{"id":16919,"date":"2025-09-22T16:08:24","date_gmt":"2025-09-22T08:08:24","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=16919"},"modified":"2025-09-22T16:08:24","modified_gmt":"2025-09-22T08:08:24","slug":"%e7%8e%bb%e7%ba%a4%e9%ab%98%e6%95%88%e7%a9%ba%e6%b0%94%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e6%b4%81%e5%87%80%e5%ae%a4%e4%b8%ad%e7%9a%84%e5%ba%94%e7%94%a8%e4%b8%8e%e6%80%a7","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=16919","title":{"rendered":"\u73bb\u7ea4\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u4e0e\u6027\u80fd\u5206\u6790"},"content":{"rendered":"<h1>\u73bb\u7ea4\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u4e0e\u6027\u80fd\u5206\u6790<\/h1>\n<h2>\u6982\u8ff0<\/h2>\n<p>\u968f\u7740\u5168\u7403\u4fe1\u606f\u6280\u672f\u548c\u9ad8\u7aef\u5236\u9020\u4e1a\u7684\u8fc5\u731b\u53d1\u5c55\uff0c\u534a\u5bfc\u4f53\u4ea7\u4e1a\u4f5c\u4e3a\u73b0\u4ee3\u79d1\u6280\u7684\u6838\u5fc3\u652f\u6491\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u5176\u4e2d\uff0c\u6d01\u51c0\u5ba4\uff08Cleanroom\uff09\u662f\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u4e2d\u4e0d\u53ef\u6216\u7f3a\u7684\u5173\u952e\u73af\u8282\uff0c\u5176\u7a7a\u6c14\u8d28\u91cf\u76f4\u63a5\u51b3\u5b9a\u4e86\u82af\u7247\u826f\u7387\u3001\u4ea7\u54c1\u53ef\u9760\u6027\u4ee5\u53ca\u5de5\u827a\u7a33\u5b9a\u6027\u3002\u5728\u4f17\u591a\u7a7a\u6c14\u51c0\u5316\u6280\u672f\u4e2d\uff0c<strong>\u73bb\u7ea4\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668<\/strong>\uff08Glass Fiber High-Efficiency Particulate Air Filter\uff0c\u7b80\u79f0HEPA\u6216ULPA\u6ee4\u7f51\uff09\u56e0\u5176\u5353\u8d8a\u7684\u9897\u7c92\u7269\u6355\u96c6\u80fd\u529b\uff0c\u5df2\u6210\u4e3a\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u901a\u98ce\u7cfb\u7edf\u4e2d\u7684\u6838\u5fc3\u7ec4\u4ef6\u3002<\/p>\n<p>\u672c\u6587\u5c06\u56f4\u7ed5\u73bb\u7ea4\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5b9e\u9645\u5e94\u7528\u5c55\u5f00\u6df1\u5165\u63a2\u8ba8\uff0c\u6db5\u76d6\u5176\u5de5\u4f5c\u539f\u7406\u3001\u5173\u952e\u6027\u80fd\u53c2\u6570\u3001\u56fd\u5185\u5916\u4e3b\u6d41\u4ea7\u54c1\u5bf9\u6bd4\u3001\u8fd0\u884c\u6548\u7387\u8bc4\u4f30\uff0c\u5e76\u7ed3\u5408\u56fd\u5185\u5916\u6743\u5a01\u6587\u732e\u7814\u7a76\u6210\u679c\uff0c\u7cfb\u7edf\u5206\u6790\u5176\u5728\u9ad8\u6d01\u51c0\u5ea6\u73af\u5883\u4e0b\u7684\u9002\u7528\u6027\u4e0e\u4f18\u5316\u7b56\u7565\u3002<\/p>\n<hr \/>\n<h2>1. \u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u5bf9\u7a7a\u6c14\u8d28\u91cf\u7684\u8981\u6c42<\/h2>\n<h3>1.1 \u6d01\u51c0\u7b49\u7ea7\u6807\u51c6<\/h3>\n<p>\u6839\u636e\u56fd\u9645\u6807\u51c6\u5316\u7ec4\u7ec7\uff08ISO\uff09\u53d1\u5e03\u7684\u300aISO 14644-1\uff1a\u6d01\u51c0\u5ba4\u53ca\u76f8\u5173\u53d7\u63a7\u73af\u5883 \u7b2c1\u90e8\u5206\uff1a\u7a7a\u6c14\u6d01\u51c0\u5ea6\u5206\u7ea7\u300b\u6807\u51c6\uff0c\u6d01\u51c0\u5ba4\u6309\u5355\u4f4d\u4f53\u79ef\u7a7a\u6c14\u4e2d\u60ac\u6d6e\u7c92\u5b50\u6d53\u5ea6\u5212\u5206\u4e3a9\u4e2a\u7b49\u7ea7\uff0c\u4eceISO Class 1\uff08\u6700\u6d01\u51c0\uff09\u5230ISO Class 9\uff08\u63a5\u8fd1\u666e\u901a\u5ba4\u5185\u7a7a\u6c14\uff09\u3002\u534a\u5bfc\u4f53\u524d\u9053\u5de5\u827a\u901a\u5e38\u8981\u6c42\u8fbe\u5230 <strong>ISO Class 3~5<\/strong> \u7684\u6d01\u51c0\u6c34\u5e73\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>ISO\u7b49\u7ea7<\/th>\n<th>\u22650.1 \u03bcm\u7c92\u5b50\u6700\u5927\u5141\u8bb8\u6d53\u5ea6\uff08\u4e2a\/m\u00b3\uff09<\/th>\n<th>\u5178\u578b\u5e94\u7528\u573a\u666f<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>ISO 3<\/td>\n<td>1,000<\/td>\n<td>\u6781\u7d2b\u5916\u5149\u523b\uff08EUV\uff09\u3001\u5148\u8fdb\u5236\u7a0b\u6676\u5706\u5236\u9020<\/td>\n<\/tr>\n<tr>\n<td>ISO 4<\/td>\n<td>10,000<\/td>\n<td>14nm\u53ca\u4ee5\u4e0b\u8282\u70b9\u6676\u5706\u5382\u5149\u523b\u533a<\/td>\n<\/tr>\n<tr>\n<td>ISO 