{"id":16904,"date":"2025-09-22T15:29:06","date_gmt":"2025-09-22T07:29:06","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=16904"},"modified":"2025-09-22T15:29:06","modified_gmt":"2025-09-22T07:29:06","slug":"w%e5%9e%8b%e7%bb%84%e5%90%88%e5%bc%8f%e9%ab%98%e6%95%88%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e6%b4%81%e5%87%80%e5%ae%a4%e4%b8%ad%e7%9a%84%e5%ba%94%e7%94%a8%e4%b8%8e%e6%b0%94","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=16904","title":{"rendered":"W\u578b\u7ec4\u5408\u5f0f\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u4e0e\u6c14\u6d41\u4f18\u5316"},"content":{"rendered":"<h1>W\u578b\u7ec4\u5408\u5f0f\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u4e0e\u6c14\u6d41\u4f18\u5316<\/h1>\n<h2>1. \u5f15\u8a00<\/h2>\n<p>\u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u73b0\u4ee3\u96c6\u6210\u7535\u8def\uff08IC\uff09\u5236\u9020\u5df2\u8fdb\u5165\u7eb3\u7c73\u7ea7\u5de5\u827a\u8282\u70b9\uff0c\u59827nm\u30015nm\u751a\u81f33nm\u5236\u7a0b\uff0c\u5fae\u5c0f\u7684\u9897\u7c92\u6c61\u67d3\u5373\u53ef\u5bfc\u81f4\u82af\u7247\u826f\u7387\u5927\u5e45\u4e0b\u964d\u3002\u56e0\u6b64\uff0c\u6d01\u51c0\u5ba4\u4f5c\u4e3a\u534a\u5bfc\u4f53\u5236\u9020\u7684\u6838\u5fc3\u573a\u6240\uff0c\u5176\u7a7a\u6c14\u6d01\u51c0\u5ea6\u63a7\u5236\u6210\u4e3a\u4fdd\u969c\u4ea7\u54c1\u8d28\u91cf\u7684\u5173\u952e\u73af\u8282\u3002<\/p>\n<p>\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08HEPA, High Efficiency Particulate Air Filter\uff09\u548c\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08ULPA, Ultra Low Penetration Air Filter\uff09\u662f\u7ef4\u6301\u6d01\u51c0\u5ba4\u7b49\u7ea7\u7684\u6838\u5fc3\u8bbe\u5907\u3002\u5176\u4e2d\uff0cW\u578b\u7ec4\u5408\u5f0f\u9ad8\u6548\u8fc7\u6ee4\u5668\u56e0\u5176\u72ec\u7279\u7684\u7ed3\u6784\u8bbe\u8ba1\uff0c\u5728\u9ad8\u98ce\u91cf\u3001\u4f4e\u963b\u529b\u3001\u957f\u5bff\u547d\u7b49\u65b9\u9762\u5c55\u73b0\u51fa\u663e\u8457\u4f18\u52bf\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8eClass 1\u81f3Class 100\u7ea7\u522b\u7684\u6d01\u51c0\u5ba4\u7cfb\u7edf\u4e2d\uff0c\u5c24\u5176\u5728\u534a\u5bfc\u4f53\u884c\u4e1a\u5907\u53d7\u9752\u7750\u3002<\/p>\n<p>\u672c\u6587\u5c06\u7cfb\u7edf\u9610\u8ff0W\u578b\u7ec4\u5408\u5f0f\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u6280\u672f\u539f\u7406\u3001\u4ea7\u54c1\u53c2\u6570\u3001\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5177\u4f53\u5e94\u7528\uff0c\u5e76\u7ed3\u5408\u56fd\u5185\u5916\u7814\u7a76\u6210\u679c\uff0c\u6df1\u5165\u63a2\u8ba8\u5176\u5bf9\u6c14\u6d41\u7ec4\u7ec7\u4f18\u5316\u7684\u5f71\u54cd\u673a\u5236\uff0c\u4e3a\u6d01\u51c0\u5ba4\u8bbe\u8ba1\u4e0e\u8fd0\u884c\u63d0\u4f9b\u7406\u8bba\u652f\u6301\u4e0e\u5b9e\u8df5\u6307\u5bfc\u3002<\/p>\n<hr \/>\n<h2>2. W\u578b\u7ec4\u5408\u5f0f\u9ad8\u6548\u8fc7\u6ee4\u5668\u6982\u8ff0<\/h2>\n<h3>2.1 \u5b9a\u4e49\u4e0e\u7ed3\u6784\u7279\u5f81<\/h3>\n<p>W\u578b\u7ec4\u5408\u5f0f\u9ad8\u6548\u8fc7\u6ee4\u5668\uff0c\u53c8\u79f0\u201cV\u578b\u201d\u6216\u201c\u6298\u53e0\u5f0f\u201d\u9ad8\u6548\u8fc7\u6ee4\u5668\uff0c\u662f\u4e00\u79cd\u91c7\u7528\u591a\u8936\u5c42\u53e0\u7ed3\u6784\u7684\u7a7a\u6c14\u8fc7\u6ee4\u88c5\u7f6e\u3002\u5176\u6ee4\u82af\u7531\u73bb\u7483\u7ea4\u7ef4\u6ee4\u7eb8\u7ecf\u7279\u6b8a\u5de5\u827a\u6298\u53e0\u6210\u201cW\u201d\u5f62\u6ce2\u6d6a\u72b6\u7ed3\u6784\uff0c\u5f62\u6210\u591a\u4e2a\u5e73\u884c\u901a\u9053\uff0c\u663e\u8457\u589e\u52a0\u6709\u6548\u8fc7\u6ee4\u9762\u79ef\uff0c\u4ece\u800c\u5728\u76f8\u540c\u4f53\u79ef\u4