68c0\u6f0f\uff09<\/td>\n<td>\u22640.01%<\/td>\n<td>ISO 14644-3<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6570\u636e\u6765\u6e90\uff1a\u6e05\u534e\u5927\u5b66\u6d01\u51c0\u6280\u672f\u7814\u7a76\u6240\uff082021\uff09\u3001Camfil AB Technical Report (2022)<\/p>\n<h3>3.2 \u538b\u964d\u7279\u6027<\/h3>\n<p>\u538b\u964d\u76f4\u63a5\u5f71\u54cd\u98ce\u673a\u80fd\u8017\u4e0e\u7cfb\u7edf\u8fd0\u884c\u6210\u672c\u3002\u65e0\u9694\u677f\u7ed3\u6784\u56e0\u6d41\u9053\u66f4\u5747\u5300\uff0c\u6c14\u6d41\u5206\u5e03\u4f18\u5316\uff0c\u53ef\u5728\u4fdd\u6301\u9ad8\u6548\u7387\u7684\u540c\u65f6\u964d\u4f4e\u521d\u59cb\u963b\u529b\u3002\u5b9e\u9a8c\u6570\u636e\u663e\u793a\uff0c\u57280.45 m\/s\u9762\u98ce\u901f\u4e0b\uff0c\u5178\u578bU16\u7ea7\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\u521d\u963b\u529b\u7ea6\u4e3a220 Pa\uff0c\u800c\u540c\u7b49\u6548\u7387\u7684\u6709\u9694\u677f\u4ea7\u54c1\u53ef\u8fbe280 Pa\u4ee5\u4e0a\u3002<\/p>\n<p>\u56fe\u793a\u5bf9\u6bd4\uff08\u6a21\u62df\u6570\u636e\uff09\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6ee4\u5668\u7c7b\u578b<\/th>\n<th>\u521d\u963b\u529b\uff08Pa\uff09<\/th>\n<th>\u7ec8\u963b\u529b\uff08Pa\uff09<\/th>\n<th>\u80fd\u8017\u8282\u7701\uff08\u76f8\u5bf9\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6709\u9694\u677fULPA<\/td>\n<td>280<\/td>\n<td>450<\/td>\n<td>\u57fa\u51c6<\/td>\n<\/tr>\n<tr>\n<td>\u65e0\u9694\u677fULPA<\/td>\n<td>220<\/td>\n<td>360<\/td>\n<td>\u7ea618%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1a\u540c\u6d4e\u5927\u5b66\u6696\u901a\u7a7a\u8c03\u5b9e\u9a8c\u5ba4\uff0c\u300a\u6d01\u51c0\u5ba4\u8282\u80fd\u6280\u672f\u767d\u76ae\u4e66\u300b\uff0c2023<\/p>\n<\/blockquote>\n<h3>3.3 \u5bb9\u5c18\u80fd\u529b\u4e0e\u4f7f\u7528\u5bff\u547d<\/h3>\n<p>\u7531\u4e8e\u65e0\u9694\u677f\u8bbe\u8ba1\u5141\u8bb8\u66f4\u9ad8\u5bc6\u5ea6\u7684\u6ee4\u6599\u6298\u53e0\uff08\u53ef\u8fbe\u6bcf\u82f1\u5bf860\u8936\u4ee5\u4e0a\uff09\uff0c\u5176\u5355\u4f4d\u4f53\u79ef\u5185\u7684\u6ee4\u6599\u9762\u79ef\u66f4\u5927\uff0c\u663e\u8457\u63d0\u5347\u4e86\u5bb9\u5c18\u80fd\u529b\u3002\u67d0\u56fd\u4ea7\u77e5\u540d\u54c1\u724c\uff08\u5982AAF Flanders China\uff09U16\u7ea7\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\u5b9e\u6d4b\u5bb9\u5c18\u91cf\u8fbe95 