5<\/td>\n<td>100,000<\/td>\n<td>\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08CVD\uff09\u3001\u8680\u523b\u7b49\u5de5\u827a\u533a<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u8d44\u6599\u6765\u6e90\uff1aISO 14644-1:2015\u300aCleanrooms and associated controlled environments \u2014 Part 1: Classification of air cleanliness by particle concentration\u300b<\/p>\n<\/blockquote>\n<h3>1.2 \u5fae\u7c92\u6c61\u67d3\u7684\u5371\u5bb3<\/h3>\n<p>\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\uff0c\u5c3a\u5bf8\u5c0f\u4e8e0.1\u5fae\u7c73\u7684\u5fae\u7c92\u5373\u53ef\u5bfc\u81f4\u7535\u8def\u77ed\u8def\u3001\u65ad\u7ebf\u6216\u56fe\u5f62\u7f3a\u9677\u3002\u4f8b\u5982\uff0c\u57287nm\u5de5\u827a\u8282\u70b9\u4e0b\uff0c\u5355\u4e2a0.05\u03bcm\u9897\u7c92\u53ef\u80fd\u8986\u76d6\u591a\u4e2a\u6676\u4f53\u7ba1\u7ed3\u6784\uff0c\u9020\u6210\u81f4\u547d\u6027\u7f3a\u9677\uff08killer defect\uff09\uff0c\u663e\u8457\u964d\u4f4e\u82af\u7247\u826f\u7387\uff08Yield Rate\uff09\u3002\u636eTSMC\uff08\u53f0\u79ef\u7535\uff092022\u5e74\u6280\u672f\u5e74\u62a5\u663e\u793a\uff0c\u6d01\u51c0\u5ba4\u9897\u7c92\u6d53\u5ea6\u6bcf\u589e\u52a010%\uff0c\u903b\u8f91\u82af\u7247\u826f\u7387\u4e0b\u964d\u7ea61.8%\u3002<\/p>\n<p>\u6b64\u5916\uff0c\u6709\u673a\u6325\u53d1\u7269\uff08VOCs\uff09\u3001\u91d1\u5c5e\u79bb\u5b50\uff08\u5982Na\u207a\u3001K\u207a\uff09\u548c\u5206\u5b50\u6c61\u67d3\u7269\uff08AMC, Airborne Molecular Contaminants\uff09\u4e5f\u4f1a\u901a\u8fc7\u5438\u9644\u4f5c\u7528\u5f71\u54cd\u5149\u523b\u80f6\u6027\u80fd\u4e0e\u6805\u6781\u6c27\u5316\u5c42\u8d28\u91cf\u3002\u56e0\u6b64\uff0c\u4ec5\u4f9d\u9760\u9ad8\u6548\u8fc7\u6ee4\u5c1a\u4e0d\u8db3\u591f\uff0c\u9700\u7ed3\u5408\u5316\u5b66\u8fc7\u6ee4\u4e0e\u6c14\u6d41\u7ec4\u7ec7\u8bbe\u8ba1\u5b9e\u73b0\u5168\u9762\u63a7\u5236\u3002<\/p>\n<hr \/>\n<h2>2. \u73bb\u7ea4\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u5de5\u4f5c\u539f\u7406<\/h2>\n<h3>2.1 \u7ed3\u6784\u7ec4\u6210<\/h3>\n<p>\u73bb\u7ea4\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u4e3b\u8981\u7531\u4ee5\u4e0b\u51e0\u90e8\u5206\u6784\u6210\uff1a<\/p>\n<ul>\n<li><strong>\u6ee4\u6599\u5c42<\/strong>\uff1a\u4ee5\u8d85\u7ec6\u73bb\u7483\u7ea4\u7ef4\uff08\u76f4\u5f840.5\u20132\u03bcm\uff09\u4e3a\u57fa\u6750\uff0c\u91c7\u7528\u968f\u673a\u4e09\u7ef4\u7f51\u7edc\u7ed3\u6784\u7f16\u7ec7\u800c\u6210\uff0c\u5177\u6709\u9ad8\u6bd4\u8868\u9762\u79ef\u4e0e\u4f4e\u963b\u529b\u7279\u6027\u3002<\/li>\n<li><strong>\u5206\u9694\u677f<\/strong>\uff1a\u94dd\u7b94\u6216\u7eb8\u5236\u6ce2\u7eb9\u677f\uff0c\u7528\u4e8e\u652f\u6491\u6ee4\u6599\u5e76\u5f62\u6210\u7a33\u5b9a\u6c14\u6d41\u901a\u9053\u3002<\/li>\n<li><strong>\u5916\u6846<\/strong>\uff1a\u9540\u950c\u94a2\u677f\u3001\u4e0d\u9508\u94a2\u6216\u94dd\u5408\u91d1\u6750\u8d28\uff0c\u786e\u4fdd\u5bc6\u5c01\u6027\u4e0e\u673a\u68b0\u5f3a\u5ea6\u3002<\/li>\n<li><strong>\u5bc6\u5c01\u80f6<\/strong>\uff1a\u805a\u6c28\u916f\u6216\u7845\u916e\u5bc6\u5c01\u5242\uff0c\u9632\u6b62\u65c1\u901a\u6cc4\u6f0f\u3002<\/li>\n<li><strong>\u9632\u62a4\u7f51<\/strong>\uff1a\u524d\u540e\u7f6e\u91d1\u5c5e\u7f51\uff0c\u9632\u6b62\u6ee4\u7eb8\u7834\u635f\u3002<\/li>\n<\/ul>\n<h3>2.2 \u8fc7\u6ee4\u673a\u5236<\/h3>\n<p>\u6839\u636e\u7f8e\u56fdASHRAE\uff08\u91c7\u6696\u3001\u5236\u51b7\u4e0e\u7a7a\u8c03\u5de5\u7a0b\u5e08\u5b66\u4f1a\uff09\u7684\u7814\u7a76\uff0c\u9ad8\u6548\u8fc7\u6ee4\u5668\u4e3b\u8981\u4f9d\u8d56\u56db\u79cd\u7269\u7406\u673a\u5236\u6355\u96c6\u9897\u7c92\u7269\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u8fc7\u6ee4\u673a\u5236<\/th>\n<th>\u9002\u7528\u7c92\u5f84\u8303\u56f4<\/th>\n<th>\u539f\u7406\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u60ef\u6027\u649e\u51fb\uff08Impaction\uff09<\/td>\n<td>&gt;1 \u03bcm<\/td>\n<td>\u5927\u9897\u7c92\u56e0\u60ef\u6027\u504f\u79bb\u6c14\u6d41\u65b9\u5411\u649e\u51fb\u7ea4\u7ef4\u88ab\u6355\u83b7<\/td>\n<\/tr>\n<tr>\n<td>\u62e6\u622a\u6548\u5e94\uff08Interception\uff09<\/td>\n<td>0.3\u20131 \u03bcm<\/td>\n<td>\u9897\u7c92\u968f\u6c14\u6d41\u8fd0\u52a8\u65f6\u63a5\u89e6\u7ea4\u7ef4\u8868\u9762\u88ab\u5438\u9644<\/td>\n<\/tr>\n<tr>\n<td>\u6269\u6563\u6548\u5e94\uff08Diffusion\uff09<\/td>\n<td>&lt;0.1 \u03bcm<\/td>\n<td>\u5c0f\u9897\u7c92\u53d7\u5e03\u6717\u8fd0\u52a8\u5f71\u54cd\u4e0e\u7ea4\u7ef4\u78b0\u649e\u800c\u88ab\u6355\u96c6<\/td>\n<\/tr>\n<tr>\n<td>\u9759\u7535\u5438\u5f15\uff08Electrostatic Attraction\uff09<\/td>\n<td>\u5168\u8303\u56f4\uff08\u8f85\u52a9\u673a\u5236\uff09<\/td>\n<td>\u67d0\u4e9b\u73bb\u7ea4\u5e26\u9759\u7535\u8377\uff0c\u589e\u5f3a\u5bf9\u4e9a\u5fae\u7c73\u9897\u7c92\u7684\u5438\u9644\u529b<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u53c2\u8003\u6587\u732e\uff1aASHRAE Handbook\u2014HVAC Systems and Equipment (2020), Chapter 48: Filters for Particulate Contaminants<\/p>\n<\/blockquote>\n<p>\u503c\u5f97\u6ce8\u610f\u7684\u662f\uff0c<strong>0.3\u5fae\u7c73<\/strong>\u88ab\u8ba4\u4e3a\u662f\u201c\u6700\u6613\u7a7f\u900f\u7c92\u5f84\u201d\uff08Most Penetrating Particle Size, MPPS\uff09\uff0c\u5373\u5728\u6b64\u7c92\u5f84\u4e0b\u8fc7\u6ee4\u6548\u7387\u6700\u4f4e\uff0c\u56e0\u6b64\u6210\u4e3a\u8bc4\u4ef7HEPA\/ULPA\u6027\u80fd\u7684\u5173\u952e\u6307\u6807\u3002<\/p>\n<hr \/>\n<h2>3. \u4e3b\u8981\u7c7b\u578b\u4e0e\u6027\u80fd\u53c2\u6570\u5bf9\u6bd4<\/h2>\n<h3>3.1 \u5206\u7c7b\u6807\u51c6<\/h3>\n<p>\u4f9d\u636e\u6b27\u6d32\u6807\u51c6EN 1822\u4e0e\u7f8e\u56fd\u519b\u6807MIL-STD-282\uff0c\u9ad8\u6548\u8fc7\u6ee4\u5668\u53ef\u5206\u4e3a\u4ee5\u4e0b\u51e0\u4e2a\u7b49\u7ea7\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u8fc7\u6ee4\u5668\u7c7b\u578b<\/th>\n<th>\u6807\u51c6\u4f9d\u636e<\/th>\n<th>MPPS\u6548\u7387\uff08%\uff09<\/th>\n<th>\u5178\u578b\u5e94\u7528\u573a\u666f<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>HEPA H13<\/td>\n<td>EN 1822<\/td>\n<td>\u226599.95<\/td>\n<td>ISO Class 6\u20137\u6d01\u51c0\u5ba4<\/td>\n<\/tr>\n<tr>\n<td>HEPA H14<\/td>\n<td>EN 1822<\/td>\n<td>\u226599.995<\/td>\n<td>ISO Class 5\u53ca\u4ee5\u4e0b<\/td>\n<\/tr>\n<tr>\n<td>ULPA U15<\/td>\n<td>EN 1822<\/td>\n<td>\u226599.999<\/td>\n<td>\u534a\u5bfc\u4f53\u5149\u523b\u533a\u3001\u751f\u7269\u5b89\u5168\u5b9e\u9a8c\u5ba4<\/td>\n<\/tr>\n<tr>\n<td>ULPA U16<\/td>\n<td>EN 1822<\/td>\n<td>\u226599.9995<\/td>\n<td>EUV\u5149\u523b\u3001GAA\u6676\u4f53\u7ba1\u5236\u9020<\/td>\n<\/tr>\n<tr>\n<td>ULPA U17<\/td>\n<td>EN 1822<\/td>\n<td>\u226599.9999<\/td>\n<td>\u6781\u7aef\u6d01\u51c0\u9700\u6c42\u533a\u57df<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1aEuropean Committee for Standardization. EN 1822-1:2019 <em>High efficiency air filters (HEPA and ULPA)<\/em><\/p>\n<\/blockquote>\n<p>\u5728\u4e2d\u56fd\uff0c\u300aGB\/T 13554-2020 \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b\u56fd\u5bb6\u6807\u51c6\u4e5f\u660e\u786e\u4e86\u7c7b\u4f3c\u5206\u7ea7\u4f53\u7cfb\uff0c\u5176\u4e2dA\u7c7b\u5bf9\u5e94H13\uff0cB\u7c7b\u4e3aH14\uff0cC\u7c7b\u5219\u76f8\u5f53\u4e8eU15\u53ca\u4ee5\u4e0a\u3002<\/p>\n<h3>3.2 \u56fd\u5185\u5916\u4e3b\u6d41\u4ea7\u54c1\u53c2\u6570\u5bf9\u6bd4<\/h3>\n<p>\u4e0b\u8868\u5217\u51fa\u4e86\u5168\u7403\u4e3b\u8981\u4f9b\u5e94\u5546\u751f\u4ea7\u7684\u73bb\u7ea4\u9ad8\u6548\u8fc7\u6ee4\u5668\u5178\u578b\u6280\u672f\u53c2\u6570\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u54c1\u724c<\/th>\n<th>\u578b\u53f7<\/th>\n<th>\u8fc7\u6ee4\u7b49\u7ea7<\/th>\n<th>\u521d\u59cb\u963b\u529b\uff08Pa\uff09<\/th>\n<th>\u989d\u5b9a\u98ce\u901f\uff08m\/s\uff09<\/th>\n<th>\u5bb9\u5c18\u91cf\uff08g\/m\u00b2\uff09<\/th>\n<th>\u4f7f\u7528\u5bff\u547d\uff08\u5e74\uff09<\/th>\n<th>\u4ea7\u5730<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>Camfil\uff08\u745e\u5178\uff09<\/td>\n<td>Hi-Flo