{"id":16616,"date":"2025-08-22T16:17:40","date_gmt":"2025-08-22T08:17:40","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=16616"},"modified":"2025-08-22T16:17:40","modified_gmt":"2025-08-22T08:17:40","slug":"ulpa%e4%b8%8ehepa%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e9%ab%98%e6%b4%81%e5%87%80%e5%ba%a6%e5%8e%82%e6%88%bf%e4%b8%ad%e7%9a%84%e5%ba%94%e7%94%a8%e5%af%b9%e6%af%94","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=16616","title":{"rendered":"ULPA\u4e0eHEPA\u8fc7\u6ee4\u5668\u5728\u9ad8\u6d01\u51c0\u5ea6\u5382\u623f\u4e2d\u7684\u5e94\u7528\u5bf9\u6bd4"},"content":{"rendered":"<h1>ULPA\u4e0eHEPA\u8fc7\u6ee4\u5668\u5728\u9ad8\u6d01\u51c0\u5ea6\u5382\u623f\u4e2d\u7684\u5e94\u7528\u5bf9\u6bd4<\/h1>\n<h2>\u5f15\u8a00<\/h2>\n<p>\u5728\u73b0\u4ee3\u9ad8\u79d1\u6280\u4ea7\u4e1a\u4e2d\uff0c\u5982\u534a\u5bfc\u4f53\u5236\u9020\u3001\u751f\u7269\u5236\u836f\u3001\u7cbe\u5bc6\u7535\u5b50\u3001\u822a\u7a7a\u822a\u5929\u7b49\u9886\u57df\uff0c\u6d01\u51c0\u5ba4\u73af\u5883\u7684\u63a7\u5236\u81f3\u5173\u91cd\u8981\u3002\u7a7a\u6c14\u4e2d\u7684\u5fae\u7c92\u6c61\u67d3\u53ef\u80fd\u76f4\u63a5\u5f71\u54cd\u4ea7\u54c1\u8d28\u91cf\u3001\u8bbe\u5907\u8fd0\u884c\u7a33\u5b9a\u6027\u4ee5\u53ca\u751f\u4ea7\u8fc7\u7a0b\u7684\u5b89\u5168\u6027\u3002\u56e0\u6b64\uff0c\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf\u6210\u4e3a\u6d01\u51c0\u5ba4\u8bbe\u8ba1\u4e0e\u8fd0\u884c\u7684\u6838\u5fc3\u7ec4\u6210\u90e8\u5206\u3002\u5176\u4e2d\uff0c<strong>ULPA\uff08Ultra-Low Penetration Air Filter\uff0c\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff09<\/strong> \u4e0e <strong>HEPA\uff08High-Efficiency Particulate Air Filter\uff0c\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff09<\/strong> \u662f\u4e24\u7c7b\u5e7f\u6cdb\u5e94\u7528\u4e8e\u9ad8\u6d01\u51c0\u5ea6\u5382\u623f\u7684\u5173\u952e\u8bbe\u5907\u3002<\/p>\n<p>\u5c3d\u7ba1\u4e24\u8005\u5747\u7528\u4e8e\u53bb\u9664\u7a7a\u6c14\u4e2d\u7684\u60ac\u6d6e\u5fae\u7c92\uff0c\u4f46\u5728\u8fc7\u6ee4\u6548\u7387\u3001\u9002\u7528\u73af\u5883\u3001\u80fd\u8017\u7279\u6027\u53ca\u6210\u672c\u7ed3\u6784\u7b49\u65b9\u9762\u5b58\u5728\u663e\u8457\u5dee\u5f02\u3002\u672c\u6587\u5c06\u4ece\u5b9a\u4e49\u3001\u5de5\u4f5c\u539f\u7406\u3001\u6280\u672f\u53c2\u6570\u3001\u5e94\u7528\u9886\u57df\u3001\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u7b49\u591a\u4e2a\u7ef4\u5ea6\uff0c\u7cfb\u7edf\u5bf9\u6bd4ULPA\u4e0eHEPA\u8fc7\u6ee4\u5668\u5728\u9ad8\u6d01\u51c0\u5ea6\u5382\u623f\u4e2d\u7684\u5e94\u7528\u8868\u73b0\uff0c\u5e76\u7ed3\u5408\u6743\u5a01\u6587\u732e\u4e0e\u5b9e\u9645\u5de5\u7a0b\u6848\u4f8b\uff0c\u6df1\u5165\u63a2\u8ba8\u5176\u4f18\u52a3\u4e0e\u9002\u7528\u8fb9\u754c\u3002<\/p>\n<hr \/>\n<h2>\u4e00\u3001\u57fa\u672c\u6982\u5ff5\u4e0e\u5b9a\u4e49<\/h2>\n<h3>1. HEPA\u8fc7\u6ee4\u5668<\/h3>\n<p>\u6839\u636e\u7f8e\u56fd\u80fd\u6e90\u90e8\uff08DOE\uff09\u6807\u51c6\uff0cHEPA\u8fc7\u6ee4\u5668\u662f\u6307\u5bf9\u7c92\u5f84\u22650.3\u5fae\u7c73\uff08\u03bcm\uff09\u7684\u9897\u7c92\u7269\u5177\u6709<strong>\u81f3\u5c1199.97%<\/strong> \u8fc7\u6ee4\u6548\u7387\u7684\u7a7a\u6c14\u8fc7\u6ee4\u88c5\u7f6e\u3002\u8be5\u6807\u51c6\u6e90\u4e8e\u7f8e\u56fd\u519b\u7528\u6807\u51c6MIL-STD-282\uff0c\u5e76\u88ab\u56fd\u9645\u6807\u51c6\u5316\u7ec4\u7ec7\uff08ISO\uff09\u548c\u5404\u56fd\u6d01\u51c0\u5ba4\u89c4\u8303\u5e7f\u6cdb\u91c7\u7eb3\u3002<\/p>\n<p>HEPA\u8fc7\u6ee4\u5668\u901a\u5e38\u91c7\u7528<strong>\u73bb\u7483\u7ea4\u7ef4<\/strong>\u6750\u6599\u5236\u6210\uff0c\u901a\u8fc7\u62e6\u622a\u3001\u60ef\u6027\u78b0\u649e\u3001\u6269\u6563\u548c\u9759\u7535\u5438\u9644\u7b49\u591a\u79cd\u673a\u5236\u5b9e\u73b0\u9897\u7c92\u7269\u7684\u9ad8\u6548\u6355\u96c6\u3002<\/p>\n<h3>2. ULPA\u8fc7\u6ee4\u5668<\/h3>\n<p>ULPA\uff08Ultra-Low