{"id":14561,"date":"2025-06-04T15:49:30","date_gmt":"2025-06-04T07:49:30","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=14561"},"modified":"2025-06-04T15:49:30","modified_gmt":"2025-06-04T07:49:30","slug":"%e6%8e%a2%e8%ae%a8%e4%ba%9a%e9%ab%98%e6%95%88%e8%bf%87%e6%bb%a4%e5%99%a8%e5%af%b9%e5%be%ae%e7%94%b5%e5%ad%90%e5%88%b6%e9%80%a0%e4%b8%9a%e7%a9%ba%e6%b0%94%e8%b4%a8%e9%87%8f%e7%9a%84%e5%bd%b1%e5%93%8d","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=14561","title":{"rendered":"\u63a2\u8ba8\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u5bf9\u5fae\u7535\u5b50\u5236\u9020\u4e1a\u7a7a\u6c14\u8d28\u91cf\u7684\u5f71\u54cd"},"content":{"rendered":"<h1>\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u5fae\u7535\u5b50\u5236\u9020\u4e1a\u7a7a\u6c14\u8d28\u91cf\u63a7\u5236\u4e2d\u7684\u5e94\u7528\u7814\u7a76<\/h1>\n<h2>\u5f15\u8a00\uff1a\u5fae\u7535\u5b50\u5236\u9020\u5bf9\u7a7a\u6c14\u8d28\u91cf\u7684\u9ad8\u8981\u6c42<\/h2>\n<p>\u968f\u7740\u534a\u5bfc\u4f53\u3001\u96c6\u6210\u7535\u8def\u3001\u5e73\u677f\u663e\u793a\u7b49\u5fae\u7535\u5b50\u6280\u672f\u7684\u98de\u901f\u53d1\u5c55\uff0c\u5236\u9020\u5de5\u827a\u65e5\u76ca\u7cbe\u5bc6\u5316\uff0c\u4ea7\u54c1\u7ebf\u5bbd\u4e0d\u65ad\u7f29\u5c0f\u81f3\u7eb3\u7c73\u7ea7\u522b\u3002\u8fd9\u4e00\u8d8b\u52bf\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u63d0\u51fa\u4e86\u524d\u6240\u672a\u6709\u7684\u9ad8\u6807\u51c6\u3002\u7a7a\u6c14\u4e2d\u7684\u5c18\u57c3\u7c92\u5b50\u3001\u7ec6\u83cc\u3001\u6325\u53d1\u6027\u6709\u673a\u7269\uff08VOCs\uff09\u53ca\u91d1\u5c5e\u79bb\u5b50\u7b49\u6c61\u67d3\u7269\uff0c\u5373\u4f7f\u4ee5\u6781\u4f4e\u6d53\u5ea6\u5b58\u5728\uff0c\u4e5f\u53ef\u80fd\u5bfc\u81f4\u82af\u7247\u7f3a\u9677\u3001\u7535\u8def\u77ed\u8def\u6216\u8bbe\u5907\u6545\u969c\uff0c\u4ece\u800c\u4e25\u91cd\u5f71\u54cd\u4ea7\u54c1\u8d28\u91cf\u548c\u826f\u54c1\u7387\u3002<\/p>\n<p>\u5728\u6b64\u80cc\u666f\u4e0b\uff0c\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\u6210\u4e3a\u4fdd\u969c\u5fae\u7535\u5b50\u5236\u9020\u8f66\u95f4\u6d01\u51c0\u5ea6\u7684\u6838\u5fc3\u8bbe\u65bd\uff0c\u800c\u4f5c\u4e3a\u5176\u4e2d\u5173\u952e\u90e8\u4ef6\u4e4b\u4e00\u7684<strong>\u4e9a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08Sub-HEPA