{"id":16279,"date":"2025-07-21T12:55:45","date_gmt":"2025-07-21T04:55:45","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=16279"},"modified":"2025-07-21T12:55:45","modified_gmt":"2025-07-21T04:55:45","slug":"%e8%80%90%e9%ab%98%e6%b8%a9%e7%a9%ba%e6%b0%94%e5%be%aa%e7%8e%af%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e7%83%ad%e5%a4%84%e7%90%86%e8%ae%be%e5%a4%87%e4%b8%ad%e7%9a%84%e5%ba%94","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=16279","title":{"rendered":"\u8010\u9ad8\u6e29\u7a7a\u6c14\u5faa\u73af\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u70ed\u5904\u7406\u8bbe\u5907\u4e2d\u7684\u5e94\u7528\u5206\u6790"},"content":{"rendered":"<h1>\u8010\u9ad8\u6e29\u7a7a\u6c14\u5faa\u73af\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u70ed\u5904\u7406\u8bbe\u5907\u4e2d\u7684\u5e94\u7528\u5206\u6790<\/h1>\n<h2>\u5f15\u8a00<\/h2>\n<p>\u5728\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u4e2d\uff0c\u70ed\u5904\u7406\u662f\u4e0d\u53ef\u6216\u7f3a\u7684\u5173\u952e\u5de5\u827a\u4e4b\u4e00\u3002\u70ed\u5904\u7406\u8bbe\u5907\u5728\u9ad8\u6e29\u73af\u5883\u4e0b\u8fd0\u884c\uff0c\u5bf9\u7a7a\u6c14\u7684\u6d01\u51c0\u5ea6\u3001\u6e29\u5ea6\u63a7\u5236\u7cbe\u5ea6\u4ee5\u53ca\u6c14\u4f53\u5faa\u73af\u6548\u7387\u63d0\u51fa\u4e86\u6781\u9ad8\u7684\u8981\u6c42\u3002\u4e3a\u4e86\u786e\u4fdd\u4ea7\u54c1\u8d28\u91cf\u548c\u8bbe\u5907\u7a33\u5b9a\u6027\uff0c\u8010\u9ad8\u6e29\u7a7a\u6c14\u5faa\u73af\u8fc7\u6ee4\u5668\uff08High-Temperature Air Circulation Filter\uff09\u88ab\u5e7f\u6cdb\u5e94\u7528\u4e8e\u534a\u5bfc\u4f53\u70ed\u5904\u7406\u8bbe\u5907\u4e2d\u3002\u8fd9\u7c7b\u8fc7\u6ee4\u5668\u4e0d\u4ec5\u80fd\u591f\u6709\u6548\u53bb\u9664\u7a7a\u6c14\u4e2d\u7684\u5fae\u7c92\u6c61\u67d3\u7269\uff0c\u8fd8\u80fd\u5728\u9ad8\u6e29\u6761\u4ef6\u4e0b\u4fdd\u6301\u826f\u597d\u7684\u8fc7\u6ee4\u6548\u7387\u548c\u673a\u68b0\u5f3a\u5ea6\u3002<\/p>\n<p>\u672c\u6587\u5c06\u4ece\u4ea7\u54c1\u53c2\u6570\u3001\u5de5\u4f5c\u539f\u7406\u3001\u5e94\u7528\u573a\u666f\u3001\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u7b49\u591a\u4e2a\u65b9\u9762\u5bf9\u8010\u9ad8\u6e29\u7a7a\u6c14\u5faa\u73af\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u70ed\u5904\u7406\u8bbe\u5907\u4e2d\u7684\u5e94\u7528\u8fdb\u884c\u7cfb\u7edf\u5206\u6790\uff0c\u5e76\u7ed3\u5408\u76f8\u5173\u6587\u732e\u8d44\u6599\uff0c\u63a2\u8ba8\u5176\u53d1\u5c55\u8d8b\u52bf\u4e0e\u6280\u672f\u6311\u6218\u3002<\/p>\n<hr \/>\n<h2>\u4e00\u3001\u8010\u9ad8\u6e29\u7a7a\u6c14\u5faa\u73af\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u4e0e\u7ed3\u6784<\/h2>\n<h3>1.1 \u5de5\u4f5c\u539f\u7406<\/h3>\n<p>\u8010\u9ad8\u6e29\u7a7a\u6c14\u5faa\u73af\u8fc7\u6ee4\u5668\u4e3b\u8981\u901a\u8fc7\u7269\u7406\u62e6\u622a\u3001\u60ef\u6027\u78b0\u649e\u3001\u6269\u6563\u6c89\u964d\u7b49\u673a\u5236\u53bb\u9664\u7a7a\u6c14\u4e2d\u7684\u9897\u7c92\u6c61\u67d3\u7269\u3002\u5176\u6838\u5fc3\u529f\u80fd\u662f\u5728\u9ad8\u6e29\u73af\u5883\u4e0b\u7ef4\u6301\u7a7a\u6c14\u6d01\u51c0\u5ea6\uff0c\u9632\u6b62\u5fae\u7c92\u6c89\u79ef\u5728\u6676\u5706\u8868\u9762\uff0c\u5f71\u54cd\u534a\u5bfc\u4f53\u5668\u4ef6\u7684\u6027\u80fd\u548c\u826f\u7387\u3002<\/p>\n<p>\u5728\u70ed\u5904\u7406\u8bbe\u5907\u4e2d\uff0c\u7a7a\u6c14\u7ecf\u8fc7\u52a0\u70ed\u540e\u5faa\u73af\u6d41\u52a8\uff0c\u8fc7\u6ee4\u5668\u901a\u5e38\u5b89\u88c5\u5728\u7a7a\u6c14\u5faa\u73af\u7cfb\u7edf\u7684\u56de\u98ce\u6216\u9001\u98ce\u6bb5\uff0c\u4ee5\u4fdd\u8bc1\u5faa\u73af\u7a7a\u6c14\u7684\u6d01\u51c0\u5ea6\u3002\u7531\u4e8e\u8bbe\u5907\u8fd0\u884c\u6e29\u5ea6\u53ef\u9ad8\u8fbe600\u00b0C\u4ee5\u4e0a\uff0c\u56e0\u6b64\u8fc7\u6ee4\u6750\u6599\u5fc5\u987b\u5177\u5907\u826f\u597d\u7684\u8010\u70ed\u6027\u3001\u5316\u5b66\u7a33\u5b9a\u6027\u548c\u673a\u68b0\u5f3a\u5ea6\u3002<\/p>\n<h3>1.2 \u7ed3\u6784\u7ec4\u6210<\/h3>\n<p>\u8010\u9ad8\u6e29\u7a7a\u6c14\u5faa\u73af\u8fc7\u6ee4\u5668\u4e00\u822c\u7531\u4ee5\u4e0b\u51e0\u4e2a\u90e8\u5206\u7ec4\u6210\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u7ec4\u6210\u90e8\u5206<\/th>\n<th>\u529f\u80fd\u63cf\u8ff0<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u8fc7\u6ee4\u4ecb\u8d28<\/td>\n<td>\u91c7\u7528\u9676\u74f7\u7ea4\u7ef4\u3001\u91d1\u5c5e\u7f51\u6216\u591a\u5b54\u9676\u74f7\u7b49\u8010\u9ad8\u6e29\u6750\u6599\uff0c\u8d1f\u8d23\u62e6\u622a\u7a7a\u6c14\u4e2d\u7684\u9897\u7c92\u7269<\/td>\n<\/tr>\n<tr>\n<td>\u6846\u67b6\u7ed3\u6784<\/td>\n<td>\u901a\u5e38\u7531\u4e0d\u9508\u94a2\u6216\u8010\u9ad8\u6e29\u5408\u91d1\u5236\u6210\uff0c\u786e\u4fdd\u7ed3\u6784\u7a33\u5b9a\u6027\u548c\u8010\u8150\u8680\u6027<\/td>\n<\/tr>\n<tr>\n<td>\u5bc6\u5c01\u7cfb\u7edf<\/td>\n<td>\u9632\u6b62\u672a\u7ecf\u8fc7\u6ee4\u7684\u7a7a\u6c14\u6cc4\u6f0f\uff0c\u786e\u4fdd\u8fc7\u6ee4\u6548\u7387<\/td>\n<\/tr>\n<tr>\n<td>\u5b89\u88c5\u63a5\u53e3<\/td>\n<td>\u4e0e\u8bbe\u5907\u98ce\u9053\u8fde\u63a5\uff0c\u4fbf\u4e8e\u62c6\u5378\u548c\u66f4\u6362<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u4e8c\u3001\u4ea7\u54c1\u53c2\u6570\u4e0e\u6027\u80fd\u6307\u6807<\/h2>\n<h3>2.1 \u4e3b\u8981\u6280\u672f\u53c2\u6570<\/h3>\n<p>\u4ee5\u4e0b\u662f\u5e38\u89c1\u8010\u9ad8\u6e29\u7a7a\u6c14\u5faa\u73af\u8fc7\u6ee4\u5668\u7684\u4e3b\u8981\u6280\u672f\u53c2\u6570\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570\u540d\u79f0<\/th>\n<th>\u5178\u578b\u503c\u8303\u56f4<\/th>\n<th>\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5de5\u4f5c\u6e29\u5ea6\u8303\u56f4<\/td>\n<td>200\u00b0C ~ 800\u00b0C<\/td>\n<td>\u6839\u636e\u6750\u6599\u4e0d\u540c\uff0c\u53ef\u9002\u7528\u4e8e\u4e0d\u540c\u9ad8\u6e29\u73af\u5883<\/td>\n<\/tr>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387<\/td>\n<td>\u226599.97% @ 0.3 \u03bcm\uff08HEPA\u7ea7\uff09<\/td>\n<td>\u5728\u9ad8\u6e29\u4e0b\u4ecd\u4fdd\u6301\u9ad8\u6548\u8fc7\u6ee4\u6027\u80fd<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u59cb\u538b\u964d<\/td>\n<td>&lt;300 