{"id":16842,"date":"2025-09-11T13:41:29","date_gmt":"2025-09-11T05:41:29","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=16842"},"modified":"2025-09-11T13:41:29","modified_gmt":"2025-09-11T05:41:29","slug":"%e7%94%b5%e5%ad%90%e5%88%b6%e9%80%a0%e8%bd%a6%e9%97%b4%e4%b8%ad%e9%ab%98%e6%95%88%e4%bd%8e%e9%98%bb%e8%bf%87%e6%bb%a4%e5%99%a8%e7%9a%84%e5%ba%94%e7%94%a8%e4%b8%8e%e7%bb%b4%e6%8a%a4%e7%ad%96%e7%95%a5","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=16842","title":{"rendered":"\u7535\u5b50\u5236\u9020\u8f66\u95f4\u4e2d\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u7684\u5e94\u7528\u4e0e\u7ef4\u62a4\u7b56\u7565"},"content":{"rendered":"<h1>\u7535\u5b50\u5236\u9020\u8f66\u95f4\u4e2d\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u7684\u5e94\u7528\u4e0e\u7ef4\u62a4\u7b56\u7565<\/h1>\n<h2>\u5f15\u8a00<\/h2>\n<p>\u968f\u7740\u5168\u7403\u534a\u5bfc\u4f53\u3001\u96c6\u6210\u7535\u8def\u3001\u6d88\u8d39\u7535\u5b50\u7b49\u9ad8\u79d1\u6280\u4ea7\u4e1a\u7684\u8fc5\u731b\u53d1\u5c55\uff0c\u7535\u5b50\u5236\u9020\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u5728\u7535\u5b50\u5236\u9020\u8fc7\u7a0b\u4e2d\uff0c\u5fae\u7c73\u7ea7\u751a\u81f3\u7eb3\u7c73\u7ea7\u7684\u5c18\u57c3\u9897\u7c92\u90fd\u53ef\u80fd\u9020\u6210\u4ea7\u54c1\u7f3a\u9677\u3001\u826f\u7387\u4e0b\u964d\u4e43\u81f3\u8bbe\u5907\u635f\u574f\u3002\u56e0\u6b64\uff0c\u7ef4\u6301\u6d01\u51c0\u5ba4\uff08Cleanroom\uff09\u5185\u7a7a\u6c14\u7684\u9ad8\u6d01\u51c0\u5ea6\u6210\u4e3a\u4fdd\u969c\u4ea7\u54c1\u8d28\u91cf\u7684\u6838\u5fc3\u73af\u8282\u4e4b\u4e00\u3002\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\uff08High-Efficiency Low-Resistance Air Filter, HELRAF\uff09\u4f5c\u4e3a\u6d01\u51c0\u5ba4\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\u7684\u5173\u952e\u7ec4\u4ef6\uff0c\u5728\u63a7\u5236\u7a7a\u6c14\u4e2d\u60ac\u6d6e\u9897\u7c92\u7269\u65b9\u9762\u53d1\u6325\u7740\u4e0d\u53ef\u66ff\u4ee3\u7684\u4f5c\u7528\u3002<\/p>\n<p>\u672c\u6587\u5c06\u56f4\u7ed5\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u5728\u7535\u5b50\u5236\u9020\u8f66\u95f4\u4e2d\u7684\u5e94\u7528\u80cc\u666f\u3001\u5de5\u4f5c\u539f\u7406\u3001\u6838\u5fc3\u6027\u80fd\u53c2\u6570\u3001\u9009\u578b\u4f9d\u636e\u3001\u5b9e\u9645\u5e94\u7528\u573a\u666f\u3001\u8fd0\u884c\u7ef4\u62a4\u7b56\u7565\u4ee5\u53ca\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u7b49\u65b9\u9762\u8fdb\u884c\u7cfb\u7edf\u9610\u8ff0\uff0c\u65e8\u5728\u4e3a\u7535\u5b50\u5236\u9020\u4f01\u4e1a\u4f18\u5316\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\u63d0\u4f9b\u7406\u8bba\u652f\u6301\u4e0e\u5b9e\u8df5\u6307\u5bfc\u3002<\/p>\n<hr \/>\n<h2>\u4e00\u3001\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u6982\u5ff5\u4e0e\u5206\u7c7b<\/h2>\n<h3>1.1 \u5b9a\u4e49\u4e0e\u529f\u80fd<\/h3>\n<p>\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u662f\u4e00\u79cd\u517c\u5177\u9ad8\u8fc7\u6ee4\u6548\u7387\u548c\u4f4e\u6c14\u6d41\u963b\u529b\u7279\u6027\u7684\u7a7a\u6c14\u8fc7\u6ee4\u88c5\u7f6e\uff0c\u4e3b\u8981\u7528\u4e8e\u53bb\u9664\u7a7a\u6c14\u4e2d0.3\u5fae\u7c73\u53ca\u4ee5\u4e0a\u7c92\u5f84\u7684\u60ac\u6d6e\u9897\u7c92\u7269\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8eISO Class 5\uff08\u767e\u7ea7\uff09\u81f3Class 8\uff08\u5341\u4e07\u7ea7\uff09\u6d01\u51c0\u73af\u5883\u4e2d\u3002\u5176\u201c\u9ad8\u6548\u201d\u6307\u5bf9\u22650.3\u03bcm\u9897\u7c92\u7684\u8fc7\u6ee4\u6548\u7387\u53ef\u8fbe99.97%\u4ee5\u4e0a\uff0c\u201c\u4f4e\u963b\u201d\u5219\u610f\u5473\u7740\u5728\u4fdd\u8bc1\u9ad8\u6548\u7684\u524d\u63d0\u4e0b\uff0c\u538b\u964d\u663e\u8457\u4f4e\u4e8e\u4f20\u7edf\u9ad8\u6548\u8fc7\u6ee4\u5668\uff08HEPA\uff09\uff0c\u4ece\u800c\u964d\u4f4e\u98ce\u673a\u80fd\u8017\u4e0e\u8fd0\u884c\u6210\u672c\u3002<\/p>\n<p>\u6839\u636e\u56fd\u9645\u6807\u51c6ISO 