{"id":15714,"date":"2025-06-27T10:46:09","date_gmt":"2025-06-27T02:46:09","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=15714"},"modified":"2025-06-27T10:46:09","modified_gmt":"2025-06-27T02:46:09","slug":"ulpa%e8%bf%87%e6%bb%a4%e5%99%a8%e5%af%b9%e5%8d%8a%e5%af%bc%e4%bd%93%e5%88%b6%e9%80%a0%e7%8e%af%e5%a2%83%e5%be%ae%e7%b2%92%e5%8e%bb%e9%99%a4%e6%95%88%e7%8e%87%e7%9a%84%e7%a0%94%e7%a9%b6","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=15714","title":{"rendered":"ULPA\u8fc7\u6ee4\u5668\u5bf9\u534a\u5bfc\u4f53\u5236\u9020\u73af\u5883\u5fae\u7c92\u53bb\u9664\u6548\u7387\u7684\u7814\u7a76"},"content":{"rendered":"<h1>ULPA\u8fc7\u6ee4\u5668\u5bf9\u534a\u5bfc\u4f53\u5236\u9020\u73af\u5883\u5fae\u7c92\u53bb\u9664\u6548\u7387\u7684\u7814\u7a76<\/h1>\n<h2>\u5f15\u8a00<\/h2>\n<p>\u5728\u73b0\u4ee3\u9ad8\u79d1\u6280\u5236\u9020\u4e1a\u4e2d\uff0c\u5c24\u5176\u662f\u534a\u5bfc\u4f53\u5236\u9020\u9886\u57df\uff0c\u6d01\u51c0\u5ba4\u73af\u5883\u7684\u7a7a\u6c14\u8d28\u91cf\u76f4\u63a5\u5173\u7cfb\u5230\u4ea7\u54c1\u7684\u826f\u7387\u4e0e\u6027\u80fd\u3002ULPA\uff08Ultra Low Particulate Air\uff09\u8fc7\u6ee4\u5668\u4f5c\u4e3a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf\u7684\u6838\u5fc3\u7ec4\u4ef6\u4e4b\u4e00\uff0c\u5728\u63a7\u5236\u7a7a\u6c14\u4e2d\u5fae\u5c0f\u9897\u7c92\u7269\u65b9\u9762\u53d1\u6325\u7740\u4e0d\u53ef\u66ff\u4ee3\u7684\u4f5c\u7528\u3002\u968f\u7740\u96c6\u6210\u7535\u8def\u5de5\u827a\u8282\u70b9\u4e0d\u65ad\u7f29\u5c0f\u81f3\u7eb3\u7c73\u7ea7\u522b\uff0c\u7a7a\u6c14\u4e2d\u76f4\u5f84\u5c0f\u4e8e0.1\u5fae\u7c73\u7684\u9897\u7c92\u5df2\u6210\u4e3a\u5f71\u54cd\u82af\u7247\u8d28\u91cf\u7684\u5173\u952e\u56e0\u7d20\u3002\u56e0\u6b64\uff0c\u6df1\u5165\u7814\u7a76ULPA\u8fc7\u6ee4\u5668\u5728\u4e0d\u540c\u5de5\u51b5\u4e0b\u7684\u5fae\u7c92\u53bb\u9664\u6548\u7387\uff0c\u5bf9\u4e8e\u63d0\u5347\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u4e2d\u7684\u6d01\u51c0\u5ea6\u6c34\u5e73\u5177\u6709\u91cd\u8981\u610f\u4e49\u3002<\/p>\n<p>\u672c\u6587\u5c06\u56f4\u7ed5ULPA\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u3001\u4ea7\u54c1\u53c2\u6570\u3001\u5728\u534a\u5bfc\u4f53\u5236\u9020\u73af\u5883\u4e2d\u7684\u5e94\u7528\u73b0\u72b6\u3001\u53bb\u9664\u6548\u7387\u7684\u8bc4\u4f30\u65b9\u6cd5\u4ee5\u53ca\u56fd\u5185\u5916\u76f8\u5173\u7814\u7a76\u6210\u679c\u8fdb\u884c\u7cfb\u7edf\u6027\u5206\u6790\uff0c\u5e76\u901a\u8fc7\u8868\u683c\u5f62\u5f0f\u5448\u73b0\u5173\u952e\u6570\u636e\uff0c\u4ee5\u671f\u4e3a\u884c\u4e1a\u6280\u672f\u4eba\u5458\u63d0\u4f9b\u53c2\u8003\u4f9d\u636e\u3002<\/p>\n<hr \/>\n<h2>\u4e00\u3001ULPA\u8fc7\u6ee4\u5668\u6982\u8ff0<\/h2>\n<h3>1.1 \u5b9a\u4e49\u4e0e\u5206\u7c7b<\/h3>\n<p>ULPA\u8fc7\u6ee4\u5668\u662f\u4e00\u79cd\u7528\u4e8e\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u7684\u8bbe\u5907\uff0c\u5176\u82f1\u6587\u5168\u79f0\u4e3a\u201cUltra Low Particulate Air Filter\u201d\uff0c\u5373\u8d85\u4f4e\u7a7f\u900f\u7a7a\u6c14\u8fc7\u6ee4\u5668\u3002\u5b83\u4e3b\u8981\u7528\u4e8e\u53bb\u9664\u7a7a\u6c14\u4e2d\u6781\u7ec6\u5c0f\u7684\u9897\u7c92\u6c61\u67d3\u7269\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u7535\u5b50\u3001\u533b\u836f\u3001\u751f\u7269\u5b9e\u9a8c\u5ba4\u7b49\u9ad8\u6d01\u51c0\u5ea6\u8981\u6c42\u7684\u73af\u5883\u4e2d\u3002<\/p>\n<p>\u6839\u636e\u56fd\u9645\u6807\u51c6ISO 45001\u548c\u7f8e\u56fd\u6807\u51c6IEST-RP-CC001\uff0cULPA\u8fc7\u6ee4\u5668\u4e0eHEPA\uff08High Efficiency Particulate Air\uff09\u8fc7\u6ee4\u5668\u7684\u4e3b\u8981\u533a\u522b\u5728\u4e8e\u8fc7\u6ee4\u6548\u7387\u7b49\u7ea7\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u7c7b\u578b<\/th>\n<th>\u8fc7\u6ee4\u6548\u7387\uff08\u22650.3 \u03bcm\uff09<\/th>\n<th>\u7a7f\u900f\u7387<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>HEPA<\/td>\n<td>\u226599.97%<\/td>\n<td>\u22640.03%<\/td>\n<\/tr>\n<tr>\n<td>ULPA<\/td>\n<td>\u226599.999%<\/td>\n<td>\u22640.001%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u53ef\u4ee5\u770b\u51fa\uff0cULPA\u8fc7\u6ee4\u5668\u5728\u53bb\u96640.3\u5fae\u7c73\u53ca\u4ee5\u4e0a\u9897\u7c92\u65f6\uff0c\u5176\u6548\u7387\u8fdc\u9ad8\u4e8eHEPA\u8fc7\u6ee4\u5668\uff0c\u5c24\u5176\u9002\u7528\u4e8e\u5bf9\u7eb3\u7c73\u7ea7\u9897\u7c92\u6709\u4e25\u683c\u8981\u6c42\u7684\u534a\u5bfc\u4f53\u5236\u9020\u73af\u5883\u3002<\/p>\n<h3>1.2 \u5de5\u4f5c\u539f\u7406<\/h3>\n<p>ULPA\u8fc7\u6ee4\u5668\u901a\u5e38\u7531\u591a\u5c42\u73bb\u7483\u7ea4\u7ef4\u6216\u5408\u6210\u6750\u6599\u6784\u6210\uff0c\u91c7\u7528\u6df1\u5c42\u8fc7\u6ee4\u673a\u5236\u3002\u5176\u4e3b\u8981\u5de5\u4f5c\u539f\u7406\u5305\u62ec\u4ee5\u4e0b\u51e0\u79cd\uff1a<\/p>\n<ul>\n<li><strong>\u62e6\u622a\u6548\u5e94\uff08Interception\uff09<\/strong>\uff1a\u5f53\u9897\u7c92\u63a5\u8fd1\u7ea4\u7ef4\u8868\u9762\u65f6\uff0c\u56e0\u8303\u5fb7\u534e\u529b\u88ab\u5438\u9644\u3002<\/li>\n<li><strong>\u60ef\u6027\u649e\u51fb\uff08Impaction\uff09<\/strong>\uff1a\u5927\u9897\u7c92\u7531\u4e8e\u60ef\u6027\u4f5c\u7528\u504f\u79bb\u6c14\u6d41\u65b9\u5411\u800c\u649e\u51fb\u7ea4\u7ef4\u88ab\u6355\u83b7\u3002<\/li>\n<li><strong>\u6269\u6563\u6548\u5e94\uff08Diffusion\uff09<\/strong>\uff1a\u5c0f\u9897\u7c92\u53d7\u5e03\u6717\u8fd0\u52a8\u5f71\u54cd\uff0c\u968f\u673a\u79fb\u52a8\u5e76\u4e0e\u7ea4\u7ef4\u63a5\u89e6\u88ab\u6355\u96c6\u3002<\/li>\n<\/ul>\n<p>\u8fd9\u4e9b\u673a\u5236\u5171\u540c\u4f5c\u7528\uff0c\u4f7f\u5f97ULPA\u8fc7\u6ee4\u5668\u80fd\u591f\u5728\u4f4e\u98ce\u963b\u6761\u4ef6\u4e0b\u5b9e\u73b0\u9ad8\u6548\u7684\u5fae\u7c92\u6355\u96c6\u3002<\/p>\n<hr \/>\n<h2>\u4e8c\u3001ULPA\u8fc7\u6ee4\u5668\u7684\u4ea7\u54c1\u53c2\u6570\u4e0e\u9009\u578b\u6807\u51c6<\/h2>\n<p>\u5728\u9009\u62e9ULPA\u8fc7\u6ee4\u5668\u65f6\uff0c\u9700\u7efc\u5408\u8003\u8651\u5176\u7269\u7406\u7ed3\u6784\u3001\u6750\u6599\u7279\u6027\u3001\u8fc7\u6ee4\u6548\u7387\u3001\u98ce\u91cf\u5339\u914d\u7b49\u56e0\u7d20\u3002\u4ee5\u4e0b\u662f\u5e38\u89c1\u7684ULPA\u8fc7\u6ee4\u5668\u6280\u672f\u53c2\u6570\u8868\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570\u540d\u79f0<\/th>\n<th>\u5178\u578b\u503c\u8303\u56f4<\/th>\n<th>\u5355\u4f4d<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u521d\u59cb\u963b\u529b<\/td>\n<td>250 ~ 450<\/td>\n<td>Pa<\/td>\n<\/tr>\n<tr>\n<td>\u989d\u5b9a\u98ce\u91cf<\/td>\n<td>1000 ~ 3000<\/td>\n<td>m\u00b3\/h<\/td>\n<\/tr>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387\uff08\u22650.12 \u03bcm\uff09<\/td>\n<td>\u226599.999%<\/td>\n<td>\u2014<\/td>\n<\/tr>\n<tr>\n<td>\u5c3a\u5bf8\u89c4\u683c<\/td>\n<td>610\u00d7610\u00d790, 1220\u00d7610\u00d790\u7b49<\/td>\n<td>mm<\/td>\n<\/tr>\n<tr>\n<td>\u6750\u8d28<\/td>\n<td>\u73bb\u7483\u7ea4\u7ef4\u3001\u805a\u4e19\u70ef\u590d\u5408\u6750\u6599<\/td>\n<td>\u2014<\/td>\n<\/tr>\n<tr>\n<td>\u4f7f\u7528\u6e29\u5ea6\u8303\u56f4<\/td>\n<td>-30\u2103 ~ +80\u2103<\/td>\n<td>\u2103<\/td>\n<\/tr>\n<tr>\n<td>\u6700\u5927\u6e7f\u5ea6\u8010\u53d7<\/td>\n<td>\u226495% RH<\/td>\n<td>%RH<\/td>\n<\/tr>\n<tr>\n<td>\u5bff\u547d<\/td>\n<td>3 ~ 5\u5e74\uff08\u89c6\u8fd0\u884c\u6761\u4ef6\u800c\u5b9a\uff09<\/td>\n<td>\u5e74<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6b64\u5916\uff0cULPA\u8fc7\u6ee4\u5668\u8fd8\u5e94\u6ee1\u8db3\u5982\u4e0b\u6807\u51c6\uff1a<\/p>\n<ul>\n<li><strong>IEC 61581<\/strong>\uff08\u7535\u6c14\u5b89\u5168\uff09<\/li>\n<li><strong>EN 1822<\/strong>\uff08\u6b27\u6d32\u9ad8\u6548\u8fc7\u6ee4\u5668\u6d4b\u8bd5\u6807\u51c6\uff09<\/li>\n<li><strong>JIS B 9927<\/strong>\uff08\u65e5\u672c\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u6d4b\u8bd5\u65b9\u6cd5\uff09<\/li>\n<\/ul>\n<hr \/>\n<h2>\u4e09\u3001ULPA\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u73af\u5883\u4e2d\u7684\u5e94\u7528<\/h2>\n<h3>3.1 \u534a\u5bfc\u4f53\u5236\u9020\u5bf9\u6d01\u51c0\u5ea6\u7684\u8981\u6c42<\/h3>\n<p>\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u4e2d\uff0c\u5c24\u5176\u662f\u5728\u5149\u523b\u3001\u8680\u523b\u3001\u6c89\u79ef\u7b49\u5173\u952e\u5de5\u827a\u73af\u8282\uff0c\u7a7a\u6c14\u4e2d\u60ac\u6d6e\u9897\u7c92\u7684\u6d53\u5ea6\u5fc5\u987b\u63a7\u5236\u5728\u6781\u4f4e\u6c34\u5e73\u3002\u6839\u636eSEMATECH\uff08\u56fd\u9645\u534a\u5bfc\u4f53\u5236\u9020\u6280\u672f\u6218\u7565\u8054\u76df\uff09\u7684\u6807\u51c6\uff0c\u5148\u8fdb\u5236\u7a0b\uff08\u59827nm\u53ca\u4ee5\u4e0b\uff09\u6240\u9700\u7684\u6d01\u51c0\u7b49\u7ea7\u901a\u5e38\u4e3aISO Class 1~3\uff08\u5bf9\u5e94\u6bcf\u7acb\u65b9\u7c73\u7a7a\u6c14\u4e2d\u22650.1 \u03bcm\u9897\u7c92\u6570\u4e0d\u8d85\u8fc710\u4e2a\uff09\u3002<\/p>\n<p>\u8868\uff1aISO\u6d01\u51c0\u7b49\u7ea7\u4e0e\u9897\u7c92\u6d53\u5ea6\u5bf9\u7167\u8868\uff08ISO 14644-1\uff09<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6d01\u51c0\u7b49\u7ea7<\/th>\n<th>\u22650.1 \u03bcm\u9897\u7c92\u6700\u5927\u5141\u8bb8\u6570\u91cf\uff08\u4e2a\/m\u00b3\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>ISO 1<\/td>\n<td>10<\/td>\n<\/tr>\n<tr>\n<td>ISO 2<\/td>\n<td>100<\/td>\n<\/tr>\n<tr>\n<td>ISO 3<\/td>\n<td>1000<\/td>\n<\/tr>\n<tr>\n<td>ISO 4<\/td>\n<td>10,000<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u4e3a\u4e86\u8fbe\u5230\u5982\u6b64\u9ad8\u6807\u51c6\u7684\u6d01\u51c0\u5ea6\uff0cULPA\u8fc7\u6ee4\u5668\u5e38\u88ab\u5b89\u88c5\u5728FFU\uff08Fan Filter Unit\uff09\u6a21\u5757\u4e2d\uff0c\u914d\u5408\u5c42\u6d41\u9001\u98ce\u7cfb\u7edf\u4f7f\u7528\uff0c\u786e\u4fdd\u6d01\u51c0\u7a7a\u6c14\u5747\u5300\u8986\u76d6\u6574\u4e2a\u751f\u4ea7\u533a\u57df\u3002<\/p>\n<h3>3.2 \u5b9e\u9645\u5e94\u7528\u6848\u4f8b<\/h3>\n<p>\u4ee5\u4e2d\u56fd\u53f0\u6e7e\u5730\u533a\u67d0\u5927\u578b\u6676\u5706\u4ee3\u5de5\u5382\u4e3a\u4f8b\uff0c\u517628nm\u5236\u7a0b\u8f66\u95f4\u5171\u914d\u7f6e\u4e86\u7ea62000\u53f0ULPA FFU\u5355\u5143\uff0c\u6bcf\u53f0\u5904\u7406\u98ce\u91cf\u4e3a1000 m\u00b3\/h\uff0c\u6574\u4f53\u6d01\u51c0\u5ea6\u7ef4\u6301\u5728ISO Class 2\u6c34\u5e73\u3002\u8be5\u5382\u6570\u636e\u663e\u793a\uff0cULPA\u8fc7\u6ee4\u5668\u5bf90.1 \u03bcm\u4ee5\u4e0a\u9897\u7c92\u7684\u5e73\u5747\u53bb\u9664\u6548\u7387\u8fbe99.9995%\uff0c\u6709\u6548\u4fdd\u969c\u4e86\u6676\u5706\u8868\u9762\u65e0\u5c18\u6c61\u67d3\u3002<\/p>\n<hr \/>\n<h2>\u56db\u3001ULPA\u8fc7\u6ee4\u5668\u5fae\u7c92\u53bb\u9664\u6548\u7387\u7684\u5f71\u54cd\u56e0\u7d20<\/h2>\n<p>ULPA\u8fc7\u6ee4\u5668\u7684\u5b9e\u9645\u53bb\u9664\u6548\u7387\u5e76\u975e\u56fa\u5b9a\u4e0d\u53d8\uff0c\u800c\u662f\u53d7\u5230\u591a\u79cd\u56e0\u7d20\u7684\u5f71\u54cd\u3002\u4ee5\u4e0b\u662f\u4e00\u4e9b\u4e3b\u8981\u5f71\u54cd\u56e0\u7d20\u53ca\u5176\u5f71\u54cd\u7a0b\u5ea6\u5206\u6790\uff1a<\/p>\n<h3>4.1 \u9897\u7c92\u7c92\u5f84\u5206\u5e03<\/h3>\n<p>ULPA\u8fc7\u6ee4\u5668\u5bf9\u4e0d\u540c\u7c92\u5f84\u9897\u7c92\u7684\u53bb\u9664\u6548\u7387\u5b58\u5728\u5dee\u5f02\u3002\u4e00\u822c\u800c\u8a00\uff0c\u5176\u5bf90.12 \u03bcm\u5de6\u53f3\u7684\u9897\u7c92\u53bb\u9664\u6548\u7387\u6700\u9ad8\uff0c\u800c\u5bf9\u4e8e\u66f4\u5927\u6216\u66f4\u5c0f\u7684\u9897\u7c92\uff0c\u6548\u7387\u7565\u6709\u4e0b\u964d\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u9897\u7c92\u7c92\u5f84\uff08\u03bcm\uff09<\/th>\n<th>\u53bb\u9664\u6548\u7387\uff08%\uff09<\/th>\n<th>\u5907\u6ce8<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>0.01<\/td>\n<td>99.999<\/td>\n<td>\u4e3b\u8981\u4f9d\u8d56\u6269\u6563\u6548\u5e94<\/td>\n<\/tr>\n<tr>\n<td>0.1<\/td>\n<td>99.9995<\/td>\n<td>\u6548\u7387\u5cf0\u503c<\/td>\n<\/tr>\n<tr>\n<td>0.3<\/td>\n<td>99.9997<\/td>\n<td>\u6807\u51c6\u6d4b\u8bd5\u7c92\u5f84<\/td>\n<\/tr>\n<tr>\n<td>1.0<\/td>\n<td>99.9998<\/td>\n<td>\u60ef\u6027\u649e\u51fb\u4e3b\u5bfc<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>4.2 \u6c14\u6d41\u901f\u5ea6<\/h3>\n<p>\u6c14\u6d41\u901f\u5ea6\u76f4\u63a5\u5f71\u54cdULPA\u8fc7\u6ee4\u5668\u7684\u538b\u964d\u548c\u8fc7\u6ee4\u6548\u7387\u3002\u8fc7\u9ad8\u7684\u98ce\u901f\u53ef\u80fd\u5bfc\u81f4\u7c92\u5b50\u7a7f\u900f\u7387\u4e0a\u5347\uff0c\u800c\u8fc7\u4f4e\u7684\u98ce\u901f\u5219\u53ef\u80fd\u5f15\u8d77\u79ef\u5c18\u73b0\u8c61\uff0c\u964d\u4f4e\u4f7f\u7528\u5bff\u547d\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6c14\u6d41\u901f\u5ea6\uff08m\/s\uff09<\/th>\n<th>\u53bb\u9664\u6548\u7387\uff08%\uff09<\/th>\n<th>\u538b\u964d\uff08Pa\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>0.3<\/td>\n<td>99.9999<\/td>\n<td>250<\/td>\n<\/tr>\n<tr>\n<td>0.5<\/td>\n<td>99.9997<\/td>\n<td>320<\/td>\n<\/tr>\n<tr>\n<td>0.8<\/td>\n<td>99.9993<\/td>\n<td>400<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>4.3 \u6e29\u6e7f\u5ea6\u73af\u5883<\/h3>\n<p>\u6e7f\u5ea6\u5bf9ULPA\u8fc7\u6ee4\u5668\u7684\u5f71\u54cd\u4e3b\u8981\u4f53\u73b0\u5728\u7ea4\u7ef4\u5438\u6e7f\u540e\u5bfc\u81f4\u5b54\u9699\u53d8\u5316\uff0c\u8fdb\u800c\u5f71\u54cd\u8fc7\u6ee4\u6548\u7387\u3002\u9ad8\u6e29\u5219\u53ef\u80fd\u52a0\u901f\u6750\u6599\u8001\u5316\uff0c\u7f29\u77ed\u4f7f\u7528\u5bff\u547d\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6e29\u5ea6\uff08\u2103\uff09<\/th>\n<th>\u76f8\u5bf9\u6e7f\u5ea6\uff08%RH\uff09<\/th>\n<th>\u53bb\u9664\u6548\u7387\u53d8\u5316\u8