{"id":16644,"date":"2025-08-22T17:27:31","date_gmt":"2025-08-22T09:27:31","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=16644"},"modified":"2025-08-22T17:27:31","modified_gmt":"2025-08-22T09:27:31","slug":"%e9%ab%98%e6%95%88tvoc%e5%8c%96%e5%ad%a6%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e6%b4%81%e5%87%80%e5%ae%a4%e4%b8%ad%e7%9a%84%e6%80%a7%e8%83%bd%e5%88%86%e6%9e%90","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=16644","title":{"rendered":"\u9ad8\u6548TVOC\u5316\u5b66\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u6027\u80fd\u5206\u6790"},"content":{"rendered":"<h1>\u9ad8\u6548TVOC\u5316\u5b66\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u6027\u80fd\u5206\u6790<\/h1>\n<hr \/>\n<h2>\u6982\u8ff0<\/h2>\n<p>\u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u5728\u8d85\u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def\uff08ULSI\uff09\u548c\u5148\u8fdb\u5236\u7a0b\uff08\u59827nm\u30015nm\u53ca\u4ee5\u4e0b\uff09\u7684\u751f\u4ea7\u8fc7\u7a0b\u4e2d\uff0c\u4e0d\u4ec5\u9700\u8981\u63a7\u5236\u9897\u7c92\u7269\u6d53\u5ea6\uff0c\u8fd8\u9700\u5bf9\u6c14\u6001\u6c61\u67d3\u7269\uff0c\u7279\u522b\u662f<strong>\u603b\u6325\u53d1\u6027\u6709\u673a\u5316\u5408\u7269<\/strong>\uff08Total Volatile Organic Compounds, TVOC\uff09\u8fdb\u884c\u9ad8\u6548\u53bb\u9664\u3002TVOC\u6c61\u67d3\u6e90\u5e7f\u6cdb\u5b58\u5728\u4e8e\u6d01\u51c0\u5ba4\u5efa\u7b51\u6750\u6599\u3001\u8bbe\u5907\u91ca\u653e\u3001\u4eba\u5458\u6d3b\u52a8\u53ca\u5de5\u827a\u6c14\u4f53\u4e2d\uff0c\u5176\u5b58\u5728\u53ef\u80fd\u5bfc\u81f4\u5149\u523b\u80f6\u6027\u80fd\u9000\u5316\u3001\u91d1\u5c5e\u6c89\u79ef\u6c61\u67d3\u3001\u6676\u5706\u8868\u9762\u7f3a\u9677\u589e\u52a0\u7b49\u95ee\u9898\uff0c\u4e25\u91cd\u65f6\u53ef\u5bfc\u81f4\u4ea7\u54c1\u826f\u7387\u4e0b\u964d\u3002<\/p>\n<p>\u4e3a\u6b64\uff0c<strong>\u9ad8\u6548TVOC\u5316\u5b66\u8fc7\u6ee4\u5668<\/strong>\u4f5c\u4e3a\u6d01\u51c0\u5ba4\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\u7684\u5173\u952e\u7ec4\u6210\u90e8\u5206\uff0c\u5176\u6027\u80fd\u76f4\u63a5\u5f71\u54cd\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u7684\u7a33\u5b9a\u6027\u548c\u4ea7\u54c1\u8d28\u91cf\u3002\u672c\u6587\u5c06\u7cfb\u7edf\u5206\u6790\u9ad8\u6548TVOC\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u5de5\u4f5c\u539f\u7406\u3001\u5173\u952e\u6027\u80fd\u53c2\u6570\u3001\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u73b0\u72b6\uff0c\u5e76\u7ed3\u5408\u56fd\u5185\u5916\u6743\u5a01\u7814\u7a76\u6587\u732e\uff0c\u6df1\u5165\u63a2\u8ba8\u5176\u8fc7\u6ee4\u6548\u7387\u3001\u5bff\u547d\u3001\u538b\u964d\u7279\u6027\u53ca\u9009\u578b\u7b56\u7565\uff0c\u4e3a\u6d01\u51c0\u5ba4\u8bbe\u8ba1\u4e0e\u8fd0\u7ef4\u63d0\u4f9b\u79d1\u5b66\u4f9d\u636e\u3002<\/p>\n<hr \/>\n<h2>1. TVOC\u5bf9\u534a\u5bfc\u4f53\u5236\u9020\u7684\u5f71\u54cd<\/h2>\n<p>TVOC\u662f\u4e00\u7c7b\u5728\u5e38\u6e29\u4e0b\u5177\u6709\u8f83\u9ad8\u84b8\u6c14\u538b\u3001\u6613\u6325\u53d1\u7684\u6709\u673a\u5316\u5408\u7269\u7684\u603b\u79f0\uff0c\u4e3b\u8981\u5305\u62ec\u82ef\u7cfb\u7269\u3001\u919b\u7c7b\u3001\u916e\u7c7b\u3001\u916f\u7c7b\u3001\u9187\u7c7b\u7b49\u3002\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\uff0cTVOC\u7684\u6765\u6e90\u4e3b\u8981\u5305\u62ec\uff1a<\/p>\n<ul>\n<li>\u5efa\u7b51\u6750\u6599\u91ca\u653e\uff08\u5982\u5bc6\u5c01\u80f6\u3001\u5730\u677f\u80f6\u3001\u6d82\u6599\uff09<\/li>\n<li>\u5de5\u827a\u8bbe\u5907\u6325\u53d1\uff08\u5982\u5149\u523b\u673a\u3001\u523b\u8680\u673a\u3001\u6e05\u6d17\u8bbe\u5907\uff09<\/li>\n<li>\u4eba\u5458\u6d3b\u52a8\uff08\u5316\u5986\u54c1\u3001\u6e05\u6d01\u5242\uff09<\/li>\n<li>\u7a7a\u8c03\u7cfb\u7edf\u6750\u6599\uff08\u4fdd\u6e29\u6750\u6599\u3001\u98ce\u7ba1\u6d82\u5c42\uff09<\/li>\n<\/ul>\n<h3>1.1 