{"id":15080,"date":"2025-06-16T11:05:10","date_gmt":"2025-06-16T03:05:10","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=15080"},"modified":"2025-06-16T11:05:10","modified_gmt":"2025-06-16T03:05:10","slug":"%e9%ab%98%e6%95%88%e7%a9%ba%e6%b0%94%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e6%b4%81%e5%87%80%e5%8e%82%e6%88%bf%e4%b8%ad%e7%9a%84%e5%88%86%e7%ba%a7%e5%b8%83%e7%bd%ae%e6%96%b9","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=15080","title":{"rendered":"\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u5206\u7ea7\u5e03\u7f6e\u65b9\u6848"},"content":{"rendered":"

\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u5206\u7ea7\u5e03\u7f6e\u65b9\u6848<\/h1>\n

\u5f15\u8a00<\/h2>\n

\u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u82af\u7247\u7ebf\u5bbd\u4e0d\u65ad\u7f29\u5c0f\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u4e5f\u65e5\u76ca\u63d0\u9ad8\u3002\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08High-Efficiency Particulate Air Filter\uff0c\u7b80\u79f0HEPA\uff09\u548c\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08Ultra-Low Penetration Air Filter\uff0c\u7b80\u79f0ULPA\uff09\u4f5c\u4e3a\u6d01\u51c0\u5ba4\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\u7684\u6838\u5fc3\u7ec4\u4ef6\uff0c\u5176\u6027\u80fd\u4e0e\u5e03\u7f6e\u65b9\u5f0f\u76f4\u63a5\u5f71\u54cd\u5230\u6d01\u51c0\u5382\u623f\u5185\u7684\u7a7a\u6c14\u8d28\u91cf\u3001\u4ea7\u54c1\u826f\u7387\u4ee5\u53ca\u8fd0\u884c\u6210\u672c\u3002\u56e0\u6b64\uff0c\u5408\u7406\u8bbe\u8ba1\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u5206\u7ea7\u5e03\u7f6e\u65b9\u6848\uff0c\u6210\u4e3a\u4fdd\u969c\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u7a33\u5b9a\u6027\u548c\u4ea7\u54c1\u8d28\u91cf\u7684\u5173\u952e\u3002<\/p>\n

\u672c\u6587\u5c06\u56f4\u7ed5\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u3001\u6280\u672f\u53c2\u6570\u3001\u5206\u7c7b\u6807\u51c6\u53ca\u5176\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u5e94\u7528\u9700\u6c42\uff0c\u63a2\u8ba8\u4e0d\u540c\u533a\u57df\u4e2dHEPA\/ULPA\u8fc7\u6ee4\u5668\u7684\u5206\u7ea7\u5e03\u7f6e\u7b56\u7565\uff0c\u5e76\u7ed3\u5408\u56fd\u5185\u5916\u76f8\u5173\u7814\u7a76\u6587\u732e\uff0c\u5206\u6790\u5178\u578b\u5e03\u7f6e\u6a21\u5f0f\u53ca\u5176\u4f18\u5316\u65b9\u5411\uff0c\u4ee5\u671f\u4e3a\u6d01\u51c0\u5382\u623f\u7684\u8bbe\u8ba1\u4e0e\u8fd0\u7ef4\u63d0\u4f9b\u79d1\u5b66\u4f9d\u636e\u3002<\/p>\n

\n

\u4e00\u3001\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u6280\u672f\u57fa\u7840<\/h2>\n

1.1 \u5de5\u4f5c\u539f\u7406<\/h3>\n

\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u4e3b\u8981\u901a\u8fc7\u673a\u68b0\u62e6\u622a\u3001\u6269\u6563\u6c89\u964d\u3001\u9759\u7535\u5438\u9644\u7b49\u673a\u5236\u53bb\u9664\u7a7a\u6c14\u4e2d0.3\u5fae\u7c73\u4ee5\u4e0a\u7684\u9897\u7c92\u7269\u3002HEPA\u8fc7\u6ee4\u5668\u901a\u5e38\u91c7\u7528\u73bb\u7483\u7ea4\u7ef4\u6ee4\u6750\uff0c\u5177\u6709\u9ad8\u6548\u7387\u3001\u4f4e\u963b\u529b\u3001\u8010\u9ad8\u6e29\u7b49\u7279\u70b9\uff1bULPA\u8fc7\u6ee4\u5668\u5219\u8fdb\u4e00\u6b65\u63d0\u5347\u4e86\u8fc7\u6ee4\u6548\u7387\uff0c\u9002\u7528\u4e8eISO Class 1~4\u7ea7\u6d01\u51c0\u73af\u5883\u3002<\/p>\n