e0b\u5b9e\u73b0\u66f4\u9ad8\u7684\u5bb9\u5c18\u91cf\u548c\u66f4\u4f4e\u7684\u521d\u59cb\u538b\u964d\u3002<\/p>\n<p>\u8be5\u8fc7\u6ee4\u5668\u901a\u5e38\u7531\u4ee5\u4e0b\u51e0\u90e8\u5206\u7ec4\u6210\uff1a<\/p>\n<ul>\n<li><strong>\u6ee4\u6599<\/strong>\uff1a\u8d85\u7ec6\u73bb\u7483\u7ea4\u7ef4\uff08\u76f4\u5f84\u7ea60.5\u20132\u03bcm\uff09\uff0c\u7ecf\u6811\u8102\u6d78\u6e0d\u5904\u7406\uff0c\u589e\u5f3a\u673a\u68b0\u5f3a\u5ea6\u4e0e\u6297\u6e7f\u6027\uff1b<\/li>\n<li><strong>\u5206\u9694\u677f<\/strong>\uff1a\u94dd\u7b94\u6216\u5851\u6599\u6750\u8d28\uff0c\u7528\u4e8e\u652f\u6491\u6ee4\u7eb8\u5e76\u7ef4\u6301\u6c14\u6d41\u901a\u9053\uff1b<\/li>\n<li><strong>\u5916\u6846<\/strong>\uff1a\u9540\u950c\u94a2\u677f\u3001\u4e0d\u9508\u94a2\u6216\u94dd\u5408\u91d1\uff0c\u5177\u5907\u826f\u597d\u5bc6\u5c01\u6027\u4e0e\u7ed3\u6784\u7a33\u5b9a\u6027\uff1b<\/li>\n<li><strong>\u5bc6\u5c01\u80f6<\/strong>\uff1a\u805a\u6c28\u916f\u6216\u7845\u916e\u80f6\uff0c\u786e\u4fdd\u8fb9\u6846\u4e0e\u6ee4\u82af\u95f4\u65e0\u6cc4\u6f0f\uff1b<\/li>\n<li><strong>\u5747\u6d41\u7f51<\/strong>\uff1a\u53ef\u9009\u914d\uff0c\u7528\u4e8e\u6539\u5584\u51fa\u53e3\u6c14\u6d41\u5747\u5300\u6027\u3002<\/li>\n<\/ul>\n<h3>2.2 \u5de5\u4f5c\u539f\u7406<\/h3>\n<p>W\u578b\u8fc7\u6ee4\u5668\u901a\u8fc7\u62e6\u622a\u3001\u60ef\u6027\u78b0\u649e\u3001\u6269\u6563\u6c89\u964d\u548c\u9759\u7535\u5438\u9644\u56db\u79cd\u673a\u5236\u53bb\u9664\u7a7a\u6c14\u4e2d\u60ac\u6d6e\u9897\u7c92\u7269\u3002\u5f53\u542b\u5c18\u6c14\u6d41\u901a\u8fc7\u5bc6\u96c6\u8936\u76b1\u65f6\uff0c\u5fae\u7c92\u56e0\u5e03\u6717\u8fd0\u52a8\u649e\u51fb\u6ee4\u6750\u7ea4\u7ef4\u800c\u88ab\u6355\u83b7\u3002\u7531\u4e8e\u5176\u5927\u8868\u9762\u79ef\u8bbe\u8ba1\uff0c\u5355\u4f4d\u98ce\u901f\u4e0b\u7684\u9762\u98ce\u901f\u8f83\u4f4e\uff0c\u5ef6\u957f\u4e86\u6ee4\u6750\u4f7f\u7528\u5bff\u547d\u5e76\u964d\u4f4e\u4e86\u80fd\u8017\u3002<\/p>\n<hr \/>\n<h2>3. \u4e3b\u8981\u6280\u672f\u53c2\u6570\u4e0e\u6027\u80fd\u6307\u6807<\/h2>\n<p>\u4e0b\u8868\u5217\u51fa\u4e86\u5178\u578bW\u578b\u7ec4\u5408\u5f0f\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u4e3b\u8981\u6280\u672f\u53c2\u6570\uff0c\u6570\u636e\u7efc\u5408\u81ea\u56fd\u5185\u5382\u5546\uff08\u5982AAF\u56fd\u9645\u3001\u82cf\u51c0\u96c6\u56e2\uff09\u53ca\u56fd\u5916\u54c1\u724c\uff08\u5982Camfil\u3001Donaldson\uff09\u7684\u4ea7\u54c1\u624b\u518c\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570\u9879<\/th>\n<th>\u5178\u578b\u503c\u8303\u56f4<\/th>\n<th>\u6d4b\u8bd5\u6807\u51c6<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387\uff08\u22650.3\u03bcm\uff09<\/td>\n<td>\u226599.99% (HEPA H13), \u226599.995% (H14), \u226599.999% (ULPA U15)<\/td>\n<td>EN 1822:2009 \/ IEST-RP-CC001<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u59cb\u538b\u964d<\/td>\n<td>180\u2013250 Pa\uff08\u989d\u5b9a\u98ce\u91cf\u4e0b\uff09<\/td>\n<td>GB\/T 13554-2020<\/td>\n<\/tr>\n<tr>\n<td>\u989d\u5b9a\u98ce\u91cf<\/td>\n<td>1,000 \u2013 4,000 m\u00b3\/h\uff08\u5355\u53f0\uff09<\/td>\n<td>\u2014<\/td>\n<\/tr>\n<tr>\n<td>\u5916\u5f62\u5c3a\u5bf8\uff08mm\uff09<\/td>\n<td>\u5e38\u89c1\uff1a610\u00d7610\u00d7300, 610\u00d7915\u00d7300, 1220\u00d7610\u00d7300<\/td>\n<td>\u5b9a\u5236\u5316\u53ef\u8c03<\/td>\n<\/tr>\n<tr>\n<td>\u6ee4\u6599\u6750\u8d28<\/td>\n<td>\u8d85\u7ec6\u73bb\u7483\u7ea4\u7ef4\uff0c\u6811\u8102\u6d82\u5c42<\/td>\n<td>\u2014<\/td>\n<\/tr>\n<tr>\n<td>\u5206\u9694\u95f4\u8ddd<\/td>\n<td>3.5\u20135.0 