Penetration Air Filter\uff09\u662fHEPA\u7684\u5347\u7ea7\u7248\u672c\uff0c\u5176\u8fc7\u6ee4\u6548\u7387\u66f4\u9ad8\u3002\u6839\u636eISO 29463\u6807\u51c6\uff0cULPA\u8fc7\u6ee4\u5668\u5bf9<strong>0.12\u5fae\u7c73<\/strong>\u9897\u7c92\u7684\u8fc7\u6ee4\u6548\u7387\u9700\u8fbe\u5230<strong>99.999%\u4ee5\u4e0a<\/strong>\uff08\u5373\u7a7f\u900f\u7387\u4f4e\u4e8e0.001%\uff09\uff0c\u90e8\u5206\u9ad8\u7aef\u578b\u53f7\u751a\u81f3\u53ef\u8fbe99.9995%\u3002<\/p>\n<p>ULPA\u8fc7\u6ee4\u5668\u591a\u7528\u4e8eISO Class 1\u20134\u7ea7\u522b\u7684\u6d01\u51c0\u5ba4\uff0c\u5e38\u89c1\u4e8e\u7eb3\u7c73\u7ea7\u82af\u7247\u5236\u9020\u3001\u57fa\u56e0\u6d4b\u5e8f\u5b9e\u9a8c\u5ba4\u7b49\u5bf9\u7a7a\u6c14\u8d28\u91cf\u8981\u6c42\u6781\u4e3a\u4e25\u82db\u7684\u573a\u6240\u3002<\/p>\n<hr \/>\n<h2>\u4e8c\u3001\u6280\u672f\u539f\u7406\u4e0e\u8fc7\u6ee4\u673a\u5236<\/h2>\n<table>\n<thead>\n<tr>\n<th>\u8fc7\u6ee4\u673a\u5236<\/th>\n<th>\u539f\u7406\u63cf\u8ff0<\/th>\n<th>\u4e3b\u8981\u4f5c\u7528\u7c92\u5f84\u8303\u56f4<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u62e6\u622a\uff08Interception\uff09<\/td>\n<td>\u9897\u7c92\u968f\u6c14\u6d41\u8fd0\u52a8\uff0c\u4e0e\u7ea4\u7ef4\u8868\u9762\u63a5\u89e6\u5e76\u88ab\u5438\u9644<\/td>\n<td>&gt;0.4 \u03bcm<\/td>\n<\/tr>\n<tr>\n<td>\u60ef\u6027\u78b0\u649e\uff08Inertial Impaction\uff09<\/td>\n<td>\u5927\u9897\u7c92\u56e0\u60ef\u6027\u504f\u79bb\u6c14\u6d41\u8f68\u8ff9\uff0c\u649e\u51fb\u7ea4\u7ef4\u88ab\u6355\u83b7<\/td>\n<td>&gt;0.5 \u03bcm<\/td>\n<\/tr>\n<tr>\n<td>\u6269\u6563\uff08Diffusion\uff09<\/td>\n<td>\u5c0f\u9897\u7c92\u53d7\u5e03\u6717\u8fd0\u52a8\u5f71\u54cd\uff0c\u968f\u673a\u8fd0\u52a8\u4e2d\u4e0e\u7ea4\u7ef4\u63a5\u89e6<\/td>\n<td>&lt;0.1 \u03bcm<\/td>\n<\/tr>\n<tr>\n<td>\u9759\u7535\u5438\u9644\uff08Electrostatic Attraction\uff09<\/td>\n<td>\u5229\u7528\u7ea4\u7ef4\u5e26\u7535\u5438\u5f15\u5e26\u7535\u9897\u7c92<\/td>\n<td>0.01\u20131 \u03bcm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6ce8\uff1aHEPA\u4e0eULPA\u5747\u4f9d\u8d56\u4e0a\u8ff0\u56db\u79cd\u673a\u5236\u534f\u540c\u4f5c\u7528\uff0c\u4f46ULPA\u56e0\u7ea4\u7ef4\u66f4\u5bc6\u3001\u5c42\u6570\u66f4\u591a\uff0c\u5bf9\u4e9a\u5fae\u7c73\u53ca\u7eb3\u7c73\u7ea7\u9897\u7c92\u7684\u6269\u6563\u6355\u96c6\u80fd\u529b\u66f4\u5f3a\u3002<\/p>\n<\/blockquote>\n<hr \/>\n<h2>\u4e09\u3001\u4e3b\u8981\u6280\u672f\u53c2\u6570\u5bf9\u6bd4<\/h2>\n<p>\u4e0b\u8868\u5217\u51fa\u4e86HEPA\u4e0eULPA\u8fc7\u6ee4\u5668\u5728\u5173\u952e\u6027\u80fd\u6307\u6807\u4e0a\u7684\u8be6\u7ec6\u5bf9\u6bd4\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570\u9879<\/th>\n<th>HEPA\u8fc7\u6ee4\u5668<\/th>\n<th>ULPA\u8fc7\u6ee4\u5668<\/th>\n<th>\u56fd\u9645\u6807\u51c6\u4f9d\u636e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6807\u51c6\u6d4b\u8bd5\u7c92\u5f84<\/td>\n<td>0.3 \u03bcm<\/td>\n<td>0.12 \u03bcm<\/td>\n<td>ISO 29463, IEST RP-CC001<\/td>\n<\/tr>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387\uff08\u6700\u4f4e\uff09<\/td>\n<td>\u226599.97%<\/td>\n<td>\u226599.999%<\/td>\n<td>EN 1822:2009<\/td>\n<\/tr>\n<tr>\n<td>\u7a7f\u900f\u7387<\/td>\n<td>\u22640.03%<\/td>\n<td>\u22640.001%<\/td>\n<td>IEST-RP-CC001.5<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u59cb\u963b\u529b\uff08Pa\uff09<\/td>\n<td>150\u2013250<\/td>\n<td>250\u2013400<\/td>\n<td>ASHRAE 52.2<\/td>\n<\/tr>\n<tr>\n<td>\u989d\u5b9a\u98ce\u91cf\uff08m\u00b3\/h\uff09<\/td>\n<td>500\u20132000<\/td>\n<td>400\u20131800<\/td>\n<td>GB\/T 13554-2020<\/td>\n<\/tr>\n<tr>\n<td>\u4f7f\u7528\u5bff\u547d\uff08\u5e74\uff09<\/td>\n<td>3\u20135<\/td>\n<td>2\u20134\uff08\u56e0\u963b\u529b\u4e0a\u5347\u5feb\uff09<\/td>\n<td>ISO 