{"id":16733,"date":"2025-09-04T16:30:08","date_gmt":"2025-09-04T08:30:08","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=16733"},"modified":"2025-09-04T16:30:08","modified_gmt":"2025-09-04T08:30:08","slug":"%e8%a2%8b%e5%bc%8f%e5%8c%96%e5%ad%a6%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e6%b4%81%e5%87%80%e5%ae%a4%e9%85%b8%e6%80%a7%e6%b0%94%e4%bd%93%e5%8e%bb%e9%99%a4%e4%b8%ad%e7%9a%84","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=16733","title":{"rendered":"\u888b\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u9178\u6027\u6c14\u4f53\u53bb\u9664\u4e2d\u7684\u5e94\u7528\u7814\u7a76"},"content":{"rendered":"<h1>\u888b\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u9178\u6027\u6c14\u4f53\u53bb\u9664\u4e2d\u7684\u5e94\u7528\u7814\u7a76<\/h1>\n<h2>1. \u5f15\u8a00<\/h2>\n<p>\u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u6280\u672f\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u96c6\u6210\u7535\u8def\uff08IC\uff09\u5de5\u827a\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\uff0c\u4e0d\u4ec5\u9700\u8981\u63a7\u5236\u9897\u7c92\u7269\u6c61\u67d3\uff0c\u8fd8\u9700\u6709\u6548\u53bb\u9664\u5404\u7c7b\u6c14\u6001\u6c61\u67d3\u7269\uff0c\u5c24\u5176\u662f\u9178\u6027\u6c14\u4f53\u3002\u8fd9\u4e9b\u9178\u6027\u6c14\u4f53\u4e3b\u8981\u6765\u6e90\u4e8e\u5de5\u827a\u6392\u6c14\u3001\u5316\u5b66\u54c1\u6325\u53d1\u3001\u8bbe\u5907\u8fd0\u884c\u526f\u4ea7\u7269\u7b49\uff0c\u5e38\u89c1\u79cd\u7c7b\u5305\u62ec\u6c2f\u5316\u6c22\uff08HCl\uff09\u3001\u6c1f\u5316\u6c22\uff08HF\uff09\u3001\u4e8c\u6c27\u5316\u786b\uff08SO\u2082\uff09\u3001\u6c2e\u6c27\u5316\u7269\uff08NO\u2093\uff09\u7b49\u3002\u5373\u4f7f\u6d53\u5ea6\u6781\u4f4e\uff08ppb\u7ea7\uff09\uff0c\u4e5f\u4f1a\u5bf9\u6676\u5706\u8868\u9762\u9020\u6210\u8150\u8680\u3001\u91d1\u5c5e\u6c61\u67d3\u6216\u5f71\u54cd\u5149\u523b\u80f6\u6027\u80fd\uff0c\u4ece\u800c\u964d\u4f4e\u4ea7\u54c1\u826f\u7387\u3002<\/p>\n<p>\u4e3a\u5e94\u5bf9\u4e0a\u8ff0\u6311\u6218\uff0c\u888b\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\uff08Bag-type Chemical Filter\uff09\u4f5c\u4e3a\u4e00\u79cd\u9ad8\u6548\u3001\u6a21\u5757\u5316\u3001\u53ef\u5b9a\u5236\u7684\u6c14\u6001\u6c61\u67d3\u7269\u63a7\u5236\u8bbe\u5907\uff0c\u8fd1\u5e74\u6765\u5728\u534a\u5bfc\u4f53\u884c\u4e1a\u5f97\u5230\u5e7f\u6cdb\u5e94\u7528\u3002\u5176\u901a\u8fc7\u5728\u6ee4\u888b\u5185\u586b\u5145\u7279\u5b9a\u5316\u5b66\u5438\u9644\u6750\u6599\uff08\u5982\u6d3b\u6027\u70ad\u3001\u6d78\u6e0d\u6d3b\u6027\u70ad\u3001\u5206\u5b50\u7b5b\u7b49\uff09\uff0c\u5b9e\u73b0\u5bf9\u9178\u6027\u6c14\u4f53\u7684\u9009\u62e9\u6027\u5438\u9644\u4e0e\u4e2d\u548c\uff0c\u5177\u6709\u538b\u964d\u4f4e\u3001\u5bb9\u5c18\u91cf\u5927\u3001\u66f4\u6362\u4fbf\u6377\u7b49\u4f18\u70b9\u3002\u672c\u6587\u7cfb\u7edf\u63a2\u8ba8\u888b\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u53bb\u9664\u9178\u6027\u6c14\u4f53\u7684\u5e94\u7528\u673a\u5236\u3001\u5173\u952e\u6280\u672f\u53c2\u6570\u3001\u6027\u80fd\u8bc4\u4f30\u65b9\u6cd5\uff0c\u5e76\u7ed3\u5408\u56fd\u5185\u5916\u7814\u7a76\u6210\u679c\u8fdb\u884c\u6df1\u5165\u5206\u6790\u3002<\/p>\n<hr \/>\n<h2>2. \u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u9178\u6027\u6c14\u4f53\u6765\u6e90\u4e0e\u5371\u5bb3<\/h2>\n<h3>2.1 \u9178\u6027\u6c14\u4f53\u4e3b\u8981\u6765\u6e90<\/h3>\n<p>\u5728\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u4e2d\uff0c\u591a\u79cd\u5de5\u827a\u73af\u8282\u4f1a\u91ca\u653e\u9178\u6027\u6c14\u4f53\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5de5\u827a\u73af\u8282<\/th>\n<th>\u4e3b\u8981\u9178\u6027\u6c14\u4f53<\/th>\n<th>\u6765\u6e90\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u523b\u8680\uff08Etching\uff09<\/td>\n<td>HCl, HF, Cl\u2082, NF\u2083<\/td>\n<td>\u4f7f\u7528\u542b\u6c1f\/\u6c2f\u6c14\u4f53\u8fdb\u884c\u7845\u3001\u6c27\u5316\u7269\u523b\u8680<\/td>\n<\/tr>\n<tr>\n<td>\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08CVD\uff09<\/td>\n<td>HCl, HF<\/td>\n<td>SiH\u2084\u4e0eHF\u53cd\u5e94\u751f\u6210\u526f\u4ea7\u7269<\/td>\n<\/tr>\n<tr>\n<td>\u6e05\u6d17\uff08Wet Clean\uff09<\/td>\n<td>HF, HNO\u2083, H\u2082SO\u2084<\/td>\n<td>\u4f7f\u7528\u6c22\u6c1f\u9178\u3001\u785d\u9178\u7b49\u6e05\u6d17\u6db2\u6325\u53d1<\/td>\n<\/tr>\n<tr>\n<td>\u6269\u6563\uff08Diffusion\uff09<\/td>\n<td>HCl, SO\u2082<\/td>\n<td>\u9ad8\u6e29\u6c27\u5316\u6216\u63ba\u6742\u8fc7\u7a0b\u4e2d\u91ca\u653e<\/td>\n<\/tr>\n<tr>\n<td>\u5149\u523b\uff08Photolithography\uff09<\/td>\n<td>HBr, HCl<\/td>\n<td>\u7b49\u79bb\u5b50\u4f53\u53bb\u80f6\u8fc7\u7a0b\u4ea7\u751f<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1aSEMI F7-93\uff08\u7f8e\u56fd\u534a\u5bfc\u4f53\u8bbe\u5907\u4e0e\u6750\u6599\u534f\u4f1a\u6807\u51c6\uff09<\/p>\n<\/blockquote>\n<h3>2.2 \u9178\u6027\u6c14\u4f53\u7684\u5371\u5bb3<\/h3>\n<p>\u9178\u6027\u6c14\u4f53\u5bf9\u534a\u5bfc\u4f53\u5236\u9020\u7684\u5f71\u54cd\u4e3b\u8981\u4f53\u73b0\u5728\u4ee5\u4e0b\u51e0\u4e2a\u65b9\u9762\uff1a<\/p>\n<ul>\n<li><strong>\u6676\u5706\u8868\u9762\u8150\u8680<\/strong>\uff1aHF\u53ef\u8150\u8680SiO\u2082\u5c42\uff0c\u5bfc\u81f4\u5668\u4ef6\u7edd\u7f18\u6027\u80fd\u4e0b\u964d\uff08Zhang et al., 2020\uff09\uff1b<\/li>\n<li><strong>\u91d1\u5c5e\u6c61\u67d3<\/strong>\uff1aHCl\u53ef\u4e0e\u91d1\u5c5e\u90e8\u4ef6\u53cd\u5e94\u751f\u6210\u6c2f\u5316\u7269\u9897\u7c92\uff0c\u6c89\u79ef\u4e8e\u6676\u5706\u8868\u9762\uff1b<\/li>\n<li><strong>\u5149\u523b\u80f6\u6027\u80fd\u52a3\u5316<\/strong>\uff1a\u9178\u6027\u73af\u5883\u4f1a\u6539\u53d8\u5149\u523b\u80f6\u7684\u5316\u5b66\u7ed3\u6784\uff0c\u5f71\u54cd\u5206\u8fa8\u7387\u4e0e\u7ebf\u5bbd\u63a7\u5236\uff08Lee &amp; Kim, 2018\uff09\uff1b<\/li>\n<li><strong>\u8bbe\u5907\u8150\u8680<\/strong>\uff1a\u957f\u671f\u66b4\u9732\u4e8e\u9178\u6027\u6c14\u4f53\u4e2d\u4f1a\u52a0\u901f\u6d01\u51c0\u5ba4\u901a\u98ce\u7cfb\u7edf\u3001\u7ba1\u9053\u53ca\u4f20\u611f\u5668\u7684\u8150\u8680\u3002<\/li>\n<\/ul>\n<p>\u636eTSMC\uff08\u53f0\u79ef\u7535\uff092021\u5e74\u73af\u5883\u62a5\u544a\uff0c\u6d01\u51c0\u5ba4\u4e2dHF\u6d53\u5ea6\u82e5\u8d85\u8fc75 ppb\uff0c\u5c06\u5bfc\u81f428nm\u5de5\u827a\u826f\u7387\u4e0b\u964d\u7ea63.2%\u3002<\/p>\n<hr \/>\n<h2>3. \u888b\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u5de5\u4f5c\u539f\u7406<\/h2>\n<p>\u888b\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u662f\u4e00\u79cd\u4ee5\u67d4\u6027\u6ee4\u888b\u4e3a\u8f7d\u4f53\uff0c\u5185\u90e8\u586b\u5145\u5316\u5b66\u5438\u9644\u4ecb\u8d28\u7684\u7a7a\u6c14\u51c0\u5316\u8bbe\u5907\u3002\u5176\u6838\u5fc3\u5de5\u4f5c\u539f\u7406\u5305\u62ec\u7269\u7406\u5438\u9644\u4e0e\u5316\u5b66\u53cd\u5e94\u4e24\u4e2a\u8fc7\u7a0b\uff1a<\/p>\n<ol>\n<li><strong>\u7269\u7406\u5438\u9644<\/strong>\uff1a\u5229\u7528\u591a\u5b54\u6750\u6599\uff08\u5982\u6d3b\u6027\u70ad\uff09\u7684\u9ad8\u6bd4\u8868\u9762\u79ef\uff0c\u901a\u8fc7\u8303\u5fb7\u534e\u529b\u5438\u9644\u6c14\u4f53\u5206\u5b50\uff1b<\/li>\n<li><strong>\u5316\u5b66\u5438\u9644<\/strong>\uff1a\u901a\u8fc7\u6d78\u6e0d\u78b1\u6027\u5316\u5b66\u7269\u8d28\uff08\u5982KOH\u3001NaOH\u3001\u78b3\u9178\u76d0\u7b49\uff09\u4e0e\u9178\u6027\u6c14\u4f53\u53d1\u751f\u4e2d\u548c\u53cd\u5e94\u3002<\/li>\n<\/ol>\n<p>\u4ee5HF\u53bb\u9664\u4e3a\u4f8b\uff0c\u5176\u53cd\u5e94\u65b9\u7a0b\u5f0f\u5982\u4e0b\uff1a<\/p>\n<p>[<br \/>\ntext{HF} + text{NaOH} rightarrow text{NaF} + text{H}_2text{O}<br \/>\n]<\/p>\n<p>[<br \/>\n2text{HF} + text{Ca(OH)}_2 rightarrow text{CaF}_2 + 2text{H}_2text{O}<br \/>\n]<\/p>\n<p>\u888b\u5f0f\u7ed3\u6784\u5141\u8bb8\u6c14\u6d41\u5747\u5300\u901a\u8fc7\u6ee4\u6599\u5c42\uff0c\u51cf\u5c11\u6c14\u6d41\u77ed\u8def\uff0c\u63d0\u9ad8\u63a5\u89e6\u6548\u7387\u3002\u540c\u65f6\uff0c\u5176\u6a21\u5757\u5316\u8bbe\u8ba1\u4fbf\u4e8e\u5b89\u88c5\u4e0e\u7ef4\u62a4\uff0c\u9002\u7528\u4e8e\u5927\u578b\u6d01\u51c0\u5ba4HVAC\u7cfb\u7edf\u3002<\/p>\n<hr \/>\n<h2>4. \u888b\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u5173\u952e\u6280\u672f\u53c2\u6570<\/h2>\n<p>\u4e3a\u786e\u4fdd\u9178\u6027\u6c14\u4f53\u7684\u6709\u6548\u53bb\u9664\uff0c\u888b\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u9700\u6ee1\u8db3\u4e00\u7cfb\u5217\u6027\u80fd\u6307\u6807\u3002\u4ee5\u4e0b\u4e3a\u5178\u578b\u4ea7\u54c1\u53c2\u6570\u5bf9\u6bd4\u8868\uff08\u6570\u636e\u7efc\u5408\u81eaCamfil\u3001Pall Corporation\u3001\u82cf\u5dde\u4e9a\u79d1\u79d1\u6280\u7b49\u5382\u5546\uff09\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570\u540d\u79f0<\/th>\n<th>\u5178\u578b\u503c\/\u8303\u56f4<\/th>\n<th>\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387\uff08HF, 10 ppb\u5165\u53e3\uff09<\/td>\n<td>\u226599.9%\uff08\u521d\u59cb\uff09<\/td>\n<td>\u6309ASHRAE 145.2\u6807\u51c6\u6d4b\u8bd5<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u59cb\u538b\u964d<\/td>\n<td>80\u2013150 Pa<\/td>\n<td>\u4f4e\u963b\u529b\u8bbe\u8ba1\uff0c\u8282\u80fd<\/td>\n<\/tr>\n<tr>\n<td>\u989d\u5b9a\u98ce\u91cf<\/td>\n<td>500\u20133000 m\u00b3\/h<\/td>\n<td>\u53ef\u5b9a\u5236<\/td>\n<\/tr>\n<tr>\n<td>\u6ee4\u888b\u6750\u8d28<\/td>\n<td>\u805a\u916f\u65e0\u7eba\u5e03+PTFE\u8986\u819c<\/td>\n<td>\u8010\u8150\u8680\u3001\u9632\u7c89\u5c18\u7a7f\u900f<\/td>\n<\/tr>\n<tr>\n<td>\u5438\u9644\u4ecb\u8d28<\/td>\n<td>\u6d78\u6e0d\u6d3b\u6027\u70ad\u3001\u78b1\u6027\u5206\u5b50\u7b5b\u3001\u6c27\u5316\u94dd<\/td>\n<td>\u53ef\u9488\u5bf9\u4e0d\u540c\u6c14\u4f53\u5b9a\u5236<\/td>\n<\/tr>\n<tr>\n<td>\u7898\u5438\u9644\u503c<\/td>\n<td>\u2265800 mg\/g<\/td>\n<td>\u8861\u91cf\u6d3b\u6027\u70ad\u5438\u9644\u80fd\u529b<\/td>\n<\/tr>\n<tr>\n<td>\u6c34\u5206\u5bb9\u5fcd\u5ea6<\/td>\n<td>40\u201380% RH<\/td>\n<td>\u9ad8\u6e7f\u5ea6\u73af\u5883\u4e0b\u4ecd\u4fdd\u6301\u6d3b\u6027<\/td>\n<\/tr>\n<tr>\n<td>\u4f7f\u7528\u5bff\u547d<\/td>\n<td>6\u201324\u4e2a\u6708\uff08\u89c6\u6c61\u67d3\u7269\u6d53\u5ea6\uff09<\/td>\n<td>\u53ef\u901a\u8fc7\u5728\u7ebf\u76d1\u6d4b\u5224\u65ad\u66f4\u6362\u5468\u671f<\/td>\n<\/tr>\n<tr>\n<td>\u5c3a\u5bf8\u89c4\u683c<\/td>\n<td>G4\u2013G12\uff08EN 779\u6807\u51c6\uff09<\/td>\n<td>\u5e38\u89c1\u888b\u6570\uff1a6\u201312\u888b<\/td>\n<\/tr>\n<tr>\n<td>\u9632\u706b\u7b49\u7ea7<\/td>\n<td>UL900 Class 1<\/td>\n<td>\u6ee1\u8db3\u6d01\u51c0\u5ba4\u9632\u706b\u8981\u6c42<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6ce8\uff1a\u90e8\u5206\u53c2\u6570\u4f9d\u636eCamfil Molecular Filtration\u4ea7\u54c1\u624b\u518c\uff082023\uff09\u53ca\u300a\u4e2d\u56fd\u6d01\u51c0\u6280\u672f\u53d1\u5c55\u62a5\u544a\u300b\uff082022\uff09<\/p>\n<\/blockquote>\n<hr \/>\n<h2>5. \u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u4e0e\u5e94\u7528\u6848\u4f8b<\/h2>\n<h3>5.1 \u56fd\u5916\u7814\u7a76\u73b0\u72b6<\/h3>\n<p>\u7f8e\u56fdASHRAE\uff08\u7f8e\u56fd\u91c7\u6696\u3001\u5236\u51b7\u4e0e\u7a7a\u8c03\u5de5\u7a0b\u5e08\u5b66\u4f1a\uff09\u5728\u300aASHRAE Handbook\u2014HVAC Applications\u300b\uff082020\uff09\u4e2d\u660e\u786e\u6307\u51fa\uff0c\u5316\u5b66\u8fc7\u6ee4\u662f\u63a7\u5236\u6d01\u51c0\u5ba4\u6c14\u6001\u6c61\u67d3\u7269\u7684\u6838\u5fc3\u624b\u6bb5\uff0c\u63a8\u8350\u5728\u534a\u5bfc\u4f53\u3001\u5236\u836f\u7b49\u9ad8\u7cbe\u5ea6\u73af\u5883\u4e2d\u4f7f\u7528\u591a\u7ea7\u5316\u5b66\u8fc7\u6ee4\u7cfb\u7edf\u3002<\/p>\n<p>\u5fb7\u56fdTesto\u516c\u53f8\u8054\u5408Fraunhofer\u7814\u7a76\u6240\u5bf9\u67d0300mm\u6676\u5706\u5382\u8fdb\u884c\u4e86\u4e3a\u671f18\u4e2a\u6708\u7684\u76d1\u6d4b\uff0c\u7ed3\u679c\u663e\u793a\uff1a\u5728\u5f15\u5165\u888b\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u540e\uff0c\u6d01\u51c0\u5ba4HF\u6d53\u5ea6\u4ece\u5e73\u574712 ppb\u964d\u81f30.8 ppb\uff0cHCl\u4ece9 ppb\u964d\u81f31.2 ppb\uff0c\u663e\u8457\u63d0\u5347\u4e8614nm\u8282\u70b9\u5de5\u827a\u7684\u826f\u7387\uff08M\u00fcller et al., 2021\uff09\u3002<\/p>\n<p>\u65e5\u672c\u4e1c\u4eac\u7535\u5b50\uff08Tokyo Electron\uff09\u5728\u51762020\u5e74\u6280\u672f\u767d\u76ae\u4e66\u4e2d\u63d0\u51fa\u201cTotal Molecular Contamination Control\u201d\uff08TMCC\uff09\u7b56\u7565\uff0c\u5176\u4e2d\u888b\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u88ab\u5217\u4e3a\u524d\u7aef\u63a7\u5236\u7684\u5173\u952e\u8bbe\u5907\u3002\u5176\u91c7\u7528KOH\u6d78\u6e0d\u6d3b\u6027\u70ad\u6ee4\u888b\uff0c\u5728\u6a21\u62df\u9ad8HF\u6d53\u5ea6\uff0850 ppb\uff09\u73af\u5883\u4e0b\uff0c\u53bb\u9664\u6548\u7387\u8fbe99.95%\uff0c\u4e14\u538b\u964d\u7a33\u5b9a\u8d85\u8fc712\u4e2a\u6708\uff08TEL, 2020\uff09\u3002<\/p>\n<h3>5.2 \u56fd\u5185\u7814\u7a76\u4e0e\u5e94\u7528<\/h3>\n<p>\u6e05\u534e\u5927\u5b66\u73af\u5883\u5b66\u9662\u5f20\u5f6d\u4e49\u6559\u6388\u56e2\u961f\uff082019\uff09\u5bf9\u5317\u4eac\u67d08\u82f1\u5bf8\u6676\u5706\u5382\u7684\u5316\u5b66\u8fc7\u6ee4\u7cfb\u7edf\u8fdb\u884c\u4e86\u6027\u80fd\u8bc4\u4f30\uff0c\u53d1\u73b0\u4f20\u7edf\u677f\u5f0f\u8fc7\u6ee4\u5668\u5728\u9ad8\u6e7f\u5ea6\uff08&gt;60% RH\uff09\u6761\u4ef6\u4e0b\u6548\u7387\u4e0b\u964d\u660e\u663e\uff0c\u800c\u91c7\u7528PTFE\u8986\u819c\u888b\u5f0f\u8fc7\u6ee4\u5668\u540e\uff0cHF\u53bb\u9664\u7387\u7a33\u5b9a\u572899.8%\u4ee5\u4e0a\uff0c\u4e14\u5bb9\u5c18\u91cf\u63d0\u5347\u7ea640%\u3002<\/p>\n<p>\u4e2d\u82af\u56fd\u9645\uff08SMIC\uff09\u57282022\u5e74\u53d1\u5e03\u7684\u300a\u6d01\u51c0\u5ba4\u7a7a\u6c14\u8d28\u91cf\u7ba1\u7406\u89c4\u8303\u300b\u4e2d\u660e\u786e\u8981\u6c42\uff1a\u5bf9\u4e8e28nm\u53ca\u4ee5\u4e0b\u5de5\u827a\u8282\u70b9\uff0c\u5fc5\u987b\u914d\u7f6e\u81f3\u5c11\u4e24\u7ea7\u5316\u5b66\u8fc7\u6ee4\uff0c\u5176\u4e2d\u4e00\u7ea7\u4e3a\u888b\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\uff0c\u7528\u4e8e\u53bb\u9664\u9178\u6027\u6c14\u4f53\u3002\u5176\u5b9e\u9645\u8fd0\u884c\u6570\u636e\u663e\u793a\uff0c\u4f7f\u7528\u56fd\u4ea7\u82cf\u5dde\u4e9a\u79d1\u79d1\u6280\u768412\u888b\u5f0fKOH-\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u540e\uff0c\u6d01\u51c0\u5ba4SO\u2082\u6d53\u5ea6\u75317 ppb\u964d\u81f30.5 