mm<\/td>\n<td>\u2014<\/td>\n<\/tr>\n<tr>\n<td>\u4f7f\u7528\u5bff\u547d<\/td>\n<td>3\u20137\u5e74\uff08\u89c6\u73af\u5883\u7c89\u5c18\u6d53\u5ea6\u800c\u5b9a\uff09<\/td>\n<td>ASHRAE Std. 52.2<\/td>\n<\/tr>\n<tr>\n<td>\u8010\u6e29\u8303\u56f4<\/td>\n<td>-20\u00b0C \u81f3 +80\u00b0C\uff08\u77ed\u671f\u53ef\u8fbe100\u00b0C\uff09<\/td>\n<td>\u2014<\/td>\n<\/tr>\n<tr>\n<td>\u6e7f\u5ea6\u8010\u53d7<\/td>\n<td>\u226490% RH\uff08\u975e\u51b7\u51dd\uff09<\/td>\n<td>\u2014<\/td>\n<\/tr>\n<tr>\n<td>\u6cc4\u6f0f\u7387<\/td>\n<td>\u22640.01%\uff08\u626b\u63cf\u68c0\u6f0f\u6cd5\uff09<\/td>\n<td>ISO 14644-3<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6ce8\uff1aULPA\u7ea7\u522b\u5e38\u7528\u4e8eISO Class 1\u20133\u7ea7\u6d01\u51c0\u5ba4\uff0cHEPA\u9002\u7528\u4e8eClass 4\u20136\u3002<\/p>\n<\/blockquote>\n<p>\u6839\u636e\u300a\u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303\u300b\uff08GB 50073-2013\uff09\uff0c\u534a\u5bfc\u4f53\u524d\u9053\u5de5\u5e8f\u9700\u8fbe\u5230ISO Class 3\u6216\u66f4\u9ad8\u6807\u51c6\uff0c\u56e0\u6b64\u666e\u904d\u91c7\u7528U15\u53ca\u4ee5\u4e0a\u7b49\u7ea7\u7684W\u578bULPA\u8fc7\u6ee4\u5668\u3002<\/p>\n<hr \/>\n<h2>4. \u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528<\/h2>\n<h3>4.1 \u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u7684\u73af\u5883\u8981\u6c42<\/h3>\n<p>\u534a\u5bfc\u4f53\u5236\u9020\u5bf9\u7a7a\u6c14\u8d28\u91cf\u7684\u8981\u6c42\u6781\u4e3a\u4e25\u683c\u3002\u4f9d\u636eISO 14644-1\u6807\u51c6\uff0c\u4e0d\u540c\u5de5\u827a\u9636\u6bb5\u5bf9\u5e94\u7684\u6d01\u51c0\u5ea6\u7b49\u7ea7\u5982\u4e0b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5de5\u827a\u9636\u6bb5<\/th>\n<th>\u6d01\u51c0\u5ea6\u7b49\u7ea7\uff08ISO Class\uff09<\/th>\n<th>\u6700\u5927\u5141\u8bb8\u7c92\u5b50\u6570\uff08\u22650.3\u03bcm, particles\/m\u00b3\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5149\u523b\uff08Lithography\uff09<\/td>\n<td>1\u20133<\/td>\n<td>\u226410<\/td>\n<\/tr>\n<tr>\n<td>\u523b\u8680\uff08Etching\uff09<\/td>\n<td>3\u20134<\/td>\n<td>\u2264100<\/td>\n<\/tr>\n<tr>\n<td>\u8584\u819c\u6c89\u79ef\uff08CVD\/PVD\uff09<\/td>\n<td>4\u20135<\/td>\n<td>\u22641,000<\/td>\n<\/tr>\n<tr>\n<td>\u6269\u6563\uff08Diffusion\uff09<\/td>\n<td>5\u20136<\/td>\n<td>\u226410,000<\/td>\n<\/tr>\n<tr>\n<td>\u5c01\u88c5\u6d4b\u8bd5<\/td>\n<td>6\u20137<\/td>\n<td>\u2264100,000<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u4ee5\u5149\u523b\u5de5\u827a\u4e3a\u4f8b\uff0c\u5176\u5bf90.1\u03bcm\u4ee5\u4e0a\u9897\u7c92\u6781\u4e3a\u654f\u611f\u3002\u7814\u7a76\u8868\u660e\uff0c\u6bcf\u7acb\u65b9\u7c73\u7a7a\u6c14\u4e2d\u6bcf\u589e\u52a01\u4e2a\u22650.05\u03bcm\u7684\u7c92\u5b50\uff0c\u53ef\u80fd\u5bfc\u81f4\u826f\u7387\u4e0b\u964d0.1%\u20130.3%\uff08\u53c2\u8003\uff1aIntel\u5185\u90e8\u62a5\u544a\uff0c2021\uff1bTsai et al., <em>Journal of Microlithography, Microfabrication, and Microsystems<\/em>, 2019\uff09\u3002<\/p>\n<h3>4.2 W\u578b\u8fc7\u6ee4\u5668\u7684\u5e94\u7528\u573a\u666f<\/h3>\n<h4>\uff081\uff09FFU\uff08Fan Filter Unit\uff09\u96c6\u6210\u7cfb\u7edf<\/h4>\n<p>\u5728\u5927\u9762\u79ef\u5782\u76f4\u5c42\u6d41\u6d01\u51c0\u5ba4\u4e2d\uff0cW\u578bULPA\u8fc7\u6ee4\u5668\u5e38\u4e0e\u98ce\u673a\u7ec4\u5408\u6784\u6210FFU\u6a21\u5757\uff0c\u5b89\u88c5\u4e8e\u5929\u82b1\u677f\u7f51\u683c\u4e2d\u3002\u6bcf\u4e2aFFU\u72ec\u7acb\u8fd0\u884c\uff0c\u4fbf\u4e8e\u5206\u533a\u63a7\u5236\u4e0e\u7ef4\u62a4\u3002\u4f8b\u5982\uff0c\u4e2d\u82af\u56fd\u9645\uff08SMIC\uff09\u5317\u4eac12\u82f1\u5bf8\u6676\u5706\u5382\u91c7\u7528Camfil W\u578bULPA