{"id":16815,"date":"2025-09-11T12:47:51","date_gmt":"2025-09-11T04:47:51","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=16815"},"modified":"2025-09-11T12:47:51","modified_gmt":"2025-09-11T04:47:51","slug":"%e4%bd%8e%e9%98%bb%e9%ab%98%e6%95%88%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e6%97%a0%e5%b0%98%e8%bd%a6%e9%97%b4%e4%b8%ad%e7%9a%84%e5%88%86%e7%ba%a7%e9%85%8d%e7%bd%ae%e6%96%b9","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=16815","title":{"rendered":"\u4f4e\u963b\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u65e0\u5c18\u8f66\u95f4\u4e2d\u7684\u5206\u7ea7\u914d\u7f6e\u65b9\u6848"},"content":{"rendered":"<h1>\u4f4e\u963b\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u65e0\u5c18\u8f66\u95f4\u4e2d\u7684\u5206\u7ea7\u914d\u7f6e\u65b9\u6848<\/h1>\n<h2>\u5f15\u8a00<\/h2>\n<p>\u968f\u7740\u96c6\u6210\u7535\u8def\uff08IC\uff09\u5236\u9020\u5de5\u827a\u4e0d\u65ad\u5411\u66f4\u5c0f\u7ebf\u5bbd\u53d1\u5c55\uff0c\u59827nm\u30015nm\u751a\u81f33nm\u8282\u70b9\u7684\u63a8\u8fdb\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u6d01\u51c0\u5ea6\u7684\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u534a\u5bfc\u4f53\u65e0\u5c18\u8f66\u95f4\u4f5c\u4e3a\u82af\u7247\u5236\u9020\u7684\u6838\u5fc3\u573a\u6240\uff0c\u5176\u7a7a\u6c14\u8d28\u91cf\u76f4\u63a5\u5173\u7cfb\u5230\u4ea7\u54c1\u826f\u7387\u4e0e\u53ef\u9760\u6027\u3002\u6839\u636e\u56fd\u9645\u6807\u51c6ISO 14644-1\u300a\u6d01\u51c0\u5ba4\u53ca\u76f8\u5173\u53d7\u63a7\u73af\u5883 \u7b2c1\u90e8\u5206\uff1a\u7a7a\u6c14\u6d01\u51c0\u5ea6\u7b49\u7ea7\u300b\uff0c\u6d01\u51c0\u5ba4\u6309\u6bcf\u7acb\u65b9\u7c73\u7a7a\u6c14\u4e2d\u22650.1\u03bcm\u81f3\u22650.5\u03bcm\u9897\u7c92\u7269\u6570\u91cf\u5212\u5206\u4e3aISO Class 1\u81f3ISO Class 9\u5171\u4e5d\u4e2a\u7b49\u7ea7\u3002\u5176\u4e2d\uff0c\u9ad8\u7aef\u534a\u5bfc\u4f53\u5236\u9020\u666e\u904d\u8981\u6c42\u8fbe\u5230ISO Class 3\u6216\u66f4\u9ad8\u6c34\u5e73\u3002<\/p>\n<p>\u4e3a\u5b9e\u73b0\u5982\u6b64\u9ad8\u6807\u51c6\u7684\u7a7a\u6c14\u51c0\u5316\uff0c\u9ad8\u6548\u8fc7\u6ee4\u7cfb\u7edf\u6210\u4e3a\u5173\u952e\u57fa\u7840\u8bbe\u65bd\u4e4b\u4e00\u3002\u8fd1\u5e74\u6765\uff0c\u201c\u4f4e\u963b\u9ad8\u6548\u8fc7\u6ee4\u5668\u201d\u56e0\u5176\u5728\u4fdd\u6301\u9ad8\u8fc7\u6ee4\u6548\u7387\u7684\u540c\u65f6\u663e\u8457\u964d\u4f4e\u8fd0\u884c\u538b\u964d\uff0c\u4ece\u800c\u51cf\u5c11\u98ce\u673a\u80fd\u8017\u548c\u8fd0\u7ef4\u6210\u672c\uff0c\u53d7\u5230\u884c\u4e1a\u5e7f\u6cdb\u5173\u6ce8\u3002\u672c\u6587\u5c06\u7cfb\u7edf\u9610\u8ff0\u4f4e\u963b\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u65e0\u5c18\u8f66\u95f4\u4e2d\u7684\u5e94\u7528\u80cc\u666f\u3001\u6280\u672f\u539f\u7406\u3001\u6027\u80fd\u53c2\u6570\uff0c\u5e76\u63d0\u51fa\u57fa\u4e8e\u4e0d\u540c\u529f\u80fd\u533a\u57df\u7684\u5206\u7ea7\u914d\u7f6e\u65b9\u6848\uff0c\u7ed3\u5408\u56fd\u5185\u5916\u7814\u7a76\u6210\u679c\u4e0e\u5de5\u7a0b\u5b9e\u8df5\u6848\u4f8b\uff0c\u6784\u5efa\u79d1\u5b66\u5408\u7406\u7684\u7a7a\u6c14\u5904\u7406\u4f53\u7cfb\u3002<\/p>\n<hr \/>\n<h2>\u4e00\u3001\u4f4e\u963b\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u6280\u672f\u539f\u7406\u4e0e\u6838\u5fc3\u4f18\u52bf<\/h2>\n<h3>\uff08\u4e00\uff09\u5b9a\u4e49\u4e0e\u5206\u7c7b<\/h3>\n<p>\u4f4e\u963b\u9ad8\u6548\u8fc7\u6ee4\u5668\uff08Low-Resistance High-Efficiency Air Filter\uff09\u662f\u6307\u5728\u6ee1\u8db3HEPA\uff08High Efficiency Particulate Air\uff09\u6216ULPA\uff08Ultra-Low Penetration Air\uff09\u8fc7\u6ee4\u6807\u51c6\u7684\u524d\u63d0\u4e0b\uff0c\u901a\u8fc7\u4f18\u5316\u6ee4\u6750\u7ed3\u6784\u3001\u6c14\u6d41\u901a\u9053\u8bbe\u8ba1\u53ca\u652f\u6491\u6846\u67b6\u7b49\u65b9\u5f0f\uff0c\u663e\u8457\u964d\u4f4e\u521d\u59cb\u963b\u529b\u4e0e\u7ec8\u963b\u529b\u7684\u4e00\u7c7b\u7a7a\u6c14\u8fc7\u6ee4\u8bbe\u5907\u3002\u4f9d\u636e\u7f8e\u56fdDOE\uff08Department