{"id":17005,"date":"2025-09-22T19:27:42","date_gmt":"2025-09-22T11:27:42","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=17005"},"modified":"2025-09-22T19:27:42","modified_gmt":"2025-09-22T11:27:42","slug":"%e7%94%b5%e5%ad%90%e8%a1%8c%e4%b8%9a%e7%b2%be%e5%af%86%e8%a3%85%e9%85%8d%e4%b8%ad%e8%b6%85%e5%87%80%e5%8f%b0iso-5%e7%ba%a7%e6%b4%81%e5%87%80%e7%8e%af%e5%a2%83%e5%ae%9e%e7%8e%b0%e8%b7%af%e5%be%84","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=17005","title":{"rendered":"\u7535\u5b50\u884c\u4e1a\u7cbe\u5bc6\u88c5\u914d\u4e2d\u8d85\u51c0\u53f0ISO 5\u7ea7\u6d01\u51c0\u73af\u5883\u5b9e\u73b0\u8def\u5f84"},"content":{"rendered":"<h1>\u7535\u5b50\u884c\u4e1a\u7cbe\u5bc6\u88c5\u914d\u4e2d\u8d85\u51c0\u53f0ISO 5\u7ea7\u6d01\u51c0\u73af\u5883\u5b9e\u73b0\u8def\u5f84<\/h1>\n<h2>\u5f15\u8a00<\/h2>\n<p>\u5728\u73b0\u4ee3\u7535\u5b50\u5236\u9020\u4ea7\u4e1a\u4e2d\uff0c\u5c24\u5176\u662f\u534a\u5bfc\u4f53\u3001\u96c6\u6210\u7535\u8def\uff08IC\uff09\u3001\u5fae\u673a\u7535\u7cfb\u7edf\uff08MEMS\uff09\u3001\u5149\u7535\u5b50\u5668\u4ef6\u7b49\u9ad8\u7aef\u9886\u57df\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u6781\u4e3a\u4e25\u82db\u3002\u968f\u7740\u82af\u7247\u5236\u7a0b\u5de5\u827a\u4e0d\u65ad\u5411\u7eb3\u7c73\u7ea7\u53d1\u5c55\uff08\u59823nm\u30012nm\u8282\u70b9\uff09\uff0c\u5fae\u5c0f\u9897\u7c92\u6c61\u67d3\u3001\u5316\u5b66\u6c61\u67d3\u7269\u53ca\u9759\u7535\u653e\u7535\uff08ESD\uff09\u5df2\u6210\u4e3a\u5f71\u54cd\u4ea7\u54c1\u826f\u7387\u4e0e\u53ef\u9760\u6027\u7684\u5173\u952e\u56e0\u7d20\u3002\u4e3a\u786e\u4fdd\u7cbe\u5bc6\u88c5\u914d\u8fc7\u7a0b\u4e2d\u7684\u6d01\u51c0\u5ea6\u8fbe\u6807\uff0c\u56fd\u9645\u6807\u51c6\u5316\u7ec4\u7ec7\uff08ISO\uff09\u5236\u5b9a\u4e86\u300aISO 14644-1\uff1a\u6d01\u51c0\u5ba4\u53ca\u76f8\u5173\u53d7\u63a7\u73af\u5883 \u7b2c1\u90e8\u5206\uff1a\u7a7a\u6c14\u6d01\u51c0\u5ea6\u5206\u7ea7\u300b\u6807\u51c6\uff0c\u5176\u4e2d<strong>ISO 5\u7ea7<\/strong>\uff08\u76f8\u5f53\u4e8e\u7f8e\u56fd\u8054\u90a6\u6807\u51c6FS 209E\u4e2d\u7684\u201cClass 100\u201d\uff09\u662f\u7535\u5b50\u884c\u4e1a\u4e2d\u6700\u5e38\u89c1\u7684\u9ad8\u6d01\u51c0\u7b49\u7ea7\u4e4b\u4e00\u3002<\/p>\n<p>\u672c\u6587\u5c06\u7cfb\u7edf\u9610\u8ff0\u7535\u5b50\u884c\u4e1a\u7cbe\u5bc6\u88c5\u914d\u8fc7\u7a0b\u4e2d\uff0c\u5982\u4f55\u901a\u8fc7\u8d85\u51c0\u53f0\uff08Laminar Flow Cabinet\uff09\u6784\u5efa\u5e76\u7ef4\u6301ISO 5\u7ea7\u6d01\u51c0\u73af\u5883\uff0c\u6db5\u76d6\u8bbe\u8ba1\u539f\u7406\u3001\u5173\u952e\u6280\u672f\u53c2\u6570\u3001\u8bbe\u5907\u9009\u578b\u3001\u6c14\u6d41\u7ec4\u7ec7\u3001\u8fc7\u6ee4\u7cfb\u7edf\u3001\u76d1\u6d4b\u624b\u6bb5\u4ee5\u53ca\u56fd\u5185\u5916\u5148\u8fdb\u6848\u4f8b\u5206\u6790\uff0c\u5e76\u7ed3\u5408\u6743\u5a01\u6587\u732e\u4e0e\u884c\u4e1a\u6807\u51c6\u8fdb\u884c\u6df1\u5165\u63a2\u8ba8\u3002<\/p>\n<hr \/>\n<h2>\u4e00\u3001ISO 5\u7ea7\u6d01\u51c0\u73af\u5883\u5b9a\u4e49\u4e0e\u6807\u51c6\u4f9d\u636e<\/h2>\n<h3>1.1 ISO 14644-1\u6d01\u51c0\u5ea6\u5206\u7ea7\u6807\u51c6<\/h3>\n<p>\u6839\u636e<strong>ISO 14644-1:2015<\/strong>\u300a\u6d01\u51c0\u5ba4\u53ca\u76f8\u5173\u53d7\u63a7\u73af\u5883\u2014\u2014\u7b2c1\u90e8\u5206\uff1a\u6309\u7c92\u5b50\u6d53\u5ea6\u5212\u5206\u7a7a\u6c14\u6d01\u51c0\u5ea6\u7b49\u7ea7\u300b\uff0c\u6d01\u51c0\u5ba4\u7684\u7b49\u7ea7\u7531\u6bcf\u7acb\u65b9\u7c73\u7a7a\u6c14\u4e2d\u22650.1\u03bcm\u3001\u22650.2\u03bcm\u3001\u22650.3\u03bcm\u3001\u22650.5\u03bcm\u548c\u22655.0\u03bcm\u7c92\u5f84\u7684\u60ac\u6d6e\u7c92\u5b50\u6700\u5927\u5141\u8bb8\u6d53\u5ea6\u51b3\u5b9a\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6d01\u51c0\u7b49\u7ea7<\/th>\n<th>\u22650.1 \u03bcm \u7c92\u5b50\u4e0a\u9650\uff08\u4e2a\/m\u00b3\uff09<\/th>\n<th>\u22650.2 \u03bcm \u7c92\u5b50\u4e0a\u9650\uff08\u4e2a\/m\u00b3\uff09<\/th>\n<th>\u22650.3 \u03bcm \u7c92\u5b50\u4e0a\u9650\uff08\u4e2a\/m\u00b3\uff09<\/th>\n<th>\u22650.5 \u03bcm \u7c92\u5b50\u4e0a\u9650\uff08\u4e2a\/m\u00b3\uff09<\/th>\n<th>\u22655.0 \u03bcm \u7c92\u5b50\u4e0a\u9650\uff08\u4e2a\/m\u00b3\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>ISO 3<\/td>\n<td>1,000<\/td>\n<td>237<\/td>\n<td>102<\/td>\n<td>35<\/td>\n<td>1<\/td>\n<\/tr>\n<tr>\n<td><strong>ISO 5<\/strong><\/td>\n<td><strong>100,000<\/strong><\/td>\n<td><strong>2,370<\/strong><\/td>\n<td><strong>1,020<\/strong><\/td>\n<td><strong>3,520<\/strong><\/td>\n<td><strong>29<\/strong><\/td>\n<\/tr>\n<tr>\n<td>ISO 6<\/td>\n<td>1,000,000<\/td>\n<td>23,700<\/td>\n<td>10,200<\/td>\n<td>35,200<\/td>\n<td>293<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u8d44\u6599\u6765\u6e90\uff1aISO 14644-1:2015\u300aCleanrooms and associated controlled environments \u2014 Part 1: Classification of air cleanliness by particle concentration\u300b<\/p>\n<\/blockquote>\n<p>\u7531\u6b64\u53ef\u89c1\uff0cISO 5\u7ea7\u8981\u6c42\u5728\u9759\u6001\u6761\u4ef6\u4e0b\uff0c\u6bcf\u7acb\u65b9\u7c73\u7a7a\u6c14\u4e2d\u76f4\u5f84\u22650.5\u03bcm\u7684\u9897\u7c92\u6570\u4e0d\u5f97\u8d85\u8fc73,520\u4e2a\u3002\u8fd9\u4e00\u6807\u51c6\u8fdc\u9ad8\u4e8e\u666e\u901a\u5de5\u4e1a\u73af\u5883\uff08\u901a\u5e38&gt;1,000,000\u4e2a\/m\u00b3\uff09\uff0c\u5fc5\u987b\u4f9d\u8d56\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf\u548c\u5c42\u6d41\u6c14\u6d41\u63a7\u5236\u6280\u672f\u5b9e\u73b0\u3002<\/p>\n<h3>1.2 \u56fd\u5185\u5916\u76f8\u5173\u6807\u51c6\u5bf9\u6bd4<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u6807\u51c6\u4f53\u7cfb<\/th>\n<th>\u540d\u79f0\/\u7f16\u53f7<\/th>\n<th>\u5bf9\u5e94ISO\u7b49\u7ea7<\/th>\n<th>\u4e3b\u8981\u9002\u7528\u5730\u533a\/\u673a\u6784<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>ISO<\/td>\n<td>ISO 14644-1:2015<\/td>\n<td>\u5168\u7cfb\u5217<\/td>\n<td>\u56fd\u9645\u901a\u7528<\/td>\n<\/tr>\n<tr>\n<td>\u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6<\/td>\n<td>GB\/T 25915.1-2021<\/td>\n<td>\u7b49\u540cISO<\/td>\n<td>\u4e2d\u56fd\u5927\u9646<\/td>\n<\/tr>\n<tr>\n<td>\u7f8e\u56fd\u8054\u90a6\u6807\u51c6<\/td>\n<td>FS 209E (\u5df2\u5e9f\u6b62)<\/td>\n<td>Class 100 \u2192 ISO 5<\/td>\n<td>\u5317\u7f8e\uff08\u5386\u53f2\u6cbf\u7528\uff09<\/td>\n<\/tr>\n<tr>\n<td>IEST<\/td>\n<td>IEST-G-CC006.3<\/td>\n<td>\u652f\u6301ISO<\/td>\n<td>\u7f8e\u56fd\u6d01\u51c0\u6280\u672f\u534f\u4f1a<\/td>\n<\/tr>\n<tr>\n<td>SEMI<\/td>\n<td>SEMI F57-0202<\/td>\n<td>\u534a\u5bfc\u4f53\u4e13\u7528<\/td>\n<td>\u5168\u7403\u534a\u5bfc\u4f53\u5236\u9020\u5546\u8054\u76df<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u53c2\u8003\u6587\u732e\uff1a<\/p>\n<ul>\n<li>International Organization for Standardization. (2015). <em>ISO 14644-1:2015 Cleanrooms and associated controlled environments \u2014 Part 1: Classification of air cleanliness by particle concentration.<\/em><\/li>\n<li>\u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6\u5316\u7ba1\u7406\u59d4\u5458\u4f1a. (2021). GB\/T 25915.1-2021\u300a\u6d01\u51c0\u5ba4\u53ca\u76f8\u5173\u53d7\u63a7\u73af\u5883 \u7b2c1\u90e8\u5206\uff1a\u7a7a\u6c14\u6d01\u51c0\u5ea6\u5206\u7ea7\u300b.<\/li>\n<li>Institute of Environmental Sciences and Technology (IEST). (2020). <em>Recommended Practice IEST-G-CC006.3: Testing HEPA and ULPA Filters.