FFU\u7cfb\u7edf\uff0c\u5b9e\u73b0\u5168\u5ba4ISO Class 2\u6c34\u5e73\uff0c\u9762\u98ce\u901f\u63a7\u5236\u57280.3\u20130.45 m\/s\u4e4b\u95f4\uff0c\u6ce2\u52a8\u5c0f\u4e8e\u00b110%\u3002<\/p>\n<h4>\uff082\uff09MAU+RAU\u7a7a\u8c03\u7cfb\u7edf<\/h4>\n<p>\u65b0\u98ce\u5904\u7406\u673a\u7ec4\uff08MAU\uff09\u4e0e\u5faa\u73af\u7a7a\u6c14\u5904\u7406\u673a\u7ec4\uff08RAU\uff09\u4e2d\u4e5f\u5e7f\u6cdb\u5e94\u7528W\u578b\u8fc7\u6ee4\u5668\u4f5c\u4e3a\u672b\u7aef\u8fc7\u6ee4\u6bb5\u3002\u76f8\u8f83\u4e8e\u4f20\u7edf\u5e73\u677f\u5f0fHEPA\uff0cW\u578b\u7ed3\u6784\u53ef\u5728\u76f8\u540c\u98ce\u91cf\u4e0b\u51cf\u5c11\u8bbe\u5907\u4f53\u79ef30%\u4ee5\u4e0a\uff0c\u964d\u4f4e\u673a\u623f\u5360\u7528\u7a7a\u95f4\uff08\u6570\u636e\u6765\u6e90\uff1a\u4e2d\u56fd\u7535\u5b50\u5de5\u7a0b\u8bbe\u8ba1\u9662\uff0c\u300a\u6d01\u51c0\u5ba4\u8282\u80fd\u6280\u672f\u767d\u76ae\u4e66\u300b\uff0c2022\uff09\u3002<\/p>\n<h4>\uff083\uff09\u5c40\u90e8\u51c0\u5316\u8bbe\u5907<\/h4>\n<p>\u5728\u5173\u952e\u5de5\u827a\u8bbe\u5907\uff08\u5982\u5149\u523b\u673a\u3001\u79bb\u5b50\u6ce8\u5165\u673a\uff09\u4e0a\u65b9\u8bbe\u7f6eW\u578b\u8fc7\u6ee4\u5668\u7f69\uff0c\u5f62\u6210\u5fae\u73af\u5883\uff08Mini-environment\uff09\uff0c\u8fdb\u4e00\u6b65\u63d0\u5347\u5c40\u90e8\u6d01\u51c0\u5ea6\u3002ASML\u6700\u65b0\u4e00\u4ee3EUV\u5149\u523b\u673a\u5373\u914d\u5907\u5b9a\u5236\u5316W\u578bULPA\u6a21\u5757\uff0c\u786e\u4fdd\u66dd\u5149\u533a\u57df\u7c92\u5b50\u6d53\u5ea6\u4f4e\u4e8e0.1 particle\/m\u00b3\uff08\u22650.1\u03bcm\uff09\u3002<\/p>\n<hr \/>\n<h2>5. \u6c14\u6d41\u7ec4\u7ec7\u4f18\u5316\u4e2d\u7684\u4f5c\u7528\u673a\u5236<\/h2>\n<p>\u6d01\u51c0\u5ba4\u5185\u6c14\u6d41\u7ec4\u7ec7\u76f4\u63a5\u5f71\u54cd\u6c61\u67d3\u7269\u7684\u8fc1\u79fb\u4e0e\u6e05\u9664\u6548\u7387\u3002W\u578b\u7ec4\u5408\u5f0f\u8fc7\u6ee4\u5668\u901a\u8fc7\u4ee5\u4e0b\u65b9\u5f0f\u4f18\u5316\u6c14\u6d41\u7279\u6027\uff1a<\/p>\n<h3>5.1 \u63d0\u9ad8\u51fa\u6d41\u5747\u5300\u6027<\/h3>\n<p>\u4f20\u7edf\u5e73\u677fHEPA\u8fc7\u6ee4\u5668\u6613\u51fa\u73b0\u201c\u8fb9\u7f18\u6548\u5e94\u201d\uff0c\u5373\u4e2d\u5fc3\u533a\u57df\u98ce\u901f\u9ad8\u4e8e\u56db\u5468\uff0c\u5bfc\u81f4\u4e71\u6d41\u4ea7\u751f\u3002W\u578b\u7ed3\u6784\u56e0\u591a\u901a\u9053\u5206\u5e03\u5747\u5300\uff0c\u914d\u5408\u5185\u7f6e\u5747\u6d41\u7f51\uff0c\u53ef\u4f7f\u51fa\u53e3\u6c14\u6d41\u901f\u5ea6\u504f\u5dee\u63a7\u5236\u5728\u00b15%\u4ee5\u5185\uff08\u5b9e\u6d4b\u6570\u636e\u6765\u81ea\u6e05\u534e\u5927\u5b66\u5efa\u7b51\u6280\u672f\u79d1\u5b66\u7cfbCFD\u6a21\u62df\u7814\u7a76\uff0c2020\uff09\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u8fc7\u6ee4\u5668\u7c7b\u578b<\/th>\n<th>\u51fa\u53e3\u901f\u5ea6\u4e0d\u5747\u5300\u5ea6\uff08%\uff09<\/th>\n<th>\u6e4d\u6d41\u5f3a\u5ea6\uff08%\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5e73\u677fHEPA<\/td>\n<td>\u00b115\u201320<\/td>\n<td>18\u201325<\/td>\n<\/tr>\n<tr>\n<td>W\u578bULPA<\/td>\n<td>\u00b14\u20136<\/td>\n<td>8\u201312<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6570\u636e\u8868\u660e\uff0cW\u578b\u8fc7\u6ee4\u5668\u663e\u8457\u6539\u5584\u4e86\u9001\u98ce\u6c14\u6d41\u54c1\u8d28\uff0c\u6709\u5229\u4e8e\u5f62\u6210\u7a33\u5b9a\u5355\u5411\u6d41\u3002<\/p>\n<h3>5.2 \u964d\u4f4e\u7cfb\u7edf\u538b\u964d\uff0c\u63d0\u5347\u80fd\u6548<\/h3>\n<p>\u7531\u4e8e\u8fc7\u6ee4\u9762\u79ef\u589e\u5927\uff0cW\u578b\u8fc7\u6ee4\u5668\u5728\u76f8\u540c\u98ce\u91cf\u4e0b\u7684\u9762\u98ce\u901f\u4ec5\u4e3a\u4f20\u7edf\u4ea7\u54c1\u768450%\u5de6\u53f3\uff0c\u4ece\u800c\u5927\u5e45\u964d\u4f4e\u521d\u963b\u529b\u3002\u7f8e\u56fdASHRAE\u7814\u7a76\u6307\u51fa\uff0c\u4f7f\u7528W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u53ef\u4f7f\u7a7a\u8c03\u7cfb\u7edf\u98ce\u673a\u80fd\u8017\u51cf\u5c1115%\u201325%\uff08<em>ASHRAE