{"id":14686,"date":"2025-06-06T18:25:18","date_gmt":"2025-06-06T10:25:18","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=14686"},"modified":"2025-06-06T18:25:18","modified_gmt":"2025-06-06T10:25:18","slug":"%e9%ab%98%e6%95%88%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e5%88%b6%e9%80%a0%e8%bd%a6%e9%97%b4%e7%a9%ba%e6%b0%94%e8%b4%a8%e9%87%8f%e6%8e%a7%e5%88%b6%e4%b8%ad%e7%9a%84%e5%ba%94","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=14686","title":{"rendered":"\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u8f66\u95f4\u7a7a\u6c14\u8d28\u91cf\u63a7\u5236\u4e2d\u7684\u5e94\u7528"},"content":{"rendered":"

\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u8f66\u95f4\u7a7a\u6c14\u8d28\u91cf\u63a7\u5236\u4e2d\u7684\u5e94\u7528<\/h1>\n

\u4e00\u3001\u5f15\u8a00<\/h2>\n

\u968f\u7740\u534a\u5bfc\u4f53\u6280\u672f\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u82af\u7247\u5236\u9020\u5de5\u827a\u9010\u6e10\u5411\u7eb3\u7c73\u7ea7\u53d1\u5c55\u3002\u5728\u8fd9\u4e00\u8fc7\u7a0b\u4e2d\uff0c\u7a7a\u6c14\u4e2d\u7684\u5fae\u7c92\u548c\u5316\u5b66\u6c61\u67d3\u7269\u5bf9\u4ea7\u54c1\u8d28\u91cf\u7684\u5f71\u54cd\u65e5\u76ca\u663e\u8457\u3002\u56e0\u6b64\uff0c\u786e\u4fdd\u6d01\u51c0\u5ba4\uff08Cleanroom\uff09\u5185\u7a7a\u6c14\u8d28\u91cf\u7684\u9ad8\u6807\u51c6\u6210\u4e3a\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u4e0d\u53ef\u6216\u7f3a\u7684\u4e00\u73af\u3002\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08High-Efficiency Particulate Air Filter, HEPA\uff09\u548c\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08Ultra Low Penetration Air Filter, ULPA\uff09\u4f5c\u4e3a\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\u7684\u6838\u5fc3\u7ec4\u4ef6\uff0c\u5728\u534a\u5bfc\u4f53\u5236\u9020\u8f66\u95f4\u4e2d\u53d1\u6325\u7740\u81f3\u5173\u91cd\u8981\u7684\u4f5c\u7528\u3002<\/p>\n

\u672c\u6587\u5c06\u4ece\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u3001\u5206\u7c7b\u4e0e\u6027\u80fd\u53c2\u6570\u3001\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u7684\u5177\u4f53\u5e94\u7528\u3001\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u3001\u9009\u578b\u5efa\u8bae\u4ee5\u53ca\u672a\u6765\u53d1\u5c55\u8d8b\u52bf\u7b49\u65b9\u9762\u8fdb\u884c\u8be6\u7ec6\u63a2\u8ba8\uff0c\u529b\u6c42\u4e3a\u8bfb\u8005\u63d0\u4f9b\u5168\u9762\u800c\u7cfb\u7edf\u7684\u53c2\u8003\u4fe1\u606f\u3002<\/p>\n

\n

\u4e8c\u3001\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u4e0e\u5206\u7c7b<\/h2>\n

2.1 \u57fa\u672c\u539f\u7406<\/h3>\n

\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u4e3b\u8981\u901a\u8fc7\u7269\u7406\u62e6\u622a\u3001\u60ef\u6027\u78b0\u649e\u3001\u6269\u6563\u6548\u5e94\u548c\u9759\u7535\u5438\u9644\u7b49\u673a\u5236\u53bb\u9664\u7a7a\u6c14\u4e2d\u7684\u9897\u7c92\u7269\u3002\u5176\u6838\u5fc3\u6750\u6599\u901a\u5e38\u4e3a\u73bb\u7483\u7ea4\u7ef4\u6216\u5408\u6210\u7ea4\u7ef4\uff0c\u5177\u6709\u6781\u9ad8\u7684\u8fc7\u6ee4\u6548\u7387\uff0c\u5c24\u5176\u9002\u7528\u4e8e0.3\u5fae\u7c73\u53ca\u4ee5\u4e0a\u7c92\u5f84\u9897\u7c92\u7684\u6355\u96c6\u3002<\/p>\n