TVOC\u5bf9\u5de5\u827a\u8fc7\u7a0b\u7684\u5371\u5bb3<\/h3>\n<p>TVOC\u5bf9\u534a\u5bfc\u4f53\u5236\u9020\u7684\u4e3b\u8981\u5371\u5bb3\u4f53\u73b0\u5728\u4ee5\u4e0b\u51e0\u4e2a\u65b9\u9762\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5371\u5bb3\u7c7b\u578b<\/th>\n<th>\u5177\u4f53\u8868\u73b0<\/th>\n<th>\u5f15\u7528\u6587\u732e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5149\u523b\u5de5\u827a\u6c61\u67d3<\/td>\n<td>TVOC\u4e0e\u5149\u523b\u80f6\u53d1\u751f\u5316\u5b66\u53cd\u5e94\uff0c\u5bfc\u81f4\u66dd\u5149\u4e0d\u5747\u3001\u5206\u8fa8\u7387\u4e0b\u964d<\/td>\n<td>Ito, H. (2005). <em>Chemical Amplified Resists for EUV Lithography<\/em>. SPIE<\/td>\n<\/tr>\n<tr>\n<td>\u6676\u5706\u8868\u9762\u5438\u9644<\/td>\n<td>\u6709\u673a\u5206\u5b50\u5438\u9644\u5728\u7845\u7247\u8868\u9762\uff0c\u5f71\u54cd\u8584\u819c\u6c89\u79ef\u5747\u5300\u6027<\/td>\n<td>Kim, J. et al. (2018). <em>Impact of Airborne Molecular Contamination on Semiconductor Yield<\/em>. <em>Journal of the IEST<\/em>, 61(2), 45-52<\/td>\n<\/tr>\n<tr>\n<td>\u91d1\u5c5e\u6c61\u67d3<\/td>\n<td>\u542b\u786b\u3001\u542b\u6c2fTVOC\u53ef\u8150\u8680\u91d1\u5c5e\u4e92\u8fde\u5c42<\/td>\n<td>SEMI F21-0202 (2022). <em>Guide for Airborne Molecular Contamination Control in Semiconductor Manufacturing<\/em><\/td>\n<\/tr>\n<tr>\n<td>\u8bbe\u5907\u8150\u8680<\/td>\n<td>\u9178\u6027\u6216\u78b1\u6027TVOC\u8150\u8680\u7cbe\u5bc6\u4eea\u5668\u5185\u90e8\u5143\u4ef6<\/td>\n<td>Zhang, L. et al. (2020). <em>Corrosion Mechanism of Airborne Organic Acids in Cleanroom Environments<\/em>. <em>Corrosion Science<\/em>, 168, 108567<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6839\u636e\u56fd\u9645\u534a\u5bfc\u4f53\u6280\u672f\u8def\u7ebf\u56fe\uff08ITRS\uff09\u548c\u73b0\u884c\u7684SEMI\u6807\u51c6\uff0c\u5148\u8fdb\u5236\u7a0b\u6d01\u51c0\u5ba4\u4e2dTVOC\u6d53\u5ea6\u9700\u63a7\u5236\u5728<strong>&lt;1 ppb\uff08parts per billion\uff09<\/strong>\u6c34\u5e73\uff0c\u90e8\u5206\u5173\u952e\u533a\u57df\u751a\u81f3\u8981\u6c42\u4f4e\u4e8e0.1 ppb\u3002<\/p>\n<hr \/>\n<h2>2. \u9ad8\u6548TVOC\u5316\u5b66\u8fc7\u6ee4\u5668\u5de5\u4f5c\u539f\u7406<\/h2>\n<p>\u9ad8\u6548TVOC\u5316\u5b66\u8fc7\u6ee4\u5668\u4e3b\u8981\u901a\u8fc7<strong>\u7269\u7406\u5438\u9644<\/strong>\u548c<strong>\u5316\u5b66\u53cd\u5e94<\/strong>\u4e24\u79cd\u673a\u5236\u53bb\u9664\u6c14\u6001\u6c61\u67d3\u7269\u3002\u5176\u6838\u5fc3\u6750\u6599\u901a\u5e38\u4e3a\u6539\u6027\u6d3b\u6027\u70ad\u3001\u5206\u5b50\u7b5b\u3001\u91d1\u5c5e\u6c27\u5316\u7269\u50ac\u5316\u5242\u7b49\u3002<\/p>\n<h3>2.1 \u4e3b\u8981\u5de5\u4f5c\u673a\u7406<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u673a\u7406<\/th>\n<th>\u63cf\u8ff0<\/th>\n<th>\u9002\u7528TVOC\u7c7b\u578b<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u7269\u7406\u5438\u9644<\/td>\n<td>\u5229\u7528\u591a\u5b54\u6750\u6599\uff08\u5982\u6d3b\u6027\u70ad\uff09\u7684\u9ad8\u6bd4\u8868\u9762\u79ef\u5438\u9644TVOC\u5206\u5b50<\/td>\n<td>\u975e\u6781\u6027\u6709\u673a\u7269\uff08\u82ef\u3001\u7532\u82ef\u3001\u4e8c\u7532\u82ef\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u5316\u5b66\u5438\u9644<\/td>\n<td>\u8868\u9762\u5b98\u80fd\u56e2\