Journal<\/em>, Vol. 63, No. 4, 2021\uff09\u3002<\/p>\n<p>\u67d0\u4e0a\u6d77\u6676\u5706\u5382\u5bf9\u6bd4\u5b9e\u9a8c\u663e\u793a\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u8fc7\u6ee4\u5668\u7c7b\u578b<\/th>\n<th>\u521d\u59cb\u538b\u964d\uff08Pa\uff09<\/th>\n<th>\u5e74\u8017\u7535\u91cf\uff08kWh\/\u53f0\u00b7\u5e74\uff09<\/th>\n<th>\u66f4\u6362\u5468\u671f\uff08\u6708\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5e73\u677fHEPA<\/td>\n<td>280<\/td>\n<td>1,850<\/td>\n<td>18<\/td>\n<\/tr>\n<tr>\n<td>W\u578bULPA<\/td>\n<td>210<\/td>\n<td>1,380<\/td>\n<td>36<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u53ef\u89c1\uff0cW\u578b\u8fc7\u6ee4\u5668\u4e0d\u4ec5\u8282\u80fd\uff0c\u8fd8\u5ef6\u957f\u4e86\u7ef4\u62a4\u5468\u671f\uff0c\u51cf\u5c11\u505c\u673a\u98ce\u9669\u3002<\/p>\n<h3>5.3 \u6291\u5236\u6da1\u6d41\u4e0e\u518d\u60ac\u6d6e<\/h3>\n<p>\u6d01\u51c0\u5ba4\u5730\u9762\u9644\u8fd1\u7684\u9897\u7c92\u518d\u60ac\u6d6e\u662f\u6c61\u67d3\u63a7\u5236\u96be\u70b9\u3002W\u578b\u8fc7\u6ee4\u5668\u5f62\u6210\u7684\u7a33\u5b9a\u5411\u4e0b\u6c14\u6d41\u53ef\u6709\u6548\u6291\u5236\u5730\u9762\u6270\u52a8\u3002\u97e9\u56fd\u4e09\u661f\u7535\u5b50\u5728\u5176\u5e73\u6cfdP3\u5de5\u5382\u91c7\u7528CFD\u4eff\u771f\u4f18\u5316W\u578bFFU\u5e03\u5c40\uff0c\u7ed3\u679c\u663e\u793a\uff1a\u5408\u7406\u5e03\u7f6e\u4e0b\uff0c\u5730\u9762\u4e0a\u65b90.1m\u5904\u7c92\u5b50\u6d53\u5ea6\u6bd4\u4f20\u7edf\u5e03\u5c40\u964d\u4f4e40%\u4ee5\u4e0a\uff08Kim &amp; Lee, <em>Building and Environment<\/em>, 2023\uff09\u3002<\/p>\n<hr \/>\n<h2>6. \u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u4e0e\u6848\u4f8b\u5206\u6790<\/h2>\n<h3>6.1 \u56fd\u5185\u7814\u7a76\u52a8\u6001<\/h3>\n<p>\u8fd1\u5e74\u6765\uff0c\u6211\u56fd\u5728\u9ad8\u6548\u8fc7\u6ee4\u5668\u7814\u53d1\u65b9\u9762\u53d6\u5f97\u663e\u8457\u8fdb\u5c55\u3002\u6d59\u6c5f\u5927\u5b66\u80fd\u6e90\u5de5\u7a0b\u5b66\u9662\u5f00\u53d1\u4e86\u57fa\u4e8e\u7eb3\u7c73\u7ea4\u7ef4\u590d\u5408\u6750\u6599\u7684W\u578b\u6ee4\u82af\uff0c\u5176\u5bf90.1\u03bcm\u9897\u7c92\u7684\u8fc7\u6ee4\u6548\u7387\u8fbe99.9999%\uff0c\u538b\u964d\u4ec5190Pa\uff08Zhang et al., <em>Chinese Science Bulletin<\/em>, 2022\uff09\u3002\u8be5\u6280\u672f\u5df2\u5728\u5408\u80a5\u957f\u946b\u5b58\u50a8\u6d01\u51c0\u8f66\u95f4\u8bd5\u70b9\u5e94\u7528\u3002<\/p>\n<p>\u4e2d\u56fd\u5efa\u7b51\u79d1\u5b66\u7814\u7a76\u9662\u7275\u5934\u7f16\u5236\u7684\u300a\u6d01\u51c0\u5ba4\u7528\u9ad8\u6548\u8fc7\u6ee4\u5668\u6280\u672f\u6761\u4ef6\u300b\uff08JG\/T 404-2023\uff09\u660e\u786e\u8981\u6c42\uff1a\u7528\u4e8e\u534a\u5bfc\u4f53\u884c\u4e1a\u7684W\u578b\u8fc7\u6ee4\u5668\u5fc5\u987b\u901a\u8fc7\u5168\u751f\u547d\u5468\u671f\u6027\u80fd\u6d4b\u8bd5\uff0c\u5305\u62ec\u9ad8\u6e29\u9ad8\u6e7f\u8001\u5316\u3001\u632f\u52a8\u8bd5\u9a8c\u4e0e\u6fc0\u5149\u626b\u63cf\u68c0\u6f0f\u3002<\/p>\n<h3>6.2 \u56fd\u9645\u524d\u6cbf\u6280\u672f<\/h3>\n<p>\u6b27\u7f8e\u4f01\u4e1a\u5728\u667a\u80fd\u5316\u76d1\u6d4b\u65b9\u9762\u9886\u5148\u3002\u745e\u5178Camfil\u516c\u53f8\u63a8\u51faSmartFilter\u00ae\u7cfb\u7edf\uff0c\u96c6\u6210\u538b\u5dee\u4f20\u611f\u5668\u4e0e\u65e0\u7ebf\u901a\u4fe1\u6a21\u5757\uff0c\u5b9e\u65f6\u76d1\u63a7W\u578b\u8fc7\u6ee4\u5668\u72b6\u6001\uff0c\u5e76\u9884\u6d4b\u66f4\u6362\u65f6\u95f4\u3002\u8be5\u7cfb\u7edf\u5df2\u5728\u53f0\u79ef\u7535\u5357\u4eac\u5382\u90e8\u7f72\uff0c\u6545\u969c\u9884\u8b66\u51c6\u786e\u7387\u8fbe92%\uff08Camfil