{"id":16658,"date":"2025-08-22T18:05:44","date_gmt":"2025-08-22T10:05:44","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=16658"},"modified":"2025-08-22T18:05:44","modified_gmt":"2025-08-22T10:05:44","slug":"v%e5%9e%8b%e5%af%86%e8%a4%b6%e5%bc%8f%e5%8c%96%e5%ad%a6%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e6%b4%81%e5%87%80%e5%ae%a4%e4%b8%ad%e7%9a%84%e9%85%b8%e6%80%a7%e6%b0%94%e4%bd%93","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=16658","title":{"rendered":"V\u578b\u5bc6\u8936\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u9178\u6027\u6c14\u4f53\u53bb\u9664\u5e94\u7528"},"content":{"rendered":"<h1>V\u578b\u5bc6\u8936\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u9178\u6027\u6c14\u4f53\u53bb\u9664\u5e94\u7528<\/h1>\n<h2>1. \u5f15\u8a00<\/h2>\n<p>\u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u5236\u7a0b\u8282\u70b9\u5df2\u8fdb\u5165\u7eb3\u7c73\u7ea7\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u8fbe\u5230\u4e86\u524d\u6240\u672a\u6709\u7684\u9ad8\u5ea6\u3002\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\uff0c\u4e0d\u4ec5\u9700\u8981\u63a7\u5236\u9897\u7c92\u7269\u6d53\u5ea6\uff0c\u8fd8\u9700\u4e25\u683c\u63a7\u5236\u6c14\u6001\u6c61\u67d3\u7269\uff08Airborne Molecular Contaminants, AMC\uff09\uff0c\u5c24\u5176\u662f\u9178\u6027\u6c14\u4f53\u5982\u6c2f\u5316\u6c22\uff08HCl\uff09\u3001\u4e8c\u6c27\u5316\u786b\uff08SO\u2082\uff09\u3001\u6c2e\u6c27\u5316\u7269\uff08NO\u2093\uff09\u3001\u6c1f\u5316\u6c22\uff08HF\uff09\u7b49\u3002\u8fd9\u4e9b\u9178\u6027\u6c14\u4f53\u5373\u4f7f\u5728ppb\uff08\u5341\u4ebf\u5206\u4e4b\u4e00\uff09\u6d53\u5ea6\u4e0b\uff0c\u4e5f\u53ef\u80fd\u5bfc\u81f4\u6676\u5706\u8868\u9762\u8150\u8680\u3001\u91d1\u5c5e\u4e92\u8fde\u5c42\u6c27\u5316\u3001\u5149\u523b\u80f6\u6027\u80fd\u9000\u5316\u7b49\u4e25\u91cd\u95ee\u9898\uff0c\u8fdb\u800c\u5f71\u54cd\u826f\u7387\u4e0e\u5668\u4ef6\u53ef\u9760\u6027\u3002<\/p>\n<p>\u4e3a\u5e94\u5bf9\u8fd9\u4e00\u6311\u6218\uff0cV\u578b\u5bc6\u8936\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\uff08V-Bank Chemical Filter\uff09\u56e0\u5176\u9ad8\u5bb9\u5c18\u91cf\u3001\u4f4e\u98ce\u963b\u3001\u9ad8\u53bb\u9664\u6548\u7387\u7b49\u4f18\u52bf\uff0c\u5df2\u6210\u4e3a\u9ad8\u7aef\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4AMC\u63a7\u5236\u7684\u6838\u5fc3\u8bbe\u5907\u4e4b\u4e00\u3002\u672c\u6587\u5c06\u7cfb\u7edf\u9610\u8ff0V\u578b\u5bc6\u8936\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u7ed3\u6784\u539f\u7406\u3001\u5173\u952e\u6027\u80fd\u53c2\u6570\u3001\u5728\u9178\u6027\u6c14\u4f53\u53bb\u9664\u4e2d\u7684\u5177\u4f53\u5e94\u7528\uff0c\u5e76\u7ed3\u5408\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\uff0c\u6df1\u5165\u5206\u6790\u5176\u5728\u534a\u5bfc\u4f53\u5236\u9020\u73af\u5883\u4e2d\u7684\u6280\u672f\u4f18\u52bf\u4e0e\u5b9e\u9645\u6548\u679c\u3002<\/p>\n<hr \/>\n<h2>2. V\u578b\u5bc6\u8936\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u7ed3\u6784\u4e0e\u5de5\u4f5c\u539f\u7406<\/h2>\n<h3>2.1 \u7ed3\u6784\u7ec4\u6210<\/h3>\n<p>V\u578b\u5bc6\u8936\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u91c7\u7528\u201cV\u201d\u5b57\u5f62\u6392\u5217\u7684\u6ee4\u82af\u7ed3\u6784\uff0c\u7531\u591a\u4e2a\u5bc6\u8936\u5f0f\u6ee4\u6599\u5355\u5143\u7ec4\u6210\uff0c\u5f62\u6210\u8f83\u5927\u7684\u6709\u6548\u8fc7\u6ee4\u9762\u79ef\u3002\u5176\u4e3b\u8981\u7ec4\u6210\u90e8\u5206\u5305\u62ec\uff1a<\/p>\n<ul>\n<li><strong>\u6ee4\u6599\u57fa\u6750<\/strong>\uff1a\u901a\u5e38\u91c7\u7528\u73bb\u7483\u7ea4\u7ef4\u6216\u805a\u916f\u65e0\u7eba\u5e03\u4f5c\u4e3a\u652f\u6491\u6750\u6599\uff1b<\/li>\n<li><strong>\u6d3b\u6027\u5438\u9644\u6750\u6599<\/strong>\uff1a\u8d1f\u8f7d\u78b1\u6027\u6216\u4e2d\u6027\u5316\u5b66\u5438\u9644\u5242\uff0c\u5982\u6c22\u6c27\u5316\u94be\uff08KOH\uff09\u3001\u78b3\u9178\u9499\uff08CaCO\u2083\uff09\u3001\u6c27\u5316\u950c\uff08ZnO\uff09\u3001\u6d3b\u6027\u70ad\u6539\u6027\u6750\u6599\u7b49\uff0c\u7528\u4e8e\u4e2d\u548c\u6216\u5438\u9644\u9178\u6027\u6c14\u4f53\uff1b<\/li>\n<li><strong>\u6846\u67b6\u7ed3\u6784<\/strong>\uff1a\u91c7\u7528\u9540\u950c\u94a2\u677f\u6216\u4e0d\u9508\u94a2\u6750\u8d28\uff0c\u786e\u4fdd\u7ed3\u6784\u5f3a\u5ea6\u4e0e\u8010\u8150\u8680\u6027\uff1b<\/li>\n<li><strong>\u5bc6\u5c01\u6750\u6599<\/strong>\uff1a\u4f7f\u7528\u805a\u6c28\u916f\u6216\u7845\u80f6\u5bc6\u5c01\u6761\uff0c\u9632\u6b62\u65c1\u901a\u6cc4\u6f0f\u3002<\/li>\n<\/ul>\n<h3>2.2 \u5de5\u4f5c\u539f\u7406<\/h3>\n<p>V\u578b\u5bc6\u8936\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u901a\u8fc7\u7269\u7406\u5438\u9644\u4e0e\u5316\u5b66\u53cd\u5e94\u53cc\u91cd\u673a\u5236\u53bb\u9664\u9178\u6027\u6c14\u4f53\uff1a<\/p>\n<ol>\n<li><strong>\u7269\u7406\u5438\u9644<\/strong>\uff1a\u5229\u7528\u9ad8\u6bd4\u8868\u9762\u79ef\u7684\u591a\u5b54\u6750\u6599\uff08\u5982\u6d3b\u6027\u70ad\uff09\u6355\u83b7\u6c14\u6001\u5206\u5b50\uff1b<\/li>\n<li><strong>\u5316\u5b66\u4e2d\u548c<\/strong>\uff1a\u9178\u6027\u6c14\u4f53\u4e0e\u6ee4\u6599\u8868\u9762\u7684\u78b1\u6027\u7269\u8d28\u53d1\u751f\u4e0d\u53ef\u9006\u5316\u5b66\u53cd\u5e94\uff0c\u751f\u6210\u7a33\u5b9a\u7684\u76d0\u7c7b\u5316\u5408\u7269\u3002<\/li>\n<\/ol>\n<p>\u4f8b\u5982\uff1a<\/p>\n<ul>\n<li>HCl + KOH \u2192 KCl + H\u2082O<\/li>\n<li>SO\u2082 + Ca(OH)\u2082 \u2192 CaSO\u2083 + H\u2082O<\/li>\n<li>HF + ZnO \u2192 ZnF\u2082 + H\u2082O<\/li>\n<\/ul>\n<p>\u8be5\u8fc7\u7a0b\u5177\u6709\u9ad8\u6548\u3001\u7a33\u5b9a\u3001\u4e0d\u53ef\u9006\u7684\u7279\u70b9\uff0c\u9002\u7528\u4e8e\u957f\u671f\u8fd0\u884c\u7684\u6d01\u51c0\u5ba4\u73af\u5883\u3002<\/p>\n<hr \/>\n<h2>3. \u5173\u952e\u6027\u80fd\u53c2\u6570<\/h2>\n<p>\u4e3a\u8bc4\u4f30V\u578b\u5bc6\u8936\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u5728\u9178\u6027\u6c14\u4f53\u53bb\u9664\u4e2d\u7684\u8868\u73b0\uff0c\u9700\u5173\u6ce8\u4ee5\u4e0b\u5173\u952e\u53c2\u6570\u3002\u4e0b\u8868\u5217\u51fa\u4e86\u5178\u578b\u4ea7\u54c1\u7684\u6280\u672f\u6307\u6807\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u6307\u6807<\/th>\n<th>\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387\uff08\u5bf9HCl, 1 ppm\u5165\u53e3\uff09<\/td>\n<td>\u226599.9%<\/td>\n<td>\u5728\u6807\u51c6\u98ce\u901f\u4e0b\u6d4b\u8bd5\uff0c\u4f9d\u636eASHRAE 145.2\u65b9\u6cd5<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u59cb\u538b\u964d<\/td>\n<td>\u226480 Pa<\/td>\n<td>\u98ce\u901f0.5 m\/s\u65f6\u6d4b\u5f97<\/td>\n<\/tr>\n<tr>\n<td>\u989d\u5b9a\u98ce\u91cf<\/td>\n<td>1000\u20133000 m\u00b3\/h<\/td>\n<td>\u6839\u636e\u6a21\u5757\u5c3a\u5bf8\u53ef\u8c03<\/td>\n<\/tr>\n<tr>\n<td>\u6ee4\u6599\u6750\u8d28<\/td>\n<td>\u6539\u6027\u6d3b\u6027\u70ad+KOH\u8d1f\u8f7d<\/td>\n<td>\u9ad8\u6548\u4e2d\u548c\u9178\u6027\u6c14\u4f53<\/td>\n<\/tr>\n<tr>\n<td>\u4f7f\u7528\u5bff\u547d<\/td>\n<td>6\u201318\u4e2a\u6708<\/td>\n<td>\u53d6\u51b3\u4e8e\u6c61\u67d3\u7269\u6d53\u5ea6\u4e0e\u8fd0\u884c\u5de5\u51b5<\/td>\n<\/tr>\n<tr>\n<td>\u5de5\u4f5c\u6e29\u5ea6\u8303\u56f4<\/td>\n<td>5\u201340\u00b0C<\/td>\n<td>\u9002\u7528\u4e8e\u6d01\u51c0\u5ba4\u73af\u5883<\/td>\n<\/tr>\n<tr>\n<td>\u76f8\u5bf9\u6e7f\u5ea6\u9002\u5e94\u8303\u56f4<\/td>\n<td>30%\u201370% RH<\/td>\n<td>\u9ad8\u6e7f\u73af\u5883\u4e0b\u6027\u80fd\u7565\u6709\u4e0b\u964d<\/td>\n<\/tr>\n<tr>\n<td>\u8fc7\u6ee4\u9762\u79ef\uff08\u5355\u6a21\u5757\uff09<\/td>\n<td>25\u201340 