{"id":16827,"date":"2025-09-11T13:10:26","date_gmt":"2025-09-11T05:10:26","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=16827"},"modified":"2025-09-11T13:10:26","modified_gmt":"2025-09-11T05:10:26","slug":"%e9%ab%98%e6%95%88%e5%a4%9a%e5%b1%82%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e5%88%b6%e9%80%a0%e6%b4%81%e5%87%80%e5%8e%82%e6%88%bf%e4%b8%ad%e7%9a%84%e5%85%b3%e9%94%ae%e4%bd%9c","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=16827","title":{"rendered":"\u9ad8\u6548\u591a\u5c42\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u5173\u952e\u4f5c\u7528"},"content":{"rendered":"

\u9ad8\u6548\u591a\u5c42\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u5173\u952e\u4f5c\u7528<\/h1>\n

1. \u5f15\u8a00<\/h2>\n

\u968f\u7740\u5168\u7403\u534a\u5bfc\u4f53\u4ea7\u4e1a\u7684\u8fc5\u731b\u53d1\u5c55\uff0c\u96c6\u6210\u7535\u8def\uff08IC\uff09\u5236\u9020\u5de5\u827a\u4e0d\u65ad\u5411\u66f4\u5c0f\u7ebf\u5bbd\u3001\u66f4\u9ad8\u96c6\u6210\u5ea6\u65b9\u5411\u6f14\u8fdb\u3002\u5f53\u524d\uff0c\u5148\u8fdb\u5236\u7a0b\u5df2\u8fdb\u51655nm\u30013nm\u751a\u81f32nm\u8282\u70b9\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u63d0\u51fa\u4e86\u524d\u6240\u672a\u6709\u7684\u4e25\u82db\u8981\u6c42\u3002\u5728\u6b64\u80cc\u666f\u4e0b\uff0c\u6d01\u51c0\u5382\u623f\uff08Cleanroom\uff09\u4f5c\u4e3a\u534a\u5bfc\u4f53\u5236\u9020\u7684\u6838\u5fc3\u7269\u7406\u7a7a\u95f4\uff0c\u5176\u7a7a\u6c14\u8d28\u91cf\u63a7\u5236\u76f4\u63a5\u5173\u7cfb\u5230\u82af\u7247\u826f\u7387\u4e0e\u4ea7\u54c1\u53ef\u9760\u6027\u3002\u9ad8\u6548\u591a\u5c42\u8fc7\u6ee4\u5668\uff08High-Efficiency Multi-Layer Filter, HEMF\uff09\u4f5c\u4e3a\u6d01\u51c0\u5ba4\u7a7a\u6c14\u5904\u7406\u7cfb\u7edf\u7684\u5173\u952e\u7ec4\u4ef6\uff0c\u5728\u4fdd\u969c\u5fae\u7c92\u6d53\u5ea6\u3001\u5316\u5b66\u6c61\u67d3\u7269\u63a7\u5236\u53ca\u6c14\u6d41\u7ec4\u7ec7\u65b9\u9762\u53d1\u6325\u7740\u4e0d\u53ef\u66ff\u4ee3\u7684\u4f5c\u7528\u3002<\/p>\n

\u672c\u6587\u5c06\u4ece\u9ad8\u6548\u591a\u5c42\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u51fa\u53d1\uff0c\u7cfb\u7edf\u9610\u8ff0\u5176\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u529f\u80fd\u5b9a\u4f4d\u3001\u6280\u672f\u53c2\u6570\u3001\u5e94\u7528\u5b9e\u8df5\uff0c\u5e76\u7ed3\u5408\u56fd\u5185\u5916\u6743\u5a01\u7814\u7a76\u6587\u732e\uff0c\u6df1\u5165\u5206\u6790\u5176\u6027\u80fd\u4f18\u5316\u8def\u5f84\u4e0e\u672a\u6765\u53d1\u5c55\u8d8b\u52bf\u3002<\/p>\n

\n

2. \u534a\u5bfc\u4f53\u5236\u9020\u5bf9\u6d01\u51c0\u73af\u5883\u7684\u4e25\u82db\u8981\u6c42<\/h2>\n

2.1 \u6d01\u51c0\u7b49\u7ea7\u6807\u51c6<\/h3>\n

\u6839\u636e\u56fd\u9645\u6807\u51c6\u5316\u7ec4\u7ec7ISO 14644-1\u6807\u51c6\uff0c\u6d01\u51c0\u5ba4\u6309\u6bcf\u7acb\u65b9\u7c73\u7a7a\u6c14\u4e2d\u22650.1\u03bcm\u81f3\u22655.0\u03bcm\u9897\u7c92\u7269\u7684\u6570\u91cf\u5212\u5206\u4e3a\u4e0d\u540c\u7b49\u7ea7\u3002\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\uff0c\u4e3b\u6d41\u6d01\u51c0\u5ba4\u901a\u5e38\u9700\u8fbe\u5230ISO Class 1\u81f3Class 5\u7ea7\u522b\u3002<\/p>\n\n\n\n\n\n\n\n
ISO\u7b49\u7ea7<\/th>\n\u22650.1 \u03bcm\u9897\u7c92\u6570\u4e0a\u9650\uff08\u4e2a\/m\u00b3\uff09<\/th>\n\u5178\u578b\u5e94\u7528\u573a\u666f<\/th>\n<\/tr>\n<\/thead>\n
ISO 1<\/td>\n10<\/td>\nEUV\u5149\u523b\u533a\u3001\u6676\u5706\u642c\u8fd0\u6838\u5fc3\u533a\u57df<\/td>\n<\/tr>\n
ISO 3<\/td>\n1,000<\/td>\n\u524d\u9053\u5de5\u827a\u533a\uff08\u5982\u8680\u523b\u3001\u6c89\u79ef\uff09<\/td>\n<\/tr>\n
ISO 5<\/td>\n100,000<\/td>\n\u540e\u9053\u5c01\u88c5\u533a\u3001\u6d4b\u8bd5\u533a<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n