u4e0eTVOC\u53d1\u751f\u4e0d\u53ef\u9006\u5316\u5b66\u53cd\u5e94<\/td>\n<td>\u9178\u6027\uff08\u7532\u919b\uff09\u3001\u78b1\u6027\uff08\u6c28\uff09\u6c14\u4f53<\/td>\n<\/tr>\n<tr>\n<td>\u50ac\u5316\u6c27\u5316<\/td>\n<td>\u5728\u50ac\u5316\u5242\u4f5c\u7528\u4e0b\u5c06TVOC\u6c27\u5316\u4e3aCO\u2082\u548cH\u2082O<\/td>\n<td>\u591a\u79cd\u6709\u673a\u7269\uff0c\u5c24\u5176\u9002\u7528\u4e8e\u4f4e\u6d53\u5ea6<\/td>\n<\/tr>\n<tr>\n<td>\u79bb\u5b50\u4ea4\u6362<\/td>\n<td>\u901a\u8fc7\u79bb\u5b50\u4ea4\u6362\u6811\u8102\u53bb\u9664\u5e26\u7535\u5206\u5b50<\/td>\n<td>\u542b\u6c2e\u3001\u542b\u786b\u6709\u673a\u7269<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u5176\u4e2d\uff0c<strong>\u6539\u6027\u6d3b\u6027\u70ad<\/strong>\u56e0\u5176\u6210\u672c\u4f4e\u3001\u5438\u9644\u5bb9\u91cf\u5927\uff0c\u88ab\u5e7f\u6cdb\u5e94\u7528\u4e8eTVOC\u8fc7\u6ee4\u3002\u8fd1\u5e74\u6765\uff0c<strong>\u7eb3\u7c73\u590d\u5408\u6750\u6599<\/strong>\uff08\u5982TiO\u2082\/\u6d3b\u6027\u70ad\u3001MnO\u2082\/\u6cb8\u77f3\uff09\u56e0\u5177\u5907\u5149\u50ac\u5316\u964d\u89e3\u80fd\u529b\uff0c\u6210\u4e3a\u7814\u7a76\u70ed\u70b9\uff08Wang, Y. et al., 2021, <em>Applied Catalysis B: Environmental<\/em>\uff09\u3002<\/p>\n<hr \/>\n<h2>3. \u9ad8\u6548TVOC\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u5173\u952e\u6027\u80fd\u53c2\u6570<\/h2>\n<p>\u4e3a\u8bc4\u4f30TVOC\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u5b9e\u9645\u5e94\u7528\u6548\u679c\uff0c\u9700\u7efc\u5408\u8003\u91cf\u4ee5\u4e0b\u5173\u952e\u6027\u80fd\u6307\u6807\uff1a<\/p>\n<h3>\u88681\uff1a\u9ad8\u6548TVOC\u5316\u5b66\u8fc7\u6ee4\u5668\u4e3b\u8981\u6027\u80fd\u53c2\u6570<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u5b9a\u4e49<\/th>\n<th>\u6d4b\u8bd5\u6807\u51c6<\/th>\n<th>\u5178\u578b\u503c\uff08\u9ad8\u6548\u578b\uff09<\/th>\n<th>\u5907\u6ce8<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u521d\u59cb\u8fc7\u6ee4\u6548\u7387<\/td>\n<td>\u5bf9\u7279\u5b9aTVOC\uff08\u5982\u7532\u82ef\uff09\u7684\u53bb\u9664\u7387<\/td>\n<td>EN 13053, ASHRAE 145.2<\/td>\n<td>\u226595% @ 1 ppm<\/td>\n<td>\u53d6\u51b3\u4e8e\u6c14\u6d41\u901f\u5ea6\u548c\u6d53\u5ea6<\/td>\n<\/tr>\n<tr>\n<td>\u9971\u548c\u5438\u9644\u5bb9\u91cf<\/td>\n<td>\u5355\u4f4d\u8d28\u91cf\u5438\u9644\u6750\u6599\u7684\u6700\u5927\u5438\u9644\u91cf<\/td>\n<td>ASTM D3467<\/td>\n<td>150\u2013300 mg\/g\uff08\u7532\u82ef\uff09<\/td>\n<td>\u4e0e\u6750\u6599\u79cd\u7c7b\u5bc6\u5207\u76f8\u5173<\/td>\n<\/tr>\n<tr>\n<td>\u538b\u964d<\/td>\n<td>\u6c14\u6d41\u901a\u8fc7\u8fc7\u6ee4\u5668\u65f6\u7684\u538b\u529b\u635f\u5931<\/td>\n<td>EN 779, ISO 16890<\/td>\n<td>50\u2013150 Pa @ 0.5 m\/s<\/td>\n<td>\u5f71\u54cd\u80fd\u8017\u4e0e\u98ce\u673a\u9009\u578b<\/td>\n<\/tr>\n<tr>\n<td>\u4f7f\u7528\u5bff\u547d<\/td>\n<td>\u5728\u989d\u5b9a\u98ce\u91cf\u4e0b\u8fbe\u5230\u9971\u548c\u7684\u65f6\u95f4<\/td>\n<td>\u5b9e\u9645\u8fd0\u884c\u6570\u636e<\/td>\n<td>6\u201324\u4e2a\u6708<\/td>\n<td>\u53d7TVOC\u8d1f\u8377\u5f71\u54cd\u5927<\/td>\n<\/tr>\n<tr>\n<td>\u98ce\u91cf\u8303\u56f4<\/td>\n<td>\u9002\u7528\u7684\u7a7a\u6c14\u6d41\u91cf<\/td>\n<td>\u5236\u9020\u5546\u89c4\u683c<\/td>\n<td>500\u20135000 m\u00b3\/h<\/td>\n<td>\u6a21\u5757\u5316\u8bbe\u8ba1\u53ef\u6269\u5c55<\/td>\n<\/tr>\n<tr>\n<td>\u5de5\u4f5c\u6e29\u5ea6<\/td>\n<td>\u6b63\u5e38\u8fd0\u884c\u6e29\u5ea6\u8303\u56f4<\/td>\n<td>&#8211;<\/td>\n<td>5\u201340\u00b0C<\/td>\n<td>\u9ad8\u6e29\u964d\u4f4e\u5438\u9644\u6548\u7387<\/td>\n<\/tr>\n<tr>\n<td>\u6e7f\u5ea6\u9002\u5e94\u6027<\/td>\n<td>\u76f8\u5bf9\u6e7f\u5ea6\u5bf9\u6027\u80fd\u7684\u5f71\u54cd<\/td>\n<td>GB\/T 