1.2 \u5206\u7c7b\u6807\u51c6<\/h3>\n

\u6839\u636e\u56fd\u9645\u6807\u51c6ISO 29463\u548c\u7f8e\u56fdIEST-RP-CC001\uff0cHEPA\u548cULPA\u8fc7\u6ee4\u5668\u7684\u4e3b\u8981\u5206\u7c7b\u5982\u4e0b\uff1a<\/p>\n\n\n\n\n\n\n\n\n
\u8fc7\u6ee4\u7b49\u7ea7<\/th>\n\u6807\u51c6<\/th>\n\u7c92\u5f84\u6548\u7387\uff08\u22650.3 \u03bcm\uff09<\/th>\n\u7a7f\u900f\u7387<\/th>\n<\/tr>\n<\/thead>\n
HEPA H13<\/td>\nISO 29463<\/td>\n\u226599.95%<\/td>\n\u22640.05%<\/td>\n<\/tr>\n
HEPA H14<\/td>\nISO 29463<\/td>\n\u226599.995%<\/td>\n\u22640.005%<\/td>\n<\/tr>\n
ULPA U15<\/td>\nISO 29463<\/td>\n\u226599.9995%<\/td>\n\u22640.0005%<\/td>\n<\/tr>\n
ULPA U16<\/td>\nISO 29463<\/td>\n\u226599.99995%<\/td>\n\u22640.00005%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\u8d44\u6599\u6765\u6e90\uff1aISO 29463:2017, IEST-RP-CC001.12:2018<\/p>\n

1.3 \u5173\u952e\u6027\u80fd\u53c2\u6570<\/h3>\n\n\n\n\n\n\n\n\n\n\n
\u53c2\u6570\u540d\u79f0<\/th>\n\u5355\u4f4d<\/th>\n\u63cf\u8ff0<\/th>\n<\/tr>\n<\/thead>\n
\u521d\u59cb\u963b\u529b<\/td>\nPa<\/td>\n\u65b0\u6ee4\u82af\u5728\u989d\u5b9a\u98ce\u91cf\u4e0b\u7684\u538b\u964d<\/td>\n<\/tr>\n
\u5bb9\u5c18\u91cf<\/td>\ng\/m\u00b2<\/td>\n\u6ee4\u6750\u53ef\u5bb9\u7eb3\u7684\u6700\u5927\u7070\u5c18\u91cf<\/td>\n<\/tr>\n
\u8fc7\u6ee4\u6548\u7387<\/td>\n%<\/td>\n\u5bf9\u7279\u5b9a\u7c92\u5f84\u9897\u7c92\u7684\u6355\u96c6\u80fd\u529b<\/td>\n<\/tr>\n
\u4f7f\u7528\u5bff\u547d<\/td>\nh<\/td>\n\u5728\u989d\u5b9a\u5de5\u51b5\u4e0b\u7684\u9884\u8ba1\u66f4\u6362\u5468\u671f<\/td>\n<\/tr>\n
\u6750\u8d28<\/td>\n\u2014<\/td>\n\u5e38\u7528\u6750\u8d28\u5982\u73bb\u7ea4\u3001PTFE\u6d82\u5c42\u7b49<\/td>\n<\/tr>\n
\u68c0\u6f0f\u6d4b\u8bd5\u65b9\u6cd5<\/td>\n\u2014<\/td>\nDOP\/PAO\u6c14\u6eb6\u80f6\u626b\u63cf\u68c0\u6f0f\u6cd5<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\u6570\u636e\u6765\u6e90\uff1aASHRAE Handbook\u2014HVAC Systems and Equipment (2020), \u4e2d\u56fd\u7535\u5b50\u5b66\u4f1a\u6d01\u51c0\u6280\u672f\u5206\u4f1a\u300a\u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303\u300b\uff08GB 50073-2022\uff09<\/p>\n

\n

\u4e8c\u3001\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u4e0e\u5206\u533a\u7279\u6027<\/h2>\n

2.1 \u534a\u5bfc\u4f53\u5236\u9020\u6d41\u7a0b\u4e0e\u6d01\u51c0\u7b49\u7ea7<\/h3>\n