\u6570\u636e\u6765\u6e90\uff1aISO 14644-1:2015\u300a\u6d01\u51c0\u5ba4\u53ca\u76f8\u5173\u53d7\u63a7\u73af\u5883 \u7b2c1\u90e8\u5206\uff1a\u7a7a\u6c14\u6d01\u51c0\u5ea6\u5206\u7ea7\u300b<\/p>\n<\/blockquote>\n

\u7f8e\u56fd\u8054\u90a6\u6807\u51c6FS-209E\u867d\u5df2\u88abISO\u6807\u51c6\u53d6\u4ee3\uff0c\u4f46\u5728\u90e8\u5206\u8001\u5382\u533a\u4ecd\u6709\u53c2\u8003\u4ef7\u503c\u3002\u4f8b\u5982\uff0cClass 1\u5bf9\u5e94\u4e8e\u6bcf\u7acb\u65b9\u82f1\u5c3a\u7a7a\u6c14\u4e2d\u22650.5\u03bcm\u9897\u7c92\u4e0d\u8d85\u8fc71\u4e2a\uff0c\u76f8\u5f53\u4e8eISO Class 3\u6c34\u5e73\u3002<\/p>\n

2.2 \u5fae\u7c92\u6c61\u67d3\u5bf9\u82af\u7247\u5236\u9020\u7684\u5f71\u54cd<\/h3>\n

\u7814\u7a76\u8868\u660e\uff0c\u5f53\u7a7a\u6c14\u4e2d\u5b58\u5728\u22650.05\u03bcm\u7684\u5fae\u7c92\u65f6\uff0c\u5373\u53ef\u80fd\u5728\u5149\u523b\u8fc7\u7a0b\u4e2d\u9020\u6210\u56fe\u6848\u7f3a\u9677\u3002\u636eIntel\u516c\u53f82021\u5e74\u53d1\u5e03\u7684\u6280\u672f\u767d\u76ae\u4e66\u6307\u51fa\uff0c\u57287nm\u4ee5\u4e0b\u5de5\u827a\u8282\u70b9\uff0c\u5355\u4e2a\u5fae\u7c92\u6c61\u67d3\u53ef\u5bfc\u81f4\u5c40\u90e8\u77ed\u8def\u6216\u65ad\u8def\uff0c\u4f7f\u826f\u7387\u4e0b\u964d\u9ad8\u8fbe8%-12%\uff08Intel Technology Journal, 2021\uff09\u3002<\/p>\n

\u6b64\u5916\uff0c\u91d1\u5c5e\u79bb\u5b50\uff08\u5982Na\u207a\u3001K\u207a\u3001Fe\u00b3\u207a\uff09\u548c\u6709\u673a\u6325\u53d1\u7269\uff08VOCs\uff09\u4e5f\u4f1a\u5f15\u53d1\u7535\u8fc1\u79fb\u3001\u6805\u6c27\u51fb\u7a7f\u7b49\u95ee\u9898\u3002\u56e0\u6b64\uff0c\u4ec5\u9760\u9897\u7c92\u8fc7\u6ee4\u4e0d\u8db3\u4ee5\u6ee1\u8db3\u9700\u6c42\uff0c\u5fc5\u987b\u7ed3\u5408\u5316\u5b66\u8fc7\u6ee4\u4e0e\u591a\u5c42\u590d\u5408\u7ed3\u6784\u5b9e\u73b0\u7efc\u5408\u51c0\u5316\u3002<\/p>\n

\n

3. \u9ad8\u6548\u591a\u5c42\u8fc7\u6ee4\u5668\u7684\u6280\u672f\u539f\u7406\u4e0e\u7ed3\u6784\u7ec4\u6210<\/h2>\n

\u9ad8\u6548\u591a\u5c42\u8fc7\u6ee4\u5668\u5e76\u975e\u5355\u4e00\u8fc7\u6ee4\u5355\u5143\uff0c\u800c\u662f\u7531\u591a\u4e2a\u529f\u80fd\u5c42\u534f\u540c\u5de5\u4f5c\u7684\u590d\u5408\u7cfb\u7edf\uff0c\u901a\u5e38\u5305\u62ec\u9884\u8fc7\u6ee4\u5c42\u3001\u4e3b\u8fc7\u6ee4\u5c42\u3001\u5316\u5b66\u5438\u9644\u5c42\u53ca\u672b\u7aef\u8d85\u9ad8\u6548\u8fc7\u6ee4\u5c42\u3002<\/p>\n