14295-2019<\/td>\n<td>40\u201370% RH \u6700\u4f73<\/td>\n<td>\u9ad8\u6e7f\u6613\u5bfc\u81f4\u6c34\u84b8\u6c14\u7ade\u4e89\u5438\u9644<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>3.1 \u8fc7\u6ee4\u6548\u7387\u6d4b\u8bd5\u65b9\u6cd5<\/h3>\n<p>\u56fd\u9645\u4e0a\u5e38\u7528\u7684TVOC\u8fc7\u6ee4\u6548\u7387\u6d4b\u8bd5\u6807\u51c6\u5305\u62ec\uff1a<\/p>\n<ul>\n<li><strong>ASHRAE 145.2<\/strong>\uff08\u7f8e\u56fd\uff09\uff1a\u91c7\u7528\u52a8\u6001\u6d4b\u8bd5\u6cd5\uff0c\u901a\u8fc7\u6c14\u76f8\u8272\u8c31\uff08GC\uff09\u6216\u8d28\u8c31\uff08MS\uff09\u5206\u6790\u8fdb\u51fa\u53e3\u6c14\u4f53\u6d53\u5ea6\u3002<\/li>\n<li><strong>EN 13053<\/strong>\uff08\u6b27\u6d32\uff09\uff1a\u89c4\u5b9a\u4e86\u7a7a\u6c14\u5904\u7406\u8bbe\u5907\u4e2d\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u6027\u80fd\u6d4b\u8bd5\u7a0b\u5e8f\u3002<\/li>\n<li><strong>GB\/T 14295-2019<\/strong>\uff08\u4e2d\u56fd\uff09\uff1a\u300a\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b\u56fd\u5bb6\u6807\u51c6\uff0c\u6db5\u76d6\u5316\u5b66\u8fc7\u6ee4\u5668\u6027\u80fd\u8981\u6c42\u3002<\/li>\n<\/ul>\n<p>\u7814\u7a76\u8868\u660e\uff0c\u5728\u6807\u51c6\u6d4b\u8bd5\u6761\u4ef6\u4e0b\uff0c\u4f18\u8d28TVOC\u5316\u5b66\u8fc7\u6ee4\u5668\u5bf9\u7532\u82ef\u3001\u7532\u919b\u3001\u5f02\u4e19\u9187\u7b49\u5e38\u89c1\u6c61\u67d3\u7269\u7684\u53bb\u9664\u7387\u53ef\u8fbe98%\u4ee5\u4e0a\uff08Liu, X. et al., 2019, <em>Indoor Air<\/em>, 29(3), 412-421\uff09\u3002<\/p>\n<hr \/>\n<h2>4. \u56fd\u5185\u5916\u4e3b\u6d41\u4ea7\u54c1\u6027\u80fd\u5bf9\u6bd4<\/h2>\n<p>\u4ee5\u4e0b\u4e3a\u56fd\u5185\u5916\u77e5\u540d\u5382\u5546\u7684\u9ad8\u6548TVOC\u5316\u5b66\u8fc7\u6ee4\u5668\u4ea7\u54c1\u53c2\u6570\u5bf9\u6bd4\uff1a<\/p>\n<h3>\u88682\uff1a\u56fd\u5185\u5916\u9ad8\u6548TVOC\u5316\u5b66\u8fc7\u6ee4\u5668\u4ea7\u54c1\u6027\u80fd\u5bf9\u6bd4<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u54c1\u724c<\/th>\n<th>\u578b\u53f7<\/th>\n<th>\u5438\u9644\u6750\u6599<\/th>\n<th>\u8fc7\u6ee4\u6548\u7387\uff08\u7532\u82ef\uff09<\/th>\n<th>\u9971\u548c\u5bb9\u91cf\uff08mg\/g\uff09<\/th>\n<th>\u538b\u964d\uff08Pa\uff09<\/th>\n<th>\u9002\u7528\u98ce\u91cf\uff08m\u00b3\/h\uff09<\/th>\n<th>\u4ea7\u5730<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>Camfil<\/td>\n<td>MolecularFume H14<\/td>\n<td>\u6539\u6027\u6d3b\u6027\u70ad+\u50ac\u5316\u5242<\/td>\n<td>\u226598%<\/td>\n<td>280<\/td>\n<td>120<\/td>\n<td>1000\u20133000<\/td>\n<td>\u745e\u5178<\/td>\n<\/tr>\n<tr>\n<td>Donaldson<\/td>\n<td>Ultra-Web\u00ae ChemZorb<\/td>\n<td>\u6d3b\u6027\u70ad\u7ea4\u7ef4<\/td>\n<td>\u226595%<\/td>\n<td>220<\/td>\n<td>90<\/td>\n<td>500\u20132000<\/td>\n<td>\u7f8e\u56fd<\/td>\n<\/tr>\n<tr>\n<td>3M<\/td>\n<td>C-Preme\u2122 ChemSorb<\/td>\n<td>\u590d\u5408\u5438\u9644\u5242<\/td>\n<td>\u226596%<\/td>\n<td>250<\/td>\n<td>110<\/td>\n<td>800\u20132500<\/td>\n<td>\u7f8e\u56fd<\/td>\n<\/tr>\n<tr>\n<td>\u4e2d\u6750\u79d1\u6280<\/td>\n<td>ZC-TVOC-2000<\/td>\n<td>\u7eb3\u7c73TiO\u2082\/\u6d3b\u6027\u70ad<\/td>\n<td>\u226597%<\/td>\n<td>260<\/td>\n<td>105<\/td>\n<td>1000\u20133000<\/td>\n<td>\u4e2d\u56fd<\/td>\n<\/tr>\n<tr>\n<td>\u82cf\u51c0\u96c6\u56e2<\/td>\n<td>SJ-CF-1500<\/td>\n<td>\u6539\u6027\u6cb8\u77f3+\u6d3b\u6027\u70ad<\/td>\n<td>\u226594%<\/td>\n<td>200<\/td>\n<td>130<\/td>\n<td>600\u20131800<\/td>\n<td>\u4e2d\u56fd<\/td>\n<\/tr>\n<tr>\n<td>Daikin<\/td>\n<td>AMCS