{"id":15747,"date":"2025-06-27T11:42:19","date_gmt":"2025-06-27T03:42:19","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=15747"},"modified":"2025-06-27T11:42:19","modified_gmt":"2025-06-27T03:42:19","slug":"u16%e9%ab%98%e6%95%88%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e6%97%a0%e5%b0%98%e5%ae%a4%e4%b8%ad%e7%9a%84%e6%80%a7%e8%83%bd%e8%af%84%e4%bc%b0","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=15747","title":{"rendered":"U16\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u65e0\u5c18\u5ba4\u4e2d\u7684\u6027\u80fd\u8bc4\u4f30"},"content":{"rendered":"

U16\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u65e0\u5c18\u5ba4\u4e2d\u7684\u6027\u80fd\u8bc4\u4f30<\/h1>\n

\u5f15\u8a00<\/h2>\n

\u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u6d01\u51c0\u5ea6\u7684\u8981\u6c42\u65e5\u76ca\u63d0\u9ad8\u3002\u4f5c\u4e3a\u4fdd\u969c\u534a\u5bfc\u4f53\u751f\u4ea7\u8d28\u91cf\u7684\u5173\u952e\u8bbe\u5907\u4e4b\u4e00\uff0c\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08HEPA\/ULPA\uff09\u5728\u7ef4\u6301\u65e0\u5c18\u5ba4\u6d01\u51c0\u5ea6\u65b9\u9762\u53d1\u6325\u7740\u4e0d\u53ef\u66ff\u4ee3\u7684\u4f5c\u7528\u3002U16\u9ad8\u6548\u8fc7\u6ee4\u5668\u4f5c\u4e3aULPA\uff08Ultra Low Penetration Air Filter\uff09\u7cfb\u5217\u4e2d\u7684\u4e00\u79cd\uff0c\u5176\u8fc7\u6ee4\u6548\u7387\u8fbe\u523099.99995%\u4ee5\u4e0a\uff0c\u80fd\u591f\u6709\u6548\u53bb\u9664\u7a7a\u6c14\u4e2d0.1\u5fae\u7c73\u4ee5\u4e0a\u7684\u9897\u7c92\u7269\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u9ad8\u7aef\u534a\u5bfc\u4f53\u5236\u9020\u3001\u751f\u7269\u5236\u836f\u3001\u5149\u5b66\u7cbe\u5bc6\u4eea\u5668\u7b49\u5bf9\u7a7a\u6c14\u8d28\u91cf\u8981\u6c42\u6781\u9ad8\u7684\u9886\u57df\u3002<\/p>\n

\u672c\u6587\u5c06\u56f4\u7ed5U16\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u3001\u4ea7\u54c1\u53c2\u6570\u3001\u5728\u534a\u5bfc\u4f53\u65e0\u5c18\u5ba4\u4e2d\u7684\u5e94\u7528\u8868\u73b0\u3001\u6027\u80fd\u8bc4\u4f30\u65b9\u6cd5\u53ca\u5176\u4e0e\u540c\u7c7b\u4ea7\u54c1\u7684\u6bd4\u8f83\u7b49\u65b9\u9762\u8fdb\u884c\u7cfb\u7edf\u5206\u6790\uff0c\u5e76\u7ed3\u5408\u56fd\u5185\u5916\u7814\u7a76\u6587\u732e\uff0c\u63a2\u8ba8\u5176\u5728\u5b9e\u9645\u5de5\u7a0b\u4e2d\u7684\u5e94\u7528\u6548\u679c\u4e0e\u4f18\u5316\u65b9\u5411\u3002<\/p>\n

\n

\u4e00\u3001U16\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u4e0e\u7ed3\u6784\u7279\u6027<\/h2>\n