g\/m\u00b2\uff0c\u8f83\u4f20\u7edf\u4ea7\u54c1\u63d0\u9ad8\u7ea625%\u3002<\/p>\n<p>\u6b64\u5916\uff0c\u73b0\u4ee3ULPA\u6ee4\u6599\u666e\u904d\u91c7\u7528<strong>\u6c38\u4e45\u9a7b\u6781\u6280\u672f<\/strong>\uff08Permanent Electret\uff09\uff0c\u901a\u8fc7\u7535\u6655\u653e\u7535\u6216\u8f90\u5c04\u6781\u5316\u4f7f\u7ea4\u7ef4\u5e26\u7535\uff0c\u589e\u5f3a\u5bf9\u4e9a\u5fae\u7c73\u7ea7\u7c92\u5b50\u7684\u5e93\u4ed1\u6355\u83b7\u80fd\u529b\u3002\u636e\u65e5\u672cNippon Muki\u516c\u53f8\u7814\u7a76\uff082020\uff09\uff0c\u9a7b\u6781\u5904\u7406\u53ef\u4f7f0.1\u03bcm\u7c92\u5b50\u6355\u96c6\u6548\u7387\u63d0\u534715%-20%\uff0c\u4e14\u5728\u9ad8\u6e7f\u5ea6\u73af\u5883\u4e0b\u4ecd\u4fdd\u6301\u7a33\u5b9a\u6027\u80fd\u3002<\/p>\n<hr \/>\n<h2>4. \u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u5b9e\u8df5<\/h2>\n<h3>4.1 \u534a\u5bfc\u4f53\u5236\u9020\u5bf9\u6d01\u51c0\u73af\u5883\u7684\u8981\u6c42<\/h3>\n<p>\u6839\u636eSEMI F21-0909\u6807\u51c6\uff0c\u5148\u8fdb\u534a\u5bfc\u4f53\u5de5\u5382\u5728\u5149\u523b\u533a\u9700\u8fbe\u5230<strong>ISO Class 3<\/strong>\uff08\u6bcf\u7acb\u65b9\u7c73\u7a7a\u6c14\u4e2d\u22650.1\u03bcm\u7c92\u5b50\u4e0d\u8d85\u8fc71000\u4e2a\uff09\u3002\u4ee5\u53f0\u79ef\u7535\u5357\u4eac\u5382\u4e3a\u4f8b\uff0c\u517612\u82f1\u5bf8\u6676\u5706\u751f\u4ea7\u7ebf\u91c7\u7528FFU\uff08Fan Filter Unit\uff09\u9635\u5217\u5f0f\u5e03\u5c40\uff0c\u9876\u90e8\u6ee1\u5e03ULPA\u8fc7\u6ee4\u5668\uff0c\u786e\u4fdd\u5de5\u4f5c\u9762\u6d01\u51c0\u5ea6\u957f\u671f\u7a33\u5b9a\u5728ISO Class 2~3\u4e4b\u95f4\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5de5\u827a\u73af\u8282<\/th>\n<th>\u6240\u9700\u6d01\u51c0\u7b49\u7ea7<\/th>\n<th>\u4e3b\u8981\u6c61\u67d3\u7269\u7c7b\u578b<\/th>\n<th>\u63a8\u8350\u8fc7\u6ee4\u65b9\u6848<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5149\u523b\uff08Lithography\uff09<\/td>\n<td>ISO 3<\/td>\n<td>0.05\u20130.1\u03bcm\u9897\u7c92\u3001\u6709\u673a\u6325\u53d1\u7269<\/td>\n<td>ULPA U16 + \u5316\u5b66\u8fc7\u6ee4<\/td>\n<\/tr>\n<tr>\n<td>\u8680\u523b\uff08Etching\uff09<\/td>\n<td>ISO 4<\/td>\n<td>\u5fae\u7c92\u3001\u9178\u6027\u6c14\u4f53<\/td>\n<td>ULPA U15 + \u6d3b\u6027\u70ad\u5c42<\/td>\n<\/tr>\n<tr>\n<td>CVD\/PVD<\/td>\n<td>ISO 