29463\u4e0e\u7f8e\u56fdASHRAE Standard 52.2\uff0c\u9ad8\u6548\u8fc7\u6ee4\u5668\u901a\u5e38\u5206\u4e3aH13-H14\uff08\u9ad8\u6548\uff09\u3001U15-U17\uff08\u8d85\u9ad8\u6548\uff0cULPA\uff09\u3002\u800c\u201c\u4f4e\u963b\u201d\u7279\u6027\u4e3b\u8981\u901a\u8fc7\u4f18\u5316\u6ee4\u6750\u7ed3\u6784\u3001\u589e\u52a0\u8fc7\u6ee4\u9762\u79ef\uff08\u5982\u91c7\u7528\u8936\u76b1\u8bbe\u8ba1\uff09\u3001\u4f7f\u7528\u65b0\u578b\u7eb3\u7c73\u7ea4\u7ef4\u6750\u6599\u7b49\u65b9\u5f0f\u5b9e\u73b0\u3002<\/p>\n<h3>1.2 \u4e3b\u8981\u7c7b\u578b<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u7c7b\u578b<\/th>\n<th>\u8fc7\u6ee4\u6548\u7387\uff08@0.3\u03bcm\uff09<\/th>\n<th>\u521d\u59cb\u963b\u529b\uff08Pa\uff09<\/th>\n<th>\u9002\u7528\u6807\u51c6<\/th>\n<th>\u5178\u578b\u5e94\u7528\u573a\u666f<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>HEPA H13<\/td>\n<td>\u226599.97%<\/td>\n<td>180\u2013250<\/td>\n<td>ISO 29463-3<\/td>\n<td>\u666e\u901a\u6d01\u51c0\u5ba4\u3001\u5b9e\u9a8c\u5ba4<\/td>\n<\/tr>\n<tr>\n<td>HEPA H14<\/td>\n<td>\u226599.995%<\/td>\n<td>220\u2013300<\/td>\n<td>ISO 29463-3<\/td>\n<td>\u534a\u5bfc\u4f53\u5c01\u88c5\u3001\u533b\u836f<\/td>\n<\/tr>\n<tr>\n<td>ULPA U15<\/td>\n<td>\u226599.9995%<\/td>\n<td>280\u2013350<\/td>\n<td>ISO 29463-4<\/td>\n<td>\u9ad8\u7aef\u6676\u5706\u5236\u9020<\/td>\n<\/tr>\n<tr>\n<td>\u9ad8\u6548\u4f4e\u963b\u578b\uff08\u6539\u8fdbH13\uff09<\/td>\n<td>\u226599.97%<\/td>\n<td>120\u2013180<\/td>\n<td>\u81ea\u5b9a\u4e49\/\u5382\u5546\u6807\u51c6<\/td>\n<td>\u80fd\u8017\u654f\u611f\u578b\u7535\u5b50\u8f66\u95f4<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6ce8\uff1a\u6570\u636e\u53c2\u8003\u81eaCamfil\uff082022\uff09\u300aAir Filtration Handbook\u300b\u53ca\u4e2d\u56fd\u5efa\u7b51\u79d1\u5b66\u7814\u7a76\u9662\u300a\u6d01\u51c0\u5ba4\u8bbe\u8ba1\u89c4\u8303\u300bGB 50073-2013\u3002<\/p>\n<\/blockquote>\n<p>\u8fd1\u5e74\u6765\uff0c\u968f\u7740\u8282\u80fd\u9700\u6c42\u4e0a\u5347\uff0c\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u9010\u6e10\u53d6\u4ee3\u4f20\u7edfHEPA\u6210\u4e3a\u4e3b\u6d41\u9009\u62e9\u3002\u4f8b\u5982\uff0cAAF International\u63a8\u51fa\u7684eXpert\u7cfb\u5217\u4f4e\u963bHEPA\u8fc7\u6ee4\u5668\uff0c\u5728\u4fdd\u6301H14\u7ea7\u522b\u6548\u7387\u7684\u540c\u65f6\uff0c\u521d\u59cb\u538b\u964d\u964d\u4f4e\u7ea630%\uff0c\u663e\u8457\u63d0\u5347\u4e86\u7cfb\u7edf\u80fd\u6548\u3002<\/p>\n<hr \/>\n<h2>\u4e8c\u3001\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u7684\u5de5\u4f5c\u539f\u7406<\/h2>\n<p>\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u4e3b\u8981\u4f9d\u8d56\u7269\u7406\u62e6\u622a\u673a\u5236\u6355\u83b7\u7a7a\u6c14\u4e2d\u7684\u9897\u7c92\u7269\uff0c\u5176\u4f5c\u7528\u673a\u7406\u5305\u62ec\uff1a<\/p>\n<ol>\n<li><strong>\u6269\u6563\u6548\u5e94<\/strong>\uff08Diffusion Effect\uff09\uff1a\u9002\u7528\u4e8e&lt;0.1\u03bcm\u7684\u8d85\u7ec6\u9897\u7c92\uff0c\u56e0\u5e03\u6717\u8fd0\u52a8\u504f\u79bb\u6c14\u6d41\u8def\u5f84\u800c\u649e\u51fb\u7ea4\u7ef4\u88ab\u6355\u83b7\u3002<\/li>\n<li><strong>\u62e6\u622a\u6548\u5e94<\/strong>\uff08Interception\uff09\uff1a\u5f53\u9897\u7c92\u968f\u6c14\u6d41\u63a5\u8fd1\u7ea4\u7ef4\u8868\u9762\u65f6\uff0c\u56e0\u5c3a\u5bf8\u8f83\u5927\u800c\u76f4\u63a5\u63a5\u89e6\u5e76\u9644\u7740\u3002<\/li>\n<li><strong>\u60ef\u6027\u649e\u51fb<\/strong>\uff08Inertial Impaction\uff09\uff1a\u5927\u9897\u7c92\u56e0\u60ef\u6027\u65e0\u6cd5\u968f\u6c14\u6d41\u7ed5\u8fc7\u7ea4\u7ef4\uff0c\u649e\u51fb\u540e\u6ede\u7559\u3002<\/li>\n<li><strong>\u9759\u7535\u5438\u9644<\/strong>\uff08Electrostatic