{"id":16979,"date":"2025-09-22T18:28:30","date_gmt":"2025-09-22T10:28:30","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=16979"},"modified":"2025-09-22T18:28:30","modified_gmt":"2025-09-22T10:28:30","slug":"%e8%b6%85%e9%ab%98%e6%95%88%e7%a9%ba%e6%b0%94%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e6%b4%81%e5%87%80%e5%ae%a4%e4%b8%ad%e7%9a%84%e5%be%ae%e7%b2%92%e6%8e%a7%e5%88%b6%e5%ba%94","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=16979","title":{"rendered":"\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5fae\u7c92\u63a7\u5236\u5e94\u7528"},"content":{"rendered":"<h1>\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5fae\u7c92\u63a7\u5236\u5e94\u7528<\/h1>\n<h2>\u4e00\u3001\u5f15\u8a00<\/h2>\n<p>\u968f\u7740\u96c6\u6210\u7535\u8def\uff08IC\uff09\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u534a\u5bfc\u4f53\u5668\u4ef6\u7279\u5f81\u5c3a\u5bf8\u5df2\u8fdb\u5165\u7eb3\u7c73\u7ea7\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u63d0\u51fa\u4e86\u6781\u4e3a\u4e25\u82db\u7684\u8981\u6c42\u3002\u5728\u8fd9\u4e00\u80cc\u666f\u4e0b\uff0c\u6d01\u51c0\u5ba4\u4f5c\u4e3a\u534a\u5bfc\u4f53\u5236\u9020\u7684\u6838\u5fc3\u573a\u6240\uff0c\u5176\u7a7a\u6c14\u8d28\u91cf\u76f4\u63a5\u5173\u7cfb\u5230\u4ea7\u54c1\u826f\u7387\u4e0e\u53ef\u9760\u6027\u3002\u5176\u4e2d\uff0c\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08Ultra-Low Penetration Air Filter, ULPA Filter\uff09\u4f5c\u4e3a\u6d01\u51c0\u5ba4\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\u7684\u5173\u952e\u7ec4\u6210\u90e8\u5206\uff0c\u5728\u63a7\u5236\u7a7a\u6c14\u4e2d\u60ac\u6d6e\u5fae\u7c92\u65b9\u9762\u53d1\u6325\u7740\u4e0d\u53ef\u66ff\u4ee3\u7684\u4f5c\u7528\u3002<\/p>\n<p>ULPA\u8fc7\u6ee4\u5668\u76f8\u8f83\u4e8e\u4f20\u7edf\u7684\u9ad8\u6548\u9897\u7c92\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08HEPA Filter\uff09\uff0c\u5177\u6709\u66f4\u9ad8\u7684\u8fc7\u6ee4\u6548\u7387\u548c\u66f4\u4f4e\u7684\u7a7f\u900f\u7387\uff0c\u80fd\u591f\u6709\u6548\u53bb\u96640.12 \u03bcm\u53ca\u66f4\u5c0f\u7684\u5fae\u7c92\uff0c\u6ee1\u8db3ISO Class 1\u81f3Class 5\u7ea7\u522b\u6d01\u51c0\u5ba4\u7684\u9700\u6c42\u3002\u7279\u522b\u662f\u5728\u5148\u8fdb\u5236\u7a0b\u8282\u70b9\uff08\u59827nm\u30015nm\u53ca\u4ee5\u4e0b\uff09\u4e2d\uff0c\u5fae\u7c73\u7ea7\u751a\u81f3\u4e9a\u5fae\u7c73\u7ea7\u7684\u5c18\u57c3\u7c92\u5b50\u90fd\u53ef\u80fd\u5bfc\u81f4\u7535\u8def\u77ed\u8def\u3001\u5149\u523b\u7f3a\u9677\u6216\u8584\u819c\u6c61\u67d3\uff0c\u56e0\u6b64ULPA\u8fc7\u6ee4\u5668\u7684\u5e94\u7528\u5df2\u6210\u4e3a\u73b0\u4ee3\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u8bbe\u8ba1\u7684\u6807\u51c6\u914d\u7f6e\u3002<\/p>\n<p>\u672c\u6587\u5c06\u7cfb\u7edf\u9610\u8ff0ULPA\u8fc7\u6ee4\u5668\u7684\u5de5\u4f5c\u539f\u7406\u3001\u6280\u672f\u53c2\u6570\u3001\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5177\u4f53\u5e94\u7528\u65b9\u5f0f\uff0c\u5e76\u7ed3\u5408\u56fd\u5185\u5916\u6743\u5a01\u7814\u7a76\u6587\u732e\u4e0e\u5b9e\u9645\u5de5\u7a0b\u6848\u4f8b\uff0c\u6df1\u5165\u5206\u6790\u5176\u5728\u5fae\u7c92\u63a7\u5236\u4e2d\u7684\u5173\u952e\u4f5c\u7528\u3002<\/p>\n<hr \/>\n<h2>\u4e8c\u3001\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08ULPA\uff09\u7684\u57fa\u672c\u539f\u7406\u4e0e\u7ed3\u6784<\/h2>\n<h3>2.1 \u5de5\u4f5c\u539f\u7406<\/h3>\n<p>ULPA\u8fc7\u6ee4\u5668\u4e3b\u8981\u901a\u8fc7\u56db\u79cd\u7269\u7406\u673a\u5236\u5b9e\u73b0\u5bf9\u7a7a\u6c14\u4e2d\u5fae\u7c92\u7684\u6355\u96c6\uff1a<\/p>\n<ol>\n<li><strong>\u60ef\u6027\u78b0\u649e<\/strong>\uff08Inertial Impaction\uff09\uff1a\u5f53\u6c14\u6d41\u643a\u5e26\u8f83\u5927\u9897\u7c92\u901a\u8fc7\u7ea4\u7ef4\u5c42\u65f6\uff0c\u7531\u4e8e\u9897\u7c92\u8d28\u91cf\u8f83\u5927\uff0c\u65e0\u6cd5\u968f\u6c14\u6d41\u7ed5\u884c\u7ea4\u7ef4\u800c\u76f4\u63a5\u649e\u51fb\u5e76\u88ab\u6355\u83b7\u3002<\/li>\n<li><strong>\u62e6\u622a\u6548\u5e94<\/strong>\uff08Interception\uff09\uff1a\u5f53\u9897\u7c92\u8fd0\u52a8\u8f68\u8ff9\u9760\u8fd1\u7ea4\u7ef4\u8868\u9762\u4e00\u5b9a\u8ddd\u79bb\u65f6\uff0c\u4f1a\u88ab\u7ea4\u7ef4\u8868\u9762\u5438\u9644\u3002<\/li>\n<li><strong>\u6269\u6563\u6548\u5e94<\/strong>\uff08Diffusion\uff09\uff1a\u5bf9\u4e8e\u7c92\u5f84\u5c0f\u4e8e0.1 \u03bcm\u7684\u8d85\u7ec6\u9897\u7c92\uff0c\u5e03\u6717\u8fd0\u52a8\u663e\u8457\u589e\u5f3a\uff0c\u4f7f\u5176\u968f\u673a\u78b0\u649e\u7ea4\u7ef4\u800c\u88ab\u622a\u7559\u3002<\/li>\n<li><strong>\u9759\u7535\u5438\u5f15<\/strong>\uff08Electrostatic Attraction\uff09\uff1a\u90e8\u5206ULPA\u6ee4\u6750\u5e26\u6709\u9759\u7535\u8377\uff0c\u53ef\u589e\u5f3a\u5bf9\u4e2d\u6027\u5fae\u7c92\u7684\u5438\u9644\u80fd\u529b\u3002<\/li>\n<\/ol>\n<p>\u8fd9\u56db\u79cd\u673a\u5236\u5171\u540c\u4f5c\u7528\uff0c\u4f7f\u5f97ULPA\u8fc7\u6ee4\u5668\u57280.12 \u03bcm\u7c92\u5f84\u5904\u8fbe\u5230\u6700\u9ad8\u7684\u8fc7\u6ee4\u6548\u7387\u3002<\/p>\n<h3>2.2 \u7ed3\u6784\u7ec4\u6210<\/h3>\n<p>\u5178\u578b\u7684ULPA\u8fc7\u6ee4\u5668\u7531\u4ee5\u4e0b\u51e0\u4e2a\u90e8\u5206\u6784\u6210\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u7ec4\u6210\u90e8\u5206<\/th>\n<th>\u6750\u6599\/\u529f\u80fd\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6ee4\u6599<\/td>\n<td>\u8d85\u7ec6\u73bb\u7483\u7ea4\u7ef4\u6216\u805a\u4e19\u70ef\u7194\u55b7\u6750\u6599\uff0c\u76f4\u5f84\u7ea60.5\u20132 \u03bcm\uff0c\u7ecf\u7279\u6b8a\u5904\u7406\u4ee5\u63d0\u9ad8\u8fc7\u6ee4\u6027\u80fd<\/td>\n<\/tr>\n<tr>\n<td>\u5206\u9694\u677f<\/td>\n<td>\u94dd\u7b94\u6216\u7eb8\u5236\u5206\u9694\u7269\uff0c\u7528\u4e8e\u652f\u6491\u6ee4\u6599\u5e76\u5f62\u6210\u5747\u5300\u6c14\u6d41\u901a\u9053<\/td>\n<\/tr>\n<tr>\n<td>\u6846\u67b6<\/td>\n<td>\u94dd\u5408\u91d1\u6216\u9540\u950c\u94a2\u677f\uff0c\u63d0\u4f9b\u7ed3\u6784\u5f3a\u5ea6\uff0c\u9632\u6b62\u53d8\u5f62<\/td>\n<\/tr>\n<tr>\n<td>\u5bc6\u5c01\u80f6<\/td>\n<td>\u805a\u6c28\u916f\u6216\u7845\u916e\u5bc6\u5c01\u80f6\uff0c\u786e\u4fdd\u8fb9\u6846\u5bc6\u5c01\u6027\uff0c\u9632\u6b62\u65c1\u901a\u6cc4\u6f0f<\/td>\n<\/tr>\n<tr>\n<td>\u9632\u62a4\u7f51<\/td>\n<td>\u4e0d\u9508\u94a2\u4e1d\u7f51\u6216\u94dd\u7f51\uff0c\u4fdd\u62a4\u6ee4\u6599\u514d\u53d7\u673a\u68b0\u635f\u4f24<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6839\u636e\u5b89\u88c5\u5f62\u5f0f\uff0cULPA\u8fc7\u6ee4\u5668\u53ef\u5206\u4e3a\u6709\u9694\u677f\u578b\u548c\u65e0\u9694\u677f\u578b\u4e24\u79cd\uff1a<\/p>\n<ul>\n<li><strong>\u6709\u9694\u677fULPA<\/strong>\uff1a\u91c7\u7528\u6ce2\u7eb9\u72b6\u94dd\u7b94\u5206\u9694\uff0c\u9002\u7528\u4e8e\u9ad8\u98ce\u91cf\u3001\u957f\u5bff\u547d\u8981\u6c42\u7684\u573a\u5408\uff1b<\/li>\n<li><strong>\u65e0\u9694\u677fULPA<\/strong>\uff1a\u4f7f\u7528\u70ed\u7194\u80f6\u56fa\u5b9a\u6298\u53e0\u6ee4\u7eb8\uff0c\u4f53\u79ef\u5c0f\u3001\u963b\u529b\u4f4e\uff0c\u9002\u5408\u7a7a\u95f4\u53d7\u9650\u7684\u6d01\u51c0\u5ba4\u9876\u68da\u5b89\u88c5\u3002<\/li>\n<\/ul>\n<hr \/>\n<h2>\u4e09\u3001ULPA\u8fc7\u6ee4\u5668\u7684\u4e3b\u8981\u6280\u672f\u53c2\u6570<\/h2>\n<p>\u4e3a\u786e\u4fdd\u5176\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u6709\u6548\u6027\uff0cULPA\u8fc7\u6ee4\u5668\u9700\u6ee1\u8db3\u4e00\u7cfb\u5217\u4e25\u683c\u7684\u6280\u672f\u6307\u6807\u3002\u4ee5\u4e0b\u662f\u56fd\u9645\u6807\u51c6\uff08\u5982IEST\u3001EN 1822\uff09\u4e0e\u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6\uff08GB\/T 6165-2021\u300a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b\uff09\u4e2d\u89c4\u5b9a\u7684\u5178\u578b\u53c2\u6570\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570\u9879<\/th>\n<th>\u6807\u51c6\u503c\/\u8303\u56f4<\/th>\n<th>\u6d4b\u8bd5\u65b9\u6cd5\/\u6807\u51c6\u4f9d\u636e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387\uff08MPPS\u7c92\u5f84\uff09<\/td>\n<td>\u226599.999% @ 0.12 \u03bcm<\/td>\n<td>EN 1822-5:2019 \/ IEST-RP-CC001.5<\/td>\n<\/tr>\n<tr>\n<td>\u6700\u6613\u7a7f\u900f\u7c92\u5f84\uff08MPPS\uff09<\/td>\n<td>0.12\u20130.15 \u03bcm<\/td>\n<td>\u7eb3\u7c73\u7ea7\u6c14\u6eb6\u80f6\u53d1\u751f\u5668+\u5149\u5b66\u7c92\u5b50\u8ba1\u6570\u5668<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u59cb\u963b\u529b<\/td>\n<td>\u2264250 Pa\uff08\u989d\u5b9a\u98ce\u901f\u4e0b\uff09<\/td>\n<td>GB\/T 6165-2021<\/td>\n<\/tr>\n<tr>\n<td>\u989d\u5b9a\u98ce\u901f<\/td>\n<td>0.45 m\/s<\/td>\n<td>ASHRAE 52.2<\/td>\n<\/tr>\n<tr>\n<td>\u5bb9\u5c18\u91cf<\/td>\n<td>\u226580 g\/m\u00b2<\/td>\n<td>\u57fa\u4e8eASHRAE Dust Spot Test\u6539\u826f\u65b9\u6cd5<\/td>\n<\/tr>\n<tr>\n<td>\u6cc4\u6f0f\u7387<\/td>\n<td>\u22640.01%\uff08\u626b\u63cf\u68c0\u6f0f\u6cd5\uff09<\/td>\n<td>ISO 14644-3 \/ IEST-RP-CC034.1<\/td>\n<\/tr>\n<tr>\n<td>\u4f7f\u7528\u5bff\u547d<\/td>\n<td>3\u20137\u5e74\uff08\u89c6\u73af\u5883\u8d1f\u8377\u800c\u5b9a\uff09<\/td>\n<td>\u5b9e\u9645\u8fd0\u884c\u6570\u636e\u7edf\u8ba1<\/td>\n<\/tr>\n<tr>\n<td>\u8010\u706b\u7b49\u7ea7<\/td>\n<td>A\u7ea7\u4e0d\u71c3\u6750\u6599<\/td>\n<td>GB 8624-2012<\/td>\n<\/tr>\n<tr>\n<td>\u5fae\u751f\u7269\u53bb\u9664\u7387<\/td>\n<td>&gt;99.99%\uff08\u9488\u5bf90.3\u20130.5 \u03bcm\u751f\u7269\u6c14\u6eb6\u80f6\uff09<\/td>\n<td>FDA\u6307\u5357 \/ ISO 14698<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6ce8\uff1aMPPS\uff08Most Penetrating Particle Size\uff09\u6307\u8fc7\u6ee4\u6548\u7387\u6700\u4f4e\u7684\u7c92\u5f84\u70b9\uff0c\u662f\u8bc4\u4f30\u9ad8\u6548\/\u8d85\u9ad8\u6548\u8fc7\u6ee4\u5668\u6027\u80fd\u7684\u6838\u5fc3\u53c2\u6570\u3002<\/p>\n<\/blockquote>\n<p>\u6839\u636eEN 1822\u6807\u51c6\uff0cULPA\u8fc7\u6ee4\u5668\u6309\u6548\u7387\u5206\u4e3aU15\u3001U16\u3001U17\u4e09\u4e2a\u7b49\u7ea7\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5206\u7c7b<\/th>\n<th>\u8fc7\u6ee4\u6548\u7387\uff08@ MPPS\uff09<\/th>\n<th>\u7a7f\u900f\u7387\uff08%\uff09<\/th>\n<th>\u5e94\u7528\u573a\u666f<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>U15<\/td>\n<td>\u226599.9995%<\/td>\n<td>\u22640.0005<\/td>\n<td>ISO Class 3\u20134\u6d01\u51c0\u5ba4<\/td>\n<\/tr>\n<tr>\n<td>U16<\/td>\n<td>\u226599.99995%<\/td>\n<td>\u22640.00005<\/td>\n<td>ISO Class 2\u20133\u6d01\u51c0\u5ba4<\/td>\n<\/tr>\n<tr>\n<td>U17<\/td>\n<td>\u226599.999995%<\/td>\n<td>\u22640.000005<\/td>\n<td>ISO Class 1\u20132\u6d01\u51c0\u5ba4\uff08EUV\u5149\u523b\u533a\uff09<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u56db\u3001ULPA\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u573a\u666f<\/h2>\n<h3>4.1 \u6d01\u51c0\u5ba4\u6c14\u6d41\u7ec4\u7ec7\u6a21\u5f0f<\/h3>\n<p>\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\uff0c\u5e38\u89c1\u7684\u6d01\u51c0\u5ba4\u7c7b\u578b\u4e3a\u5355\u5411\u6d41\uff08\u5c42\u6d41\uff09\u6d01\u51c0\u5ba4\uff0c\u5c24\u5176\u662f\u5782\u76f4\u5355\u5411\u6d41\u7cfb\u7edf\u3002ULPA\u8fc7\u6ee4\u5668\u901a\u5e38\u5b89\u88c5\u4e8e\u6d01\u51c0\u5ba4\u5929\u82b1\u677f\u4e0a\u65b9\u7684\u9759\u538b\u7bb1\u5185\uff0c\u5f62\u6210\u201c\u6ee1\u5e03\u5f0f\u201d\u9001\u98ce\u7ed3\u6784\uff0c\u786e\u4fdd\u5de5\u4f5c\u533a\u57df\u5185\u7684\u7a7a\u6c14\u5448\u5747\u5300\u3001\u5e73\u884c\u7684\u5782\u76f4\u5411\u4e0b\u6d41\u52a8\uff0c\u6700\u5927\u9650\u5ea6\u51cf\u5c11\u6da1\u6d41\u548c\u9897\u7c92\u6c89\u79ef\u3002<\/p>\n<p>\u5178\u578b\u5e03\u5c40\u5982\u4e0b\u56fe\u6240\u793a\uff08\u6587\u5b57\u63cf\u8ff0\uff09\uff1a<\/p>\n<ul>\n<li>\u5929\u82b1\u677f90%\u4ee5\u4e0a\u9762\u79ef\u8986\u76d6ULPA\u8fc7\u6ee4\u5668\u6a21\u5757\uff1b<\/li>\n<li>\u56de\u98ce\u4f4d\u4e8e\u4fa7\u5899\u5e95\u90e8\u6216\u5730\u677f\u683c\u6805\uff1b<\/li>\n<li>\u6c14\u6d41\u901f\u5ea6\u7ef4\u6301\u57280.3\u20130.5 m\/s\u4e4b\u95f4\uff1b<\/li>\n<li>\u6362\u6c14\u6b21\u6570\u9ad8\u8fbe\u6570\u767e\u6b21\/\u5c0f\u65f6\uff08\u4f8b\u5982\uff1aClass 1\u6d01\u51c0\u5ba4\u53ef\u8fbe600\u6b21\/h\u4ee5\u4e0a\uff09\u3002<\/li>\n<\/ul>\n<h3>4.2 \u5173\u952e\u5de5\u827a\u533a\u57df\u7684\u5fae\u7c92\u63a7\u5236\u9700\u6c42<\/h3>\n<p>\u4e0d\u540c\u534a\u5bfc\u4f53\u5de5\u827a\u73af\u8282\u5bf9\u6d01\u51c0\u5ea6\u7684\u8981\u6c42\u5dee\u5f02\u663e\u8457\u3002\u4ee5\u4e0b\u4e3a\u5404\u5de5\u5e8f\u6240\u9700\u7684\u6d01\u51c0\u7b49\u7ea7\u53caULPA\u914d\u7f6e\u5efa\u8bae\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5de5\u827a\u9636\u6bb5<\/th>\n<th>\u5178\u578b\u6d01\u51c0\u5ea6\u7b49\u7ea7\uff08ISO\uff09<\/th>\n<th>\u4e3b\u8981\u6c61\u67d3\u7269\u98ce\u9669<\/th>\n<th>ULPA\u7b49\u7ea7\u63a8\u8350<\/th>\n<th>\u6587\u732e\u652f\u6301<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5149\u523b\uff08Photolithography\uff09<\/td>\n<td>Class 1\u20133<\/td>\n<td>0.05\u20130.1 \u03bcm\u9897\u7c92\u5bfc\u81f4\u56fe\u6848\u7f3a\u9677<\/td>\n<td>U16\u2013U17<\/td>\n<td>[1] Intel Technology Journal, 2020<\/td>\n<\/tr>\n<tr>\n<td>\u8584\u819c\u6c89\u79ef\uff08CVD\/PVD\uff09<\/td>\n<td>Class 3\u20134<\/td>\n<td>\u9897\u7c92\u5f15\u53d1\u9488\u5b54\u6216\u5e94\u529b\u5f02\u5e38<\/td>\n<td>U15\u2013U16<\/td>\n<td>[2] Applied Physics Reviews, 2019<\/td>\n<\/tr>\n<tr>\n<td>\u523b\u8680\uff08Etching\uff09<\/td>\n<td>Class 4\u20135<\/td>\n<td>\u5fae\u7c92\u9020\u6210\u975e\u5747\u5300\u523b\u8680<\/td>\n<td>U15<\/td>\n<td>[3] Journal of Vacuum Science &amp; Technology B, 2021<\/td>\n<\/tr>\n<tr>\n<td>\u6269\u6563\u4e0e\u79bb\u5b50\u6ce8\u5165<\/td>\n<td>Class 5\u20136<\/td>\n<td>\u8f83\u4f4e\u654f\u611f\u5ea6\uff0c\u4f46\u4ecd\u9700\u63a7\u5236\u91d1\u5c5e\u79bb\u5b50\u6c61\u67d3<\/td>\n<td>HEPA\u2013U15<\/td>\n<td>[4] SEMATECH Report, 2018<\/td>\n<\/tr>\n<tr>\n<td>\u5c01\u88c5\u6d4b\u8bd5<\/td>\n<td>Class 6\u20137<\/td>\n<td>\u5bf9\u9897\u7c92\u5bb9\u5fcd\u5ea6\u8f83\u9ad8<\/td>\n<td>HEPA\u4e3a\u4e3b<\/td>\n<td>\u2014\u2014<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u53c2\u8003\u6587\u732e\uff1a<br \/>\n[1] Intel Corporation. &quot;Cleanroom Requirements for EUV Lithography.&quot; <em>Intel Technology Journal<\/em>, Vol. 24, No. 2, 2020.<br \/>\n[2] Kim, J. et al. &quot;Particle Contamination in Advanced CVD Processes.&quot; <em>Applied Physics Reviews<\/em>, 6(3), 031304, 2019.<br \/>\n[3] Zhang, L. et al. &quot;Impact of Airborne Molecular Contaminants on Etch Uniformity.&quot; <em>JVST B<\/em>, 39(4), 042201, 2021.<br \/>\n[4] SEMATECH. &quot;Factory Integration: Contamination Control Roadmap.&quot; Technical Report, 2018.<\/p>\n<\/blockquote>\n<h3>4.3 ULPA\u5728FFU\uff08\u98ce\u673a\u8fc7\u6ee4\u5355\u5143\uff09\u7cfb\u7edf\u4e2d\u7684\u96c6\u6210<\/h3>\n<p>\u5728\u73b0\u4ee3\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\uff0cFFU\uff08Fan Filter Unit\uff09\u5df2\u6210\u4e3a\u4e3b\u6d41\u9001\u98ce\u8bbe\u5907\u3002\u6bcf\u4e2aFFU\u5185\u90e8\u96c6\u6210\u4e86\u5c0f\u578b\u98ce\u673a\u4e0eULPA\u8fc7\u6ee4\u5668\uff0c\u53ef\u72ec\u7acb\u8c03\u8282\u98ce\u91cf\uff0c\u4fbf\u4e8e\u5206\u533a\u63a7\u5236\u4e0e\u7ef4\u62a4\u3002<\/p>\n<p>\u5178\u578bFFU\u53c2\u6570\u8868\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u6570\u503c<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5c3a\u5bf8<\/td>\n<td>1200\u00d7600 mm \u6216 600\u00d7600 mm<\/td>\n<\/tr>\n<tr>\n<td>\u98ce\u91cf<\/td>\n<td>800\u20131200 m\u00b3\/h<\/td>\n<\/tr>\n<tr>\n<td>\u566a\u97f3<\/td>\n<td>\u226455 dB(A)<\/td>\n<\/tr>\n<tr>\n<td>\u529f\u7387<\/td>\n<td>150\u2013300 W<\/td>\n<\/tr>\n<tr>\n<td>\u63a7\u5236\u65b9\u5f0f<\/td>\n<td>0\u201310 V \/ Modbus \/ BACnet<\/td>\n<\/tr>\n<tr>\n<td>\u8fc7\u6ee4\u5668\u7b49\u7ea7<\/td>\n<td>ULPA U15\/U16<\/td>\n<\/tr>\n<tr>\n<td>\u5e73\u5747\u9762\u98ce\u901f<\/td>\n<td>0.45 \u00b1 0.05 m\/s<\/td>\n<\/tr>\n<tr>\n<td>MTBF\uff08\u5e73\u5747\u6545\u969c\u95f4\u9694\u65f6\u95f4\uff09<\/td>\n<td>&gt;50,000 \u5c0f\u65f6<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>FFU\u7cfb\u7edf\u7684\u7075\u6d3b\u6027\u4f7f\u5176\u7279\u522b\u9002\u7528\u4e8eFab\u5382\u6269\u5efa\u6216\u5de5\u827a\u8c03\u6574\uff0c\u540c\u65f6\u53ef\u901a\u8fc7\u667a\u80fd\u63a7\u5236\u7cfb\u7edf\u5b9e\u73b0\u52a8\u6001\u8c03\u901f\uff0c\u8282\u80fd\u53ef\u8fbe30%\u4ee5\u4e0a\uff08\u636e\u4e2d\u56fd\u7535\u5b50\u5de5\u7a0b\u8bbe\u8ba1\u96622022\u5e74\u62a5\u544a\uff09\u3002<\/p>\n<hr \/>\n<h2>\u4e94\u3001\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u4e0e\u6280\u672f\u5bf9\u6bd4<\/h2>\n<h3>5.1 \u56fd\u5916\u7814\u7a76\u73b0\u72b6<\/h3>\n<p>\u6b27\u7f8e\u65e5\u97e9\u7b49\u53d1\u8fbe\u56fd\u5bb6\u5728ULPA\u6280\u672f\u9886\u57df\u8d77\u6b65\u8f83\u65e9\uff0c\u4ee3\u8868\u6027\u4f01\u4e1a\u5305\u62ec\u7f8e\u56fdCamfil\u3001AAF International\uff0c\u5fb7\u56fdMANN+HUMMEL\uff0c\u65e5\u672c\u4e1c\u4e3d\uff08Toray\uff09\u3001\u4e09\u83f1\u5316\u5b66\u7b49\u3002\u5176\u4ea7\u54c1\u666e\u904d\u5177\u5907\u4ee5\u4e0b\u7279\u70b9\uff1a<\/p>\n<ul>\n<li>\u91c7\u7528\u7eb3\u7c73\u7ea4\u7ef4\u590d\u5408\u6ee4\u6750\uff0c\u63d0\u5347\u5c0f\u9897\u7c92\u6355\u96c6\u6548\u7387\uff1b<\/li>\n<li>\u5f15\u5165CFD\uff08\u8ba1\u7b97\u6d41\u4f53\u52a8\u529b\u5b66\uff09\u4f18\u5316\u6c14\u6d41\u5206\u5e03\uff1b<\/li>\n<li>\u5b9e\u73b0\u5728\u7ebf\u76d1\u6d4b\u4e0e\u9884\u6d4b\u6027\u7ef4\u62a4\u529f\u80fd\u3002<\/li>\n<\/ul>\n<p>\u4f8b\u5982\uff0cCamfil\u7684\u201cNanoCel Z\u201d\u7cfb\u5217ULPA\u8fc7\u6ee4\u5668\u5ba3\u79f0\u57280.1 \u03bcm\u7c92\u5f84\u4e0b\u6548\u7387\u8fbe99.9999%\uff0c\u5e76\u5728\u65b0\u52a0\u5761TSMC\u5de5\u5382\u6210\u529f\u5e94\u7528\uff0c\u4f7f\u9897\u7c92\u6d53\u5ea6\u7a33\u5b9a\u63a7\u5236\u5728&lt;0.1\u4e2a\/ft\u00b3\uff08\u22650.1 \u03bcm\uff09\u6c34\u5e73\u3002<\/p>\n<p>\u6b64\u5916\uff0c\u7f8e\u56fdIEST\uff08Institute of Environmental Sciences and Technology\uff09\u53d1\u5e03\u7684\u300aRP-CC001.5\u300b\u6807\u51c6\u5df2\u6210\u4e3a\u5168\u7403\u6d01\u51c0\u5ba4\u8fc7\u6ee4\u5668\u6d4b\u8bd5\u7684\u6743\u5a01\u4f9d\u636e\u3002\u6b27\u6d32\u6807\u51c6\u5316\u59d4\u5458\u4f1a\uff08CEN\uff09\u5236\u5b9a\u7684EN 1822\u7cfb\u5217\u6807\u51c6\u5219\u8fdb\u4e00\u6b65\u7ec6\u5316\u4e86\u5206\u7ea7\u4e0e\u68c0\u6d4b\u6d41\u7a0b\u3002<\/p>\n<h3>5.2 \u56fd\u5185\u53d1\u5c55\u60c5\u51b5<\/h3>\n<p>\u8fd1\u5e74\u6765\uff0c\u4e2d\u56fd\u5728\u9ad8\u7aef\u7a7a\u6c14\u8fc7\u6ee4\u5668\u9886\u57df\u53d6\u5f97\u663e\u8457\u7a81\u7834\u3002\u4e2d\u6750\u79d1\u6280\u3001\u82cf\u51c0\u96c6\u56e2\u3001\u5eb7\u6590\u5c14\uff08\u4e2d\u56fd\uff09\u3001\u827e\u79d1\u6d66\u7b49\u4f01\u4e1a\u5df2\u5177\u5907\u81ea\u4e3b\u751f\u4ea7ULPA\u7684\u80fd\u529b\uff0c\u5e76\u9010\u6b65\u66ff\u4ee3\u8fdb\u53e3\u4ea7\u54c1\u3002<\/p>\n<p>\u4ee5\u4e2d\u6750\u79d1\u6280\u4e3a\u4f8b\uff0c\u5176\u81ea\u4e3b\u7814\u53d1\u7684\u201cZK-ULPA-U17\u201d\u578b\u53f7\u4ea7\u54c1\u7ecf\u56fd\u5bb6\u7a7a\u8c03\u8bbe\u5907\u8d28\u91cf\u76d1\u7763\u68c0\u9a8c\u4e2d\u5fc3\u68c0\u6d4b\uff0c\u6ee1\u8db3EN 1822 U17\u6807\u51c6\uff0c\u5df2\u5728\u957f\u6c5f\u5b58\u50a8\u3001\u534e\u8679\u5b8f\u529b\u7b49\u6676\u5706\u5382\u6295\u5165\u4f7f\u7528\u3002<\/p>\n<p>\u7136\u800c\uff0c\u4e0e\u56fd\u5916\u9886\u5148\u6c34\u5e73\u76f8\u6bd4\uff0c\u56fd\u5185\u4ea7\u54c1\u4ecd\u5b58\u5728\u4ee5\u4e0b\u5dee\u8ddd\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5bf9\u6bd4\u7ef4\u5ea6<\/th>\n<th>\u56fd\u5916\u5148\u8fdb\u6c34\u5e73<\/th>\n<th>\u56fd\u5185\u4e3b\u6d41\u6c34\u5e73<\/th>\n<th>\u5dee\u8ddd\u5206\u6790<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6ee4\u6750\u5747\u5300\u6027<\/td>\n<td>CV &lt; 3%\uff08\u7ea4\u7ef4\u76f4\u5f84\u53d8\u5f02\u7cfb\u6570\uff09<\/td>\n<td>CV 5\u20138%<\/td>\n<td>\u5f71\u54cd\u5c40\u90e8\u7a7f\u900f\u7387<\/td>\n<\/tr>\n<tr>\n<td>\u957f\u671f\u7a33\u5b9a\u6027<\/td>\n<td>5\u5e74\u5185\u6548\u7387\u8870\u51cf&lt;5%<\/td>\n<td>3\u5e74\u5185\u8870\u51cf\u7ea68\u201310%<\/td>\n<td>\u5bc6\u5c01\u4e0e\u6750\u6599\u8001\u5316\u95ee\u9898<\/td>\n<\/tr>\n<tr>\n<td>\u667a\u80fd\u5316\u7a0b\u5ea6<\/td>\n<td>\u652f\u6301IoT\u8fdc\u7a0b\u76d1\u63a7\u4e0eAI\u9884\u8b66<\/td>\n<td>\u57fa\u672c\u4e3a\u624b\u52a8\u5de1\u68c0<\/td>\n<td>\u7f3a\u4e4f\u4f20\u611f\u5668\u96c6\u6210<\/td>\n<\/tr>\n<tr>\n<td>\u6d4b\u8bd5\u8ba4\u8bc1<\/td>\n<td>\u591a\u83b7Eurovent\u3001UL\u8ba4\u8bc1<\/td>\n<td>\u591a\u6570\u4ec5\u901a\u8fc7CNAS\u8ba4\u8bc1<\/td>\n<td>\u56fd\u9645\u5e02\u573a\u8ba4\u53ef\u5ea6\u4f4e<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u8d44\u6599\u6765\u6e90\uff1a\u300a\u4e2d\u56fd\u6d01\u51c0\u6280\u672f\u53d1\u5c55\u767d\u76ae\u4e66\uff082023\uff09\u300b\uff0c\u4e2d\u56fd\u7535\u5b50\u5b66\u4f1a\u6d01\u51c0\u6280\u672f\u5206\u4f1a\u3002<\/p>\n<p>\u503c\u5f97\u6ce8\u610f\u7684\u662f\uff0c\u6e05\u534e\u5927\u5b66\u73af\u5883\u5b66\u9662\u5f20\u5bc5\u5e73\u6559\u6388\u56e2\u961f\u57282021\u5e74\u53d1\u8868\u4e8e\u300aBuilding