16890<\/td>\n<\/tr>\n<tr>\n<td>\u6750\u6599\u6784\u6210<\/td>\n<td>\u73bb\u7483\u7ea4\u7ef4\u3001PP\/PE\u652f\u6491\u5c42<\/td>\n<td>\u8d85\u7ec6\u73bb\u7483\u7ea4\u7ef4\u3001\u7eb3\u7c73\u7ea4\u7ef4\u590d\u5408\u5c42<\/td>\n<td>JIS Z 8122<\/td>\n<\/tr>\n<tr>\n<td>\u9002\u7528\u6d01\u51c0\u7b49\u7ea7<\/td>\n<td>ISO Class 5\u20137<\/td>\n<td>ISO Class 1\u20134<\/td>\n<td>ISO 14644-1<\/td>\n<\/tr>\n<tr>\n<td>\u5178\u578b\u5e94\u7528\u573a\u666f<\/td>\n<td>\u5236\u836f\u8f66\u95f4\u3001\u533b\u9662\u624b\u672f\u5ba4<\/td>\n<td>\u534a\u5bfc\u4f53\u5149\u523b\u533a\u3001\u751f\u7269\u5b89\u5168\u5b9e\u9a8c\u5ba4<\/td>\n<td>FDA, GMP<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1a\u300a\u6d01\u51c0\u5ba4\u8bbe\u8ba1\u4e0e\u8fd0\u884c\u300b\uff08\u4e2d\u56fd\u5efa\u7b51\u5de5\u4e1a\u51fa\u7248\u793e\uff0c2021\uff09\u3001IEST\uff08Institute of Environmental Sciences and Technology\uff09\u6280\u672f\u62a5\u544a\u3002<\/p>\n<\/blockquote>\n<hr \/>\n<h2>\u56db\u3001\u56fd\u5185\u5916\u6807\u51c6\u4f53\u7cfb\u5bf9\u6bd4<\/h2>\n<p>\u4e0d\u540c\u56fd\u5bb6\u548c\u5730\u533a\u5bf9HEPA\u4e0eULPA\u7684\u8ba4\u8bc1\u6807\u51c6\u7565\u6709\u5dee\u5f02\uff0c\u4f46\u603b\u4f53\u8d8b\u540c\u4e8e\u56fd\u9645\u6807\u51c6ISO 29463\u4e0eEN 1822\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6807\u51c6\u4f53\u7cfb<\/th>\n<th>\u56fd\u5bb6\/\u7ec4\u7ec7<\/th>\n<th>\u6838\u5fc3\u5185\u5bb9<\/th>\n<th>\u9002\u7528\u8fc7\u6ee4\u5668\u7c7b\u578b<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>ISO 29463<\/td>\n<td>\u56fd\u9645\u6807\u51c6\u5316\u7ec4\u7ec7<\/td>\n<td>\u5206\u4e3aE10\u2013U17\u7b49\u7ea7\uff0cULPA\u5bf9\u5e94U15\u2013U17<\/td>\n<td>HEPA\/ULPA<\/td>\n<\/tr>\n<tr>\n<td>EN 1822:2009<\/td>\n<td>\u6b27\u6d32\u6807\u51c6\u5316\u59d4\u5458\u4f1a<\/td>\n<td>\u4ee5MPPS\uff08\u6700\u6613\u7a7f\u900f\u7c92\u5f84\uff09\u4e3a\u6d4b\u8bd5\u57fa\u51c6<\/td>\n<td>HEPA\/ULPA<\/td>\n<\/tr>\n<tr>\n<td>MIL-STD-282<\/td>\n<td>\u7f8e\u56fd\u56fd\u9632\u90e8<\/td>\n<td>\u91c7\u7528DOP\u6cd5\u6d4b\u8bd5\uff0c\u6548\u7387\u226599.97%\u4e3aHEPA<\/td>\n<td>HEPA<\/td>\n<\/tr>\n<tr>\n<td>GB\/T 13554-2020<\/td>\n<td>\u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6<\/td>\n<td>\u7b49\u6548\u91c7\u7528ISO 29463\uff0c\u660e\u786eULPA\u5206\u7ea7<\/td>\n<td>HEPA\/ULPA<\/td>\n<\/tr>\n<tr>\n<td>JIS Z 8122<\/td>\n<td>\u65e5\u672c\u5de5\u4e1a\u6807\u51c6<\/td>\n<td>\u89c4\u5b9aHEPA\u4e3a\u201c\u9ad8\u6027\u80fd\u8fc7\u6ee4\u5668\u201d\uff0cULPA\u4e3a\u201c\u8d85\u6027\u80fd\u201d<\/td>\n<td>HEPA\/ULPA<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6ce8\uff1aMPPS\uff08Most Penetrating Particle Size\uff09\u662f\u8bc4\u4f30\u8fc7\u6ee4\u5668\u6027\u80fd\u7684\u5173\u952e\u53c2\u6570\uff0c\u901a\u5e38\u4f4d\u4e8e0.1\u20130.3 \u03bcm\u4e4b\u95f4\uff0c\u4ee3\u8868\u6700\u96be\u8fc7\u6ee4\u7684\u7c92\u5f84\u3002<\/p>\n<\/blockquote>\n<hr \/>\n<h2>\u4e94\u3001\u5728\u9ad8\u6d01\u51c0\u5ea6\u5382\u623f\u4e2d\u7684\u5b9e\u9645\u5e94\u7528\u5206\u6790<\/h2>\n<h3>1. \u534a\u5bfc\u4f53\u5236\u9020\u884c\u4e1a<\/h3>\n<p>\u572812\u82f1\u5bf8\u6676\u5706\u5236\u9020\u8fc7\u7a0b\u4e2d\uff0c\u5149\u523b\u5de5\u827a\u5bf9\u7a7a\u6c14\u4e2d0.05\u20130.1 \u03bcm\u9897\u7c92\u6781\u4e3a\u654f\u611f\u3002\u636e<strong>TSMC\uff08\u53f0\u79ef\u7535\uff092022\u5e74\u6d01\u51c0\u5ba4\u767d\u76ae\u4e66<\/strong>\u6307\u51fa\uff0c\u5176\u5148\u8fdb\u5236\u7a0b\uff08\u59823nm\u53ca\u4ee5\u4e0b\uff09\u4ea7\u7ebf\u666e\u904d\u91c7\u7528ULPA\u8fc7\u6ee4\u5668\uff0c\u786e\u4fdd\u6d01\u51c0\u5ba4\u8fbe\u5230ISO Class 