Pa<\/td>\n<td>\u4f4e\u963b\u529b\u8bbe\u8ba1\uff0c\u51cf\u5c11\u80fd\u8017<\/td>\n<\/tr>\n<tr>\n<td>\u6750\u6599\u7c7b\u578b<\/td>\n<td>\u9676\u74f7\u7ea4\u7ef4\u3001\u91d1\u5c5e\u7f51\u3001\u591a\u5b54\u9676\u74f7<\/td>\n<td>\u4e0d\u540c\u6750\u6599\u9002\u7528\u4e8e\u4e0d\u540c\u6e29\u5ea6\u4e0e\u5316\u5b66\u73af\u5883<\/td>\n<\/tr>\n<tr>\n<td>\u4f7f\u7528\u5bff\u547d<\/td>\n<td>6\u4e2a\u6708 ~ 2\u5e74\uff08\u89c6\u5de5\u51b5\u800c\u5b9a\uff09<\/td>\n<td>\u53d7\u7c89\u5c18\u6d53\u5ea6\u3001\u6e29\u5ea6\u6ce2\u52a8\u7b49\u56e0\u7d20\u5f71\u54cd<\/td>\n<\/tr>\n<tr>\n<td>\u5c3a\u5bf8\u89c4\u683c<\/td>\n<td>\u5b9a\u5236\u5316<\/td>\n<td>\u6839\u636e\u8bbe\u5907\u98ce\u9053\u8bbe\u8ba1\u5b9a\u5236\u4e0d\u540c\u5c3a\u5bf8<\/td>\n<\/tr>\n<tr>\n<td>\u8010\u8150\u8680\u6027<\/td>\n<td>\u4f18\u826f<\/td>\n<td>\u80fd\u62b5\u6297\u9178\u78b1\u6c14\u4f53\u8150\u8680<\/td>\n<\/tr>\n<tr>\n<td>\u673a\u68b0\u5f3a\u5ea6<\/td>\n<td>\u9ad8<\/td>\n<td>\u5728\u9ad8\u6e29\u4e0b\u4e0d\u6613\u53d8\u5f62\u6216\u7834\u635f<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>2.2 \u6027\u80fd\u6d4b\u8bd5\u6807\u51c6<\/h3>\n<p>\u4e3a\u786e\u4fdd\u8fc7\u6ee4\u5668\u5728\u9ad8\u6e29\u6761\u4ef6\u4e0b\u7684\u7a33\u5b9a\u8fd0\u884c\uff0c\u901a\u5e38\u4f9d\u636e\u4ee5\u4e0b\u6807\u51c6\u8fdb\u884c\u6027\u80fd\u6d4b\u8bd5\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6807\u51c6\u7f16\u53f7<\/th>\n<th>\u6807\u51c6\u540d\u79f0<\/th>\n<th>\u5e94\u7528\u9886\u57df<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>ISO 29463<\/td>\n<td>\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u6027\u80fd\u6d4b\u8bd5\u65b9\u6cd5<\/td>\n<td>\u56fd\u9645\u901a\u7528<\/td>\n<\/tr>\n<tr>\n<td>GB\/T 13554-2020<\/td>\n<td>\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u56fd\u5bb6\u6807\u51c6<\/td>\n<td>\u4e2d\u56fd\u56fd\u5185\u5e94\u7528<\/td>\n<\/tr>\n<tr>\n<td>IEST-RP-CC001<\/td>\n<td>HEPA and ULPA Filters<\/td>\n<td>\u7f8e\u56fd\u6d01\u51c0\u5ba4\u8fc7\u6ee4\u5668\u6d4b\u8bd5\u6807\u51c6<\/td>\n<\/tr>\n<tr>\n<td>DIN 24184<\/td>\n<td>\u9ad8\u6e29\u7a7a\u6c14\u8fc7\u6ee4\u5668\u6d4b\u8bd5\u6807\u51c6<\/td>\n<td>\u5fb7\u56fd\u5de5\u4e1a\u6807\u51c6<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u4e09\u3001\u5728\u534a\u5bfc\u4f53\u70ed\u5904\u7406\u8bbe\u5907\u4e2d\u7684\u5e94\u7528<\/h2>\n<h3>3.1 \u534a\u5bfc\u4f53\u70ed\u5904\u7406\u5de5\u827a\u6982\u8ff0<\/h3>\n<p>\u534a\u5bfc\u4f53\u70ed\u5904\u7406\u4e3b\u8981\u5305\u62ec\u9000\u706b\uff08Annealing\uff09\u3001\u6c27\u5316\uff08Oxidation\uff09\u3001\u6269\u6563\uff08Diffusion\uff09\u3001\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08CVD\uff09\u7b49\u5de5\u827a\u3002\u8fd9\u4e9b\u5de5\u827a\u901a\u5e38\u5728\u9ad8\u6e29\u7089\u4e2d\u8fdb\u884c\uff0c\u6e29\u5ea6\u8303\u56f4\u4ece300\u00b0C\u52301000\u00b0C\u4e0d\u7b49\u3002\u5728\u8fd9\u4e9b\u9ad8\u6e29\u73af\u5883\u4e0b\uff0c\u7a7a\u6c14\u4e2d\u7684\u5fae\u7c92\u6c61\u67d3\u7269\u5bb9\u6613\u6c89\u79ef\u5728\u6676\u5706\u8868\u9762\uff0c\u5bfc\u81f4\u7f3a\u9677\u589e\u52a0\uff0c\u5f71\u54cd\u5668\u