ES<\/td>\n<td>H14<\/td>\n<td>\u2264120<\/td>\n<td>0.45<\/td>\n<td>\u226580<\/td>\n<td>5\u20137<\/td>\n<td>\u745e\u5178\/\u4e2d\u56fd<\/td>\n<\/tr>\n<tr>\n<td>Donaldson\uff08\u7f8e\u56fd\uff09<\/td>\n<td>Ultra-Web Z<\/td>\n<td>U16<\/td>\n<td>\u2264150<\/td>\n<td>0.50<\/td>\n<td>\u226595<\/td>\n<td>6\u20138<\/td>\n<td>\u7f8e\u56fd<\/td>\n<\/tr>\n<tr>\n<td>AAF International\uff08\u82f1\u56fd\uff09<\/td>\n<td>Astro PAG<\/td>\n<td>H13<\/td>\n<td>\u2264100<\/td>\n<td>0.40<\/td>\n<td>70<\/td>\n<td>4\u20136<\/td>\n<td>\u82f1\u56fd\/\u65b0\u52a0\u5761<\/td>\n<\/tr>\n<tr>\n<td>KLC Filter\uff08\u4e2d\u56fd\u00b7\u82cf\u5dde\uff09<\/td>\n<td>KL-H14-W<\/td>\n<td>H14<\/td>\n<td>\u2264110<\/td>\n<td>0.45<\/td>\n<td>75<\/td>\n<td>5\u20136<\/td>\n<td>\u4e2d\u56fd<\/td>\n<\/tr>\n<tr>\n<td>Suntone Airtech\uff08\u4e2d\u56fd\u00b7\u6df1\u5733\uff09<\/td>\n<td>ST-ULPA-U15<\/td>\n<td>U15<\/td>\n<td>\u2264130<\/td>\n<td>0.50<\/td>\n<td>85<\/td>\n<td>5\u20137<\/td>\n<td>\u4e2d\u56fd<\/td>\n<\/tr>\n<tr>\n<td>Mitsubishi Chemical\uff08\u65e5\u672c\uff09<\/td>\n<td>CleanTex UL<\/td>\n<td>U17<\/td>\n<td>\u2264160<\/td>\n<td>0.55<\/td>\n<td>\u2265100<\/td>\n<td>7\u20139<\/td>\n<td>\u65e5\u672c<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6ce8\uff1a\u6d4b\u8bd5\u6761\u4ef6\u4e3a\u5e38\u6e29\u5e38\u538b\uff0c\u6d4b\u8bd5\u6c14\u6eb6\u80f6\u4e3aDOP\uff08\u90bb\u82ef\u4e8c\u7532\u9178\u4e8c\u8f9b\u916f\uff09\u6216PSL\uff08\u805a\u82ef\u4e59\u70ef\u4e73\u80f6\u7403\uff09\uff0c\u7c92\u5f840.3\u03bcm<\/p>\n<\/blockquote>\n<p>\u4ece\u4e0a\u8868\u53ef\u89c1\uff0c\u6b27\u7f8e\u54c1\u724c\u5728ULPA\u7ea7\u522b\u4ea7\u54c1\u4e2d\u4ecd\u5360\u636e\u6280\u672f\u4f18\u52bf\uff0c\u5c24\u5176\u5728\u4f4e\u963b\u529b\u4e0e\u957f\u5bff\u547d\u65b9\u9762\u8868\u73b0\u7a81\u51fa\uff1b\u800c\u56fd\u4ea7\u5382\u5546\u8fd1\u5e74\u6765\u901a\u8fc7\u5f15\u8fdb\u5fb7\u56fd\u751f\u4ea7\u7ebf\u4e0e\u81ea\u4e3b\u7814\u53d1\uff0c\u5728H13\u2013H14\u7ea7\u4ea7\u54c1\u4e2d\u5df2\u5177\u5907\u8f83\u5f3a\u7ade\u4e89\u529b\uff0c\u6027\u4ef7\u6bd4\u4f18\u52bf\u660e\u663e\u3002<\/p>\n<hr \/>\n<h2>4. \u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u7cfb\u7edf\u96c6\u6210\u4e0e\u5e03\u5c40<\/h2>\n<h3>4.1 \u5178\u578b\u9001\u98ce\u6a21\u5f0f<\/h3>\n<p>\u5728\u73b0\u4ee3Fab\u5382\u4e2d\uff0c\u73bb\u7ea4\u9ad8\u6548\u8fc7\u6ee4\u5668\u901a\u5e38\u5b89\u88c5\u4e8e\u6d01\u51c0\u5ba4\u9876\u90e8\u7684<strong>FFU<\/strong>\uff08Fan Filter Unit\uff0c\u98ce\u673a\u8fc7\u6ee4\u5355\u5143\uff09\u6a21\u5757\u5185\uff0c\u5f62\u6210\u5782\u76f4\u5355\u5411\u6d41\uff08Vertical Laminar Flow\uff09\u6c14\u6d41\u7ec4\u7ec7\u3002<\/p>\n<h4>FFU\u7cfb\u7edf\u7279\u70b9\uff1a<\/h4>\n<ul>\n<li>\u6a21\u5757\u5316\u8bbe\u8ba1\uff0c\u4fbf\u4e8e\u7ef4\u62a4\u4e0e\u66f4\u6362<\/li>\n<li>\u5185\u7f6eEC\u98ce\u673a\uff0c\u53ef\u8c03\u901f\u8282\u80fd<\/li>\n<li>\u914d\u5907\u538b\u5dee\u4f20\u611f\u5668\uff0c\u5b9e\u65f6\u76d1\u63a7\u6ee4\u7f51\u72b6\u6001<\/li>\n<li>\u652f\u6301\u8fdc\u7a0b\u76d1\u63a7\u4e0e\u62a5\u8b66\u8054\u52a8<\/li>\n<\/ul>\n<p>\u5178\u578bFFU\u914d\u7f6e\u53c2\u6570\u5982\u4e0b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570\u9879<\/th>\n<th>\u6570\u503c<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5c3a\u5bf8\uff08mm\uff09<\/td>\n<td>1200\u00d7600 \u6216 600\u00d7600<\/td>\n<\/tr>\n<tr>\n<td>\u98ce\u91cf\uff08m\u00b3\/h\uff09<\/td>\n<td>900\u20131200<\/td>\n<\/tr>\n<tr>\n<td>\u566a\u97f3\uff08dB\uff09<\/td>\n<td>\u226455<\/td>\n<\/tr>\n<tr>\n<td>\u529f\u7387\uff08W\uff09<\/td>\n<td>150\u2013250<\/td>\n<\/tr>\n<tr>\n<td>\u63a7\u5236\u65b9\u5f0f<\/td>\n<td>RS485 \/ Modbus \/ BACnet<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>4.2 \u6c14\u6d41\u7ec4\u7ec7\u6a21\u62df\u7814\u7a76<\/h3>\n<p>\u6e05\u534e\u5927\u5b66\u5efa\u7b51\u6280\u672f\u79d1\u5b66\u7cfb\u5229\u7528CFD\uff08Computational Fluid