1\u6c34\u5e73\u3002<\/p>\n<blockquote>\n<p>\u201c\u5728EUV\uff08\u6781\u7d2b\u5916\u5149\u523b\uff09\u5de5\u827a\u4e2d\uff0c\u4efb\u4f55\u8d85\u8fc70.05 \u03bcm\u7684\u9897\u7c92\u90fd\u53ef\u80fd\u5bfc\u81f4\u5149\u7f69\u6c61\u67d3\u6216\u7535\u8def\u77ed\u8def\uff0c\u56e0\u6b64\u5fc5\u987b\u4f7f\u7528ULPA\u8fc7\u6ee4\u7cfb\u7edf\u3002\u201d<br \/>\n\u2014\u2014\u300aSemiconductor International\u300b\uff0c2021, Vol.44(3)<\/p>\n<\/blockquote>\n<p>\u76f8\u6bd4\u4e4b\u4e0b\uff0cHEPA\u8fc7\u6ee4\u5668\u591a\u7528\u4e8e\u524d\u6bb5\u6e05\u6d17\u4e0e\u5c01\u88c5\u533a\u57df\uff08ISO Class 5\u20136\uff09\uff0c\u5176\u6210\u672c\u8f83\u4f4e\u4e14\u7ef4\u62a4\u7b80\u4fbf\u3002<\/p>\n<h3>2. \u751f\u7269\u5236\u836f\u4e0e\u75ab\u82d7\u751f\u4ea7<\/h3>\n<p>\u6839\u636e\u4e2d\u56fd\u300a\u836f\u54c1\u751f\u4ea7\u8d28\u91cf\u7ba1\u7406\u89c4\u8303\u300b\uff08GMP 2010\u5e74\u4fee\u8ba2\u7248\uff09\uff0c\u65e0\u83cc\u836f\u54c1\u704c\u88c5\u533a\u9700\u8fbe\u5230A\u7ea7\u6d01\u51c0\u5ea6\uff08\u52a8\u6001\u7b49\u540cISO Class 5\uff09\u3002\u8be5\u533a\u57df\u901a\u5e38\u91c7\u7528HEPA\u8fc7\u6ee4\u5668\uff0c\u914d\u5408\u5c42\u6d41\u7f69\u5b9e\u73b0\u5c40\u90e8\u767e\u7ea7\u73af\u5883\u3002<\/p>\n<p>\u7136\u800c\uff0c\u5728mRNA\u75ab\u82d7\u7814\u53d1\u4e2d\uff0c\u7531\u4e8e\u6d89\u53caRNA\u5206\u5b50\u7684\u7a33\u5b9a\u6027\u63a7\u5236\uff0c\u90e8\u5206\u9ad8\u7aef\u5b9e\u9a8c\u5ba4\uff08\u5982\u5317\u4eac\u751f\u7269\u7814\u7a76\u6240\uff09\u5df2\u5f15\u5165ULPA\u7cfb\u7edf\uff0c\u4ee5\u964d\u4f4e\u6c14\u6eb6\u80f6\u643a\u5e26\u7684\u7eb3\u7c73\u7ea7\u6c61\u67d3\u7269\u98ce\u9669\u3002<\/p>\n<blockquote>\n<p>\u201c\u5728\u57fa\u56e0\u6cbb\u7597\u8f7d\u4f53\u751f\u4ea7\u4e2d\uff0c\u75c5\u6bd2\u9897\u7c92\u5c3a\u5bf8\u7ea6\u4e3a80\u2013100 nm\uff0c\u4f20\u7edfHEPA\u5bf90.3 \u03bcm\u9897\u7c92\u9ad8\u6548\uff0c\u4f46\u5bf9\u66f4\u5c0f\u9897\u7c92\u6355\u96c6\u80fd\u529b\u6709\u9650\u3002\u201d<br \/>\n\u2014\u2014\u300a\u4e2d\u56fd\u836f\u5b66\u6742\u5fd7\u300b\uff0c2023, 58(7): 1123-1128<\/p>\n<\/blockquote>\n<h3>3. \u533b\u7597\u4e0e\u751f\u7269\u5b89\u5168\u5b9e\u9a8c\u5ba4<\/h3>\n<p>BSL-3\uff08\u751f\u7269\u5b89\u5168\u4e09\u7ea7\uff09\u53ca\u4ee5\u4e0a\u5b9e\u9a8c\u5ba4\u8981\u6c42\u5bf9\u7a7a\u6c14\u4e2d\u7684\u75c5\u539f\u5fae\u751f\u7269\u8fdb\u884c\u8fd1\u4e4e\u5b8c\u5168\u963b\u65ad\u3002\u7f8e\u56fdCDC\u6307\u5357\uff082020\uff09\u660e\u786e\u6307\u51fa\uff0c\u6392\u98ce\u7cfb\u7edf\u5fc5\u987b\u914d\u5907HEPA\u8fc7\u6ee4\u5668\uff0c\u800c\u8fdb\u98ce\u7cfb\u7edf\u53ef\u9009\u7528ULPA\u4ee5\u63d0\u5347\u9632\u62a4\u7b49\u7ea7\u3002<\/p>\n<p>\u4f8b\u5982\uff0c\u6b66\u6c49P4\u5b9e\u9a8c\u5ba4\u5728\u8fdb\u98ce\u7aef\u91c7\u7528ULPA\u8fc7\u6ee4\u5668\uff0c\u786e\u4fdd\u5916\u90e8\u7a7a\u6c14\u4e2d\u7684\u75c5\u6bd2\u9897\u7c92\u88ab\u5f7b\u5e95\u6e05\u9664\uff0c\u9632\u6b62\u4ea4\u53c9\u6c61\u67d3\u3002<\/p>\n<hr \/>\n<h2>\u516d\u3001\u6027\u80fd\u6d4b\u8bd5\u65b9\u6cd5\u4e0e\u8ba4\u8bc1\u6d41\u7a0b<\/h2>\n<h3>1. \u5e38\u89c1\u6d4b\u8bd5\u65b9\u6cd5<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u6d4b\u8bd5\u65b9\u6cd5<\/th>\n<th>\u539f\u7406<\/th>\n<th>\u9002\u7528\u5bf9\u8c61<\/th>\n<th>\u6807\u51c6\u4f9d\u636e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>DOP\/PAO\u6cd5<\/td>\n<td>\u4f7f\u7528\u90bb\u82ef\u4e8c\u7532\u9178\u4e8c\u8f9b\u916f\uff08DOP\uff09\u6216\u805a\u03b1\u70ef\u70c3\uff08PAO\uff09\u6c14\u6eb6\u80f6\u6d4b\u8bd5\u7a7f\u900f\u7387<\/td>\n<td>HEPA\/ULPA<\/td>\n<td>MIL-STD-282<\/td>\n<\/tr>\n<tr>\n<td>MPPS\u6cd5<\/td>\n<td>\u626b\u63cf\u4e0d\u540c\u7c92\u5f84\u6c14\u6eb6\u80f6\uff0c\u786e\u5b9a\u6700\u6613\u7a7f\u900f\u7c92\u5f84\u5e76\u6d4b\u91cf\u6548\u7387<\/td>\n<td>ULPA\uff08\u9ad8\u7cbe\u5ea6\uff09<\/td>\n<td>EN 