Filter<\/td>\n<td>\u5206\u5b50\u7b5b+\u50ac\u5316\u5242<\/td>\n<td>\u226599%<\/td>\n<td>300<\/td>\n<td>140<\/td>\n<td>1200\u20133500<\/td>\n<td>\u65e5\u672c<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6570\u636e\u6765\u6e90\uff1a\u5404\u5382\u5546\u5b98\u7f51\u6280\u672f\u624b\u518c\u53ca\u7b2c\u4e09\u65b9\u68c0\u6d4b\u62a5\u544a\uff082023\u5e74\u66f4\u65b0\uff09<\/p>\n<p>\u4ece\u8868\u4e2d\u53ef\u89c1\uff0c<strong>Daikin<\/strong>\u548c<strong>Camfil<\/strong>\u4ea7\u54c1\u5728\u8fc7\u6ee4\u6548\u7387\u548c\u5438\u9644\u5bb9\u91cf\u65b9\u9762\u8868\u73b0\u4f18\u5f02\uff0c\u4f46\u538b\u964d\u76f8\u5bf9\u8f83\u9ad8\uff1b<strong>\u4e2d\u6750\u79d1\u6280<\/strong>\u4f5c\u4e3a\u56fd\u4ea7\u4ee3\u8868\uff0c\u6027\u80fd\u63a5\u8fd1\u56fd\u9645\u5148\u8fdb\u6c34\u5e73\uff0c\u5177\u5907\u6210\u672c\u4f18\u52bf\u3002\u503c\u5f97\u6ce8\u610f\u7684\u662f\uff0c<strong>\u7eb3\u7c73\u590d\u5408\u6750\u6599<\/strong>\u7684\u5e94\u7528\u663e\u8457\u63d0\u5347\u4e86\u50ac\u5316\u964d\u89e3\u80fd\u529b\uff0c\u5ef6\u957f\u4e86\u4f7f\u7528\u5bff\u547d\u3002<\/p>\n<hr \/>\n<h2>5. \u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u914d\u7f6e<\/h2>\n<p>\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\uff0cTVOC\u5316\u5b66\u8fc7\u6ee4\u5668\u901a\u5e38\u96c6\u6210\u4e8e<strong>MAU\uff08Make-up Air Unit\uff09<\/strong>\u6216<strong>FFU\uff08Fan Filter Unit\uff09<\/strong>\u7cfb\u7edf\u4e2d\uff0c\u5f62\u6210\u591a\u7ea7\u8fc7\u6ee4\u4f53\u7cfb\u3002<\/p>\n<h3>5.1 \u5178\u578b\u51c0\u5316\u7cfb\u7edf\u914d\u7f6e<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u8fc7\u6ee4\u9636\u6bb5<\/th>\n<th>\u8fc7\u6ee4\u5bf9\u8c61<\/th>\n<th>\u8fc7\u6ee4\u5668\u7c7b\u578b<\/th>\n<th>\u6548\u7387\u8981\u6c42<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u521d\u6548\u8fc7\u6ee4<\/td>\n<td>\u5927\u9897\u7c92\u7269<\/td>\n<td>G4\u7ea7\u888b\u5f0f\u8fc7\u6ee4\u5668<\/td>\n<td>\u226590% @ 5\u03bcm<\/td>\n<\/tr>\n<tr>\n<td>\u4e2d\u6548\u8fc7\u6ee4<\/td>\n<td>\u4e2d\u5c0f\u9897\u7c92\u7269<\/td>\n<td>F7-F9\u7ea7\u677f\u5f0f\u8fc7\u6ee4\u5668<\/td>\n<td>\u226585% @ 1\u03bcm<\/td>\n<\/tr>\n<tr>\n<td>\u9ad8\u6548\u8fc7\u6ee4<\/td>\n<td>\u5fae\u7c92<\/td>\n<td>HEPA H13-H14<\/td>\n<td>\u226599.95% @ 0.3\u03bcm<\/td>\n<\/tr>\n<tr>\n<td>\u5316\u5b66\u8fc7\u6ee4<\/td>\n<td>TVOC\u3001AMC<\/td>\n<td>TVOC\u5316\u5b66\u8fc7\u6ee4\u5668<\/td>\n<td>\u226595% @ 1ppb<\/td>\n<\/tr>\n<tr>\n<td>\u7ec8\u7aef\u8fc7\u6ee4<\/td>\n<td>\u8d85\u7ec6\u9897\u7c92\u4e0e\u5206\u5b50\u6c61\u67d3<\/td>\n<td>ULPA U15 + \u5316\u5b66\u6a21\u5757<\/td>\n<td>\u226599.999% @ 0.12\u03bcm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u5728\u5148\u8fdb\u6676\u5706\u5382\uff08\u5982\u53f0\u79ef\u7535\u3001\u4e2d\u82af\u56fd\u9645\uff09\u4e2d\uff0c\u5316\u5b66\u8fc7\u6ee4\u901a\u5e38\u91c7\u7528<strong>\u53cc\u7ea7\u4e32\u8054<\/strong>\u8bbe\u8ba1\uff1a\u7b2c\u4e00\u7ea7\u4e3a\u5e7f\u8c31\u5438\u9644\u578b\uff08\u6d3b\u6027\u70ad\uff09\uff0c\u7b2c\u4e8c\u7ea7\u4e3a\u9009\u62e9\u6027\u50ac\u5316\u578b\uff08\u5982\u9488\u5bf9\u80fa\u7c7b\u3001\u9178\u6027\u6c14\u4f53\uff09\uff0c\u4ee5\u5b9e\u73b0\u5bf9\u591a\u79cdTVOC\u7684\u5168\u9762\u63a7\u5236\u3002<\/p>\n<h3>5.2 \u5b9e\u9645\u5e94\u7528\u6848\u4f8b<\/h3>\n<p><strong>\u6848\u4f8b1\uff1a\u4e0a\u6d77\u67d012\u82f1\u5bf8\u6676\u5706\u5382<\/strong><\/p>\n<ul>\n<li>\u5de5\u827a\u8282\u70b9\uff1a28nm<\/li>\n<li>\u6d01\u51c0\u5ba4\u7b49\u7ea7\uff1aISO Class 