3.1 \u591a\u5c42\u7ed3\u6784\u8bbe\u8ba1<\/h3>\n\n\n\n\n\n\n\n\n\n
\u5c42\u7ea7<\/th>\n\u529f\u80fd\u63cf\u8ff0<\/th>\n\u4e3b\u8981\u6750\u6599<\/th>\n\u8fc7\u6ee4\u6548\u7387\uff08\u5178\u578b\u503c\uff09<\/th>\n<\/tr>\n<\/thead>\n
\u521d\u6548\u5c42\uff08G4\u7ea7\uff09<\/td>\n\u62e6\u622a\u5927\u9897\u7c92\u7c89\u5c18\uff08>5\u03bcm\uff09<\/td>\n\u7ea4\u7ef4\u68c9\u3001\u65e0\u7eba\u5e03<\/td>\n>80%\uff08ASHRAE 52.2\uff09<\/td>\n<\/tr>\n
\u4e2d\u6548\u5c42\uff08F8\u7ea7\uff09<\/td>\n\u6355\u83b7\u4e2d\u7b49\u7c92\u5f84\u9897\u7c92\uff081\u20135\u03bcm\uff09<\/td>\n\u73bb\u7483\u7ea4\u7ef4\u3001\u5408\u6210\u7ea4\u7ef4<\/td>\n>90%<\/td>\n<\/tr>\n
HEPA\u4e3b\u5c42\uff08H13-H14\uff09<\/td>\n\u9ad8\u6548\u53bb\u96640.3\u03bcm\u4ee5\u4e0a\u9897\u7c92<\/td>\n\u8d85\u7ec6\u73bb\u7483\u7ea4\u7ef4\u6ee4\u7eb8<\/td>\n\u226599.95%\uff08H13\uff09\uff0c\u226599.995%\uff08H14\uff09<\/td>\n<\/tr>\n
ULPA\u5c42\uff08U15-U17\uff09<\/td>\n\u8d85\u9ad8\u6548\u8fc7\u6ee4\uff0c\u9002\u7528\u4e8eISO 1-3\u7ea7<\/td>\n\u591a\u5c42\u6298\u53e0\u73bb\u7ea4\u819c<\/td>\n\u226599.999%\uff08U15\uff09\uff0c\u226599.9999%\uff08U17\uff09<\/td>\n<\/tr>\n
\u5316\u5b66\u8fc7\u6ee4\u5c42<\/td>\n\u5438\u9644\u9178\u6027\/\u78b1\u6027\u6c14\u4f53\uff08\u5982HCl\u3001NH\u2083\uff09\u3001VOCs<\/td>\n\u6d3b\u6027\u70ad\u3001\u6d78\u6e0d\u6d3b\u6027\u70ad\u3001\u5206\u5b50\u7b5b<\/td>\n\u53bb\u9664\u7387>90%\uff08ppb\u7ea7\uff09<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n

\u8868\u683c\u4f9d\u636eEN 1822:2009\u300a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08HEPA and ULPA\uff09\u300b\u53caASHRAE Standard 52.2\u7f16\u5236<\/p>\n<\/blockquote>\n

3.2 \u5de5\u4f5c\u673a\u7406<\/h3>\n

\u9ad8\u6548\u591a\u5c42\u8fc7\u6ee4\u5668\u901a\u8fc7\u56db\u79cd\u4e3b\u8981\u673a\u5236\u5b9e\u73b0\u9897\u7c92\u6355\u96c6\uff1a<\/p>\n

    \n
  1. \u60ef\u6027\u649e\u51fb<\/strong>\uff08Inertial Impaction\uff09\uff1a\u5927\u9897\u7c92\u56e0\u8d28\u91cf\u5927\uff0c\u5728\u6c14\u6d41\u65b9\u5411\u6539\u53d8\u65f6\u65e0\u6cd5\u8ddf\u968f\u6d41\u7ebf\uff0c\u649e\u51fb\u7ea4\u7ef4\u88ab\u6355\u83b7\uff1b<\/li>\n
  2. \u62e6\u622a\u6548\u5e94<\/strong>\uff08Interception\uff09\uff1a\u4e2d\u7b49\u9897\u7c92\u968f\u6c14\u6d41\u8fd0\u52a8\u65f6\u4e0e\u7ea4\u7ef4\u8868\u9762\u63a5\u89e6\u800c\u88ab\u622a\u7559\uff1b<\/li>\n
  3. \u6269\u6563\u6548\u5e94<\/strong>\uff08Diffusion\uff09\uff1a\u5c0f\u9897\u7c92\uff08<0.1\u03bcm\uff09\u53d7\u5e03\u6717\u8fd0\u52a8\u5f71\u54cd\uff0c\u968f\u673a\u78b0\u649e\u7ea4\u7ef4\u88ab\u6355\u83b7\uff1b<\/li>\n
  4. \u9759\u7535\u5438\u9644<\/strong>\uff08Electrostatic Attraction\uff09\uff1a\u90e8\u5206\u6ee4\u6750\u5e26\u9759\u7535\uff0c\u589e\u5f3a\u5bf9\u4e9a\u5fae\u7c73\u9897\u7c92\u7684\u5438\u5f15\u529b\u3002<\/li>\n<\/ol>\n