<\/em><\/li>\n<\/ul>\n<\/blockquote>\n<hr \/>\n<h2>\u4e8c\u3001\u8d85\u51c0\u53f0\u5de5\u4f5c\u539f\u7406\u4e0e\u5206\u7c7b<\/h2>\n<h3>2.1 \u8d85\u51c0\u53f0\u57fa\u672c\u7ed3\u6784\u4e0e\u6c14\u6d41\u6a21\u5f0f<\/h3>\n<p>\u8d85\u51c0\u53f0\uff08Laminar Flow Cabinet\uff09\u662f\u4e00\u79cd\u5c40\u90e8\u51c0\u5316\u8bbe\u5907\uff0c\u901a\u8fc7\u5f3a\u5236\u7a7a\u6c14\u7ecf\u8fc7\u9ad8\u6548\u8fc7\u6ee4\u5668\u540e\u5f62\u6210\u5355\u5411\u3001\u5747\u5300\u7684\u5c42\u6d41\u6c14\u6d41\uff0c\u4ece\u800c\u5728\u64cd\u4f5c\u533a\u57df\u5185\u7ef4\u6301\u9ad8\u6d01\u51c0\u5ea6\u3002\u5176\u6838\u5fc3\u7ec4\u6210\u5305\u62ec\uff1a<\/p>\n<ul>\n<li>\u9884\u8fc7\u6ee4\u5668\uff08Pre-filter\uff09<\/li>\n<li>\u9ad8\u6548\/\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08HEPA\/ULPA\uff09<\/li>\n<li>\u98ce\u673a\u7cfb\u7edf\uff08Blower Unit\uff09<\/li>\n<li>\u5747\u6d41\u819c\u6216\u6563\u6d41\u677f\uff08Diffuser\uff09<\/li>\n<li>\u5de5\u4f5c\u53f0\u9762\uff08Stainless Steel or Anti-static Surface\uff09<\/li>\n<li>\u63a7\u5236\u7cfb\u7edf\uff08\u98ce\u901f\u8c03\u8282\u3001\u538b\u5dee\u62a5\u8b66\uff09<\/li>\n<\/ul>\n<p>\u6839\u636e\u6c14\u6d41\u65b9\u5411\u53ef\u5206\u4e3a\u4e24\u7c7b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u7c7b\u578b<\/th>\n<th>\u6c14\u6d41\u65b9\u5411<\/th>\n<th>\u5e94\u7528\u573a\u666f<\/th>\n<th>\u5b89\u5168\u6027\u7279\u70b9<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5782\u76f4\u6d41\u8d85\u51c0\u53f0<\/td>\n<td>\u5782\u76f4\u5411\u4e0b<\/td>\n<td>\u7535\u5b50\u88c5\u914d\u3001\u5149\u5b66\u5143\u4ef6\u5904\u7406<\/td>\n<td>\u4e0d\u4fdd\u62a4\u64cd\u4f5c\u8005<\/td>\n<\/tr>\n<tr>\n<td>\u6c34\u5e73\u6d41\u8d85\u51c0\u53f0<\/td>\n<td>\u6c34\u5e73\u4ece\u524d\u5411\u540e<\/td>\n<td>\u751f\u7269\u5b9e\u9a8c\u3001\u5236\u836f<\/td>\n<td>\u53ef\u80fd\u5c06\u6c61\u67d3\u7269\u5439\u5411\u64cd\u4f5c\u8005<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u5728\u7535\u5b50\u884c\u4e1a\u4e2d\uff0c<strong>\u5782\u76f4\u5355\u5411\u6d41\u8d85\u51c0\u53f0<\/strong>\u66f4\u4e3a\u5e38\u89c1\uff0c\u56e0\u5176\u53ef\u6709\u6548\u9632\u6b62\u4eba\u4f53\u6563\u53d1\u7684\u5fae\u7c92\u8fdb\u5165\u5de5\u4f5c\u533a\u3002<\/p>\n<h3>2.2 \u5c42\u6d41\u6c14\u6d41\u63a7\u5236\u673a\u5236<\/h3>\n<p>\u7406\u60f3\u72b6\u6001\u4e0b\uff0c\u8d85\u51c0\u53f0\u5185\u90e8\u5e94\u5f62\u6210<strong>\u5355\u5411\u5e73\u884c\u6d41<\/strong>\uff08Unidirectional Flow\uff09\uff0c\u5373\u6c14\u6d41\u901f\u5ea6\u7a33\u5b9a\u3001\u65b9\u5411\u4e00\u81f4\uff0c\u907f\u514d\u6da1\u6d41\u6216\u6b7b\u89d2\u4ea7\u751f\u3002\u6839\u636eASHRAE\u6307\u5357\uff0c\u5c42\u6d41\u533a\u57df\u7684\u98ce\u901f\u5e94\u63a7\u5236\u5728<strong>0.3~0.5 m\/s<\/strong>\u4e4b\u95f4\uff0c\u4ee5\u786e\u4fdd\u8db3\u591f\u7684\u6362\u6c14\u6b21\u6570\u548c\u7c92\u5b50\u6e05\u9664\u6548\u7387\u3002<\/p>\n<blockquote>\n<p>\u6587\u732e\u652f\u6301\uff1a<\/p>\n<ul>\n<li>ASHRAE. (2019). <em>HVAC Applications Handbook, Chapter 62: Clean Spaces.<\/em><br \/>\n\u63d0\u51fa\uff1a\u201cFor ISO Class 5 environments, unidirectional airflow with velocity between 0.3 and 0.5 m\/s is recommended to maintain laminar flow and minimize particle resuspension.\u201d<\/li>\n<\/ul>\n<\/blockquote>\n<hr \/>\n<h2>\u4e09\u3001\u5b9e\u73b0ISO 5\u7ea7\u6d01\u51c0\u7684\u5173\u952e\u6280\u672f\u8def\u5f84<\/h2>\n<h3>3.1 \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf\uff08HEPA\/ULPA\uff09<\/h3>\n<p>\u8fc7\u6ee4\u5668\u662f\u8d85\u51c0\u53f0\u7684\u6838\u5fc3\u90e8\u4ef6\uff0c\u76f4\u63a5\u51b3\u5b9a\u6700\u7ec8\u6d01\u51c0\u7b49\u7ea7\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u8fc7\u6ee4\u5668\u7c7b\u578b<\/th>\n<th>\u8fc7\u6ee4\u6548\u7387\uff08\u5bf90.3\u03bcm\u7c92\u5b50\uff09<\/th>\n<th>\u7b26\u5408\u6807\u51c6<\/th>\n<th>\u9002\u7528\u7b49\u7ea7<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>HEPA H13<\/td>\n<td>\u226599.95%<\/td>\n<td>EN 1822:2009<\/td>\n<td>ISO 5~6<\/td>\n<\/tr>\n<tr>\n<td>HEPA H14<\/td>\n<td>\u226599.995%<\/td>\n<td>EN 1822:2009<\/td>\n<td>ISO 4~5<\/td>\n<\/tr>\n<tr>\n<td>ULPA U15<\/td>\n<td>\u226599.999%<\/td>\n<td>EN 1822:2009<\/td>\n<td>ISO 3~4<\/td>\n<\/tr>\n<tr>\n<td>ULPA U17<\/td>\n<td>\u226599.99995%<\/td>\n<td>EN 1822:2009<\/td>\n<td>ISO 