Attraction\uff09\uff1a\u90e8\u5206\u6ee4\u6750\u5e26\u6709\u9759\u7535\u8377\uff0c\u589e\u5f3a\u5bf9\u4e2d\u7b49\u7c92\u5f84\u9897\u7c92\u7684\u6355\u96c6\u80fd\u529b\u3002<\/li>\n<\/ol>\n<p>\u4e3a\u5b9e\u73b0\u201c\u4f4e\u963b\u201d\uff0c\u73b0\u4ee3\u9ad8\u6548\u8fc7\u6ee4\u5668\u5e38\u91c7\u7528\u4ee5\u4e0b\u6280\u672f\u8def\u5f84\uff1a<\/p>\n<ul>\n<li><strong>\u591a\u5c42\u590d\u5408\u6ee4\u6750<\/strong>\uff1a\u7ed3\u5408\u73bb\u7483\u7ea4\u7ef4\u4e3b\u5c42\u4e0e\u7eb3\u7c73\u7ea4\u7ef4\u8868\u5c42\uff0c\u63d0\u5347\u521d\u6548\u6355\u96c6\u80fd\u529b\uff0c\u51cf\u5c11\u6df1\u5c42\u5835\u585e\u3002<\/li>\n<li><strong>\u9ad8\u5bc6\u5ea6\u8936\u76b1\u7ed3\u6784<\/strong>\uff1a\u589e\u52a0\u6709\u6548\u8fc7\u6ee4\u9762\u79ef\uff0c\u964d\u4f4e\u5355\u4f4d\u9762\u79ef\u98ce\u901f\uff0c\u4ece\u800c\u51cf\u5c0f\u963b\u529b\u3002<\/li>\n<li><strong>\u6a21\u5757\u5316\u6846\u67b6\u8bbe\u8ba1<\/strong>\uff1a\u91c7\u7528\u8f7b\u8d28\u94dd\u5408\u91d1\u6216\u5de5\u7a0b\u5851\u6599\u8fb9\u6846\uff0c\u51cf\u8f7b\u91cd\u91cf\u5e76\u63d0\u9ad8\u5bc6\u5c01\u6027\u3002<\/li>\n<\/ul>\n<p>\u636eZhang et al.\uff082021\uff09\u5728\u300aEnergy and Buildings\u300b\u53d1\u8868\u7684\u7814\u7a76\u6307\u51fa\uff0c\u91c7\u7528\u7eb3\u7c73\u7ea4\u7ef4\u6d82\u5c42\u7684\u4f4e\u963bHEPA\u5728\u957f\u671f\u8fd0\u884c\u4e2d\u53ef\u8282\u7701\u7ea618%-25%\u7684\u98ce\u673a\u80fd\u8017\uff0c\u5c24\u5176\u9002\u7528\u4e8e\u8fde\u7eed\u8fd0\u884c\u7684\u7535\u5b50\u5236\u9020\u6d01\u51c0\u5ba4[1]\u3002<\/p>\n<hr \/>\n<h2>\u4e09\u3001\u7535\u5b50\u5236\u9020\u8f66\u95f4\u5bf9\u7a7a\u6c14\u6d01\u51c0\u5ea6\u7684\u8981\u6c42<\/h2>\n<p>\u7535\u5b50\u5236\u9020\u8fc7\u7a0b\u5bf9\u73af\u5883\u6d01\u51c0\u5ea6\u6781\u4e3a\u654f\u611f\uff0c\u5c24\u5176\u662f\u534a\u5bfc\u4f53\u524d\u9053\u5de5\u827a\uff08\u5982\u5149\u523b\u3001\u8680\u523b\u3001\u8584\u819c\u6c89\u79ef\uff09\u548c\u7cbe\u5bc6\u7ec4\u88c5\u73af\u8282\u3002\u4e0d\u540c\u5de5\u5e8f\u5bf9\u5e94\u7684\u6d01\u51c0\u7b49\u7ea7\u8981\u6c42\u5982\u4e0b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5de5\u827a\u9636\u6bb5<\/th>\n<th>\u63a8\u8350\u6d01\u51c0\u7b49\u7ea7\uff08ISO\uff09<\/th>\n<th>\u6700\u5927\u5141\u8bb8\u9897\u7c92\u6d53\u5ea6\uff08\u22650.3\u03bcm\uff0c\u4e2a\/m\u00b3\uff09<\/th>\n<th>\u6240\u9700\u8fc7\u6ee4\u5668\u7b49\u7ea7<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6676\u5706\u5149\u523b<\/td>\n<td>ISO Class 3\u20134<\/td>\n<td>\u22641,020<\/td>\n<td>ULPA U15\u2013U17<\/td>\n<\/tr>\n<tr>\n<td>\u82af\u7247\u5c01\u88c5<\/td>\n<td>ISO Class 5\u20136<\/td>\n<td>\u226410,000\u2013100,000<\/td>\n<td>HEPA H13\u2013H14<\/td>\n<\/tr>\n<tr>\n<td>PCB\u8d34\u7247<\/td>\n<td>ISO Class 7\u20138<\/td>\n<td>\u2264352,000\u20133,520,000<\/td>\n<td>HEPA H13 \u6216\u4f4e\u963b\u578b<\/td>\n<\/tr>\n<tr>\n<td>\u6210\u54c1\u6d4b\u8bd5<\/td>\n<td>ISO Class 8<\/td>\n<td>\u22643,520,000<\/td>\n<td>F8\u9884\u8fc7\u6ee4 + H13\u7ec8\u7aef<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1aSEMI F21-1202\u300aSemiconductor Cleanroom Classification Guidelines\u300b\u53caGB\/T 25915.1-2021\u300a\u6d01\u51c0\u5ba4\u53ca\u76f8\u5173\u53d7\u63a7\u73af\u5883 \u7b2c1\u90e8\u5206\uff1a\u7a7a\u6c14\u6d01\u51c0\u5ea6\u5206\u7ea7\u300b\u3002<\/p>\n<\/blockquote>\n<p>\u4ee5\u53f0\u79ef\u7535\u5357\u4eac\u5382\u4e3a\u4f8b\uff0c\u517612\u82f1\u5bf8\u6676\u5706\u751f\u4ea7\u7ebf\u91c7\u7528ULPA\u8fc7\u6ee4\u7cfb\u7edf\uff0c\u914d\u5408FFU\uff08Fan Filter Unit\uff09\u9635\u5217\uff0c\u786e\u4fdd\u5149\u523b\u533a\u9897\u7c92\u6d53\u5ea6\u63a7\u5236\u5728ISO Class 3\u4ee5\u5185\u3002\u800c\u4eac\u4e1c\u65b9\u5728OLED\u9762\u677f\u751f\u4ea7\u4e2d\uff0c\u5219\u5e7f\u6cdb\u90e8\u7f72\u9ad8\u6548\u4f4e\u963bHEPA\uff0c\u517c\u987e\u6d01\u51c0\u5ea6\u4e0e\u80fd\u8017\u5e73\u8861\u3002<\/p>\n<hr \/>\n<h2>\u56db\u3001\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u7684\u5173\u952e\u6027\u80fd\u53c2\u6570<\/h2>\n<p>\u4e3a\u79d1\u5b66\u9009\u578b\u4e0e\u8bc4\u4f30\uff0c\u9700\u91cd\u70b9\u5173\u6ce8\u4ee5\u4e0b\u6838\u5fc3\u53c2\u6570\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570\u540d\u79f0<\/th>\n<th>\u5b9a\u4e49<\/th>\n<th>\u6d4b\u8bd5\u6807\u51c6<\/th>\n<th>\u5178\u578b\u503c\u8303\u56f4<\/th>\n<th>\u91cd\u8981\u6027\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387<\/td>\n<td>\u5bf9\u7279\u5b9a\u7c92\u5f84\u9897\u7c92\u7684\u53bb\u9664\u7387<\/td>\n<td>IEST-RP-CC001.5\u3001EN 1822<\/td>\n<td>H13: \u226599.97% @0.3\u03bcm<\/td>\n<td>\u76f4\u63a5\u5f71\u54cd\u6d01\u51c0\u5ea6\u8fbe\u6807<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u59cb\u963b\u529b<\/td>\n<td>\u989d\u5b9a\u98ce\u91cf\u4e0b\u65b0\u6ee4\u5668\u538b\u964d<\/td>\n<td>ASHRAE 52.2<\/td>\n<td>120\u2013180 Pa\uff08\u4f4e\u963b\u578b\uff09<\/td>\n<td>\u51b3\u5b9a\u98ce\u673a\u80fd\u8017<\/td>\n<\/tr>\n<tr>\n<td>\u7ec8\u963b\u529b<\/td>\n<td>\u66f4\u6362\u9608\u503c\u538b\u964d<\/td>\n<td>\u5382\u5546\u5efa\u8bae\u6216\u89c4\u8303<\/td>\n<td>\u901a\u5e38\u2264450 Pa<\/td>\n<td>\u89e6\u53d1\u66f4\u6362\u8b66\u62a5<\/td>\n<\/tr>\n<tr>\n<td>\u5bb9\u5c18\u91cf<\/td>\n<td>\u53ef\u5bb9\u7eb3\u9897\u7c92\u603b\u91cf<\/td>\n<td>JIS Z 8122<\/td>\n<td>300\u2013800 g\/m\u00b2<\/td>\n<td>\u5f71\u54cd\u4f7f\u7528\u5bff\u547d<\/td>\n<\/tr>\n<tr>\n<td>\u98ce\u91cf\u8303\u56f4<\/td>\n<td>\u9002\u7528\u6c14\u6d41\u901f\u7387<\/td>\n<td>ISO 29463<\/td>\n<td>0.3\u20130.5 m\/s\u9762\u98ce\u901f<\/td>\n<td>\u5339\u914d\u7cfb\u7edf\u8bbe\u8ba1<\/td>\n<\/tr>\n<tr>\n<td>\u6cc4\u6f0f\u7387<\/td>\n<td>\u5c40\u90e8\u7a7f\u900f\u7387<\/td>\n<td>EN 1822\u626b\u63cf\u6cd5<\/td>\n<td>\u22640.01%<\/td>\n<td>\u786e\u4fdd\u6574\u4f53\u5bc6\u5c01\u6027<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u8868\u683c\u6574\u5408\u81eaDonaldson Company\uff082023\uff09\u6280\u672f\u767d\u76ae\u4e66\u300aLow Resistance HEPA Filters in Industrial Applications\u300b\u4e0e\u6e05\u534e\u5927\u5b66\u300a\u7a7a\u6c14\u6d01\u51c0\u6280\u672f\u57fa\u7840\u300b\u6559\u6750\u3002<\/p>\n<\/blockquote>\n<p>\u503c\u5f97\u6ce8\u610f\u7684\u662f\uff0c\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u5728\u201c\u5bb9\u5c18\u91cf\u201d\u4e0e\u201c\u963b\u529b\u589e\u957f\u901f\u7387\u201d\u4e4b\u95f4\u5b58\u5728\u6743\u8861\u3002\u90e8\u5206\u4f4e\u963b\u578b\u53f7\u867d\u521d\u963b\u4f4e\uff0c\u4f46\u56e0\u6ee4\u6750\u8f83\u8584\uff0c\u5bb9\u5c18\u80fd\u529b\u7565\u900a\u4e8e\u4f20\u7edfHEPA\u3002\u56e0\u6b64\uff0c\u5728\u9ad8\u6c61\u67d3\u8d1f\u8377\u73af\u5883\u4e0b\uff0c\u5e94\u4f18\u5148\u9009\u62e9\u201c\u4f4e\u963b+\u9ad8\u5bb9\u5c18\u201d\u590d\u5408\u8bbe\u8ba1\u4ea7\u54c1\u3002<\/p>\n<hr \/>\n<h2>\u4e94\u3001\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u5728\u7535\u5b50\u5236\u9020\u4e2d\u7684\u5178\u578b\u5e94\u7528<\/h2>\n<h3>5.1 FFU\uff08\u98ce\u673a\u8fc7\u6ee4\u5355\u5143\uff09\u7cfb\u7edf\u96c6\u6210<\/h3>\n<p>\u5728\u7535\u5b50\u6d01\u51c0\u5ba4\u4e2d\uff0cFFU\u662f\u9ad8\u6548\u8fc7\u6ee4\u5668\u6700\u5e38\u89c1\u7684\u5e94\u7528\u5f62\u5f0f\u3002\u5176\u5c06\u98ce\u673a\u3001\u5747\u6d41\u7f51\u3001\u9ad8\u6548\u4f4e\u963b\u6ee4\u82af\u4e00\u4f53\u5316\u5c01\u88c5\uff0c\u4fbf\u4e8e\u6a21\u5757\u5316\u5b89\u88c5\u4e0e\u7ef4\u62a4\u3002\u4f8b\u5982\uff0c\u82cf\u5dde\u67d0IC\u5c01\u88c5\u5382\u91c7\u7528Nippon Muki\u7684LF\u7cfb\u5217\u4f4e\u963bFFU\uff0c\u5355\u53f0\u98ce\u91cf850 m\u00b3\/h\uff0c\u963b\u529b\u4ec5165 Pa\uff0c\u8f83\u4f20\u7edfFFU\u8282\u80fd\u7ea622%\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>FFU\u578b\u53f7<\/th>\n<th>\u8fc7\u6ee4\u7b49\u7ea7<\/th>\n<th>\u98ce\u91cf\uff08m\u00b3\/h\uff09<\/th>\n<th>\u529f\u7387\uff08W\uff09<\/th>\n<th>\u566a\u97f3\uff08dB\uff09<\/th>\n<th>\u5e94\u7528\u6848\u4f8b<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>Camfil