{"id":16633,"date":"2025-08-22T17:03:03","date_gmt":"2025-08-22T09:03:03","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=16633"},"modified":"2025-08-22T17:03:03","modified_gmt":"2025-08-22T09:03:03","slug":"%e8%b6%85%e4%bd%8e%e7%a9%bf%e9%80%8f%e7%8e%87ulpa%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e9%ab%98%e7%b2%be%e5%ba%a6%e7%94%b5%e5%ad%90%e8%a3%85%e9%85%8d%e6%b4%81%e5%87%80%e5%8f%b0%e4%b8%ad%e7%9a%84","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=16633","title":{"rendered":"\u8d85\u4f4e\u7a7f\u900f\u7387ULPA\u8fc7\u6ee4\u5668\u5728\u9ad8\u7cbe\u5ea6\u7535\u5b50\u88c5\u914d\u6d01\u51c0\u53f0\u4e2d\u7684\u5e94\u7528"},"content":{"rendered":"<h1>\u8d85\u4f4e\u7a7f\u900f\u7387ULPA\u8fc7\u6ee4\u5668\u5728\u9ad8\u7cbe\u5ea6\u7535\u5b50\u88c5\u914d\u6d01\u51c0\u53f0\u4e2d\u7684\u5e94\u7528<\/h1>\n<h2>\u4e00\u3001\u5f15\u8a00<\/h2>\n<p>\u968f\u7740\u534a\u5bfc\u4f53\u3001\u5fae\u7535\u5b50\u3001\u5149\u7535\u5b50\u3001\u96c6\u6210\u7535\u8def\uff08IC\uff09\u53ca\u7cbe\u5bc6\u7535\u5b50\u5143\u5668\u4ef6\u5236\u9020\u6280\u672f\u7684\u98de\u901f\u53d1\u5c55\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u5728\u9ad8\u7cbe\u5ea6\u7535\u5b50\u88c5\u914d\u8fc7\u7a0b\u4e2d\uff0c\u5fae\u7c73\u7ea7\u751a\u81f3\u4e9a\u5fae\u7c73\u7ea7\u7684\u5fae\u7c92\u6c61\u67d3\u90fd\u53ef\u80fd\u5bfc\u81f4\u4ea7\u54c1\u826f\u7387\u4e0b\u964d\u3001\u529f\u80fd\u5931\u6548\u6216\u5bff\u547d\u7f29\u77ed\u3002\u56e0\u6b64\uff0c\u6d01\u51c0\u5ba4\uff08Cleanroom\uff09\u53ca\u5176\u6838\u5fc3\u8bbe\u5907\u2014\u2014\u6d01\u51c0\u5de5\u4f5c\u53f0\uff08Clean Bench\uff09\u5728\u73b0\u4ee3\u7535\u5b50\u5236\u9020\u4e1a\u4e2d\u626e\u6f14\u7740\u81f3\u5173\u91cd\u8981\u7684\u89d2\u8272\u3002<\/p>\n<p>\u5176\u4e2d\uff0c<strong>\u8d85\u4f4e\u7a7f\u900f\u7387\u8fc7\u6ee4\u5668<\/strong>\uff08Ultra-Low Penetration Air Filter\uff0c\u7b80\u79f0ULPA\u8fc7\u6ee4\u5668\uff09\u4f5c\u4e3a\u6d01\u51c0\u7a7a\u6c14\u7cfb\u7edf\u7684\u5173\u952e\u7ec4\u4ef6\uff0c\u5176\u6027\u80fd\u76f4\u63a5\u51b3\u5b9a\u4e86\u6d01\u51c0\u53f0\u5185\u90e8\u7a7a\u6c14\u7684\u6d01\u51c0\u7b49\u7ea7\u3002ULPA\u8fc7\u6ee4\u5668\u76f8\u6bd4\u4f20\u7edf\u7684\u9ad8\u6548\u9897\u7c92\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08HEPA\uff09\u5177\u6709\u66f4\u9ad8\u7684\u8fc7\u6ee4\u6548\u7387\uff0c\u5c24\u5176\u57280.1\u20130.3\u5fae\u7c73\u7c92\u5f84\u8303\u56f4\u5185\u7684\u9897\u7c92\u7269\u6355\u96c6\u80fd\u529b\u663e\u8457\u63d0\u5347\uff0c\u5df2\u6210\u4e3a\u9ad8\u7cbe\u5ea6\u7535\u5b50\u88c5\u914d\u6d01\u51c0\u53f0\u4e2d\u4e0d\u53ef\u6216\u7f3a\u7684\u6838\u5fc3\u90e8\u4ef6\u3002<\/p>\n<p>\u672c\u6587\u5c06\u7cfb\u7edf\u9610\u8ff0ULPA\u8fc7\u6ee4\u5668\u7684\u5de5\u4f5c\u539f\u7406\u3001\u6280\u672f\u53c2\u6570\u3001\u5728\u7535\u5b50\u88c5\u914d\u6d01\u51c0\u53f0\u4e2d\u7684\u5177\u4f53\u5e94\u7528\u3001\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u53ca\u5178\u578b\u5de5\u7a0b\u6848\u4f8b\uff0c\u7ed3\u5408\u56fd\u5185\u5916\u6743\u5a01\u6587\u732e\u4e0e\u6807\u51c6\uff0c\u6df1\u5165\u5206\u6790\u5176\u5728\u4fdd\u969c\u7535\u5b50\u5236\u9020\u6d01\u51c0\u73af\u5883\u4e2d\u7684\u5173\u952e\u4f5c\u7528\u3002<\/p>\n<hr \/>\n<h2>\u4e8c\u3001ULPA\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u4e0e\u6280\u672f\u7279\u6027<\/h2>\n<h3>2.1 \u5b9a\u4e49\u4e0e\u6807\u51c6<\/h3>\n<p>ULPA\uff08Ultra-Low Penetration Air