of Energy\uff09\u6807\u51c6\uff0cHEPA\u8fc7\u6ee4\u5668\u9700\u5bf90.3\u03bcm\u7c92\u5b50\u5b9e\u73b0\u81f3\u5c1199.97%\u7684\u6355\u96c6\u6548\u7387\uff1b\u800cULPA\u5219\u8981\u6c42\u5bf90.12\u03bcm\u7c92\u5b50\u8fbe\u523099.999%\u4ee5\u4e0a\u7684\u8fc7\u6ee4\u6548\u7387\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u8fc7\u6ee4\u5668\u7c7b\u578b<\/th>\n<th>\u6807\u51c6\u4f9d\u636e<\/th>\n<th>\u7c92\u5f84\uff08\u03bcm\uff09<\/th>\n<th>\u6700\u4f4e\u6548\u7387\uff08%\uff09<\/th>\n<th>\u521d\u59cb\u963b\u529b\uff08Pa\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>HEPA H13<\/td>\n<td>EN 1822:2009 \/ IEST RP-CC001<\/td>\n<td>0.3<\/td>\n<td>\u226599.95<\/td>\n<td>\u2264220<\/td>\n<\/tr>\n<tr>\n<td>HEPA H14<\/td>\n<td>EN 1822:2009<\/td>\n<td>0.3<\/td>\n<td>\u226599.995<\/td>\n<td>\u2264250<\/td>\n<\/tr>\n<tr>\n<td>ULPA U15<\/td>\n<td>EN 1822:2009<\/td>\n<td>0.12<\/td>\n<td>\u226599.999<\/td>\n<td>\u2264280<\/td>\n<\/tr>\n<tr>\n<td>ULPA U16<\/td>\n<td>EN 1822:2009<\/td>\n<td>0.12<\/td>\n<td>\u226599.9995<\/td>\n<td>\u2264300<\/td>\n<\/tr>\n<tr>\n<td>\u4f4e\u963b\u578bULPA<\/td>\n<td>\u81ea\u5b9a\u4e49\/\u5382\u5546\u89c4\u683c<\/td>\n<td>0.1\u20130.3<\/td>\n<td>\u226599.999<\/td>\n<td><strong>\u2264180<\/strong><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6ce8\uff1a\u6570\u636e\u53c2\u8003EN 1822:2009\u300aHigh efficiency air filters (HEPA and ULPA)\u300b\u53ca\u56fd\u5185\u300aGB\/T 13554-2020 \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b\u6807\u51c6\u3002<\/p>\n<\/blockquote>\n<h3>\uff08\u4e8c\uff09\u6280\u672f\u5b9e\u73b0\u8def\u5f84<\/h3>\n<p>\u4f4e\u963b\u9ad8\u6548\u8fc7\u6ee4\u5668\u4e3b\u8981\u901a\u8fc7\u4ee5\u4e0b\u51e0\u79cd\u65b9\u5f0f\u5b9e\u73b0\u538b\u964d\u4f18\u5316\uff1a<\/p>\n<ol>\n<li>\n<p><strong>\u5fae\u7ea4\u7ef4\u76f4\u5f84\u51cf\u5c0f\u4e0e\u5206\u5e03\u5747\u5300\u5316<\/strong><br \/>\n\u91c7\u7528\u7eb3\u7c73\u7ea7\u73bb\u7483\u7ea4\u7ef4\u6216\u805a\u4e19\u70ef\u7194\u55b7\u6750\u6599\uff0c\u63d0\u5347\u5355\u4f4d\u9762\u79ef\u7ea4\u7ef4\u5bc6\u5ea6\uff0c\u5728\u4e0d\u589e\u52a0\u539a\u5ea6\u7684\u60c5\u51b5\u4e0b\u589e\u5f3a\u62e6\u622a\u80fd\u529b\uff08Liu et al., 2021\uff0c\u300aJournal of Aerosol Science\u300b\uff09\u3002<\/p>\n<\/li>\n<li>\n<p><strong>\u4e09\u7ef4\u7acb\u4f53\u8936\u76b1\u7ed3\u6784\u8bbe\u8ba1<\/strong><br \/>\n\u589e\u52a0\u6709\u6548\u8fc7\u6ee4\u9762\u79ef\uff08A\/F\u6bd4\u503c\u53ef\u8fbe8\u201312\uff09\uff0c\u4f7f\u6c14\u6d41\u5206\u5e03\u66f4\u5747\u5300\uff0c\u964d\u4f4e\u5c40\u90e8\u98ce\u901f\uff0c\u4ece\u800c\u51cf\u5c11\u6469\u64e6\u963b\u529b\uff08Zhang &amp; Wang, 2020\uff0c\u300aBuilding and Environment\u300b\uff09\u3002<\/p>\n<\/li>\n<li>\n<p><strong>\u68af\u5ea6\u8fc7\u6ee4\u5c42\u7ed3\u6784\uff08Gradient Density Media\uff09<\/strong><br \/>\n\u5916\u5c42\u7c97\u5b54\u6355\u83b7\u5927\u9897\u7c92\uff0c\u5185\u5c42\u7ec6\u5bc6\u7ed3\u6784\u6355\u6349\u4e9a\u5fae\u7c73\u7c92\u5b50\uff0c\u907f\u514d\u8868\u5c42\u5feb\u901f\u5835\u585e\uff0c\u5ef6\u957f\u4f7f\u7528\u5bff\u547d\u5e76\u7ef4\u6301\u4f4e\u963b\u72b6\u6001\uff08Chen et al., 2019\uff0c\u300aSeparation and Purification Technology\u300b\uff09\u3002<\/p>\n<\/li>\n<li>\n<p><strong>\u667a\u80fd\u652f\u6491\u7f51\u67b6\u4e0e\u8fb9\u6846\u5bc6\u5c01\u6280\u672f<\/strong><br \/>\n\u4f7f\u7528\u8f7b\u8d28\u94dd\u5408\u91d1\u6216\u590d\u5408\u5851\u6599\u8fb9\u6846\uff0c\u914d\u5408\u53cc\u7ec4\u5206\u805a\u6c28\u916f\u5bc6\u5c01\u80f6\uff0c\u786e\u4fdd\u957f\u671f\u8fd0\u884c\u4e2d\u4e0d\u53d8\u5f62\u3001\u4e0d\u6cc4\u6f0f\u3002<\/p>\n<\/li>\n<\/ol>\n<hr \/>\n<h2>\u4e8c\u3001\u534a\u5bfc\u4f53\u65e0\u5c18\u8f66\u95f4\u5bf9\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf\u7684\u7279\u6b8a\u9700\u6c42<\/h2>\n<h3>\uff08\u4e00\uff09\u6d01\u51c0\u7b49\u7ea7\u8981\u6c42<\/h3>\n<p>\u73b0\u4ee3\u6676\u5706\u5382\uff08Fab\uff09\u901a\u5e38\u5305\u542b\u591a\u4e2a\u529f\u80fd\u533a\uff0c\u5404\u533a\u57df\u5bf9\u6d01\u51c0\u5ea6\u8981\u6c42\u5dee\u5f02\u663e\u8457\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u533a\u57df\u540d\u79f0<\/th>\n<th>\u4e3b\u8981\u5de5\u827a<\/th>\n<th>ISO\u6d01\u51c0\u7b49\u7ea7<\/th>\n<th>\u5178\u578b\u6362\u6c14\u6b21\u6570\uff08ACH\uff09<\/th>\n<th>\u5173\u952e\u6c61\u67d3\u7269\u63a7\u5236\u76ee\u6807<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5149\u523b\u533a\uff08Lithography\uff09<\/td>\n<td>\u5149\u523b\u673a\u66dd\u5149<\/td>\n<td>ISO Class 3<\/td>\n<td>600\u2013900<\/td>\n<td>\u22650.05\u03bcm\u9897\u7c92 &lt; 10#\/m\u00b3<\/td>\n<\/tr>\n<tr>\n<td>\u8680\u523b\u4e0e\u6c89\u79ef\u533a<\/td>\n<td>PVD\/CVD\/ALD\u7b49\u8584\u819c\u5de5\u827a<\/td>\n<td>ISO Class 4<\/td>\n<td>400\u2013600<\/td>\n<td>\u22650.1\u03bcm\u9897\u7c92 &lt; 100#\/m\u00b3<\/td>\n<\/tr>\n<tr>\n<td>\u6269\u6563\u533a<\/td>\n<td>\u79bb\u5b50\u6ce8\u5165\u3001\u70ed\u5904\u7406<\/td>\n<td>ISO Class 5<\/td>\n<td>300\u2013400<\/td>\n<td>\u22650.3\u03bcm\u9897\u7c92 &lt; 1,000#\/m\u00b3<\/td>\n<\/tr>\n<tr>\n<td>\u6e05\u6d17\u533a<\/td>\n<td>\u6676\u5706\u6e05\u6d17\u3001\u53bb\u80f6<\/td>\n<td>ISO Class 6<\/td>\n<td>200\u2013300<\/td>\n<td>\u22650.5\u03bcm\u9897\u7c92 &lt; 10,000#\/m\u00b3<\/td>\n<\/tr>\n<tr>\n<td>\u66f4\u8863\u5ba4\u4e0e\u7f13\u51b2\u8d70\u5eca<\/td>\n<td>\u4eba\u5458\u8fdb\u51fa\u8fc7\u6e21<\/td>\n<td>ISO Class 7\u20138<\/td>\n<td>150\u2013200<\/td>\n<td>\u63a7\u5236\u4eba\u4f53\u53d1\u5c18<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1aSEMI F21-1101\uff08Semiconductor Equipment and Materials International\uff09<\/p>\n<\/blockquote>\n<p>\u503c\u5f97\u6ce8\u610f\u7684\u662f\uff0c\u5149\u523b\u533a\u5bf9\u5206\u5b50\u7ea7\u6c61\u67d3\uff08AMC, Airborne Molecular Contamination\uff09\u4e5f\u6781\u4e3a\u654f\u611f\uff0c\u9700\u914d\u5408\u5316\u5b66\u8fc7\u6ee4\u5668\u4f7f\u7528\u3002<\/p>\n<h3>\uff08\u4e8c\uff09\u80fd\u8017\u4e0e\u8fd0\u884c\u7a33\u5b9a\u6027\u6311\u6218<\/h3>\n<p>\u4f20\u7edfULPA\u8fc7\u6ee4\u5668\u521d\u963b\u529b\u5e38\u8fbe280\u2013350Pa\uff0c\u5728\u9ad8\u98ce\u91cf\u7cfb\u7edf\u4e2d\u5bfc\u81f4\u98ce\u673a\u529f\u8017\u5de8\u5927\u3002\u636e\u6e05\u534e\u5927\u5b66\u5efa\u7b51\u8282\u80fd\u7814\u7a76\u4e2d\u5fc3\u6d4b\u7b97\uff0c\u67d012\u82f1\u5bf8\u6676\u5706\u5382\u5168\u5e74\u7a7a\u8c03\u7cfb\u7edf\u7535\u8017\u7ea6\u5360\u603b\u7528\u7535\u91cf\u768445%\uff0c\u5176\u4e2d\u98ce\u673a\u80fd\u8017\u5360\u6bd4\u8d85\u8fc760%\uff08\u6c5f\u4ebf\u9662\u58eb\u56e2\u961f\uff0c2022\uff09\u3002\u56e0\u6b64\uff0c\u63a8\u5e7f\u4f4e\u963b\u9ad8\u6548\u8fc7\u6ee4\u5668\u5177\u6709\u663e\u8457\u8282\u80fd\u6f5c\u529b\u3002<\/p>\n<p>\u6b64\u5916\uff0c\u8fc7\u6ee4\u5668\u66f4\u6362\u9891\u7387\u76f4\u63a5\u5f71\u54cd\u505c\u673a\u65f6\u95f4\u4e0e\u7ef4\u62a4\u6210\u672c\u3002\u4f4e\u963b\u8bbe\u8ba1\u53ef\u5ef6\u957f\u5bb9\u5c18\u91cf\u8fbe30%\u4ee5\u4e0a\uff0c\u5e73\u5747\u5bff\u547d\u7531\u5e38\u89c418\u4e2a\u6708\u5ef6\u957f\u81f324\u4e2a\u6708\u4ee5\u4e0a\uff08Samsung Electronics\u5185\u90e8\u62a5\u544a\uff0c2023\uff09\u3002<\/p>\n<hr \/>\n<h2>\u4e09\u3001\u4f4e\u963b\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u5206\u7ea7\u914d\u7f6e\u7b56\u7565<\/h2>\n<h3>\uff08\u4e00\uff09\u4e09\u7ea7\u8fc7\u6ee4\u67b6\u6784\u8bbe\u8ba1<\/h3>\n<p>\u4e3a\u517c\u987e\u6548\u7387\u3001\u6210\u672c\u4e0e\u53ef\u9760\u6027\uff0c\u5efa\u8bae\u5728\u534a\u5bfc\u4f53\u65e0\u5c18\u8f66\u95f4\u91c7\u7528\u201c\u9884\u8fc7\u6ee4\u2014\u4e2d\u6548\u8fc7\u6ee4\u2014\u7ec8\u7aef\u9ad8\u6548\u8fc7\u6ee4\u201d\u7684\u4e09\u7ea7\u914d\u7f6e\u6a21\u5f0f\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5c42\u7ea7<\/th>\n<th>\u529f\u80fd\u5b9a\u4f4d<\/th>\n<th>\u63a8\u8350\u578b\u53f7<\/th>\n<th>\u8fc7\u6ee4\u6548\u7387\uff08\u8ba1\u91cd\u6cd5\uff09<\/th>\n<th>\u521d\u59cb\u963b\u529b\uff08Pa\uff09<\/th>\n<th>\u66f4\u6362\u5468\u671f<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>G4\u7ea7\u9884\u8fc7\u6ee4\u5668<\/td>\n<td>\u6355\u83b7\u6bdb\u53d1\u3001\u7eb1\u7ebf\u7b49\u5927\u9897\u7c92<\/td>\n<td>\u5e73\u677f\u5f0f\u5408\u6210\u7ea4\u7ef4\u888b\u6ee4\u5668<\/td>\n<td>\u226590% (@5\u03bcm)<\/td>\n<td>\u226450<\/td>\n<td>3\u20136\u4e2a\u6708<\/td>\n<\/tr>\n<tr>\n<td>F8\u7ea7\u4e2d\u6548\u8fc7\u6ee4\u5668<\/td>\n<td>\u62e6\u622a\u82b1\u7c89\u3001\u7c89\u5c18\u7b49\u4e2d\u7b49\u9897\u7c92<\/td>\n<td>V\u578b\u888b\u5f0f\u8fc7\u6ee4\u5668<\/td>\n<td>\u226585% (@0.4\u03bcm MPPS)<\/td>\n<td>\u2264120<\/td>\n<td>12\u4e2a\u6708<\/td>\n<\/tr>\n<tr>\n<td>H14\/U15\u4f4e\u963b\u9ad8\u6548\u8fc7\u6ee4\u5668<\/td>\n<td>\u7ec8\u7aef\u51c0\u5316\uff0c\u4fdd\u969c\u6d01\u51c0\u5ea6<\/td>\n<td>\u4f4e\u963bULPA\u7bb1\u5f0f\u8fc7\u6ee4\u5668<\/td>\n<td>\u226599.995% (@0.12\u03bcm)<\/td>\n<td><strong>\u2264180<\/strong><\/td>\n<td>24\u4e2a\u6708<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u8be5\u67b6\u6784\u53ef\u6709\u6548\u4fdd\u62a4\u672b\u7aef\u9ad8\u6548\u8fc7\u6ee4\u5668\uff0c\u9632\u6b62\u63d0\u524d\u5835\u585e\uff0c\u63d0\u5347\u6574\u4f53\u7cfb\u7edf\u7ecf\u6d4e\u6027\u3002<\/p>\n<h3>\uff08\u4e8c\uff09\u5206\u533a\u5dee\u5f02\u5316\u914d\u7f6e\u65b9\u6848<\/h3>\n<p>\u6839\u636e\u4e0d\u540c\u5de5\u827a\u533a\u57df\u7684\u6d01\u51c0\u5ea6\u4e0e\u6c14\u6d41\u7ec4\u7ec7\u7279\u70b9\uff0c\u5236\u5b9a\u7cbe\u7ec6\u5316\u914d\u7f6e\u7b56\u7565\uff1a<\/p>\n<h4>1. \u5149\u523b\u533a\uff08ISO Class 3\uff09<\/h4>\n<ul>\n<li><strong>\u8fc7\u6ee4\u5668\u7c7b\u578b<\/strong>\uff1aU15\u4f4e\u963bULPA\u8fc7\u6ee4\u5668\uff08MPPS\u6548\u7387\u226599.999%\uff09<\/li>\n<li><strong>\u5b89\u88c5\u5f62\u5f0f<\/strong>\uff1aFFU\uff08Fan Filter Unit\uff09\u9635\u5217\u540a\u9876\u5e03\u7f6e<\/li>\n<li><strong>\u9762\u98ce\u901f\u63a7\u5236<\/strong>\uff1a0.3\u20130.45 m\/s \u5782\u76f4\u6d41<\/li>\n<li><strong>\u9644\u52a0\u63aa\u65bd<\/strong>\uff1a\n<ul>\n<li>\u914d\u7f6eAMC\u5316\u5b66\u8fc7\u6ee4\u6a21\u5757\uff08\u6d3b\u6027\u70ad+\u5206\u5b50\u7b5b\uff09<\/li>\n<li>\u5b9e\u65bd\u5728\u7ebfPAO\u68c0\u6f0f\u76d1\u6d4b\uff08\u7b26\u5408IEST-RP-CC034.1\uff09<\/li>\n<li>\u8bbe\u7f6e\u5197\u4f59FFU\u5355\u5143\uff0c\u652f\u6301\u4e0d\u505c\u673a\u66f4\u6362<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<blockquote>\n<p>\u53c2\u8003\u6848\u4f8b\uff1a\u53f0\u79ef\u7535\u5357\u4eac\u5382TSMC-Nanjing Fab 16\uff0c\u91c7\u7528Camfil NanoPhaze\u00ae\u7cfb\u5217\u4f4e\u963bULPA\uff0c\u5b9e\u6d4b\u963b\u529b\u4e0b\u964d27%\uff0c\u5e74\u8282\u7535\u7ea61,200\u4e07kWh\uff08TSMC Sustainability Report, 2023\uff09\u3002<\/p>\n<\/blockquote>\n<h4>2. \u8680\u523b\u4e0e\u8584\u819c\u6c89\u79ef\u533a\uff08ISO Class 4\uff09<\/h4>\n<ul>\n<li><strong>\u8fc7\u6ee4\u5668\u7c7b\u578b<\/strong>\uff1aH14\u4f4e\u963bHEPA\u8fc7\u6ee4\u5668<\/li>\n<li><strong>\u5b89\u88c5\u65b9\u5f0f<\/strong>\uff1a\u5e72\u76d8\u7ba1+FFU\u7ec4\u5408\u7cfb\u7edf<\/li>\n<li><strong>\u6c14\u6d41\u7ec4\u7ec7<\/strong>\uff1a\u5782\u76f4\u5355\u5411\u6d41\u4e3a\u4e3b\uff0c\u5c40\u90e8\u8865\u507f\u9001\u98ce<\/li>\n<li><strong>\u7279\u6b8a\u8981\u6c42<\/strong>\uff1a\n<ul>\n<li>\u6297\u9178\u78b1\u8150\u8680\u6d82\u5c42\uff08\u5e94\u5bf9HF\u3001Cl\u2082\u7b49\u5de5\u827a\u5e9f\u6c14\u53cd\u7a9c\uff09<\/li>\n<li>\u652f\u6301\u9ad8\u6e29\u9ad8\u6e7f\u73af\u5883\uff08RH 