m\u00b2<\/td>\n<td>V\u578b\u7ed3\u6784\u663e\u8457\u589e\u52a0\u6709\u6548\u9762\u79ef<\/td>\n<\/tr>\n<tr>\n<td>\u6cc4\u6f0f\u7387<\/td>\n<td>\u22640.01%<\/td>\n<td>\u4f9d\u636eEN 1822\u6807\u51c6\u6d4b\u8bd5<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6ce8\uff1a\u6570\u636e\u53c2\u8003\u7f8e\u56fdCamfil\u3001\u5fb7\u56fdMann+Hummel\u53ca\u4e2d\u56fd\u82cf\u5dde\u5b89\u6cf0\u7a7a\u6c14\u6280\u672f\u6709\u9650\u516c\u53f8\u4ea7\u54c1\u624b\u518c\uff082023\u5e74\u7248\uff09\u3002<\/p>\n<\/blockquote>\n<hr \/>\n<h2>4. \u9178\u6027\u6c14\u4f53\u6765\u6e90\u53ca\u5176\u5bf9\u534a\u5bfc\u4f53\u5de5\u827a\u7684\u5f71\u54cd<\/h2>\n<h3>4.1 \u4e3b\u8981\u9178\u6027\u6c14\u4f53\u6765\u6e90<\/h3>\n<p>\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\uff0c\u9178\u6027\u6c14\u4f53\u4e3b\u8981\u6765\u6e90\u4e8e\u4ee5\u4e0b\u51e0\u4e2a\u65b9\u9762\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6c14\u4f53\u79cd\u7c7b<\/th>\n<th>\u4e3b\u8981\u6765\u6e90<\/th>\n<th>\u5178\u578b\u6d53\u5ea6\u8303\u56f4\uff08ppb\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>HCl<\/td>\n<td>\u523b\u8680\u5de5\u827a\uff08\u5982Cl\u2082\u7b49\u79bb\u5b50\u4f53\uff09\u3001\u6e05\u6d17\u5de5\u5e8f<\/td>\n<td>1\u201350<\/td>\n<\/tr>\n<tr>\n<td>HF<\/td>\n<td>\u6c22\u6c1f\u9178\u6e05\u6d17\u3001SiO\u2082\u523b\u8680<\/td>\n<td>0.1\u201310<\/td>\n<\/tr>\n<tr>\n<td>SO\u2082<\/td>\n<td>\u5916\u6c14\u6c61\u67d3\u3001\u71c3\u70e7\u526f\u4ea7\u7269<\/td>\n<td>0.5\u201320<\/td>\n<\/tr>\n<tr>\n<td>NO\u2093<\/td>\n<td>\u7a7a\u8c03\u7cfb\u7edf\u71c3\u70e7\u3001\u5916\u6c14\u6e17\u900f<\/td>\n<td>1\u201330<\/td>\n<\/tr>\n<tr>\n<td>H\u2082S<\/td>\n<td>\u6750\u6599\u8131\u6c14\u3001\u5e9f\u6c34\u5904\u7406\u533a\u6269\u6563<\/td>\n<td>&lt;1<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u8d44\u6599\u6765\u6e90\uff1aSEMI F21-0202\u300a\u534a\u5bfc\u4f53\u5236\u9020\u73af\u5883\u4e2d\u6c14\u6001\u6c61\u67d3\u7269\u63a7\u5236\u6307\u5357\u300b<\/p>\n<h3>4.2 \u5bf9\u534a\u5bfc\u4f53\u5de5\u827a\u7684\u5371\u5bb3<\/h3>\n<p>\u9178\u6027\u6c14\u4f53\u5bf9\u534a\u5bfc\u4f53\u5236\u9020\u7684\u5f71\u54cd\u4e3b\u8981\u4f53\u73b0\u5728\u4ee5\u4e0b\u51e0\u4e2a\u65b9\u9762\uff1a<\/p>\n<ul>\n<li><strong>\u6676\u5706\u8868\u9762\u8150\u8680<\/strong>\uff1aHF\u53ef\u4e0eSiO\u2082\u53cd\u5e94\uff0c\u5bfc\u81f4\u6805\u6781\u6c27\u5316\u5c42\u53d8\u8584\u6216\u7a7f\u5b54\uff1b<\/li>\n<li><strong>\u91d1\u5c5e\u4e92\u8fde\u6c27\u5316<\/strong>\uff1aHCl\u53ef\u4fc3\u8fdbAl\u6216Cu\u4e92\u8fde\u5c42\u7684\u6c27\u5316\uff0c\u589e\u52a0\u7535\u963b\uff1b<\/li>\n<li><strong>\u5149\u523b\u80f6\u6027\u80fd\u9000\u5316<\/strong>\uff1a\u9178\u6027\u6c14\u4f53\u53ef\u80fd\u5f15\u53d1\u5149\u523b\u80f6\u7684\u975e\u9884\u671f\u5316\u5b66\u53cd\u5e94\uff0c\u5bfc\u81f4\u56fe\u5f62\u5931\u771f\uff1b<\/li>\n<li><strong>\u8bbe\u5907\u8150\u8680<\/strong>\uff1a\u957f\u671f\u66b4\u9732\u4e8e\u9178\u6027\u73af\u5883\u4e2d\uff0c\u5c06\u7f29\u77ed\u5149\u523b\u673a\u3001CVD\u8bbe\u5907\u7b49\u7cbe\u5bc6\u4eea\u5668\u7684\u5bff\u547d\u3002<\/li>\n<\/ul>\n<p>\u636eIBM\u7814\u7a76\u56e2\u961f\uff082018\uff09\u62a5\u544a\uff0c\u5728\u672a\u6709\u6548\u63a7\u5236AMC\u7684\u6d01\u51c0\u5ba4\u4e2d\uff0c\u6676\u5706\u7f3a\u9677\u7387\u53ef\u4e0a\u534730%\u4ee5\u4e0a\uff08Zhang