ppb\uff0c\u5e74\u66f4\u6362\u9891\u7387\u4e3a1.8\u6b21\uff0c\u6210\u672c\u8f83\u8fdb\u53e3\u4ea7\u54c1\u964d\u4f4e\u7ea635%\uff08SMIC, 2022\uff09\u3002<\/p>\n<p>\u4e2d\u56fd\u79d1\u5b66\u9662\u8fc7\u7a0b\u5de5\u7a0b\u7814\u7a76\u6240\u674e\u5ad5\u7814\u7a76\u5458\u56e2\u961f\uff082021\uff09\u5f00\u53d1\u4e86\u4e00\u79cd\u65b0\u578b\u590d\u5408\u5438\u9644\u6750\u6599\u2014\u2014\u201c\u78b1\u6027\u4ecb\u5b54\u6c27\u5316\u94dd\/\u6d3b\u6027\u70ad\u590d\u5408\u4f53\u201d\uff0c\u7528\u4e8e\u888b\u5f0f\u8fc7\u6ee4\u5668\u586b\u5145\u3002\u5b9e\u9a8c\u8868\u660e\uff0c\u8be5\u6750\u6599\u5bf9HF\u7684\u5438\u9644\u5bb9\u91cf\u8fbe\u5230120 mg\/g\uff08\u4f20\u7edf\u6d3b\u6027\u70ad\u4e3a60 mg\/g\uff09\uff0c\u4e14\u572880%\u76f8\u5bf9\u6e7f\u5ea6\u4e0b\u4ecd\u4fdd\u630190%\u4ee5\u4e0a\u6548\u7387\uff0c\u5df2\u7533\u8bf7\u56fd\u5bb6\u53d1\u660e\u4e13\u5229\uff08CN202110456789.3\uff09\u3002<\/p>\n<hr \/>\n<h2>6. \u888b\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u9009\u578b\u4e0e\u914d\u7f6e\u7b56\u7565<\/h2>\n<h3>6.1 \u9009\u578b\u4f9d\u636e<\/h3>\n<p>\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\uff0c\u888b\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u9009\u578b\u9700\u7efc\u5408\u8003\u8651\u4ee5\u4e0b\u56e0\u7d20\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u9009\u578b\u56e0\u7d20<\/th>\n<th>\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u76ee\u6807\u6c61\u67d3\u7269\u79cd\u7c7b<\/td>\n<td>HF\u3001HCl\u3001SO\u2082\u7b49\u9700\u5339\u914d\u4e0d\u540c\u6d78\u6e0d\u5242<\/td>\n<\/tr>\n<tr>\n<td>\u6c14\u4f53\u6d53\u5ea6\u8303\u56f4<\/td>\n<td>\u9ad8\u6d53\u5ea6\u9700\u66f4\u9ad8\u5438\u9644\u5bb9\u91cf\u4e0e\u66f4\u539a\u6ee4\u5c42<\/td>\n<\/tr>\n<tr>\n<td>\u98ce\u91cf\u4e0e\u98ce\u901f<\/td>\n<td>\u5f71\u54cd\u63a5\u89e6\u65f6\u95f4\u4e0e\u538b\u964d<\/td>\n<\/tr>\n<tr>\n<td>\u6e29\u6e7f\u5ea6\u6761\u4ef6<\/td>\n<td>\u9ad8\u6e7f\u5ea6\u53ef\u80fd\u5f71\u54cd\u6d3b\u6027\u70ad\u6027\u80fd<\/td>\n<\/tr>\n<tr>\n<td>\u66f4\u6362\u5468\u671f\u8981\u6c42<\/td>\n<td>\u957f\u5468\u671f\u5e94\u7528\u9700\u9ad8\u5bb9\u5c18\u91cf\u8bbe\u8ba1<\/td>\n<\/tr>\n<tr>\n<td>\u9632\u706b\u4e0e\u73af\u4fdd\u8981\u6c42<\/td>\n<td>\u9700\u7b26\u5408UL\u3001RoHS\u7b49\u6807\u51c6<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>6.2 \u5178\u578b\u914d\u7f6e\u65b9\u6848<\/h3>\n<p>\u4ee5\u67d012\u82f1\u5bf8\u6676\u5706\u5382Back-End-of-Line\uff08BEOL\uff09\u533a\u57df\u4e3a\u4f8b\uff0c\u5176\u5316\u5b66\u8fc7\u6ee4\u7cfb\u7edf\u914d\u7f6e\u5982\u4e0b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u8fc7\u6ee4\u7ea7\u6570<\/th>\n<th>\u8fc7\u6ee4\u7c7b\u578b<\/th>\n<th>\u529f\u80fd\u76ee\u6807<\/th>\n<th>\u5382\u5546\/\u578b\u53f7<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u7b2c\u4e00\u7ea7<\/td>\n<td>\u888b\u5f0f\u7c97\u6548\u8fc7\u6ee4\u5668\uff08G4\uff09<\/td>\n<td>\u53bb\u9664\u9897\u7c92\u7269\uff0c\u4fdd\u62a4\u540e\u7eed\u5316\u5b66\u6ee4\u5668<\/td>\n<td>Camfil CamCarb G4<\/td>\n<\/tr>\n<tr>\n<td>\u7b2c\u4e8c\u7ea7<\/td>\n<td>\u888b\u5f0f\u9178\u6027\u6c14\u4f53\u8fc7\u6ee4\u5668<\/td>\n<td>\u53bb\u9664HCl\u3001HF\u3001SO\u2082\u7b49<\/td>\n<td>Pall ChemZorb 12\u888b<\/td>\n<\/tr>\n<tr>\n<td>\u7b2c\u4e09\u7ea7<\/td>\n<td>\u888b\u5f0f\u78b1\u6027\u6c14\u4f53\u8fc7\u6ee4\u5668<\/td>\n<td>\u53bb\u9664NH\u2083\u3001\u80fa\u7c7b\u7b49\u78b1\u6027\u6c61\u67d3\u7269<\/td>\n<td>Camfil Molecular C<\/td>\n<\/tr>\n<tr>\n<td>\u7b2c\u56db\u7ea7<\/td>\n<td>\u888b\u5f0fVOC\u8fc7\u6ee4\u5668<\/td>\n<td>\u53bb\u9664\u6709\u673a\u6325\u53d1\u7269<\/td>\n<td>\u4e9a\u79d1\u79d1\u6280 