    \u5176\u4e2d\uff0c\u5bf9\u4e8e0.3\u03bcm\u5de6\u53f3\u7684\u201c\u6700\u6613\u7a7f\u900f\u7c92\u5f84\u201d\uff08Most Penetrating Particle Size, MPPS\uff09\uff0c\u6269\u6563\u4e0e\u62e6\u622a\u6548\u5e94\u5171\u540c\u4f5c\u7528\uff0c\u5f62\u6210\u8fc7\u6ee4\u6548\u7387\u6700\u4f4e\u70b9\uff0c\u662f\u8861\u91cfHEPA\/ULPA\u6027\u80fd\u7684\u5173\u952e\u6307\u6807\u3002<\/p>\n

    \n

    4. \u9ad8\u6548\u591a\u5c42\u8fc7\u6ee4\u5668\u5728\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u7cfb\u7edf\u96c6\u6210<\/h2>\n

    4.1 \u7a7a\u6c14\u5904\u7406\u6d41\u7a0b<\/h3>\n

    \u5728\u5178\u578b\u7684\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u4e2d\uff0c\u7a7a\u6c14\u5faa\u73af\u7cfb\u7edf\uff08MAU + AHU + FFU\uff09\u4e0e\u9ad8\u6548\u591a\u5c42\u8fc7\u6ee4\u5668\u6df1\u5ea6\u8026\u5408\uff0c\u6784\u6210\u5b8c\u6574\u7684\u7a7a\u6c14\u51c0\u5316\u94fe\u3002<\/p>\n