CFP-F<\/td>\n<td>H13\u4f4e\u963b<\/td>\n<td>900<\/td>\n<td>180<\/td>\n<td>\u226452<\/td>\n<td>\u957f\u6c5f\u5b58\u50a8\u6d01\u51c0\u5ba4<\/td>\n<\/tr>\n<tr>\n<td>AAF eXpert FFU<\/td>\n<td>H14<\/td>\n<td>1000<\/td>\n<td>210<\/td>\n<td>\u226455<\/td>\n<td>\u4e2d\u82af\u56fd\u9645\u5317\u4eac\u5382<\/td>\n<\/tr>\n<tr>\n<td>KLC Tech FFU-90<\/td>\n<td>H13<\/td>\n<td>850<\/td>\n<td>165<\/td>\n<td>\u226450<\/td>\n<td>\u534e\u661f\u5149\u7535TFT\u4ea7\u7ebf<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>5.2 \u5e72\u5f0f\u51b7\u5374\u76d8\u7ba1\uff08Dry Cooling Coil\uff09\u524d\u7f6e\u4fdd\u62a4<\/h3>\n<p>\u5728\u6052\u6e29\u6052\u6e7f\u7a7a\u8c03\u7cfb\u7edf\u4e2d\uff0c\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u5e38\u4f5c\u4e3a\u5e72\u51b7\u76d8\u7ba1\u7684\u524d\u7f6e\u4fdd\u62a4\u5c42\uff0c\u9632\u6b62\u7070\u5c18\u5728\u6362\u70ed\u7fc5\u7247\u4e0a\u79ef\u805a\uff0c\u5f71\u54cd\u4f20\u70ed\u6548\u7387\u3002\u636e\u683c\u529b\u7535\u5668\uff082022\uff09\u5b9e\u6d4b\u6570\u636e\u663e\u793a\uff0c\u52a0\u88c5\u4f4e\u963bH13\u8fc7\u6ee4\u5668\u540e\uff0cAHU\uff08\u7a7a\u6c14\u5904\u7406\u673a\u7ec4\uff09\u6362\u70ed\u6548\u7387\u63d0\u534712%\uff0c\u5e74\u8282\u7535\u8fbe15\u4e07\u5ea6\u3002<\/p>\n<h3>5.3 \u5c40\u90e8\u51c0\u5316\u5de5\u4f5c\u7ad9\uff08Laminar Flow Hood\uff09<\/h3>\n<p>\u5bf9\u4e8e\u5c0f\u578b\u9ad8\u7cbe\u5ea6\u64cd\u4f5c\u533a\uff08\u5982\u82af\u7247\u68c0\u6d4b\u3001\u91d1\u7ebf\u710a\u63a5\uff09\uff0c\u5e38\u914d\u7f6e\u5782\u76f4\u5c42\u6d41\u5de5\u4f5c\u53f0\uff0c\u5185\u7f6e\u9ad8\u6548\u4f4e\u963b\u6ee4\u7f51\u3002\u6b64\u7c7b\u8bbe\u5907\u8981\u6c42\u6ee4\u7f51\u5177\u5907\u5feb\u901f\u54cd\u5e94\u3001\u4f4e\u632f\u52a8\u7279\u6027\uff0c\u5b9c\u9009\u7528\u65e0\u9694\u677f\u4f4e\u963bHEPA\uff0c\u5982Honeywell\u7684NanoGuard\u7cfb\u5217\u3002<\/p>\n<hr \/>\n<h2>\u516d\u3001\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u7684\u7ef4\u62a4\u7b56\u7565<\/h2>\n<h3>6.1 \u65e5\u5e38\u76d1\u6d4b\u4e0e\u6570\u636e\u8bb0\u5f55<\/h3>\n<p>\u5efa\u7acb\u5b8c\u5584\u7684\u8fc7\u6ee4\u5668\u8fd0\u884c\u6863\u6848\u662f\u7ef4\u62a4\u7684\u57fa\u7840\u3002\u5efa\u8bae\u6bcf\u65e5\u8bb0\u5f55\u4ee5\u4e0b\u53c2\u6570\uff1a<\/p>\n<ul>\n<li>\u8fdb\u51fa\u53e3\u538b\u5dee\uff08\u53cd\u6620\u5835\u585e\u7a0b\u5ea6\uff09<\/li>\n<li>\u623f\u95f4\u6d01\u51c0\u5ea6\uff08\u7c92\u5b50\u8ba1\u6570\u5668\u68c0\u6d4b\uff09<\/li>\n<li>FFU\u8fd0\u884c\u7535\u6d41\u4e0e\u8f6c\u901f<\/li>\n<li>\u6e29\u6e7f\u5ea6\u53d8\u5316<\/li>\n<\/ul>\n<p>\u63a8\u8350\u4f7f\u7528\u667a\u80fd\u76d1\u63a7\u7cfb\u7edf\uff08\u5982Siemens Desigo CC\uff09\u5b9e\u73b0\u8fdc\u7a0b\u5b9e\u65f6\u62a5\u8b66\u3002\u5f53\u538b\u5dee\u8fbe\u5230\u7ec8\u963b\u529b\u768480%\u65f6\uff0c\u5e94\u542f\u52a8\u9884\u8b66\u7a0b\u5e8f\u3002<\/p>\n<h3>6.2 \u5b9a\u671f\u66f4\u6362\u5468\u671f\u7ba1\u7406<\/h3>\n<p>\u66f4\u6362\u5468\u671f\u5e94\u57fa\u4e8e\u5b9e\u6d4b\u538b\u5dee\u4e0e\u73af\u5883\u8d1f\u8377\u52a8\u6001\u8c03\u6574\uff0c\u800c\u975e\u56fa\u5b9a\u65f6\u95f4\u3002\u4e00\u822c\u5efa\u8bae\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u73af\u5883\u7b49\u7ea7<\/th>\n<th>\u5efa\u8bae\u66f4\u6362\u5468\u671f<\/th>\n<th>\u5224\u65ad\u4f9d\u636e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>ISO Class 5<\/td>\n<td>18\u201324\u4e2a\u6708<\/td>\n<td>\u538b\u5dee\u2265350 Pa \u6216\u6548\u7387\u4e0b\u964d\uff1e5%<\/td>\n<\/tr>\n<tr>\n<td>ISO Class 6\u20137<\/td>\n<td>24\u201336\u4e2a\u6708<\/td>\n<td>\u538b\u5dee\u2265400 Pa<\/td>\n<\/tr>\n<tr>\n<td>\u9884\u8fc7\u6ee4\u6bb5\uff08G4+F7\uff09<\/td>\n<td>6\u201312\u4e2a\u6708<\/td>\n<td>\u538b\u5dee\u7ffb\u500d\u6216\u76ee\u89c6\u810f\u6c61<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u5f15\u81ea\u4e2d\u56fd\u7535\u5b50\u5de5\u7a0b\u8bbe\u8ba1\u9662\u300a\u7535\u5b50\u5de5\u4e1a\u6d01\u51c0\u5382\u623f\u8fd0\u884c\u7ef4\u62a4\u6307\u5357\u300b\uff082020\u7248\uff09\u3002<\/p>\n<\/blockquote>\n<h3>6.3 \u66f4\u6362\u64cd\u4f5c\u89c4\u8303<\/h3>\n<p>\u66f4\u6362\u8fc7\u7a0b\u5fc5\u987b\u4e25\u683c\u9075\u5faa\u65e0\u5c18\u64cd\u4f5c\u89c4\u7a0b\uff1a<\/p>\n<ol>\n<li>\u5173\u95ed\u5bf9\u5e94FFU\u6216AHU\u7535\u6e90\uff1b<\/li>\n<li>\u4f7f\u7528\u9152\u7cbe\u64e6\u62ed\u6846\u67b6\u5bc6\u5c01\u69fd\uff1b<\/li>\n<li>\u62c6\u5378\u65e7\u6ee4\u5668\u65f6\u907f\u514d\u626c\u5c18\uff0c\u5efa\u8bae\u4f7f\u7528\u771f\u7a7a\u5438\u5c18\u88c5\u7f6e\uff1b<\/li>\n<li>\u5b89\u88c5\u65b0\u6ee4\u5668\u524d\u68c0\u67e5\u5bc6\u5c01\u6761\u5b8c\u6574\u6027\uff1b<\/li>\n<li>\u66f4\u6362\u540e\u8fdb\u884cDOP\/PAO\u68c0\u6f0f\u6d4b\u8bd5\uff08\u7b26\u5408ISO 14644-3\u8981\u6c42\uff09\u3002<\/li>\n<\/ol>\n<h3>6.4 \u6e05\u6d01\u4e0e\u518d\u751f\u95ee\u9898<\/h3>\n<p>\u76ee\u524d\u7edd\u5927\u591a\u6570\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u4e3a\u4e00\u6b21\u6027\u4f7f\u7528\uff0c\u4e0d\u53ef\u6e05\u6d17\u3002\u5f3a\u884c\u6c34\u6d17\u6216\u5439\u626b\u4f1a\u5bfc\u81f4\u6ee4\u6750\u7ed3\u6784\u7834\u574f\u3001\u6548\u7387\u9aa4\u964d\u3002\u4ec5\u6709\u5c11\u6570\u5382\u5bb6\uff08\u5982Mann+Hummel\uff09\u5f00\u53d1\u51fa\u53ef\u53cd\u5439\u518d\u751f\u578b\u4f4e\u963b\u6ee4\u82af\uff0c\u9002\u7528\u4e8e\u7279\u5b9a\u5de5\u4e1a\u573a\u666f\uff0c\u4f46\u5728\u7535\u5b50\u5236\u9020\u4e2d\u5c1a\u672a\u666e\u53ca\u3002<\/p>\n<hr \/>\n<h2>\u4e03\u3001\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u4e0e\u53d1\u5c55\u8d8b\u52bf<\/h2>\n<h3>7.1 \u56fd\u5916\u7814\u7a76\u52a8\u6001<\/h3>\n<p>\u6b27\u7f8e\u4f01\u4e1a\u5728\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u6280\u672f\u65b9\u9762\u5904\u4e8e\u9886\u5148\u5730\u4f4d\u3002\u7f8e\u56fd3M\u516c\u53f8\u7814\u53d1\u7684\u201cNanoSpun\u201d\u7eb3\u7c73\u7ea4\u7ef4\u6280\u672f\uff0c\u4f7f\u6ee4\u6750\u57280.3\u03bcm\u7c92\u5f84\u4e0b\u7684\u6548\u7387\u63d0\u5347\u81f399.998%\uff0c\u540c\u65f6\u963b\u529b\u964d\u4f4e40%\u3002\u5fb7\u56fdFreudenberg\u63a8\u51fa\u201cEconoStar\u201d\u7cfb\u5217\u4f4e\u963bHEPA\uff0c\u91c7\u7528\u68af\u5ea6\u8fc7\u6ee4\u7ed3\u6784\uff0c\u5728\u957f\u8fbe3\u5e74\u7684\u73b0\u573a\u6d4b\u8bd5\u4e2d\u8868\u73b0\u51fa\u4f18\u5f02\u7684\u5bb9\u5c18\u7a33\u5b9a\u6027[2]\u3002<\/p>\n<p>\u636eIEA\uff08\u56fd\u9645\u80fd\u6e90\u7f72\uff092023\u5e74\u62a5\u544a\u300aEnergy Efficiency in Cleanrooms\u300b\uff0c\u5168\u7403\u6d01\u51c0\u5ba4\u5e74\u8017\u7535\u91cf\u7ea6\u5360\u5de5\u4e1a\u603b\u7528\u7535\u76844%-6%\uff0c\u5176\u4e2d\u98ce\u673a\u7cfb\u7edf\u5360\u6bd4\u8d8560%\u3002\u63a8\u5e7f\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u53ef\u4f7f\u6574\u4f53\u80fd\u8017\u4e0b\u964d15%-30%\uff0c\u5177\u6709\u663e\u8457\u78b3\u51cf\u6392\u6f5c\u529b\u3002<\/p>\n<h3>7.2 \u56fd\u5185\u6280\u672f\u8fdb\u6b65<\/h3>\n<p>\u8fd1\u5e74\u6765\uff0c\u6211\u56fd\u5728\u9ad8\u7aef\u7a7a\u6c14\u8fc7\u6ee4\u9886\u57df\u52a0\u901f\u8ffd\u8d76\u3002\u4e2d\u6750\u79d1\u6280\uff08SINOMA\uff09\u81ea\u4e3b\u7814\u53d1\u7684\u201cSuperLow-D\u201d\u7cfb\u5217\u4f4e\u963bHEPA\uff0c\u5df2\u901a\u8fc7EN 1822\u8ba4\u8bc1\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u534e\u8679\u5b8f\u529b\u3001\u5408\u80a5\u957f\u946b\u7b49\u534a\u5bfc\u4f53\u9879\u76ee\u3002\u5176\u4ea7\u54c1\u57282023\u5e74\u4e0a\u6d77\u56fd\u9645\u6d01\u51c0\u6280\u672f\u5c55\u4e0a\u83b7\u5f97\u201c\u521b\u65b0\u4ea7\u54c1\u5956\u201d\u3002<\/p>\n<p>\u6b64\u5916\uff0c\u6d59\u6c5f\u5927\u5b66\u4e0e\u4e2d\u79d1\u9662\u8fc7\u7a0b\u5de5\u7a0b\u7814\u7a76\u6240\u5408\u4f5c\u5f00\u5c55\u201c\u667a\u80fd\u81ea\u9002\u5e94\u8fc7\u6ee4\u7cfb\u7edf\u201d\u7814\u7a76\uff0c\u5229\u7528\u4f20\u611f\u5668\u7f51\u7edc\u4e0eAI\u7b97\u6cd5\u9884\u6d4b\u6ee4\u5668\u5bff\u547d\uff0c\u5b9e\u73b0\u7cbe\u51c6\u66f4\u6362\uff0c\u51cf\u5c11\u8fc7\u5ea6\u7ef4\u62a4\u6210\u672c[3]\u3002<\/p>\n<h3>7.3 \u672a\u6765\u53d1\u5c55\u65b9\u5411<\/h3>\n<ol>\n<li><strong>\u667a\u80fd\u5316\u96c6\u6210<\/strong>\uff1a\u5d4c\u5165IoT\u4f20\u611f\u5668\uff0c\u5b9e\u73b0\u538b\u5dee\u3001\u6e29\u6e7f\u5ea6\u3001\u9897\u7c92\u6d53\u5ea6\u4e00\u4f53\u5316\u76d1\u6d4b\uff1b<\/li>\n<li><strong>\u7eff\u8272\u6750\u6599\u5e94\u7528<\/strong>\uff1a\u5f00\u53d1\u53ef\u964d\u89e3\u6ee4\u6750\uff0c\u51cf\u5c11\u5e9f\u5f03\u8fc7\u6ee4\u5668\u5bf9\u73af\u5883\u7684\u5f71\u54cd\uff1b<\/li>\n<li><strong>\u591a\u529f\u80fd\u590d\u5408\u6ee4\u82af<\/strong>\uff1a\u96c6\u6210\u9664VOC\u3001\u6297\u83cc\u3001\u9632\u9709\u7b49\u529f\u80fd\uff0c\u6ee1\u8db3\u590d\u6742\u7535\u5b50\u5236\u9020\u9700\u6c42\uff1b<\/li>\n<li><strong>\u5b9a\u5236\u5316\u8bbe\u8ba1\u670d\u52a1<\/strong>\uff1a\u6839\u636e\u5ba2\u6237\u98ce\u91cf\u3001\u7a7a\u95f4\u3001\u80fd\u8017\u76ee\u6807\u63d0\u4f9b\u4e2a\u6027\u5316\u89e3\u51b3\u65b9\u6848\u3002<\/li>\n<\/ol>\n<hr \/>\n<h2>\u516b\u3001\u9009\u578b\u5efa\u8bae\u4e0e\u7ecf\u6d4e\u6027\u5206\u6790<\/h2>\n<p>\u5728\u5b9e\u9645\u5de5\u7a0b\u4e2d\uff0c\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u7684\u9009\u578b\u5e94\u7efc\u5408\u8003\u8651\u6280\u672f\u6307\u6807\u4e0e\u5168\u751f\u547d\u5468\u671f\u6210\u672c\uff08LCC\uff09\u3002\u4ee5\u4e0b\u4e3a\u67d010,000\u33a1\u7535\u5b50\u5382\u623f\u7684\u5bf9\u6bd4\u6848\u4f8b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u9879\u76ee<\/th>\n<th>\u4f20\u7edfHEPA\uff08H13\uff09<\/th>\n<th>\u9ad8\u6548\u4f4e\u963b\u578b\uff08H13-LR\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5355\u53f0\u4ef7\u683c\uff08\u5143\uff09<\/td>\n<td>1,800<\/td>\n<td>2,200<\/td>\n<\/tr>\n<tr>\n<td>\u6570\u91cf\uff08\u53f0\uff09<\/td>\n<td>600<\/td>\n<td>600<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u59cb\u6295\u8d44\uff08\u4e07\u5143\uff09<\/td>\n<td>108<\/td>\n<td>132<\/td>\n<\/tr>\n<tr>\n<td>\u5e73\u5747\u963b\u529b\uff08Pa\uff09<\/td>\n<td>240<\/td>\n<td>160<\/td>\n<\/tr>\n<tr>\n<td>\u5e74\u8fd0\u884c\u7535\u8d39\uff08\u4e07\u5143\uff09<\/td>\n<td>286<\/td>\n<td>190<\/td>\n<\/tr>\n<tr>\n<td>\u66f4\u6362\u5468\u671f<\/td>\n<td>2\u5e74<\/td>\n<td>2.5\u5e74<\/td>\n<\/tr>\n<tr>\n<td>5\u5e74\u603b\u6210\u672c\uff08\u542b\u7535\u8d39\u3001\u66f4\u6362\uff09<\/td>\n<td>950\u4e07\u5143<\/td>\n<td>780\u4e07\u5143<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u8ba1\u7b97\u5047\u8bbe\uff1a\u7535\u4ef70.8\u5143\/kWh\uff0c\u98ce\u673a\u529f\u73873kW\/\u53f0\uff0c\u65e5\u8fd0\u884c24\u5c0f\u65f6\u3002<\/p>\n<\/blockquote>\n<p>\u53ef\u89c1\uff0c\u5c3d\u7ba1\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u521d\u671f\u6295\u5165\u8f83\u9ad8\uff0c\u4f46\u51ed\u501f\u8282\u80fd\u4f18\u52bf\uff0c\u57283\u5e74\u5185\u5373\u53ef\u6536\u56de\u589e\u91cf\u6210\u672c\uff0c\u957f\u671f\u7ecf\u6d4e\u6548\u76ca\u663e\u8457\u3002<\/p>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<p>[1] Zhang, L., Chen, Y., &amp; Wang, S. (2021). Energy performance analysis of low-resistance HEPA filters in semiconductor cleanrooms. <em>Energy and Buildings<\/em>, 231, 110567. <a href=\"https:\/\/doi.org\/10.1016\/j.enbuild.2020.110567\">https:\/\/doi.org\/10.1016\/j.enbuild.2020.110567<\/a><\/p>\n<p>[2] Freudenberg Filtration Technologies. (2022). <em>EconoStar High Efficiency Low Resistance Filters \u2013 Technical Brochure<\/em>. Weinheim: Freudenberg Group.<\/p>\n<p>[3] \u674e\u4f1f, \u738b\u5f3a, \u5218\u6d0b. (2023). \u57fa\u4e8e\u673a\u5668\u5b66\u4e60\u7684\u6d01\u51c0\u5ba4\u8fc7\u6ee4\u5668\u5bff\u547d\u9884\u6d4b\u6a21\u578b\u7814\u7a76. \u300a\u6696\u901a\u7a7a\u8c03\u300b, 53(4), 89\u201395.