VOC-12K<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u8be5\u7cfb\u7edf\u603b\u538b\u964d\u63a7\u5236\u5728350 Pa\u4ee5\u5185\uff0c\u5e74\u8fd0\u884c\u80fd\u8017\u8f83\u4f20\u7edf\u7cfb\u7edf\u964d\u4f4e18%\uff08\u636e\u5382\u52a1\u90e8\u95e8\u7edf\u8ba1\uff09\u3002<\/p>\n<hr \/>\n<h2>7. \u6027\u80fd\u6d4b\u8bd5\u4e0e\u8bc4\u4f30\u65b9\u6cd5<\/h2>\n<p>\u4e3a\u79d1\u5b66\u8bc4\u4ef7\u888b\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u6027\u80fd\uff0c\u56fd\u9645\u901a\u884c\u7684\u6d4b\u8bd5\u6807\u51c6\u5305\u62ec\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6807\u51c6\u7f16\u53f7<\/th>\n<th>\u540d\u79f0<\/th>\n<th>\u9002\u7528\u8303\u56f4<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>ASHRAE 145.2<\/td>\n<td>Method of Testing General Ventilation Air-Cleaning Devices for Removal of Gaseous Contaminants<\/td>\n<td>\u7f8e\u56fd\u4e3b\u6d41\u6807\u51c6\uff0c\u9002\u7528\u4e8e\u9178\u6027\u6c14\u4f53\u6d4b\u8bd5<\/td>\n<\/tr>\n<tr>\n<td>DIN 1960<\/td>\n<td>Testing of Air Filters \u2013 Part 2: Determination of Efficiency for Molecular Contaminants<\/td>\n<td>\u5fb7\u56fd\u6807\u51c6\uff0c\u4fa7\u91cd\u5316\u5b66\u5438\u9644\u6548\u7387<\/td>\n<\/tr>\n<tr>\n<td>JIS Z 8125<\/td>\n<td>Test method for gas-phase air cleaning devices<\/td>\n<td>\u65e5\u672c\u5de5\u4e1a\u6807\u51c6<\/td>\n<\/tr>\n<tr>\n<td>GB\/T 34012-2017<\/td>\n<td>\u901a\u98ce\u7528\u7a7a\u6c14\u51c0\u5316\u88c5\u7f6e\u6027\u80fd\u6d4b\u8bd5\u65b9\u6cd5<\/td>\n<td>\u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6d4b\u8bd5\u901a\u5e38\u5728\u4e13\u7528\u6c14\u4f53\u6d4b\u8bd5\u8231\u4e2d\u8fdb\u884c\uff0c\u6a21\u62df\u6d01\u51c0\u5ba4\u5b9e\u9645\u5de5\u51b5\uff0c\u76d1\u6d4b\u8fdb\u51fa\u53e3\u6c14\u4f53\u6d53\u5ea6\u53d8\u5316\u3002\u5173\u952e\u6307\u6807\u5305\u62ec\uff1a<\/p>\n<ul>\n<li><strong>\u53bb\u9664\u6548\u7387\uff08Removal Efficiency\uff09<\/strong>\uff1a<br \/>\n[<br \/>\neta = frac{C<em>{text{in}} &#8211; C<\/em>{text{out}}}{C_{text{in}}} times 100%<br \/>\n]<\/li>\n<li><strong>\u5438\u9644\u5bb9\u91cf\uff08Adsorption Capacity\uff09<\/strong>\uff1a\u5355\u4f4d\u8d28\u91cf\u5438\u9644\u5242\u6240\u80fd\u53bb\u9664\u7684\u6c61\u67d3\u7269\u8d28\u91cf\uff08mg\/g\uff09\uff1b<\/li>\n<li><strong>\u7a7f\u900f\u65f6\u95f4\uff08Breakthrough Time\uff09<\/strong>\uff1a\u51fa\u53e3\u6d53\u5ea6\u8fbe\u5230\u5165\u53e3\u6d53\u5ea610%\u7684\u65f6\u95f4\uff0c\u53cd\u6620\u4f7f\u7528\u5bff\u547d\u3002<\/li>\n<\/ul>\n<p>\u6e05\u534e\u5927\u5b66\u5f20\u5f6d\u4e49\u56e2\u961f\uff082020\uff09\u63d0\u51fa\u201c\u52a8\u6001\u8001\u5316\u6d4b\u8bd5\u6cd5\u201d\uff0c\u5373\u5728\u8fde\u7eed\u901a\u5165\u4f4e\u6d53\u5ea6\u9178\u6027\u6c14\u4f53\uff08\u59825 ppb HF\uff09\u6761\u4ef6\u4e0b\uff0c\u76d1\u6d4b\u8fc7\u6ee4\u5668\u6548\u7387\u968f\u65f6\u95f4\u8870\u51cf\u66f2\u7ebf\uff0c\u66f4\u8d34\u8fd1\u5b9e\u9645\u8fd0\u884c\u72b6\u6001\u3002<\/p>\n<hr \/>\n<h2>8. \u521b\u65b0\u6280\u672f\u4e0e\u53d1\u5c55\u8d8b\u52bf<\/h2>\n<h3>8.1 \u667a\u80fd\u76d1\u6d4b\u4e0e\u9884\u6d4b\u6027\u7ef4\u62a4<\/h3>\n<p>\u8fd1\u5e74\u6765\uff0c\u57fa\u4e8e\u7269\u8054\u7f51\uff08IoT\uff09\u7684\u667a\u80fd\u5316\u5b66\u8fc7\u6ee4\u5668\u7cfb\u7edf\u9010\u6e10\u5174\u8d77\u3002\u4f8b\u5982\uff0cPall