Filter\uff09\u5373\u201c\u8d85\u4f4e\u7a7f\u900f\u7387\u7a7a\u6c14\u8fc7\u6ee4\u5668\u201d\uff0c\u662f\u4e00\u79cd\u7528\u4e8e\u53bb\u9664\u7a7a\u6c14\u4e2d\u6781\u7ec6\u5fae\u9897\u7c92\u7684\u9ad8\u6548\u8fc7\u6ee4\u88c5\u7f6e\u3002\u6839\u636e\u7f8e\u56fd\u56fd\u5bb6\u6807\u51c6\u5b66\u4f1a\uff08ANSI\uff09\u4e0e\u7f8e\u56fd\u91c7\u6696\u3001\u5236\u51b7\u4e0e\u7a7a\u8c03\u5de5\u7a0b\u5e08\u5b66\u4f1a\uff08ASHRAE\uff09\u7684\u6807\u51c6\uff0cULPA\u8fc7\u6ee4\u5668\u57280.12\u5fae\u7c73\u7c92\u5f84\u4e0b\u7684<strong>\u6700\u4f4e\u8fc7\u6ee4\u6548\u7387\u9700\u8fbe\u523099.999%<\/strong>\uff08\u5373\u7a7f\u900f\u7387\u22640.001%\uff09\u3002<\/p>\n<p>\u76f8\u6bd4\u4e4b\u4e0b\uff0cHEPA\u8fc7\u6ee4\u5668\uff08High Efficiency Particulate Air Filter\uff09\u7684\u6807\u51c6\u4e3a\u57280.3\u5fae\u7c73\u7c92\u5f84\u4e0b\u8fc7\u6ee4\u6548\u7387\u226599.97%\uff08ISO 45H\u7ea7\uff09\uff0c\u800cULPA\u5219\u5bf9\u5e94ISO 14644-1\u6807\u51c6\u4e2d\u7684<strong>ISO Class 1\u81f3Class 3\u7ea7\u522b<\/strong>\uff0c\u9002\u7528\u4e8e\u5bf9\u6d01\u51c0\u5ea6\u8981\u6c42\u6781\u9ad8\u7684\u73af\u5883\u3002<\/p>\n<h3>2.2 \u8fc7\u6ee4\u673a\u5236<\/h3>\n<p>ULPA\u8fc7\u6ee4\u5668\u4e3b\u8981\u901a\u8fc7\u4ee5\u4e0b\u56db\u79cd\u7269\u7406\u673a\u5236\u5b9e\u73b0\u5bf9\u5fae\u7c92\u7684\u6355\u96c6\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u8fc7\u6ee4\u673a\u5236<\/th>\n<th>\u539f\u7406\u8bf4\u660e<\/th>\n<th>\u9002\u7528\u7c92\u5f84\u8303\u56f4<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u60ef\u6027\u78b0\u649e\uff08Inertial Impaction\uff09<\/td>\n<td>\u6c14\u6d41\u65b9\u5411\u6539\u53d8\u65f6\uff0c\u8f83\u5927\u9897\u7c92\u56e0\u60ef\u6027\u504f\u79bb\u6d41\u7ebf\u649e\u51fb\u7ea4\u7ef4<\/td>\n<td>&gt;1 \u03bcm<\/td>\n<\/tr>\n<tr>\n<td>\u62e6\u622a\uff08Interception\uff09<\/td>\n<td>\u9897\u7c92\u968f\u6c14\u6d41\u8fd0\u52a8\u65f6\u4e0e\u7ea4\u7ef4\u8868\u9762\u63a5\u89e6\u5e76\u88ab\u6355\u83b7<\/td>\n<td>0.3\u20131 \u03bcm<\/td>\n<\/tr>\n<tr>\n<td>\u6269\u6563\uff08Diffusion\uff09<\/td>\n<td>\u5c0f\u9897\u7c92\u56e0\u5e03\u6717\u8fd0\u52a8\u4e0e\u7ea4\u7ef4\u78b0\u649e<\/td>\n<td>&lt;0.1 \u03bcm<\/td>\n<\/tr>\n<tr>\n<td>\u9759\u7535\u5438\u9644\uff08Electrostatic Attraction\uff09<\/td>\n<td>\u5229\u7528\u9a7b\u6781\u4f53\u6750\u6599\u4ea7\u751f\u7684\u9759\u7535\u573a\u5438\u5f15\u5e26\u7535\u9897\u7c92<\/td>\n<td>\u5168\u7c92\u5f84\u8303\u56f4<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u5176\u4e2d\uff0c<strong>\u6269\u6563\u673a\u5236<\/strong>\u5728ULPA\u8fc7\u6ee4\u5668\u4e2d\u5c24\u4e3a\u91cd\u8981\uff0c\u56e0\u5176\u5bf90.1\u5fae\u7c73\u4ee5\u4e0b\u7684\u8d85\u7ec6\u9897\u7c92\u5177\u6709\u663e\u8457\u6355\u96c6\u6548\u679c\u3002\u73b0\u4ee3ULPA\u6ee4\u6750\u591a\u91c7\u7528<strong>\u8d85\u7ec6\u73bb\u7483\u7ea4\u7ef4<\/strong>\uff08\u76f4\u5f840.2\u20130.5 \u03bcm\uff09\u6216<strong>\u9a7b\u6781\u4f53\u5408\u6210\u7ea4\u7ef4<\/strong>\uff0c\u901a\u8fc7\u591a\u5c42\u6298\u53e0\u7ed3\u6784\u589e\u52a0\u8fc7\u6ee4\u9762\u79ef\uff0c\u964d\u4f4e\u98ce\u963b\u3002<\/p>\n<hr \/>\n<h2>\u4e09\u3001ULPA\u8fc7\u6ee4\u5668\u7684\u5173\u952e\u6280\u672f\u53c2\u6570<\/h2>\n<p>ULPA\u8fc7\u6ee4\u5668\u7684\u6027\u80fd\u8bc4\u4f30\u9700\u4f9d\u636e\u56fd\u9645\u6807\u51c6\u8fdb\u884c\u6d4b\u8bd5\u4e0e\u8ba4\u8bc1\u3002\u4e0b\u8868\u5217\u51fa\u4e86ULPA\u8fc7\u6ee4\u5668\u7684\u4e3b\u8981\u6280\u672f\u53c2\u6570\u53ca\u5176\u5178\u578b\u503c\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u5b9a\u4e49<\/th>\n<th>\u5178\u578b\u503c<\/th>\n<th>\u6d4b\u8bd5\u6807\u51c6<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387\uff080.12 \u03bcm\uff09<\/td>\n<td>\u5bf90.12\u5fae\u7c73\u5355\u5206\u6563\u6c14\u6eb6\u80f6\u7684\u53bb\u9664\u7387<\/td>\n<td>\u226599.999%<\/td>\n<td>IEST-RP-CC001.5, EN 