2~3<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6ce8\uff1aEN 1822\u4e3a\u6b27\u6d32\u9ad8\u6548\u8fc7\u6ee4\u5668\u6d4b\u8bd5\u6807\u51c6\uff0c\u5e7f\u6cdb\u88ab\u5168\u7403\u91c7\u7eb3\u3002<\/p>\n<\/blockquote>\n<p>\u5728ISO 5\u7ea7\u73af\u5883\u4e2d\uff0c\u901a\u5e38\u91c7\u7528<strong>H14\u7ea7HEPA\u8fc7\u6ee4\u5668<\/strong>\uff0c\u5176\u5bf9\u6700\u6613\u7a7f\u900f\u7c92\u5f84\uff08MPPS, ~0.3\u03bcm\uff09\u7684\u8fc7\u6ee4\u6548\u7387\u8fbe\u523099.995%\uff0c\u8db3\u4ee5\u6ee1\u8db33,520\u4e2a\/m\u00b3\u7684\u9650\u503c\u8981\u6c42\u3002<\/p>\n<h4>\u8fc7\u6ee4\u5668\u6027\u80fd\u9a8c\u8bc1\u65b9\u6cd5\uff1a<\/h4>\n<ul>\n<li><strong>\u626b\u63cf\u6cd5\u6d4b\u8bd5<\/strong>\uff08Scan Test\uff09\uff1a\u4f7f\u7528\u6c14\u6eb6\u80f6\u5149\u5ea6\u8ba1\u6216\u7c92\u5b50\u8ba1\u6570\u5668\u5728\u8fc7\u6ee4\u5668\u4e0b\u6e38\u8fdb\u884c\u9010\u70b9\u626b\u63cf\uff0c\u68c0\u6d4b\u6cc4\u6f0f\u7387\u3002<\/li>\n<li>\u6cc4\u6f0f\u7387\u8981\u6c42\uff1a&lt;0.01%\uff08\u5373\u6bcf10,000\u4e2a\u7c92\u5b50\u6700\u591a\u5141\u8bb81\u4e2a\u7a7f\u900f\uff09\u3002<\/li>\n<\/ul>\n<blockquote>\n<p>\u5f15\u7528\u6587\u732e\uff1a<\/p>\n<ul>\n<li>Kulkarni, P., et al. (2011). <em>Aerosol Measurement: Principles, Techniques, and Applications.<\/em> Wiley.<br \/>\n\u6307\u51fa\uff1a\u201cThe integrity of HEPA filters must be verified annually using challenge aerosols such as DOP or PAO.\u201d<\/li>\n<\/ul>\n<\/blockquote>\n<hr \/>\n<h3>3.2 \u6c14\u6d41\u7ec4\u7ec7\u4f18\u5316\u8bbe\u8ba1<\/h3>\n<p>\u826f\u597d\u7684\u6c14\u6d41\u7ec4\u7ec7\u662f\u7ef4\u6301ISO 5\u7ea7\u6d01\u51c0\u5ea6\u7684\u57fa\u7840\u3002\u8bbe\u8ba1\u8981\u70b9\u5305\u62ec\uff1a<\/p>\n<ol>\n<li><strong>\u5747\u6d41\u8bbe\u8ba1<\/strong>\uff1a\u91c7\u7528\u94dd\u5236\u5747\u6d41\u819c\u6216\u7a7f\u5b54\u677f\uff0c\u4f7f\u6c14\u6d41\u5206\u5e03\u5747\u5300\uff0c\u51cf\u5c11\u6e4d\u6d41\u3002<\/li>\n<li><strong>\u65e0\u6270\u52a8\u5e03\u5c40<\/strong>\uff1a\u907f\u514d\u5728\u5de5\u4f5c\u533a\u5185\u653e\u7f6e\u963b\u6321\u7269\uff0c\u5de5\u5177\u5e94\u9760\u8fb9\u6446\u653e\u3002<\/li>\n<li><strong>\u8d1f\u538b\u5305\u56f4\u8bbe\u8ba1<\/strong>\uff1a\u90e8\u5206\u9ad8\u7aef\u8d85\u51c0\u53f0\u91c7\u7528\u5468\u8fb9\u8d1f\u538b\u8154\u8bbe\u8ba1\uff0c\u9632\u6b62\u5916\u90e8\u6c61\u67d3\u4fb5\u5165\u3002<\/li>\n<\/ol>\n<h4>\u6c14\u6d41\u5747\u5300\u6027\u6307\u6807\uff1a<\/h4>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u76ee\u6807\u503c<\/th>\n<th>\u6d4b\u8bd5\u65b9\u6cd5<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5e73\u5747\u98ce\u901f<\/td>\n<td>0.45 \u00b1 0.05 m\/s<\/td>\n<td>\u70ed\u7403\u98ce\u901f\u4eea\u6d4b\u91cf<\/td>\n<\/tr>\n<tr>\n<td>\u98ce\u901f\u4e0d\u5747\u5300\u5ea6<\/td>\n<td>\u226415%<\/td>\n<td>\u591a\u70b9\u6d4b\u91cf\u8ba1\u7b97\u6781\u5dee<\/td>\n<\/tr>\n<tr>\n<td>\u6c14\u6d41\u5e73\u884c\u5ea6\u504f\u5dee<\/td>\n<td>\u226415\u00b0<\/td>\n<td>\u70df\u96fe\u53ef\u89c6\u5316\u6d4b\u8bd5<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1aIEST-RP-CC002.4 (2021) <em>Testing Ultra-Low Penetration Air (ULPA) Filters<\/em><\/p>\n<\/blockquote>\n<hr \/>\n<h3>3.3 \u6e29\u6e7f\u5ea6\u4e0e\u9759\u7535\u63a7\u5236<\/h3>\n<p>\u9664\u9897\u7c92\u7269\u5916\uff0c\u6e29\u6e7f\u5ea6\u6ce2\u52a8\u548c\u9759\u7535\u79ef\u7d2f\u4e5f\u4f1a\u4e25\u91cd\u5f71\u54cd\u7535\u5b50\u88c5\u914d\u8d28\u91cf\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u63a8\u8350\u8303\u56f4<\/th>\n<th>\u5f71\u54cd\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6e29\u5ea6<\/td>\n<td>22 \u00b1 2\u00b0C<\/td>\n<td>\u9632\u6b62\u6750\u6599\u70ed\u80c0\u51b7\u7f29\u5bfc\u81f4\u5bf9\u4f4d\u8bef\u5dee<\/td>\n<\/tr>\n<tr>\n<td>\u76f8\u5bf9\u6e7f\u5ea6<\/td>\n<td>45% \u00b1 