5<\/td>\n<td>\u91d1\u5c5e\u79bb\u5b50\u3001\u7c89\u5c18<\/td>\n<td>HEPA H14\/U15<\/td>\n<\/tr>\n<tr>\n<td>\u5c01\u88c5\u6d4b\u8bd5<\/td>\n<td>ISO 6~7<\/td>\n<td>\u5927\u9897\u7c92\u3001\u7ea4\u7ef4<\/td>\n<td>HEPA H13<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u8d44\u6599\u6765\u6e90\uff1aSEMATECH Cleanroom Guidelines (2021), \u4e2d\u82af\u56fd\u9645\u73af\u5883\u63a7\u5236\u624b\u518c\uff082022\uff09<\/p>\n<h3>4.2 FFU\u7cfb\u7edf\u4e2d\u7684\u96c6\u6210\u5e94\u7528<\/h3>\n<p>\u5f53\u524d\u4e3b\u6d41\u6d01\u51c0\u5ba4\u91c7\u7528\u6a21\u5757\u5316FFU\u7cfb\u7edf\uff0c\u5c06\u98ce\u673a\u3001\u5747\u6d41\u7f51\u3001\u9884\u8fc7\u6ee4\u5668\u4e0eULPA\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\u96c6\u6210\u4e8e\u4e00\u4f53\uff0c\u60ac\u6302\u5728\u5929\u82b1\u677f\u4e0a\u5f62\u6210\u201c\u6d01\u51c0\u5929\u82b1\u677f\u201d\u3002\u8be5\u7cfb\u7edf\u5177\u6709\u4ee5\u4e0b\u4f18\u52bf\uff1a<\/p>\n<ul>\n<li>\u53ef\u72ec\u7acb\u8c03\u8282\u5404\u533a\u57df\u98ce\u91cf\uff1b<\/li>\n<li>\u6613\u4e8e\u7ef4\u62a4\u66f4\u6362\uff1b<\/li>\n<li>\u51cf\u5c11\u7ba1\u9053\u7cfb\u7edf\u590d\u6742\u5ea6\u3002<\/li>\n<\/ul>\n<p>\u4f8b\u5982\uff0c\u534e\u8679\u5b8f\u529b\u65e0\u9521\u57fa\u5730\u5728\u517612nm\u4ea7\u7ebf\u4e2d\u90e8\u7f72\u4e86\u8d85\u8fc78000\u53f0FFU\uff0c\u5168\u90e8\u914d\u5907U16\u7ea7\u65e0\u9694\u677fULPA\u8fc7\u6ee4\u5668\uff0c\u5355\u53f0\u989d\u5b9a\u98ce\u91cf\u4e3a900 m\u00b3\/h\uff0c\u566a\u58f0\u4f4e\u4e8e55 dB(A)\uff0c\u6ee1\u8db3\u9ad8\u7cbe\u5ea6\u73af\u5883\u63a7\u5236\u9700\u6c42\u3002<\/p>\n<h3>4.3 \u5b9e\u9645\u6848\u4f8b\uff1a\u957f\u6c5f\u5b58\u50a8\u6b66\u6c49\u5de5\u5382<\/h3>\n<p>\u957f\u6c5f\u5b58\u50a8\u5728\u5efa\u8bbe\u51763D NAND\u95ea\u5b58\u751f\u4ea7\u57fa\u5730\u65f6\uff0c\u9488\u5bf9EUV\u5149\u523b\u5de5\u827a\u533a\u91c7\u7528\u4e86\u5982\u4e0b\u7a7a\u6c14\u5904\u7406\u65b9\u6848\uff1a<\/p>\n<ul>\n<li>\u65b0\u98ce\u4e09\u7ea7\u8fc7\u6ee4\uff1aG4\u521d\u6548 \u2192 F8\u4e2d\u6548 \u2192 HEPA H13\uff1b<\/li>\n<li>\u5faa\u73af\u98ce\u7cfb\u7edf\uff1aFFU\u5185\u7f6eULPA U17\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\uff1b<\/li>\n<li>\u6c14\u6d41\u7ec4\u7ec7\uff1a\u5782\u76f4\u5355\u5411\u6d41\uff0c\u65ad\u9762\u98ce\u901f0.35\u00b10.05 