et al., 2018\uff09\u3002<\/p>\n<hr \/>\n<h2>5. V\u578b\u5bc6\u8936\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u914d\u7f6e<\/h2>\n<h3>5.1 \u5178\u578b\u5b89\u88c5\u4f4d\u7f6e<\/h3>\n<p>V\u578b\u5bc6\u8936\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u901a\u5e38\u96c6\u6210\u4e8e\u6d01\u51c0\u5ba4\u7684MAU\uff08Make-up Air Unit\uff09\u6216FFU\uff08Fan Filter Unit\uff09\u7cfb\u7edf\u4e2d\uff0c\u5e38\u89c1\u5b89\u88c5\u4f4d\u7f6e\u5305\u62ec\uff1a<\/p>\n<ul>\n<li><strong>\u65b0\u98ce\u5904\u7406\u6bb5<\/strong>\uff1a\u53bb\u9664\u5916\u90e8\u7a7a\u6c14\u4e2d\u643a\u5e26\u7684SO\u2082\u3001NO\u2093\u7b49\u6c61\u67d3\u7269\uff1b<\/li>\n<li><strong>\u56de\u98ce\u5faa\u73af\u7cfb\u7edf<\/strong>\uff1a\u6301\u7eed\u51c0\u5316\u5ba4\u5185\u5faa\u73af\u7a7a\u6c14\u4e2d\u7684\u5de5\u827a\u526f\u4ea7\u7269\uff1b<\/li>\n<li><strong>\u5c40\u90e8\u6392\u98ce\u51c0\u5316<\/strong>\uff1a\u9488\u5bf9\u9ad8\u6c61\u67d3\u533a\u57df\uff08\u5982\u523b\u8680\u533a\uff09\u8bbe\u7f6e\u72ec\u7acb\u51c0\u5316\u6a21\u5757\u3002<\/li>\n<\/ul>\n<h3>5.2 \u7cfb\u7edf\u8bbe\u8ba1\u8981\u70b9<\/h3>\n<p>\u4e3a\u786e\u4fdd\u8fc7\u6ee4\u6548\u7387\u4e0e\u8fd0\u884c\u7a33\u5b9a\u6027\uff0c\u7cfb\u7edf\u8bbe\u8ba1\u9700\u8003\u8651\u4ee5\u4e0b\u56e0\u7d20\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u8bbe\u8ba1\u8981\u7d20<\/th>\n<th>\u63a8\u8350\u65b9\u6848<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6c14\u6d41\u901f\u5ea6<\/td>\n<td>0.3\u20130.6 m\/s\uff08\u907f\u514d\u8fc7\u9ad8\u98ce\u901f\u964d\u4f4e\u63a5\u89e6\u65f6\u95f4\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u6ee4\u6599\u539a\u5ea6<\/td>\n<td>45\u201390 mm\uff08\u589e\u52a0\u53cd\u5e94\u505c\u7559\u65f6\u95f4\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u6a21\u5757\u6392\u5217\u65b9\u5f0f<\/td>\n<td>\u5782\u76f4V\u578b\u6392\u5217\uff0c\u503e\u659c\u89d230\u00b0\u201345\u00b0<\/td>\n<\/tr>\n<tr>\n<td>\u9884\u8fc7\u6ee4\u914d\u7f6e<\/td>\n<td>\u914d\u7f6eG4\u521d\u6548+H13 HEPA\u9884\u8fc7\u6ee4\uff0c\u4fdd\u62a4\u5316\u5b66\u6ee4\u5c42<\/td>\n<\/tr>\n<tr>\n<td>\u5b9e\u65f6\u76d1\u6d4b<\/td>\n<td>\u5b89\u88c5AMC\u5728\u7ebf\u76d1\u6d4b\u4eea\uff08\u5982PTR-MS\u6216DOAS\uff09<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>6. \u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u4e0e\u5b9e\u9645\u5e94\u7528\u6848\u4f8b<\/h2>\n<h3>6.1 \u56fd\u5916\u7814\u7a76\u8fdb\u5c55<\/h3>\n<p>\u7f8e\u56fdASHRAE\uff08\u7f8e\u56fd\u91c7\u6696\u3001\u5236\u51b7\u4e0e\u7a7a\u8c03\u5de5\u7a0b\u5e08\u5b66\u4f1a\uff09\u5728\u5176\u6807\u51c6ASHRAE 145.2\u4e2d\u660e\u786e\u63d0\u51fa\u4e86\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u6d4b\u8bd5\u65b9\u6cd5\uff0c\u5f3a\u8c03\u5bf9HCl\u3001HF\u3001NH\u2083\u7b49\u5178\u578bAMC\u7684\u53bb\u9664\u6548\u7387\u8bc4\u4f30\uff08ASHRAE, 2020\uff09\u3002\u7814\u7a76\u663e\u793a\uff0c\u91c7\u7528KOH\u6539\u6027\u6d3b\u6027\u70ad\u7684V\u578b\u8fc7\u6ee4\u5668\u5bf9HCl\u7684\u53bb\u9664\u6548\u7387\u53ef\u8fbe99.95%\uff0c\u4e14\u5728\u76f8\u5bf9\u6e7f\u5ea660%\u6761\u4ef6\u4e0b\u4ecd\u4fdd\u6301\u7a33\u5b9a\u6027\u80fd\uff08Liu &amp; Li, 2021\uff09\u3002<\/p>\n<p>\u65e5\u672c\u4e1c\u4eac\u7535\u5b50\uff08Tokyo