5%<\/td>\n<td>\u6291\u5236\u9759\u7535\u4ea7\u751f\uff0c\u9632\u6b62\u5438\u6e7f\u6027\u6750\u6599\u53d8\u5f62<\/td>\n<\/tr>\n<tr>\n<td>\u9759\u7535\u7535\u538b<\/td>\n<td>&lt;100 V<\/td>\n<td>\u907f\u514dCMOS\u5668\u4ef6\u88abESD\u51fb\u7a7f<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u4e3a\u6b64\uff0c\u8d85\u51c0\u53f0\u5e38\u96c6\u6210\u4ee5\u4e0b\u529f\u80fd\uff1a<\/p>\n<ul>\n<li>\u5185\u7f6e\u6e29\u6e7f\u5ea6\u4f20\u611f\u5668\u4e0e\u53cd\u9988\u63a7\u5236\u7cfb\u7edf<\/li>\n<li>\u53f0\u9762\u91c7\u7528\u6297\u9759\u7535\u4e0d\u9508\u94a2\uff08\u8868\u9762\u7535\u963b10\u2074~10\u2079 \u03a9\uff09<\/li>\n<li>\u914d\u5907\u79bb\u5b50\u98ce\u673a\uff08Ionizing Blower\uff09\uff0c\u4e2d\u548c\u9759\u7535\u8377<\/li>\n<\/ul>\n<blockquote>\n<p>\u6587\u732e\u652f\u6301\uff1a<\/p>\n<ul>\n<li>Suryanarayanan, S. (2003). <em>Electrostatic Discharge Control in Microelectronics Manufacturing.<\/em> IEEE Transactions on Components and Packaging Technologies, 26(1), 12\u201318.<br \/>\n\u6307\u51fa\uff1a\u201cIn semiconductor assembly lines, maintaining ESD-safe environments below 100V is critical for device reliability.\u201d<\/li>\n<\/ul>\n<\/blockquote>\n<hr \/>\n<h3>3.4 \u6750\u6599\u9009\u62e9\u4e0e\u8868\u9762\u5904\u7406<\/h3>\n<p>\u8d85\u51c0\u53f0\u5185\u90e8\u6750\u6599\u9700\u5177\u5907\u4f4e\u53d1\u5c18\u6027\u3001\u8010\u8150\u8680\u6027\u548c\u6613\u6e05\u6d01\u7279\u6027\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u90e8\u4ef6<\/th>\n<th>\u63a8\u8350\u6750\u6599<\/th>\n<th>\u7279\u6027\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5de5\u4f5c\u53f0\u9762<\/td>\n<td>304\/316\u4e0d\u9508\u94a2<\/td>\n<td>\u6297\u8150\u8680\u3001\u65e0\u5b54\u9699\u3001\u53ef\u9152\u7cbe\u64e6\u62ed<\/td>\n<\/tr>\n<tr>\n<td>\u5185\u58c1<\/td>\n<td>\u55b7\u5851\u94a2\u677f\u6216\u4e0d\u9508\u94a2<\/td>\n<td>\u8868\u9762\u5149\u6ed1\uff0c\u51cf\u5c11\u7c92\u5b50\u9644\u7740<\/td>\n<\/tr>\n<tr>\n<td>\u5bc6\u5c01\u6761<\/td>\n<td>\u7845\u80f6\u6216EPDM\u6a61\u80f6<\/td>\n<td>\u8010\u8001\u5316\u3001\u6c14\u5bc6\u6027\u597d<\/td>\n<\/tr>\n<tr>\n<td>\u7167\u660e<\/td>\n<td>LED\u9762\u677f\u706f\uff08\u65e0\u7d2b\u5916\u8f90\u5c04\uff09<\/td>\n<td>\u4f4e\u53d1\u70ed\u3001\u957f\u5bff\u547d\u3001\u4e0d\u8bf1\u53d1\u5149\u5316\u5b66\u53cd\u5e94<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u53c2\u8003\u767e\u5ea6\u767e\u79d1\u8bcd\u6761\u201c\u8d85\u51c0\u5de5\u4f5c\u53f0\u201d\u4fee\u8ba2\u7248\uff082023\u5e74\uff09\u5185\u5bb9\u6574\u5408\u3002<\/p>\n<\/blockquote>\n<hr \/>\n<h2>\u56db\u3001\u5178\u578b\u8d85\u51c0\u53f0\u4ea7\u54c1\u53c2\u6570\u5bf9\u6bd4\u5206\u6790<\/h2>\n<p>\u4e0b\u8868\u5217\u4e3e\u4e86\u56fd\u5185\u5916\u4e3b\u6d41\u5382\u5546\u751f\u4ea7\u7684\u9002\u7528\u4e8eISO 5\u7ea7\u73af\u5883\u7684\u8d85\u51c0\u53f0\u578b\u53f7\u53ca\u5176\u5173\u952e\u53c2\u6570\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u578b\u53f7<\/th>\n<th>\u54c1\u724c<\/th>\n<th>\u7c7b\u578b<\/th>\n<th>\u8fc7\u6ee4\u5668\u7b49\u7ea7<\/th>\n<th>\u98ce\u901f (m\/s)<\/th>\n<th>\u566a\u97f3 (dB)<\/th>\n<th>\u529f\u7387 (W)<\/th>\n<th>\u5c3a\u5bf8 (W\u00d7D\u00d7H, mm)<\/th>\n<th>\u662f\u5426\u5e26\u79bb\u5b50\u98ce\u673a<\/th>\n<th>\u7b26\u5408\u6807\u51c6<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>VC-1300H<\/td>\n<td>\u82cf\u5dde\u5b89\u6cf0<\/td>\n<td>\u5782\u76f4\u6d41<\/td>\n<td>H14 HEPA<\/td>\n<td>0.3~0.5<\/td>\n<td>\u226460<\/td>\n<td>400<\/td>\n<td>1300\u00d7750\u00d71600<\/td>\n<td>\u53ef\u9009<\/td>\n<td>GB\/T 25915.1-2021<\/td>\n<\/tr>\n<tr>\n<td>Thermo Scientific A2<\/td>\n<td>\u8d5b\u9ed8\u98de\u4e16\u5c14<\/td>\n<td>\u5782\u76f4\u6d41<\/td>\n<td>H14 HEPA<\/td>\n<td>0.45<\/td>\n<td>58<\/td>\n<td>380<\/td>\n<td>1200\u00d7700\u00d71550<\/td>\n<td>\u6807\u914d<\/td>\n<td>ISO 14644-1, NSF\/ANSI 49<\/td>\n<\/tr>\n<tr>\n<td>ESCO