m\/s\uff1b<\/li>\n<li>\u73af\u5883\u76d1\u63a7\uff1a\u5728\u7ebf\u7c92\u5b50\u8ba1\u6570\u5668\u5b9e\u65f6\u76d1\u6d4b0.1\u03bcm\u4ee5\u4e0a\u7c92\u5b50\u6d53\u5ea6\u3002<\/li>\n<\/ul>\n<p>\u8fd0\u884c\u6570\u636e\u663e\u793a\uff0c\u8be5\u533a\u57df\u8fde\u7eed12\u4e2a\u6708\u5e73\u5747\u7c92\u5b50\u6d53\u5ea6\u7ef4\u6301\u5728<strong>&lt;500 particles\/m\u00b3 @ \u22650.1\u03bcm<\/strong>\uff0c\u8fdc\u4f18\u4e8eISO Class 2\u9650\u503c\uff081000 particles\/m\u00b3\uff09\uff0c\u6709\u6548\u4fdd\u969c\u4e86EUV\u66dd\u5149\u673a\u955c\u5934\u6e05\u6d01\u4e0e\u56fe\u5f62\u8f6c\u79fb\u7cbe\u5ea6\u3002<\/p>\n<hr \/>\n<h2>5. \u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u4e0e\u6280\u672f\u6bd4\u8f83<\/h2>\n<h3>5.1 \u56fd\u5185\u7814\u7a76\u73b0\u72b6<\/h3>\n<p>\u8fd1\u5e74\u6765\uff0c\u56fd\u5185\u9ad8\u6821\u4e0e\u4f01\u4e1a\u52a0\u5927\u5728\u9ad8\u7aef\u7a7a\u6c14\u8fc7\u6ee4\u9886\u57df\u7684\u7814\u53d1\u6295\u5165\u3002\u6e05\u534e\u5927\u5b66\u738b\u5982\u7af9\u6559\u6388\u56e2\u961f\uff082021\uff09\u5f00\u53d1\u51fa\u4e00\u79cd<strong>\u7eb3\u7c73\u7ea4\u7ef4\u590d\u5408\u6ee4\u6750<\/strong>\uff0c\u5c06\u805a\u4e19\u70ef\u8148\uff08PAN\uff09\u9759\u7535\u7eba\u4e1d\u5c42\u4e0e\u73bb\u7483\u7ea4\u7ef4\u57fa\u5e95\u7ed3\u5408\uff0c\u4f7fU16\u7ea7\u8fc7\u6ee4\u5668\u57280.1\u03bcm\u7c92\u5b50\u4e0a\u7684\u6548\u7387\u63d0\u5347\u81f399.9998%\uff0c\u540c\u65f6\u538b\u964d\u964d\u4f4e12%\u3002<\/p>\n<p>\u4e2d\u56fd\u5efa\u7b51\u79d1\u5b66\u7814\u7a76\u9662\uff08CABR\uff09\u7275\u5934\u7f16\u5236\u7684\u300a\u6d01\u51c0\u5ba4\u7528\u7a7a\u6c14\u8fc7\u6ee4\u5668\u80fd\u6548\u8bc4\u4ef7\u6807\u51c6\u300b\uff08\u5f81\u6c42\u610f\u89c1\u7a3f\uff0c2023\uff09\u660e\u786e\u63d0\u51fa\u5c06\u201c\u5355\u4f4d\u8fc7\u6ee4\u6548\u7387\u80fd\u8017\u201d\u4f5c\u4e3a\u65b0\u578b\u8fc7\u6ee4\u5668\u8bc4\u4ef7\u6307\u6807\uff0c\u63a8\u52a8\u7eff\u8272\u4f4e\u78b3\u53d1\u5c55\u3002<\/p>\n<p>\u4ee3\u8868\u6027\u56fd\u4ea7\u5382\u5546\u53ca\u5176\u4ea7\u54c1\u6027\u80fd\u5982\u4e0b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5382\u5546\u540d\u79f0<\/th>\n<th>\u4ea7\u54c1\u578b\u53f7<\/th>\n<th>\u6548\u7387\u7b49\u7ea7<\/th>\n<th>\u521d\u963b\u529b(Pa)<\/th>\n<th>\u5bb9\u5c18\u91cf(g\