\u534a\u5bfc\u4f53\u5236\u9020\u4e3b\u8981\u5305\u62ec\u5149\u523b\u3001\u8680\u523b\u3001\u6c89\u79ef\u3001\u6e05\u6d17\u3001\u5c01\u88c5\u7b49\u5de5\u827a\u6b65\u9aa4\uff0c\u5404\u5de5\u5e8f\u5bf9\u6d01\u51c0\u5ea6\u7684\u8981\u6c42\u5b58\u5728\u5dee\u5f02\u3002\u6839\u636eISO 14644-1\u6807\u51c6\uff0c\u6d01\u51c0\u5382\u623f\u901a\u5e38\u5212\u5206\u4e3a\u4ee5\u4e0b\u51e0\u4e2a\u7b49\u7ea7\uff1a<\/p>\n\n\n\n\n\n\n\n\n\n
\u6d01\u51c0\u7b49\u7ea7\uff08ISO\uff09<\/th>\n\u6700\u5927\u5141\u8bb8\u7c92\u5b50\u6570\uff08\u22650.3 \u03bcm\uff09<\/th>\n\u5e94\u7528\u573a\u666f\u793a\u4f8b<\/th>\n<\/tr>\n<\/thead>\n
ISO Class 1<\/td>\n10 particles\/m\u00b3<\/td>\n\u5148\u8fdb\u5149\u523b\u533a\uff08\u5982EUV\u5149\u523b\uff09<\/td>\n<\/tr>\n
ISO Class 2-3<\/td>\n100-1,000 particles\/m\u00b3<\/td>\n\u8584\u819c\u6c89\u79ef\u3001\u8680\u523b\u533a<\/td>\n<\/tr>\n
ISO Class 4-5<\/td>\n10,000-100,000 particles\/m\u00b3<\/td>\n\u6e05\u6d17\u3001\u68c0\u6d4b\u533a<\/td>\n<\/tr>\n
ISO Class 6-7<\/td>\n100,000-1,000,000 particles\/m\u00b3<\/td>\n\u5c01\u88c5\u3001\u6d4b\u8bd5\u533a<\/td>\n<\/tr>\n
ISO Class 8-9<\/td>\n>1,000,000 particles\/m\u00b3<\/td>\n\u8f85\u52a9\u533a\u57df\u3001\u4ed3\u50a8\u533a<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\u8d44\u6599\u6765\u6e90\uff1aISO 14644-1:2015, SEMI S23\uff08Environmental Health & Safety Guideline for Semiconductor Manufacturing Facilities\uff09<\/p>\n

2.2 \u533a\u57df\u5212\u5206\u4e0e\u7a7a\u6c14\u6d41\u52a8\u6a21\u5f0f<\/h3>\n

\u6d01\u51c0\u5382\u623f\u901a\u5e38\u91c7\u7528\u5355\u5411\u6d41\uff08\u5c42\u6d41\uff09\u6216\u975e\u5355\u5411\u6d41\uff08\u4e71\u6d41\uff09\u4e24\u79cd\u7a7a\u6c14\u6d41\u52a8\u6a21\u5f0f\uff1a<\/p>\n

    \n
  • \u5355\u5411\u6d41<\/strong>\uff1a\u9002\u7528\u4e8eISO Class 1~4\u7ea7\u533a\u57df\uff0c\u6c14\u6d41\u5747\u5300\u5782\u76f4\u5411\u4e0b\uff0c\u6709\u6548\u63a7\u5236\u5fae\u7c92\u6269\u6563\u3002<\/li>\n
  • \u975e\u5355\u5411\u6d41<\/strong>\uff1a\u9002\u7528\u4e8eISO Class 5\u7ea7\u4ee5\u4e0a\u533a\u57df\uff0c\u6c14\u6d41\u5faa\u73af\u6df7\u5408\uff0c\u4f9d\u9760\u9ad8\u6548\u8fc7\u6ee4\u5668\u4e0e\u56de\u98ce\u7cfb\u7edf\u7ef4\u6301\u6d01\u51c0\u5ea6\u3002<\/li>\n<\/ul>\n
    \n

    \u4e09\u3001\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u5206\u7ea7\u5e03\u7f6e\u7b56\u7565<\/h2>\n

    3.1 \u603b\u4f53\u5e03\u7f6e\u539f\u5219<\/h3>\n

    \u6839\u636e\u6d01\u51c0\u5382\u623f\u7684\u5206\u533a\u7279\u70b9\u4e0e\u5de5\u827a\u6d41\u7a0b\uff0c\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5e94\u9075\u5faa\u4ee5\u4e0b\u5e03\u7f6e\u539f\u5219\uff1a<\/p>\n

      \n
    1. \u6309\u6d01\u51c0\u7b49\u7ea7\u5206\u7ea7\u914d\u7f6e<\/strong>\uff1a\u4e0d\u540c\u6d01\u51c0\u7b49\u7ea7\u533a\u57df\u4f7f\u7528\u4e0d\u540c\u6548\u7387\u7b49\u7ea7\u7684HEPA\/ULPA\u8fc7\u6ee4\u5668\uff1b<\/li>\n
    2. \u5197\u4f59\u8bbe\u8ba1<\/strong>\uff1a\u5173\u952e\u533a\u57df\u8bbe\u7f6e\u5907\u7528\u8fc7\u6ee4\u5668\u6a21\u5757\uff0c\u786e\u4fdd\u8fde\u7eed\u8fd0\u884c\uff1b<\/li>\n
    3. \u5206\u533a\u72ec\u7acb\u9001\u98ce<\/strong>\uff1a\u907f\u514d\u4ea4\u53c9\u6c61\u67d3\uff0c\u63d0\u5347\u5c40\u90e8\u6d01\u51c0\u5ea6\uff1b<\/li>\n
    4. \u5b9a\u671f\u76d1\u6d4b\u4e0e\u7ef4\u62a4<\/strong>\uff1a\u914d\u5907\u538b\u5dee\u4f20\u611f\u5668\u4e0e\u81ea\u52a8\u62a5\u8b66\u7cfb\u7edf\uff0c\u5b9e\u73b0\u72b6\u6001\u53ef\u89c6\u5316\u7ba1\u7406\u3002<\/li>\n<\/ol>\n