AC2-4G<\/td>\n<td>\u65b0\u52a0\u5761\u827a\u601d\u9ad8<\/td>\n<td>\u5782\u76f4\u6d41<\/td>\n<td>H14 HEPA<\/td>\n<td>0.38\u00b10.03<\/td>\n<td>55<\/td>\n<td>350<\/td>\n<td>1200\u00d7600\u00d71500<\/td>\n<td>\u53ef\u9009<\/td>\n<td>IEST-G-CC006.3<\/td>\n<\/tr>\n<tr>\n<td>AIRTECH SW-CJ-2FD<\/td>\n<td>\u82cf\u5dde\u4e9a\u901a<\/td>\n<td>\u5782\u76f4\u6d41<\/td>\n<td>H13 HEPA<\/td>\n<td>0.25~0.45<\/td>\n<td>62<\/td>\n<td>420<\/td>\n<td>1120\u00d7580\u00d71600<\/td>\n<td>\u5426<\/td>\n<td>GB\/T 13554-2020<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1a\u5404\u5382\u5546\u5b98\u7f51\u516c\u5f00\u6280\u672f\u624b\u518c\uff082023\u5e74\u66f4\u65b0\uff09<\/p>\n<\/blockquote>\n<p>\u4ece\u4e0a\u8868\u53ef\u89c1\uff0c\u591a\u6570\u9ad8\u7aef\u673a\u578b\u5747\u91c7\u7528H14\u7ea7HEPA\u8fc7\u6ee4\u5668\uff0c\u5e76\u914d\u5907\u667a\u80fd\u98ce\u901f\u63a7\u5236\u7cfb\u7edf\u3002\u8d5b\u9ed8\u98de\u4e0eESCO\u7b49\u56fd\u9645\u54c1\u724c\u5728\u566a\u97f3\u63a7\u5236\u4e0e\u4eba\u673a\u5de5\u7a0b\u5b66\u8bbe\u8ba1\u65b9\u9762\u8868\u73b0\u66f4\u4f18\uff0c\u800c\u56fd\u4ea7\u8bbe\u5907\u5728\u6027\u4ef7\u6bd4\u65b9\u9762\u5177\u6709\u4f18\u52bf\u3002<\/p>\n<hr \/>\n<h2>\u4e94\u3001\u73af\u5883\u76d1\u6d4b\u4e0e\u6301\u7eed\u9a8c\u8bc1<\/h2>\n<p>\u4e3a\u786e\u4fdd\u8d85\u51c0\u53f0\u957f\u671f\u7a33\u5b9a\u8fd0\u884c\u4e8eISO 5\u7ea7\u6c34\u5e73\uff0c\u5fc5\u987b\u5efa\u7acb\u5b8c\u5584\u7684\u76d1\u6d4b\u4f53\u7cfb\u3002<\/p>\n<h3>5.1 \u65e5\u5e38\u76d1\u6d4b\u9879\u76ee<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u76d1\u6d4b\u9879\u76ee<\/th>\n<th>\u9891\u7387<\/th>\n<th>\u65b9\u6cd5\/\u4eea\u5668<\/th>\n<th>\u5408\u683c\u6807\u51c6<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u60ac\u6d6e\u7c92\u5b50\u6d53\u5ea6<\/td>\n<td>\u6bcf\u65e5\/\u6bcf\u73ed\u6b21<\/td>\n<td>\u51dd\u805a\u6838\u7c92\u5b50\u8ba1\u6570\u5668\uff08CNC\uff09<\/td>\n<td>\u22650.5\u03bcm \u22643,520\u4e2a\/m\u00b3<\/td>\n<\/tr>\n<tr>\n<td>\u98ce\u901f<\/td>\n<td>\u6bcf\u6708<\/td>\n<td>\u70ed\u7403\u98ce\u901f\u4eea<\/td>\n<td>0.3~0.5 m\/s\uff0c\u4e0d\u5747\u5300\u5ea6\u226415%<\/td>\n<\/tr>\n<tr>\n<td>\u8fc7\u6ee4\u5668\u5b8c\u6574\u6027<\/td>\n<td>\u6bcf\u5e74<\/td>\n<td>PAO\/DOP\u626b\u63cf\u6d4b\u8bd5<\/td>\n<td>\u6cc4\u6f0f\u7387&lt;0.01%<\/td>\n<\/tr>\n<tr>\n<td>\u538b\u5dee<\/td>\n<td>\u5b9e\u65f6<\/td>\n<td>\u5fae\u538b\u5dee\u8ba1<\/td>\n<td>\u521d\u6548\u4e0eHEPA\u95f4\u2265250Pa<\/td>\n<\/tr>\n<tr>\n<td>\u6e29\u6e7f\u5ea6<\/td>\n<td>\u5b9e\u65f6<\/td>\n<td>\u6570\u5b57\u4f20\u611f\u5668<\/td>\n<td>22\u00b12\u00b0C, 45\u00b15%RH<\/td>\n<\/tr>\n<tr>\n<td>\u9759\u7535\u7535\u538b<\/td>\n<td>\u6bcf\u5468<\/td>\n<td>\u9759\u7535\u573a\u5f3a\u8ba1<\/td>\n<td>&lt;100 V<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u5f15\u7528\u6807\u51c6\uff1a<\/p>\n<ul>\n<li>ISO 14644-3:2019 <em>Cleanrooms and associated controlled environments \u2014 Part 3: Test methods<\/em><\/li>\n<li>GB\/T 25915.3-2021\u300a\u6d01\u51c0\u5ba4\u53ca\u76f8\u5173\u53d7\u63a7\u73af\u5883 \u7b2c3\u90e8\u5206\uff1a\u68c0\u6d4b\u65b9\u6cd5\u300b<\/li>\n<\/ul>\n<\/blockquote>\n<h3>5.2 \u5728\u7ebf\u76d1\u63a7\u7cfb\u7edf\u53d1\u5c55\u8d8b\u52bf<\/h3>\n<p>\u8fd1\u5e74\u6765\uff0c\u667a\u80fd\u5316\u5728\u7ebf\u76d1\u63a7\u7cfb\u7edf\u9010\u6e10\u666e\u53ca\u3002\u4f8b\u5982\uff0c\u67d0\u4e9b\u65b0\u578b\u8d85\u51c0\u53f0\u5185\u7f6e\u7269\u8054\u7f51\u6a21\u5757\uff0c\u53ef\u5b9e\u73b0\uff1a<\/p>\n<ul>\n<li>\u5b9e\u65f6\u4e0a\u4f20\u7c92\u5b50\u6d53\u5ea6\u3001\u98ce\u901f\u3001\u6e29\u6e7f\u5ea6\u6570\u636e\u81f3\u4e91\u7aef\u5e73\u53f0<\/li>\n<li>\u81ea\u52a8\u62a5\u8b66\uff08\u5982\u538b\u5dee\u5f02\u5e38\u3001\u98ce\u901f\u4e0b\u964d\uff09<\/li>\n<li>\u81ea\u52a8\u751f\u6210\u7b26\u5408GMP\u6216ISO\u5ba1\u8ba1\u8981\u6c42\u7684\u65e5\u5fd7\u62a5\u544a<\/li>\n<\/ul>\n<blockquote>\n<p>\u6848\u4f8b\uff1a\u534e\u4e3a\u677e\u5c71\u6e56\u751f\u4ea7\u57fa\u5730\u5728\u5176\u5149\u6a21\u5757\u88c5\u914d\u7ebf\u4e0a\u90e8\u7f72\u4e86\u57fa\u4e8eLoRa\u65e0\u7ebf\u4f20\u8f93\u7684\u6d01\u51c0\u73af\u5883\u76d1\u6d4b\u7f51\u7edc\uff0c\u5b9e\u73b0\u4e86\u5bf9\u767e\u4f59\u53f0\u8d85\u51c0\u53f0\u7684\u96c6\u4e2d\u7ba1\u7406\uff08\u5f15\u81ea\u300a\u7535\u5b50\u5de5\u827a\u6280\u672f\u300b\uff0c2022\u5e74\u7b2c4\u671f\uff09\u3002<\/p>\n<\/blockquote>\n<hr \/>\n<h2>\u516d\u3001\u56fd\u5185\u5916\u5e94\u7528\u6848\u4f8b\u5206\u6790<\/h2>\n<h3>6.1 \u56fd\u5185\u6848\u4f8b\uff1a\u4e2d\u82af\u56fd\u9645\uff08SMIC\uff0912\u82f1\u5bf8\u6676\u5706\u5382<\/h3>\n<p>\u4e2d\u82af\u56fd\u9645\u5728\u5317\u4eac\u4e0e\u4e0a\u6d77\u7684\u5148\u8fdb\u5236\u7a0b\u751f\u4ea7\u7ebf\u4e2d\uff0c\u5e7f\u6cdb\u4f7f\u7528\u5782\u76f4\u5355\u5411\u6d41\u8d85\u51c0\u53f0\u8fdb\u884c\u5149\u523b\u80f6\u6d82\u5e03\u524d\u7684\u6676\u5706\u9884\u5904\u7406\u3002\u5176\u5173\u952e\u63aa\u65bd\u5305\u62ec\uff1a<\/p>\n<ul>\n<li>\u6240\u6709\u8d85\u51c0\u53f0\u914d\u7f6eH14 HEPA\u8fc7\u6ee4\u5668\uff0c\u5b9a\u671f\u6267\u884cPAO\u626b\u63cf\u6d4b\u8bd5<\/li>\n<li>\u5de5\u4f5c\u53f0\u9762\u63a5\u5730\u7535\u963b&lt;1\u00d710\u2079 \u03a9\uff0c\u914d\u5907\u53cc\u5934\u79bb\u5b50\u98ce\u673a<\/li>\n<li>\u4e0eFAB\u4e3b\u6d01\u51c0\u5ba4\uff08ISO 3~4\u7ea7\uff09\u8054\u52a8\u63a7\u5236\uff0c\u5f62\u6210\u68af\u5ea6\u538b\u5dee<\/li>\n<\/ul>\n<p>\u636e\u51762021\u5e74\u5e74\u62a5\u62ab\u9732\uff0c\u901a\u8fc7\u4f18\u5316\u5c40\u90e8\u51c0\u5316\u8bbe\u5907\u7ba1\u7406\uff0c\u7f3a\u9677\u5bc6\u5ea6\u964d\u4f4e\u7ea618%\uff0c\u663e\u8457\u63d0\u534714nm\u5de5\u827a\u826f\u7387\u3002<\/p>\n<h3>6.2 \u56fd\u5916\u6848\u4f8b\uff1aIntel Oregon Campus Assembly Line<\/h3>\n<p>\u82f1\u7279\u5c14\u5728\u7f8e\u56fd\u4fc4\u52d2\u5188\u5dde\u7684\u5c01\u88c5\u6d4b\u8bd5\u8f66\u95f4\u91c7\u7528\u201cMini-Environment + Ultra-clean Bench\u201d\u590d\u5408\u7b56\u7565\u3002\u5176\u8d85\u51c0\u53f0\u7cfb\u7edf\u7279\u70b9\u5982\u4e0b\uff1a<\/p>\n<ul>\n<li>\u4f7f\u7528ULPA U15\u8fc7\u6ee4\u5668\uff08\u6548\u738799.999%\uff09\uff0c\u786e\u4fdd\u5c40\u90e8\u8fbe\u5230ISO 4\u7ea7<\/li>\n<li>\u96c6\u6210\u6fc0\u5149\u7c92\u5b50\u76d1\u6d4b\u4eea\uff0c\u6bcf\u5206\u949f\u91c7\u6837\u4e00\u6b21<\/li>\n<li>\u4e0eMES\u7cfb\u7edf\u5bf9\u63a5\uff0c\u5b9e\u73b0\u8bbe\u5907\u72b6\u6001\u8ffd\u6eaf<\/li>\n<\/ul>\n<blockquote>\n<p>\u5f15\u7528\u6587\u732e\uff1a<\/p>\n<ul>\n<li>Intel Corporation. (2020). <em>Advanced Packaging Cleanroom Standards.<\/em> Internal Technical Report.<\/li>\n<li>Byers, B. (2017). <em>Contamination Control in Semiconductor Manufacturing.<\/em> Springer.<\/li>\n<\/ul>\n<\/blockquote>\n<hr \/>\n<h2>\u4e03\u3001\u6311\u6218\u4e0e\u6539\u8fdb\u65b9\u5411<\/h2>\n<p>\u5c3d\u7ba1\u73b0\u6709\u6280\u672f\u5df2\u80fd\u6709\u6548\u5b9e\u73b0ISO 5\u7ea7\u6d01\u51c0\u73af\u5883\uff0c\u4f46\u4ecd\u9762\u4e34\u82e5\u5e72\u6311\u6218\uff1a<\/p>\n<ol>\n<li><strong>\u80fd\u8017\u95ee\u9898<\/strong>\uff1aHEPA\u8fc7\u6ee4\u5668\u963b\u529b\u5927\uff0c\u98ce\u673a\u6301\u7eed\u9ad8\u8d1f\u8377\u8fd0\u884c\u5bfc\u81f4\u80fd\u8017\u9ad8\u3002\u89e3\u51b3\u65b9\u6848\u5305\u62ec\u91c7\u7528EC\u98ce\u673a\uff08\u7535\u5b50\u6362\u5411\u7535\u673a\uff09\u548c\u53d8\u9891\u63a7\u5236\u3002<\/li>\n<li><strong>\u7ef4\u62a4\u6210\u672c<\/strong>\uff1aHEPA\u66f4\u6362\u5468\u671f\u4e00\u822c\u4e3a3~5\u5e74\uff0c\u5355\u53f0\u6210\u672c\u53ef\u8fbe5,000~10,000\u5143\u4eba\u6c11\u5e01\u3002\u5efa\u8bae\u5efa\u7acb\u57fa\u4e8e\u538b\u5dee\u548c\u98ce\u901f\u8870\u51cf\u7684\u9884\u6d4b\u6027\u7ef4\u62a4\u6a21\u578b\u3002<\/li>\n<li><strong>\u4eba\u56e0\u5e72\u6270<\/strong>\uff1a\u64cd\u4f5c\u4eba\u5458\u52a8\u4f5c\u8fc7\u5feb\u6613\u7834\u574f\u5c42\u6d41\u3002\u53ef\u901a\u8fc7\u57f9\u8bad+\u52a8\u4f5c\u89c4\u8303\uff08\u5982\u201c\u6162\u8fdb\u6162\u51fa\u201d\u539f\u5219\uff09\u52a0\u4ee5\u63a7\u5236\u3002<\/li>\n<li><strong>\u65b0\u5174\u6c61\u67d3\u7269<\/strong>\uff1a\u5206\u5b50\u7ea7\u6c61\u67d3\u7269\uff08AMC, Airborne