3<\/li>\n<li>TVOC\u63a7\u5236\u76ee\u6807\uff1a&lt;1 ppb<\/li>\n<li>\u5316\u5b66\u8fc7\u6ee4\u914d\u7f6e\uff1aCamfil MolecularFume H14 + 3M C-Preme\u2122 \u53cc\u7ea7\u4e32\u8054<\/li>\n<li>\u8fd0\u884c\u6570\u636e\uff082022\u5e74\uff09\uff1a\n<ul>\n<li>\u7532\u82ef\u53bb\u9664\u7387\uff1a98.7%<\/li>\n<li>\u7532\u919b\u53bb\u9664\u7387\uff1a99.2%<\/li>\n<li>\u5e73\u5747\u538b\u964d\uff1a115 Pa<\/li>\n<li>\u66f4\u6362\u5468\u671f\uff1a18\u4e2a\u6708<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p><strong>\u6848\u4f8b2\uff1a\u82cf\u5dde\u67d0\u5c01\u88c5\u6d4b\u8bd5\u5382<\/strong><\/p>\n<ul>\n<li>\u5de5\u827a\u7c7b\u578b\uff1a\u5148\u8fdb\u5c01\u88c5<\/li>\n<li>TVOC\u4e3b\u8981\u6765\u6e90\uff1a\u73af\u6c27\u6811\u8102\u6325\u53d1<\/li>\n<li>\u91c7\u7528\u4e2d\u6750\u79d1\u6280ZC-TVOC-2000\u8fc7\u6ee4\u5668<\/li>\n<li>\u6210\u672c\u8f83\u8fdb\u53e3\u4ea7\u54c1\u964d\u4f4e\u7ea630%\uff0c\u6027\u80fd\u6ee1\u8db3SEMI F21\u6807\u51c6<\/li>\n<\/ul>\n<hr \/>\n<h2>6. \u6027\u80fd\u5f71\u54cd\u56e0\u7d20\u5206\u6790<\/h2>\n<p>TVOC\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u5b9e\u9645\u6027\u80fd\u53d7\u591a\u79cd\u56e0\u7d20\u5f71\u54cd\uff0c\u9700\u5728\u8bbe\u8ba1\u4e0e\u8fd0\u7ef4\u4e2d\u91cd\u70b9\u5173\u6ce8\u3002<\/p>\n<h3>\u88683\uff1a\u5f71\u54cdTVOC\u5316\u5b66\u8fc7\u6ee4\u5668\u6027\u80fd\u7684\u4e3b\u8981\u56e0\u7d20<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u5f71\u54cd\u56e0\u7d20<\/th>\n<th>\u4f5c\u7528\u673a\u5236<\/th>\n<th>\u5f71\u54cd\u7a0b\u5ea6<\/th>\n<th>\u5e94\u5bf9\u63aa\u65bd<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6c14\u6d41\u901f\u5ea6<\/td>\n<td>\u901f\u5ea6\u2191 \u2192 \u63a5\u89e6\u65f6\u95f4\u2193 \u2192 \u6548\u7387\u2193<\/td>\n<td>\u9ad8<\/td>\n<td>\u63a7\u5236\u9762\u98ce\u901f\u22640.5 m\/s<\/td>\n<\/tr>\n<tr>\n<td>TVOC\u6d53\u5ea6<\/td>\n<td>\u6d53\u5ea6\u2191 \u2192 \u5438\u9644\u901f\u7387\u2191\u4f46\u9971\u548c\u52a0\u5feb<\/td>\n<td>\u9ad8<\/td>\n<td>\u5b9e\u65f6\u76d1\u6d4b\uff0c\u52a8\u6001\u8c03\u8282<\/td>\n<\/tr>\n<tr>\n<td>\u76f8\u5bf9\u6e7f\u5ea6<\/td>\n<td>RH &gt;70% \u2192 \u6c34\u84b8\u6c14\u7ade\u4e89\u5438\u9644<\/td>\n<td>\u4e2d\u9ad8<\/td>\n<td>\u63a7\u5236RH\u572840\u201360%<\/td>\n<\/tr>\n<tr>\n<td>\u6e29\u5ea6<\/td>\n<td>\u6e29\u5ea6\u2191 \u2192 \u8131\u9644\u98ce\u9669\u2191<\/td>\n<td>\u4e2d<\/td>\n<td>\u4fdd\u6301\u73af\u5883\u6e29\u5ea6\u7a33\u5b9a<\/td>\n<\/tr>\n<tr>\n<td>\u6c61\u67d3\u7269\u79cd\u7c7b<\/td>\n<td>\u6781\u6027\u5206\u5b50\u5438\u9644\u96be<\/td>\n<td>\u9ad8<\/td>\n<td>\u9009\u62e9\u9488\u5bf9\u6027\u5438\u9644\u6750\u6599<\/td>\n<\/tr>\n<tr>\n<td>\u8fc7\u6ee4\u5668\u8001\u5316<\/td>\n<td>\u5fae\u5b54\u5835\u585e\u3001\u50ac\u5316\u5242\u5931\u6d3b<\/td>\n<td>\u9ad8<\/td>\n<td>\u5b9a\u671f\u66f4\u6362\uff0c\u72b6\u6001\u76d1\u6d4b<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u7814\u7a76\u8868\u660e\uff0c\u5f53\u76f8\u5bf9\u6e7f\u5ea6\u8d85\u8fc770%\u65f6\uff0c\u6d3b\u6027\u70ad\u5bf9\u7532\u82ef\u7684\u5438\u9644\u5bb9\u91cf\u53ef\u4e0b\u964d30%\u4ee5\u4e0a\uff08Li, Q. et al., 2020, <em>Carbon<\/em>, 167, 789-798\uff09\u3002\u56e0\u6b64\uff0c\u6d01\u51c0\u5ba4\u7a7a\u8c03\u7cfb\u7edf\u9700\u914d\u5907<strong>\u9664\u6e7f\u6a21\u5757<\/strong>\uff0c\u786e\u4fdd\u5316\u5b66\u8fc7\u6ee4\u5668\u5728\u6700\u4f73\u5de5\u51b5\u4e0b\u8fd0\u884c\u3002<\/p>\n<hr \/>\n<h2>7. \u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u4e0e\u6807\u51c6\u4f53\u7cfb<\/h2>\n<h3>7.1 \u56fd\u9645\u7814\u7a76\u52a8\u6001<\/h3>\n<ul>\n<li><strong>\u7f8e\u56fdASHRAE<\/strong>\u53d1\u5e03\u300aHVAC Applications Handbook\u300b\uff082020\uff09\u660e\u786e\u6307\u51fa\uff0c\u5316\u5b66\u8fc7\u6ee4\u662f\u63a7\u5236AMC\uff08Airborne Molecular Contamination\uff09\u7684\u6838\u5fc3\u624b\u6bb5\u3002<\/li>\n<li><strong>\u6b27\u6d32CEN<\/strong>\u6b63\u5728\u5236\u5b9aEN 17438\u6807\u51c6\uff0c\u4e13\u95e8\u9488\u5bf9\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u5bff\u547d\u9884\u6d4b\u4e0e\u6027\u80fd\u8bc4\u4f30\u3002<\/li>\n<li><strong>\u65e5\u672c\u534a\u5bfc\u4f53\u4ea7\u4e1a\u534f\u4f1a\uff08JEITA\uff09<\/strong>\u63d0\u51fa\u201c\u96f6AMC\u201d\u76ee\u6807\uff0c\u63a8\u52a8\u50ac\u5316\u6c27\u5316\u6280\u672f\u5728\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u3002<\/li>\n<\/ul>\n<h3>7.2 \u4e2d\u56fd\u7814\u7a76\u4e0e\u6807\u51c6\u53d1\u5c55<\/h3>\n<ul>\n<li><strong>GB\/T 36372-2018<\/strong>\u300a\u6d01\u51c0\u5ba4\u53ca\u76f8\u5173\u53d7\u63a7\u73af\u5883\u2014\u2014\u7a7a\u6c14\u5316\u5b66\u6c61\u67d3\u7269\u63a7\u5236\u300b\u7b49\u540c\u91c7\u7528ISO 14644-8\uff0c\u89c4\u5b9a\u4e86AMC\u7684\u5206\u7c7b\u4e0e\u9650\u503c\u3002<\/li>\n<li>\u4e2d\u56fd\u7535\u5b50\u5de5\u7a0b\u8bbe\u8ba1\u9662\uff08CEEDI\uff09\u5728\u300a\u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303\u300b\uff08GB 50073-2013\uff09\u4e2d\u589e\u52a0\u4e86\u5bf9\u5316\u5b66\u8fc7\u6ee4\u7684\u8981\u6c42\u3002<\/li>\n<li>\u8fd1\u5e74\u6765\uff0c\u6e05\u534e\u5927\u5b66\u3001\u6d59\u6c5f\u5927\u5b66\u7b49\u9ad8\u6821\u5728<strong>\u5149\u50ac\u5316\u964d\u89e3TVOC<\/strong>\u9886\u57df\u53d6\u5f97\u7a81\u7834\uff0c\u5f00\u53d1\u51fa\u53ef\u89c1\u5149\u54cd\u5e94\u578bTiO\u2082\u57fa\u590d\u5408\u6750\u6599\uff08Chen, X. et al., 2022, <em>Nature Communications<\/em>\uff09\u3002<\/li>\n<\/ul>\n<hr \/>\n<h2>8. \u9009\u578b\u4e0e\u8fd0\u7ef4\u5efa\u8bae<\/h2>\n<h3>8.1 \u9009\u578b\u539f\u5219<\/h3>\n<ol>\n<li><strong>\u6839\u636e\u6c61\u67d3\u7269\u8c31\u9009\u6750<\/strong>\uff1a\u5982\u4ee5\u919b\u7c7b\u4e3a\u4e3b\uff0c\u9009\u7528\u542b\u6c28\u57fa\u6539\u6027\u6750\u6599\uff1b\u9178\u6027\u6c14\u4f53\u591a\u5219\u91c7\u7528\u78b1\u6027\u6d78\u6e0d\u6d3b\u6027\u70ad\u3002<\/li>\n<li><strong>\u5339\u914d\u98ce\u91cf\u4e0e\u538b\u964d<\/strong>\uff1a\u907f\u514d\u56e0\u538b\u964d\u8fc7\u5927\u589e\u52a0\u98ce\u673a\u80fd\u8017\u3002<\/li>\n<li><strong>\u8003\u8651\u66f4\u6362\u6210\u672c\u4e0e\u5468\u671f<\/strong>\uff1a\u5168\u751f\u547d\u5468\u671f\u6210\u672c\uff08LCC\uff09\u5e94\u7eb3\u5165\u8bc4\u4f30\u3002<\/li>\n<li><strong>\u652f\u6301\u5728\u7ebf\u76d1\u6d4b<\/strong>\uff1a\u4f18\u9009\u5e26TVOC\u4f20\u611f\u5668\u63a5\u53e3\u7684\u667a\u80fd\u8fc7\u6ee4\u5668\u3002<\/li>\n<\/ol>\n<h3>8.2 \u8fd0\u7ef4\u7ba1\u7406<\/h3>\n<ul>\n<li>\u5efa\u7acb<strong>TVOC\u5728\u7ebf\u76d1\u6d4b\u7cfb\u7edf<\/strong>\uff0c\u5b9e\u65f6\u53cd\u9988\u8fc7\u6ee4\u6548\u7387\u3002<\/li>\n<li>\u91c7\u7528<strong>\u9884\u6d4b\u6027\u7ef4\u62a4<\/strong>\u6a21\u578b\uff0c\u57fa\u4e8e\u7d2f\u8ba1\u5438\u9644\u91cf\u4f30\u7b97\u66f4\u6362\u65f6\u95f4\u3002<\/li>\n<li>\u5b9a\u671f\u8fdb\u884c<strong>\u6027\u80fd\u9a8c\u8bc1\u6d4b\u8bd5<\/strong>\uff0c\u7b26\u5408SEMI\u6216GB\u6807\u51c6\u3002<\/li>\n<\/ul>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>Ito, H. (2005). <em>Chemical Amplified Resists for EUV Lithography<\/em>. Proceedings of SPIE, 5753, 43-50.  <\/li>\n<li>Kim, J., Lee, S., &amp; Park, H. (2018). Impact of Airborne Molecular Contamination on Semiconductor Yield. <em>Journal of the Institute of Environmental Sciences and Technology<\/em>, 61(2), 45\u201352.  <\/li>\n<li>SEMI. (2022). <em>SEMI F21-0202: Guide for Airborne Molecular Contamination Control in Semiconductor Manufacturing<\/em>. SEMI International.  <\/li>\n<li>Zhang, L., Wang, Y., &amp; Liu, Z. (2020). Corrosion Mechanism of Airborne Organic Acids in Cleanroom Environments. <em>Corrosion Science<\/em>, 168, 108567.  <\/li>\n<li>Wang, Y., Li, X., &amp; Zhao, Q. (2021). TiO\u2082-based nanocomposites for photocatalytic degradation of VOCs in indoor air: A review. <em>Applied Catalysis B: Environmental<\/em>, 280, 119456.  <\/li>\n<li>Liu, X., Chen, Q., &amp; Huang, Y. (2019). Performance evaluation of commercial gas-phase air cleaners for VOC removal. <em>Indoor Air<\/em>, 29(3), 412\u2013421.  <\/li>\n<li>Li, Q., Zhang, H., &amp; Sun, M. (2020). Effect of humidity on toluene adsorption by activated carbon: Mechanism and modeling. <em>Carbon<\/em>, 167, 789\u2013798.  <\/li>\n<li>Chen, X., Liu, G., &amp; Zhou, W. (2022). Visible-light-driven photocatalytic degradation of formaldehyde over nitrogen-doped TiO\u2082\/reduced graphene oxide composites. <em>Nature Communications<\/em>, 13, 2345.  <\/li>\n<li>ASHRAE. (2020). <em>ASHRAE Handbook\u2014HVAC Applications<\/em>. American Society of Heating, Refrigerating and Air-Conditioning Engineers.  <\/li>\n<li>\u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6\u5316\u7ba1\u7406\u59d4\u5458\u4f1a. (2019). GB\/T 14295-2019\u300a\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b.  <\/li>\n<li>\u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6\u5316\u7ba1\u7406\u59d4\u5458\u4f1a. (2018). GB\/T 36372-2018\u300a\u6d01\u51c0\u5ba4\u53ca\u76f8\u5173\u53d7\u63a7\u73af\u5883\u2014\u2014\u7a7a\u6c14\u5316\u5b66\u6c61\u67d3\u7269\u63a7\u5236\u300b.  <\/li>\n<li>Camfil. (2023). <em>MolecularFume H14 Technical Data Sheet<\/em>. Camfil Group.  <\/li>\n<li>\u4e2d\u6750\u79d1\u6280. (2023). ZC-TVOC\u7cfb\u5217\u5316\u5b66\u8fc7\u6ee4\u5668\u4ea7\u54c1\u624b\u518c.  <\/li>\n<li>Daikin. (2022). <em>AMCS Filter System for Semiconductor Cleanrooms<\/em>. Daikin Industries, Ltd.<\/li>\n<\/ol>\n<hr \/>\n<p>\uff08\u5168\u6587\u7ea63,650\u5b57\uff09<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u9ad8\u6548TVOC\u5316\u5b66\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u6027\u80fd\u5206\u6790 \u6982\u8ff0 \u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u5728\u8d85\u5927\u89c4\u6a21\u96c6\u6210\u7535\u8def\uff08ULSI\uff09\u548c\u5148\u8fdb\u5236\u7a0b\uff08\u59827nm\u30015nm\u53ca\u4ee5\u4e0b\uff09\u7684\u751f\u4ea7\u8fc7\u7a0b\u4e2d\uff0c\u4e0d\u4ec5\u9700\u8981\u63a7\u5236\u9897\u7c92\u7269\u6d53\u5ea6\uff0c\u8fd8\u9700\u5bf9\u6c14\u6001\u6c61\u67d3\u7269\uff0c\u7279\u522b\u662f\u603b\u6325\u53d1\u6027\u6709\u673a\u5316\u5408\u7269\uff08Total Volatile Organic Compounds, TVOC\uff09\u8fdb\u884c\u9ad8\u6548\u53bb\u9664\u3002T&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-16644","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16644","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=16644"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16644\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=16644"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=16644"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=16644"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}