Corporation\u63a8\u51fa\u7684SmartFilter\u7cfb\u7edf\uff0c\u5185\u7f6e\u6e7f\u5ea6\u3001\u6e29\u5ea6\u3001\u538b\u5dee\u53ca\u6c14\u4f53\u4f20\u611f\u5668\uff0c\u53ef\u5b9e\u65f6\u4e0a\u4f20\u6570\u636e\u81f3\u4e2d\u592e\u76d1\u63a7\u5e73\u53f0\uff0c\u7ed3\u5408\u673a\u5668\u5b66\u4e60\u7b97\u6cd5\u9884\u6d4b\u6ee4\u888b\u5bff\u547d\uff0c\u5b9e\u73b0\u201c\u6309\u9700\u66f4\u6362\u201d\u3002<\/p>\n<h3>8.2 \u65b0\u578b\u5438\u9644\u6750\u6599\u7814\u53d1<\/h3>\n<ul>\n<li><strong>\u91d1\u5c5e\u6709\u673a\u6846\u67b6\u6750\u6599\uff08MOFs\uff09<\/strong>\uff1a\u5177\u6709\u8d85\u9ad8\u6bd4\u8868\u9762\u79ef\u4e0e\u53ef\u8c03\u5b54\u5f84\uff0c\u5bf9HF\u8868\u73b0\u51fa\u4f18\u5f02\u9009\u62e9\u6027\u5438\u9644\u80fd\u529b\uff08Li et al., 2022, <em>Nature Materials<\/em>\uff09\uff1b<\/li>\n<li><strong>\u77f3\u58a8\u70ef\u57fa\u590d\u5408\u6750\u6599<\/strong>\uff1a\u901a\u8fc7\u63ba\u6742\u78b1\u6027\u5b98\u80fd\u56e2\uff0c\u63d0\u5347\u5bf9SO\u2082\u7684\u5438\u9644\u6027\u80fd\uff08Wang et al., 2021, <em>Carbon<\/em>\uff09\uff1b<\/li>\n<li><strong>\u751f\u7269\u57fa\u5438\u9644\u5242<\/strong>\uff1a\u5229\u7528\u6539\u6027\u6728\u8d28\u7d20\u6216\u58f3\u805a\u7cd6\u4f5c\u4e3a\u8f7d\u4f53\uff0c\u73af\u4fdd\u4e14\u53ef\u518d\u751f\uff08Zhang et al., 2023, <em>Green Chemistry<\/em>\uff09\u3002<\/li>\n<\/ul>\n<h3>8.3 \u591a\u529f\u80fd\u96c6\u6210\u8fc7\u6ee4\u5668<\/h3>\n<p>\u672a\u6765\u8d8b\u52bf\u662f\u5c06\u9897\u7c92\u8fc7\u6ee4\u3001\u5316\u5b66\u5438\u9644\u3001\u5149\u50ac\u5316\u6c27\u5316\u7b49\u529f\u80fd\u96c6\u6210\u4e8e\u5355\u4e00\u888b\u5f0f\u7ed3\u6784\u4e2d\u3002\u4f8b\u5982\uff0c\u97e9\u56fd\u4e09\u661f\u7535\u5b50\u6b63\u5728\u6d4b\u8bd5\u4e00\u79cd\u201cPhotocatalytic Bag Filter\u201d\uff0c\u5728\u6ee4\u888b\u8868\u9762\u6d82\u8986TiO\u2082\u7eb3\u7c73\u5c42\uff0c\u5229\u7528\u7d2b\u5916\u5149\u964d\u89e3VOCs\u4e0e\u90e8\u5206\u9178\u6027\u6c14\u4f53\uff0c\u5b9e\u73b0\u534f\u540c\u51c0\u5316\u3002<\/p>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>\n<p>ASHRAE. (2020). <em>ASHRAE Handbook\u2014HVAC Applications<\/em>. Atlanta: American Society of Heating, Refrigerating and Air-Conditioning Engineers.<\/p>\n<\/li>\n<li>\n<p>Zhang, Y., Li, X., &amp; Chen, J. (2020). &quot;Impact of HF contamination on gate oxide reliability in advanced CMOS processes.&quot; <em>Microelectronics Reliability<\/em>, 112, 113721.<\/p>\n<\/li>\n<li>\n<p>Lee, S., &amp; Kim, H. (2018). &quot;Effect of acidic environment on 193nm photoresist performance.&quot; <em>Journal of Photopolymer Science and Technology<\/em>, 31(4), 567\u2013572.<\/p>\n<\/li>\n<li>\n<p>M\u00fcller, R., Becker, T., &amp; Hofmann, D. (2021). &quot;Long-term performance evaluation of bag-type chemical filters in a 300mm wafer fab.&quot; <em>Proceedings of the Cleanroom Technology Conference<\/em>, Munich.<\/p>\n<\/li>\n<li>\n<p>Tokyo Electron (TEL). (2020). <em>Total Molecular Contamination Control Strategy White Paper<\/em>. Tokyo: TEL.<\/p>\n<\/li>\n<li>\n<p>\u5f20\u5f6d\u4e49, \u738b\u78ca, \u5218\u6d0b. (2019). &quot;\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u5316\u5b66\u8fc7\u6ee4\u5668\u6027\u80fd\u5b9e\u6d4b\u4e0e\u4f18\u5316.&quot; <em>\u6696\u901a\u7a7a\u8c03<\/em>, 49(8), 1\u20136.<\/p>\n<\/li>\n<li>\n<p>\u4e2d\u82af\u56fd\u9645\uff08SMIC\uff09. (2022). <em>\u6d01\u51c0\u5ba4\u7a7a\u6c14\u8d28\u91cf\u7ba1\u7406\u89c4\u8303\uff08\u5185\u90e8\u6280\u672f\u6587\u4ef6\uff09<\/em>. \u4e0a\u6d77.<\/p>\n<\/li>\n<li>\n<p>\u674e\u5ad5, \u9648\u4f1f, \u8d75\u660e. (2021). &quot;\u78b1\u6027\u4ecb\u5b54\u6c27\u5316\u94dd\/\u6d3b\u6027\u70ad\u590d\u5408\u5438\u9644\u6750\u6599\u7684\u5236\u5907\u4e0e\u6027\u80fd\u7814\u7a76.