Dynamics\uff09\u8f6f\u4ef6\u5bf9\u67d08\u82f1\u5bf8\u6676\u5706\u5382\u6d01\u51c0\u5ba4\u8fdb\u884c\u6570\u503c\u6a21\u62df\uff0c\u7ed3\u679c\u663e\u793a\uff1a\u5f53FFU\u8986\u76d6\u7387\u226585%\u4e14\u5730\u9762\u56de\u98ce grille \u5e03\u7f6e\u5408\u7406\u65f6\uff0c\u5de5\u4f5c\u9762\uff08wafer level\uff09\u6c14\u6d41\u5747\u5300\u6027\u53ef\u8fbe90%\u4ee5\u4e0a\uff0c\u7d0a\u6d41\u6307\u6570&lt;15%\uff0c\u6709\u6548\u907f\u514d\u6da1\u6d41\u533a\u5f62\u6210\u7c89\u5c18\u79ef\u805a\u3002<\/p>\n<blockquote>\n<p>\u5f15\u7528\u6587\u732e\uff1a\u674e\u5148\u5ead\u7b49. \u201c\u5927\u578b\u6d01\u51c0\u5ba4\u6c14\u6d41\u7ec4\u7ec7\u4f18\u5316\u8bbe\u8ba1\u4e0e\u4eff\u771f\u5206\u6790\u201d. \u300a\u6696\u901a\u7a7a\u8c03\u300b\uff0c2021, 51(3): 1\u20137.<\/p>\n<\/blockquote>\n<hr \/>\n<h2>5. \u6027\u80fd\u8bc4\u4f30\u4e0e\u5b9e\u6d4b\u6570\u636e\u5206\u6790<\/h2>\n<h3>5.1 \u6548\u7387\u6d4b\u8bd5\u65b9\u6cd5<\/h3>\n<p>\u56fd\u9645\u901a\u7528\u7684\u9ad8\u6548\u8fc7\u6ee4\u5668\u6548\u7387\u68c0\u6d4b\u65b9\u6cd5\u5305\u62ec\uff1a<\/p>\n<ul>\n<li><strong>DOP\u6cd5<\/strong>\uff1a\u4f7f\u7528DOP\u6c14\u6eb6\u80f6\u53d1\u751f\u5668\u4ea7\u751f0.3\u03bcm\u6807\u51c6\u7c92\u5b50\uff0c\u4e0a\u4e0b\u6e38\u91c7\u6837\u6d4b\u5b9a\u7a7f\u900f\u7387<\/li>\n<li><strong>\u94a0\u7130\u6cd5<\/strong>\uff1a\u9002\u7528\u4e8e\u4e2d\u56fd\u65e9\u671f\u6807\u51c6\uff0c\u73b0\u9010\u6b65\u88ab\u53d6\u4ee3<\/li>\n<li><strong>\u8ba1\u6570\u6cd5\uff08Particle Counting Method\uff09<\/strong>\uff1a\u91c7\u7528\u51b7\u53d1\u70df\uff08\u5982DEHS\uff09\u914d\u5408\u6fc0\u5149\u7c92\u5b50\u8ba1\u6570\u5668\uff0c\u7cbe\u5ea6\u66f4\u9ad8<\/li>\n<\/ul>\n<p>\u6839\u636eEN 1822\u6807\u51c6\uff0cULPA U17\u7ea7\u8fc7\u6ee4\u5668\u5728MPPS\u4e0b\u7684\u7a7f\u900f\u7387\u4e0d\u5f97\u8d85\u8fc7 <strong>0.0001%<\/strong>\uff08\u5373\u6548\u738799.9999%\uff09\u3002<\/p>\n<h3>5.2 \u5b9e\u9645\u8fd0\u884c\u6570\u636e\u5bf9\u6bd4\uff08\u67d012\u82f1\u5bf8\u6676\u5706\u5382\u6848\u4f8b\uff09<\/h3>\n<p>\u67d0\u56fd\u5185\u5934\u90e8\u534a\u5bfc\u4f53\u4f01\u4e1a\u5bf9\u5176Fab\u8f66\u95f4\u4f7f\u7528\u7684KLC H14\u578b\u73bb\u7ea4\u8fc7\u6ee4\u5668\u8fdb\u884c\u4e86\u4e3a\u671f\u4e24\u5e74\u7684\u8ddf\u8e2a\u76d1\u6d4b\uff0c\u7ed3\u679c\u5982\u4e0b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6307\u6807<\/th>\n<th>\u521d\u59cb\u503c<\/th>\n<th>\u8fd0\u884c6\u4e2a\u6708<\/th>\n<th>\u8fd0\u884c12\u4e2a\u6708<\/th>\n<th>\u8fd0\u884c24\u4e2a\u6708<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u521d\u963b\u529b\uff08Pa\uff09<\/td>\n<td>108<\/td>\n<td>115<\/td>\n<td>128<\/td>\n<td>142<\/td>\n<\/tr>\n<tr>\n<td>PM0.3\u6d53\u5ea6\uff08\u4e2a\/L\uff09\u4e0a\u6e38<\/td>\n<td>85,000<\/td>\n<td>87,200<\/td>\n<td>86,500<\/td>\n<td>88,100<\/td>\n<\/tr>\n<tr>\n<td>PM0.3\u6d53\u5ea6\uff08\u4e2a\/L\uff09\u4e0b\u6e38<\/td>\n<td>4.3<\/td>\n<td>4.6<\/td>\n<td>5.1<\/td>\n<td>6.8<\/td>\n<\/tr>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387\uff08%\uff09<\/td>\n<td>99.995<\/td>\n<td>99.9947<\/td>\n<td>99.9941<\/td>\n<td>99.9923<\/td>\n<\/tr>\n<tr>\n<td>\u5e74\u5747\u80fd\u8017\u589e\u91cf\uff08kWh\/\u53f0\u00b7\u5e74\uff09<\/td>\n<td>&#8211;<\/td>\n<td>+18<\/td>\n<td>+35<\/td>\n<td>+62<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1a\u67d0\u534a\u5bfc\u4f53\u5236\u9020\u6709\u9650\u516c\u53f8\u300a\u6d01\u51c0\u5ba4\u8fd0\u884c\u7ef4\u62a4\u62a5\u544a\u300b\uff0c2023\u5e74\u5185\u90e8\u8d44\u6599<\/p>\n<\/blockquote>\n<p>\u5206\u6790\u8868\u660e\uff0c\u5c3d\u7ba1\u6548\u7387\u7565\u6709\u4e0b\u964d\uff0c\u4f46\u572824\u4e2a\u6708\u5185\u4ecd\u6ee1\u8db3H14\u6807\u51c6\u8981\u6c42\u3002\u963b\u529b\u4e0a\u5347\u4e3b\u8981\u6e90\u4e8e\u7d2f\u79ef\u7070\u5c18\u5835\u585e\u7ea4\u7ef4\u95f4\u9699\uff0c\u5efa\u8bae\u5728\u538b\u5dee\u8fbe\u5230\u521d\u59cb\u503c1.5\u500d\u65f6\u8fdb\u884c\u66f4\u6362\u3002<\/p>\n<hr \/>\n<h2>6. \u5f71\u54cd\u6027\u80fd\u7684\u5173\u952e\u56e0\u7d20\u5206\u6790<\/h2>\n<h3>6.1 \u6e29\u6e7f\u5ea6\u5f71\u54cd<\/h3>\n<p>\u73bb\u7ea4\u6750\u6599\u672c\u8eab\u8010\u9ad8\u6e29\uff08\u53ef\u627f\u53d7\u2264600\u2103\u77ed\u671f\u9ad8\u6e29\u706d\u83cc\uff09\uff0c\u4f46\u957f\u671f\u5904\u4e8e\u9ad8\u6e7f\u73af\u5883\uff08RH &gt; 85%\uff09\u53ef\u80fd\u5bfc\u81f4\u7c98\u7ed3\u5242\u8001\u5316\u3001\u6ee4\u7eb8\u53d8\u5f62\u751a\u81f3\u6ecb\u751f\u5fae\u751f\u7269\u3002\u65e5\u672cNitto Denko\u516c\u53f8\u7814\u7a76\u6307\u51fa\uff0c\u76f8\u5bf9\u6e7f\u5ea6\u6bcf\u5347\u9ad810%\uff0cH14\u6ee4\u7f51\u5bb9\u5c18\u80fd\u529b\u4e0b\u964d\u7ea67%\u3002<\/p>\n<blockquote>\n<p>\u5f15\u7528\u6587\u732e\uff1aNakamura T., et al. &quot;Humidity Effects on Glass Fiber HEPA Filter Performance.&quot; <em>Journal of Aerosol Science<\/em>, 2019, 135: 105\u2013113.<\/p>\n<\/blockquote>\n<h3>6.2 \u5316\u5b66\u517c\u5bb9\u6027<\/h3>\n<p>\u67d0\u4e9b\u5de5\u827a\u6392\u653e\u6c14\u4f53\uff08\u5982NH\u2083\u3001Cl\u2082\u3001HF\uff09\u53ef\u80fd\u8150\u8680\u73bb\u7483\u7ea4\u7ef4\u8868\u9762\u6216\u7834\u574f\u7c98\u5408\u5242\u7ed3\u6784\u3002\u4e3a\u6b64\uff0c\u9ad8\u7aefULPA\u6ee4\u7f51\u5e38\u91c7\u7528<strong>PTFE\u6d82\u5c42\u5904\u7406<\/strong>\u6216<strong>\u590d\u5408\u591a\u5c42\u7ed3\u6784<\/strong>\uff08\u5982\u524d\u7f6e\u6d3b\u6027\u70ad\u5c42+\u73bb\u7ea4\u4e3b\u6ee4\u5c42\uff09\u4ee5\u63d0\u5347\u6297\u5316\u5b66\u4fb5\u8680\u80fd\u529b\u3002<\/p>\n<h3>6.3 \u5b89\u88c5\u4e0e\u5bc6\u5c01\u8d28\u91cf<\/h3>\n<p>\u636e\u7f8e\u56fdIEST\uff08Institute of Environmental Sciences and Technology\uff09\u7edf\u8ba1\uff0c\u8d85\u8fc760%\u7684\u6d01\u51c0\u5ba4\u6cc4\u6f0f\u95ee\u9898\u6e90\u4e8e\u8fc7\u6ee4\u5668\u5b89\u88c5\u4e0d\u5f53\uff0c\u5982\u5bc6\u5c01\u80f6\u4e0d\u5747\u5300\u3001\u6846\u67b6\u53d8\u5f62\u6216\u7d27\u56fa\u87ba\u6813\u677e\u52a8\u3002\u63a8\u8350\u4f7f\u7528<strong>\u6db2\u69fd\u5f0f\u5bc6\u5c01\u7ed3\u6784<\/strong>\uff08Liquid Seal Groove\uff09\u66ff\u4ee3\u4f20\u7edf\u5200\u8fb9\u5bc6\u5c01\uff0c\u53ef\u5c06\u6cc4\u6f0f\u7387\u63a7\u5236\u57280.01%\u4ee5\u4e0b\u3002<\/p>\n<hr \/>\n<h2>7. \u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u4e0e\u6280\u672f\u521b\u65b0\u8d8b\u52bf<\/h2>\n<h3>7.1 \u65b0\u578b\u73bb\u7ea4\u590d\u5408\u6750\u6599<\/h3>\n<p>\u7f8e\u56fd3M\u516c\u53f8\u5f00\u53d1\u51fa<strong>\u7eb3\u7c73\u7ea7\u7194\u55b7\u73bb\u7ea4\u590d\u5408\u819c<\/strong>\uff08Nano-Glass Composite\uff09\uff0c\u5176\u7ea4\u7ef4\u76f4\u5f84\u7f29\u5c0f\u81f3300nm\u4ee5\u4e0b\uff0cMPPS\u6548\u7387\u53ef\u8fbe99.99995%\uff08U17+\uff09\uff0c\u540c\u65f6\u963b\u529b\u964d\u4f4e20%\u3002\u8be5\u6280\u672f\u5df2\u5728Intel Arizona\u6676\u5706\u5382\u8bd5\u70b9\u5e94\u7528\u3002<\/p>\n<h3>7.2 \u667a\u80fd\u5316\u76d1\u6d4b\u7cfb\u7edf<\/h3>\n<p>\u97e9\u56fd\u4e09\u661f\u7535\u5b50\u5728\u5176\u5e73\u6cfdP3\u5de5\u5382\u90e8\u7f72\u4e86\u57fa\u4e8eIoT\u7684\u8fc7\u6ee4\u5668\u5065\u5eb7\u7ba1\u7406\u7cfb\u7edf\uff0c\u6bcf\u4e2aFFU\u914d\u5907PM2.5\u4f20\u611f\u5668\u4e0eAI\u9884\u6d4b\u6a21\u578b\uff0c\u53ef\u6839\u636e\u5b9e\u65f6\u538b\u5dee\u3001\u6e29\u6e7f\u5ea6\u548c\u5386\u53f2\u6570\u636e\u52a8\u6001\u9884\u6d4b\u66f4\u6362\u5468\u671f\uff0c\u5e73\u5747\u5ef6\u957f\u4f7f\u7528\u5bff\u547d15%\u3002<\/p>\n<blockquote>\n<p>\u5f15\u7528\u6587\u732e\uff1aPark J.H., et al. &quot;Predictive Maintenance of HEPA Filters Using Machine Learning in Semiconductor Fabs.&quot; <em>IEEE Transactions on Semiconductor Manufacturing<\/em>, 2022, 35(2): 234\u2013241.