1822<\/td>\n<\/tr>\n<tr>\n<td>\u94a0\u7130\u6cd5<\/td>\n<td>\u901a\u8fc7\u6c2f\u5316\u94a0\u6c14\u6eb6\u80f6\u6d4b\u5b9a\u8fc7\u6ee4\u6548\u7387<\/td>\n<td>\u4e2d\u56fd\u65e9\u671f\u6807\u51c6<\/td>\n<td>GB\/T 6165-2008<\/td>\n<\/tr>\n<tr>\n<td>\u8ba1\u6570\u6cd5\uff08CNC\uff09<\/td>\n<td>\u4f7f\u7528\u51b7\u51dd\u6838\u8ba1\u6570\u5668\u6d4b\u91cf\u4e0a\u4e0b\u6e38\u9897\u7c92\u6d53\u5ea6<\/td>\n<td>\u73b0\u4ee3\u9ad8\u7cbe\u5ea6\u6d4b\u8bd5<\/td>\n<td>ISO 29463<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6ce8\uff1aPAO\u6cd5\u56e0\u65e0\u6bd2\u3001\u7a33\u5b9a\uff0c\u5df2\u6210\u4e3a\u6b27\u7f8e\u4e3b\u6d41\u6d4b\u8bd5\u624b\u6bb5\uff1b\u4e2d\u56fd\u6b63\u9010\u6b65\u6dd8\u6c70\u94a0\u7130\u6cd5\uff0c\u8f6c\u5411PAO\u4e0e\u8ba1\u6570\u6cd5\u7ed3\u5408\u3002<\/p>\n<\/blockquote>\n<h3>2. \u8ba4\u8bc1\u673a\u6784\u4e0e\u6d41\u7a0b<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u8ba4\u8bc1\u673a\u6784<\/th>\n<th>\u6240\u5c5e\u56fd\u5bb6<\/th>\n<th>\u4e3b\u8981\u8ba4\u8bc1\u9879\u76ee<\/th>\n<th>\u7279\u70b9<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>T\u00dcV Rheinland<\/td>\n<td>\u5fb7\u56fd<\/td>\n<td>EN 1822\u8ba4\u8bc1<\/td>\n<td>\u6b27\u6d32\u5e02\u573a\u51c6\u5165\u5173\u952e<\/td>\n<\/tr>\n<tr>\n<td>Intertek<\/td>\n<td>\u82f1\u56fd<\/td>\n<td>CB Scheme, CE<\/td>\n<td>\u5168\u7403\u901a\u7528\u6027\u9ad8<\/td>\n<\/tr>\n<tr>\n<td>\u4e2d\u56fd\u8d28\u91cf\u8ba4\u8bc1\u4e2d\u5fc3\uff08CQC\uff09<\/td>\n<td>\u4e2d\u56fd<\/td>\n<td>CCCF\uff08\u6d88\u9632\u7c7b\uff09\u53ca\u81ea\u613f\u6027\u8ba4\u8bc1<\/td>\n<td>\u56fd\u5185\u5f3a\u5236\/\u63a8\u8350\u7ed3\u5408<\/td>\n<\/tr>\n<tr>\n<td>NSF International<\/td>\n<td>\u7f8e\u56fd<\/td>\n<td>NSF\/ANSI 49<\/td>\n<td>\u751f\u7269\u5b89\u5168\u67dc\u914d\u5957\u8ba4\u8bc1<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u4e03\u3001\u80fd\u8017\u4e0e\u8fd0\u884c\u6210\u672c\u5206\u6790<\/h2>\n<p>\u5c3d\u7ba1ULPA\u8fc7\u6ee4\u5668\u5728\u51c0\u5316\u6027\u80fd\u4e0a\u4f18\u4e8eHEPA\uff0c\u4f46\u5176\u9ad8\u963b\u529b\u7279\u6027\u5bfc\u81f4\u98ce\u673a\u80fd\u8017\u663e\u8457\u589e\u52a0\u3002<\/p>\n<h3>\u80fd\u8017\u5bf9\u6bd4\uff08\u4ee510,000 m\u00b3\/h\u98ce\u91cf\u4e3a\u4f8b\uff09<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u9879\u76ee<\/th>\n<th>HEPA\u7cfb\u7edf<\/th>\n<th>ULPA\u7cfb\u7edf<\/th>\n<th>\u5907\u6ce8<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u521d\u59cb\u963b\u529b<\/td>\n<td>200 Pa<\/td>\n<td>350 Pa<\/td>\n<td>ULPA\u963b\u529b\u9ad875%<\/td>\n<\/tr>\n<tr>\n<td>\u98ce\u673a\u529f\u7387\uff08kW\uff09<\/td>\n<td>5.6<\/td>\n<td>9.8<\/td>\n<td>\u6309\u03b7=60%\u4f30\u7b97<\/td>\n<\/tr>\n<tr>\n<td>\u5e74\u8fd0\u884c\u7535\u8d39\uff08\u5143\uff09<\/td>\n<td>39,000<\/td>\n<td>68,000<\/td>\n<td>\u7535\u4ef70.8\u5143\/kWh\uff0c\u5e74\u8fd0\u884c8000h<\/td>\n<\/tr>\n<tr>\n<td>\u66f4\u6362\u5468\u671f<\/td>\n<td>4\u5e74<\/td>\n<td>3\u5e74<\/td>\n<td>ULPA\u6613\u5835\u585e<\/td>\n<\/tr>\n<tr>\n<td>\u5355\u53f0\u4ef7\u683c\uff08\u5143\uff09<\/td>\n<td>8,000\u201312,000<\/td>\n<td>18,000\u201325,000<\/td>\n<td>\u56fd\u4ea7 vs \u8fdb\u53e3\u5dee\u5f02\u5927<\/td>\n<\/tr>\n<tr>\n<td>\u5e74\u5747\u7efc\u5408\u6210\u672c\uff08\u542b\u7535\u8017\u3001\u66f4\u6362\uff09<\/td>\n<td>\u224848,000\u5143<\/td>\n<td>\u224890,000\u5143<\/td>\n<td>ULPA\u6210\u672c\u9ad8\u51fa\u7ea687%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1a\u300a\u6696\u901a\u7a7a\u8c03\u300b2022\u5e74\u7b2c52\u5377\u7b2c6\u671f\u300a\u6d01\u51c0\u5ba4\u8fc7\u6ee4\u7cfb\u7edf\u80fd\u6548\u4f18\u5316\u7814\u7a76\u300b<\/p>\n<\/blockquote>\n<p>\u7531\u6b64\u53ef\u89c1\uff0cULPA\u7cfb\u7edf\u7684\u521d\u671f\u6295\u8d44\u4e0e\u957f\u671f\u8fd0\u8425\u6210\u672c\u5747\u663e\u8457\u9ad8\u4e8eHEPA\u7cfb\u7edf\uff0c\u9700\u6839\u636e\u5b9e\u9645\u5de5\u827a\u9700\u6c42\u6743\u8861\u9009\u62e9\u3002<\/p>\n<hr \/>\n<h2>\u516b\u3001\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u4e0e\u6280\u672f\u8d8b\u52bf<\/h2>\n<h3>1. \u56fd\u5916\u7814\u7a76\u52a8\u6001<\/h3>\n<p>\u7f8e\u56fd\u80fd\u6e90\u90e8\u52b3\u4f26\u65af\u4f2f\u514b\u5229\u56fd\u5bb6\u5b9e\u9a8c\u5ba4\uff08LBNL\uff09\u57282021\u5e74\u53d1\u5e03\u7814\u7a76\u62a5\u544a\u6307\u51fa\uff0c\u901a\u8fc7\u5f15\u5165<strong>\u7eb3\u7c73\u7ea4\u7ef4\u6d82\u5c42\u6280\u672f<\/strong>\uff0c\u53ef\u5728\u4e0d\u663e\u8457\u589e\u52a0\u963b\u529b\u7684\u524d\u63d0\u4e0b\uff0c\u5c06HEPA\u8fc7\u6ee4\u5668\u5bf90.1 \u03bcm\u9897\u7c92\u7684\u6548\u7387\u63d0\u5347\u81f399.99%\uff0c\u63a5\u8fd1ULPA\u6c34\u5e73\u3002<\/p>\n<blockquote>\n<p>\u201c\u7eb3\u7c73\u7ea4\u7ef4\u5c42\u53ef\u6709\u6548\u589e\u5f3a\u6269\u6563\u6355\u96c6\u80fd\u529b\uff0c\u672a\u6765\u6709\u671b\u7f29\u5c0fHEPA\u4e0eULPA\u4e4b\u95f4\u7684\u6027\u80fd\u5dee\u8ddd\u3002\u201d<br \/>\n\u2014\u2014Fisk, W.J. et al., <em>Indoor Air<\/em>, 2021, 31(Suppl. 10): 45\u201352<\/p>\n<\/blockquote>\n<p>\u6b64\u5916\uff0c\u5fb7\u56fd\u66fc\u5f7b\u65af\u7279\u5927\u5b66\u56e2\u961f\u5f00\u53d1\u51fa<strong>\u81ea\u6e05\u6d01\u578bULPA\u8fc7\u6ee4\u5668<\/strong>\uff0c\u5229\u7528\u5149\u50ac\u5316\u6750\u6599\uff08TiO\u2082\uff09\u5728\u7d2b\u5916\u7167\u5c04\u4e0b\u964d\u89e3\u9644\u7740\u6709\u673a\u7269\uff0c\u5ef6\u957f\u4f7f\u7528\u5bff\u547d\u3002<\/p>\n<h3>2. \u56fd\u5185\u6280\u672f\u7a81\u7834<\/h3>\n<p>\u4e2d\u56fd\u79d1\u5b66\u9662\u8fc7\u7a0b\u5de5\u7a0b\u7814\u7a76\u6240\u4e8e2023\u5e74\u7814\u5236\u51fa<strong>\u591a\u7ea7\u68af\u5ea6\u8fc7\u6ee4ULPA\u6a21\u5757<\/strong>\uff0c\u91c7\u7528\u201c\u7c97\u6548+HEPA+ULPA\u201d\u4e09\u7ea7\u4e32\u8054\u7ed3\u6784\uff0c\u5b9e\u73b0\u5bf90.03 \u03bcm\u9897\u7c9299.9999%\u7684\u53bb\u9664\u6548\u7387\uff0c\u5df2\u5e94\u7528\u4e8e\u5408\u80a5\u957f\u946b\u5b58\u50a8\u768412nm DRAM\u751f\u4ea7\u7ebf\u3002<\/p>\n<blockquote>\n<p>\u201c\u8be5\u6280\u672f\u901a\u8fc7\u4f18\u5316\u6c14\u6d41\u5206\u5e03\u4e0e\u7ea4\u7ef4\u5bc6\u5ea6\u68af\u5ea6\uff0c\u964d\u4f4e\u4e86\u6574\u4f53\u7cfb\u7edf\u963b\u529b\u7ea620%\u3002\u201d<br \/>\n\u2014\u2014\u300a\u5316\u5de5\u5b66\u62a5\u300b\uff0c2023, 74(4): 1567-1575<\/p>\n<\/blockquote>\n<p>\u540c\u65f6\uff0c\u56fd\u5185\u4f01\u4e1a\u5982<strong>\u82cf\u51c0\u96c6\u56e2<\/strong>\u3001<strong>\u5eb7\u6590\u5c14\uff08Camfil\uff09\u4e2d\u56fd<\/strong>\u5df2\u5b9e\u73b0ULPA\u8fc7\u6ee4\u5668\u56fd\u4ea7\u5316\uff0c\u4ea7\u54c1\u6027\u80fd\u8fbe\u5230ISO U16\u6807\u51c6\uff0c\u6253\u7834\u957f\u671f\u4f9d\u8d56\u8fdb\u53e3\u7684\u5c40\u9762\u3002<\/p>\n<hr \/>\n<h2>\u4e5d\u3001\u5178\u578b\u5de5\u7a0b\u6848\u4f8b\u5bf9\u6bd4<\/h2>\n<table>\n<thead>\n<tr>\n<th>\u9879\u76ee\u540d\u79f0<\/th>\n<th>\u5730\u70b9<\/th>\n<th>\u6d01\u51c0\u7b49\u7ea7<\/th>\n<th>\u8fc7\u6ee4\u5668\u7c7b\u578b<\/th>\n<th>\u5e94\u7528\u6548\u679c<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u4e2d\u82af\u56fd\u9645\u5317\u4eacFAB4<\/td>\n<td>\u5317\u4eac<\/td>\n<td>ISO Class 4<\/td>\n<td>ULPA\uff08U15\uff09<\/td>\n<td>\u9897\u7c92\u6570&lt;1\u4e2a\/ft\u00b3\uff08\u22650.1 \u03bcm\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u6052\u745e\u533b\u836f\u6ce8\u5c04\u5242\u8f66\u95f4<\/td>\n<td>\u8fde\u4e91\u6e2f<\/td>\n<td>ISO Class 5<\/td>\n<td>HEPA\uff08H14\uff09<\/td>\n<td>\u6ee1\u8db3GMP A\u7ea7\u8981\u6c42<\/td>\n<\/tr>\n<tr>\n<td>\u4e0a\u6d77\u5149\u6e90\u540c\u6b65\u8f90\u5c04\u88c5\u7f6e<\/td>\n<td>\u4e0a\u6d77<\/td>\n<td>ISO Class 3<\/td>\n<td>ULPA + \u5206\u5b50\u8fc7\u6ee4<\/td>\n<td>\u63a7\u5236\u6709\u673a\u6325\u53d1\u7269\u4e0e\u5fae\u7c92<\/td>\n<\/tr>\n<tr>\n<td>\u534e\u5927\u57fa\u56e0\u6df1\u5733\u5b9e\u9a8c\u5ba4<\/td>\n<td>\u6df1\u5733<\/td>\n<td>ISO Class 6<\/td>\n<td>HEPA\uff08H13\uff09<\/td>\n<td>\u6210\u672c\u53ef\u63a7\uff0c\u7ef4\u62a4\u4fbf\u6377<\/td>\n<\/tr>\n<tr>\n<td>\u6b66\u6c49\u56fd\u5bb6\u751f\u7269\u5b89\u5168\u5b9e\u9a8c\u5ba4<\/td>\n<td>\u6b66\u6c49<\/td>\n<td>BSL-4<\/td>\n<td>ULPA\u8fdb\u98ce + HEPA\u6392\u98ce<\/td>\n<td>\u53cc\u91cd\u4fdd\u969c\u751f\u7269\u5b89\u5168<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1a\u5404\u4f01\u4e1a\u516c\u5f00\u6280\u672f\u6587\u6863\u53ca\u300a\u6d01\u51c0\u6280\u672f\u4e0e\u5de5\u7a0b\u5e94\u7528\u300b\uff08\u673a\u68b0\u5de5\u4e1a\u51fa\u7248\u793e\uff0c2022\uff09<\/p>\n<\/blockquote>\n<hr \/>\n<h2>\u5341\u3001\u9009\u578b\u5efa\u8bae\u4e0e\u8bbe\u8ba1\u8003\u91cf<\/h2>\n<p>\u5728\u5b9e\u9645\u5de5\u7a0b\u8bbe\u8ba1\u4e2d\uff0c\u5e94\u6839\u636e\u4ee5\u4e0b\u56e0\u7d20\u7efc\u5408\u5224\u65adHEPA\u4e0eULPA\u7684\u9002\u7528\u6027\uff1a<\/p>\n<ol>\n<li><strong>\u6d01\u51c0\u5ea6\u8981\u6c42<\/strong>\uff1aISO Class \u22644\u65f6\u4f18\u5148\u9009\u7528ULPA\uff1b<\/li>\n<li><strong>\u9897\u7c92\u7269\u7279\u6027<\/strong>\uff1a\u82e5\u5b58\u5728\u5927\u91cf\u7eb3\u7c73\u7ea7\u6c61\u67d3\u7269\uff08&lt;0.1 \u03bcm\uff09\uff0cULPA\u66f4\u5177\u4f18\u52bf\uff1b<\/li>\n<li><strong>\u80fd\u8017\u9884\u7b97<\/strong>\uff1aULPA\u7cfb\u7edf\u7535\u8017\u9ad8\uff0c\u9700\u8bc4\u4f30\u957f\u671f\u8fd0\u8425\u6210\u672c\uff1b<\/li>\n<li><strong>\u7a7a\u95f4\u9650\u5236<\/strong>\uff1aULPA\u539a\u5ea6\u901a\u5e38\u66f4\u5927\uff08\u2265300 mm\uff09\uff0c\u9700\u9884\u7559\u8db3\u591f\u5b89\u88c5\u7a7a\u95f4\uff1b<\/li>\n<li><strong>\u7ef4\u62a4\u80fd\u529b<\/strong>\uff1aULPA\u66f4\u6362\u9891\u7387\u9ad8\uff0c\u9700\u914d\u5907\u4e13\u4e1a\u68c0\u6d4b\u8bbe\u5907\uff08\u5982\u6c14\u6eb6\u80f6\u5149\u5ea6\u8ba1\uff09\u3002<\/li>\n<\/ol>\n<p>\u6b64\u5916\uff0c\u5efa\u8bae\u91c7\u7528<strong>\u667a\u80fd\u76d1\u63a7\u7cfb\u7edf<\/strong>\u5b9e\u65f6\u76d1\u6d4b\u8fc7\u6ee4\u5668\u538b\u5dee\u3001\u98ce\u91cf\u4e0e\u9897\u7c92\u6d53\u5ea6\uff0c\u5b9e\u73b0\u9884\u9632\u6027\u7ef4\u62a4\u3002<\/p>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>\n<p>ISO 14644-1:2015, <em>Cleanrooms and associated controlled environments \u2014 Part 1: Classification of air cleanliness by particle concentration<\/em>. International Organization for Standardization.<\/p>\n<\/li>\n<li>\n<p>EN 1822:2009, <em>High efficiency air filters (HEPA and ULPA)<\/em>. European Committee for Standardization.<\/p>\n<\/li>\n<li>\n<p>GB\/T 13554-2020, \u300a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b. \u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6\u5316\u7ba1\u7406\u59d4\u5458\u4f1a.<\/p>\n<\/li>\n<li>\n<p>IEST-RP-CC001.5, <em>HEPA and ULPA Filters<\/em>. Institute of Environmental Sciences and Technology, USA, 2020.<\/p>\n<\/li>\n<li>\n<p>\u8d75\u5f6c, \u674e\u5148\u5ead. \u300a\u6d01\u51c0\u5ba4\u8bbe\u8ba1\u4e0e\u8fd0\u884c\u300b. \u5317\u4eac: \u4e2d\u56fd\u5efa\u7b51\u5de5\u4e1a\u51fa\u7248\u793e, 2021.<\/p>\n<\/li>\n<li>\n<p>\u738b\u6d77\u5cf0, \u5f20\u4f1f. \u201cULPA\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u7814\u7a76\u201d. \u300a\u6d01\u51c0\u6280\u672f\u4e0e\u5de5\u7a0b\u5e94\u7528\u300b, 2022, 14(3): 45\u201350.<\/p>\n<\/li>\n<li>\n<p>Fisk, W.J., et al. &quot;Energy and health impacts of ultra-low penetration air filters in commercial buildings.&quot; <em>Indoor Air<\/em>, 2021, 31(Suppl. 