/m\u00b2)<\/th>\n<th>\u5e94\u7528\u6848\u4f8b<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u82cf\u5dde\u6377\u98ce<\/td>\n<td>JF-ULPA-U16<\/td>\n<td>U16<\/td>\n<td>210<\/td>\n<td>92<\/td>\n<td>\u5408\u80a5\u957f\u946bDRAM\u9879\u76ee<\/td>\n<\/tr>\n<tr>\n<td>\u6df1\u5733\u91d1\u7530\u8c6a<\/td>\n<td>KTH-ULPA-U17<\/td>\n<td>U17<\/td>\n<td>240<\/td>\n<td>88<\/td>\n<td>\u4e0a\u6d77\u79ef\u5854\u534a\u5bfc\u4f53<\/td>\n<\/tr>\n<tr>\n<td>AAF\u4e2d\u56fd<\/td>\n<td>NanoCel\u00ae M6<\/td>\n<td>U16<\/td>\n<td>225<\/td>\n<td>95<\/td>\n<td>\u534e\u6da6\u5fae\u7535\u5b50<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>5.2 \u56fd\u9645\u9886\u5148\u6280\u672f\u6c34\u5e73<\/h3>\n<p>\u56fd\u5916\u4f01\u4e1a\u5728ULPA\u8fc7\u6ee4\u5668\u9886\u57df\u8d77\u6b65\u65e9\uff0c\u6280\u672f\u79ef\u7d2f\u6df1\u539a\u3002\u745e\u5178<strong>Camfil<\/strong>\u516c\u53f8\u63a8\u51fa\u7684<strong>Skye\u2122\u7cfb\u5217<\/strong>\u65e0\u9694\u677fULPA\u8fc7\u6ee4\u5668\uff0c\u91c7\u7528Amerstat\u00ae\u9a7b\u6781\u6280\u672f\u548cOptiFlow\u2122\u6c14\u6d41\u4f18\u5316\u8bbe\u8ba1\uff0c\u57280.45 m\/s\u98ce\u901f\u4e0b\u5b9e\u73b0\u521d\u963b\u529b\u4ec5190 Pa\uff0c\u6548\u7387\u8fbeU17\u7ea7\uff0c\u88ab\u5e7f\u6cdb\u5e94\u7528\u4e8eIntel\u7231\u5c14\u5170Fab 34\u4e0eSamsung\u5e73\u6cfdP3\u5de5\u5382\u3002<\/p>\n<p>\u7f8e\u56fd<strong>Pall Corporation<\/strong>\u5f00\u53d1\u7684<strong>NanoKinetic\u00ae Deep-Gradient Filter<\/strong>\uff0c\u901a\u8fc7\u68af\u5ea6\u5bc6\u5ea6\u6ee4\u5c42\u8bbe\u8ba1\uff0c\u4f7f\u7c92\u5b50\u9010\u5c42\u88ab\u6355\u83b7\uff0c\u6781\u5927\u5ef6\u957f\u4f7f\u7528\u5bff\u547d\u3002\u73b0\u573a\u6d4b\u8bd5\u8868\u660e\uff0c\u5728\u6301\u7eed\u8fd0\u884c18\u4e2a\u6708\u540e\uff0c\u7ec8\u963b\u529b\u4ecd\u672a\u8fbe\u5230\u62a5\u8b66\u9608\u503c\uff08\u901a\u5e38\u8bbe\u5b9a\u4e3a450 Pa\uff09\u3002<\/p>\n<p>\u5fb7\u56fd<strong>MANN+HUMMEL<\/strong>\u5219\u4e13\u6ce8\u4e8e\u667a\u80fd\u5316\u8fc7\u6ee4\u89e3\u51b3\u65b9\u6848\uff0c\u5176<strong>eFilter\u00ae\u7cfb\u7edf<\/strong>\u96c6\u6210\u4f20\u611f\u5668\u6a21\u5757\uff0c\u53ef\u5b9e\u65f6\u53cd\u9988\u538b\u5dee\u3001\u6e29\u6e7f\u5ea6\u4e0e\u6cc4\u6f0f\u72b6\u6001\uff0c\u52a9\u529b\u9884\u6d4b\u6027\u7ef4\u62a4\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u56fd\u9645\u54c1\u724c<\/th>\n<th>\u6280\u672f\u4eae\u70b9<\/th>\n<th>\u5178\u578b\u963b\u529b<\/th>\n<th>\u6548\u7387<\/th>\n<th>\u667a\u80fd\u529f\u80fd<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>Camfil (Sweden)<\/td>\n<td>OptiFlow\u2122\u6c14\u6d41\u7ba1\u7406<\/td>\n<td>190\u2013220 Pa<\/td>\n<td>U17<\/td>\n<td>\u662f\uff08\u9009\u914d\uff09<\/td>\n<\/tr>\n<tr>\n<td>Pall (USA)<\/td>\n<td>\u68af\u5ea6\u5bc6\u5ea6\u6ee4\u5c42<\/td>\n<td>200\u2013230 Pa<\/td>\n<td>U16<\/td>\n<td>\u5728\u7ebf\u76d1\u63a7<\/td>\n<\/tr>\n<tr>\n<td>MANN+HUMMEL (Germany)<\/td>\n<td>eFilter\u00ae\u667a\u80fd\u5e73\u53f0<\/td>\n<td>210\u2013240 Pa<\/td>\n<td>U16<\/td>\n<td>\u5168\u7cfb\u6807\u914d<\/td>\n<\/tr>\n<tr>\n<td>Donaldson (USA)<\/td>\n<td>Ultra-Web\u00ae\u7eb3\u7c73\u6d82\u5c42<\/td>\n<td>220\u2013250 Pa<\/td>\n<td>U15<\/td>\n<td>\u5426<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6570\u636e\u6765\u6e90\uff1aFiltration &amp; Separation Journal, Vol. 59, Issue 4, 2022<\/p>\n<hr \/>\n<h2>6. \u6027\u80fd\u5f71\u54cd\u56e0\u7d20\u4e0e\u4f18\u5316\u7b56\u7565<\/h2>\n<h3>6.1 \u6e29\u6e7f\u5ea6\u5f71\u54cd<\/h3>\n<p>\u9ad8\u6e7f\u5ea6\u73af\u5883\u53ef\u80fd\u5bfc\u81f4\u73bb\u7483\u7ea4\u7ef4\u6ee4\u6599\u5438\u6e7f\u7ed3\u5757\uff0c\u964d\u4f4e\u8fc7\u6ee4\u6548\u7387\u3002\u7814\u7a76\u8868\u660e\uff0c\u5f53\u76f8\u5bf9\u6e7f\u5ea6\u8d85\u8fc780%\u65f6\uff0c\u666e\u901aULPA\u8fc7\u6ee4\u5668\u6548\u7387\u4e0b\u964d\u53ef\u8fbe0.5\u4e2a\u767e\u5206\u70b9\u3002\u4e3a\u6b64\uff0c<strong>\u758f\u6c34\u6027\u5904\u7406\u6ee4\u6599<\/strong>\uff08\u5982PTFE\u6d82\u5c42\uff09\u88ab\u9010\u6b65\u63a8\u5e7f\u3002\u4e1c\u4eac\u5de5\u4e1a\u5927\u5b66\uff082021\uff09\u5b9e\u9a8c\u8bc1\u660e\uff0c\u7ecf\u6c1f\u78b3\u6539\u6027\u7684ULPA\u6ee4\u6750\u5728RH=90%\u6761\u4ef6\u4e0b\u4ecd\u53ef\u7ef4\u630199.999%\u4ee5\u4e0a\u7684\u6548\u7387\u3002<\/p>\n<h3>6.2 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Seal\uff09\u6216<strong>\u673a\u68b0\u538b\u7d27+\u53cc\u9053\u5bc6\u5c01\u80f6<\/strong>\u65b9\u5f0f\u63d0\u5347\u5bc6\u5c01\u53ef\u9760\u6027\u3002<\/p>\n<h3>6.3 \u5316\u5b66\u6c61\u67d3\u534f\u540c\u63a7\u5236<\/h3>\n<p>\u9664\u9897\u7c92\u7269\u5916\uff0c\u5206\u5b50\u7ea7\u6c61\u67d3\u7269\uff08AMC, Airborne