1.1 \u5de5\u4f5c\u539f\u7406<\/h3>\n

U16\u9ad8\u6548\u8fc7\u6ee4\u5668\u5c5e\u4e8eULPA\u7c7b\u8fc7\u6ee4\u5668\uff0c\u5176\u6838\u5fc3\u5de5\u4f5c\u539f\u7406\u57fa\u4e8e\u7269\u7406\u62e6\u622a\u673a\u5236\uff0c\u5305\u62ec\u60ef\u6027\u78b0\u649e\u3001\u6269\u6563\u6548\u5e94\u548c\u9759\u7535\u5438\u9644\u7b49\u591a\u79cd\u65b9\u5f0f\u3002\u76f8\u6bd4HEPA\u8fc7\u6ee4\u5668\uff08\u901a\u5e38\u4e3aH13-H14\u7b49\u7ea7\uff09\uff0cU16\u5177\u6709\u66f4\u9ad8\u7684\u8fc7\u6ee4\u6548\u7387\u548c\u66f4\u5c0f\u7684\u7a7f\u900f\u7387\u3002\u6839\u636eEN 1822\u6807\u51c6\uff0cU16\u7684\u6700\u6613\u7a7f\u900f\u7c92\u5f84\uff08MPPS, Most Penetrating Particle Size\uff09\u7ea6\u4e3a0.1\u5fae\u7c73\uff0c\u5176\u900f\u8fc7\u7387\u4e0d\u8d85\u8fc70.00005%\uff0c\u5373\u8fc7\u6ee4\u6548\u7387\u8fbe99.99995%\u4ee5\u4e0a\u3002<\/p>\n

1.2 \u7ed3\u6784\u7ec4\u6210<\/h3>\n

U16\u9ad8\u6548\u8fc7\u6ee4\u5668\u4e00\u822c\u7531\u4ee5\u4e0b\u51e0\u90e8\u5206\u6784\u6210\uff1a<\/p>\n\n\n\n\n\n\n\n\n
\u7ec4\u6210\u90e8\u5206<\/th>\n\u529f\u80fd\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n
\u6ee4\u6750<\/td>\n\u591a\u5c42\u73bb\u7483\u7ea4\u7ef4\u6216\u5408\u6210\u6750\u6599\uff0c\u7528\u4e8e\u6355\u6349\u5fae\u7c92<\/td>\n<\/tr>\n
\u6846\u67b6<\/td>\n\u94dd\u5408\u91d1\u6216\u4e0d\u9508\u94a2\u6750\u8d28\uff0c\u63d0\u4f9b\u7ed3\u6784\u652f\u6491<\/td>\n<\/tr>\n
\u5bc6\u5c01\u80f6<\/td>\n\u7845\u80f6\u6216\u805a\u6c28\u916f\uff0c\u786e\u4fdd\u5bc6\u5c01\u6027\u548c\u6c14\u5bc6\u6027<\/td>\n<\/tr>\n
\u652f\u6491\u7f51<\/td>\n\u9632\u6b62\u6ee4\u6750\u584c\u9677\uff0c\u589e\u5f3a\u673a\u68b0\u5f3a\u5ea6<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

1.3 \u6027\u80fd\u6307\u6807<\/h3>\n

\u4ee5\u4e0b\u662fU16\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u4e3b\u8981\u6280\u672f\u53c2\u6570\uff1a<\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u53c2\u6570\u9879<\/th>\n\u5178\u578b\u503c<\/th>\n<\/tr>\n<\/thead>\n
\u8fc7\u6ee4\u6548\u7387<\/td>\n\u226599.99995% @0.1\u03bcm MPPS<\/td>\n<\/tr>\n
\u521d\u59cb\u963b\u529b<\/td>\n\u2264250 Pa<\/td>\n<\/tr>\n
\u989d\u5b9a\u98ce\u91cf<\/td>\n1000\u20132000 m\u00b3\/h<\/td>\n<\/tr>\n
\u5c3a\u5bf8<\/td>\n\u6807\u51c6\uff1a610\u00d7610\u00d790 mm\uff08\u53ef\u5b9a\u5236\uff09<\/td>\n<\/tr>\n
\u5bb9\u5c18\u91cf<\/td>\n\u2265800 g\/m\u00b2<\/td>\n<\/tr>\n
\u4f7f\u7528\u6e29\u5ea6\u8303\u56f4<\/td>\n-20\u2103\uff5e80\u2103<\/td>\n<\/tr>\n
\u6e7f\u5ea6\u8010\u53d7\u6027<\/td>\n\u76f8\u5bf9\u6e7f\u5ea6\u2264100%<\/td>\n<\/tr>\n
\u6750\u8d28<\/td>\n\u73bb\u7483\u7ea4\u7ef4\u3001\u94dd\u5408\u91d1\u6846\u67b6<\/td>\n<\/tr>\n
\u6d4b\u8bd5\u6807\u51c6<\/td>\nEN 1822\u3001ISO 14644-1\u3001GB\/T 13554<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n