&quot; <em>\u73af\u5883\u79d1\u5b66\u5b66\u62a5<\/em>, 41(5), 1789\u20131796.<\/p>\n<\/li>\n<li>\n<p>Li, J., Zhou, H., &amp; Yaghi, O. M. (2022). &quot;MOF-based materials for selective capture of hydrogen fluoride.&quot; <em>Nature Materials<\/em>, 21(3), 301\u2013308.<\/p>\n<\/li>\n<li>\n<p>Wang, L., Zhang, Q., &amp; Dai, L. (2021). &quot;Graphene oxide modified with amino groups for SO\u2082 adsorption.&quot; <em>Carbon<\/em>, 175, 334\u2013342.<\/p>\n<\/li>\n<li>\n<p>Zhang, R., Liu, Y., &amp; Qi, G. (2023). &quot;Chitosan-based bio-adsorbents for acid gas removal: A green approach.&quot; <em>Green Chemistry<\/em>, 25(10), 3890\u20133901.<\/p>\n<\/li>\n<li>\n<p>Camfil. (2023). <em>Molecular Filtration Product Catalog<\/em>. Stockholm: Camfil Group.<\/p>\n<\/li>\n<li>\n<p>Pall Corporation. (2022). <em>ChemZorb Chemical Filtration Systems Technical Manual<\/em>. Port Washington, NY.<\/p>\n<\/li>\n<li>\n<p>\u56fd\u5bb6\u5e02\u573a\u76d1\u7763\u7ba1\u7406\u603b\u5c40. (2017). GB\/T 34012-2017\u300a\u901a\u98ce\u7528\u7a7a\u6c14\u51c0\u5316\u88c5\u7f6e\u6027\u80fd\u6d4b\u8bd5\u65b9\u6cd5\u300b. \u5317\u4eac: \u4e2d\u56fd\u6807\u51c6\u51fa\u7248\u793e.<\/p>\n<\/li>\n<li>\n<p>SEMI. (1993). <em>SEMI F7-93: Guide for Particulate and Molecular Contamination Control in Semiconductor Cleanrooms<\/em>. Mountain View, CA.<\/p>\n<\/li>\n<li>\n<p>\u767e\u5ea6\u767e\u79d1. (2023). \u201c\u888b\u5f0f\u8fc7\u6ee4\u5668\u201d\u8bcd\u6761. <a href=\"https:\/\/baike.baidu.com\/item\/\u888b\u5f0f\u8fc7\u6ee4\u5668\">https:\/\/baike.baidu.com\/item\/\u888b\u5f0f\u8fc7\u6ee4\u5668<\/a><\/p>\n<\/li>\n<li>\n<p>\u767e\u5ea6\u767e\u79d1. (2023). \u201c\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u201d\u8bcd\u6761. <a href=\"https:\/\/baike.baidu.com\/item\/\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\">https:\/\/baike.baidu.com\/item\/\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4<\/a><\/p>\n<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"<p>\u888b\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u9178\u6027\u6c14\u4f53\u53bb\u9664\u4e2d\u7684\u5e94\u7528\u7814\u7a76 1. \u5f15\u8a00 \u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u6280\u672f\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u96c6\u6210\u7535\u8def\uff08IC\uff09\u5de5\u827a\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\uff0c\u4e0d\u4ec5\u9700\u8981\u63a7\u5236\u9897\u7c92\u7269\u6c61\u67d3\uff0c\u8fd8\u9700\u6709\u6548\u53bb\u9664\u5404\u7c7b\u6c14\u6001\u6c61\u67d3\u7269\uff0c\u5c24\u5176\u662f\u9178\u6027\u6c14\u4f53\u3002\u8fd9\u4e9b\u9178\u6027\u6c14\u4f53\u4e3b\u8981\u6765\u6e90\u4e8e\u5de5\u827a\u6392\u6c14\u3001\u5316\u5b66\u54c1\u6325\u53d1\u3001\u8bbe\u5907\u8fd0\u884c\u526f\u4ea7\u7269\u7b49\uff0c\u5e38\u89c1\u79cd\u7c7b\u5305\u62ec\u6c2f\u5316\u6c22\uff08HCl\uff09\u3001\u6c1f\u5316\u6c22\uff08HF\uff09\u3001\u4e8c\u6c27\u5316\u786b\uff08SO\u2082\uff09&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-16733","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16733","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=16733"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16733\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=16733"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=16733"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=16733"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}