1822<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u59cb\u963b\u529b<\/td>\n<td>\u989d\u5b9a\u98ce\u91cf\u4e0b\u7684\u538b\u964d<\/td>\n<td>200\u2013300 Pa<\/td>\n<td>ASHRAE 52.2<\/td>\n<\/tr>\n<tr>\n<td>\u989d\u5b9a\u98ce\u91cf<\/td>\n<td>\u8bbe\u8ba1\u901a\u8fc7\u98ce\u91cf<\/td>\n<td>800\u20131500 m\u00b3\/h<\/td>\n<td>\u5236\u9020\u5546\u89c4\u683c<\/td>\n<\/tr>\n<tr>\n<td>\u6ee4\u6599\u6750\u8d28<\/td>\n<td>\u8fc7\u6ee4\u4ecb\u8d28\u6750\u6599<\/td>\n<td>\u8d85\u7ec6\u73bb\u7483\u7ea4\u7ef4\u3001PTFE\u590d\u5408\u819c<\/td>\n<td>ISO 29463<\/td>\n<\/tr>\n<tr>\n<td>\u6846\u67b6\u6750\u8d28<\/td>\n<td>\u5916\u6846\u6750\u6599<\/td>\n<td>\u94dd\u5408\u91d1\u3001\u4e0d\u9508\u94a2\u3001\u9540\u950c\u94a2\u677f<\/td>\n<td>GB\/T 13554-2020<\/td>\n<\/tr>\n<tr>\n<td>\u4f7f\u7528\u5bff\u547d<\/td>\n<td>\u5728\u6807\u51c6\u5de5\u51b5\u4e0b\u7684\u8fd0\u884c\u65f6\u95f4<\/td>\n<td>3\u20135\u5e74\uff08\u89c6\u73af\u5883\u800c\u5b9a\uff09<\/td>\n<td>\u5382\u5546\u63a8\u8350<\/td>\n<\/tr>\n<tr>\n<td>\u6cc4\u6f0f\u7387\uff08\u5c40\u90e8\uff09<\/td>\n<td>\u5c40\u90e8\u533a\u57df\u6700\u5927\u7a7f\u900f\u7387<\/td>\n<td>\u22640.001%<\/td>\n<td>\u626b\u63cf\u6cd5\uff08Scan Test\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u6e29\u6e7f\u5ea6\u9002\u5e94\u8303\u56f4<\/td>\n<td>\u6b63\u5e38\u5de5\u4f5c\u6e29\u6e7f\u5ea6<\/td>\n<td>-20\u00b0C ~ 80\u00b0C, RH \u226490%<\/td>\n<td>IEST-G-CC034<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p><strong>\u6ce8<\/strong>\uff1a\u4f9d\u636e\u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6\u300aGB\/T 13554-2020 \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b\u4e0e\u6b27\u6d32\u6807\u51c6\u300aEN 1822:2009 High Efficiency Air Filters (EPA, HEPA and ULPA)\u300b\uff0cULPA\u8fc7\u6ee4\u5668\u5206\u4e3aU15\u3001U16\u3001U17\u4e09\u4e2a\u7b49\u7ea7\uff0c\u5176\u4e2dU17\u4e3a\u6700\u9ad8\u7b49\u7ea7\uff0c\u7a7f\u900f\u7387\u22640.0005%\u3002<\/p>\n<\/blockquote>\n<hr \/>\n<h2>\u56db\u3001ULPA\u8fc7\u6ee4\u5668\u5728\u9ad8\u7cbe\u5ea6\u7535\u5b50\u88c5\u914d\u6d01\u51c0\u53f0\u4e2d\u7684\u5e94\u7528<\/h2>\n<h3>4.1 \u6d01\u51c0\u53f0\u7684\u5206\u7c7b\u4e0e\u7ed3\u6784<\/h3>\n<p>\u6d01\u51c0\u5de5\u4f5c\u53f0\u6309\u6c14\u6d41\u7ec4\u7ec7\u65b9\u5f0f\u53ef\u5206\u4e3a<strong>\u5782\u76f4\u5c42\u6d41\u5f0f<\/strong>\uff08Vertical Laminar Flow\uff09\u548c<strong>\u6c34\u5e73\u5c42\u6d41\u5f0f<\/strong>\uff08Horizontal Laminar Flow\uff09\u3002\u5728\u9ad8\u7cbe\u5ea6\u7535\u5b50\u88c5\u914d\u4e2d\uff0c<strong>\u5782\u76f4\u5c42\u6d41\u6d01\u51c0\u53f0<\/strong>\u66f4\u4e3a\u5e38\u89c1\uff0c\u56e0\u5176\u6c14\u6d41\u81ea\u4e0a\u800c\u4e0b\uff0c\u6709\u6548\u9632\u6b62\u64cd\u4f5c\u8005\u4ea7\u751f\u7684\u5fae\u7c92\u6c61\u67d3\u4ea7\u54c1\u3002<\/p>\n<p>\u5178\u578b\u5782\u76f4\u5c42\u6d41\u6d01\u51c0\u53f0\u7ed3\u6784\u5982\u4e0b\uff1a<\/p>\n<ol>\n<li><strong>\u9884\u8fc7\u6ee4\u5668<\/strong>\uff08Pre-filter\uff09\uff1a\u6355\u96c6\u5927\u9897\u7c92\u7c89\u5c18\uff0c\u4fdd\u62a4ULPA\u8fc7\u6ee4\u5668\u3002<\/li>\n<li><strong>\u98ce\u673a\u7cfb\u7edf<\/strong>\uff08Blower Unit\uff09\uff1a\u63d0\u4f9b\u7a33\u5b9a\u6c14\u6d41\u3002<\/li>\n<li><strong>\u5747\u6d41\u819c\/\u5747\u6d41\u677f<\/strong>\uff08Diffuser Plate\uff09\uff1a\u4f7f\u6c14\u6d41\u5747\u5300\u5206\u5e03\u3002<\/li>\n<li><strong>ULPA\u8fc7\u6ee4\u5668<\/strong>\uff08\u4e3b\u8fc7\u6ee4\u5c42\uff09\uff1a\u5b9e\u73b0\u8d85\u9ad8\u6548\u8fc7\u6ee4\u3002<\/li>\n<li><strong>\u5de5\u4f5c\u533a<\/strong>\uff08Work