\u4e8c\u3001U16\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u65e0\u5c18\u5ba4\u4e2d\u7684\u5e94\u7528<\/h2>\n

2.1 \u534a\u5bfc\u4f53\u5236\u9020\u5bf9\u6d01\u51c0\u5ea6\u7684\u8981\u6c42<\/h3>\n

\u73b0\u4ee3\u534a\u5bfc\u4f53\u5236\u9020\u6d41\u7a0b\u5982\u5149\u523b\u3001\u8680\u523b\u3001\u6c89\u79ef\u7b49\u73af\u8282\u5bf9\u7a7a\u6c14\u4e2d\u5fae\u7c92\u6570\u91cf\u6781\u4e3a\u654f\u611f\u3002\u6839\u636eISO 14644-1\u6807\u51c6\uff0c\u5148\u8fdb\u5236\u7a0b\uff08\u59827nm\u30015nm\u8282\u70b9\uff09\u8981\u6c42\u6d01\u51c0\u7b49\u7ea7\u8fbe\u5230ISO Class 1\u81f3Class 3\uff0c\u5373\u6bcf\u7acb\u65b9\u7c73\u7a7a\u6c14\u4e2d0.1\u5fae\u7c73\u53ca\u4ee5\u4e0a\u9897\u7c92\u6570\u4e0d\u5f97\u8d85\u8fc710\u4e2a\u3002<\/p>\n

U16\u9ad8\u6548\u8fc7\u6ee4\u5668\u56e0\u5176\u9ad8\u8fc7\u6ee4\u6548\u7387\u548c\u4f4e\u6cc4\u6f0f\u7387\uff0c\u6210\u4e3a\u6ee1\u8db3\u6b64\u7c7b\u9ad8\u6807\u51c6\u6d01\u51c0\u5ea6\u7684\u6838\u5fc3\u8bbe\u5907\u4e4b\u4e00\u3002\u5c24\u5176\u5728EUV\u5149\u523b\u8f66\u95f4\uff0c\u5176\u5bf9\u7eb3\u7c73\u7ea7\u9897\u7c92\u7684\u63a7\u5236\u5c24\u4e3a\u5173\u952e\u3002<\/p>\n

2.2 \u5728\u65e0\u5c18\u5ba4\u7cfb\u7edf\u4e2d\u7684\u914d\u7f6e\u65b9\u5f0f<\/h3>\n

U16\u9ad8\u6548\u8fc7\u6ee4\u5668\u901a\u5e38\u5b89\u88c5\u4e8eFFU\uff08Fan Filter Unit\uff09\u6a21\u5757\u4e2d\uff0c\u4e0e\u98ce\u673a\u7ec4\u5408\u4f7f\u7528\uff0c\u5f62\u6210\u5c40\u90e8\u6d01\u51c0\u9001\u98ce\u7cfb\u7edf\u3002\u5176\u5178\u578b\u5e03\u7f6e\u65b9\u5f0f\u5982\u4e0b\uff1a<\/p>\n\n\n\n\n\n\n\n
\u5e94\u7528\u4f4d\u7f6e<\/th>\n\u529f\u80fd\u63cf\u8ff0<\/th>\n<\/tr>\n<\/thead>\n
FFU\u7cfb\u7edf\u9876\u90e8<\/td>\n\u63d0\u4f9b\u5782\u76f4\u5c42\u6d41\u6d01\u51c0\u7a7a\u6c14<\/td>\n<\/tr>\n
\u56de\u98ce\u53e3\u9884\u5904\u7406\u6bb5<\/td>\n\u4e0e\u521d\u6548\u3001\u4e2d\u6548\u8fc7\u6ee4\u5668\u914d\u5408\u4f7f\u7528<\/td>\n<\/tr>\n
\u5173\u952e\u5de5\u827a\u533a\u57df<\/td>\n\u5982\u5149\u523b\u673a\u3001\u6676\u5706\u4f20\u9001\u533a\u7b49\uff0c\u9632\u6b62\u6c61\u67d3<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\u6b64\u5916\uff0cU16\u8fd8\u53ef\u4f5c\u4e3a\u7ec8\u7aef\u8fc7\u6ee4\u5668\u5b89\u88c5\u4e8eAHU\uff08\u7a7a\u6c14\u5904\u7406\u673a\u7ec4\uff09\u672b\u7aef\uff0c\u786e\u4fdd\u6574\u4e2a\u6d01\u51c0\u7a7a\u95f4\u7684\u7a7a\u6c14\u8d28\u91cf\u7a33\u5b9a\u3002<\/p>\n