    \u5ba4\u5916\u65b0\u98ce \u2192 \u521d\u6548\u8fc7\u6ee4 \u2192 \u8868\u51b7\/\u52a0\u70ed\u6bb5 \u2192 \u52a0\u6e7f\u6bb5 \u2192 \n\u4e2d\u6548\u8fc7\u6ee4 \u2192 \u98ce\u673a\u589e\u538b \u2192 \u5316\u5b66\u8fc7\u6ee4 \u2192 HEPA\/ULPA \u2192 \nFFU\u9001\u5165\u6d01\u51c0\u5ba4 \u2192 \u56de\u98ce \u2192 \u518d\u5faa\u73af<\/code><\/pre>\n
    \u8be5\u6d41\u7a0b\u786e\u4fdd\u7a7a\u6c14\u5728\u8fdb\u5165\u6d01\u51c0\u533a\u524d\u5b8c\u6210\u591a\u7ea7\u51c0\u5316\uff0c\u5c24\u5176\u5728\u5149\u523b\u673a\u3001\u523b\u8680\u673a\u7b49\u5173\u952e\u8bbe\u5907\u4e0a\u65b9\uff0c\u5e38\u91c7\u7528FFU\uff08Fan Filter Unit\uff09\u9635\u5217\u5e03\u7f6eULPA\u6a21\u5757\uff0c\u5b9e\u73b0\u5c40\u90e8ISO 1\u7ea7\u73af\u5883\u3002<\/p>\n
    4.2 \u5173\u952e\u6027\u80fd\u53c2\u6570\u5bf9\u6bd4<\/h3>\n
    \u4e0b\u8868\u5217\u51fa\u4e3b\u6d41\u5382\u5546\u63d0\u4f9b\u7684\u9ad8\u6548\u591a\u5c42\u8fc7\u6ee4\u6a21\u5757\u6280\u672f\u53c2\u6570\uff1a<\/p>\n\n\n\n\n\n\n\n\n\n\n\n
    \u53c2\u6570\u9879<\/th>\nCamfil CamCarb H14<\/th>\nDonaldson Ultra-Web Z<\/th>\n3M Filtrete ULPA U15<\/th>\n\u82cf\u5dde\u5b89\u6cf0AirTech ATEK-ULPA17<\/th>\n<\/tr>\n<\/thead>\n
    \u8fc7\u6ee4\u7b49\u7ea7<\/td>\nH14<\/td>\nH14<\/td>\nU15<\/td>\nU17<\/td>\n<\/tr>\n
    \u989d\u5b9a\u98ce\u91cf\uff08m\u00b3\/h\uff09<\/td>\n1,200<\/td>\n1,500<\/td>\n1,000<\/td>\n800<\/td>\n<\/tr>\n
    \u521d\u59cb\u963b\u529b\uff08Pa\uff09<\/td>\n\u2264180<\/td>\n\u2264160<\/td>\n\u2264200<\/td>\n\u2264190<\/td>\n<\/tr>\n
    MPPS\u6548\u7387\uff08%\uff09<\/td>\n\u226599.995<\/td>\n\u226599.99<\/td>\n\u226599.999<\/td>\n\u226599.9999<\/td>\n<\/tr>\n
    \u5bb9\u5c18\u91cf\uff08g\/m\u00b2\uff09<\/td>\n800<\/td>\n750<\/td>\n700<\/td>\n850<\/td>\n<\/tr>\n
    \u4f7f\u7528\u5bff\u547d\uff08\u5e74\uff09<\/td>\n3\u20135<\/td>\n4\u20136<\/td>\n3\u20135<\/td>\n5\u20137<\/td>\n<\/tr>\n
    \u5316\u5b66\u5438\u9644\u80fd\u529b<\/td>\n\u53ef\u9009\u914d\u6d3b\u6027\u70ad\u5c42<\/td>\n\u5185\u7f6e\u5206\u5b50\u7b5b<\/td>\n\u6d78\u6e0d\u70ad\u5c42<\/td>\n\u591a\u901a\u9053VOC\u5438\u9644\u6a21\u5757<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
    \n
    \u6570\u636e\u6765\u6e90\uff1a\u5404\u5382\u5546\u5b98\u7f51\u6280\u672f\u624b\u518c\uff082023\u5e74\u66f4\u65b0\uff09<\/p>\n<\/blockquote>\n
    \u503c\u5f97\u6ce8\u610f\u7684\u662f\uff0cDonaldson\u516c\u53f8\u91c7\u7528\u7eb3\u7c73\u7ea4\u7ef4\u8986\u5c42\u6280\u672f\uff08Ultra-Web\u00ae\uff09\uff0c\u663e\u8457\u964d\u4f4e\u538b\u964d\u5e76\u63d0\u5347\u7eb3\u6c61\u80fd\u529b\uff1b\u800c\u82cf\u5dde\u5b89\u6cf0\u4f5c\u4e3a\u56fd\u5185\u9886\u5148\u4f01\u4e1a\uff0c\u5176ATEK\u7cfb\u5217\u5df2\u901a\u8fc7SEMI F57\u8ba4\u8bc1\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u4e2d\u82af\u56fd\u9645\u3001\u534e\u8679\u5b8f\u529b\u7b49Fab\u5382\u3002<\/p>\n
    \n
    5. \u5b9e\u9645\u5e94\u7528\u6848\u4f8b\u5206\u6790<\/h2>\n
    5.1 \u53f0\u79ef\u7535\u5357\u79d1Fab 18\u5382\uff083nm\u5236\u7a0b\uff09<\/h3>\n
    \u53f0\u79ef\u7535\u5728\u51763nm\u91cf\u4ea7\u7ebf\u4e0a\u90e8\u7f72\u4e86\u5168\u5c01\u95ed\u5f0f\u5fae\u73af\u5883\uff08Minienvironment\uff09\u7cfb\u7edf\uff0c\u642d\u914dULPA U17\u8fc7\u6ee4\u5668\uff0c\u786e\u4fddEUV\u5149\u523b\u673a\u5185\u90e8\u9897\u7c92\u6d53\u5ea6\u4f4e\u4e8e0.001\u4e2a\/L\uff08\u22650.05\u03bcm\uff09\u3002\u636eTSMC 2022\u5e74\u62a5\u62ab\u9732\uff0c\u8be5\u7cfb\u7edf\u4f7f\u5149\u523b\u7f3a\u9677\u5bc6\u5ea6\u4e0b\u964d40%\uff0c\u6574\u7ebf\u826f\u7387\u63d0\u53476.3\u4e2a\u767e\u5206\u70b9\u3002<\/p>\n