4ef6\u6027\u80fd\u3002<\/p>\n<p>\u56e0\u6b64\uff0c\u7a7a\u6c14\u5faa\u73af\u7cfb\u7edf\u4e2d\u7684\u8fc7\u6ee4\u5668\u5fc5\u987b\u5177\u5907\u4ee5\u4e0b\u529f\u80fd\uff1a<\/p>\n<ul>\n<li>\u9ad8\u6548\u53bb\u9664\u4e9a\u5fae\u7c73\u7ea7\u9897\u7c92<\/li>\n<li>\u5728\u9ad8\u6e29\u4e0b\u4fdd\u6301\u7a33\u5b9a\u7684\u7269\u7406\u548c\u5316\u5b66\u6027\u80fd<\/li>\n<li>\u80fd\u591f\u8010\u53d7\u9891\u7e41\u7684\u6e29\u5ea6\u53d8\u5316<\/li>\n<li>\u4f4e\u963b\u529b\uff0c\u51cf\u5c11\u80fd\u8017<\/li>\n<\/ul>\n<h3>3.2 \u8fc7\u6ee4\u5668\u5728\u8bbe\u5907\u4e2d\u7684\u5e03\u7f6e\u65b9\u5f0f<\/h3>\n<p>\u5728\u70ed\u5904\u7406\u8bbe\u5907\u4e2d\uff0c\u8010\u9ad8\u6e29\u7a7a\u6c14\u5faa\u73af\u8fc7\u6ee4\u5668\u901a\u5e38\u5e03\u7f6e\u5728\u4ee5\u4e0b\u51e0\u4e2a\u4f4d\u7f6e\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5b89\u88c5\u4f4d\u7f6e<\/th>\n<th>\u529f\u80fd\u63cf\u8ff0<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u56de\u98ce\u5165\u53e3<\/td>\n<td>\u6355\u83b7\u5faa\u73af\u7a7a\u6c14\u4e2d\u643a\u5e26\u7684\u9897\u7c92\u7269\uff0c\u9632\u6b62\u6c61\u67d3\u8bbe\u5907\u5185\u90e8<\/td>\n<\/tr>\n<tr>\n<td>\u9001\u98ce\u51fa\u53e3<\/td>\n<td>\u4fdd\u8bc1\u9001\u5165\u7089\u8154\u7684\u7a7a\u6c14\u6d01\u51c0\u5ea6\uff0c\u51cf\u5c11\u6676\u5706\u8868\u9762\u6c61\u67d3<\/td>\n<\/tr>\n<tr>\n<td>\u7089\u8154\u5185\u90e8<\/td>\n<td>\u5728\u67d0\u4e9b\u7279\u6b8a\u8bbe\u5907\u4e2d\uff0c\u8fc7\u6ee4\u5668\u76f4\u63a5\u5b89\u88c5\u5728\u7089\u8154\u5185\uff0c\u7528\u4e8e\u5c40\u90e8\u51c0\u5316<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>3.3 \u5e94\u7528\u5b9e\u4f8b\u5206\u6790<\/h3>\n<p>\u4ee5\u65e5\u672c\u4e1c\u4eac\u7535\u5b50\uff08Tokyo Electron\uff09\u516c\u53f8\u7684\u70ed\u5904\u7406\u8bbe\u5907\u4e3a\u4f8b\uff0c\u5176\u91c7\u7528\u7684\u8010\u9ad8\u6e29\u9676\u74f7\u7ea4\u7ef4\u8fc7\u6ee4\u5668\u80fd\u591f\u5728600\u00b0C\u9ad8\u6e29\u4e0b\u8fde\u7eed\u8fd0\u884c\u8d85\u8fc712\u4e2a\u6708\uff0c\u8fc7\u6ee4\u6548\u7387\u4fdd\u6301\u572899.99%\u4ee5\u4e0a\uff0c\u663e\u8457\u63d0\u5347\u4e86\u6676\u5706\u7684\u826f\u7387\u3002\u8be5\u8bbe\u5907\u91c7\u7528\u6a21\u5757\u5316\u8bbe\u8ba1\uff0c\u4fbf\u4e8e\u5b9a\u671f\u66f4\u6362\u8fc7\u6ee4\u5668\uff0c\u51cf\u5c11\u4e86\u7ef4\u62a4\u6210\u672c\u3002<\/p>\n<p>\u5728\u4e2d\u56fd\uff0c\u4e2d\u82af\u56fd\u9645\uff08SMIC\uff09\u5728\u517614nm\u5236\u7a0b\u7684\u70ed\u5904\u7406\u8bbe\u5907\u4e2d\u5f15\u5165\u4e86\u56fd\u4ea7\u8010\u9ad8\u6e29\u91d1\u5c5e\u7f51\u8fc7\u6ee4\u5668\uff0c\u7ecf\u6d4b\u8bd5\uff0c\u5728500\u00b0C\u73af\u5883\u4e0b\u8fd0\u884c6\u4e2a\u6708\u540e\uff0c\u8fc7\u6ee4\u6548\u7387\u4ecd\u4fdd\u6301\u572899.97%\u4ee5\u4e0a\uff0c\u6027\u80fd\u63a5\u8fd1\u56fd\u9645\u5148\u8fdb\u6c34\u5e73\u3002<\/p>\n<hr \/>\n<h2>\u56db\u3001\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u4e0e\u6280\u672f\u5bf9\u6bd4<\/h2>\n<h3>4.1 \u56fd\u5916\u7814\u7a76\u8fdb\u5c55<\/h3>\n<p>\u6b27\u7f8e\u548c\u65e5\u672c\u5728\u8010\u9ad8\u6e29\u7a7a\u6c14\u8fc7\u6ee4\u5668\u9886\u57df\u5177\u6709\u8f83\u5f3a\u7684\u6280\u672f\u79ef\u7d2f\u3002\u4ee5\u4e0b\u662f\u4e00\u4e9b\u4ee3\u8868\u6027\u7814\u7a76\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u7814\u7a76\u673a\u6784<\/th>\n<th>\u7814\u7a76\u6210\u679c<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>3M\u516c\u53f8\uff08\u7f8e\u56fd\uff09<\/td>\n<td>\u5f00\u53d1\u51fa\u8010\u9ad8\u6e29\u8fbe800\u00b0C\u7684\u9676\u74f7\u7ea4\u7ef4\u8fc7\u6ee4\u6750\u6599\uff0c\u9002\u7528\u4e8e\u534a\u5bfc\u4f53\u70ed\u5904\u7406\u8bbe\u5907<\/td>\n<\/tr>\n<tr>\n<td>Pall Corporation<\/td>\n<td>\u63a8\u51fa\u591a\u5b54\u9676\u74f7\u8fc7\u6ee4\u5668\uff0c\u5177\u5907\u826f\u597d\u7684\u8010\u8150\u8680\u6027\u548c\u673a\u68b0\u5f3a\u5ea6\uff0c\u9002\u7528\u4e8e\u9ad8\u6e29CVD\u8bbe\u5907<\/td>\n<\/tr>\n<tr>\n<td>\u4e1c\u4e3d\u682a\u5f0f\u4f1a\u793e<\/td>\n<td>\u91c7\u7528\u7eb3\u7c73\u7ea7\u91d1\u5c5e\u7f51\u7ed3\u6784\uff0c\u63d0\u9ad8\u8fc7\u6ee4\u6548\u7387\u5e76\u964d\u4f4e\u538b\u964d\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u65e5\u672c\u534a\u5bfc\u4f53\u8bbe\u5907<\/td>\n<\/tr>\n<tr>\n<td>Fraunhofer\u7814\u7a76\u6240<\/td>\n<td>\u7814\u7a76\u65b0\u578b\u9ad8\u6e29\u8fc7\u6ee4\u6750\u6599\uff0c\u5982\u78b3\u5316\u7845\u6ce1\u6cab\u9676\u74f7\uff0c\u63d0\u5347\u8fc7\u6ee4\u5668\u5728\u6781\u7aef\u6e29\u5ea6\u4e0b\u7684\u7a33\u5b9a\u6027<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>4.2 \u56fd\u5185\u7814\u7a76\u8fdb\u5c55<\/h3>\n<p>\u8fd1\u5e74\u6765\uff0c\u4e2d\u56fd\u5728\u8010\u9ad8\u6e29\u7a7a\u6c14\u8fc7\u6ee4\u5668\u9886\u57df\u4e5f\u53d6\u5f97\u4e86\u4e00\u5b9a\u8fdb\u5c55\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u673a\u6784\/\u4f01\u4e1a<\/th>\n<th>\u7814\u7a76\u6210\u679c<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6e05\u534e\u5927\u5b66\u6750\u6599\u5b66\u9662<\/td>\n<td>\u7814\u7a76\u9676\u74f7\u7ea4\u7ef4\u590d\u5408\u6750\u6599\uff0c\u63d0\u5347\u5176\u5728\u9ad8\u6e29\u4e0b\u7684\u6297\u62c9\u5f3a\u5ea6\u548c\u70ed\u7a33\u5b9a\u6027<\/td>\n<\/tr>\n<tr>\n<td>\u4e2d\u79d1\u9662\u8fc7\u7a0b\u6240<\/td>\n<td>\u5f00\u53d1\u591a\u5b54\u9676\u74f7\u819c\u6750\u6599\uff0c\u5e94\u7528\u4e8e\u9ad8\u6e29\u6c14\u4f53\u8fc7\u6ee4\uff0c\u6027\u80fd\u63a5\u8fd1\u56fd\u9645\u6c34\u5e73<\/td>\n<\/tr>\n<tr>\n<td>\u82cf\u5dde\u534e\u745e\u51c0\u5316\u79d1\u6280<\/td>\n<td>\u751f\u4ea7\u8010\u9ad8\u6e29\u91d1\u5c5e\u7f51\u8fc7\u6ee4\u5668\uff0c\u5df2\u5e94\u7528\u4e8e\u56fd\u5185\u591a\u5bb6\u534a\u5bfc\u4f53\u5236\u9020\u4f01\u4e1a<\/td>\n<\/tr>\n<tr>\n<td>\u5e7f\u5dde\u6d01\u7279\u751f\u7269\u8fc7\u6ee4<\/td>\n<td>\u63a8\u51fa\u9ad8\u6e29HEPA\u8fc7\u6ee4\u5668\uff0c\u901a\u8fc7GB\/T 13554\u6807\u51c6\u8ba4\u8bc1\uff0c\u9010\u6b65\u8fdb\u5165\u56fd\u9645\u5e02\u573a<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>4.3 \u6280\u672f\u5bf9\u6bd4\u5206\u6790<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u6280\u672f\u6307\u6807<\/th>\n<th>\u56fd\u9645\u5148\u8fdb\u6c34\u5e73<\/th>\n<th>\u56fd\u5185\u6280\u672f\u6c34\u5e73<\/th>\n<th>\u5dee\u8ddd\u5206\u6790<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6700\u9ad8\u8010\u6e29<\/td>\n<td>800\u00b0C<\/td>\n<td>600\u00b0C<\/td>\n<td>\u6750\u6599\u8010\u70ed\u6027\u4ecd\u6709\u5dee\u8ddd<\/td>\n<\/tr>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387<\/td>\n<td>\u226599.99% @ 0.3 \u03bcm<\/td>\n<td>\u226599.97% @ 0.3 \u03bcm<\/td>\n<td>\u5dee\u5f02\u8f83\u5c0f\uff0c\u4f46\u7a33\u5b9a\u6027\u6709\u5f85\u63d0\u5347<\/td>\n<\/tr>\n<tr>\n<td>\u4f7f\u7528\u5bff\u547d<\/td>\n<td>1~2\u5e74<\/td>\n<td>6\u4e2a\u6708~1\u5e74<\/td>\n<td>\u6750\u6599\u8001\u5316\u548c\u6c61\u67d3\u95ee\u9898\u4ecd\u9700\u4f18\u5316<\/td>\n<\/tr>\n<tr>\n<td>\u6210\u672c<\/td>\n<td>\u8f83\u9ad8<\/td>\n<td>\u76f8\u5bf9\u8f83\u4f4e<\/td>\n<td>\u56fd\u4ea7\u4ea7\u54c1\u5177\u6709\u4ef7\u683c\u4f18\u52bf<\/td>\n<\/tr>\n<tr>\n<td>\u6807\u51c6\u8ba4\u8bc1<\/td>\n<td>ISO\u3001IEST\u7b49\u56fd\u9645\u6807\u51c6<\/td>\n<td>GB\/T\u3001\u90e8\u5206\u901a\u8fc7CE\u8ba4\u8bc1<\/td>\n<td>\u56fd\u9645\u8ba4\u8bc1\u4f53\u7cfb\u5c1a\u672a\u5168\u9762\u63a5\u8f68<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u4e94\u3001\u6280\u672f\u6311\u6218\u4e0e\u53d1\u5c55\u8d8b\u52bf<\/h2>\n<h3>5.1 \u6280\u672f\u6311\u6218<\/h3>\n<p>\u5c3d\u7ba1\u8010\u9ad8\u6e29\u7a7a\u6c14\u5faa\u73af\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u70ed\u5904\u7406\u8bbe\u5907\u4e2d\u5df2\u5e7f\u6cdb\u5e94\u7528\uff0c\u4f46\u4ecd\u9762\u4e34\u4ee5\u4e0b\u6280\u672f\u6311\u6218\uff1a<\/p>\n<ul>\n<li><strong>\u6750\u6599\u8010\u70ed\u6027\u4e0e\u7a33\u5b9a\u6027<\/strong>\uff1a\u5728\u6781\u7aef\u9ad8\u6e29\u4e0b\uff0c\u90e8\u5206\u6750\u6599\u4f1a\u51fa\u73b0\u70ed\u8001\u5316\u3001\u6c27\u5316\u7b49\u95ee\u9898\uff0c\u5f71\u54cd\u8fc7\u6ee4\u6548\u7387\u548c\u5bff\u547d\u3002<\/li>\n<li><strong>\u538b\u964d\u63a7\u5236<\/strong>\uff1a\u9ad8\u6e29\u4e0b\u7a7a\u6c14\u7c98\u5ea6\u589e\u52a0\uff0c\u5bfc\u81f4\u8fc7\u6ee4\u5668\u538b\u964d\u5347\u9ad8\uff0c\u5f71\u54cd\u8bbe\u5907\u80fd\u8017\u3002<\/li>\n<li><strong>\u5316\u5b66\u8150\u8680\u95ee\u9898<\/strong>\uff1a\u5728CVD\u7b49\u5de5\u827a\u4e2d\uff0c\u8bbe\u5907\u5185\u90e8\u5b58\u5728\u9178\u6027\u6216\u78b1\u6027\u6c14\u4f53\uff0c\u5bf9\u8fc7\u6ee4\u6750\u6599\u9020\u6210\u8150\u8680\u3002<\/li>\n<li><strong>\u6210\u672c\u4e0e\u5bff\u547d\u5e73\u8861<\/strong>\uff1a\u9ad8\u6027\u80fd\u6750\u6599\u6210\u672c\u9ad8\uff0c\u5982\u4f55\u5728\u4fdd\u8bc1\u6027\u80fd\u7684\u540c\u65f6\u964d\u4f4e\u4f7f\u7528\u6210\u672c\u662f\u5f53\u524d\u7814\u7a76\u91cd\u70b9\u3002<\/li>\n<\/ul>\n<h3>5.2 \u53d1\u5c55\u8d8b\u52bf<\/h3>\n<p>\u672a\u6765\uff0c\u8010\u9ad8\u6e29\u7a7a\u6c14\u5faa\u73af\u8fc7\u6ee4\u5668\u7684\u53d1\u5c55\u5c06\u5448\u73b0\u4ee5\u4e0b\u8d8b\u52bf\uff1a<\/p>\n<ol>\n<li><strong>\u65b0\u6750\u6599\u5f00\u53d1<\/strong>\uff1a\u5982\u78b3\u5316\u7845\u3001\u6c2e\u5316\u7845\u7b49\u9676\u74f7\u6750\u6599\u7684\u5e94\u7528\uff0c\u63d0\u5347\u8010\u9ad8\u6e29\u6027\u80fd\u548c\u5316\u5b66\u7a33\u5b9a\u6027\u3002<\/li>\n<li><strong>\u667a\u80fd\u5316\u76d1\u6d4b<\/strong>\uff1a\u96c6\u6210\u4f20\u611f\u5668\u6280\u672f\uff0c\u5b9e\u65f6\u76d1\u6d4b\u8fc7\u6ee4\u5668\u72b6\u6001\uff0c\u5b9e\u73b0\u9884\u6d4b\u6027\u7ef4\u62a4\u3002<\/li>\n<li><strong>\u6a21\u5757\u5316\u8bbe\u8ba1<\/strong>\uff1a\u4fbf\u4e8e\u66f4\u6362\u548c\u7ef4\u62a4\uff0c\u51cf\u5c11\u505c\u673a\u65f6\u95f4\u3002<\/li>\n<li><strong>\u73af\u4fdd\u4e0e\u53ef\u6301\u7eed\u53d1\u5c55<\/strong>\uff1a\u5f00\u53d1\u53ef\u56de\u6536\u6216\u4f4e\u6c61\u67d3\u6750\u6599\uff0c\u7b26\u5408\u7eff\u8272\u5236\u9020\u8d8b\u52bf\u3002<\/li>\n<li><strong>\u6807\u51c6\u5316\u4e0e\u8ba4\u8bc1\u4f53\u7cfb\u5b8c\u5584<\/strong>\uff1a\u63a8\u52a8\u56fd\u5185\u6807\u51c6\u4e0e\u56fd\u9645\u63a5\u8f68\uff0c\u63d0\u5347\u4ea7\u54c1\u56fd\u9645\u7ade\u4e89\u529b\u3002<\/li>\n<\/ol>\n<hr \/>\n<h2>\u516d\u3001\u603b\u7ed3\u4e0e\u5c55\u671b<\/h2>\n<p>\u8010\u9ad8\u6e29\u7a7a\u6c14\u5faa\u73af\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u70ed\u5904\u7406\u8bbe\u5907\u4e2d\u626e\u6f14\u7740\u81f3\u5173\u91cd\u8981\u7684\u89d2\u8272\uff0c\u5176\u6027\u80fd\u76f4\u63a5\u5f71\u54cd\u5230\u534a\u5bfc\u4f53\u5668\u4ef6\u7684\u826f\u7387\u4e0e\u53ef\u9760\u6027\u3002\u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u5411\u66f4\u5c0f\u8282\u70b9\u53d1\u5c55\uff0c\u5bf9\u7a7a\u6c14\u6d01\u51c0\u5ea6\u7684\u8981\u6c42\u5c06\u8fdb\u4e00\u6b65\u63d0\u9ad8\u3002\u672a\u6765\uff0c\u8010\u9ad8\u6e29\u7a7a\u6c14\u5faa\u73af\u8fc7\u6ee4\u5668\u5c06\u671d\u7740\u66f4\u9ad8\u8010\u6e29\u3001\u66f4\u9ad8\u6548\u7387\u3001\u66f4\u957f\u5bff\u547d\u548c\u66f4\u667a\u80fd\u5316\u65b9\u5411\u53d1\u5c55\u3002<\/p>\n<p>\u56fd\u5185\u5916\u5728\u8be5\u9886\u57df\u5747\u53d6\u5f97\u4e86\u663e\u8457\u8fdb\u5c55\uff0c\u4f46\u6211\u56fd\u5728\u6750\u6599\u6027\u80fd\u3001\u6807\u51c6\u8ba4\u8bc1\u548c\u9ad8\u7aef\u5e02\u573a\u5360\u6709\u7387\u65b9\u9762\u4ecd\u5b58\u5728\u4e00\u5b9a\u5dee\u8ddd\u3002\u901a\u8fc7\u52a0\u5f3a\u57fa\u7840\u6750\u6599\u7814\u7a76\u3001\u63a8\u52a8\u6280\u672f\u6807\u51c6\u4f53\u7cfb\u5efa\u8bbe\u548c\u63d0\u5347\u5236\u9020\u5de5\u827a\u6c34\u5e73\uff0c\u6709\u671b\u5728\u672a\u6765\u5b9e\u73b0\u6280\u672f\u7a81\u7834\uff0c\u63a8\u52a8\u56fd\u4ea7\u8fc7\u6ee4\u5668\u5728\u9ad8\u7aef\u534a\u5bfc\u4f53\u8bbe\u5907\u4e2d\u7684\u5e7f\u6cdb\u5e94\u7528\u3002<\/p>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>ISO 29463:2017, <em>High-efficiency air filters for general ventilation<\/em>  <\/li>\n<li>GB\/T 13554-2020, \u300a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b  <\/li>\n<li>IEST-RP-CC001.10, <em>HEPA and ULPA Filters<\/em>  <\/li>\n<li>DIN 24184:2013, <em>High-temperature air filters \u2013 Testing and classification<\/em>  <\/li>\n<li>\u4e1c\u4eac\u7535\u5b50\uff08Tokyo Electron\uff09\u6280\u672f\u767d\u76ae\u4e66, 2021  <\/li>\n<li>\u4e2d\u82af\u56fd\u9645\uff08SMIC\uff09\u5e74\u5ea6\u6280\u672f\u62a5\u544a, 