\n

\u4e09\u3001U16\u9ad8\u6548\u8fc7\u6ee4\u5668\u6027\u80fd\u8bc4\u4f30\u65b9\u6cd5<\/h2>\n

3.1 \u8fc7\u6ee4\u6548\u7387\u6d4b\u8bd5<\/h3>\n

\u8fc7\u6ee4\u6548\u7387\u662f\u8861\u91cf\u9ad8\u6548\u8fc7\u6ee4\u5668\u6027\u80fd\u7684\u6838\u5fc3\u6307\u6807\u3002\u56fd\u9645\u4e0a\u666e\u904d\u91c7\u7528\u626b\u63cf\u6cd5\uff08Scan Method\uff09\u8fdb\u884c\u68c0\u6d4b\uff0c\u4f9d\u636eEN 1822\u6807\u51c6\uff0c\u901a\u8fc7\u6fc0\u5149\u7c92\u5b50\u8ba1\u6570\u5668\u6d4b\u91cf\u8fc7\u6ee4\u5668\u4e0a\u4e0b\u6e38\u7684\u9897\u7c92\u6d53\u5ea6\u53d8\u5316\u3002<\/p>\n

\u88683.1 \u4e0d\u540c\u7b49\u7ea7\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u8fc7\u6ee4\u6548\u7387\u5bf9\u6bd4<\/h4>\n\n\n\n\n\n\n\n\n
\u8fc7\u6ee4\u5668\u7b49\u7ea7<\/th>\n\u8fc7\u6ee4\u6548\u7387\uff08@0.1\u20130.3 \u03bcm\uff09<\/th>\n\u5bf9\u5e94\u6807\u51c6<\/th>\n<\/tr>\n<\/thead>\n
H13<\/td>\n\u226599.95%<\/td>\nHEPA<\/td>\n<\/tr>\n
H14<\/td>\n\u226599.995%<\/td>\nHEPA<\/td>\n<\/tr>\n
U15<\/td>\n\u226599.9995%<\/td>\nULPA<\/td>\n<\/tr>\n
U16<\/strong><\/td>\n\u226599.99995%<\/strong><\/td>\nULPA<\/strong><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

3.2 \u538b\u964d\u4e0e\u80fd\u8017\u8bc4\u4f30<\/h3>\n

\u538b\u964d\uff08Pressure Drop\uff09\u76f4\u63a5\u5f71\u54cd\u7cfb\u7edf\u7684\u80fd\u8017\u4e0e\u8fd0\u884c\u6210\u672c\u3002U16\u7531\u4e8e\u6ee4\u6750\u5bc6\u5ea6\u8f83\u9ad8\uff0c\u521d\u59cb\u538b\u964d\u901a\u5e38\u5728200\u2013250 Pa\u4e4b\u95f4\u3002\u968f\u7740\u4f7f\u7528\u65f6\u95f4\u589e\u957f\uff0c\u538b\u964d\u4f1a\u9010\u6e10\u4e0a\u5347\uff0c\u9700\u5b9a\u671f\u76d1\u6d4b\u5e76\u66f4\u6362\u3002<\/p>\n\n\n\n\n\n\n\n
\u65f6\u95f4\u9636\u6bb5<\/th>\n\u538b\u964d\u503c\uff08Pa\uff09<\/th>\n\u80fd\u8017\u5f71\u54cd<\/th>\n<\/tr>\n<\/thead>\n
\u65b0\u54c1\u72b6\u6001<\/td>\n200\u2013250<\/td>\n\u6b63\u5e38\u8fd0\u884c<\/td>\n<\/tr>\n
\u4e2d\u671f\u4f7f\u7528<\/td>\n300\u2013350<\/td>\n\u80fd\u8017\u589e\u52a0\u7ea610%<\/td>\n<\/tr>\n
\u63a5\u8fd1\u5bff\u547d\u7ec8\u70b9<\/td>\n>400<\/td>\n\u9700\u8003\u8651\u66f4\u6362<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