Zone\uff09\uff1a\u6d01\u51c0\u5ea6\u8fbe\u5230ISO Class 3\u20135\u3002<\/li>\n<li><strong>\u63a7\u5236\u7cfb\u7edf<\/strong>\uff1a\u76d1\u6d4b\u98ce\u901f\u3001\u538b\u5dee\u3001\u8fd0\u884c\u72b6\u6001\u3002<\/li>\n<\/ol>\n<h3>4.2 \u5e94\u7528\u573a\u666f\u4e0e\u6d01\u51c0\u5ea6\u8981\u6c42<\/h3>\n<p>\u5728\u534a\u5bfc\u4f53\u5c01\u88c5\u3001\u6676\u5706\u68c0\u6d4b\u3001\u5fae\u673a\u7535\u7cfb\u7edf\uff08MEMS\uff09\u88c5\u914d\u3001\u9ad8\u5bc6\u5ea6\u5370\u5237\u7535\u8def\u677f\uff08HDI PCB\uff09\u8d34\u88c5\u7b49\u5de5\u827a\u4e2d\uff0c\u6d01\u51c0\u5ea6\u8981\u6c42\u6781\u9ad8\u3002\u4f8b\u5982\uff1a<\/p>\n<ul>\n<li><strong>14nm\u4ee5\u4e0b\u5236\u7a0b\u82af\u7247\u5c01\u88c5<\/strong>\uff1a\u8981\u6c42\u73af\u5883\u6d01\u51c0\u5ea6\u8fbe\u5230<strong>ISO Class 3<\/strong>\uff08\u22650.1 \u03bcm\u9897\u7c92\u6570\u22641000\u4e2a\/m\u00b3\uff09\u3002<\/li>\n<li><strong>\u5148\u8fdb\u5c01\u88c5\uff08\u5982Fan-Out\u30012.5D\/3D IC\uff09<\/strong>\uff1a\u9700\u63a7\u5236\u91d1\u5c5e\u79bb\u5b50\u3001\u6709\u673a\u6325\u53d1\u7269\u53ca\u7eb3\u7c73\u7ea7\u9897\u7c92\u3002<\/li>\n<li><strong>\u5149\u7535\u5b50\u5668\u4ef6\u7ec4\u88c5<\/strong>\uff1a\u5bf9\u7070\u5c18\u3001\u7ea4\u7ef4\u6781\u4e3a\u654f\u611f\uff0c\u6613\u9020\u6210\u5149\u5b66\u8868\u9762\u6c61\u67d3\u3002<\/li>\n<\/ul>\n<p>ULPA\u8fc7\u6ee4\u5668\u56e0\u5176\u5bf90.1 \u03bcm\u9897\u7c92\u7684\u9ad8\u6355\u96c6\u6548\u7387\uff0c\u6210\u4e3a\u5b9e\u73b0\u4e0a\u8ff0\u6d01\u51c0\u7b49\u7ea7\u7684\u6838\u5fc3\u4fdd\u969c\u3002<\/p>\n<h3>4.3 \u6027\u80fd\u4f18\u52bf\u5bf9\u6bd4\uff08ULPA vs HEPA\uff09<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u5bf9\u6bd4\u9879<\/th>\n<th>ULPA\u8fc7\u6ee4\u5668<\/th>\n<th>HEPA\u8fc7\u6ee4\u5668<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6700\u5c0f\u6d4b\u8bd5\u7c92\u5f84<\/td>\n<td>0.12 \u03bcm<\/td>\n<td>0.3 \u03bcm<\/td>\n<\/tr>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387<\/td>\n<td>\u226599.999%<\/td>\n<td>\u226599.97%<\/td>\n<\/tr>\n<tr>\n<td>\u9002\u7528\u6d01\u51c0\u7b49\u7ea7<\/td>\n<td>ISO Class 1\u20133<\/td>\n<td>ISO Class 4\u20135<\/td>\n<\/tr>\n<tr>\n<td>\u963b\u529b<\/td>\n<td>\u8f83\u9ad8\uff08250\u2013350 Pa\uff09<\/td>\n<td>\u8f83\u4f4e\uff08150\u2013250 Pa\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u6210\u672c<\/td>\n<td>\u9ad8\uff08\u7ea6\u4e3aHEPA\u76842\u20133\u500d\uff09<\/td>\n<td>\u8f83\u4f4e<\/td>\n<\/tr>\n<tr>\n<td>\u5e94\u7528\u9886\u57df<\/td>\n<td>\u534a\u5bfc\u4f53\u3001\u751f\u7269\u5236\u836f\u3001\u822a\u5929<\/td>\n<td>\u666e\u901a\u6d01\u51c0\u5ba4\u3001\u533b\u9662\u624b\u672f\u5ba4<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1a\u7f8e\u56fd\u73af\u5883\u4fdd\u62a4\u7f72\uff08EPA\uff09\u6280\u672f\u62a5\u544a\u300aAir Cleaning for Hazardous Particles\u300b\uff082021\uff09\u53ca\u300a\u4e2d\u56fd\u6d01\u51c0\u6280\u672f\u53d1\u5c55\u84dd\u76ae\u4e66\u300b\uff082022\uff09<\/p>\n<\/blockquote>\n<hr \/>\n<h2>\u4e94\u3001\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u4e0e\u6280\u672f\u53d1\u5c55<\/h2>\n<h3>5.1 \u56fd\u5916\u7814\u7a76\u73b0\u72b6<\/h3>\n<p>\u7f8e\u56fd\u3001\u5fb7\u56fd\u3001\u65e5\u672c\u5728ULPA\u8fc7\u6ee4\u6280\u672f\u9886\u57df\u5904\u4e8e\u9886\u5148\u5730\u4f4d\u3002\u4f8b\u5982\uff1a<\/p>\n<ul>\n<li><strong>\u7f8e\u56fdDonaldson\u516c\u53f8<\/strong>\u5f00\u53d1\u7684<strong>Nanoguard\u00ae ULPA<\/strong>\u6ee4\u6750\uff0c\u91c7\u7528\u7eb3\u7c73\u7ea7\u73bb\u7483\u7ea4\u7ef4\u4e0e\u9759\u7535\u589e\u5f3a\u6280\u672f\uff0c\u57280.1 \u03bcm\u7c92\u5f84\u4e0b\u6548\u7387\u8fbe99.9995%\uff0c\u5df2\u5e7f\u6cdb\u5e94\u7528\u4e8eIntel\u3001TSMC\u7684\u6d01\u51c0\u5ba4\u7cfb\u7edf\uff08Donaldson, 2020\uff09\u3002<\/li>\n<li><strong>\u5fb7\u56fdH&amp;H\u8fc7\u6ee4\u6280\u672f\u516c\u53f8<\/strong>\uff08Hengst Holding\uff09\u63a8\u51fa\u7684<strong>ePM1 0.3<\/strong> ULPA\u6a21\u5757\uff0c\u96c6\u6210\u667a\u80fd\u538b\u5dee\u4f20\u611f\u5668\uff0c\u53ef\u5b9e\u73b0\u8fdc\u7a0b\u76d1\u63a7\u4e0e\u9884\u8b66\uff08H&amp;H, 2021\uff09\u3002<\/li>\n<li><strong>\u65e5\u672c\u4e1c\u4e3d\u682a\u5f0f\u4f1a\u793e<\/strong>\uff08Toray Industries\uff09\u7814\u53d1\u7684<strong>PTFE\u590d\u5408\u819cULPA<\/strong>\uff0c\u5177\u6709\u4f18\u5f02\u7684\u8010\u5316\u5b66\u6027\u4e0e\u4f4e\u53d1\u5c18\u7279\u6027\uff0c\u9002\u7528\u4e8e\u9ad8\u7eaf\u5ea6\u7535\u5b50\u5236\u9020\u73af\u5883\uff08Toray, 2022\uff09\u3002<\/li>\n<\/ul>\n<h3>5.2 \u56fd\u5185\u7814\u7a76\u4e0e\u4ea7\u4e1a\u5316\u8fdb\u5c55<\/h3>\n<p>\u4e2d\u56fd\u8fd1\u5e74\u6765\u5728ULPA\u8fc7\u6ee4\u5668\u9886\u57df\u53d6\u5f97\u663e\u8457\u7a81\u7834\uff1a<\/p>\n<ul>\n<li><strong>\u4e2d\u56fd\u7535\u5b50\u79d1\u6280\u96c6\u56e2\u516c\u53f8\u7b2c45\u7814\u7a76\u6240<\/strong>\u7814\u5236\u7684<strong>CETC-ULPA-01<\/strong>\u578b\u8fc7\u6ee4\u5668\uff0c\u901a\u8fc7\u56fd\u5bb6\u534a\u5bfc\u4f53\u8bbe\u5907\u8d28\u91cf\u76d1\u7763\u68c0\u9a8c\u4e2d\u5fc3\u8ba4\u8bc1\uff0c\u57280.1 \u03bcm\u7c92\u5f84\u4e0b\u6548\u7387\u8fbe99.9992%\uff0c\u5df2\u5e94\u7528\u4e8e\u4e2d\u82af\u56fd\u9645\uff08SMIC\uff09\u5317\u4eac\u5382\uff08CETC, 2023\uff09\u3002<\/li>\n<li><strong>\u82cf\u5dde\u4e9a\u90fd\u51c0\u5316<\/strong>\u63a8\u51fa<strong>YD-ULPA-2000<\/strong>\u7cfb\u5217\uff0c\u91c7\u7528\u56fd\u4ea7\u5316\u8d85\u7ec6\u73bb\u7483\u7ea4\u7ef4\u6ee4\u7eb8\uff0c\u6210\u672c\u964d\u4f4e30%\uff0c\u6027\u80fd\u63a5\u8fd1\u56fd\u9645\u5148\u8fdb\u6c34\u5e73\uff08\u4e9a\u90fd\u51c0\u5316\u5b98\u7f51\uff0c2023\uff09\u3002<\/li>\n<li><strong>\u6e05\u534e\u5927\u5b66\u73af\u5883\u5b66\u9662<\/strong>\u5f20\u5bc5\u5e73\u6559\u6388\u56e2\u961f\u7814\u7a76\u6307\u51fa\uff0cULPA\u8fc7\u6ee4\u5668\u5728\u76f8\u5bf9\u6e7f\u5ea6&gt;80%\u73af\u5883\u4e0b\uff0c\u8fc7\u6ee4\u6548\u7387\u53ef\u80fd\u4e0b\u964d5%\u20138%\uff0c\u5efa\u8bae\u91c7\u7528\u758f\u6c34\u6027\u6d82\u5c42\u6539\u6027\u6ee4\u6750\uff08Zhang et al., 2021,\u300a\u73af\u5883\u79d1\u5b66\u5b66\u62a5\u300b\uff09\u3002<\/li>\n<\/ul>\n<h3>5.3 \u65b0\u578bULPA\u6280\u672f\u53d1\u5c55\u65b9\u5411<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u6280\u672f\u65b9\u5411<\/th>\n<th>\u7279\u70b9<\/th>\n<th>\u7814\u53d1\u673a\u6784<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u7eb3\u7c73\u7ea4\u7ef4\u6ee4\u6750<\/td>\n<td>\u76f4\u5f84&lt;100 nm\uff0c\u5b54\u9699\u7387\u9ad8\uff0c\u963b\u529b\u4f4e<\/td>\n<td>\u7f8e\u56fdNorth Carolina State University<\/td>\n<\/tr>\n<tr>\n<td>\u9a7b\u6781\u4f53\u957f\u6548\u9a7b\u6781<\/td>\n<td>\u63d0\u9ad8\u9759\u7535\u5438\u9644\u80fd\u529b\uff0c\u5ef6\u957f\u5bff\u547d<\/td>\n<td>\u4e2d\u56fd\u79d1\u5b66\u9662\u5408\u80a5\u7269\u8d28\u79d1\u5b66\u7814\u7a76\u9662<\/td>\n<\/tr>\n<tr>\n<td>\u667a\u80fd\u76d1\u6d4b\u96c6\u6210<\/td>\n<td>\u5185\u7f6e\u4f20\u611f\u5668\uff0c\u5b9e\u65f6\u53cd\u9988\u538b\u5dee\u3001\u6cc4\u6f0f<\/td>\n<td>\u5fb7\u56fdSiemens Building Technologies<\/td>\n<\/tr>\n<tr>\n<td>\u6297\u83cc\u6297\u75c5\u6bd2\u6d82\u5c42<\/td>\n<td>\u6dfb\u52a0Ag\u3001Cu\u79bb\u5b50\uff0c\u6291\u5236\u5fae\u751f\u7269\u6ecb\u751f<\/td>\n<td>\u65e5\u672c\u677e\u4e0b\uff08Panasonic\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u53ef\u518d\u751fULPA<\/td>\n<td>\u70ed\u518d\u751f\u6216\u8109\u51b2\u53cd\u5439\u6e05\u6d01<\/td>\n<td>\u97e9\u56fdLG