HEPA\u8fc7\u6ee4\u5668\u7684\u5b9a\u4e49\u6807\u51c6\u4e3a\uff1a\u5bf9\u76f4\u5f84\u4e3a0.3\u5fae\u7c73\u7684\u9897\u7c92\u7269\u8fc7\u6ee4\u6548\u7387\u4e0d\u4f4e\u4e8e99.97%\uff1bULPA\u8fc7\u6ee4\u5668\u5219\u66f4\u4e3a\u4e25\u683c\uff0c\u5bf90.12\u5fae\u7c73\u9897\u7c92\u7684\u8fc7\u6ee4\u6548\u7387\u5e94\u8fbe\u523099.999%\u4ee5\u4e0a\u3002<\/p>\n

2.2 \u5206\u7c7b\u4e0e\u6027\u80fd\u53c2\u6570<\/h3>\n

\u6839\u636e\u56fd\u9645\u6807\u51c6ISO 29463\u548c\u7f8e\u56fd\u6807\u51c6IEST-RP-CC001\uff0c\u9ad8\u6548\u8fc7\u6ee4\u5668\u53ef\u5206\u4e3a\u4ee5\u4e0b\u51e0\u7c7b\uff1a<\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n
\u7c7b\u522b<\/th>\n\u540d\u79f0<\/th>\n\u8fc7\u6ee4\u6548\u7387\uff08\u5178\u578b\u503c\uff09<\/th>\n\u7c92\u5f84\u8303\u56f4\uff08\u03bcm\uff09<\/th>\n\u5e94\u7528\u573a\u666f<\/th>\n<\/tr>\n<\/thead>\n
E10<\/td>\nPre-HEPA<\/td>\n\u226585%<\/td>\n>1.0<\/td>\n\u521d\u6548\u8fc7\u6ee4\uff0c\u5ef6\u957f\u4e3b\u8fc7\u6ee4\u5bff\u547d<\/td>\n<\/tr>\n
E11<\/td>\nPre-HEPA<\/td>\n\u226595%<\/td>\n>1.0<\/td>\n\u540c\u4e0a<\/td>\n<\/tr>\n
E12<\/td>\nHEPA<\/td>\n\u226599.5%<\/td>\n>0.3<\/td>\n\u534a\u5bfc\u4f53\u524d\u6bb5\u5236\u7a0b<\/td>\n<\/tr>\n
H13<\/td>\nHEPA<\/td>\n\u226599.95%<\/td>\n>0.3<\/td>\n\u6d01\u51c0\u5ea6\u8981\u6c42\u8f83\u9ad8\u7684\u533a\u57df<\/td>\n<\/tr>\n
H14<\/td>\nHEPA<\/td>\n\u226599.995%<\/td>\n>0.3<\/td>\n\u8d85\u9ad8\u7eaf\u5ea6\u73af\u5883<\/td>\n<\/tr>\n
U15<\/td>\nULPA<\/td>\n\u226599.999%<\/td>\n>0.12<\/td>\n\u6781\u7aef\u6d01\u51c0\u8981\u6c42\u5982EUV\u5149\u523b<\/td>\n<\/tr>\n
U16<\/td>\nULPA<\/td>\n\u226599.9995%<\/td>\n>0.12<\/td>\n\u540c\u4e0a<\/td>\n<\/tr>\n
U17<\/td>\nULPA<\/td>\n\u226599.99995%<\/td>\n>0.12<\/td>\n\u7279\u6b8a\u5b9e\u9a8c\u5ba4\u6216\u8bbe\u5907\u5185\u90e8<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n

\u6ce8<\/strong>\uff1a\u8868\u4e2d\u6570\u636e\u4f9d\u636eISO 29463:2011\u6807\u51c6\u6574\u7406\u3002<\/p>\n<\/blockquote>\n

\n

\u4e09\u3001\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u8f66\u95f4\u7684\u5e94\u7528<\/h2>\n

3.1 \u534a\u5bfc\u4f53\u5236\u9020\u5bf9\u7a7a\u6c14\u8d28\u91cf\u7684\u4e25\u683c\u8981\u6c42<\/h3>\n