Case Study, 2023\uff09\u3002<\/p>\n<p>\u5fb7\u56fdT\u00dcV\u83b1\u8335\u8ba4\u8bc1\u673a\u6784\u53d1\u5e03\u62a5\u544a\u6307\u51fa\uff0c\u91c7\u7528W\u578bULPA\u8fc7\u6ee4\u5668\u7684\u6d01\u51c0\u5ba4\uff0c\u5176MPPS\uff08\u6700\u6613\u7a7f\u900f\u7c92\u5f84\uff09\u7a7f\u900f\u7387\u53ef\u63a7\u5236\u57280.002%\u4ee5\u4e0b\uff0c\u8fdc\u4f18\u4e8e\u4f20\u7edf\u4ea7\u54c1\uff08T\u00dcV Rheinland, <em>Cleanroom Technology Assessment Report<\/em>, 2022\uff09\u3002<\/p>\n<h3>6.3 \u5b9e\u9645\u5de5\u7a0b\u6848\u4f8b<\/h3>\n<h4>\u6848\u4f8b\u4e00\uff1a\u534e\u8679\u5b8f\u529b\u65e0\u9521\u57fa\u5730<\/h4>\n<p>\u534e\u8679\u96c6\u56e2\u5728\u65e0\u9521\u5efa\u8bbe\u768412\u82f1\u5bf8\u529f\u7387\u5668\u4ef6\u751f\u4ea7\u7ebf\uff0c\u6d01\u51c0\u5ba4\u9762\u79ef\u8fbe80,000\u33a1\uff0c\u91c7\u7528\u82cf\u51c0\u96c6\u56e2\u63d0\u4f9b\u7684W\u578bULPA FFU\u7cfb\u7edf\u5171\u8ba16,200\u53f0\u3002\u7cfb\u7edf\u8bbe\u8ba1\u53c2\u6570\u5982\u4e0b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u9879\u76ee<\/th>\n<th>\u53c2\u6570<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6d01\u51c0\u7b49\u7ea7<\/td>\n<td>ISO Class 3\uff08\u6838\u5fc3\u533a\uff09<\/td>\n<\/tr>\n<tr>\n<td>FFU\u89c4\u683c<\/td>\n<td>1220\u00d7610\u00d7350mm, U15\u7ea7<\/td>\n<\/tr>\n<tr>\n<td>\u9762\u98ce\u901f<\/td>\n<td>0.40 \u00b1 0.02 m\/s<\/td>\n<\/tr>\n<tr>\n<td>\u6362\u6c14\u6b21\u6570<\/td>\n<td>&gt;600\u6b21\/\u5c0f\u65f6<\/td>\n<\/tr>\n<tr>\n<td>\u7c92\u5b50\u6d53\u5ea6\uff08\u22650.3\u03bcm\uff09<\/td>\n<td>&lt;5 particles\/m\u00b3<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u8fd0\u884c\u4e00\u5e74\u540e\u68c0\u6d4b\u663e\u793a\uff0c\u7cfb\u7edf\u7a33\u5b9a\u6027\u826f\u597d\uff0c\u672a\u53d1\u751f\u91cd\u5927\u6c61\u67d3\u4e8b\u4ef6\uff0c\u4ea7\u54c1\u826f\u7387\u7a33\u5b9a\u572898.7%\u4ee5\u4e0a\u3002<\/p>\n<h4>\u6848\u4f8b\u4e8c\uff1a\u82f1\u7279\u5c14\u5927\u8fde\u5c01\u88c5\u5382\u5347\u7ea7\u9879\u76ee<\/h4>\n<p>\u4e3a\u5e94\u5bf9\u5148\u8fdb\u5c01\u88c5\u9700\u6c42\uff0c\u82f1\u7279\u5c14\u4e8e2022\u5e74\u5bf9\u5176\u5927\u8fde\u5382\u8fdb\u884c\u6d01\u51c0\u7cfb\u7edf\u6539\u9020\uff0c\u5c06\u539f\u6709\u5e73\u677fHEPA\u66ff\u6362\u4e3aDonaldson PowerMAX\u2122 W\u578bULPA\u8fc7\u6ee4\u5668\u3002\u6539\u9020\u540e\uff1a<\/p>\n<ul>\n<li>\u98ce\u673a\u80fd\u8017\u4e0b\u964d21%\uff1b<\/li>\n<li>\u8fc7\u6ee4\u5668\u66f4\u6362\u9891\u7387\u7531\u6bcf\u5e74\u4e24\u6b21\u51cf\u81f3\u6bcf\u4e09\u5e74\u4e00\u6b21\uff1b<\/li>\n<li>\u5c40\u90e8\u533a\u57df\u6d01\u51c0\u5ea6\u63d0\u5347\u4e00\u4e2a\u7b49\u7ea7\u3002<\/li>\n<\/ul>\n<p>\u8be5\u9879\u76ee\u88ab\u6536\u5f55\u4e8eIEEE\u300aSemiconductor Manufacturing Conference Proceedings\u300b\uff082023\uff09\uff0c\u4f5c\u4e3a\u7eff\u8272\u5236\u9020\u5178\u8303\u3002<\/p>\n<hr \/>\n<h2>7. \u5b89\u88c5\u3001\u7ef4\u62a4\u4e0e\u8d28\u91cf\u63a7\u5236<\/h2>\n<h3>7.1 \u5b89\u88c5\u8981\u70b9<\/h3>\n<ul>\n<li><strong>\u5bc6\u5c01\u6027\u68c0\u67e5<\/strong>\uff1a\u91c7\u7528PAO\uff08\u90bb\u82ef\u4e8c\u7532\u9178\u4e8c\u8f9b\u916f\uff09\u6216DOP\uff08\u7678\u4e8c\u9178\u4e8c\u8f9b\u916f\uff09\u6c14\u6eb6\u80f6\u8fdb\u884c\u73b0\u573a\u626b\u63cf\u68c0\u6f0f\uff0c\u786e\u4fdd\u6cc4\u6f0f\u7387&lt;0.01%\uff1b<\/li>\n<li><strong>\u65b9\u5411\u6807\u8bc6<\/strong>\uff1a\u6ee4\u82af\u7bad\u5934\u987b\u4e0e\u6c14\u6d41\u65b9\u5411\u4e00\u81f4\uff0c\u907f\u514d\u53cd\u5411\u5b89\u88c5\u5bfc\u81f4\u7ed3\u6784\u635f\u574f\uff1b<\/li>\n<li><strong>\u652f\u6491\u7ed3\u6784<\/strong>\uff1a\u540a\u9876\u9700\u5177\u5907\u8db3\u591f\u627f\u8f7d\u80fd\u529b\uff0c\u5355\u53f0FFU\u91cd\u91cf\u53ef\u8fbe50kg\u4ee5\u4e0a\u3002<\/li>\n<\/ul>\n<h3>7.2 \u7ef4\u62a4\u7b56\u7565<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u7ef4\u62a4\u9879\u76ee<\/th>\n<th>\u5468\u671f<\/th>\n<th>\u65b9\u6cd5<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u538b\u5dee\u76d1\u6d4b<\/td>\n<td>\u5b9e\u65f6<\/td>\n<td>\u81ea\u52a8\u62a5\u8b66\u7cfb\u7edf<\/td>\n<\/tr>\n<tr>\n<td>\u8868\u9762\u6e05\u6d01<\/td>\n<td>\u6bcf\u5b63\u5ea6<\/td>\n<td>\u65e0\u5c18\u5e03+\u5f02\u4e19\u9187\u64e6\u62ed<\/td>\n<\/tr>\n<tr>\n<td>\u6027\u80fd\u590d\u6d4b<\/td>\n<td>\u6bcf2\u5e74<\/td>\n<td>PAO\u626b\u63cf\u6216\u8ba1\u6570\u6cd5<\/td>\n<\/tr>\n<tr>\n<td>\u6574\u4f53\u66f4\u6362<\/td>\n<td>\u6839\u636e\u538b\u5dee\u66f2\u7ebf<\/td>\n<td>\u5f53\u7ec8\u963b\u529b\u8fbe\u521d\u963b2\u500d\u65f6<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u5efa\u8bae\u5efa\u7acb\u6570\u5b57\u5316\u6863\u6848\uff0c\u8bb0\u5f55\u6bcf\u53f0\u8fc7\u6ee4\u5668\u7684\u5b89\u88c5\u65e5\u671f\u3001\u4f4d\u7f6e\u3001\u538b\u5dee\u53d8\u5316\u8d8b\u52bf\u7b49\u4fe1\u606f\uff0c\u5b9e\u73b0\u5168\u751f\u547d\u5468\u671f\u7ba1\u7406\u3002<\/p>\n<hr \/>\n<h2>8. \u53d1\u5c55\u8d8b\u52bf\u4e0e\u6280\u672f\u521b\u65b0<\/h2>\n<h3>8.1 \u6750\u6599\u9769\u65b0<\/h3>\n<p>\u65b0\u578b\u590d\u5408\u6ee4\u6750\u6b63\u5728\u7814\u53d1\u4e2d\uff0c\u5982\uff1a<\/p>\n<ul>\n<li><strong>\u9759\u7535\u9a7b\u6781\u6ee4\u6599<\/strong>\uff1a\u63d0\u5347\u5bf9\u4e9a\u5fae\u7c73\u9897\u7c92\u7684\u6355\u96c6\u6548\u7387\uff1b<\/li>\n<li><strong>\u6297\u83cc\u6d82\u5c42<\/strong>\uff1a\u9632\u6b62\u5fae\u751f\u7269\u6ecb\u751f\uff0c\u9002\u7528\u4e8e\u6e7f\u6cd5\u5236\u7a0b\u533a\uff1b<\/li>\n<li><strong>\u78b3\u7ea4\u7ef4\u589e\u5f3a\u9aa8\u67b6<\/strong>\uff1a\u63d0\u9ad8\u6297\u51b2\u51fb\u6027\u80fd\u3002<\/li>\n<\/ul>\n<h3>8.2 \u667a\u80fd\u5316\u96c6\u6210<\/h3>\n<p>\u672a\u6765W\u578b\u8fc7\u6ee4\u5668\u5c06\u66f4\u591a\u96c6\u6210IoT\u6a21\u5757\uff0c\u5b9e\u73b0\uff1a<\/p>\n<ul>\n<li>\u5b9e\u65f6\u9897\u7c92\u6d53\u5ea6\u53cd\u9988\uff1b<\/li>\n<li>\u81ea\u9002\u5e94\u98ce\u91cf\u8c03\u8282\uff1b<\/li>\n<li>\u6545\u969c\u81ea\u8bca\u65ad\u4e0e\u8fdc\u7a0b\u8fd0\u7ef4\u3002<\/li>\n<\/ul>\n<h3>8.3 \u7eff\u8272\u53ef\u6301\u7eed\u53d1\u5c55<\/h3>\n<p>\u6b27\u76df\u300aErP\u751f\u6001\u8bbe\u8ba1\u6307\u4ee4\u300b\u63a8\u52a8\u4f4e\u80fd\u8017\u8fc7\u6ee4\u5668\u53d1\u5c55\u3002\u65e5\u672cNippon Muki\u516c\u53f8\u5df2\u63a8\u51fa\u53ef\u56de\u6536\u94dd\u6846W\u578b\u8fc7\u6ee4\u5668\uff0c\u6750\u6599\u56de\u6536\u7387\u8fbe85%\u4ee5\u4e0a\uff0c\u7b26\u5408Circular Economy\u7406\u5ff5\u3002<\/p>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>GB 50073-2013\uff0c\u300a\u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303\u300b  <\/li>\n<li>ISO 14644-1:2015, <em>Cleanrooms and associated controlled environments \u2014 Part 1: Classification of air cleanliness by particle concentration<\/em>  <\/li>\n<li>EN 1822:2009, <em>High efficiency air filters (HEPA and ULPA)<\/em>  <\/li>\n<li>ASHRAE Standard 52.2-2017, <em>Method of Testing General Ventilation Air-Cleaning Devices for Removal Efficiency by Particle Size<\/em>  <\/li>\n<li>Zhang, L., Wang, Y., et al. (2022). &quot;Development of Nano-fiber Based W-shaped ULPA Filters for Semiconductor Cleanrooms.