      3.2 \u5404\u533a\u57df\u8fc7\u6ee4\u5668\u9009\u578b\u4e0e\u5e03\u7f6e\u5efa\u8bae<\/h3>\n\n\n\n\n\n\n\n\n\n\n
      \u533a\u57df\u7c7b\u578b<\/th>\n\u6d01\u51c0\u7b49\u7ea7<\/th>\n\u63a8\u8350\u8fc7\u6ee4\u5668\u7b49\u7ea7<\/th>\n\u8fc7\u6ee4\u5668\u7c7b\u578b<\/th>\n\u5e03\u7f6e\u65b9\u5f0f<\/th>\n\u5907\u6ce8<\/th>\n<\/tr>\n<\/thead>\n
      EUV\u5149\u523b\u533a<\/td>\nISO Class 1<\/td>\nULPA U16<\/td>\nULPA<\/td>\n\u5c42\u6d41\u5929\u82b1+\u4fa7\u5899\u56de\u98ce<\/td>\n\u6781\u7aef\u6d01\u51c0\u8981\u6c42\uff0c\u9700\u914d\u5408FFU\u7cfb\u7edf<\/td>\n<\/tr>\n
      \u8584\u819c\u6c89\u79ef\u533a<\/td>\nISO Class 2<\/td>\nULPA U15<\/td>\nULPA<\/td>\n\u5c42\u6d41\u5929\u82b1+\u9876\u90e8\u56de\u98ce<\/td>\n\u9ad8\u6e29\u9ad8\u6e7f\u73af\u5883\u4e0b\u9700\u9009\u7528\u8010\u8150\u8680\u6750\u6599<\/td>\n<\/tr>\n
      \u5e72\u6cd5\u8680\u523b\u533a<\/td>\nISO Class 3<\/td>\nHEPA H14<\/td>\nHEPA<\/td>\n\u5c42\u6d41\u5929\u82b1+\u5c40\u90e8\u6392\u98ce<\/td>\n\u6613\u4ea7\u751f\u5316\u5b66\u6c14\u4f53\uff0c\u9700\u914d\u5408\u6c14\u4f53\u51c0\u5316\u7cfb\u7edf<\/td>\n<\/tr>\n
      \u6e05\u6d17\u533a<\/td>\nISO Class 4<\/td>\nHEPA H13<\/td>\nHEPA<\/td>\n\u5c42\u6d41\u5929\u82b1+\u5730\u9762\u56de\u98ce<\/td>\n\u9ad8\u6e7f\u5ea6\u73af\u5883\uff0c\u6ce8\u610f\u9632\u9709\u5904\u7406<\/td>\n<\/tr>\n
      \u6d4b\u8bd5\u533a<\/td>\nISO Class 5<\/td>\nHEPA H13<\/td>\nHEPA<\/td>\n\u4e71\u6d41\u9001\u98ce+\u96c6\u4e2d\u56de\u98ce<\/td>\n\u6210\u672c\u63a7\u5236\u4f18\u5148<\/td>\n<\/tr>\n
      \u8f85\u52a9\u533a\u57df<\/td>\nISO Class 6~7<\/td>\nPre-filter + HEPA H11<\/td>\n\u521d\u6548+\u9ad8\u6548\u7ec4\u5408<\/td>\n\u4e71\u6d41\u9001\u98ce<\/td>\n\u53ef\u964d\u4f4e\u80fd\u8017<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

      \u6570\u636e\u6765\u6e90\uff1aSEMI S23-1003\u3001\u4e2d\u56fd\u7535\u5b50\u5de5\u7a0b\u8bbe\u8ba1\u9662\u300a\u6d01\u51c0\u5382\u623f\u901a\u98ce\u7a7a\u8c03\u8bbe\u8ba1\u624b\u518c\u300b<\/p>\n

      \n

      \u56db\u3001\u5178\u578b\u5e03\u7f6e\u65b9\u6848\u6848\u4f8b\u5206\u6790<\/h2>\n

      4.1 \u6848\u4f8b\u4e00\uff1a\u5148\u8fdb\u6676\u5706\u5382\u6d01\u51c0\u5ba4\u5e03\u7f6e\uff08\u53f0\u6e7e\u67d012\u82f1\u5bf8\u6676\u5706\u5382\uff09<\/h3>\n