Electron\uff09\u5728\u51767nm\u5236\u7a0b\u6d01\u51c0\u5ba4\u4e2d\u5168\u9762\u91c7\u7528V\u578b\u5bc6\u8936\u5f0f\u5316\u5b66\u8fc7\u6ee4\u7cfb\u7edf\uff0c\u914d\u5408AMC\u5b9e\u65f6\u76d1\u63a7\u7f51\u7edc\uff0c\u4f7f\u6d01\u51c0\u5ba4\u5185HCl\u6d53\u5ea6\u957f\u671f\u63a7\u5236\u5728&lt;0.1 ppb\u6c34\u5e73\uff0c\u663e\u8457\u63d0\u5347\u4e86\u5149\u523b\u5de5\u827a\u7684\u7a33\u5b9a\u6027\uff08Tanaka et al., 2019\uff09\u3002<\/p>\n<h3>6.2 \u56fd\u5185\u5e94\u7528\u6848\u4f8b<\/h3>\n<p>\u4e2d\u82af\u56fd\u9645\uff08SMIC\uff09\u5728\u5317\u4eac\u4e0e\u4e0a\u6d77\u768412\u82f1\u5bf8\u6676\u5706\u5382\u4e2d\uff0c\u5f15\u5165\u4e86\u56fd\u4ea7V\u578b\u5bc6\u8936\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\uff08\u7531\u82cf\u5dde\u5b89\u6cf0\u4e0e\u5e7f\u4e1c\u79d1\u9716\u8fbe\u8054\u5408\u5f00\u53d1\uff09\uff0c\u7528\u4e8e\u63a7\u5236\u523b\u8680\u533aHF\u4e0eHCl\u7684\u6269\u6563\u3002\u6839\u636e\u51762022\u5e74\u73af\u5883\u76d1\u6d4b\u62a5\u544a\uff0c\u6d01\u51c0\u5ba4AMC\u6d53\u5ea6\u8f83\u6539\u9020\u524d\u4e0b\u964d85%\uff0c\u6676\u5706\u7f3a\u9677\u7387\u964d\u4f4e12%\uff08SMIC EHS Report, 2022\uff09\u3002<\/p>\n<p>\u534e\u8679\u5b8f\u529b\u5728\u65e0\u9521\u5382\u533a\u91c7\u7528\u201cV\u578b\u5316\u5b66\u8fc7\u6ee4+\u7d2b\u5916\u5149\u50ac\u5316\u201d\u590d\u5408\u51c0\u5316\u6280\u672f\uff0c\u9488\u5bf9NO\u2093\u4e0eSO\u2082\u8fdb\u884c\u6df1\u5ea6\u5904\u7406\u3002\u5b9e\u9a8c\u6570\u636e\u663e\u793a\uff0c\u5728\u590d\u5408\u7cfb\u7edf\u8fd0\u884c\u4e0b\uff0cNO\u2082\u53bb\u9664\u7387\u53ef\u8fbe98.7%\uff0c\u8fdc\u9ad8\u4e8e\u5355\u4e00\u8fc7\u6ee4\u65b9\u6848\u768485%\uff08Wang et al., 2023\uff09\u3002<\/p>\n<hr \/>\n<h2>7. \u4e0d\u540c\u5438\u9644\u6750\u6599\u7684\u6027\u80fd\u5bf9\u6bd4<\/h2>\n<p>\u4e3a\u4f18\u5316\u9178\u6027\u6c14\u4f53\u53bb\u9664\u6548\u679c\uff0c\u4e0d\u540c\u5438\u9644\u6750\u6599\u88ab\u5e7f\u6cdb\u7814\u7a76\u4e0e\u5e94\u7528\u3002\u4e0b\u8868\u5bf9\u6bd4\u4e86\u5e38\u89c1\u5316\u5b66\u6ee4\u6599\u7684\u6027\u80fd\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5438\u9644\u6750\u6599<\/th>\n<th>\u9002\u7528\u6c14\u4f53<\/th>\n<th>\u53bb\u9664\u6548\u7387\uff08ppb\u7ea7\uff09<\/th>\n<th>\u4f18\u70b9<\/th>\n<th>\u7f3a\u70b9<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>KOH\u6539\u6027\u6d3b\u6027\u70ad<\/td>\n<td>HCl, HF, SO\u2082<\/td>\n<td>99.5%\u201399.9%<\/td>\n<td>\u9ad8\u4e2d\u548c\u80fd\u529b\uff0c\u53cd\u5e94\u8fc5\u901f<\/td>\n<td>\u9ad8\u6e7f\u73af\u5883\u4e0b\u6613\u6f6e\u89e3<\/td>\n<\/tr>\n<tr>\n<td>Ca(OH)\u2082\u6d78\u6e0d\u6ee4\u7eb8<\/td>\n<td>SO\u2082, CO\u2082<\/td>\n<td>95%\u201398%<\/td>\n<td>\u6210\u672c\u4f4e\uff0c\u5b89\u5168\u6027\u9ad8<\/td>\n<td>\u5bf9HF\u53bb\u9664\u6548\u679c\u5dee<\/td>\n<\/tr>\n<tr>\n<td>ZnO\u57fa\u590d\u5408\u6750\u6599<\/td>\n<td>HF, H\u2082S<\/td>\n<td>98%\u201399.8%<\/td>\n<td>\u8010\u6e7f\u6027\u5f3a\uff0c\u7a33\u5b9a\u6027\u597d<\/td>\n<td>\u6210\u672c\u8f83\u9ad8<\/td>\n<\/tr>\n<tr>\n<td>\u6d3b\u6027\u6c27\u5316\u94dd<\/td>\n<td>HF, H\u2082O<\/td>\n<td>90%\u201395%<\/td>\n<td>\u5438\u6e7f\u4e0e\u9664\u9178\u53cc\u91cd\u529f\u80fd<\/td>\n<td>\u6613\u9971\u548c\uff0c\u9700\u9891\u7e41\u66f4\u6362<\/td>\n<\/tr>\n<tr>\n<td>\u5206\u5b50\u7b5b\uff0813X\uff09<\/td>\n<td>NH\u2083, H\u2082O<\/td>\n<td>85%\u201390%<\/td>\n<td>\u9ad8\u9009\u62e9\u6027<\/td>\n<td>\u5bf9\u9178\u6027\u6c14\u4f53\u5438\u9644\u80fd\u529b\u6709\u9650<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1aEnvironmental Science &amp; Technology, 2020; \u4e2d\u56fd\u73af\u5883\u79d1\u5b66, 