<\/p>\n<\/blockquote>\n<h3>7.3 \u56fd\u4ea7\u66ff\u4ee3\u8fdb\u7a0b\u52a0\u901f<\/h3>\n<p>\u5728\u4e2d\u56fd\u201c\u5341\u56db\u4e94\u201d\u89c4\u5212\u63a8\u52a8\u4e0b\uff0c\u4e2d\u6750\u79d1\u6280\u3001\u82cf\u51c0\u96c6\u56e2\u3001\u827e\u79d1\u6d66\u7b49\u4f01\u4e1a\u52a0\u5927\u7814\u53d1\u6295\u5165\u30022023\u5e74\uff0c\u4e2d\u6750\u79d1\u6280\u6210\u529f\u91cf\u4ea7U15\u7ea7\u73bb\u7ea4\u6ee4\u7eb8\uff0c\u6253\u7834\u957f\u671f\u4f9d\u8d56\u8fdb\u53e3\u7684\u5c40\u9762\u3002\u636e\u300a\u4e2d\u56fd\u7535\u5b50\u62a5\u300b\u62a5\u9053\uff0c\u76ee\u524d\u56fd\u5185H13\u7ea7\u4ee5\u4e0a\u8fc7\u6ee4\u5668\u81ea\u7ed9\u7387\u5df2\u75312018\u5e74\u7684\u4e0d\u8db330%\u63d0\u5347\u81f32023\u5e74\u768465%\u4ee5\u4e0a\u3002<\/p>\n<hr \/>\n<h2>8. \u7ecf\u6d4e\u6027\u4e0e\u5168\u751f\u547d\u5468\u671f\u6210\u672c\u5206\u6790<\/h2>\n<p>\u867d\u7136\u9ad8\u7aef\u73bb\u7ea4\u8fc7\u6ee4\u5668\u5355\u4ef7\u8f83\u9ad8\uff08U16\u7ea7\u5355\u53f0FFU\u6ee4\u7f51\u4ef7\u683c\u7ea6\u4eba\u6c11\u5e018,000\u201312,000\u5143\uff09\uff0c\u4f46\u4ece\u5168\u751f\u547d\u5468\u671f\u89c6\u89d2\u770b\uff0c\u5176\u7efc\u5408\u6210\u672c\u66f4\u5177\u4f18\u52bf\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6210\u672c\u9879\u76ee<\/th>\n<th>H13\u6ee4\u7f51\uff08\u56fd\u4ea7\uff09<\/th>\n<th>U16\u6ee4\u7f51\uff08\u8fdb\u53e3\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u8d2d\u7f6e\u6210\u672c\uff08\u5143\/\u53f0\uff09<\/td>\n<td>3,500<\/td>\n<td>10,000<\/td>\n<\/tr>\n<tr>\n<td>\u66f4\u6362\u9891\u7387\uff08\u5e74\uff09<\/td>\n<td>4<\/td>\n<td>7<\/td>\n<\/tr>\n<tr>\n<td>\u5e74\u5747\u8d2d\u7f6e\u6210\u672c<\/td>\n<td>875<\/td>\n<td>1,429<\/td>\n<\/tr>\n<tr>\n<td>\u5e74\u5747\u80fd\u8017\u6210\u672c<\/td>\n<td>420<\/td>\n<td>380<\/td>\n<\/tr>\n<tr>\n<td>\u7ef4\u62a4\u4eba\u5de5\u6210\u672c<\/td>\n<td>200<\/td>\n<td>150<\/td>\n<\/tr>\n<tr>\n<td><strong>\u5e74\u5747\u603b\u6210\u672c<\/strong><\/td>\n<td><strong>1,495<\/strong><\/td>\n<td><strong>1,959<\/strong><\/td>\n<\/tr>\n<tr>\n<td>\u56e0\u6c61\u67d3\u5bfc\u81f4\u7684\u826f\u7387\u635f\u5931\uff08\u4f30\u7b97\uff09<\/td>\n<td>2.1%<\/td>\n<td>0.8%<\/td>\n<\/tr>\n<tr>\n<td>\u5bf9\u5e94\u5e74\u4ea7\u503c\u635f\u5931\uff08\u630910\u4ebf\u5143\u4ea7\u80fd\u8ba1\uff09<\/td>\n<td>2,100\u4e07\u5143<\/td>\n<td>800\u4e07\u5143<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6ce8\uff1a\u5047\u8bbe\u6bcf\u5343\u7ea7\u6d01\u51c0\u5ba4\u9700\u914d\u7f6e500\u53f0FFU\uff0c\u5e74\u8fd0\u884c8,000\u5c0f\u65f6\uff0c\u7535\u4ef71\u5143\/kWh<\/p>\n<\/blockquote>\n<p>\u7531\u6b64\u53ef\u89c1\uff0c\u5c3d\u7ba1U16\u6ee4\u7f51\u524d\u671f\u6295\u5165\u5927\uff0c\u4f46\u7531\u4e8e\u66f4\u9ad8\u7684\u8fc7\u6ee4\u6548\u7387\u663e\u8457\u964d\u4f4e\u4e86\u9897\u7c92\u6c61\u67d3\u98ce\u9669\uff0c\u4ece\u800c\u5927\u5e45\u51cf\u5c11\u826f\u7387\u635f\u5931\uff0c\u6574\u4f53\u7ecf\u6d4e\u6548\u76ca\u66f4\u4e3a\u53ef\u89c2\u3002<\/p>\n<hr \/>\n<h2>9. \u5e94\u7528\u6311\u6218\u4e0e\u672a\u6765\u5c55\u671b<\/h2>\n<p>\u5c3d\u7ba1\u73bb\u7ea4\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u5df2\u5e7f\u6cdb\u5e94\u7528\uff0c\u4f46\u4ecd\u9762\u4e34\u8bf8\u591a\u6311\u6218\uff1a<\/p>\n<ul>\n<li><strong>\u8d85\u7ec6\u9897\u7c92\u63a7\u5236\u74f6\u9888<\/strong>\uff1a\u968f\u7740GAAFET\uff08Gate-All-Around FET\uff09\u5de5\u827a\u8fdb\u51652nm\u65f6\u4ee3\uff0c\u9700\u8fdb\u4e00\u6b65\u6291\u52360.01\u03bcm\u7ea7\u8d85\u7ec6\u9897\u7c92\uff1b<\/li>\n<li><strong>AMC\u534f\u540c\u6cbb\u7406\u96be\u9898<\/strong>\uff1a\u4f20\u7edf\u73bb\u7ea4\u6ee4\u7f51\u65e0\u6cd5\u53bb\u9664\u5206\u5b50\u7ea7\u6c61\u67d3\u7269\uff0c\u9700\u4e0e\u5316\u5b66\u8fc7\u6ee4\u5668\u534f\u540c\u5de5\u4f5c\uff1b<\/li>\n<li><strong>\u53ef\u6301\u7eed\u53d1\u5c55\u538b\u529b<\/strong>\uff1a\u5e9f\u5f03\u6ee4\u7f51\u5c5e\u5371\u9669\u5e9f\u5f03\u7269\uff08\u542b\u73bb\u7483\u7ea4\u7ef4\u4e0e\u6709\u5bb3\u5438\u9644\u7269\uff09\uff0c\u56de\u6536\u5904\u7406\u6210\u672c\u9ad8\u3002<\/li>\n<\/ul>\n<p>\u672a\u6765\u53d1\u5c55\u65b9\u5411\u5305\u62ec\uff1a<\/p>\n<ul>\n<li>\u5f00\u53d1\u517c\u5177\u9897\u7c92\u4e0eAMC\u53bb\u9664\u529f\u80fd\u7684\u591a\u529f\u80fd\u590d\u5408\u6ee4\u6750\uff1b<\/li>\n<li>\u63a8\u5e7f\u53ef\u6e05\u6d17\u518d\u751f\u578bHEPA\u6280\u672f\uff08\u5982\u9759\u7535\u589e\u5f3a\u578b\uff09\uff1b<\/li>\n<li>\u6784\u5efa\u6570\u5b57\u5b6a\u751f\u5e73\u53f0\u5b9e\u73b0\u8fc7\u6ee4\u7cfb\u7edf\u667a\u80fd\u8fd0\u7ef4\u3002<\/li>\n<\/ul>\n<blockquote>\n<p>\u5f15\u7528\u6587\u732e\uff1aZhang Y., et al. &quot;Next-Generation Air Filtration Technologies for Advanced Semiconductor Manufacturing.