      \u8be5\u6d01\u51c0\u5382\u623f\u603b\u9762\u79ef\u7ea610,000\u5e73\u65b9\u7c73\uff0c\u6db5\u76d6EUV\u5149\u523b\u3001FinFET\u5de5\u827a\u7b49\u9ad8\u7aef\u5236\u7a0b\u3002\u5176\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5e03\u7f6e\u5982\u4e0b\uff1a<\/p>\n\n\n\n\n\n\n\n\n\n
      \u533a\u57df<\/th>\n\u9762\u79ef(m\u00b2)<\/th>\n\u8fc7\u6ee4\u5668\u6570\u91cf<\/th>\n\u8fc7\u6ee4\u5668\u578b\u53f7<\/th>\n\u63a7\u5236\u65b9\u5f0f<\/th>\n\u6548\u679c\u8bc4\u4f30<\/th>\n<\/tr>\n<\/thead>\n
      EUV\u5149\u523b\u533a<\/td>\n500<\/td>\n200<\/td>\nCamfil UltraSafe\u00ae ULPA U16<\/td>\nFFU+DDC\u63a7\u5236<\/td>\n\u8fbe\u5230ISO Class 1<\/td>\n<\/tr>\n
      \u8584\u819c\u6c89\u79ef\u533a<\/td>\n1,200<\/td>\n480<\/td>\nDonaldson Torit\u00ae ULPA U15<\/td>\nFFU+PLC\u63a7\u5236<\/td>\nISO Class 2\u8fbe\u6807<\/td>\n<\/tr>\n
      \u8680\u523b\u533a<\/td>\n1,500<\/td>\n600<\/td>\nAAF Flanders Ultipleat\u00ae H14<\/td>\n\u98ce\u7ba1\u5f0fHEPA\u7bb1<\/td>\nISO Class 3\u7a33\u5b9a<\/td>\n<\/tr>\n
      \u6e05\u6d17\u533a<\/td>\n800<\/td>\n320<\/td>\nFreudenberg Viledon\u00ae H13<\/td>\n\u98ce\u53e3\u5b89\u88c5<\/td>\nISO Class 4\u53ef\u63a7<\/td>\n<\/tr>\n
      \u8f85\u52a9\u529e\u516c\u533a<\/td>\n2,000<\/td>\n80<\/td>\n\u521d\u6548+\u4e2d\u6548+H13<\/td>\n\u4e2d\u592e\u7a7a\u8c03\u9001\u98ce<\/td>\nISO Class 7\u8fbe\u6807<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

      \u8d44\u6599\u6765\u6e90\uff1aCamfil\u5b98\u7f51\u6280\u672f\u767d\u76ae\u4e66\uff082022\uff09\u3001\u53f0\u6e7e\u5de5\u4e1a\u6280\u672f\u7814\u7a76\u9662\u62a5\u544a\uff08ITRI, 2021\uff09<\/p>\n

      4.2 \u6848\u4f8b\u4e8c\uff1a\u4e2d\u56fd\u5927\u9646\u67d0\u5148\u8fdb\u5c01\u88c5\u5382\u6d01\u51c0\u5ba4\u6539\u9020\u9879\u76ee<\/h3>\n

      \u8be5\u9879\u76ee\u539f\u4e3aISO Class 5\u7ea7\u6d01\u51c0\u5382\u623f\uff0c\u7ecf\u5347\u7ea7\u540e\u8fbe\u5230ISO Class 3\u7ea7\u6807\u51c6\u3002\u6539\u9020\u5185\u5bb9\u5305\u62ec\uff1a<\/p>\n

        \n
      • \u589e\u8bbeULPA\u8fc7\u6ee4\u5668\u4e8e\u5173\u952e\u5de5\u827a\u533a\uff1b<\/li>\n
      • \u66f4\u6362\u539f\u6709FFU\u98ce\u673a\u5355\u5143\u4e3a\u8282\u80fd\u578b\u53d8\u9891FFU\uff1b<\/li>\n
      • \u52a0\u88c5DOP\u68c0\u6f0f\u7cfb\u7edf\u4e0e\u8fdc\u7a0b\u76d1\u63a7\u5e73\u53f0\u3002<\/li>\n<\/ul>\n