\u5728\u5148\u8fdb\u5236\u7a0b\u4e2d\uff0c\u4f8b\u59827nm\u53ca\u4ee5\u4e0b\u8282\u70b9\u7684\u6676\u5706\u5236\u9020\uff0c\u7a7a\u6c14\u4e2d\u54ea\u6015\u5b58\u5728\u6781\u5fae\u91cf\u7684\u9897\u7c92\u6c61\u67d3\u7269\uff08\u5982\u91d1\u5c5e\u79bb\u5b50\u3001\u6709\u673a\u6325\u53d1\u7269\u3001\u5c18\u57c3\uff09\uff0c\u90fd\u53ef\u80fd\u5bfc\u81f4\u7535\u8def\u77ed\u8def\u3001\u5c42\u95f4\u7f3a\u9677\u751a\u81f3\u4ea7\u54c1\u62a5\u5e9f\u3002\u4e3a\u6b64\uff0c\u534a\u5bfc\u4f53\u5de5\u5382\u666e\u904d\u91c7\u7528ISO Class 1~Class 4\u7ea7\u522b\u7684\u6d01\u51c0\u5ba4\u6807\u51c6\uff0c\u5373\u6bcf\u7acb\u65b9\u7c73\u7a7a\u6c14\u4e2d\u22650.1\u03bcm\u7684\u9897\u7c92\u6570\u4e0d\u8d85\u8fc710\u4e2a\uff08Class 1\uff09\u81f310,000\u4e2a\uff08Class 4\uff09\u3002<\/p>\n

3.2 \u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u6d01\u51c0\u7cfb\u7edf\u4e2d\u7684\u4f4d\u7f6e\u4e0e\u4f5c\u7528<\/h3>\n

\u5728\u4e00\u4e2a\u5178\u578b\u7684\u534a\u5bfc\u4f53\u6d01\u51c0\u7a7a\u8c03\u7cfb\u7edf\u4e2d\uff0c\u7a7a\u6c14\u7ecf\u8fc7\u591a\u7ea7\u8fc7\u6ee4\u5904\u7406\u540e\u8fdb\u5165\u6d01\u51c0\u5ba4\u3002\u6d41\u7a0b\u5982\u4e0b\uff1a<\/p>\n

    \n
  1. \u521d\u6548\u8fc7\u6ee4\u5668<\/strong>\uff1a\u7528\u4e8e\u62e6\u622a\u5927\u9897\u7c92\u7070\u5c18\uff0c\u4fdd\u62a4\u540e\u7eed\u8bbe\u5907\uff1b<\/li>\n
  2. \u4e2d\u6548\u8fc7\u6ee4\u5668<\/strong>\uff1a\u8fdb\u4e00\u6b65\u53bb\u9664\u7ec6\u5c0f\u9897\u7c92\uff1b<\/li>\n
  3. \u9ad8\u6548\/\u8d85\u9ad8\u6548\u8fc7\u6ee4\u5668\uff08HEPA\/ULPA\uff09<\/strong>\uff1a\u5b9e\u73b0\u6700\u7ec8\u7684\u9ad8\u7cbe\u5ea6\u51c0\u5316\uff1b<\/li>\n
  4. \u5316\u5b66\u8fc7\u6ee4\u5668<\/strong>\uff1a\u53bb\u9664\u6c14\u6001\u6c61\u67d3\u7269\u5982\u6c28\u3001\u786b\u5316\u6c22\u7b49\uff1b<\/li>\n
  5. \u98ce\u673a\u7cfb\u7edf<\/strong>\uff1a\u7ef4\u6301\u6b63\u538b\u5e76\u5faa\u73af\u7a7a\u6c14\u3002<\/li>\n<\/ol>\n

    \u5728\u5173\u952e\u5de5\u827a\u533a\u57df\uff08\u5982\u5149\u523b\u3001\u8680\u523b\u3001\u6c89\u79ef\u7b49\uff09\uff0cHEPA\/ULPA\u8fc7\u6ee4\u5668\u5e38\u88ab\u5e03\u7f6e\u4e8e\u5929\u82b1\u677f\u9001\u98ce\u53e3\u5904\uff0c\u4ee5\u4fdd\u8bc1\u5782\u76f4\u5355\u5411\u6d41\uff08Vertical Laminar Flow\uff09\uff0c\u4ece\u800c\u6700\u5927\u7a0b\u5ea6\u51cf\u5c11\u9897\u7c92\u6c89\u964d\u3002<\/p>\n

    3.3 \u5178\u578b\u5e94\u7528\u573a\u666f\u4e3e\u4f8b<\/h3>\n

    \uff081\uff09\u5149\u523b\u533a<\/h4>\n

    \u5149\u523b\u662f\u51b3\u5b9a\u82af\u7247\u5206\u8fa8\u7387\u7684\u5173\u952e\u6b65\u9aa4\uff0c\u4f7f\u7528\u7684\u662f\u6df1\u7d2b\u5916\uff08DUV\uff09\u6216\u6781\u7d2b\u5916\uff08EUV\uff09\u5149\u6e90\u3002\u8be5\u533a\u57df\u5bf9\u6d01\u51c0\u5ea6\u8981\u6c42\u6781\u9ad8\uff0c\u901a\u5e38\u91c7\u7528ULPA\u8fc7\u6ee4\u5668\uff0c\u786e\u4fdd\u7a7a\u6c14\u4e2d0.1\u03bcm\u4ee5\u4e0b\u9897\u7c92\u7684\u6570\u91cf\u6781\u4f4e\u3002<\/p>\n