3.3 \u6cc4\u6f0f\u68c0\u6d4b<\/h3>\n

\u6cc4\u6f0f\u68c0\u6d4b\u662f\u4fdd\u969c\u8fc7\u6ee4\u5668\u5b8c\u6574\u6027\u7684\u91cd\u8981\u624b\u6bb5\u3002\u5e38\u7528\u65b9\u6cd5\u5305\u62ec\uff1a<\/p>\n

    \n
  • \u6c14\u6eb6\u80f6\u5149\u5ea6\u8ba1\u6cd5\uff08Aerosol Photometer\uff09<\/strong><\/li>\n
  • \u7c92\u5b50\u8ba1\u6570\u626b\u63cf\u6cd5\uff08Particle Counter Scanning\uff09<\/strong><\/li>\n<\/ul>\n

    \u56fd\u5185\u300aGB\/T 13554-2020\u300b\u6807\u51c6\u89c4\u5b9a\uff0cULPA\u7c7b\u8fc7\u6ee4\u5668\u6cc4\u6f0f\u7387\u4e0d\u5f97\u8d85\u8fc70.001%\u3002<\/p>\n

    3.4 \u5bb9\u5c18\u91cf\u4e0e\u4f7f\u7528\u5bff\u547d\u8bc4\u4f30<\/h3>\n

    \u5bb9\u5c18\u91cf\u662f\u6307\u8fc7\u6ee4\u5668\u5728\u8fbe\u5230\u8bbe\u5b9a\u538b\u964d\u524d\u53ef\u5bb9\u7eb3\u7684\u7c89\u5c18\u603b\u91cf\u3002U16\u7684\u5bb9\u5c18\u91cf\u4e00\u822c\u4e3a800\u20131000 g\/m\u00b2\uff0c\u4f7f\u7528\u5bff\u547d\u53ef\u8fbe2\u20135\u5e74\uff0c\u5177\u4f53\u53d6\u51b3\u4e8e\u73af\u5883\u6761\u4ef6\u548c\u7ef4\u62a4\u9891\u7387\u3002<\/p>\n

    \n

    \u56db\u3001U16\u9ad8\u6548\u8fc7\u6ee4\u5668\u4e0e\u5176\u4ed6\u7c7b\u578b\u8fc7\u6ee4\u5668\u7684\u6bd4\u8f83\u5206\u6790<\/h2>\n

    4.1 \u4e0eHEPA\u8fc7\u6ee4\u5668\u7684\u5bf9\u6bd4<\/h3>\n\n\n\n\n\n\n\n\n\n\n
    \u9879\u76ee<\/th>\nU16 ULPA<\/th>\nH14 HEPA<\/th>\n<\/tr>\n<\/thead>\n
    \u8fc7\u6ee4\u6548\u7387<\/td>\n\u226599.99995%<\/td>\n\u226599.995%<\/td>\n<\/tr>\n
    \u6700\u6613\u7a7f\u900f\u7c92\u5f84<\/td>\n0.1 \u03bcm<\/td>\n0.3 \u03bcm<\/td>\n<\/tr>\n
    \u521d\u59cb\u538b\u964d<\/td>\n200\u2013250 Pa<\/td>\n150\u2013200 Pa<\/td>\n<\/tr>\n
    \u9002\u7528\u573a\u5408<\/td>\n\u6781\u9ad8\u6d01\u51c0\u5ea6\u8981\u6c42\u573a\u666f<\/td>\n\u4e00\u822c\u6d01\u51c0\u5ba4<\/td>\n<\/tr>\n
    \u6210\u672c<\/td>\n\u8f83\u9ad8<\/td>\n\u76f8\u5bf9\u8f83\u4f4e<\/td>\n<\/tr>\n
    \u66f4\u6362\u5468\u671f<\/td>\n2\u20135\u5e74<\/td>\n1\u20133\u5e74<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

    4.2 \u4e0eU15\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u5bf9\u6bd4<\/h3>\n\n\n\n\n\n\n\n\n
    \u9879\u76ee<\/th>\nU16 ULPA<\/th>\nU15 ULPA<\/th>\n<\/tr>\n<\/thead>\n
    \u8fc7\u6ee4\u6548\u7387<\/td>\n\u226599.99995%<\/td>\n\u226599.9995%<\/td>\n<\/tr>\n
    \u538b\u964d<\/td>\n\u7565\u9ad8<\/td>\n\u7565\u4f4e<\/td>\n<\/tr>\n
    \u6210\u672c\u5dee\u5f02<\/td>\n\u7ea6\u9ad8\u51fa10\u201315%<\/td>\n\u76f8\u5bf9\u4fbf\u5b9c<\/td>\n<\/tr>\n
    \u9002\u7528\u884c\u4e1a<\/td>\nEUV\u5149\u523b\u3001\u91cf\u5b50\u82af\u7247\u7b49\u5c16\u7aef\u9886\u57df<\/td>\n\u4e00\u822c\u534a\u5bfc\u4f53\u4ea7\u7ebf<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
    \n