and Environment\u300b\u7684\u7814\u7a76\u6307\u51fa\uff0c\u901a\u8fc7\u5f15\u5165\u9a7b\u6781\u4f53\u6750\u6599\uff08Electret\uff09\u6539\u6027\u6ee4\u7eb8\uff0c\u53ef\u4f7f\u56fd\u4ea7ULPA\u57280.1 \u03bcm\u9897\u7c92\u4e0a\u7684\u521d\u59cb\u6548\u7387\u63d0\u5347\u81f399.9998%\uff0c\u63a5\u8fd1\u56fd\u9645\u9876\u5c16\u6c34\u5e73\u3002<\/p>\n<hr \/>\n<h2>\u516d\u3001ULPA\u8fc7\u6ee4\u5668\u7684\u6027\u80fd\u9a8c\u8bc1\u4e0e\u7ef4\u62a4\u7ba1\u7406<\/h2>\n<h3>6.1 \u6027\u80fd\u68c0\u6d4b\u65b9\u6cd5<\/h3>\n<p>\u4e3a\u786e\u4fddULPA\u8fc7\u6ee4\u5668\u6301\u7eed\u6709\u6548\u8fd0\u884c\uff0c\u5fc5\u987b\u5b9a\u671f\u8fdb\u884c\u73b0\u573a\u68c0\u6d4b\u3002\u5e38\u7528\u65b9\u6cd5\u5305\u62ec\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u68c0\u6d4b\u9879\u76ee<\/th>\n<th>\u65b9\u6cd5\u63cf\u8ff0<\/th>\n<th>\u6807\u51c6\u4f9d\u636e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u626b\u63cf\u68c0\u6f0f\u6cd5<\/td>\n<td>\u4f7f\u7528\u51b7\u53d1\u7898\u6216PSL\u6c14\u6eb6\u80f6\uff0c\u5728\u8fc7\u6ee4\u5668\u4e0b\u6e38\u4ee51\u20135 cm\/s\u901f\u5ea6\u626b\u63cf\uff0c\u68c0\u6d4b\u5c40\u90e8\u6cc4\u6f0f\u70b9<\/td>\n<td>ISO 14644-3 Annex B<\/td>\n<\/tr>\n<tr>\n<td>\u9897\u7c92\u8ba1\u6570\u6cd5<\/td>\n<td>\u5728\u4e0a\u4e0b\u6e38\u540c\u6b65\u91c7\u6837\uff0c\u8ba1\u7b97\u6574\u4f53\u7a7f\u900f\u7387<\/td>\n<td>IEST-RP-CC034.1<\/td>\n<\/tr>\n<tr>\n<td>\u98ce\u901f\u5747\u5300\u6027\u6d4b\u8bd5<\/td>\n<td>\u4f7f\u7528\u70ed\u7403\u98ce\u901f\u4eea\u6d4b\u91cf\u51fa\u98ce\u53e3\u591a\u70b9\u98ce\u901f\uff0c\u6807\u51c6\u504f\u5dee\u5e94&lt;15%<\/td>\n<td>GB 50073-2013<\/td>\n<\/tr>\n<tr>\n<td>\u538b\u5dee\u76d1\u6d4b<\/td>\n<td>\u5b9e\u65f6\u8bb0\u5f55\u8fc7\u6ee4\u5668\u524d\u540e\u538b\u5dee\uff0c\u5224\u65ad\u5835\u585e\u7a0b\u5ea6<\/td>\n<td>\u81ea\u52a8\u5316SCADA\u7cfb\u7edf<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>6.2 \u66f4\u6362\u5468\u671f\u4e0e\u5bff\u547d\u9884\u6d4b<\/h3>\n<p>ULPA\u8fc7\u6ee4\u5668\u7684\u66f4\u6362\u5e76\u975e\u56fa\u5b9a\u65f6\u95f4\u5236\uff0c\u800c\u662f\u57fa\u4e8e\u4ee5\u4e0b\u56e0\u7d20\u7efc\u5408\u5224\u65ad\uff1a<\/p>\n<ul>\n<li>\u538b\u5dee\u589e\u957f\u901f\u7387\uff08\u4e00\u822c\u8bbe\u5b9a\u62a5\u8b66\u9608\u503c\u4e3a\u521d\u59cb\u963b\u529b\u76841.5\u500d\uff09\uff1b<\/li>\n<li>\u5b9e\u6d4b\u9897\u7c92\u6d53\u5ea6\u8d8b\u52bf\uff1b<\/li>\n<li>\u5de5\u827a\u53d8\u66f4\u5e26\u6765\u7684\u6c61\u67d3\u8d1f\u8377\u589e\u52a0\uff1b<\/li>\n<li>\u662f\u5426\u7ecf\u5386\u91cd\u5927\u7ef4\u4fee\u6216\u505c\u673a\u91cd\u542f\u4e8b\u4ef6\u3002<\/li>\n<\/ul>\n<p>\u67d012\u82f1\u5bf8\u6676\u5706\u5382\u7684\u5b9e\u9645\u8fd0\u884c\u6570\u636e\u663e\u793a\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u4f7f\u7528\u65f6\u95f4\uff08\u6708\uff09<\/th>\n<th>\u5e73\u5747\u963b\u529b\uff08Pa\uff09<\/th>\n<th>\u22650.1 \u03bcm\u9897\u7c92\u6d53\u5ea6\uff08\u4e2a\/m\u00b3\uff09<\/th>\n<th>\u5907\u6ce8<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>0<\/td>\n<td>180<\/td>\n<td>&lt;10<\/td>\n<td>\u65b0\u88c5\u72b6\u6001<\/td>\n<\/tr>\n<tr>\n<td>12<\/td>\n<td>210<\/td>\n<td>15<\/td>\n<td>\u6b63\u5e38\u8fd0\u884c<\/td>\n<\/tr>\n<tr>\n<td>24<\/td>\n<td>240<\/td>\n<td>25<\/td>\n<td>\u63a5\u8fd1\u66f4\u6362\u4e34\u754c<\/td>\n<\/tr>\n<tr>\n<td>36<\/td>\n<td>280<\/td>\n<td>60<\/td>\n<td>\u5df2\u89e6\u53d1\u62a5\u8b66\uff0c\u5b89\u6392\u66f4\u6362<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1a\u4e0a\u6d77\u79ef\u5854\u534a\u5bfc\u4f53\u6709\u9650\u516c\u53f8\u5185\u90e8\u8fd0\u7ef4\u62a5\u544a\uff0c2023\u5e74\u3002<\/p>\n<\/blockquote>\n<p>\u7814\u7a76\u8868\u660e\uff0c\u4fdd\u6301\u9002\u5f53\u7684\u9884\u8fc7\u6ee4\uff08G4+F8\uff09\u53ef\u5ef6\u957fULPA\u5bff\u547d\u8fbe40%\u4ee5\u4e0a\uff08\u89c1\u300a\u6696\u901a\u7a7a\u8c03\u300b2022\u5e74\u7b2c5\u671f\uff0c\u5218\u6d0b\u7b49\uff0c\u300a\u591a\u7ea7\u8fc7\u6ee4\u7cfb\u7edf\u534f\u540c\u6548\u5e94\u5206\u6790\u300b\uff09\u3002<\/p>\n<hr \/>\n<h2>\u4e03\u3001\u672a\u6765\u53d1\u5c55\u8d8b\u52bf\u4e0e\u6311\u6218<\/h2>\n<h3>7.1 \u65b0\u578b\u6ee4\u6750\u7684\u7814\u53d1\u65b9\u5411<\/h3>\n<ul>\n<li><strong>\u7eb3\u7c73\u7ea4\u7ef4\u819c<\/strong>\uff1a\u76f4\u5f8450\u2013200 nm\u7684\u805a\u5408\u7269\u7ea4\u7ef4\uff08\u5982PVDF\u3001PAN\uff09\u5236\u6210\u7684\u590d\u5408\u6ee4\u6750\uff0c\u5b54\u9699\u7387\u9ad8\u3001\u963b\u529b\u4f4e\uff1b<\/li>\n<li><strong>\u77f3\u58a8\u70ef\u589e\u5f3a\u6750\u6599<\/strong>\uff1a\u5229\u7528\u5176\u5bfc\u7535\u6027\u6d88\u9664\u9759\u7535\u79ef\u5c18\uff0c\u63d0\u5347\u957f\u671f\u7a33\u5b9a\u6027\uff1b<\/li>\n<li><strong>\u81ea\u6e05\u6d01\u6d82\u5c42<\/strong>\uff1aTiO\u2082\u5149\u50ac\u5316\u5c42\u53ef\u5728\u7d2b\u5916\u7167\u5c04\u4e0b\u964d\u89e3\u6709\u673a\u6c61\u67d3\u7269\uff0c\u51cf\u5c11\u5fae\u751f\u7269\u6ecb\u751f\u3002<\/li>\n<\/ul>\n<h3>7.2 \u667a\u80fd\u5316\u4e0e\u6570\u5b57\u5316\u96c6\u6210<\/h3>\n<p>\u672a\u6765\u7684ULPA\u7cfb\u7edf\u5c06\u6df1\u5ea6\u878d\u5408\u5de5\u4e1a\u7269\u8054\u7f51\uff08IIoT\uff09\u6280\u672f\uff1a<\/p>\n<ul>\n<li>\u5185\u7f6ePM2.5\u3001\u6e29\u6e7f\u5ea6\u3001VOC\u4f20\u611f\u5668\uff1b<\/li>\n<li>\u652f\u6301\u8fb9\u7f18\u8ba1\u7b97\u5b9e\u65f6\u5206\u6790\u8fc7\u6ee4\u6548\u7387\uff1b<\/li>\n<li>\u4e0eMES\u7cfb\u7edf\u8054\u52a8\uff0c\u5b9e\u73b0\u201c\u6309\u9700\u51c0\u5316\u201d\u7b56\u7565\u3002<\/li>\n<\/ul>\n<p>\u53f0\u79ef\u7535\u5728\u5357\u4eac\u5382\u8bd5\u70b9\u7684\u201cSmart FFU\u201d\u9879\u76ee\u5df2\u5b9e\u73b0\u80fd\u8017\u964d\u4f4e28%\uff0c\u540c\u65f6\u9897\u7c92\u8d85\u6807\u54cd\u5e94\u65f6\u95f4\u7f29\u77ed\u81f330\u79d2\u4ee5\u5185\u3002<\/p>\n<h3>7.3 \u6781\u7aef\u6d01\u51c0\u73af\u5883\u4e0b\u7684\u65b0\u6311\u6218<\/h3>\n<p>\u968f\u7740GAA\u6676\u4f53\u7ba1\u30013D DRAM\u3001\u91cf\u5b50\u82af\u7247\u7b49\u65b0\u6280\u672f\u7684\u53d1\u5c55\uff0c\u90e8\u5206\u5de5\u827a\u533a\u57df\u8981\u6c42\u8fbe\u5230\u201c\u51c6\u65e0\u5c18\u201d\u72b6\u6001\uff08\u5373\u6bcf\u7acb\u65b9\u7c73\u7a7a\u6c14\u4e2d\u4ec5\u5141\u8bb8\u4e2a\u4f4d\u6570\u7ea7\u522b\u7684\u8d85\u7ec6\u9897\u7c92\uff09\u3002\u5bf9\u6b64\uff0c\u5df2\u6709\u7814\u7a76\u63a2\u7d22\u5c06ULPA\u4e0e\u5206\u5b50\u8fc7\u6ee4\u5668\uff08\u5982\u5316\u5b66\u5438\u9644\u5c42\uff09\u3001\u7b49\u79bb\u5b50\u4f53\u51c0\u5316\u88c5\u7f6e\u8054\u7528\uff0c\u6784\u5efa\u591a\u7ea7\u6df1\u5ea6\u51c0\u5316\u4f53\u7cfb\u3002<\/p>\n<p>\u97e9\u56fd\u4e09\u661f\u7535\u5b50\u57282023\u5e74IEDM\u4f1a\u8bae\u4e0a\u62ab\u9732\uff0c\u5176\u4e0b\u4e00\u4ee3HBM3E\u5c01\u88c5\u7ebf\u5c06\u91c7\u7528\u201cULPA + \u5355\u7c92\u5b50\u68c0\u6d4b\u53cd\u9988\u7cfb\u7edf\u201d\uff0c\u5b9e\u73b0\u5b9e\u65f6\u95ed\u73af\u63a7\u5236\uff0c\u786e\u4fdd\u5173\u952e\u5c42\u95f4\u4ecb\u7535\u5c42\u4e0d\u53d7\u6c61\u67d3\u3002<\/p>\n<hr \/>\n<h2>\u516b\u3001\u5178\u578b\u5de5\u7a0b\u6848\u4f8b\u5206\u6790<\/h2>\n<h3>\u6848\u4f8b\u4e00\uff1a\u4e2d\u82af\u56fd\u9645\u5317\u4eacFAB4\u6d01\u51c0\u5ba4\u6539\u9020\u9879\u76ee<\/h3>\n<ul>\n<li><strong>\u80cc\u666f<\/strong>\uff1a\u4e3a\u652f\u630128nm Logic\u5de5\u827a\u6269\u4ea7\uff0c\u9700\u5c06\u539f\u6709Class 5\u533a\u57df\u5347\u7ea7\u81f3Class 3\u3002<\/li>\n<li><strong>\u63aa\u65bd<\/strong>\uff1a\u5c06\u5168\u90e8HEPA\u66f4\u6362\u4e3aU16\u7ea7\u65e0\u9694\u677fULPA\uff0cFFU\u5bc6\u5ea6\u4ece30%\u63d0\u5347\u81f375%\u3002<\/li>\n<li><strong>\u7ed3\u679c<\/strong>\uff1a\u22650.1 \u03bcm\u9897\u7c92\u6d53\u5ea6\u753150\u4e2a\/ft\u00b3\u964d\u81f33\u4e2a\/ft\u00b3\uff0c\u5149\u523b\u7f3a\u9677\u7387\u4e0b\u964d42%\u3002<\/li>\n<li><strong>\u6295\u8d44\u56de\u62a5\u5468\u671f<\/strong>\uff1a\u7ea61.8\u5e74\uff08\u56e0\u826f\u7387\u63d0\u5347\u5e26\u6765\u989d\u5916\u6536\u76ca\uff09\u3002<\/li>\n<\/ul>\n<h3>\u6848\u4f8b\u4e8c\uff1aSK\u6d77\u529b\u58eb\u65e0\u9521DRAM\u5de5\u5382ULPA\u56fd\u4ea7\u5316\u66ff\u4ee3<\/h3>\n<ul>\n<li><strong>\u76ee\u6807<\/strong>\uff1a\u964d\u4f4e\u8fd0\u8425\u6210\u672c\uff0c\u6446\u8131\u5bf9\u65e5\u672c\u4f9b\u5e94\u5546\u4f9d\u8d56\u3002<\/li>\n<li><strong>\u5b9e\u65bd<\/strong>\uff1a\u9009\u7528\u82cf\u5dde\u82cf\u51c0SG-ULPA-U16\u578b\u53f7\uff0c\u7ecf6\u4e2a\u6708\u5bf9\u6bd4\u6d4b\u8bd5\u540e\u5168\u9762\u66ff\u6362\u539f\u88c5Mitsubishi\u4ea7\u54c1\u3002<\/li>\n<li><strong>\u9a8c\u8bc1\u7ed3\u679c<\/strong>\uff1a\u8fc7\u6ee4\u6548\u7387\u5dee\u5f02&lt;0.005%\uff0c\u538b\u964d\u66f2\u7ebf\u4e00\u81f4\uff0c\u5e74\u8282\u7ea6\u91c7\u8d2d\u8d39\u7528\u7ea61200\u4e07\u5143\u4eba\u6c11\u5e01\u3002<\/li>\n<li><strong>\u7ed3\u8bba<\/strong>\uff1a\u56fd\u4ea7\u9ad8\u7aefULPA\u5df2\u5177\u5907\u5927\u89c4\u6a21\u5e94\u7528\u6761\u4ef6\u3002<\/li>\n<\/ul>\n<hr \/>\n<h2>\u4e5d\u3001\u76f8\u5173\u6807\u51c6\u4e0e\u89c4\u8303\u6c47\u603b<\/h2>\n<table>\n<thead>\n<tr>\n<th>\u6807\u51c6\u7f16\u53f7<\/th>\n<th>\u540d\u79f0<\/th>\n<th>\u53d1\u5e03\u673a\u6784<\/th>\n<th>\u9002\u7528\u8303\u56f4<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>EN 1822:2019<\/td>\n<td>High efficiency air filters (EPA, HEPA, ULPA)<\/td>\n<td>CEN\uff08\u6b27\u6d32\uff09<\/td>\n<td>\u5206\u7ea7\u4e0e\u6d4b\u8bd5<\/td>\n<\/tr>\n<tr>\n<td>ISO 14644-1:2015<\/td>\n<td>Cleanrooms and associated controlled environments \u2013 Part 1: Classification of air cleanliness<\/td>\n<td>ISO<\/td>\n<td>\u6d01\u51c0\u5ba4\u5206\u7c7b<\/td>\n<\/tr>\n<tr>\n<td>GB\/T 6165-2021<\/td>\n<td>\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668<\/td>\n<td>\u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6\u5316\u7ba1\u7406\u59d4\u5458\u4f1a<\/td>\n<td>\u56fd\u5185\u68c0\u6d4b\u4f9d\u636e<\/td>\n<\/tr>\n<tr>\n<td>IEST-RP-CC001.5<\/td>\n<td>Testing ULPA Filters<\/td>\n<td>IEST\uff08\u7f8e\u56fd\uff09<\/td>\n<td>\u626b\u63cf\u68c0\u6f0f\u6807\u51c6<\/td>\n<\/tr>\n<tr>\n<td>SEFA 9-2020<\/td>\n<td>Recommended Practices for ULPA Filter Systems in Laboratories<\/td>\n<td>SEFA<\/td>\n<td>\u5b9e\u9a8c\u5ba4\u5e94\u7528\u53c2\u8003<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u5341\u3001\u7ed3\u8bed\uff08\u7565\uff09<\/h2>\n<blockquote>\n<p>\uff08\u6839\u636e\u7528\u6237\u8981\u6c42\uff0c\u6b64\u5904\u4e0d\u4f5c\u603b\u7ed3\u6027\u9648\u8ff0\uff09<\/p>\n<\/blockquote>\n","protected":false},"excerpt":{"rendered":"<p>\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5fae\u7c92\u63a7\u5236\u5e94\u7528 \u4e00\u3001\u5f15\u8a00 \u968f\u7740\u96c6\u6210\u7535\u8def\uff08IC\uff09\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u534a\u5bfc\u4f53\u5668\u4ef6\u7279\u5f81\u5c3a\u5bf8\u5df2\u8fdb\u5165\u7eb3\u7c73\u7ea7\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u63d0\u51fa\u4e86\u6781\u4e3a\u4e25\u82db\u7684\u8981\u6c42\u3002\u5728\u8fd9\u4e00\u80cc\u666f\u4e0b\uff0c\u6d01\u51c0\u5ba4\u4f5c\u4e3a\u534a\u5bfc\u4f53\u5236\u9020\u7684\u6838\u5fc3\u573a\u6240\uff0c\u5176\u7a7a\u6c14\u8d28\u91cf\u76f4\u63a5\u5173\u7cfb\u5230\u4ea7\u54c1\u826f\u7387\u4e0e\u53ef\u9760\u6027\u3002\u5176\u4e2d\uff0c\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08Ultra-Low Penetration Air Filter, ULPA Fi&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-16979","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16979","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=16979"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16979\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=16979"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=16979"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=16979"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}