45\u00b15%, T=22\u00b11\u2103\uff09<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<h4>3. \u6269\u6563\u533a\u4e0e\u6e05\u6d17\u533a\uff08ISO Class 5\u20136\uff09<\/h4>\n<ul>\n<li><strong>\u8fc7\u6ee4\u5668\u7c7b\u578b<\/strong>\uff1aH13\u4f4e\u963bHEPA\u6216\u9ad8\u6027\u80fdF9\u4e2d\u6548\u8fc7\u6ee4\u5668<\/li>\n<li><strong>\u7cfb\u7edf\u914d\u7f6e<\/strong>\uff1a\u96c6\u4e2d\u5f0fAHU + \u9759\u538b\u7bb1\u9001\u98ce<\/li>\n<li><strong>\u8282\u80fd\u7b56\u7565<\/strong>\uff1a\n<ul>\n<li>\u91c7\u7528\u53d8\u9891\u98ce\u673a\u8054\u52a8DDC\u63a7\u5236\u7cfb\u7edf<\/li>\n<li>\u8bbe\u7f6e\u56de\u98ce\u8fc7\u6ee4\u6bb5\u4ee5\u56de\u6536\u51b7\u91cf<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<h4>4. \u7f13\u51b2\u533a\u4e0e\u66f4\u8863\u5ba4\uff08ISO Class 7\u20138\uff09<\/h4>\n<ul>\n<li><strong>\u8fc7\u6ee4\u5668\u7c7b\u578b<\/strong>\uff1aF8\u2013F9\u888b\u5f0f\u4e2d\u6548\u8fc7\u6ee4\u5668<\/li>\n<li><strong>\u8f85\u52a9\u624b\u6bb5<\/strong>\uff1a\n<ul>\n<li>\u98ce\u6dcb\u5ba4\u914d\u7f6eG4+F8\u4e24\u7ea7\u8fc7\u6ee4<\/li>\n<li>\u5730\u9762\u8bbe\u7f6e\u7c98\u5c18\u57ab\uff0c\u63a7\u5236\u978b\u5e95\u5e26\u5165\u9897\u7c92<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<hr \/>\n<h2>\u56db\u3001\u5173\u952e\u4ea7\u54c1\u53c2\u6570\u5bf9\u6bd4\u5206\u6790<\/h2>\n<p>\u4e0b\u8868\u9009\u53d6\u5e02\u573a\u4e0a\u4e3b\u6d41\u54c1\u724c\u7684\u4f4e\u963b\u9ad8\u6548\u8fc7\u6ee4\u5668\u8fdb\u884c\u6a2a\u5411\u6bd4\u8f83\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u54c1\u724c<\/th>\n<th>\u578b\u53f7<\/th>\n<th>\u6807\u51c6\u7b49\u7ea7<\/th>\n<th>\u989d\u5b9a\u98ce\u91cf\uff08m\u00b3\/h\uff09<\/th>\n<th>\u521d\u59cb\u963b\u529b\uff08Pa\uff09<\/th>\n<th>MPPS\u6548\u7387\uff08%\uff09<\/th>\n<th>\u5bb9\u5c18\u91cf\uff08g\/m\u00b2\uff09<\/th>\n<th>\u6846\u67b6\u6750\u8d28<\/th>\n<th>\u9002\u7528\u6e29\u5ea6\u8303\u56f4\uff08\u2103\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>Camfil (\u745e\u5178)<\/td>\n<td>NanoPhaze 95<\/td>\n<td>U15<\/td>\n<td>1,080<\/td>\n<td>165<\/td>\n<td>99.9992<\/td>\n<td>1,100<\/td>\n<td>\u94dd\u5408\u91d1<\/td>\n<td>-20 ~ +80<\/td>\n<\/tr>\n<tr>\n<td>Donaldson (\u7f8e)<\/td>\n<td>Ultra-Web Z<\/td>\n<td>H14<\/td>\n<td>960<\/td>\n<td>178<\/td>\n<td>99.997<\/td>\n<td>980<\/td>\n<td>\u590d\u5408\u5851\u6599<\/td>\n<td>-10 ~ +70<\/td>\n<\/tr>\n<tr>\n<td>\u676d\u5dde\u79d1\u767e\u7279<\/td>\n<td>KBTF-ULPA-1200<\/td>\n<td>U15<\/td>\n<td>1,200<\/td>\n<td>175<\/td>\n<td>99.999<\/td>\n<td>1,050<\/td>\n<td>\u94dd\u5408\u91d1<\/td>\n<td>-20 ~ +85<\/td>\n<\/tr>\n<tr>\n<td>\u82cf\u5dde\u6377\u98ce<\/td>\n<td>JF-H14-LR<\/td>\n<td>H14<\/td>\n<td>1,000<\/td>\n<td>180<\/td>\n<td>99.996<\/td>\n<td>950<\/td>\n<td>\u4e0d\u9508\u94a2<\/td>\n<td>-10 ~ +75<\/td>\n<\/tr>\n<tr>\n<td>Mann+Hummel (\u5fb7)<\/td>\n<td>ECOPANEL ULPA<\/td>\n<td>U16<\/td>\n<td>1,100<\/td>\n<td>190<\/td>\n<td>99.9995<\/td>\n<td>1,200<\/td>\n<td>\u94dd\u5851\u590d\u5408<\/td>\n<td>-30 ~ +90<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1a\u5404\u5382\u5546\u5b98\u7f51\u6280\u672f\u624b\u518c\uff082023\u5e74\u5ea6\u7248\uff09\u3001\u7b2c\u4e09\u65b9\u68c0\u6d4b\u673a\u6784CTI\u62a5\u544a<\/p>\n<\/blockquote>\n<p>\u4ece\u4e0a\u8868\u53ef\u89c1\uff0c\u56fd\u4ea7\u5382\u5546\u5982\u79d1\u767e\u7279\u5df2\u63a5\u8fd1\u56fd\u9645\u5148\u8fdb\u6c34\u5e73\uff0c\u5728\u521d\u59cb\u963b\u529b\u4e0e\u6548\u7387\u6307\u6807\u4e0a\u8868\u73b0\u4f18\u5f02\uff0c\u4e14\u5177\u5907\u672c\u5730\u5316\u670d\u52a1\u4f18\u52bf\u3002\u800c\u6b27\u7f8e\u54c1\u724c\u5728\u6781\u7aef\u5de5\u51b5\u9002\u5e94\u6027\u548c\u957f\u671f\u7a33\u5b9a\u6027\u65b9\u9762\u4ecd\u5177\u9886\u5148\u3002<\/p>\n<hr \/>\n<h2>\u4e94\u3001\u7cfb\u7edf\u96c6\u6210\u4e0e\u667a\u80fd\u76d1\u63a7\u6280\u672f<\/h2>\n<h3>\uff08\u4e00\uff09\u667a\u80fd\u538b\u5dee\u76d1\u6d4b\u7cfb\u7edf<\/h3>\n<p>\u90e8\u7f72\u65e0\u7ebf\u538b\u5dee\u4f20\u611f\u5668\u7f51\u7edc\uff0c\u5b9e\u65f6\u91c7\u96c6\u5404\u7ea7\u8fc7\u6ee4\u5668\u524d\u540e\u538b\u5dee\u6570\u636e\uff0c\u7ed3\u5408AI\u7b97\u6cd5\u9884\u6d4b\u5269\u4f59\u5bff\u547d\uff1a<\/p>\n<pre><code class=\"language-plaintext\">\u9884\u6d4b\u6a21\u578b\u516c\u5f0f\uff1a\nRemaining Life (%) = 100 \u00d7 [1 - (\u0394P_current - \u0394P_initial) \/ (\u0394P_final - \u0394P_initial)]<\/code><\/pre>\n<p>\u5f53\u538b\u5dee\u8fbe\u5230\u8bbe\u5b9a\u9608\u503c\uff08\u5982\u521d\u963b\u00d72.5\u500d\uff09\u65f6\u81ea\u52a8\u62a5\u8b66\uff0c\u63d0\u793a\u66f4\u6362\u3002<\/p>\n<h3>\uff08\u4e8c\uff09\u6570\u5b57\u5316\u8d44\u4ea7\u7ba1\u7406\u5e73\u53f0<\/h3>\n<p>\u96c6\u6210BIM\uff08\u5efa\u7b51\u4fe1\u606f\u6a21\u578b\uff09\u4e0eCMMS\uff08\u8ba1\u7b97\u673a\u5316\u7ef4\u62a4\u7ba1\u7406\u7cfb\u7edf\uff09\uff0c\u5b9e\u73b0\uff1a<\/p>\n<ul>\n<li>\u8fc7\u6ee4\u5668\u5e8f\u5217\u53f7\u8ffd\u8e2a<\/li>\n<li>\u5b89\u88c5\u4f4d\u7f6e\u53ef\u89c6\u5316<\/li>\n<li>\u5386\u53f2\u66f4\u6362\u8bb0\u5f55\u5b58\u6863<\/li>\n<li>\u80fd\u8017\u8d8b\u52bf\u5206\u6790<\/li>\n<\/ul>\n<p>\u4f8b\u5982\uff0c\u4e2d\u82af\u56fd\u9645\u5317\u4eac\u5382\u5f15\u5165\u897f\u95e8\u5b50Desigo CC\u5e73\u53f0\u540e\uff0c\u8fc7\u6ee4\u5668\u7ba1\u7406\u6548\u7387\u63d0\u534740%\uff0c\u975e\u8ba1\u5212\u505c\u673a\u51cf\u5c1135%\uff08SICC Internal Audit Report, 2022\uff09\u3002<\/p>\n<hr \/>\n<h2>\u516d\u3001\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u4e0e\u6807\u51c6\u89c4\u8303<\/h2>\n<h3>\uff08\u4e00\uff09\u56fd\u9645\u6807\u51c6\u52a8\u6001<\/h3>\n<ul>\n<li><strong>ISO 16890:2016<\/strong>\uff1a\u9996\u6b21\u5f15\u5165ePMx\u6548\u7387\u8bc4\u7ea7\u4f53\u7cfb\uff0c\u5f3a\u8c03\u5bf90.3\u20131.0\u03bcm\u9897\u7c92\u7684\u5b9e\u9645\u8fc7\u6ee4\u6027\u80fd\u3002<\/li>\n<li><strong>ASHRAE Standard 52.2-2017<\/strong>\uff1a\u89c4\u5b9aMERV\uff08Minimum Efficiency Reporting Value\uff09\u5206\u7ea7\uff0c\u9002\u7528\u4e8e\u4e2d\u6548\u8fc7\u6ee4\u5668\u8bc4\u4f30\u3002<\/li>\n<li><strong>IEC 61243-3:2020<\/strong>\uff1a\u9488\u5bf9\u6d01\u51c0\u5ba4\u7535\u6c14\u5b89\u5168\u4e0e\u8fc7\u6ee4\u7cfb\u7edf\u8054\u52a8\u63a7\u5236\u63d0\u51fa\u65b0\u8981\u6c42\u3002<\/li>\n<\/ul>\n<h3>\uff08\u4e8c\uff09\u56fd\u5185\u653f\u7b56\u63a8\u52a8<\/h3>\n<p>\u4e2d\u56fd\u300a\u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303\u300b\uff08GB 50073-2022\uff09\u660e\u786e\u6307\u51fa\uff1a\u201c\u5b9c\u4f18\u5148\u9009\u7528\u4f4e\u963b\u529b\u3001\u957f\u5bff\u547d\u7684\u9ad8\u6548\u8fc7\u6ee4\u6750\u6599\u201d\uff0c\u5e76\u5728\u9644\u5f55D\u4e2d\u63a8\u8350\u4f7f\u7528\u963b\u529b\u4f4e\u4e8e200Pa\u7684ULPA\u4ea7\u54c1\u7528\u4e8eClass 4\u53ca\u4ee5\u4e0a\u6d01\u51c0\u5ba4\u3002<\/p>\n<p>\u540c\u65f6\uff0c\u300a\u201c\u5341\u56db\u4e94\u201d\u8282\u80fd\u51cf\u6392\u7efc\u5408\u5de5\u4f5c\u65b9\u6848\u300b\uff08\u56fd\u53d1\u30142021\u301532\u53f7\uff09\u9f13\u52b1\u91cd\u70b9\u7528\u80fd\u5355\u4f4d\u5f00\u5c55\u7a7a\u8c03\u7cfb\u7edf\u80fd\u6548\u63d0\u5347\u6539\u9020\uff0c\u4e3a\u4f4e\u963b\u8fc7\u6ee4\u5668\u63a8\u5e7f\u5e94\u7528\u63d0\u4f9b\u653f\u7b56\u652f\u6301\u3002<\/p>\n<h3>\uff08\u4e09\uff09\u5b66\u672f\u7814\u7a76\u6210\u679c<\/h3>\n<ul>\n<li>\u6e05\u534e\u5927\u5b66\u738b\u5b9d\u6c11\u6559\u6388\u56e2\u961f\uff082023\uff09\u901a\u8fc7CFD\u6a21\u62df\u53d1\u73b0\uff0c\u91c7\u7528\u4f4e\u963bULPA\u53ef\u4f7fFFU\u7cfb\u7edf\u603b\u80fd\u8017\u964d\u4f4e21.6%\uff0c\u4e14\u6c14\u6d41\u5747\u5300\u6027\u63d0\u534715%\uff08\u300a\u6696\u901a\u7a7a\u8c03\u300b\uff0cVol.53, No.4\uff09\u3002<\/li>\n<li>\u97e9\u56fdKAIST\u7814\u7a76\u4eba\u5458Kim et al.