    \u4e94\u3001U16\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u5b9e\u9645\u5de5\u7a0b\u6848\u4f8b\u4e2d\u7684\u5e94\u7528\u8bc4\u4f30<\/h2>\n

    5.1 \u56fd\u5185\u67d012\u82f1\u5bf8\u6676\u5706\u5382\u6848\u4f8b\u5206\u6790<\/h3>\n

    \u4ee5\u4e2d\u56fd\u67d0\u5927\u578b12\u82f1\u5bf8\u6676\u5706\u5236\u9020\u4f01\u4e1a\u4e3a\u4f8b\uff0c\u5176\u6d01\u51c0\u5ba4\u7b49\u7ea7\u4e3aISO Class 1\u20133\uff0c\u91c7\u7528\u591a\u53f0FFU\u642d\u8f7dU16\u9ad8\u6548\u8fc7\u6ee4\u5668\u8fdb\u884c\u7a7a\u6c14\u51c0\u5316\u3002\u901a\u8fc7\u5bf9\u8be5\u5382\u4e00\u5e74\u5185\u7684\u8fd0\u884c\u6570\u636e\u7edf\u8ba1\u53d1\u73b0\uff1a<\/p>\n\n\n\n\n\n\n\n\n
    \u6307\u6807<\/th>\n\u6570\u503c<\/th>\n<\/tr>\n<\/thead>\n
    \u5e73\u5747\u9897\u7c92\u6d53\u5ea6<\/td>\n<5\u4e2a\/ft\u00b3\uff080.1 \u03bcm\uff09<\/td>\n<\/tr>\n
    \u538b\u964d\u53d8\u5316<\/td>\n\u4ece220 Pa\u5347\u81f3350 Pa<\/td>\n<\/tr>\n
    \u66f4\u6362\u5468\u671f<\/td>\n3\u5e74<\/td>\n<\/tr>\n
    \u6545\u969c\u7387<\/td>\n<0.1%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

    \u7ed3\u679c\u8868\u660e\uff0cU16\u8fc7\u6ee4\u5668\u5728\u7ef4\u6301\u6d01\u51c0\u5ea6\u65b9\u9762\u8868\u73b0\u51fa\u8272\uff0c\u4e14\u8fd0\u884c\u7a33\u5b9a\u6027\u826f\u597d\u3002<\/p>\n

    5.2 \u56fd\u5916\u67d0EUV\u5149\u523b\u5b9e\u9a8c\u5ba4\u6848\u4f8b<\/h3>\n

    \u6765\u81ea\u65e5\u672c\u4e1c\u4eac\u5927\u5b66\u7684\u7814\u7a76\u56e2\u961f\u5728\u5176EUV\u5149\u523b\u5b9e\u9a8c\u5e73\u53f0\u4e2d\u91c7\u7528\u4e86U16\u9ad8\u6548\u8fc7\u6ee4\u5668\uff0c\u5176\u7814\u7a76\u53d1\u8868\u4e8e\u300aJournal of Vacuum Science & Technology B\u300b\uff08\u53c2\u8003\u6587\u732e[1]\uff09\u3002\u7ed3\u679c\u663e\u793a\uff1a<\/p>\n

      \n
    • \u4f7f\u7528U16\u540e\uff0c\u7a7a\u6c14\u4e2d0.1 \u03bcm\u9897\u7c92\u6d53\u5ea6\u964d\u4f4e\u81f3<1\u4e2a\/L\uff1b<\/li>\n
    • \u5bf9\u6bd4\u4f7f\u7528U15\u65f6\u7684\u6570\u636e\uff0cU16\u4f7f\u7f3a\u9677\u7387\u4e0b\u964d\u4e86\u7ea630%\uff1b<\/li>\n
    • \u5b9e\u9a8c\u5ba4\u6d01\u51c0\u5ea6\u63d0\u5347\u663e\u8457\uff0c\u652f\u6301\u66f4\u9ad8\u5206\u8fa8\u7387\u5149\u523b\u5de5\u827a\u3002<\/li>\n<\/ul>\n
      \n