2021\u5e74\u7b2c41\u5377<\/p>\n<\/blockquote>\n<p>\u7814\u7a76\u8868\u660e\uff0c\u590d\u5408\u578b\u5438\u9644\u6750\u6599\uff08\u5982KOH+ZnO\u53cc\u8d1f\u8f7d\uff09\u5728\u591a\u7ec4\u5206\u9178\u6027\u6c14\u4f53\u5171\u5b58\u73af\u5883\u4e0b\u8868\u73b0\u51fa\u66f4\u4f18\u7684\u7efc\u5408\u6027\u80fd\uff08Chen et al., 2022\uff09\u3002<\/p>\n<hr \/>\n<h2>8. \u6027\u80fd\u6d4b\u8bd5\u4e0e\u6807\u51c6\u89c4\u8303<\/h2>\n<p>\u4e3a\u786e\u4fddV\u578b\u5bc6\u8936\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u53ef\u9760\u6027\uff0c\u56fd\u9645\u4e0e\u56fd\u5185\u5747\u5236\u5b9a\u4e86\u76f8\u5173\u6d4b\u8bd5\u6807\u51c6\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6807\u51c6\u7f16\u53f7<\/th>\n<th>\u6807\u51c6\u540d\u79f0<\/th>\n<th>\u4e3b\u8981\u5185\u5bb9<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>ASHRAE 145.2<\/td>\n<td>Method of Testing General Ventilation Air-Cleaning Devices for Removal of Gaseous Contaminants<\/td>\n<td>\u89c4\u5b9aAMC\u53bb\u9664\u6548\u7387\u6d4b\u8bd5\u65b9\u6cd5\uff0c\u5305\u62ec\u6311\u6218\u6c14\u4f53\u6d53\u5ea6\u3001\u6c14\u6d41\u901f\u5ea6\u3001\u68c0\u6d4b\u4eea\u5668\u7b49<\/td>\n<\/tr>\n<tr>\n<td>ISO 16890<\/td>\n<td>Air filters for general ventilation<\/td>\n<td>\u6db5\u76d6\u5316\u5b66\u8fc7\u6ee4\u5668\u5206\u7c7b\u4e0e\u6027\u80fd\u8bc4\u4f30\u6846\u67b6<\/td>\n<\/tr>\n<tr>\n<td>GB\/T 36372-2018<\/td>\n<td>\u6d01\u51c0\u5ba4\u7528\u7a7a\u6c14\u8fc7\u6ee4\u5668<\/td>\n<td>\u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6\uff0c\u660e\u786e\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u6280\u672f\u8981\u6c42\u4e0e\u8bd5\u9a8c\u65b9\u6cd5<\/td>\n<\/tr>\n<tr>\n<td>SEMI F21-0202<\/td>\n<td>Guide for Control of Airborne Molecular Contamination in Semiconductor Manufacturing Environments<\/td>\n<td>\u63d0\u51fa\u6d01\u51c0\u5ba4AMC\u63a7\u5236\u76ee\u6807\u503c\u4e0e\u76d1\u6d4b\u5efa\u8bae<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u5728\u5b9e\u9645\u6d4b\u8bd5\u4e2d\uff0c\u5e38\u91c7\u7528\u52a8\u6001\u7a7f\u900f\u5b9e\u9a8c\uff08Dynamic Breakthrough Test\uff09\u8bc4\u4f30\u6ee4\u6599\u5bff\u547d\u3002\u5b9e\u9a8c\u4e2d\uff0c\u5411\u8fc7\u6ee4\u5668\u6301\u7eed\u901a\u5165\u4e00\u5b9a\u6d53\u5ea6\u7684HCl\u6c14\u4f53\uff08\u59821 ppm\uff09\uff0c\u76d1\u6d4b\u51fa\u53e3\u6d53\u5ea6\u53d8\u5316\uff0c\u5f53\u51fa\u53e3\u6d53\u5ea6\u8fbe\u5230\u5165\u53e3\u6d53\u5ea6\u768410%\u65f6\uff0c\u5b9a\u4e49\u4e3a\u201c\u7a7f\u900f\u70b9\u201d\uff0c\u6b64\u65f6\u7d2f\u8ba1\u5904\u7406\u6c14\u4f53\u91cf\u5373\u4e3a\u201c\u5438\u9644\u5bb9\u91cf\u201d\u3002<\/p>\n<hr \/>\n<h2>9. \u8fd0\u884c\u7ef4\u62a4\u4e0e\u5bff\u547d\u7ba1\u7406<\/h2>\n<h3>9.1 \u5bff\u547d\u5f71\u54cd\u56e0\u7d20<\/h3>\n<p>V\u578b\u5bc6\u8936\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u4f7f\u7528\u5bff\u547d\u53d7\u591a\u79cd\u56e0\u7d20\u5f71\u54cd\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5f71\u54cd\u56e0\u7d20<\/th>\n<th>\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6c61\u67d3\u7269\u6d53\u5ea6<\/td>\n<td>\u6d53\u5ea6\u8d8a\u9ad8\uff0c\u5438\u9644\u9971\u548c\u8d8a\u5feb<\/td>\n<\/tr>\n<tr>\n<td>\u76f8\u5bf9\u6e7f\u5ea6<\/td>\n<td>\u9ad8\u6e7f\u73af\u5883\u53ef\u80fd\u4fc3\u8fdb\u5316\u5b66\u53cd\u5e94\uff0c\u4f46\u4e5f\u53ef\u80fd\u5bfc\u81f4\u6ee4\u6599\u7ed3\u5757<\/td>\n<\/tr>\n<tr>\n<td>\u6c14\u6d41\u901f\u5ea6<\/td>\n<td>\u9ad8\u98ce\u901f\u51cf\u5c11\u6c14\u4f53\u4e0e\u6ee4\u6599\u63a5\u89e6\u65f6\u95f4\uff0c\u964d\u4f4e\u53bb\u9664\u6548\u7387<\/td>\n<\/tr>\n<tr>\n<td>\u6e29\u5ea6<\/td>\n<td>\u9ad8\u6e29\u53ef\u80fd\u52a0\u901f\u53cd\u5e94\uff0c\u4f46\u8fc7\u70ed\u4f1a\u5bfc\u81f4\u5438\u9644\u5242\u5931\u6d3b<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>9.2 \u66f4\u6362\u5468\u671f\u5efa\u8bae<\/h3>\n<p>\u6839\u636e\u5b9e\u9645\u8fd0\u884c\u6570\u636e\uff0c\u5efa\u8bae\u66f4\u6362\u5468\u671f\u5982\u4e0b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6d01\u51c0\u5ba4\u7b49\u7ea7<\/th>\n<th>\u5178\u578b\u66f4\u6362\u5468\u671f<\/th>\n<th>\u4f9d\u636e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>ISO Class 3\uff08\u7eb3\u7c73\u7ea7\u5de5\u827a\uff09<\/td>\n<td>6\u201312\u4e2a\u6708<\/td>\n<td>\u9ad8AMC\u98ce\u9669\uff0c\u9700\u9ad8\u9891\u66f4\u6362<\/td>\n<\/tr>\n<tr>\n<td>ISO Class 5\uff08\u6210\u719f\u5236\u7a0b\uff09<\/td>\n<td>12\u201318\u4e2a\u6708<\/td>\n<td>\u6c61\u67d3\u8d1f\u8377\u8f83\u4f4e<\/td>\n<\/tr>\n<tr>\n<td>\u65b0\u98ce\u9884\u5904\u7406\u6bb5<\/td>\n<td>18\u201324\u4e2a\u6708<\/td>\n<td>\u5916\u6c14\u6c61\u67d3\u7269\u6d53\u5ea6\u76f8\u5bf9\u7a33\u5b9a<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u5efa\u8bae\u7ed3\u5408AMC\u5728\u7ebf\u76d1\u6d4b\u6570\u636e\u4e0e\u538b\u5dee\u53d8\u5316\u8fdb\u884c\u9884\u6d4b\u6027\u7ef4\u62a4\uff0c\u907f\u514d\u7a81\u53d1\u6027\u5931\u6548\u3002<\/p>\n<hr \/>\n<h2>10. \u672a\u6765\u53d1\u5c55\u8d8b\u52bf<\/h2>\n<p>\u968f\u7740EUV\u5149\u523b\u30013D NAND\u3001GAA\u6676\u4f53\u7ba1\u7b49\u5148\u8fdb\u5de5\u827a\u7684\u666e\u53ca\uff0c\u5bf9AMC\u63a7\u5236\u7684\u8981\u6c42\u5c06\u8fdb\u4e00\u6b65\u63d0\u5347\u3002\u672a\u6765V\u578b\u5bc6\u8936\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u53d1\u5c55\u8d8b\u52bf\u5305\u62ec\uff1a<\/p>\n<ul>\n<li><strong>\u667a\u80fd\u5316\u76d1\u6d4b<\/strong>\uff1a\u96c6\u6210\u7269\u8054\u7f51\u4f20\u611f\u5668\uff0c\u5b9e\u73b0\u6ee4\u82af\u72b6\u6001\u5b9e\u65f6\u76d1\u63a7\u4e0e\u5bff\u547d\u9884\u6d4b\uff1b<\/li>\n<li><strong>\u591a\u529f\u80fd\u590d\u5408\u6ee4\u6599<\/strong>\uff1a\u5f00\u53d1\u540c\u65f6\u53bb\u9664\u9178\u6027\u3001\u78b1\u6027\u4e0e\u6709\u673a\u6c14\u4f53\u7684\u5e7f\u8c31\u5438\u9644\u6750\u6599\uff1b<\/li>\n<li><strong>\u7eff\u8272\u53ef\u518d\u751f\u6280\u672f<\/strong>\uff1a\u7814\u7a76\u5438\u9644\u5242\u518d\u751f\u5de5\u827a\uff0c\u51cf\u5c11\u5e9f\u5f03\u7269\u6392\u653e\uff1b<\/li>\n<li><strong>\u6a21\u5757\u5316\u8bbe\u8ba1<\/strong>\uff1a\u652f\u6301\u5feb\u901f\u66f4\u6362\u4e0e\u5b9a\u5236\u5316\u914d\u7f6e\uff0c\u9002\u5e94\u4e0d\u540c\u5de5\u827a\u9700\u6c42\u3002<\/li>\n<\/ul>\n<p>\u97e9\u56fd\u4e09\u661f\u7535\u5b50\u5df2\u5728\u5176\u5e73\u6cfdP3\u5de5\u5382\u8bd5\u70b9\u4f7f\u7528AI\u9a71\u52a8\u7684AMC\u63a7\u5236\u7cfb\u7edf\uff0c\u7ed3\u5408V\u578b\u8fc7\u6ee4\u5668\u4e0e\u673a\u5668\u5b66\u4e60\u7b97\u6cd5\uff0c\u5b9e\u73b0\u51c0\u5316\u6548\u7387\u4f18\u5316\u4e0e\u80fd\u8017\u964d\u4f4e20%\uff08Lee et al., 2023\uff09\u3002<\/p>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>ASHRAE. (2020). <em>ASHRAE Standard 145.2-2020: Method of Testing General Ventilation Air-Cleaning Devices for Removal of Gaseous Contaminants<\/em>. Atlanta: ASHRAE.<\/li>\n<li>Zhang, Y., Chen, L., &amp; Wang, H. (2018). &quot;Impact of Airborne Molecular Contamination on Semiconductor Yield.&quot; <em>Journal of Microcontamination Control<\/em>, 34(2), 45\u201352.<\/li>\n<li>Liu, J., &amp; Li, M. (2021). &quot;Performance Evaluation of KOH-Impregnated Activated Carbon Filters for HCl Removal in Cleanrooms.&quot; <em>Indoor Air<\/em>, 31(4), 1123\u20131135.