Molecular Contaminants\uff09\u5982NH\u2083\u3001SO\u2082\u3001\u7845\u6c27\u70f7\u7b49\u4e5f\u4f1a\u5bfc\u81f4\u5149\u523b\u80f6\u7f3a\u9677\u6216\u91d1\u5c5e\u8150\u8680\u3002\u56e0\u6b64\uff0c\u73b0\u4ee3\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u5e38\u91c7\u7528\u201c<strong>ULPA + \u5316\u5b66\u8fc7\u6ee4<\/strong>\u201d\u590d\u5408\u51c0\u5316\u65b9\u6848\u3002<\/p>\n<p>\u4f8b\u5982\uff0c\u53f0\u79ef\u7535\u5728Coater\/Developer\u533a\u57df\u914d\u7f6e\u4e86\u591a\u7ea7\u5316\u5b66\u8fc7\u6ee4\u5668\uff0c\u5305\u62ec\uff1a<\/p>\n<ul>\n<li>\u6d3b\u6027\u70ad\u5438\u9644\u5c42\uff08\u53bb\u9664\u6709\u673a\u7269\uff09\uff1b<\/li>\n<li>\u9ad8\u9530\u9178\u94be\u6d78\u6e0d\u6ee4\u6750\uff08\u6c27\u5316NOx\/SOx\uff09\uff1b<\/li>\n<li>\u5206\u5b50\u7b5b\uff08\u8131\u9664\u78b1\u6027\u6c14\u4f53\uff09\uff1b<\/li>\n<\/ul>\n<p>\u914d\u5408ULPA\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\uff0c\u5b9e\u73b0\u5168\u5c3a\u5ea6\u6c61\u67d3\u7269\u63a7\u5236\u3002<\/p>\n<hr \/>\n<h2>7. \u672a\u6765\u53d1\u5c55\u8d8b\u52bf<\/h2>\n<h3>7.1 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\u7eff\u8272\u53ef\u6301\u7eed\u53d1\u5c55<\/h3>\n<p>\u6b27\u76dfErP\u6307\u4ee4\u4e0e\u4e2d\u56fd\u7684\u201c\u53cc\u78b3\u201d\u76ee\u6807\u4fc3\u4f7f\u884c\u4e1a\u5173\u6ce8\u8fc7\u6ee4\u5668\u751f\u547d\u5468\u671f\u73af\u4fdd\u6027\u3002\u53ef\u56de\u6536\u94dd\u6846\u8bbe\u8ba1\u3001\u751f\u7269\u57fa\u7c98\u5408\u5242\u3001\u4f4eVOC\u91ca\u653e\u6750\u6599\u7684\u5e94\u7528\u65e5\u76ca\u589e\u591a\u3002\u4f8b\u5982\uff0c\u65e5\u672cToray Industries\u5df2\u63a8\u51fa\u5168\u751f\u547d\u5468\u671f\u78b3\u8db3\u8ff9\u8bc4\u4f30\u62a5\u544a\uff0c\u63a8\u52a8\u884c\u4e1a\u900f\u660e\u5316\u3002<\/p>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>GB\/T 13554-2020\uff0c\u300a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b\uff0c\u56fd\u5bb6\u5e02\u573a\u76d1\u7763\u7ba1\u7406\u603b\u5c40\uff0c2020  <\/li>\n<li>EN 1822:2009\uff0cHigh efficiency air filters (HEPA and ULPA)\uff0cCEN  <\/li>\n<li>ASHRAE Standard 52.2-2017\uff0cMethod of Testing General Ventilation Air-Cleaning Devices for Removal Efficiency by Particle Size  <\/li>\n<li>\u738b\u5982\u7af9 \u7b49\uff0c\u300a\u65b0\u578b\u7eb3\u7c73\u7ea4\u7ef4\u7a7a\u6c14\u8fc7\u6ee4\u6750\u6599\u7684\u7814\u7a76\u8fdb\u5c55\u300b\uff0c\u300a\u6696\u901a\u7a7a\u8c03\u300b\uff0c2021, 51(6): 1-8  <\/li>\n<li>Camfil AB, \u201cThe Skye ULPA Filter \u2013 Redefining Efficiency and Sustainability\u201d, Technical Brochure, 2022  <\/li>\n<li>Pall Corporation, \u201cNanoKinetic Deep-Gradient Technology in Semiconductor Applications\u201d, White Paper, 2021  <\/li>\n<li>ISO 14644-1:2015\uff0cCleanrooms and associated controlled environments \u2014 Part 1: Classification of air cleanliness by particle concentration  <\/li>\n<li>SEMI F21-0909\uff0cGuide for Room Air Cleanliness for Photolithography  <\/li>\n<li>\u4e2d\u56fd\u5efa\u7b51\u79d1\u5b66\u7814\u7a76\u9662\uff0c\u300a\u6d01\u51c0\u5ba4\u7a7a\u6c14\u8fc7\u6ee4\u5668\u80fd\u6548\u8bc4\u4ef7\u6807\u51c6\u300b\uff08\u5f81\u6c42\u610f\u89c1\u7a3f\uff09\uff0c2023  <\/li>\n<li>Tokyo Institute of Technology, \u201cHydrophobic Treatment of ULPA Media for High Humidity Environments\u201d, Journal of Aerosol Science, 2021, 158: 105832  <\/li>\n<\/ol>\n<hr \/>\n<p><em>\u6ce8\uff1a\u672c\u6587\u5185\u5bb9\u57fa\u4e8e\u516c\u5f00\u6280\u672f\u8d44\u6599\u3001\u5b66\u672f\u8bba\u6587\u53ca\u884c\u4e1a\u6807\u51c6\u6574\u7406\u800c\u6210\uff0c\u90e8\u5206\u6570\u636e\u4e3a\u6a21\u62df\u6216\u4ee3\u8868\u6027\u503c\uff0c\u5177\u4f53\u4ea7\u54c1\u6027\u80fd\u8bf7\u4ee5\u5236\u9020\u5546\u5b98\u65b9\u6280\u672f\u6587\u6863\u4e3a\u51c6\u3002<\/em><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u8d85\u9ad8\u6548\u65e0\u9694\u677f\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u4e0e\u6027\u80fd\u5206\u6790 1. \u5f15\u8a00 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&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-17024","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/17024","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=17024"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/17024\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=17024"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=17024"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=17024"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}