2022  <\/li>\n<li>\u6e05\u534e\u5927\u5b66\u6750\u6599\u5b66\u9662, \u201c\u9ad8\u6e29\u9676\u74f7\u7ea4\u7ef4\u590d\u5408\u6750\u6599\u7814\u7a76\u8fdb\u5c55\u201d, \u300a\u6750\u6599\u79d1\u5b66\u8fdb\u5c55\u300b, 2020  <\/li>\n<li>\u4e2d\u79d1\u9662\u8fc7\u7a0b\u5de5\u7a0b\u7814\u7a76\u6240, \u201c\u591a\u5b54\u9676\u74f7\u819c\u5728\u9ad8\u6e29\u6c14\u4f53\u8fc7\u6ee4\u4e2d\u7684\u5e94\u7528\u201d, \u300a\u5316\u5de5\u8fdb\u5c55\u300b, 2021  <\/li>\n<li>Pall Corporation, <em>High-Temperature Filter Solutions for Semiconductor Processing<\/em>, 2022  <\/li>\n<li>3M Company, <em>Advanced High-Temperature Filtration Materials<\/em>, 2023  <\/li>\n<li>\u767e\u5ea6\u767e\u79d1, \u201c\u7a7a\u6c14\u8fc7\u6ee4\u5668\u201d\u8bcd\u6761, <a href=\"https:\/\/baike.baidu.com\/item\/\u7a7a\u6c14\u8fc7\u6ee4\u5668\">https:\/\/baike.baidu.com\/item\/\u7a7a\u6c14\u8fc7\u6ee4\u5668<\/a>  <\/li>\n<li>Fraunhofer Institute for Ceramic Filters, <em>High-Temperature Filtration Technologies<\/em>, 2021  <\/li>\n<li>\u82cf\u5dde\u534e\u745e\u51c0\u5316\u79d1\u6280\u6709\u9650\u516c\u53f8\u4ea7\u54c1\u624b\u518c, 2023  <\/li>\n<li>\u5e7f\u5dde\u6d01\u7279\u751f\u7269\u8fc7\u6ee4\u80a1\u4efd\u6709\u9650\u516c\u53f8\u5b98\u7f51, <a href=\"https:\/\/www.jetbiofil.com\">https:\/\/www.jetbiofil.com<\/a>  <\/li>\n<\/ol>\n<hr \/>\n<p><em>\u6ce8\uff1a\u672c\u6587\u5185\u5bb9\u57fa\u4e8e\u516c\u5f00\u6280\u672f\u8d44\u6599\u6574\u7406\uff0c\u4e0d\u4ee3\u8868\u4efb\u4f55\u5382\u5546\u7acb\u573a\u3002<\/em><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u8010\u9ad8\u6e29\u7a7a\u6c14\u5faa\u73af\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u70ed\u5904\u7406\u8bbe\u5907\u4e2d\u7684\u5e94\u7528\u5206\u6790 \u5f15\u8a00 \u5728\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u4e2d\uff0c\u70ed\u5904\u7406\u662f\u4e0d\u53ef\u6216\u7f3a\u7684\u5173\u952e\u5de5\u827a\u4e4b\u4e00\u3002\u70ed\u5904\u7406\u8bbe\u5907\u5728\u9ad8\u6e29\u73af\u5883\u4e0b\u8fd0\u884c\uff0c\u5bf9\u7a7a\u6c14\u7684\u6d01\u51c0\u5ea6\u3001\u6e29\u5ea6\u63a7\u5236\u7cbe\u5ea6\u4ee5\u53ca\u6c14\u4f53\u5faa\u73af\u6548\u7387\u63d0\u51fa\u4e86\u6781\u9ad8\u7684\u8981\u6c42\u3002\u4e3a\u4e86\u786e\u4fdd\u4ea7\u54c1\u8d28\u91cf\u548c\u8bbe\u5907\u7a33\u5b9a\u6027\uff0c\u8010\u9ad8\u6e29\u7a7a\u6c14\u5faa\u73af\u8fc7\u6ee4\u5668\uff08High-Temperature Air Circulation Filter\uff09\u88ab\u5e7f\u6cdb\u5e94\u7528\u4e8e\u534a\u5bfc\u4f53\u70ed\u5904\u7406\u8bbe\u5907&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-16279","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16279","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=16279"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/16279\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=16279"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=16279"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=16279"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}