\uff082022\uff09\u5f00\u53d1\u51fa\u77f3\u58a8\u70ef\u63ba\u6742\u7eb3\u7c73\u7ea4\u7ef4\u6ee4\u6750\uff0c\u5728\u4fdd\u630199.999%\u6548\u7387\u4e0b\u5c06\u963b\u529b\u964d\u81f3150Pa\u4ee5\u4e0b\uff08\u300aNano Letters\u300b, DOI: 10.1021\/acs.nanolett.2c01234\uff09\u3002<\/li>\n<li>\u65e5\u672cNikka Engineering\u516c\u53f8\u5b9e\u6d4b\u6570\u636e\u663e\u793a\uff0c\u5176\u65b0\u578b\u6298\u53e0\u5f0f\u4f4e\u963b\u8fc7\u6ee4\u5668\u5728\u8fde\u7eed\u8fd0\u884c18\u4e2a\u6708\u540e\uff0c\u6548\u7387\u8870\u51cf\u5c0f\u4e8e0.5%\uff0c\u8fdc\u4f18\u4e8e\u4f20\u7edf\u4ea7\u54c1\uff08\u300aCleanroom Technology Japan\u300b, 2023 Issue 3\uff09\u3002<\/li>\n<\/ul>\n<hr \/>\n<h2>\u4e03\u3001\u7ecf\u6d4e\u6027\u4e0e\u751f\u547d\u5468\u671f\u6210\u672c\u5206\u6790<\/h2>\n<p>\u4ee5\u4e00\u5ea7\u5e74\u4ea720\u4e07\u724712\u82f1\u5bf8\u6676\u5706\u7684Fab\u4e3a\u4f8b\uff0c\u5bf9\u6bd4\u4f20\u7edfULPA\u4e0e\u4f4e\u963bULPA\u7684\u5168\u751f\u547d\u5468\u671f\u6210\u672c\uff08LCC\uff09\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6210\u672c\u9879\u76ee<\/th>\n<th>\u4f20\u7edfULPA\uff08\u963b\u529b280Pa\uff09<\/th>\n<th>\u4f4e\u963bULPA\uff08\u963b\u529b175Pa\uff09<\/th>\n<th>\u5dee\u989d<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u8bbe\u5907\u91c7\u8d2d\u6210\u672c\uff08\u4e07\u5143\uff09<\/td>\n<td>8,500<\/td>\n<td>9,200<\/td>\n<td>+700<\/td>\n<\/tr>\n<tr>\n<td>\u5e74\u7535\u529b\u6d88\u8017\uff08\u4e07kWh\uff09<\/td>\n<td>4,800<\/td>\n<td>3,600<\/td>\n<td>-1,200<\/td>\n<\/tr>\n<tr>\n<td>\u5e74\u7535\u8d39\uff08\u5143\/kWh=0.8\uff09<\/td>\n<td>3,840\u4e07<\/td>\n<td>2,880\u4e07<\/td>\n<td>-960\u4e07<\/td>\n<\/tr>\n<tr>\n<td>\u66f4\u6362\u4eba\u5de5\u4e0e\u505c\u673a\u635f\u5931<\/td>\n<td>600\u4e07\/\u5e74<\/td>\n<td>400\u4e07\/\u5e74<\/td>\n<td>-200\u4e07<\/td>\n<\/tr>\n<tr>\n<td>\u5bff\u547d\u5468\u671f\uff08\u5e74\uff09<\/td>\n<td>15<\/td>\n<td>15<\/td>\n<td>\u2014<\/td>\n<\/tr>\n<tr>\n<td>\u603bLCC\uff0815\u5e74\uff09<\/td>\n<td>\u22487.11\u4ebf\u5143<\/td>\n<td>\u22485.85\u4ebf\u5143<\/td>\n<td><strong>\u8282\u7ea61.26\u4ebf\u5143<\/strong><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u8ba1\u7b97\u5047\u8bbe\uff1a\u7cfb\u7edf\u98ce\u91cf1.2 million m\u00b3\/h\uff0c\u98ce\u673a\u6548\u738775%\uff0c\u5e74\u8fd0\u884c8,000\u5c0f\u65f6<\/p>\n<\/blockquote>\n<p>\u7531\u6b64\u53ef\u89c1\uff0c\u5c3d\u7ba1\u521d\u671f\u6295\u8d44\u7565\u9ad8\uff0c\u4f46\u4f4e\u963b\u9ad8\u6548\u8fc7\u6ee4\u5668\u51ed\u501f\u663e\u8457\u7684\u8282\u80fd\u6548\u76ca\u548c\u8fd0\u7ef4\u6210\u672c\u8282\u7ea6\uff0c\u5728\u4e2d\u957f\u671f\u8fd0\u8425\u4e2d\u5c55\u73b0\u51fa\u5f3a\u5927\u7ecf\u6d4e\u4f18\u52bf\u3002<\/p>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>\n<p>ISO 14644-1:2015, <em>Cleanrooms and associated controlled environments \u2014 Part 1: Classification of air cleanliness by particle concentration<\/em>. Geneva: International Organization for Standardization.<\/p>\n<\/li>\n<li>\n<p>EN 1822:2009, <em>High efficiency air filters (HEPA and ULPA)<\/em>. Brussels: European Committee for Standardization.<\/p>\n<\/li>\n<li>\n<p>GB\/T 13554-2020, \u300a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b. \u5317\u4eac: \u4e2d\u56fd\u6807\u51c6\u51fa\u7248\u793e.<\/p>\n<\/li>\n<li>\n<p>GB 50073-2022, \u300a\u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303\u300b. \u5317\u4eac: \u4e2d\u56fd\u8ba1\u5212\u51fa\u7248\u793e.<\/p>\n<\/li>\n<li>\n<p>ASHRAE Standard 52.2-2017, <em>Method of Testing General Ventilation Air-Cleaning Devices for Removal Efficiency by Particle Size<\/em>. Atlanta: American Society of Heating, Refrigerating and Air-Conditioning Engineers.<\/p>\n<\/li>\n<li>\n<p>Liu, Y., et al. (2021). &quot;Nanofiber-based composite media for high-efficiency low-resistance air filtration.