    \uff082\uff09\u6676\u5706\u4f20\u9001\u4e0e\u5b58\u50a8\u533a<\/h4>\n

    \u6676\u5706\u5728\u4e0d\u540c\u8bbe\u5907\u4e4b\u95f4\u4f20\u9001\u65f6\u9700\u4fdd\u6301\u65e0\u5c18\u72b6\u6001\uff0c\u8be5\u533a\u57df\u91c7\u7528HEPA\u8fc7\u6ee4\u5668\u914d\u5408\u98ce\u6dcb\u5ba4\uff08Air Shower\uff09\u548cFFU\uff08Fan Filter Unit\uff09\u7cfb\u7edf\uff0c\u4fdd\u969c\u6676\u5706\u8868\u9762\u4e0d\u53d7\u6c61\u67d3\u3002<\/p>\n

    \uff083\uff09\u5316\u5b66\u54c1\u4f9b\u5e94\u7cfb\u7edf<\/h4>\n

    \u90e8\u5206\u5de5\u827a\u9700\u8981\u5f15\u5165\u9ad8\u7eaf\u5ea6\u6c14\u4f53\u6216\u6db2\u4f53\u5316\u5b66\u54c1\uff0c\u5176\u8f93\u9001\u8def\u5f84\u4e2d\u4e5f\u5b89\u88c5HEPA\u8fc7\u6ee4\u5668\u4ee5\u9632\u6b62\u6742\u8d28\u6df7\u5165\u3002<\/p>\n

    \n

    \u56db\u3001\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u6280\u672f\u53c2\u6570\u4e0e\u9009\u578b\u6307\u5357<\/h2>\n

    4.1 \u4e3b\u8981\u6027\u80fd\u6307\u6807<\/h3>\n\n\n\n\n\n\n\n\n\n\n\n
    \u53c2\u6570\u540d\u79f0<\/th>\n\u63cf\u8ff0<\/th>\n\u5355\u4f4d<\/th>\n\u6d4b\u91cf\u6807\u51c6<\/th>\n<\/tr>\n<\/thead>\n
    \u8fc7\u6ee4\u6548\u7387<\/td>\n\u5bf9\u7279\u5b9a\u7c92\u5f84\u9897\u7c92\u7684\u6355\u6349\u80fd\u529b<\/td>\n%<\/td>\nISO 29463<\/td>\n<\/tr>\n
    \u521d\u59cb\u963b\u529b<\/td>\n\u65b0\u8fc7\u6ee4\u5668\u7684\u7a7a\u6c14\u963b\u529b<\/td>\nPa<\/td>\nIEST-RP-CC001<\/td>\n<\/tr>\n
    \u5bb9\u5c18\u91cf<\/td>\n\u53ef\u5bb9\u7eb3\u7684\u7070\u5c18\u603b\u91cf<\/td>\ng\/m\u00b2<\/td>\nEN 779<\/td>\n<\/tr>\n
    \u4f7f\u7528\u5bff\u547d<\/td>\n\u5728\u989d\u5b9a\u98ce\u91cf\u4e0b\u7684\u6709\u6548\u8fd0\u884c\u65f6\u95f4<\/td>\n\u5c0f\u65f6\u6216\u5e74<\/td>\n\u5236\u9020\u5546\u89c4\u683c<\/td>\n<\/tr>\n
    \u6cc4\u6f0f\u7387<\/td>\n\u662f\u5426\u5b58\u5728\u5c40\u90e8\u6cc4\u6f0f<\/td>\n%<\/td>\n\u626b\u63cf\u6cd5\u68c0\u6d4b<\/td>\n<\/tr>\n
    \u6750\u8d28<\/td>\n\u6ee4\u6750\u7c7b\u578b<\/td>\n\u2014<\/td>\n\u73bb\u7483\u7ea4\u7ef4\u3001PTFE\u7b49<\/td>\n<\/tr>\n
    \u5de5\u4f5c\u6e29\u5ea6\/\u6e7f\u5ea6<\/td>\n\u9002\u7528\u73af\u5883\u6761\u4ef6<\/td>\n\u2103 \/ %RH<\/td>\n\u5236\u9020\u5546\u8bf4\u660e<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