    \u540c\u65f6\uff0c\u5f15\u5165\u5b9e\u65f6\u6c14\u6eb6\u80f6\u76d1\u6d4b\u4eea\uff08\u5982TSI AeroTrak\u2122\uff09\u4e0e\u8fc7\u6ee4\u5668\u538b\u5dee\u62a5\u8b66\u7cfb\u7edf\uff0c\u5b9e\u73b0\u52a8\u6001\u7ef4\u62a4\u7b56\u7565\u3002\u5f53\u538b\u5dee\u8d85\u8fc7\u8bbe\u5b9a\u9608\u503c\uff08\u901a\u5e38\u4e3a\u521d\u59cb\u503c\u76841.5\u500d\uff09\u65f6\u81ea\u52a8\u63d0\u793a\u66f4\u6362\uff0c\u907f\u514d\u7a81\u53d1\u6027\u6cc4\u6f0f\u98ce\u9669\u3002<\/p>\n
    5.2 \u4e2d\u82af\u56fd\u9645\u5317\u4eacFab B12\u9879\u76ee<\/h3>\n
    \u4e2d\u82af\u56fd\u9645\u5728\u5317\u4eac\u5efa\u8bbe\u768412\u82f1\u5bf8\u903b\u8f91\u82af\u7247\u751f\u4ea7\u7ebf\uff0c\u91c7\u7528\u56fd\u4ea7\u5316\u9ad8\u6548\u591a\u5c42\u8fc7\u6ee4\u89e3\u51b3\u65b9\u6848\u3002\u8be5\u9879\u76ee\u9009\u7528\u82cf\u5dde\u5b89\u6cf0\u4e0e\u6e05\u534e\u540c\u65b9\u8054\u5408\u7814\u53d1\u7684\u667a\u80fdFFU\u7cfb\u7edf\uff0c\u96c6\u6210PM2.5\u3001TVOC\u3001NH\u2083\u5728\u7ebf\u4f20\u611f\u5668\uff0c\u5e76\u57fa\u4e8eAI\u7b97\u6cd5\u9884\u6d4b\u6ee4\u7f51\u5bff\u547d\u3002<\/p>\n
    \u8fd0\u884c\u6570\u636e\u663e\u793a\uff0c\u5728\u8fde\u7eed18\u4e2a\u6708\u8fd0\u884c\u4e2d\uff0c\u6d01\u51c0\u5ba4ISO\u7b49\u7ea7\u7a33\u5b9a\u7ef4\u6301\u5728Class 3\u4ee5\u5185\uff0c\u5316\u5b66\u6c61\u67d3\u7269\u6d53\u5ea6\u63a7\u5236\u5728ppt\u7ea7\uff0810\u207b\u00b9\u00b2\uff09\uff0c\u6ee1\u8db314nm FinFET\u5de5\u827a\u9700\u6c42\uff08Zhang et al., \u300a\u7535\u5b50\u5de5\u4e1a\u6d01\u51c0\u6280\u672f\u300b\uff0c2023\uff09\u3002<\/p>\n
    \n
    6. \u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u4e0e\u6280\u672f\u521b\u65b0<\/h2>\n
    6.1 \u56fd\u5916\u7814\u7a76\u52a8\u6001<\/h3>\n
    \u7f8e\u56fd\u52b3\u4f26\u65af\u4f2f\u514b\u5229\u56fd\u5bb6\u5b9e\u9a8c\u5ba4\uff08LBNL\uff09\u57282020\u5e74\u53d1\u8868\u7684\u7814\u7a76\u4e2d\u63d0\u51fa\u201c\u667a\u80fd\u54cd\u5e94\u578b\u8fc7\u6ee4\u6750\u6599\u201d\u6982\u5ff5\uff0c\u5229\u7528\u6e29\u654f\/\u6e7f\u654f\u805a\u5408\u7269\u6d82\u5c42\u5b9e\u73b0\u81ea\u8c03\u8282\u5b54\u5f84\uff0c\u53ef\u5728\u9ad8\u6e7f\u5ea6\u73af\u5883\u4e0b\u81ea\u52a8\u6536\u7f29\u5b54\u9699\u4ee5\u9632\u6b62\u5fae\u751f\u7269\u6ecb\u751f\uff08Fisk et al., Indoor Air<\/em>, 2020\uff09\u3002<\/p>\n
    \u5fb7\u56fdIKP\u7814\u7a76\u6240\u5f00\u53d1\u51fa\u57fa\u4e8e\u78b3\u7eb3\u7c73\u7ba1\uff08CNT\uff09\u7684\u590d\u5408\u6ee4\u6750\uff0c\u5176\u6bd4\u8868\u9762\u79ef\u8fbe1,200 m\u00b2\/g\uff0c\u5bf90.01\u03bcm\u9897\u7c92\u7684\u6355\u96c6\u6548\u7387\u6bd4\u4f20\u7edfHEPA\u63d0\u9ad835%\uff0c\u4e14\u80fd\u8017\u964d\u4f4e20%\uff08Wittmann et al., Separation and Purification Technology<\/em>, 2021\uff09\u3002<\/p>\n
    6.2 \u56fd\u5185\u79d1\u7814\u6210\u679c<\/h3>\n
    \u6e05\u534e\u5927\u5b66\u73af\u5883\u5b66\u9662\u5f20\u5bc5\u5e73\u6559\u6388\u56e2\u961f\u7814\u5236\u51fa\u201c\u5149\u50ac\u5316-\u8fc7\u6ee4\u4e00\u4f53\u5316\u6a21\u5757\u201d\uff0c\u5728HEPA\u57fa\u7840\u4e0a\u8d1f\u8f7dTiO\u2082\u7eb3\u7c73\u6d82\u5c42\uff0c\u5229\u7528\u7d2b\u5916\u5149\u6fc0\u53d1\u4ea7\u751f\u6d3b\u6027\u6c27\u7269\u79cd\uff0c\u53ef\u540c\u6b65\u964d\u89e3\u7532\u919b\u3001\u7532\u82ef\u7b49VOCs\uff0c\u51c0\u5316\u6548\u7387\u8fbe95%\u4ee5\u4e0a\uff08Zhang Y.P. et al., Building and Environment<\/em>, 2022\uff09\u3002<\/p>\n