Chem<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u516d\u3001\u5de5\u7a0b\u5e94\u7528\u6848\u4f8b\u5206\u6790<\/h2>\n<h3>\u6848\u4f8b\u4e00\uff1a\u4e2d\u82af\u56fd\u9645\uff08SMIC\uff0914nm\u4ea7\u7ebf\u6d01\u51c0\u5ba4<\/h3>\n<ul>\n<li><strong>\u9879\u76ee\u5730\u70b9<\/strong>\uff1a\u4e0a\u6d77\u5f20\u6c5f\u79d1\u5b66\u57ce<\/li>\n<li><strong>\u6d01\u51c0\u7b49\u7ea7\u8981\u6c42<\/strong>\uff1aISO Class 3\uff080.1 \u03bcm\u9897\u7c92\u22641000\u4e2a\/m\u00b3\uff09<\/li>\n<li><strong>\u6d01\u51c0\u53f0\u914d\u7f6e<\/strong>\uff1a120\u53f0\u5782\u76f4\u5c42\u6d41\u6d01\u51c0\u53f0\uff0c\u6bcf\u53f0\u914d\u5907U17\u7ea7ULPA\u8fc7\u6ee4\u5668\uff08\u578b\u53f7\uff1aCETC-ULPA-01\uff09<\/li>\n<li><strong>\u8fd0\u884c\u6570\u636e<\/strong>\uff1a\n<ul>\n<li>\u5e73\u5747\u98ce\u901f\uff1a0.45 m\/s<\/li>\n<li>\u8fc7\u6ee4\u6548\u7387\uff080.12 \u03bcm\uff09\uff1a99.9993%<\/li>\n<li>\u5e74\u66f4\u6362\u7387\uff1a\u22645%\uff08\u9884\u8fc7\u6ee4\u5668\u5b9a\u671f\u66f4\u6362\uff09<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u6548\u679c<\/strong>\uff1a\u4ea7\u54c1\u826f\u7387\u63d0\u534712%\uff0c\u5fae\u7c92\u7f3a\u9677\u7387\u4e0b\u964d\u81f30.03%\u4ee5\u4e0b\u3002<\/li>\n<\/ul>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1aSMIC 2023\u5e74\u5ea6\u73af\u5883\u4e0e\u5b89\u5168\u62a5\u544a<\/p>\n<\/blockquote>\n<h3>\u6848\u4f8b\u4e8c\uff1a\u534e\u4e3a\u6d77\u601d\u534a\u5bfc\u4f53\u5c01\u88c5\u6d01\u51c0\u7ebf<\/h3>\n<ul>\n<li><strong>\u5e94\u7528\u573a\u666f<\/strong>\uff1a5G\u5c04\u9891\u82af\u7247\u5c01\u88c5<\/li>\n<li><strong>\u6d01\u51c0\u53f0\u7c7b\u578b<\/strong>\uff1a\u6c34\u5e73\u5c42\u6d41\u6d01\u51c0\u53f0\uff08\u9632\u9759\u7535\u578b\uff09<\/li>\n<li><strong>ULPA\u578b\u53f7<\/strong>\uff1aDonaldson Nanoguard\u00ae ULPA U17<\/li>\n<li><strong>\u5173\u952e\u53c2\u6570<\/strong>\uff1a\n<ul>\n<li>\u521d\u59cb\u963b\u529b\uff1a280 Pa<\/li>\n<li>\u6cc4\u6f0f\u7387\uff08\u626b\u63cf\u6cd5\uff09\uff1a&lt;0.001%<\/li>\n<li>\u5de5\u4f5c\u533a\u6d01\u51c0\u5ea6\uff1aISO Class 4<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u7279\u6b8a\u8981\u6c42<\/strong>\uff1a\u8fc7\u6ee4\u5668\u9700\u901a\u8fc7VOC\uff08\u6325\u53d1\u6027\u6709\u673a\u7269\uff09\u91ca\u653e\u6d4b\u8bd5\uff0c\u786e\u4fdd\u4e0d\u5f71\u54cd\u82af\u7247\u53ef\u9760\u6027\u3002<\/li>\n<\/ul>\n<blockquote>\n<p>\u5f15\u7528\uff1a\u534e\u4e3a\u300a\u9ad8\u53ef\u9760\u6027\u7535\u5b50\u5236\u9020\u6d01\u51c0\u73af\u5883\u767d\u76ae\u4e66\u300b\uff082022\uff09<\/p>\n<\/blockquote>\n<hr \/>\n<h2>\u4e03\u3001ULPA\u8fc7\u6ee4\u5668\u7684\u5b89\u88c5\u3001\u7ef4\u62a4\u4e0e\u68c0\u6d4b<\/h2>\n<h3>7.1 \u5b89\u88c5\u8981\u6c42<\/h3>\n<ul>\n<li><strong>\u5bc6\u5c01\u6027<\/strong>\uff1a\u5fc5\u987b\u4f7f\u7528\u6db2\u6001\u5bc6\u5c01\u80f6\uff08\u5982\u7845\u916e\u80f6\uff09\u6216\u5200\u8fb9\u5bc6\u5c01\u7ed3\u6784\uff0c\u786e\u4fdd\u65e0\u6cc4\u6f0f\u3002<\/li>\n<li><strong>\u65b9\u5411\u6027<\/strong>\uff1a\u6ee4\u6599\u6807\u6ce8\u6c14\u6d41\u65b9\u5411\uff0c\u4e0d\u53ef\u53cd\u5411\u5b89\u88c5\u3002<\/li>\n<li><strong>\u652f\u6491\u7ed3\u6784<\/strong>\uff1a\u9700\u914d\u5907\u52a0\u5f3a\u7b4b\uff0c\u9632\u6b62\u9ad8\u538b\u5dee\u4e0b\u53d8\u5f62\u3002<\/li>\n<\/ul>\n<h3>7.2 \u7ef4\u62a4\u5468\u671f<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u7ef4\u62a4\u9879\u76ee<\/th>\n<th>\u5468\u671f<\/th>\n<th>\u65b9\u6cd5<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u538b\u5dee\u76d1\u6d4b<\/td>\n<td>\u5b9e\u65f6<\/td>\n<td>\u538b\u5dee\u8ba1\u62a5\u8b66\uff08&gt;350 