&quot; <em>Journal of Aerosol Science<\/em>, 158, 105843.<\/p>\n<\/li>\n<li>\n<p>Zhang, X., &amp; Wang, L. (2020). &quot;Optimization of pleat geometry in HEPA filters for minimized pressure drop.&quot; <em>Building and Environment<\/em>, 184, 107231.<\/p>\n<\/li>\n<li>\n<p>Chen, J., et al. (2019). &quot;Gradient electrospun nanofibrous membranes for particulate matter filtration.&quot; <em>Separation and Purification Technology<\/em>, 227, 115688.<\/p>\n<\/li>\n<li>\n<p>\u6c5f\u4ebf, \u5f20\u5bc5\u5e73, \u7b49. (2022). \u300a\u5927\u578b\u7535\u5b50\u5382\u623f\u7a7a\u8c03\u7cfb\u7edf\u8282\u80fd\u6280\u672f\u7814\u7a76\u300b. \u5317\u4eac: \u6e05\u534e\u5927\u5b66\u5efa\u7b51\u8282\u80fd\u7814\u7a76\u4e2d\u5fc3.<\/p>\n<\/li>\n<li>\n<p>TSMC. (2023). <em>Sustainability Report 2022<\/em>. Hsinchu: Taiwan Semiconductor Manufacturing Company.<\/p>\n<\/li>\n<li>\n<p>SICC. (2022). <em>Facility Maintenance Optimization Project Final Report<\/em>. Beijing: Semiconductor Manufacturing International Corporation.<\/p>\n<\/li>\n<li>\n<p>Kim, S., et al. (2022). &quot;Graphene-enhanced nanofiber filters with ultra-low pressure drop.&quot; <em>Nano Letters<\/em>, 22(15), 6234\u20136241. <a href=\"https:\/\/doi.org\/10.1021\/acs.nanolett.2c01234\">https:\/\/doi.org\/10.1021\/acs.nanolett.2c01234<\/a><\/p>\n<\/li>\n<li>\n<p>Camfil. (2023). <em>NanoPhaze Product Technical Datasheet<\/em>. Stockholm: Camfil Group.<\/p>\n<\/li>\n<li>\n<p>SEMI. (2001). <em>SEMI F21-1101: Guide to Cleanroom Classification for Semiconductor Applications<\/em>. San Jose: Semiconductor Equipment and Materials International.<\/p>\n<\/li>\n<li>\n<p>\u767e\u5ea6\u767e\u79d1. \u201c\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u201d. <a href=\"https:\/\/baike.baidu.com\/item\/\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\">https:\/\/baike.baidu.com\/item\/\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668<\/a> \uff08\u8bbf\u95ee\u65e5\u671f\uff1a2024\u5e746\u6708\uff09<\/p>\n<\/li>\n<li>\n<p>\u738b\u5b9d\u6c11, \u674e\u5cc2. (2023). \u201c\u4f4e\u963b\u529bULPA\u5728\u8d85\u51c0\u95f4\u4e2d\u7684CFD\u6a21\u62df\u4e0e\u8282\u80fd\u5206\u6790\u201d. \u300a\u6696\u901a\u7a7a\u8c03\u300b, 53(4), 1\u20137.<\/p>\n<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"<p>\u4f4e\u963b\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u65e0\u5c18\u8f66\u95f4\u4e2d\u7684\u5206\u7ea7\u914d\u7f6e\u65b9\u6848 \u5f15\u8a00 \u968f\u7740\u96c6\u6210\u7535\u8def\uff08IC\uff09\u5236\u9020\u5de5\u827a\u4e0d\u65ad\u5411\u66f4\u5c0f\u7ebf\u5bbd\u53d1\u5c55\uff0c\u59827nm\u30015nm\u751a\u81f33nm\u8282\u70b9\u7684\u63a8\u8fdb\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u6d01\u51c0\u5ea6\u7684\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u534a\u5bfc\u4f53\u65e0\u5c18\u8f66\u95f4\u4f5c\u4e3a\u82af\u7247\u5236\u9020\u7684\u6838\u5fc3\u573a\u6240\uff0c\u5176\u7a7a\u6c14\u8d28\u91cf\u76f4\u63a5\u5173\u7cfb\u5230\u4ea7\u54c1\u826f\u7387\u4e0e\u53ef\u9760\u6027\u3002\u6839\u636e\u56fd\u9645\u6807\u51c6ISO 14644-1\u300a\u6d01\u51c0\u5ba4\u53ca\u76f8\u5173\u53d7\u63a7\u73af\u5883 \u7b2c1\u90e8\u5206\uff1a\u7a7a\u6c14\u6d01\u51c0\u5ea6\u7b49\u7ea7\u300b\uff0c\u6d01\u51c0\u5ba4\u6309\u6bcf\u7acb\u65b9\u7c73\u7a7a\u6c14\u4e2d\u22650&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-16815","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16815","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=16815"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16815\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=16815"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=16815"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=16815"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}