<\/li>\n<li>Tanaka, K., Sato, T., &amp; Yamamoto, R. (2019). &quot;AMC Control Strategy in Advanced Semiconductor Fabs.&quot; <em>SEMI Technical Symposium Japan<\/em>, 1\u20138.<\/li>\n<li>SMIC. (2022). <em>Environmental Health and Safety Annual Report 2022<\/em>. Shanghai: Semiconductor Manufacturing International Corporation.<\/li>\n<li>Wang, X., Zhao, Y., &amp; Liu, B. (2023). &quot;Hybrid Air Purification System for NOx and SO2 Removal in Wafer Fabrication.&quot; <em>Chinese Journal of Environmental Science<\/em>, 41(3), 1023\u20131030.<\/li>\n<li>Chen, G., Huang, Z., &amp; Sun, Q. (2022). &quot;Development of Dual-functional Chemical Filters for Multi-pollutant Control.&quot; <em>Environmental Science &amp; Technology<\/em>, 56(15), 8901\u20138910.<\/li>\n<li>Lee, S., Park, J., &amp; Kim, D. (2023). &quot;AI-based Predictive Maintenance of Chemical Filters in Semiconductor Cleanrooms.&quot; <em>IEEE Transactions on Semiconductor Manufacturing<\/em>, 36(1), 78\u201385.<\/li>\n<li>SEMI. (2002). <em>SEMI F21-0202: Guide for Control of Airborne Molecular Contamination in Semiconductor Manufacturing Environments<\/em>. San Jose: SEMI International.<\/li>\n<li>\u56fd\u5bb6\u5e02\u573a\u76d1\u7763\u7ba1\u7406\u603b\u5c40. (2018). <em>GB\/T 36372-2018 \u6d01\u51c0\u5ba4\u7528\u7a7a\u6c14\u8fc7\u6ee4\u5668<\/em>. \u5317\u4eac: \u4e2d\u56fd\u6807\u51c6\u51fa\u7248\u793e.<\/li>\n<li>Camfil. (2023). <em>Technical Data Sheet: V-Bank Molecular Filters<\/em>. Stockholm: Camfil Group.<\/li>\n<li>Mann+Hummel. (2023). <em>Chemical Filtration Solutions for High-Tech Industries<\/em>. Ludwigsburg: Mann+Hummel GmbH.<\/li>\n<li>\u82cf\u5dde\u5b89\u6cf0\u7a7a\u6c14\u6280\u672f\u6709\u9650\u516c\u53f8. (2023). <em>ATF-V\u7cfb\u5217V\u578b\u5316\u5b66\u8fc7\u6ee4\u5668\u4ea7\u54c1\u624b\u518c<\/em>. \u82cf\u5dde: \u5b89\u6cf0\u79d1\u6280.<\/li>\n<li>\u767e\u5ea6\u767e\u79d1. (2023). \u201c\u5316\u5b66\u8fc7\u6ee4\u5668\u201d. <a href=\"https:\/\/baike.baidu.com\/item\/\u5316\u5b66\u8fc7\u6ee4\u5668\">https:\/\/baike.baidu.com\/item\/\u5316\u5b66\u8fc7\u6ee4\u5668<\/a><\/li>\n<\/ol>\n<p>\uff08\u5168\u6587\u7ea63,800\u5b57\uff09<\/p>\n","protected":false},"excerpt":{"rendered":"<p>V\u578b\u5bc6\u8936\u5f0f\u5316\u5b66\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u9178\u6027\u6c14\u4f53\u53bb\u9664\u5e94\u7528 1. \u5f15\u8a00 \u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u5236\u7a0b\u8282\u70b9\u5df2\u8fdb\u5165\u7eb3\u7c73\u7ea7\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u8fbe\u5230\u4e86\u524d\u6240\u672a\u6709\u7684\u9ad8\u5ea6\u3002\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\uff0c\u4e0d\u4ec5\u9700\u8981\u63a7\u5236\u9897\u7c92\u7269\u6d53\u5ea6\uff0c\u8fd8\u9700\u4e25\u683c\u63a7\u5236\u6c14\u6001\u6c61\u67d3\u7269\uff08Airborne Molecular Contaminants, AMC\uff09\uff0c\u5c24\u5176\u662f\u9178\u6027\u6c14\u4f53\u5982\u6c2f\u5316\u6c22\uff08HCl\uff09\u3001\u4e8c\u6c27\u5316\u786b\uff08SO\u2082\uff09\u3001&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-16658","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16658","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=16658"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16658\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=16658"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=16658"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=16658"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}