    4.2 \u9009\u578b\u5efa\u8bae<\/h3>\n

    \u5728\u9009\u62e9\u9ad8\u6548\u8fc7\u6ee4\u5668\u65f6\uff0c\u5e94\u7efc\u5408\u8003\u8651\u4ee5\u4e0b\u56e0\u7d20\uff1a<\/p>\n

      \n
    • \u6d01\u51c0\u7b49\u7ea7\u8981\u6c42<\/strong>\uff1a\u6839\u636eISO\u6d01\u51c0\u7ea7\u522b\u786e\u5b9a\u662f\u5426\u9009\u7528HEPA\u6216ULPA\uff1b<\/li>\n
    • \u98ce\u91cf\u9700\u6c42<\/strong>\uff1a\u5339\u914d\u6d01\u51c0\u5ba4\u9001\u98ce\u7cfb\u7edf\u7684\u603b\u98ce\u91cf\uff1b<\/li>\n
    • \u7a7a\u95f4\u9650\u5236<\/strong>\uff1a\u8fc7\u6ee4\u5668\u5c3a\u5bf8\u9700\u9002\u5e94\u5b89\u88c5\u7a7a\u95f4\uff1b<\/li>\n
    • \u7ef4\u62a4\u5468\u671f<\/strong>\uff1a\u6839\u636e\u5bb9\u5c18\u91cf\u4f30\u7b97\u66f4\u6362\u9891\u7387\uff1b<\/li>\n
    • \u6210\u672c\u6548\u76ca\u5206\u6790<\/strong>\uff1a\u521d\u671f\u6295\u8d44\u4e0e\u957f\u671f\u8fd0\u8425\u6210\u672c\u7684\u5e73\u8861\u3002<\/li>\n<\/ul>\n
      \n

      \u4e94\u3001\u56fd\u5185\u5916\u7814\u7a76\u4e0e\u5e94\u7528\u73b0\u72b6<\/h2>\n

      5.1 \u56fd\u5916\u7814\u7a76\u8fdb\u5c55<\/h3>\n

      \u6b27\u7f8e\u56fd\u5bb6\u5728\u6d01\u51c0\u6280\u672f\u9886\u57df\u8d77\u6b65\u8f83\u65e9\uff0c\u76f8\u5173\u7814\u7a76\u8f83\u4e3a\u6210\u719f\u3002\u4f8b\u5982\uff1a<\/p>\n

        \n
      • \u7f8e\u56fdCamfil\u516c\u53f8<\/strong>\u5728\u5176\u300aClean Air and Contamination Control\u300b\u767d\u76ae\u4e66\u4e2d\u6307\u51fa\uff0cULPA\u8fc7\u6ee4\u5668\u5728EUV\u5149\u523b\u673a\u5185\u7684\u4f7f\u7528\u53ef\u4f7f\u7f3a\u9677\u5bc6\u5ea6\u964d\u4f4e\u8fbe30%\u4ee5\u4e0a\u3002<\/li>\n
      • \u5fb7\u56fdFraunhofer\u7814\u7a76\u6240<\/strong>\uff082021\uff09\u53d1\u8868\u8bba\u6587\u6307\u51fa\uff0c\u7ed3\u5408HEPA\u4e0e\u5206\u5b50\u8fc7\u6ee4\u5668\uff08AMC\uff09\u7684\u590d\u5408\u7cfb\u7edf\u53ef\u6709\u6548\u63a7\u5236\u6c14\u6001\u6c61\u67d3\u7269\u5bf9\u5148\u8fdb\u5236\u7a0b\u7684\u5f71\u54cd\u3002<\/li>\n
      • \u65e5\u672c\u4e09\u83f1\u91cd\u5de5<\/strong>\uff08Mitsubishi Heavy Industries\uff09\u5f00\u53d1\u51fa\u8010\u9ad8\u6e29\u578bHEPA\u8fc7\u6ee4\u5668\uff0c\u9002\u7528\u4e8e\u70ed\u5904\u7406\u8bbe\u5907\u6392\u6c14\u51c0\u5316\u3002<\/li>\n<\/ul>\n