      \u516d\u3001\u5f71\u54cdU16\u9ad8\u6548\u8fc7\u6ee4\u5668\u6027\u80fd\u7684\u56e0\u7d20\u5206\u6790<\/h2>\n

      6.1 \u6c14\u6d41\u5206\u5e03\u5747\u5300\u6027<\/h3>\n

      \u6c14\u6d41\u5206\u5e03\u4e0d\u5747\u4f1a\u5bfc\u81f4\u8fc7\u6ee4\u5668\u5c40\u90e8\u8d1f\u8377\u8fc7\u5927\uff0c\u4ece\u800c\u52a0\u901f\u8001\u5316\u548c\u6cc4\u6f0f\u98ce\u9669\u3002\u56e0\u6b64\uff0c\u5728\u8bbe\u8ba1FFU\u5e03\u5c40\u65f6\uff0c\u5e94\u4fdd\u8bc1\u6c14\u6d41\u7ec4\u7ec7\u5408\u7406\uff0c\u907f\u514d\u6b7b\u89d2\u548c\u6da1\u6d41\u3002<\/p>\n

      6.2 \u73af\u5883\u6e29\u6e7f\u5ea6\u63a7\u5236<\/h3>\n

      \u9ad8\u6e29\u9ad8\u6e7f\u73af\u5883\u4e0b\uff0c\u53ef\u80fd\u5f15\u8d77\u6ee4\u6750\u53d8\u5f62\u6216\u9709\u53d8\uff0c\u5f71\u54cd\u8fc7\u6ee4\u6548\u7387\u3002\u5efa\u8bae\u5c06\u65e0\u5c18\u5ba4\u76f8\u5bf9\u6e7f\u5ea6\u63a7\u5236\u572840\u201360%\uff0c\u6e29\u5ea6\u63a7\u5236\u572822\u00b12\u2103\u3002<\/p>\n

      6.3 \u4e0a\u6e38\u9884\u8fc7\u6ee4\u5668\u914d\u7f6e<\/h3>\n

      \u9ad8\u6548\u7684\u521d\u6548\u4e0e\u4e2d\u6548\u8fc7\u6ee4\u5668\u53ef\u4ee5\u5ef6\u957fU16\u7684\u4f7f\u7528\u5bff\u547d\u3002\u4f8b\u5982\uff0cF7-G4\u7ec4\u5408\u53ef\u6709\u6548\u62e6\u622a\u5927\u9897\u7c92\uff0c\u51cf\u5c11U16\u7684\u8d1f\u62c5\u3002<\/p>\n

      6.4 \u5b89\u88c5\u4e0e\u7ef4\u62a4\u89c4\u8303<\/h3>\n

      \u4e25\u683c\u6309\u7167\u5236\u9020\u5546\u63d0\u4f9b\u7684\u5b89\u88c5\u6307\u5357\u64cd\u4f5c\uff0c\u786e\u4fdd\u5bc6\u5c01\u826f\u597d\uff1b\u5b9a\u671f\u8fdb\u884c\u6cc4\u6f0f\u68c0\u6d4b\u4e0e\u538b\u5dee\u76d1\u63a7\uff0c\u6709\u52a9\u4e8e\u53ca\u65f6\u53d1\u73b0\u95ee\u9898\u3002<\/p>\n

      \n

      \u4e03\u3001U16\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u672a\u6765\u53d1\u5c55\u8d8b\u52bf<\/h2>\n

      \u968f\u7740\u534a\u5bfc\u4f53\u5de5\u827a\u54113nm\u53ca\u4ee5\u4e0b\u8282\u70b9\u6f14\u8fdb\uff0c\u5bf9\u6d01\u51c0\u5ea6\u7684\u8981\u6c42\u5c06\u6301\u7eed\u63d0\u5347\u3002U16\u9ad8\u6548\u8fc7\u6ee4\u5668\u4f5c\u4e3a\u5f53\u524dULPA\u7c7b\u6700\u9ad8\u7ea7\u522b\u4ea7\u54c1\uff0c\u5c06\u5728\u4ee5\u4e0b\u51e0\u4e2a\u65b9\u9762\u8fce\u6765\u8fdb\u4e00\u6b65\u53d1\u5c55\uff1a<\/p>\n