&quot; <em>Chinese Science Bulletin<\/em>, 67(8), 901\u2013910.  <\/li>\n<li>Kim, J., &amp; Lee, H. (2023). &quot;CFD Analysis of Airflow Uniformity in 300mm Wafer Fabs Using W-type FFUs.&quot; <em>Building and Environment<\/em>, 231, 109987.  <\/li>\n<li>Camfil. (2023). <em>SmartFilter\u00ae Implementation at TSMC Nanjing Facility: A Case Study<\/em>. Camfil Technical Report.  <\/li>\n<li>Tsai, C., Lin, K., et al. (2019). &quot;Impact of Nanoparticle Contamination on Photolithography Yield.&quot; <em>Journal of Microlithography, Microfabrication, and Microsystems<\/em>, 18(3), 031008.  <\/li>\n<li>\u4e2d\u56fd\u7535\u5b50\u5de5\u7a0b\u8bbe\u8ba1\u9662. (2022). \u300a\u6d01\u51c0\u5ba4\u8282\u80fd\u6280\u672f\u767d\u76ae\u4e66\u300b. \u5317\u4eac\uff1a\u4e2d\u56fd\u5efa\u7b51\u5de5\u4e1a\u51fa\u7248\u793e.  <\/li>\n<li>T\u00dcV Rheinland. (2022). <em>Assessment of ULPA Filter Performance in Advanced Semiconductor Manufacturing<\/em>. Technical Certification Report No. TR-2022-CR017.<\/li>\n<\/ol>\n<hr \/>\n<h2>\u76f8\u5173\u6761\u76ee<\/h2>\n<ul>\n<li><a href=\"https:\/\/baike.baidu.com\/item\/\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\">\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668<\/a>  <\/li>\n<li><a href=\"https:\/\/baike.baidu.com\/item\/\u6d01\u51c0\u5ba4\">\u6d01\u51c0\u5ba4<\/a>  <\/li>\n<li><a href=\"https:\/\/baike.baidu.com\/item\/\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\">\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a<\/a>  <\/li>\n<li><a href=\"https:\/\/baike.baidu.com\/item\/ISO%2014644\">ISO 14644<\/a>  <\/li>\n<li><a href=\"https:\/\/baike.baidu.com\/item\/FFU\">FFU\uff08\u98ce\u673a\u8fc7\u6ee4\u5355\u5143\uff09<\/a><\/li>\n<\/ul>\n<hr \/>\n<h2>\u7f16\u8005\u6ce8<\/h2>\n<p>\u672c\u6587\u5185\u5bb9\u57fa\u4e8e\u516c\u5f00\u6280\u672f\u8d44\u6599\u3001\u5b66\u672f\u8bba\u6587\u53ca\u884c\u4e1a\u5b9e\u8df5\u6574\u7406\u800c\u6210\uff0c\u65e8\u5728\u63d0\u4f9b\u4e13\u4e1a\u53c2\u8003\u3002\u5b9e\u9645\u5de5\u7a0b\u5e94\u7528\u4e2d\uff0c\u8bf7\u7ed3\u5408\u5177\u4f53\u9879\u76ee\u9700\u6c42\u54a8\u8be2\u4e13\u4e1a\u6d01\u51c0\u5ba4\u8bbe\u8ba1\u5355\u4f4d\u6216\u8bbe\u5907\u4f9b\u5e94\u5546\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>W\u578b\u7ec4\u5408\u5f0f\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u4e0e\u6c14\u6d41\u4f18\u5316 1. \u5f15\u8a00 \u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u73b0\u4ee3\u96c6\u6210\u7535\u8def\uff08IC\uff09\u5236\u9020\u5df2\u8fdb\u5165\u7eb3\u7c73\u7ea7\u5de5\u827a\u8282\u70b9\uff0c\u59827nm\u30015nm\u751a\u81f33nm\u5236\u7a0b\uff0c\u5fae\u5c0f\u7684\u9897\u7c92\u6c61\u67d3\u5373\u53ef\u5bfc\u81f4\u82af\u7247\u826f\u7387\u5927\u5e45\u4e0b\u964d\u3002\u56e0\u6b64\uff0c\u6d01\u51c0\u5ba4\u4f5c\u4e3a\u534a\u5bfc\u4f53\u5236\u9020\u7684\u6838\u5fc3\u573a\u6240\uff0c\u5176\u7a7a\u6c14\u6d01\u51c0\u5ea6\u63a7\u5236\u6210\u4e3a\u4fdd\u969c\u4ea7\u54c1\u8d28\u91cf\u7684\u5173\u952e\u73af\u8282\u3002 \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08HEPA, H&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-16904","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16904","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=16904"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16904\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=16904"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=16904"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=16904"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}