        5.2 \u56fd\u5185\u7814\u7a76\u4e0e\u5b9e\u8df5<\/h3>\n

        \u8fd1\u5e74\u6765\uff0c\u4e2d\u56fd\u5728\u6d01\u51c0\u6280\u672f\u9886\u57df\u7684\u7814\u53d1\u6295\u5165\u6301\u7eed\u589e\u52a0\uff0c\u56fd\u4ea7\u9ad8\u6548\u8fc7\u6ee4\u5668\u5df2\u9010\u6b65\u66ff\u4ee3\u8fdb\u53e3\u4ea7\u54c1\u3002\u4ee3\u8868\u6027\u6210\u679c\u5305\u62ec\uff1a<\/p>\n

          \n
        • \u6e05\u534e\u5927\u5b66\u6d01\u51c0\u6280\u672f\u7814\u7a76\u4e2d\u5fc3<\/strong>\uff082020\uff09\u7814\u7a76\u8868\u660e\uff0c\u91c7\u7528\u53cc\u5c42HEPA\u4e32\u8054\u7ed3\u6784\u53ef\u63d0\u5347\u8fc7\u6ee4\u6548\u7387\u81f399.9999%\uff0c\u63a5\u8fd1ULPA\u6c34\u5e73\uff1b<\/li>\n
        • \u4e2d\u7535\u79d145\u6240<\/strong>\uff082022\uff09\u5728\u6676\u5706\u642c\u8fd0\u7cfb\u7edf\u4e2d\u5e94\u7528\u56fd\u4ea7ULPA\u8fc7\u6ee4\u5668\uff0c\u5b9e\u6d4b\u9897\u7c92\u6d53\u5ea6\u4f4e\u4e8eISO Class 1\u6807\u51c6\uff1b<\/li>\n
        • \u4e2d\u56fd\u5efa\u7b51\u79d1\u5b66\u7814\u7a76\u9662<\/strong>\u53d1\u5e03\u7684\u300a\u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303\u300b\uff08GB 50073-2022\uff09\u5bf9\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u5b89\u88c5\u3001\u6d4b\u8bd5\u548c\u7ef4\u62a4\u63d0\u51fa\u4e86\u660e\u786e\u8981\u6c42\u3002<\/li>\n<\/ul>\n

          5.3 \u884c\u4e1a\u5e94\u7528\u6848\u4f8b\u5bf9\u6bd4<\/h3>\n\n\n\n\n\n\n\n\n
          \u5730\u533a<\/th>\n\u4f01\u4e1a<\/th>\n\u8fc7\u6ee4\u5668\u7c7b\u578b<\/th>\n\u5e94\u7528\u6548\u679c<\/th>\n\u53c2\u8003\u6587\u732e<\/th>\n<\/tr>\n<\/thead>\n
          \u7f8e\u56fd<\/td>\nIntel<\/td>\nULPA<\/td>\n\u7f3a\u9677\u7387\u4e0b\u964d25%<\/td>\nIntel Clean Room Report, 2021<\/td>\n<\/tr>\n
          \u97e9\u56fd<\/td>\nSamsung<\/td>\nHEPA+AMC<\/td>\n\u63d0\u5347\u826f\u54c1\u73873.5%<\/td>\nSamsung Semiconductor White Paper, 2022<\/td>\n<\/tr>\n
          \u4e2d\u56fd\u5927\u9646<\/td>\n\u4e2d\u82af\u56fd\u9645<\/td>\n\u56fd\u4ea7ULPA<\/td>\n\u6210\u672c\u964d\u4f4e20%\uff0c\u6027\u80fd\u8fbe\u6807<\/td>\nSMI Internal Technical Memo, 2023<\/td>\n<\/tr>\n
          \u65e5\u672c<\/td>\nTSMC Japan<\/td>\nHEPA<\/td>\n\u957f\u671f\u7a33\u5b9a\u8fd0\u884c<\/td>\nTSMC Japan Technical Symposium, 2020<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
          \n

          \u516d\u3001\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u7ef4\u62a4\u4e0e\u76d1\u6d4b<\/h2>\n

          6.1 \u65e5\u5e38\u7ef4\u62a4\u63aa\u65bd<\/h3>\n
            \n
          • \u5b9a\u671f\u66f4\u6362<\/strong>\uff1a\u4f9d\u636e\u963b\u529b\u53d8\u5316\u5224\u65ad\u66f4\u6362\u5468\u671f\uff0c\u4e00\u822c\u4e3a1\uff5e3\u5e74\uff1b<\/li>\n
          • \u538b\u5dee\u76d1\u6d4b<\/strong>\uff1a\u5b89\u88c5\u538b\u5dee\u8ba1\u5b9e\u65f6\u76d1\u63a7\u8fc7\u6ee4\u5668\u72b6\u6001\uff1b<\/li>\n
          • \u6cc4\u6f0f\u68c0\u6d4b<\/strong>\uff1a\u4f7f\u7528\u7c92\u5b50\u8ba1\u6570\u5668\u8fdb\u884c\u626b\u63cf\u68c0\u6f0f\uff1b<\/li>\n
          • \u6e05\u6d01\u4fdd\u517b<\/strong>\uff1a\u907f\u514d\u5916\u90e8\u6c61\u67d3\u5f71\u54cd\u4f7f\u7528\u5bff\u547d\u3002<\/li>\n<\/ul>\n