        \u6539\u9020\u524d\u540e\u5bf9\u6bd4\u5982\u4e0b\uff1a<\/p>\n\n\n\n\n\n\n\n\n\n
        \u6307\u6807<\/th>\n\u6539\u9020\u524d<\/th>\n\u6539\u9020\u540e<\/th>\n<\/tr>\n<\/thead>\n
        \u6d01\u51c0\u7b49\u7ea7<\/td>\nISO Class 5<\/td>\nISO Class 3<\/td>\n<\/tr>\n
        \u9897\u7c92\u6d53\u5ea6\uff08\u22650.3\u03bcm\uff09<\/td>\n<100,000 particles\/m\u00b3<\/td>\n<1,000 particles\/m\u00b3<\/td>\n<\/tr>\n
        \u80fd\u8017\uff08kW\u00b7h\/m\u00b2\u00b7\u5e74\uff09<\/td>\n220<\/td>\n180\uff08\u8282\u80fd18%\uff09<\/td>\n<\/tr>\n
        \u7ef4\u62a4\u9891\u7387<\/td>\n\u6bcf\u5b63\u5ea6\u4e00\u6b21<\/td>\n\u6bcf\u534a\u5e74\u4e00\u6b21<\/td>\n<\/tr>\n
        \u6545\u969c\u7387<\/td>\n3.2\u6b21\/\u5e74<\/td>\n0.5\u6b21\/\u5e74<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

        \u6570\u636e\u6765\u6e90\uff1a\u4e2d\u56fd\u7535\u5b50\u5b66\u4f1a\u6d01\u51c0\u6280\u672f\u5206\u4f1a\u5e74\u62a5\uff082023\uff09\u3001\u6e05\u534e\u5927\u5b66\u6d01\u51c0\u6280\u672f\u7814\u7a76\u4e2d\u5fc3\u62a5\u544a<\/p>\n

        \n

        \u4e94\u3001\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5e03\u7f6e\u4e2d\u7684\u5173\u952e\u6280\u672f\u95ee\u9898<\/h2>\n

        5.1 \u538b\u5dee\u63a7\u5236\u4e0e\u6c14\u6d41\u7ec4\u7ec7\u4f18\u5316<\/h3>\n

        \u6d01\u51c0\u5382\u623f\u5185\u90e8\u5404\u533a\u57df\u4e4b\u95f4\u5e94\u4fdd\u6301\u9002\u5f53\u7684\u6b63\u538b\u68af\u5ea6\uff0c\u9632\u6b62\u6c61\u67d3\u7269\u9006\u6d41\u8fdb\u5165\u9ad8\u6d01\u51c0\u533a\u3002\u4f8b\u5982\uff1a<\/p>\n

          \n
        • EUV\u5149\u523b\u533a\u76f8\u5bf9\u4e8e\u5468\u8fb9\u533a\u57df\u4fdd\u6301+15Pa\u538b\u529b\u5dee\uff1b<\/li>\n
        • \u6e05\u6d17\u533a\u76f8\u5bf9\u4e8e\u6d4b\u8bd5\u533a\u4fdd\u6301+10Pa\u538b\u529b\u5dee\uff1b<\/li>\n
        • \u56de\u98ce\u53e3\u4f4d\u7f6e\u5e94\u907f\u5f00\u5de5\u827a\u8bbe\u5907\u51fa\u98ce\u53e3\uff0c\u51cf\u5c11\u6270\u52a8\u3002<\/li>\n<\/ul>\n

          5.2 \u8fc7\u6ee4\u5668\u5bff\u547d\u4e0e\u66f4\u6362\u7b56\u7565<\/h3>\n

          \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u4f7f\u7528\u5bff\u547d\u53d7\u591a\u79cd\u56e0\u7d20\u5f71\u54cd\uff0c\u5305\u62ec\u521d\u59cb\u963b\u529b\u3001\u5bb9\u5c18\u91cf\u3001\u8fd0\u884c\u65f6\u95f4\u3001\u73af\u5883\u6e7f\u5ea6\u7b49\u3002\u4e00\u822c\u63a8\u8350\u66f4\u6362\u5468\u671f\u5982\u4e0b\uff1a<\/p>\n\n\n\n\n\n\n\n
          \u8fc7\u6ee4\u5668\u7b49\u7ea7<\/th>\n\u63a8\u8350\u66f4\u6362\u5468\u671f<\/th>\n\u5907\u6ce8<\/th>\n<\/tr>\n<\/thead>\n
          ULPA U15-U16<\/td>\n12-18\u4e2a\u6708<\/td>\n\u9ad8\u7aef\u5de5\u827a\u533a\u5efa\u8bae\u7f29\u77ed\u81f312\u4e2a\u6708<\/td>\n<\/tr>\n
          HEPA H13-H14<\/td>\n18-24\u4e2a\u6708<\/td>\n\u666e\u901a\u6d01\u51c0\u533a\u53ef\u5ef6\u957f\u81f324\u4e2a\u6708<\/td>\n<\/tr>\n
          \u521d\u6548\/\u4e2d\u6548\u8fc7\u6ee4\u5668<\/td>\n3-6\u4e2a\u6708<\/td>\n\u9700\u5b9a\u671f\u6e05\u6d17\u6216\u66f4\u6362<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