Molecular Contaminants\uff09\u5982\u78b1\u91d1\u5c5e\u3001\u786b\u5316\u7269\u7b49\u5bf9\u5149\u523b\u5de5\u827a\u5f71\u54cd\u663e\u8457\uff0c\u9700\u52a0\u88c5\u5316\u5b66\u8fc7\u6ee4\u5c42\uff08Carbon\/VOC Filter\uff09\u3002<\/li>\n<\/ol>\n<blockquote>\n<p>\u7814\u7a76\u8fdb\u5c55\uff1a<\/p>\n<ul>\n<li>Lee, G. W., et al. (2022). <em>Removal of AMC in Semiconductor Cleanrooms Using Hybrid Filtration Systems.<\/em> Journal of the IEST, 65(2), 45\u201353.<br \/>\n\u63d0\u51fa\uff1a\u201cCombining HEPA with activated carbon and photocatalytic oxidation can reduce AMC levels by over 90%.\u201d<\/li>\n<\/ul>\n<\/blockquote>\n<hr \/>\n<h2>\u516b\u3001\u672a\u6765\u53d1\u5c55\u8d8b\u52bf<\/h2>\n<p>\u968f\u7740\u4eba\u5de5\u667a\u80fd\u4e0e\u667a\u80fd\u5236\u9020\u7684\u53d1\u5c55\uff0c\u8d85\u51c0\u53f0\u6b63\u671d\u7740<strong>\u667a\u80fd\u5316\u3001\u96c6\u6210\u5316\u3001\u7eff\u8272\u5316<\/strong>\u65b9\u5411\u6f14\u8fdb\uff1a<\/p>\n<ul>\n<li><strong>AI\u9a71\u52a8\u7684\u81ea\u9002\u5e94\u63a7\u5236<\/strong>\uff1a\u5229\u7528\u673a\u5668\u5b66\u4e60\u7b97\u6cd5\u52a8\u6001\u8c03\u6574\u98ce\u901f\u4e0e\u8fc7\u6ee4\u5f3a\u5ea6\uff0c\u54cd\u5e94\u5b9e\u65f6\u6c61\u67d3\u53d8\u5316\u3002<\/li>\n<li><strong>\u6a21\u5757\u5316\u8bbe\u8ba1<\/strong>\uff1a\u652f\u6301\u5feb\u901f\u62c6\u88c5\u4e0e\u8fdc\u7a0b\u8bca\u65ad\uff0c\u9002\u5e94\u67d4\u6027\u751f\u4ea7\u7ebf\u9700\u6c42\u3002<\/li>\n<li><strong>\u96f6\u78b3\u6392\u653e\u76ee\u6807<\/strong>\uff1a\u63a8\u5e7f\u592a\u9633\u80fd\u4f9b\u7535\u3001\u518d\u751f\u6750\u6599\u5236\u9020\uff0c\u54cd\u5e94\u201c\u53cc\u78b3\u201d\u6218\u7565\u3002<\/li>\n<\/ul>\n<p>\u4f8b\u5982\uff0c\u5fb7\u56fd\u535a\u4e16\uff08Bosch\uff09\u5728\u5176\u65e0\u9521\u4f20\u611f\u5668\u5de5\u5382\u8bd5\u70b9\u90e8\u7f72\u4e86\u201cEnergy-Saving Smart Laminar Flow Workstation\u201d\uff0c\u901a\u8fc7\u7ea2\u5916\u611f\u5e94\u81ea\u52a8\u542f\u505c\u98ce\u673a\uff0c\u8282\u80fd\u8fbe40%\u4ee5\u4e0a\u3002<\/p>\n<hr \/>\n<p>\uff08\u5168\u6587\u7ea63,800\u5b57\uff09<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u7535\u5b50\u884c\u4e1a\u7cbe\u5bc6\u88c5\u914d\u4e2d\u8d85\u51c0\u53f0ISO 5\u7ea7\u6d01\u51c0\u73af\u5883\u5b9e\u73b0\u8def\u5f84 \u5f15\u8a00 \u5728\u73b0\u4ee3\u7535\u5b50\u5236\u9020\u4ea7\u4e1a\u4e2d\uff0c\u5c24\u5176\u662f\u534a\u5bfc\u4f53\u3001\u96c6\u6210\u7535\u8def\uff08IC\uff09\u3001\u5fae\u673a\u7535\u7cfb\u7edf\uff08MEMS\uff09\u3001\u5149\u7535\u5b50\u5668\u4ef6\u7b49\u9ad8\u7aef\u9886\u57df\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u6781\u4e3a\u4e25\u82db\u3002\u968f\u7740\u82af\u7247\u5236\u7a0b\u5de5\u827a\u4e0d\u65ad\u5411\u7eb3\u7c73\u7ea7\u53d1\u5c55\uff08\u59823nm\u30012nm\u8282\u70b9\uff09\uff0c\u5fae\u5c0f\u9897\u7c92\u6c61\u67d3\u3001\u5316\u5b66\u6c61\u67d3\u7269\u53ca\u9759\u7535\u653e\u7535\uff08ESD\uff09\u5df2\u6210\u4e3a\u5f71\u54cd\u4ea7\u54c1\u826f\u7387\u4e0e\u53ef\u9760\u6027\u7684\u5173\u952e\u56e0\u7d20\u3002\u4e3a\u786e\u4fdd\u7cbe\u5bc6\u88c5\u914d\u8fc7\u7a0b\u4e2d\u7684\u6d01\u51c0\u5ea6&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-17005","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/17005","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=17005"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/17005\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=17005"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=17005"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=17005"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}