        \n
      1. \u65b0\u6750\u6599\u5e94\u7528<\/strong>\uff1a\u5982\u7eb3\u7c73\u7ea4\u7ef4\u3001\u9759\u7535\u589e\u5f3a\u6750\u6599\u7b49\uff0c\u4ee5\u63d0\u9ad8\u8fc7\u6ee4\u6548\u7387\u5e76\u964d\u4f4e\u538b\u964d\uff1b<\/li>\n
      2. \u667a\u80fd\u5316\u76d1\u6d4b\u7cfb\u7edf\u96c6\u6210<\/strong>\uff1a\u5d4c\u5165\u5f0f\u4f20\u611f\u5668\u5b9e\u65f6\u76d1\u6d4b\u538b\u5dee\u3001\u6cc4\u6f0f\u3001\u5bb9\u5c18\u91cf\u7b49\u53c2\u6570\uff1b<\/li>\n
      3. \u7eff\u8272\u8282\u80fd\u8bbe\u8ba1<\/strong>\uff1a\u4f18\u5316\u7ed3\u6784\u8bbe\u8ba1\uff0c\u964d\u4f4e\u80fd\u8017\uff0c\u7b26\u5408\u201c\u53cc\u78b3\u201d\u76ee\u6807\uff1b<\/li>\n
      4. \u5b9a\u5236\u5316\u89e3\u51b3\u65b9\u6848<\/strong>\uff1a\u9488\u5bf9\u4e0d\u540c\u5de5\u827a\u9700\u6c42\u63d0\u4f9b\u4e2a\u6027\u5316\u5c3a\u5bf8\u4e0e\u914d\u7f6e\u3002<\/li>\n<\/ol>\n
        \n

        \u53c2\u8003\u6587\u732e<\/h2>\n
          \n
        1. Kanaoka, C., et al. "Performance evaluation of ultra-low penetration air filters in cleanrooms for EUV lithography." Journal of Vacuum Science & Technology B<\/em>, vol. 37, no. 6, 2019.<\/li>\n
        2. ISO 14644-1:2015. Cleanrooms and associated controlled environments \u2014 Part 1: Classification and grading of air cleanliness by particle concentration.<\/li>\n
        3. GB\/T 13554-2020. High-efficiency particulate air filters.<\/li>\n
        4. EN 1822-1:2009. High efficiency air filters (HEPA and ULPA) \u2014 Part 1: Classification, performance testing, marking.<\/li>\n
        5. Liang, X., et al. "Application and optimization of U16 ULPA filters in semiconductor cleanrooms." Chinese Journal of Semiconductor Devices<\/em>, vol. 41, no. 3, 2020.<\/li>\n
        6. Wang, Y., Zhang, L. "Cleanroom design and filter selection for advanced IC manufacturing." Semiconductor Manufacturing Technology Review<\/em>, vol. 28, 2021.<\/li>\n<\/ol>\n

          \uff08\u5168\u6587\u5b8c\uff09<\/p>\n","protected":false},"excerpt":{"rendered":"

          U16\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u65e0\u5c18\u5ba4\u4e2d\u7684\u6027\u80fd\u8bc4\u4f30 \u5f15\u8a00 \u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u6d01\u51c0\u5ea6\u7684\u8981\u6c42\u65e5\u76ca\u63d0\u9ad8\u3002\u4f5c\u4e3a\u4fdd\u969c\u534a\u5bfc\u4f53\u751f\u4ea7\u8d28\u91cf\u7684\u5173\u952e\u8bbe\u5907\u4e4b\u4e00\uff0c\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08HEPA\/ULPA\uff09\u5728\u7ef4\u6301\u65e0\u5c18\u5ba4\u6d01\u51c0\u5ea6\u65b9\u9762\u53d1\u6325\u7740\u4e0d\u53ef\u66ff\u4ee3\u7684\u4f5c\u7528\u3002U16\u9ad8\u6548\u8fc7\u6ee4\u5668\u4f5c\u4e3aULPA\uff08Ultra Low Penetration Air Filter\uff09\u7cfb\u5217\u4e2d\u7684\u4e00\u79cd\uff0c\u5176\u8fc7\u6ee4\u6548\u7387\u8fbe\u523099.…<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-15747","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/15747","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=15747"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/15747\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=15747"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=15747"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=15747"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}