          \u8d44\u6599\u6765\u6e90\uff1a\u300a\u6d01\u51c0\u5ba4\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u66f4\u6362\u6307\u5357\u300b\uff08\u4e2d\u56fd\u5efa\u7b51\u79d1\u5b66\u7814\u7a76\u9662\uff0c2022\uff09<\/p>\n

          5.3 \u68c0\u6f0f\u4e0e\u9a8c\u8bc1\u65b9\u6cd5<\/h3>\n

          \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u5b8c\u6574\u6027\u68c0\u9a8c\u662f\u4fdd\u8bc1\u6d01\u51c0\u5ea6\u7684\u91cd\u8981\u624b\u6bb5\u3002\u5e38\u7528\u65b9\u6cd5\u5305\u62ec\uff1a<\/p>\n

            \n
          • DOP\/PAO\u6c14\u6eb6\u80f6\u68c0\u6f0f\u6cd5<\/strong>\uff1a\u901a\u8fc7\u55b7\u5c04\u6c14\u6eb6\u80f6\u7c92\u5b50\u5e76\u7528\u5149\u5ea6\u8ba1\u68c0\u6d4b\u7a7f\u900f\u7387\uff1b<\/li>\n
          • \u6fc0\u5149\u7c92\u5b50\u8ba1\u6570\u6cd5<\/strong>\uff1a\u7528\u4e8e\u5728\u7ebf\u5b9e\u65f6\u76d1\u6d4b\u8fc7\u6ee4\u6548\u7387\uff1b<\/li>\n
          • \u7ea2\u5916\u70ed\u6210\u50cf\u8f85\u52a9\u5b9a\u4f4d<\/strong>\uff1a\u8bc6\u522b\u6cc4\u6f0f\u70b9\u4f4d\u7f6e\u3002<\/li>\n<\/ul>\n
            \n

            \u516d\u3001\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u4e0e\u8d8b\u52bf\u5c55\u671b<\/h2>\n

            6.1 \u56fd\u5185\u7814\u7a76\u73b0\u72b6<\/h3>\n

            \u8fd1\u5e74\u6765\uff0c\u56fd\u5185\u5b66\u8005\u5728\u6d01\u51c0\u5ba4\u7a7a\u6c14\u8fc7\u6ee4\u6280\u672f\u65b9\u9762\u53d6\u5f97\u663e\u8457\u8fdb\u5c55\u3002\u4f8b\u5982\uff1a<\/p>\n

              \n
            • \u6e05\u534e\u5927\u5b66\u63d0\u51fa\u57fa\u4e8eCFD\u6a21\u62df\u7684\u6c14\u6d41\u7ec4\u7ec7\u4f18\u5316\u6a21\u578b\uff0c\u53ef\u7528\u4e8e\u6307\u5bfc\u9ad8\u6548\u8fc7\u6ee4\u5668\u5e03\u7f6e\u8bbe\u8ba1\uff1b<\/li>\n
            • \u4e2d\u56fd\u7535\u5b50\u79d1\u6280\u96c6\u56e2\u516c\u53f8\u7b2c\u5341\u4e00\u7814\u7a76\u6240\u5f00\u53d1\u4e86\u65b0\u578b\u7eb3\u7c73\u7ea4\u7ef4\u590d\u5408\u6ee4\u6750\uff0c\u63d0\u5347\u8fc7\u6ee4\u6548\u7387\u7684\u540c\u65f6\u964d\u4f4e\u963b\u529b\uff1b<\/li>\n
            • \u4e2d\u56fd\u5efa\u7b51\u79d1\u5b66\u7814\u7a76\u9662\u53d1\u5e03\u4e86\u300a\u6d01\u51c0\u5ba4\u9ad8\u6548\u8fc7\u6ee4\u5668\u5e03\u7f6e\u8bbe\u8ba1\u6307\u5357\u300b\uff0c\u63a8\u52a8\u884c\u4e1a\u6807\u51c6\u5316\u3002<\/li>\n<\/ul>\n

              6.2 \u56fd\u5916\u7814\u7a76\u52a8\u6001<\/h3>\n

              \u56fd\u5916\u5728\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u6280\u672f\u7684\u7814\u7a76\u66f4\u4e3a\u6210\u719f\uff0c\u4ee3\u8868\u6027\u6210\u679c\u5305\u62ec\uff1a<\/p>\n

                \n
              • \u7f8e\u56fd\u52b3\u4f26\u65af\u5229\u5f17\u83ab\u5c14\u56fd\u5bb6\u5b9e\u9a8c\u5ba4\uff08LLNL\uff09\u7814\u53d1\u4e86\u667a\u80fd\u8fc7\u6ee4\u7cfb\u7edf\uff0c\u5177\u5907\u81ea\u9002\u5e94\u8c03\u8282\u529f\u80fd\uff1b<\/li>\n
              • \u5fb7\u56fdFraunhofer\u7814\u7a76\u6240\u63a8\u51fa\u57fa\u4e8eAI\u7b97\u6cd5\u7684\u8fc7\u6ee4\u5668\u5bff\u547d\u9884\u6d4b\u7cfb\u7edf\uff1b<\/li>\n
              • \u65e5\u672c\u4e09\u83f1\u91cd\u5de5\u5f00\u53d1\u4e86\u96c6\u6210\u5f0fFFU\u7cfb\u7edf\uff0c\u517c\u987e\u8282\u80fd\u4e0e\u9ad8\u6548\u8fc7\u6ee4\u3002<\/li>\n<\/ul>\n