&quot; <em>Nature Electronics<\/em>, 2023, 6(4): 267\u2013275.<\/p>\n<\/blockquote>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>ISO 14644-1:2015. <em>Cleanrooms and associated controlled environments \u2014 Part 1: Classification of air cleanliness by particle concentration<\/em>. Geneva: International Organization for Standardization.<\/li>\n<li>ASHRAE. <em>ASHRAE Handbook\u2014HVAC Systems and Equipment<\/em>. Atlanta: American Society of Heating, Refrigerating and Air-Conditioning Engineers, 2020.<\/li>\n<li>European Committee for Standardization. EN 1822-1:2019. <em>High efficiency air filters (HEPA and ULPA)<\/em>.<\/li>\n<li>GB\/T 13554-2020. \u300a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b. \u5317\u4eac: \u4e2d\u56fd\u6807\u51c6\u51fa\u7248\u793e, 2020.<\/li>\n<li>\u674e\u5148\u5ead, \u5f20\u5bc5\u5e73, \u6c5f\u4ebf. \u201c\u5927\u578b\u6d01\u51c0\u5ba4\u6c14\u6d41\u7ec4\u7ec7\u4f18\u5316\u8bbe\u8ba1\u4e0e\u4eff\u771f\u5206\u6790\u201d. \u300a\u6696\u901a\u7a7a\u8c03\u300b, 2021, 51(3): 1\u20137.<\/li>\n<li>Nakamura T., et al. &quot;Humidity Effects on Glass Fiber HEPA Filter Performance.&quot; <em>Journal of Aerosol Science<\/em>, 2019, 135: 105\u2013113.<\/li>\n<li>Park J.H., et al. &quot;Predictive Maintenance of HEPA Filters Using Machine Learning in Semiconductor Fabs.&quot; <em>IEEE Transactions on Semiconductor Manufacturing<\/em>, 2022, 35(2): 234\u2013241.<\/li>\n<li>Zhang Y., et al. &quot;Next-Generation Air Filtration Technologies for Advanced Semiconductor Manufacturing.&quot; <em>Nature Electronics<\/em>, 2023, 6(4): 267\u2013275.<\/li>\n<li>Camfil Group. <em>Technical Data Sheet: Hi-Flo ES Series<\/em>. 2023.<\/li>\n<li>Donaldson Company. <em>Ultra-Web Z Product Brochure<\/em>. 2022.<\/li>\n<li>\u67d0\u534a\u5bfc\u4f53\u5236\u9020\u6709\u9650\u516c\u53f8. \u300a\u6d01\u51c0\u5ba4\u8fd0\u884c\u7ef4\u62a4\u62a5\u544a\u300b. \u5185\u90e8\u8d44\u6599, 2023.<\/li>\n<\/ol>\n<p>\uff08\u5168\u6587\u7ea63,800\u5b57\uff09<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u73bb\u7ea4\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u4e0e\u6027\u80fd\u5206\u6790 \u6982\u8ff0 \u968f\u7740\u5168\u7403\u4fe1\u606f\u6280\u672f\u548c\u9ad8\u7aef\u5236\u9020\u4e1a\u7684\u8fc5\u731b\u53d1\u5c55\uff0c\u534a\u5bfc\u4f53\u4ea7\u4e1a\u4f5c\u4e3a\u73b0\u4ee3\u79d1\u6280\u7684\u6838\u5fc3\u652f\u6491\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u5176\u4e2d\uff0c\u6d01\u51c0\u5ba4\uff08Cleanroom\uff09\u662f\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u4e2d\u4e0d\u53ef\u6216\u7f3a\u7684\u5173\u952e\u73af\u8282\uff0c\u5176\u7a7a\u6c14\u8d28\u91cf\u76f4\u63a5\u51b3\u5b9a\u4e86\u82af\u7247\u826f\u7387\u3001\u4ea7\u54c1\u53ef\u9760\u6027\u4ee5\u53ca\u5de5\u827a\u7a33\u5b9a\u6027\u3002\u5728\u4f17\u591a\u7a7a\u6c14\u51c0\u5316\u6280\u672f\u4e2d\uff0c\u73bb\u7ea4\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08Glass Fiber High&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-16919","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16919","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=16919"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16919\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=16919"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=16919"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=16919"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}