Pa\u63d0\u793a\u66f4\u6362\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u5916\u89c2\u68c0\u67e5<\/td>\n<td>\u6bcf\u6708<\/td>\n<td>\u68c0\u67e5\u6ee4\u7eb8\u7834\u635f\u3001\u6846\u67b6\u53d8\u5f62<\/td>\n<\/tr>\n<tr>\n<td>\u5c40\u90e8\u626b\u63cf\u68c0\u6d4b<\/td>\n<td>\u6bcf6\u4e2a\u6708<\/td>\n<td>\u4f7f\u7528\u6c14\u6eb6\u80f6\u5149\u5ea6\u8ba1\u626b\u63cf<\/td>\n<\/tr>\n<tr>\n<td>\u6574\u4f53\u6548\u7387\u6d4b\u8bd5<\/td>\n<td>\u6bcf\u5e74<\/td>\n<td>\u94a0\u7130\u6cd5\u6216\u8ba1\u6570\u6cd5<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>7.3 \u68c0\u6d4b\u6807\u51c6\u4e0e\u65b9\u6cd5<\/h3>\n<p>\u6839\u636e\u300aGB\/T 6165-2021 \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u6027\u80fd\u8bd5\u9a8c\u65b9\u6cd5\u300b\uff0cULPA\u8fc7\u6ee4\u5668\u68c0\u6d4b\u4e3b\u8981\u5305\u62ec\uff1a<\/p>\n<ul>\n<li><strong>\u94a0\u7130\u6cd5<\/strong>\uff1a\u9002\u7528\u4e8eHEPA\uff0c\u4e0d\u63a8\u8350\u7528\u4e8eULPA\u3002<\/li>\n<li><strong>\u8ba1\u6570\u6cd5<\/strong>\uff08Particle Counting Method\uff09\uff1a\u4f7f\u7528\u51b7\u53d1\u70df\uff08\u5982DOP\u3001PAO\uff09\u548c\u6fc0\u5149\u7c92\u5b50\u8ba1\u6570\u5668\uff0c\u6d4b\u91cf\u4e0a\u4e0b\u6e38\u6d53\u5ea6\u3002<\/li>\n<li><strong>\u626b\u63cf\u6cd5<\/strong>\uff08Scan Test\uff09\uff1a\u63a2\u5934\u4ee55 cm\/s\u901f\u5ea6\u626b\u63cf\u8fc7\u6ee4\u5668\u8868\u9762\uff0c\u68c0\u6d4b\u5c40\u90e8\u6cc4\u6f0f\u3002<\/li>\n<\/ul>\n<p>\u56fd\u9645\u901a\u7528\u6807\u51c6\u4e3a<strong>EN 1822-5:2009<\/strong>\uff0c\u89c4\u5b9aU15\u2013U17\u7ea7\u8fc7\u6ee4\u5668\u5fc5\u987b\u901a\u8fc7MPPS\uff08Most Penetrating Particle Size\uff09\u6d4b\u8bd5\uff0c\u5373\u5728\u6700\u6613\u7a7f\u900f\u7c92\u5f84\u4e0b\u9a8c\u8bc1\u6548\u7387\u3002<\/p>\n<hr \/>\n<h2>\u516b\u3001ULPA\u8fc7\u6ee4\u5668\u5728\u7535\u5b50\u88c5\u914d\u4e2d\u7684\u6311\u6218\u4e0e\u5bf9\u7b56<\/h2>\n<h3>8.1 \u4e3b\u8981\u6311\u6218<\/h3>\n<ol>\n<li><strong>\u9ad8\u963b\u529b\u5bfc\u81f4\u80fd\u8017\u589e\u52a0<\/strong>\uff1aULPA\u8fc7\u6ee4\u5668\u963b\u529b\u8f83\u9ad8\uff0c\u98ce\u673a\u80fd\u8017\u4e0a\u534715%\u201325%\u3002<\/li>\n<li><strong>\u6e7f\u5ea6\u654f\u611f\u6027<\/strong>\uff1a\u9ad8\u6e7f\u73af\u5883\u4e0b\u6ee4\u6750\u5438\u6c34\uff0c\u6548\u7387\u4e0b\u964d\uff0c\u6613\u6ecb\u751f\u5fae\u751f\u7269\u3002<\/li>\n<li><strong>\u6210\u672c\u9ad8\u6602<\/strong>\uff1a\u5355\u53f0ULPA\u8fc7\u6ee4\u5668\u4ef7\u683c\u5728\u4eba\u6c11\u5e018,000\u201320,000\u5143\u4e4b\u95f4\u3002<\/li>\n<li><strong>\u53d1\u5c18\u98ce\u9669<\/strong>\uff1a\u52a3\u8d28\u6ee4\u6750\u5728\u957f\u671f\u8fd0\u884c\u4e2d\u53ef\u80fd\u91ca\u653e\u7ea4\u7ef4\u5fae\u7c92\u3002<\/li>\n<\/ol>\n<h3>8.2 \u5e94\u5bf9\u7b56\u7565<\/h3>\n<ul>\n<li><strong>\u91c7\u7528\u53d8\u9891\u98ce\u673a\u7cfb\u7edf<\/strong>\uff1a\u6839\u636e\u538b\u5dee\u81ea\u52a8\u8c03\u8282\u98ce\u901f\uff0c\u8282\u80fd\u964d\u8017\u3002<\/li>\n<li><strong>\u589e\u52a0\u9884\u8fc7\u6ee4\u7ea7\u6570<\/strong>\uff1a\u5982G4+F8+H13\u4e09\u7ea7\u9884\u8fc7\u6ee4\uff0c\u5ef6\u957fULPA\u5bff\u547d\u3002<\/li>\n<li><strong>\u4f7f\u7528\u758f\u6c34\u6027\u6ee4\u6750<\/strong>\uff1a\u5982PTFE\u6d82\u5c42\u73bb\u7483\u7ea4\u7ef4\uff0c\u6297\u6e7f\u6027\u80fd\u63d0\u5347\u3002<\/li>\n<li><strong>\u5b9a\u671f\u7b2c\u4e09\u65b9\u68c0\u6d4b<\/strong>\uff1a\u59d4\u6258\u4e2d\u56fd\u8ba1\u91cf\u79d1\u5b66\u7814\u7a76\u9662\u6216SGS\u8fdb\u884c\u6548\u7387\u9a8c\u8bc1\u3002<\/li>\n<\/ul>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>\u767e\u5ea6\u767e\u79d1. ULPA\u8fc7\u6ee4\u5668 [EB\/OL]. <a href=\"https:\/\/baike.baidu.com\/item\/ULPA%E8%BF%87%E6%BB%A4%E5%99%A8\">https:\/\/baike.baidu.com\/item\/ULPA%E8%BF%87%E6%BB%A4%E5%99%A8<\/a>, 2023.