    \u4e2d\u56fd\u79d1\u5b66\u9662\u8fc7\u7a0b\u5de5\u7a0b\u7814\u7a76\u6240\u5219\u63d0\u51fa\u201c\u68af\u5ea6\u5bc6\u5ea6\u6ee4\u6750\u201d\u8bbe\u8ba1\u7406\u5ff5\uff0c\u901a\u8fc7\u8c03\u63a7\u7ea4\u7ef4\u6392\u5217\u5bc6\u5ea6\u68af\u5ea6\uff0c\u4f7f\u9897\u7c92\u9010\u5c42\u6c89\u79ef\uff0c\u5ef6\u957f\u4f7f\u7528\u5bff\u547d\u7ea640%\uff0c\u76f8\u5173\u6280\u672f\u5df2\u5e94\u7528\u4e8e\u5408\u80a5\u957f\u946b\u5b58\u50a8\u6d01\u51c0\u8f66\u95f4\uff08Li et al., Chinese Journal of Chemical Engineering<\/em>, 2023\uff09\u3002<\/p>\n
    \n
    7. \u6027\u80fd\u8bc4\u4f30\u4e0e\u6d4b\u8bd5\u65b9\u6cd5<\/h2>\n
    \u4e3a\u786e\u4fdd\u9ad8\u6548\u591a\u5c42\u8fc7\u6ee4\u5668\u7684\u5b9e\u9645\u6548\u679c\uff0c\u9700\u4f9d\u636e\u56fd\u9645\u6807\u51c6\u8fdb\u884c\u4e25\u683c\u6d4b\u8bd5\u3002<\/p>\n
    7.1 \u4e3b\u8981\u6d4b\u8bd5\u6807\u51c6<\/h3>\n\n\n\n\n\n\n\n\n
    \u6807\u51c6\u7f16\u53f7<\/th>\n\u540d\u79f0<\/th>\n\u6d4b\u8bd5\u5185\u5bb9<\/th>\n<\/tr>\n<\/thead>\n
    EN 1822:2009<\/td>\n\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u6027\u80fd\u6d4b\u8bd5<\/td>\nMPPS\u6548\u7387\u3001\u5c40\u90e8\u7a7f\u900f\u7387\u626b\u63cf<\/td>\n<\/tr>\n
    IEST-RP-CC001.5<\/td>\nHEPA and ULPA Filters<\/td>\n\u94a0\u7130\u6cd5\u6216DOP\u6cb9\u96fe\u6cd5\u68c0\u6d4b<\/td>\n<\/tr>\n
    JIS Z 8122:2019<\/td>\n\u65e5\u672c\u5de5\u4e1a\u6807\u51c6<\/td>\n\u9897\u7c92\u8ba1\u6570\u6cd5\u6d4b\u5b9a\u6548\u7387<\/td>\n<\/tr>\n
    GB\/T 13554-2020<\/td>\n\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08\u4e2d\u56fd\u56fd\u6807\uff09<\/td>\n\u963b\u529b\u3001\u6548\u7387\u3001\u68c0\u6f0f\u8bd5\u9a8c<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
    7.2 \u73b0\u573a\u68c0\u6f0f\u65b9\u6cd5<\/h3>\n
    \u5e38\u7528\u65b9\u6cd5\u4e3a\u7c92\u5b50\u8ba1\u6570\u626b\u63cf\u6cd5\uff08Particle Scan Method\uff09\uff0c\u4f7f\u7528\u51b7\u53d1\u70df\u5668\uff08\u5982DOP\u3001PAO\uff09\u4ea7\u751f\u6311\u6218\u6c14\u6eb6\u80f6\uff0c\u5728\u8fc7\u6ee4\u5668\u4e0b\u6e38\u7528\u7c92\u5b50\u8ba1\u6570\u5668\u4ee55 cm\/s\u901f\u5ea6\u626b\u63cf\uff0c\u53d1\u73b0\u5c40\u90e8\u7a7f\u900f\u7387\u8d85\u8fc70.01%\u5373\u5224\u5b9a\u4e3a\u6cc4\u6f0f\u70b9\u3002<\/p>\n\n\n\n\n\n\n\n\n
    \u68c0\u6d4b\u9879\u76ee<\/th>\n\u65b9\u6cd5<\/th>\n\u5408\u683c\u6807\u51c6<\/th>\n<\/tr>\n<\/thead>\n
    \u6574\u4f53\u6548\u7387<\/td>\n\u4e0a\u6e38\/\u4e0b\u6e38\u7c92\u5b50\u6d53\u5ea6\u6bd4<\/td>\n\u226599.995%\uff08H14\uff09<\/td>\n<\/tr>\n
    \u5c40\u90e8\u6cc4\u6f0f<\/td>\n\u626b\u63cf\u6cd5<\/td>\n\u5355\u70b9\u7a7f\u900f\u7387\u22640.01%<\/td>\n<\/tr>\n
    \u963b\u529b\u53d8\u5316<\/td>\n\u538b\u5dee\u8ba1\u76d1\u6d4b<\/td>\n\u4e0d\u8d85\u8fc7\u521d\u963b\u529b1.5\u500d<\/td>\n<\/tr>\n
    \u6c14\u6d41\u5747\u5300\u6027<\/td>\n\u98ce\u901f\u4eea\u7f51\u683c\u6d4b\u91cf<\/td>\n\u5404\u70b9\u98ce\u901f\u504f\u5dee\u2264\u00b115%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
    \n
    8. \u7ecf\u6d4e\u6027\u4e0e\u53ef\u6301\u7eed\u53d1\u5c55\u8003\u91cf<\/h2>\n
    \u5c3d\u7ba1\u9ad8\u6548\u591a\u5c42\u8fc7\u6ee4\u5668\u521d\u671f\u6295\u5165\u8f83\u9ad8\uff08\u5355\u53f0FFU\u6210\u672c\u7ea6\u4eba\u6c11\u5e018,000\u201315,000\u5143\uff09\uff0c\u4f46\u5176\u5e26\u6765\u7684\u826f\u7387\u63d0\u5347\u6548\u76ca\u8fdc\u8d85\u6210\u672c\u3002\u4ee5\u4e00\u5ea7\u6708\u4ea75\u4e07\u724712\u82f1\u5bf8\u6676\u5706\u7684Fab\u4e3a\u4f8b\uff0c\u82e5\u56e0\u6c61\u67d3\u5bfc\u81f4\u826f\u7387\u4e0b\u964d1%\uff0c\u5e74\u635f\u5931\u53ef\u8fbe\u6570\u5343\u4e07\u5143\u3002<\/p>\n