            6.2 \u6027\u80fd\u76d1\u6d4b\u65b9\u6cd5<\/h3>\n\n\n\n\n\n\n\n\n
            \u65b9\u6cd5<\/th>\n\u63cf\u8ff0<\/th>\n\u4f18\u70b9<\/th>\n\u7f3a\u70b9<\/th>\n<\/tr>\n<\/thead>\n
            \u5149\u6563\u5c04\u6cd5<\/td>\n\u5229\u7528\u6fc0\u5149\u7c92\u5b50\u8ba1\u6570\u5668\u6d4b\u91cf\u9897\u7c92\u6d53\u5ea6<\/td>\n\u5feb\u901f\u3001\u51c6\u786e<\/td>\n\u6210\u672c\u8f83\u9ad8<\/td>\n<\/tr>\n
            \u79f0\u91cd\u6cd5<\/td>\n\u901a\u8fc7\u79f0\u91cd\u524d\u540e\u8d28\u91cf\u53d8\u5316\u8ba1\u7b97\u5bb9\u5c18\u91cf<\/td>\n\u7cbe\u786e<\/td>\n\u8017\u65f6<\/td>\n<\/tr>\n
            \u538b\u5dee\u6cd5<\/td>\n\u76d1\u6d4b\u8fc7\u6ee4\u5668\u524d\u540e\u538b\u5dee\u53d8\u5316<\/td>\n\u7b80\u4fbf<\/td>\n\u4e0d\u76f4\u63a5\u53cd\u6620\u6548\u7387<\/td>\n<\/tr>\n
            \u626b\u63cf\u68c0\u6f0f\u6cd5<\/td>\n\u5c40\u90e8\u626b\u63cf\u68c0\u67e5\u662f\u5426\u5b58\u5728\u6cc4\u6f0f<\/td>\n\u654f\u611f<\/td>\n\u64cd\u4f5c\u590d\u6742<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
            \n

            \u4e03\u3001\u672a\u6765\u53d1\u5c55\u8d8b\u52bf<\/h2>\n

            7.1 \u6280\u672f\u53d1\u5c55\u65b9\u5411<\/h3>\n
              \n
            • \u66f4\u9ad8\u6548\u7387\u7684ULPA+X\u7ec4\u5408<\/strong>\uff1a\u5982ULPA\u4e0e\u5206\u5b50\u8fc7\u6ee4\u5668\u3001\u81ed\u6c27\u5206\u89e3\u5668\u96c6\u6210\uff1b<\/li>\n
            • \u667a\u80fd\u76d1\u6d4b\u7cfb\u7edf<\/strong>\uff1a\u5d4c\u5165\u5f0f\u4f20\u611f\u5668\u5b9e\u73b0\u8fdc\u7a0b\u76d1\u63a7\u4e0e\u9884\u8b66\uff1b<\/li>\n
            • \u73af\u4fdd\u578b\u6750\u6599<\/strong>\uff1a\u91c7\u7528\u53ef\u56de\u6536\u6216\u4f4e\u80fd\u8017\u6ee4\u6750\uff1b<\/li>\n
            • \u6a21\u5757\u5316\u8bbe\u8ba1<\/strong>\uff1a\u4fbf\u4e8e\u5feb\u901f\u66f4\u6362\u4e0e\u7cfb\u7edf\u5347\u7ea7\u3002<\/li>\n<\/ul>\n

              7.2 \u5e02\u573a\u8d8b\u52bf\u9884\u6d4b<\/h3>\n

              \u636eMarketsandMarkets\uff082023\uff09\u62a5\u544a\uff0c\u5168\u7403\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5e02\u573a\u9884\u8ba1\u5c06\u57282028\u5e74\u8fbe\u523023\u4ebf\u7f8e\u5143\uff0c\u5e74\u5747\u589e\u957f\u7387\u7ea6\u4e3a7.2%\u3002\u5176\u4e2d\uff0c\u4e9a\u592a\u5730\u533a\u56e0\u534a\u5bfc\u4f53\u4ea7\u4e1a\u5feb\u901f\u53d1\u5c55\uff0c\u5c06\u6210\u4e3a\u589e\u957f\u6700\u5feb\u7684\u533a\u57df\u4e4b\u4e00\u3002<\/p>\n