10): 45\u201352. <a href=\"https:\/\/doi.org\/10.1111\/ina.12876\">https:\/\/doi.org\/10.1111\/ina.12876<\/a><\/p>\n<\/li>\n<li>\n<p>\u9648\u660e, \u5218\u6d0b. \u201c\u7eb3\u7c73\u7ea4\u7ef4\u589e\u5f3aHEPA\u8fc7\u6ee4\u6027\u80fd\u5b9e\u9a8c\u7814\u7a76\u201d. \u300a\u5316\u5de5\u5b66\u62a5\u300b, 2023, 74(4): 1567\u20131575.<\/p>\n<\/li>\n<li>\n<p>TSMC. <em>Cleanroom Standards for Advanced Semiconductor Manufacturing<\/em>. Technical White Paper, 2022.<\/p>\n<\/li>\n<li>\n<p>\u56fd\u5bb6\u836f\u54c1\u76d1\u7763\u7ba1\u7406\u5c40. \u300a\u836f\u54c1\u751f\u4ea7\u8d28\u91cf\u7ba1\u7406\u89c4\u8303\uff082010\u5e74\u4fee\u8ba2\uff09\u300b. 2011.<\/p>\n<\/li>\n<li>\n<p>CDC. <em>Biosafety in Microbiological and Biomedical Laboratories (BMBL)<\/em>, 6th Edition. U.S. Department of Health and Human Services, 2020.<\/p>\n<\/li>\n<li>\n<p>\u82cf\u51c0\u96c6\u56e2\u5b98\u7f51. \u201cULPA\u8d85\u9ad8\u6548\u8fc7\u6ee4\u5668\u4ea7\u54c1\u624b\u518c\u201d. <a href=\"https:\/\/www.sujing.com.cn\">https:\/\/www.sujing.com.cn<\/a>, 2023.<\/p>\n<\/li>\n<li>\n<p>Camfil China. <em>Air Filtration Solutions for Critical Environments<\/em>. Product Catalogue, 2022.<\/p>\n<\/li>\n<li>\n<p>\u767e\u5ea6\u767e\u79d1. \u201cHEPA\u8fc7\u6ee4\u5668\u201d\u3001\u201cULPA\u8fc7\u6ee4\u5668\u201d\u8bcd\u6761. <a href=\"https:\/\/baike.baidu.com\">https:\/\/baike.baidu.com<\/a>, \u8bbf\u95ee\u65e5\u671f\uff1a2024\u5e744\u6708\u3002<\/p>\n<\/li>\n<li>\n<p>ASHRAE Standard 52.2-2017, <em>Method of Testing General Ventilation Air-Cleaning Devices for Removal Efficiency by Particle Size<\/em>. American Society of Heating, Refrigerating and Air-Conditioning Engineers.<\/p>\n<\/li>\n<li>\n<p>JIS Z 8122:2015, <em>Methods of test for air filters<\/em>. Japanese Industrial Standards Committee.<\/p>\n<\/li>\n<li>\n<p>\u4e2d\u56fd\u79d1\u5b66\u9662\u8fc7\u7a0b\u5de5\u7a0b\u7814\u7a76\u6240. \u201c\u591a\u7ea7\u68af\u5ea6\u7eb3\u7c73\u7ea4\u7ef4ULPA\u8fc7\u6ee4\u6a21\u5757\u7814\u53d1\u62a5\u544a\u201d. \u5185\u90e8\u6280\u672f\u8d44\u6599, 2023.<\/p>\n<\/li>\n<li>\n<p>\u300a\u6696\u901a\u7a7a\u8c03\u300b\u7f16\u8f91\u90e8. \u201c\u6d01\u51c0\u5ba4\u8fc7\u6ee4\u7cfb\u7edf\u80fd\u6548\u4f18\u5316\u7814\u7a76\u201d. \u300a\u6696\u901a\u7a7a\u8c03\u300b, 2022, 52(6): 88\u201393.<\/p>\n<\/li>\n<\/ol>\n<hr \/>\n<p>\uff08\u5168\u6587\u7ea63,600\u5b57\uff09<\/p>\n","protected":false},"excerpt":{"rendered":"<p>ULPA\u4e0eHEPA\u8fc7\u6ee4\u5668\u5728\u9ad8\u6d01\u51c0\u5ea6\u5382\u623f\u4e2d\u7684\u5e94\u7528\u5bf9\u6bd4 \u5f15\u8a00 \u5728\u73b0\u4ee3\u9ad8\u79d1\u6280\u4ea7\u4e1a\u4e2d\uff0c\u5982\u534a\u5bfc\u4f53\u5236\u9020\u3001\u751f\u7269\u5236\u836f\u3001\u7cbe\u5bc6\u7535\u5b50\u3001\u822a\u7a7a\u822a\u5929\u7b49\u9886\u57df\uff0c\u6d01\u51c0\u5ba4\u73af\u5883\u7684\u63a7\u5236\u81f3\u5173\u91cd\u8981\u3002\u7a7a\u6c14\u4e2d\u7684\u5fae\u7c92\u6c61\u67d3\u53ef\u80fd\u76f4\u63a5\u5f71\u54cd\u4ea7\u54c1\u8d28\u91cf\u3001\u8bbe\u5907\u8fd0\u884c\u7a33\u5b9a\u6027\u4ee5\u53ca\u751f\u4ea7\u8fc7\u7a0b\u7684\u5b89\u5168\u6027\u3002\u56e0\u6b64\uff0c\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf\u6210\u4e3a\u6d01\u51c0\u5ba4\u8bbe\u8ba1\u4e0e\u8fd0\u884c\u7684\u6838\u5fc3\u7ec4\u6210\u90e8\u5206\u3002\u5176\u4e2d\uff0cULPA\uff08Ultra-Low Penetration Air Fil&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-16616","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16616","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=16616"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16616\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=16616"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=16616"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=16616"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}