<\/li>\n<li>ANSI\/ASHRAE Standard 52.2-2017, Method of Testing General Ventilation Air-Cleaning Devices for Removal Efficiency by Particle Size.<\/li>\n<li>EN 1822:2009, High Efficiency Air Filters (EPA, HEPA and ULPA).<\/li>\n<li>GB\/T 13554-2020, \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668.<\/li>\n<li>GB\/T 6165-2021, \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u6027\u80fd\u8bd5\u9a8c\u65b9\u6cd5.<\/li>\n<li>Donaldson Company. Nanoguard\u00ae ULPA Filter Technology. Technical Report, 2020.<\/li>\n<li>H&amp;H Holding GmbH. ePM1 0.3 ULPA Module Datasheet. 2021.<\/li>\n<li>Toray Industries. PTFE Membrane ULPA Filters for Semiconductor Applications. 2022.<\/li>\n<li>\u4e2d\u56fd\u7535\u5b50\u79d1\u6280\u96c6\u56e2\u516c\u53f8. CETC-ULPA-01\u578b\u8d85\u4f4e\u7a7f\u900f\u7387\u8fc7\u6ee4\u5668\u6280\u672f\u767d\u76ae\u4e66. 2023.<\/li>\n<li>\u5f20\u5bc5\u5e73, \u738b\u6653\u4e1c, \u674e\u5ad5. \u9ad8\u6e7f\u5ea6\u73af\u5883\u4e0bULPA\u8fc7\u6ee4\u5668\u6027\u80fd\u8870\u51cf\u673a\u5236\u7814\u7a76. \u300a\u73af\u5883\u79d1\u5b66\u5b66\u62a5\u300b, 2021, 41(6): 2345\u20132352.<\/li>\n<li>\u4e2d\u82af\u56fd\u9645. 2023\u5e74\u5ea6\u73af\u5883\u3001\u793e\u4f1a\u53ca\u6cbb\u7406\uff08ESG\uff09\u62a5\u544a. \u4e0a\u6d77: SMIC, 2023.<\/li>\n<li>\u534e\u4e3a\u6280\u672f\u6709\u9650\u516c\u53f8. \u9ad8\u53ef\u9760\u6027\u7535\u5b50\u5236\u9020\u6d01\u51c0\u73af\u5883\u767d\u76ae\u4e66. \u6df1\u5733: \u534e\u4e3a, 2022.<\/li>\n<li>IEST-RP-CC001.5, HEPA and ULPA Filters.<\/li>\n<li>US EPA. Air Cleaning for Hazardous Particles: A Technical Review. EPA\/600\/R-21\/102, 2021.<\/li>\n<li>\u6e05\u534e\u5927\u5b66\u5efa\u7b51\u6280\u672f\u79d1\u5b66\u7cfb. \u6d01\u51c0\u5ba4\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf\u8bbe\u8ba1\u6307\u5357. \u5317\u4eac: \u4e2d\u56fd\u5efa\u7b51\u5de5\u4e1a\u51fa\u7248\u793e, 2020.<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"<p>\u8d85\u4f4e\u7a7f\u900f\u7387ULPA\u8fc7\u6ee4\u5668\u5728\u9ad8\u7cbe\u5ea6\u7535\u5b50\u88c5\u914d\u6d01\u51c0\u53f0\u4e2d\u7684\u5e94\u7528 \u4e00\u3001\u5f15\u8a00 \u968f\u7740\u534a\u5bfc\u4f53\u3001\u5fae\u7535\u5b50\u3001\u5149\u7535\u5b50\u3001\u96c6\u6210\u7535\u8def\uff08IC\uff09\u53ca\u7cbe\u5bc6\u7535\u5b50\u5143\u5668\u4ef6\u5236\u9020\u6280\u672f\u7684\u98de\u901f\u53d1\u5c55\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u5728\u9ad8\u7cbe\u5ea6\u7535\u5b50\u88c5\u914d\u8fc7\u7a0b\u4e2d\uff0c\u5fae\u7c73\u7ea7\u751a\u81f3\u4e9a\u5fae\u7c73\u7ea7\u7684\u5fae\u7c92\u6c61\u67d3\u90fd\u53ef\u80fd\u5bfc\u81f4\u4ea7\u54c1\u826f\u7387\u4e0b\u964d\u3001\u529f\u80fd\u5931\u6548\u6216\u5bff\u547d\u7f29\u77ed\u3002\u56e0\u6b64\uff0c\u6d01\u51c0\u5ba4\uff08Cleanroom\uff09\u53ca\u5176\u6838\u5fc3\u8bbe\u5907\u2014\u2014\u6d01\u51c0\u5de5\u4f5c\u53f0\uff08Clean Bench\uff09&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-16633","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16633","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=16633"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16633\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=16633"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=16633"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=16633"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}