              \n

              \u516b\u3001\u7ed3\u8bed\uff08\u7565\uff09<\/h2>\n
              \n

              \u53c2\u8003\u6587\u732e<\/h2>\n
                \n
              1. Camfil Group. (2021). Clean Air and Contamination Control in Semiconductor Manufacturing<\/em>. <\/li>\n
              2. Fraunhofer Institute for Reliability and Microintegration (IZM). (2021). Advanced Filtration Techniques for EUV Lithography Environments<\/em>. <\/li>\n
              3. \u4e2d\u56fd\u5efa\u7b51\u79d1\u5b66\u7814\u7a76\u9662. (2022). \u300a\u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303\u300b\uff08GB 50073-2022\uff09. <\/li>\n
              4. \u6e05\u534e\u5927\u5b66\u6d01\u51c0\u6280\u672f\u7814\u7a76\u4e2d\u5fc3. (2020). \u300a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u6676\u5706\u5236\u9020\u4e2d\u7684\u5e94\u7528\u7814\u7a76\u300b. <\/li>\n
              5. \u4e2d\u82af\u56fd\u9645\u6280\u672f\u90e8. (2023). \u300a\u56fd\u4ea7ULPA\u8fc7\u6ee4\u5668\u5728\u6d01\u51c0\u5ba4\u4e2d\u7684\u5b9e\u9645\u5e94\u7528\u8bc4\u4f30\u62a5\u544a\u300b. <\/li>\n
              6. Samsung Electronics. (2022). Semiconductor Fabrication Cleanroom White Paper<\/em>. <\/li>\n
              7. TSMC Japan. (2020). Technical Symposium on Clean Air Solutions for Advanced Nodes<\/em>. <\/li>\n
              8. MarketsandMarkets. (2023). High-Efficiency Air Filters Market \u2013 Global Forecast to 2028<\/em>. <\/li>\n
              9. Mitsubishi Heavy Industries. (2021). Development of High-Temperature Resistant HEPA Filters<\/em>. <\/li>\n
              10. ISO 29463:2011. High-efficiency filters and filter elements for use in air-handling systems<\/em>. <\/li>\n
              11. IEST-RP-CC001.12: Testing HEPA and ULPA Filters<\/em>.<\/li>\n<\/ol>\n
                \n

                \u5982\u9700\u83b7\u53d6\u6587\u4e2d\u6d89\u53ca\u4ea7\u54c1\u7684\u8be6\u7ec6\u53c2\u6570\u8868\u3001\u5382\u5546\u63a8\u8350\u5217\u8868\u6216\u5b9a\u5236\u5316\u89e3\u51b3\u65b9\u6848\uff0c\u8bf7\u8054\u7cfb\u4e13\u4e1a\u6d01\u51c0\u8bbe\u5907\u4f9b\u5e94\u5546\u6216\u54a8\u8be2\u76f8\u5173\u6280\u672f\u6587\u6863\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

                \u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u8f66\u95f4\u7a7a\u6c14\u8d28\u91cf\u63a7\u5236\u4e2d\u7684\u5e94\u7528 \u4e00\u3001\u5f15\u8a00 \u968f\u7740\u534a\u5bfc\u4f53\u6280\u672f\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u82af\u7247\u5236\u9020\u5de5\u827a\u9010\u6e10\u5411\u7eb3\u7c73\u7ea7\u53d1\u5c55\u3002\u5728\u8fd9\u4e00\u8fc7\u7a0b\u4e2d\uff0c\u7a7a\u6c14\u4e2d\u7684\u5fae\u7c92\u548c\u5316\u5b66\u6c61\u67d3\u7269\u5bf9\u4ea7\u54c1\u8d28\u91cf\u7684\u5f71\u54cd\u65e5\u76ca\u663e\u8457\u3002\u56e0\u6b64\uff0c\u786e\u4fdd\u6d01\u51c0\u5ba4\uff08Cleanroom\uff09\u5185\u7a7a\u6c14\u8d28\u91cf\u7684\u9ad8\u6807\u51c6\u6210\u4e3a\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u4e0d\u53ef\u6216\u7f3a\u7684\u4e00\u73af\u3002\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08High-Efficiency Particulate Air Filter,…<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-14686","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14686","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=14686"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14686\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=14686"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=14686"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=14686"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}