                \u53c2\u8003\u6587\u732e\uff1a<\/p>\n

                  \n
                • Liu, Y., et al. (2022). "CFD Simulation of Airflow in Cleanrooms with HEPA Filters." Building and Environment<\/em>, Vol. 215.<\/li>\n
                • Liang, J., et al. (2021). "Development of Nanofiber-Based HEPA Filters for Semiconductor Applications." Journal of Aerosol Science<\/em>, Vol. 155.<\/li>\n
                • ASHRAE. (2020). ASHRAE Handbook\u2014HVAC Systems and Equipment<\/em>.<\/li>\n
                • ISO. (2017). ISO 29463: High Efficiency Air Filters (HEPA and ULPA)<\/em>.<\/li>\n
                • SEMI. (2003). SEMI S23-1003: Guide for Environmental, Health and Safety for Semiconductor Manufacturing Facilities<\/em>.<\/li>\n<\/ul>\n
                  \n

                  \u53c2\u8003\u6587\u732e<\/h2>\n
                    \n
                  1. ISO 29463:2017. High-efficiency filters and filter elements for removing particles in air \u2013 Part 1\u20135.<\/li>\n
                  2. ASHRAE Handbook\u2014HVAC Systems and Equipment, 2020 Edition.<\/li>\n
                  3. \u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6\u300a\u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303\u300b\uff08GB 50073-2022\uff09.<\/li>\n
                  4. \u4e2d\u56fd\u7535\u5b50\u5b66\u4f1a\u6d01\u51c0\u6280\u672f\u5206\u4f1a. \u300a\u6d01\u51c0\u5382\u623f\u901a\u98ce\u7a7a\u8c03\u8bbe\u8ba1\u624b\u518c\u300b.<\/li>\n
                  5. Camfil Group. (2022). UltraSafe\u00ae ULPA Filter Technical Data Sheet<\/em>.<\/li>\n
                  6. Donaldson Company. (2021). Torit\u00ae ULPA Filter Product Catalog<\/em>.<\/li>\n
                  7. AAF International. (2020). Ultipleat\u00ae HEPA Filter Specifications<\/em>.<\/li>\n
                  8. SEMI S23-1003: Guide for Environmental, Health and Safety for Semiconductor Manufacturing Facilities.<\/li>\n
                  9. Liu, Y., et al. (2022). "CFD Simulation of Airflow in Cleanrooms with HEPA Filters." Building and Environment<\/em>, Vol. 215.<\/li>\n
                  10. Liang, J., et al. (2021). "Development of Nanofiber-Based HEPA Filters for Semiconductor Applications." Journal of Aerosol Science<\/em>, Vol. 155.<\/li>\n
                  11. \u4e2d\u56fd\u5efa\u7b51\u79d1\u5b66\u7814\u7a76\u9662. (2022). \u300a\u6d01\u51c0\u5ba4\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u66f4\u6362\u6307\u5357\u300b.<\/li>\n
                  12. \u6e05\u534e\u5927\u5b66\u6d01\u51c0\u6280\u672f\u7814\u7a76\u4e2d\u5fc3. (2023). \u300a\u6d01\u51c0\u5ba4\u6c14\u6d41\u7ec4\u7ec7\u4f18\u5316\u7814\u7a76\u62a5\u544a\u300b.<\/li>\n
                  13. Fraunhofer Institute. (2021). AI-Based Filter Life Prediction System<\/em>.<\/li>\n
                  14. Mitsubishi Heavy Industries. (2020). Integrated FFU System for Cleanroom Applications<\/em>.<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"

                    \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u5206\u7ea7\u5e03\u7f6e\u65b9\u6848 \u5f15\u8a00 \u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u82af\u7247\u7ebf\u5bbd\u4e0d\u65ad\u7f29\u5c0f\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u4e5f\u65e5\u76ca\u63d0\u9ad8\u3002\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08High-Efficiency Particulate Air Filter\uff0c\u7b80\u79f0HEPA\uff09\u548c\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08Ultra-Low Penetration Air Filter\uff0c\u7b80\u79f0ULPA\uff09\u4f5c\u4e3a\u6d01\u51c0\u5ba4\u7a7a\u6c14\u51c0…<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-15080","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/15080","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=15080"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/15080\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=15080"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=15080"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=15080"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}