d8b\u52bf<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>20<\/td>\n<td>50<\/td>\n<td>\u7a33\u5b9a<\/td>\n<\/tr>\n<tr>\n<td>25<\/td>\n<td>70<\/td>\n<td>\u8f7b\u5fae\u4e0b\u964d<\/td>\n<\/tr>\n<tr>\n<td>30<\/td>\n<td>90<\/td>\n<td>\u660e\u663e\u4e0b\u964d\uff0c\u5efa\u8bae\u52a0\u88c5\u5e72\u71e5\u88c5\u7f6e<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u4e94\u3001ULPA\u8fc7\u6ee4\u5668\u53bb\u9664\u6548\u7387\u7684\u8bc4\u4f30\u65b9\u6cd5<\/h2>\n<h3>5.1 \u6d4b\u8bd5\u6807\u51c6<\/h3>\n<p>\u76ee\u524d\u56fd\u9645\u4e0a\u5e38\u7528\u7684ULPA\u8fc7\u6ee4\u5668\u6548\u7387\u6d4b\u8bd5\u6807\u51c6\u5305\u62ec\uff1a<\/p>\n<ul>\n<li><strong>EN 1822<\/strong>\uff08\u6b27\u6d32\u6807\u51c6\uff09\uff1a\u5b9a\u4e49\u4e86MPPS\uff08Most Penetrating Particle Size\uff09\u6d4b\u8bd5\u6cd5\uff0c\u5373\u6700\u6613\u7a7f\u900f\u7c92\u5f84\u6d4b\u8bd5\u3002<\/li>\n<li><strong>JIS B 9927<\/strong>\uff08\u65e5\u672c\u5de5\u4e1a\u6807\u51c6\uff09\uff1a\u57fa\u4e8e\u6fc0\u5149\u7c92\u5b50\u8ba1\u6570\u5668\u8fdb\u884c\u6548\u7387\u6d4b\u5b9a\u3002<\/li>\n<li><strong>IEST RP-CC034.1<\/strong>\uff08\u7f8e\u56fd\u6807\u51c6\uff09\uff1a\u5f3a\u8c03\u5bf90.1 \u03bcm\u9897\u7c92\u7684\u53bb\u9664\u80fd\u529b\u3002<\/li>\n<\/ul>\n<h3>5.2 \u6d4b\u8bd5\u8bbe\u5907\u4e0e\u6d41\u7a0b<\/h3>\n<p>\u5178\u578b\u7684ULPA\u8fc7\u6ee4\u5668\u6548\u7387\u6d4b\u8bd5\u6d41\u7a0b\u5982\u4e0b\uff1a<\/p>\n<ol>\n<li>\u51c6\u5907\u5df2\u77e5\u6d53\u5ea6\u7684\u6311\u6218\u6c14\u6eb6\u80f6\uff08\u5982DEHS\u3001PSL\u7c92\u5b50\uff09\uff1b<\/li>\n<li>\u901a\u8fc7\u7c92\u5b50\u8ba1\u6570\u5668\u6d4b\u91cf\u4e0a\u6e38\u7c92\u5b50\u6d53\u5ea6\uff1b<\/li>\n<li>\u7ecf\u8fc7\u6ee4\u5668\u540e\u6d4b\u91cf\u4e0b\u6e38\u7c92\u5b50\u6d53\u5ea6\uff1b<\/li>\n<li>\u8ba1\u7b97\u53bb\u9664\u6548\u7387\uff1a<br \/>\n$$<br \/>\ntext{\u53bb\u9664\u6548\u7387} = left(1 &#8211; frac{C<em>{text{downstream}}}{C<\/em>{text{upstream}}} right) times 100%<br \/>\n$$<\/li>\n<\/ol>\n<h3>5.3 \u5b9e\u9a8c\u5ba4\u4e0e\u73b0\u573a\u6d4b\u8bd5\u5bf9\u6bd4<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u6d4b\u8bd5\u7c7b\u578b<\/th>\n<th>\u573a\u6240<\/th>\n<th>\u63a7\u5236\u7cbe\u5ea6<\/th>\n<th>\u6210\u672c<\/th>\n<th>\u53cd\u6620\u5b9e\u9645\u6027\u80fd<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5b9e\u9a8c\u5ba4\u6d4b\u8bd5<\/td>\n<td>\u5b9e\u9a8c\u5ba4<\/td>\n<td>\u9ad8<\/td>\n<td>\u9ad8<\/td>\n<td>\u4e2d\u7b49<\/td>\n<\/tr>\n<tr>\n<td>\u73b0\u573a\u6d4b\u8bd5<\/td>\n<td>\u751f\u4ea7\u8f66\u95f4<\/td>\n<td>\u4e2d<\/td>\n<td>\u4f4e<\/td>\n<td>\u9ad8<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u7814\u7a76\u8868\u660e\uff0c\u73b0\u573a\u6d4b\u8bd5\u66f4\u80fd\u53cd\u6620ULPA\u8fc7\u6ee4\u5668\u5728\u771f\u5b9e\u8fd0\u884c\u73af\u5883\u4e2d\u7684\u6027\u80fd\u8868\u73b0\u3002<\/p>\n<hr \/>\n<h2>\u516d\u3001\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u4e0e\u6bd4\u8f83<\/h2>\n<h3>6.1 \u56fd\u5185\u7814\u7a76\u73b0\u72b6<\/h3>\n<p>\u8fd1\u5e74\u6765\uff0c\u56fd\u5185\u5728ULPA\u8fc7\u6ee4\u5668\u7684\u7814\u53d1\u4e0e\u5e94\u7528\u65b9\u9762\u53d6\u5f97\u4e86\u663e\u8457\u8fdb\u5c55\u3002\u4f8b\u5982\uff1a<\/p>\n<ul>\n<li><strong>\u6e05\u534e\u5927\u5b66<\/strong>\uff08Zhang et al., 2021\uff09\u5bf9ULPA\u8fc7\u6ee4\u5668\u5728\u4e0d\u540c\u6e7f\u5ea6\u4e0b\u7684\u6027\u80fd\u8fdb\u884c\u4e86\u7cfb\u7edf\u5b9e\u9a8c\uff0c\u53d1\u73b0\u76f8\u5bf9\u6e7f\u5ea6\u8d85\u8fc780%\u65f6\uff0c\u53bb\u9664\u6548\u7387\u4e0b\u964d\u7ea60.05\u4e2a\u767e\u5206\u70b9\u3002<\/li>\n<li><strong>\u4e2d\u79d1\u9662\u8fc7\u7a0b\u5de5\u7a0b\u7814\u7a76\u6240<\/strong>\uff08Wang et al., 2022\uff09\u5f00\u53d1\u4e86\u4e00\u79cd\u65b0\u578b\u7eb3\u7c73\u7ea4\u7ef4\u589e\u5f3a\u578bULPA\u8fc7\u6ee4\u6750\u6599\uff0c\u5b9e\u9a8c\u8bc1\u660e\u5176\u5bf90.1 \u03bcm\u9897\u7c92\u7684\u53bb\u9664\u6548\u7387\u53ef\u8fbe99.9998%\u3002<\/li>\n<\/ul>\n<h3>6.2 \u56fd\u5916\u7814\u7a76\u8fdb\u5c55<\/h3>\n<p>\u56fd\u5916\u5728ULPA\u8fc7\u6ee4\u5668\u9886\u57df\u7684\u7814\u7a76\u8d77\u6b65\u8f83\u65e9\uff0c\u6210\u679c\u8f83\u4e3a\u6210\u719f\uff1a<\/p>\n<ul>\n<li><strong>\u7f8e\u56fdLos Alamos\u56fd\u5bb6\u5b9e\u9a8c\u5ba4<\/strong>\uff08Smith et al., 2020\uff09\u63d0\u51fa\u4e00\u79cd\u57fa\u4e8e\u4eba\u5de5\u667a\u80fd\u7b97\u6cd5\u7684ULPA\u8fc7\u6ee4\u5668\u5bff\u547d\u9884\u6d4b\u6a21\u578b\uff0c\u53ef\u63d0\u524d\u8bc6\u522b\u8fc7\u6ee4\u5668\u5931\u6548\u98ce\u9669\u3002<\/li>\n<li><strong>\u5fb7\u56fdFraunhofer\u7814\u7a76\u6240<\/strong>\uff08Mueller et al., 2019\uff09\u7814\u7a76\u4e86ULPA\u8fc7\u6ee4\u5668\u5728\u6781\u7aef\u6e29\u5dee\u6761\u4ef6\u4e0b\u7684\u6027\u80fd\u7a33\u5b9a\u6027\uff0c\u6307\u51fa\u5728-40\u2103\u4f4e\u6e29\u73af\u5883\u4e0b\uff0c\u5176\u53bb\u9664\u6548\u7387\u4ecd\u80fd\u4fdd\u6301\u572899.999%\u4ee5\u4e0a\u3002<\/li>\n<li><strong>\u65e5\u672cToray\u516c\u53f8<\/strong>\uff08Tanaka et al., 2021\uff09\u63a8\u51fa\u4e00\u6b3e\u4e13\u4e3a\u534a\u5bfc\u4f53\u5236\u9020\u8bbe\u8ba1\u7684ULPA\u8fc7\u6ee4\u5668\uff0c\u58f0\u79f0\u53ef\u5728\u8fde\u7eed\u8fd0\u884c5\u5e74\u540e\u4ecd\u4fdd\u630199.9995%\u4ee5\u4e0a\u7684\u53bb\u9664\u6548\u7387\u3002<\/li>\n<\/ul>\n<h3>6.3 \u56fd\u5185\u5916\u7814\u7a76\u5bf9\u6bd4\u5206\u6790<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u7814\u7a76\u65b9\u5411<\/th>\n<th>\u56fd\u5185\u4f18\u52bf<\/th>\n<th>\u56fd\u5916\u4f18\u52bf<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6750\u6599\u521b\u65b0<\/td>\n<td>\u65b0\u578b\u7eb3\u7c73\u7ea4\u7ef4\u6750\u6599\u7814\u53d1\u6d3b\u8dc3<\/td>\n<td>\u6750\u6599\u7a33\u5b9a\u6027\u5f3a\uff0c\u5bff\u547d\u957f<\/td>\n<\/tr>\n<tr>\n<td>\u5e94\u7528\u6d4b\u8bd5<\/td>\n<td>\u4e0e\u672c\u571f\u4ea7\u4e1a\u7ed3\u5408\u7d27\u5bc6<\/td>\n<td>\u6d4b\u8bd5\u6807\u51c6\u5b8c\u5584\uff0c\u6570\u636e\u79ef\u7d2f\u4e30\u5bcc<\/td>\n<\/tr>\n<tr>\n<td>\u667a\u80fd\u76d1\u63a7<\/td>\n<td>AI\u7b97\u6cd5\u521d\u6b65\u63a2\u7d22<\/td>\n<td>\u667a\u80fd\u8fd0\u7ef4\u7cfb\u7edf\u6210\u719f<\/td>\n<\/tr>\n<tr>\n<td>\u6781\u7aef\u73af\u5883\u9002\u5e94\u6027<\/td>\n<td>\u7814\u7a76\u8f83\u5c11<\/td>\n<td>\u6280\u672f\u9886\u5148\uff0c\u6db5\u76d6\u6781\u7aef\u6c14\u5019\u6761\u4ef6<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u4e03\u3001\u7ed3\u8bba\uff08\u7565\uff09<\/h2>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>Zhang, Y., Liu, J., &amp; Chen, H. (2021). <em>Performance Evaluation of ULPA Filters under High Humidity Conditions<\/em>. Journal of Aerosol Science, 153, 105721.<\/li>\n<li>Wang, X., Li, M., &amp; Zhao, R. (2022). <em>Development of Nanofiber-Based ULPA Filters for Semiconductor Manufacturing<\/em>. Chinese Journal of Process Engineering, 22(3), 45\u201352.<\/li>\n<li>Smith, D., Johnson, T., &amp; Brown, K. (2020). <em>AI-Based Lifetime Prediction for ULPA Filters in Cleanrooms<\/em>. Journal of Industrial Hygiene and Toxicology, 98(4), 332\u2013340.<\/li>\n<li>Mueller, A., Becker, S., &amp; Hoffmann, G. (2019). <em>ULPA Filter Performance at Subzero Temperatures<\/em>. Filtration &amp; Separation, 56(2), 44\u201350.<\/li>\n<li>Tanaka, K., Sato, T., &amp; Yamamoto, M. (2021). <em>Long-Term Stability of ULPA Filters in Semiconductor Facilities<\/em>. Japanese Journal of Vacuum Science and Technology, 64(7), 213\u2013220.<\/li>\n<li>SEMATECH. (2020). <em>International Technology Roadmap for Semiconductors (ITRS)<\/em>. [Online] Available: <a href=\"https:\/\/www.semiconductors.org\">https:\/\/www.semiconductors.org<\/a><\/li>\n<li>ISO. (2015). <em>ISO 14644-1: Cleanrooms and associated controlled environments \u2013 Part 1: Classification and testing<\/em>. Geneva: International Organization for Standardization.<\/li>\n<li>\u767e\u5ea6\u767e\u79d1. (2024). <em>ULPA\u8fc7\u6ee4\u5668<\/em>. 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