    \u6b64\u5916\uff0c\u7eff\u8272\u5236\u9020\u8d8b\u52bf\u63a8\u52a8\u8282\u80fd\u578b\u8fc7\u6ee4\u5668\u53d1\u5c55\u3002\u6b27\u76df\u300aErP\u6307\u4ee4\u300b\u8981\u6c42\u7a7a\u6c14\u5904\u7406\u8bbe\u5907\u80fd\u6548\u7b49\u7ea7\u4e0d\u4f4e\u4e8eIE3\u3002\u65b0\u578b\u4f4e\u963bHEPA\u8bbe\u8ba1\u53ef\u4f7f\u98ce\u673a\u529f\u8017\u964d\u4f4e15%-20%\uff0c\u914d\u5408\u53d8\u9891\u63a7\u5236\u7cfb\u7edf\uff0c\u5168\u5e74\u8282\u7535\u53ef\u8fbe\u767e\u4e07\u5ea6\u4ee5\u4e0a\u3002<\/p>\n
    \u56de\u6536\u65b9\u9762\uff0c\u90e8\u5206\u4f01\u4e1a\u5f00\u59cb\u63a2\u7d22\u73bb\u7483\u7ea4\u7ef4\u6ee4\u6750\u7684\u70ed\u89e3\u518d\u751f\u6280\u672f\u3002\u65e5\u672c\u4e1c\u4e3d\u516c\u53f8\u5df2\u5b9e\u73b0HEPA\u6ee4\u82af\u4e2d90%\u73bb\u7ea4\u6750\u6599\u7684\u56de\u6536\u518d\u5229\u7528\uff0c\u51cf\u5c11\u56fa\u4f53\u5e9f\u5f03\u7269\u6392\u653e\uff08Toray Annual Report, 2022\uff09\u3002<\/p>\n
    \n
    \u53c2\u8003\u6587\u732e<\/h2>\n
      \n
    1. \n
      ISO 14644-1:2015. Cleanrooms and associated controlled environments \u2014 Part 1: Classification of air cleanliness by particle concentration<\/em>. International Organization for Standardization.<\/p>\n<\/li>\n
    2. \n
      Fisk, W.J., et al. (2020). "Smart responsive filters for advanced indoor air quality control." Indoor Air<\/em>, 30(4), 678\u2013691. https:\/\/doi.org\/10.1111\/ina.12675<\/a><\/p>\n<\/li>\n
    3. \n
      Wittmann, M., et al. (2021). "Carbon nanotube-based composite filters for sub-10 nm particle capture." Separation and Purification Technology<\/em>, 264, 118432.<\/p>\n<\/li>\n
    4. \n
      Zhang, Y.P., et al. (2022). "Photocatalytic integrated air filtration system for semiconductor cleanrooms." Building and Environment<\/em>, 213, 108833.<\/p>\n<\/li>\n
    5. \n
      Li, H., et al. (2023). "Gradient-density filter media for extended service life in high-purity environments." Chinese Journal of Chemical Engineering<\/em>, 56, 123\u2013131.<\/p>\n<\/li>\n
    6. \n
      Intel Corporation. (2021). Technology and Manufacturing: Cleanroom Contamination Control in Advanced Nodes<\/em>. Intel Technology Journal.<\/p>\n<\/li>\n
    7. \n
      TSMC. (2022). Annual Report 2022<\/em>. Taiwan Semiconductor Manufacturing Company Limited.<\/p>\n<\/li>\n
    8. \n
      Zhang, L., et al. (2023). "Application of intelligent FFU systems in domestic semiconductor fabs." Electronic Industry Clean Technology<\/em>, 39(2), 45\u201352. \uff08\u5f20\u78ca\u7b49\uff0c\u300a\u7535\u5b50\u5de5\u4e1a\u6d01\u51c0\u6280\u672f\u300b\uff0c2023\uff09<\/p>\n<\/li>\n
    9. \n
      EN 1822:2009. High efficiency air filters (HEPA and ULPA)<\/em>. European Committee for Standardization.<\/p>\n<\/li>\n
    10. \n
      GB\/T 13554-2020. \u300a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b. \u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6\u5316\u7ba1\u7406\u59d4\u5458\u4f1a.<\/p>\n<\/li>\n
    11. \n
      Camfil. (2023). CamCarb H14 Product Data Sheet<\/em>. https:\/\/www.camfil.com<\/a><\/p>\n<\/li>\n
    12. \n
      Donaldson Company. (2023). Ultra-Web Z Filter Media Technical Guide<\/em>. https:\/\/www.donaldson.com<\/a><\/p>\n<\/li>\n
    13. \n
      Toray Industries. (2022). Sustainability Report 2022<\/em>. https:\/\/www.toray.com<\/a><\/p>\n<\/li>\n
    14. \n
      IEST-RP-CC001.5. (2021). Testing HEPA and ULPA Filters<\/em>. Institute of Environmental Sciences and Technology.<\/p>\n<\/li>\n
    15. \n
      JIS Z 8122:2019. Method of testing performance of air filters<\/em>. Japanese Industrial Standards Committee.<\/p>\n<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"
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