<\/p>\n<p>[4] Camfil. (2022). <em>Air Filtration Handbook \u2013 5th Edition<\/em>. Stockholm: Camfil AB.<\/p>\n<p>[5] AAF International. (2023). <em>eXpert Low Resistance HEPA Filters \u2013 Product Catalog<\/em>. Louisville, KY.<\/p>\n<p>[6] \u56fd\u5bb6\u5e02\u573a\u76d1\u7763\u7ba1\u7406\u603b\u5c40. (2021). GB\/T 25915.1-2021\u300a\u6d01\u51c0\u5ba4\u53ca\u76f8\u5173\u53d7\u63a7\u73af\u5883 \u7b2c1\u90e8\u5206\uff1a\u7a7a\u6c14\u6d01\u51c0\u5ea6\u5206\u7ea7\u300b. \u5317\u4eac: \u4e2d\u56fd\u6807\u51c6\u51fa\u7248\u793e.<\/p>\n<p>[7] \u4e2d\u56fd\u7535\u5b50\u5de5\u7a0b\u8bbe\u8ba1\u9662. (2020). \u300a\u7535\u5b50\u5de5\u4e1a\u6d01\u51c0\u5382\u623f\u8fd0\u884c\u7ef4\u62a4\u6307\u5357\u300b. \u5317\u4eac: \u4e2d\u56fd\u5efa\u7b51\u5de5\u4e1a\u51fa\u7248\u793e.<\/p>\n<p>[8] SEMI. (2002). <em>SEMI F21-1202: Guide for Cleanroom Classification<\/em>. San Jose: SEMI International.<\/p>\n<p>[9] International Energy Agency (IEA). (2023). <em>Energy Efficiency in Cleanroom Facilities \u2013 Global Status Report<\/em>. Paris: IEA Publications.<\/p>\n<p>[10] \u4e2d\u6750\u79d1\u6280\u80a1\u4efd\u6709\u9650\u516c\u53f8. (2023). SuperLow-D\u7cfb\u5217\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u6280\u672f\u8bf4\u660e\u4e66. \u5357\u4eac: \u4e2d\u6750\u79d1\u6280.<\/p>\n<p>[11] 3M Company. (2022). <em>NanoSpun Media Technology Overview<\/em>. St. Paul, MN: 3M Corporate.<\/p>\n<p>[12] Donaldson Company. (2023). <em>Low Resistance HEPA Filters in Industrial Applications \u2013 White Paper<\/em>. Minneapolis: Donaldson.<\/p>\n<p>[13] \u6e05\u534e\u5927\u5b66\u5efa\u7b51\u6280\u672f\u79d1\u5b66\u7cfb. (2019). \u300a\u7a7a\u6c14\u6d01\u51c0\u6280\u672f\u57fa\u7840\u300b. \u5317\u4eac: \u4e2d\u56fd\u5efa\u7b51\u5de5\u4e1a\u51fa\u7248\u793e.<\/p>\n<p>[14] ISO. (2011). <em>ISO 29463: High-efficiency air filter units<\/em>. Geneva: International Organization for Standardization.<\/p>\n<p>[15] \u767e\u5ea6\u767e\u79d1. (2024). \u201c\u9ad8\u6548\u8fc7\u6ee4\u5668\u201d\u8bcd\u6761. <a href=\"https:\/\/baike.baidu.com\/item\/\u9ad8\u6548\u8fc7\u6ee4\u5668\">https:\/\/baike.baidu.com\/item\/\u9ad8\u6548\u8fc7\u6ee4\u5668<\/a> \uff08\u8bbf\u95ee\u65e5\u671f\uff1a2024\u5e744\u67085\u65e5\uff09<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u7535\u5b50\u5236\u9020\u8f66\u95f4\u4e2d\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\u7684\u5e94\u7528\u4e0e\u7ef4\u62a4\u7b56\u7565 \u5f15\u8a00 \u968f\u7740\u5168\u7403\u534a\u5bfc\u4f53\u3001\u96c6\u6210\u7535\u8def\u3001\u6d88\u8d39\u7535\u5b50\u7b49\u9ad8\u79d1\u6280\u4ea7\u4e1a\u7684\u8fc5\u731b\u53d1\u5c55\uff0c\u7535\u5b50\u5236\u9020\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u5728\u7535\u5b50\u5236\u9020\u8fc7\u7a0b\u4e2d\uff0c\u5fae\u7c73\u7ea7\u751a\u81f3\u7eb3\u7c73\u7ea7\u7684\u5c18\u57c3\u9897\u7c92\u90fd\u53ef\u80fd\u9020\u6210\u4ea7\u54c1\u7f3a\u9677\u3001\u826f\u7387\u4e0b\u964d\u4e43\u81f3\u8bbe\u5907\u635f\u574f\u3002\u56e0\u6b64\uff0c\u7ef4\u6301\u6d01\u51c0\u5ba4\uff08Cleanroom\uff09\u5185\u7a7a\u6c14\u7684\u9ad8\u6d01\u51c0\u5ea6\u6210\u4e3a\u4fdd\u969c\u4ea7\u54c1\u8d28\u91cf\u7684\u6838\u5fc3\u73af\u8282\u4e4b\u4e00\u3002\u9ad8\u6548\u4f4e\u963b\u8fc7\u6ee4\u5668\uff08High-Effici&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-16842","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16842","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=16842"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16842\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=16842"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=16842"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=16842"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}