Filter\uff09<\/strong>\uff0c\u56e0\u5176\u4f18\u5f02\u7684\u8fc7\u6ee4\u6027\u80fd\u4e0e\u7ecf\u6d4e\u6027\uff0c\u5728\u6d01\u51c0\u5ba4\u7cfb\u7edf\u4e2d\u88ab\u5e7f\u6cdb\u91c7\u7528\u3002\u672c\u6587\u5c06\u56f4\u7ed5\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u6280\u672f\u53c2\u6570\u3001\u5de5\u4f5c\u539f\u7406\u3001\u5e94\u7528\u573a\u666f\u53ca\u5176\u5bf9\u5fae\u7535\u5b50\u5236\u9020\u4e1a\u7a7a\u6c14\u8d28\u91cf\u7684\u5b9e\u9645\u5f71\u54cd\u8fdb\u884c\u7cfb\u7edf\u63a2\u8ba8\uff0c\u5e76\u7ed3\u5408\u56fd\u5185\u5916\u76f8\u5173\u7814\u7a76\u6210\u679c\u8fdb\u884c\u5206\u6790\u3002<\/p>\n<hr \/>\n<h2>\u4e00\u3001\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u6982\u5ff5\u4e0e\u5206\u7c7b<\/h2>\n<h3>1.1 \u5b9a\u4e49\u4e0e\u6807\u51c6<\/h3>\n<p>\u6839\u636e\u300aGB\/T 14295-2008 \u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b\u56fd\u5bb6\u6807\u51c6\uff0c\u4e9a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u662f\u6307\u5bf9\u7c92\u5f84\u22650.5\u03bcm\u7684\u9897\u7c92\u5177\u6709\u8f83\u9ad8\u8fc7\u6ee4\u6548\u7387\uff08\u4e00\u822c\u4e3a95%~99.9%\uff09\uff0c\u5176\u6548\u7387\u4ecb\u4e8e\u9ad8\u4e2d\u6548\u4e0e\u9ad8\u6548\u8fc7\u6ee4\u5668\u4e4b\u95f4\u7684\u4e00\u7c7b\u7a7a\u6c14\u8fc7\u6ee4\u5668\u3002\u5176\u6027\u80fd\u6307\u6807\u901a\u5e38\u5305\u62ec\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u6307\u6807<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387\uff08\u22650.5\u03bcm\uff09<\/td>\n<td>\u226595%\uff0c\u226499.9%<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u59cb\u963b\u529b<\/td>\n<td>\u2264120 Pa<\/td>\n<\/tr>\n<tr>\n<td>\u989d\u5b9a\u98ce\u91cf\u4e0b\u7684\u5bb9\u5c18\u91cf<\/td>\n<td>\u2265400 g<\/td>\n<\/tr>\n<tr>\n<td>\u4f7f\u7528\u5bff\u547d<\/td>\n<td>6\uff5e12\u4e2a\u6708\uff08\u89c6\u5de5\u51b5\uff09<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u76f8\u6bd4\u9ad8\u6548\u8fc7\u6ee4\u5668\uff08HEPA\uff09\uff0c\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u6210\u672c\u548c\u7ef4\u62a4\u5468\u671f\u4e0a\u66f4\u5177\u4f18\u52bf\uff1b\u76f8\u8f83\u4e8e\u4e2d\u6548\u8fc7\u6ee4\u5668\uff0c\u5176\u51c0\u5316\u80fd\u529b\u66f4\u5f3a\uff0c\u56e0\u6b64\u5e38\u7528\u4e8e\u6d01\u51c0\u5ea6\u7b49\u7ea7\u8f83\u9ad8\u7684\u573a\u6240\uff0c\u5982Class 10,000\u7ea7\uff08ISO 7\uff09\u81f3Class 1,000\u7ea7\uff08ISO 6\uff09\u4e4b\u95f4\u7684\u6d01\u51c0\u533a\u57df\u3002<\/p>\n<h3>1.2 \u5206\u7c7b\u65b9\u5f0f<\/h3>\n<p>\u6309\u7167\u6750\u6599\u7ed3\u6784\u5212\u5206\uff0c\u5e38\u89c1\u7684\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u7c7b\u578b\u5305\u62ec\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u7c7b\u578b<\/th>\n<th>\u6750\u6599<\/th>\n<th>\u7279\u70b9<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u888b\u5f0f\u8fc7\u6ee4\u5668<\/td>\n<td>\u5408\u6210\u7ea4\u7ef4\u3001\u73bb\u7ea4\u590d\u5408\u6750\u6599<\/td>\n<td>\u5bb9\u5c18\u91cf\u5927\uff0c\u9002\u7528\u4e8e\u5927\u98ce\u91cf\u7cfb\u7edf<\/td>\n<\/tr>\n<tr>\n<td>\u677f\u5f0f\u8fc7\u6ee4\u5668<\/td>\n<td>\u65e0\u7eba\u5e03\u3001\u73bb\u7ea4\u7eb8<\/td>\n<td>\u7ed3\u6784\u7d27\u51d1\uff0c\u9002\u7528\u4e8e\u7a7a\u95f4\u53d7\u9650\u573a\u5408<\/td>\n<\/tr>\n<tr>\n<td>\u6298\u53e0\u5f0f\u8fc7\u6ee4\u5668<\/td>\n<td>\u5fae\u5b54\u6ee4\u819c+\u652f\u6491\u9aa8\u67b6<\/td>\n<td>\u9ad8\u6548\u3001\u4f4e\u963b\uff0c\u9002\u5408\u9ad8\u7cbe\u5ea6\u6d01\u51c0\u73af\u5883<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6309\u5b89\u88c5\u4f4d\u7f6e\u53ef\u5206\u4e3a<strong>\u9884\u8fc7\u6ee4\u5668<\/strong>\u3001<strong>\u4e3b\u8fc7\u6ee4\u5668<\/strong>\u548c<strong>\u7ec8\u7aef\u8fc7\u6ee4\u5668<\/strong>\uff0c\u5728\u591a\u7ea7\u8fc7\u6ee4\u7cfb\u7edf\u4e2d\u627f\u62c5\u4e0d\u540c\u9636\u6bb5\u7684\u51c0\u5316\u4efb\u52a1\u3002<\/p>\n<hr \/>\n<h2>\u4e8c\u3001\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u5de5\u4f5c\u539f\u7406\u4e0e\u6027\u80fd\u6d4b\u8bd5\u65b9\u6cd5<\/h2>\n<h3>2.1 \u5de5\u4f5c\u539f\u7406<\/h3>\n<p>\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u4e3b\u8981\u4f9d\u8d56\u4ee5\u4e0b\u51e0\u79cd\u7269\u7406\u673a\u5236\u5b9e\u73b0\u9897\u7c92\u7269\u6355\u96c6\uff1a<\/p>\n<ul>\n<li><strong>\u62e6\u622a\u6548\u5e94<\/strong>\uff1a\u5f53\u7c92\u5b50\u8fd0\u52a8\u8f68\u8ff9\u63a5\u8fd1\u7ea4\u7ef4\u65f6\uff0c\u56e0\u63a5\u89e6\u7ea4\u7ef4\u8868\u9762\u800c\u88ab\u6355\u83b7\uff1b<\/li>\n<li><strong>\u60ef\u6027\u6c89\u79ef<\/strong>\uff1a\u8f83\u5927\u9897\u7c92\u7531\u4e8e\u60ef\u6027\u4f5c\u7528\u504f\u79bb\u6d41\u7ebf\uff0c\u649e\u51fb\u7ea4\u7ef4\u5e76\u6ede\u7559\uff1b<\/li>\n<li><strong>\u6269\u6563\u6548\u5e94<\/strong>\uff1a\u5fae\u5c0f\u9897\u7c92\u53d7\u5e03\u6717\u8fd0\u52a8\u5f71\u54cd\uff0c\u968f\u673a\u8fd0\u52a8\u4e2d\u4e0e\u7ea4\u7ef4\u63a5\u89e6\uff1b<\/li>\n<li><strong>\u9759\u7535\u5438\u9644<\/strong>\uff1a\u90e8\u5206\u6ee4\u6750\u5e26\u7535\uff0c\u53ef\u589e\u5f3a\u5bf9\u7ec6\u5c0f\u9897\u7c92\u7684\u5438\u9644\u529b\u3002<\/li>\n<\/ul>\n<p>\u8fd9\u4e9b\u673a\u5236\u5171\u540c\u4f5c\u7528\uff0c\u4f7f\u5f97\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u80fd\u591f\u5728\u8f83\u4f4e\u538b\u964d\u4e0b\u5b9e\u73b0\u8f83\u9ad8\u7684\u8fc7\u6ee4\u6548\u7387\u3002<\/p>\n<h3>2.2 \u6027\u80fd\u6d4b\u8bd5\u6807\u51c6\u4e0e\u65b9\u6cd5<\/h3>\n<p>\u76ee\u524d\u56fd\u9645\u4e0a\u901a\u7528\u7684\u6d4b\u8bd5\u6807\u51c6\u5305\u62ec\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6807\u51c6\u540d\u79f0<\/th>\n<th>\u7ec4\u7ec7\u673a\u6784<\/th>\n<th>\u4e3b\u8981\u5185\u5bb9<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>EN 779:2012<\/td>\n<td>CEN\uff08\u6b27\u6d32\u6807\u51c6\u5316\u59d4\u5458\u4f1a\uff09<\/td>\n<td>\u89c4\u5b9a\u4e86F7-F9\u7ea7\u8fc7\u6ee4\u5668\u7684\u6d4b\u8bd5\u65b9\u6cd5<\/td>\n<\/tr>\n<tr>\n<td>ISO 16890<\/td>\n<td>\u56fd\u9645\u6807\u51c6\u5316\u7ec4\u7ec7<\/td>\n<td>\u57fa\u4e8ePM\u8d28\u91cf\u5206\u7ea7\u7684\u65b0\u4e00\u4ee3\u7a7a\u6c14\u8fc7\u6ee4\u5668\u8bc4\u4ef7\u4f53\u7cfb<\/td>\n<\/tr>\n<tr>\n<td>JIS B 9927<\/td>\n<td>\u65e5\u672c\u5de5\u4e1a\u6807\u51c6\u534f\u4f1a<\/td>\n<td>\u9002\u7528\u4e8e\u65e5\u672c\u5e02\u573a\u7684\u7a7a\u6c14\u8fc7\u6ee4\u5668\u6d4b\u8bd5\u89c4\u8303<\/td>\n<\/tr>\n<tr>\n<td>GB\/T 14295-2008<\/td>\n<td>\u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6\u5316\u7ba1\u7406\u59d4\u5458\u4f1a<\/td>\n<td>\u6211\u56fd\u73b0\u884c\u7a7a\u6c14\u8fc7\u6ee4\u5668\u56fd\u5bb6\u6807\u51c6<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6d4b\u8bd5\u9879\u76ee\u4e3b\u8981\u5305\u62ec\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6d4b\u8bd5\u9879\u76ee<\/th>\n<th>\u65b9\u6cd5\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387<\/td>\n<td>\u4f7f\u7528NaCl\u6c14\u6eb6\u80f6\u6216DEHS\u6c14\u6eb6\u80f6\u8fdb\u884c\u7a7f\u900f\u7387\u6d4b\u8bd5<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u59cb\u963b\u529b<\/td>\n<td>\u5728\u989d\u5b9a\u98ce\u91cf\u4e0b\u6d4b\u91cf\u8fc7\u6ee4\u5668\u524d\u540e\u538b\u5dee<\/td>\n<\/tr>\n<tr>\n<td>\u5bb9\u5c18\u91cf<\/td>\n<td>\u6a21\u62df\u5b9e\u9645\u8fd0\u884c\u8fc7\u7a0b\u4e2d\u7684\u7c89\u5c18\u8d1f\u8f7d\u80fd\u529b<\/td>\n<\/tr>\n<tr>\n<td>\u6cc4\u6f0f\u68c0\u6d4b<\/td>\n<td>\u901a\u8fc7\u626b\u63cf\u68c0\u6f0f\u6cd5\u68c0\u67e5\u6ee4\u82af\u5b8c\u6574\u6027<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u4e09\u3001\u5fae\u7535\u5b50\u5236\u9020\u4e1a\u7684\u7a7a\u6c14\u8d28\u91cf\u9700\u6c42\u4e0e\u6311\u6218<\/h2>\n<h3>3.1 \u5178\u578b\u6c61\u67d3\u6e90\u4e0e\u5371\u5bb3<\/h3>\n<p>\u5fae\u7535\u5b50\u5236\u9020\u8f66\u95f4\u4e2d\u5e38\u89c1\u7684\u7a7a\u6c14\u6c61\u67d3\u7269\u79cd\u7c7b\u7e41\u591a\uff0c\u4e3b\u8981\u5305\u62ec\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6c61\u67d3\u7269\u7c7b\u522b<\/th>\n<th>\u6765\u6e90<\/th>\n<th>\u5371\u5bb3<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5c18\u57c3\u7c92\u5b50<\/td>\n<td>\u4eba\u5458\u6d3b\u52a8\u3001\u8bbe\u5907\u78e8\u635f\u3001\u5916\u90e8\u7a7a\u6c14<\/td>\n<td>\u5bfc\u81f4\u6676\u5706\u5212\u4f24\u3001\u7ebf\u8def\u5835\u585e<\/td>\n<\/tr>\n<tr>\n<td>\u7ec6\u83cc\u5fae\u751f\u7269<\/td>\n<td>\u4eba\u4f53\u76ae\u80a4\u3001\u901a\u98ce\u7cfb\u7edf<\/td>\n<td>\u5f15\u8d77\u751f\u7269\u6c61\u67d3\uff0c\u5f71\u54cd\u751f\u7269\u6d01\u51c0\u533a<\/td>\n<\/tr>\n<tr>\n<td>VOCs<\/td>\n<td>\u5316\u5b66\u8bd5\u5242\u3001\u6e05\u6d17\u5242\u3001\u8bbe\u5907\u6392\u653e<\/td>\n<td>\u8150\u8680\u8bbe\u5907\uff0c\u5e72\u6270\u5149\u523b\u5de5\u827a<\/td>\n<\/tr>\n<tr>\n<td>\u91d1\u5c5e\u79bb\u5b50<\/td>\n<td>\u8bbe\u5907\u8150\u8680\u3001\u5de5\u5177\u78e8\u635f<\/td>\n<td>\u5f15\u8d77\u5bfc\u7535\u6027\u5f02\u5e38\uff0c\u5f71\u54cd\u7535\u8def\u6027\u80fd<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u7279\u522b\u662f\u5728\u5148\u8fdb\u5236\u7a0b\u4e2d\uff0c\u5982FinFET\u3001GAA\u6676\u4f53\u7ba1\u7b49\u5668\u4ef6\u5236\u9020\u8fc7\u7a0b\u4e2d\uff0c\u7a7a\u6c14\u4e2d\u76f4\u5f84\u5c0f\u4e8e0.1\u03bcm\u7684\u8d85\u7ec6\u9897\u7c92\u90fd\u53ef\u80fd\u9020\u6210\u81f4\u547d\u7f3a\u9677\u3002\u56e0\u6b64\uff0c\u6784\u5efa\u591a\u7ea7\u8fc7\u6ee4\u7cfb\u7edf\u662f\u4fdd\u969c\u7a7a\u6c14\u8d28\u91cf\u7684\u5173\u952e\u3002<\/p>\n<h3>3.2 \u4e0d\u540c\u6d01\u51c0\u7b49\u7ea7\u7684\u8981\u6c42<\/h3>\n<p>\u6839\u636e\u300aGB 50073-2013 \u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303\u300b\uff0c\u4e0d\u540c\u6d01\u51c0\u7b49\u7ea7\u5bf9\u5e94\u7684\u9897\u7c92\u6d53\u5ea6\u9650\u503c\u5982\u4e0b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u6d01\u51c0\u7b49\u7ea7\uff08ISO\uff09<\/th>\n<th>\u22650.1\u03bcm\u9897\u7c92\u6570\uff08\u4e2a\/m\u00b3\uff09<\/th>\n<th>\u22650.5\u03bcm\u9897\u7c92\u6570\uff08\u4e2a\/m\u00b3\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>ISO 3\uff08Class 1\uff09<\/td>\n<td>\u226410<\/td>\n<td>\u22640<\/td>\n<\/tr>\n<tr>\n<td>ISO 4\uff08Class 10\uff09<\/td>\n<td>\u2264100<\/td>\n<td>\u22642<\/td>\n<\/tr>\n<tr>\n<td>ISO 5\uff08Class 100\uff09<\/td>\n<td>\u22641000<\/td>\n<td>\u226424<\/td>\n<\/tr>\n<tr>\n<td>ISO 6\uff08Class 1000\uff09<\/td>\n<td>\u226410,000<\/td>\n<td>\u2264247<\/td>\n<\/tr>\n<tr>\n<td>ISO 7\uff08Class 10,000\uff09<\/td>\n<td>\u2264100,000<\/td>\n<td>\u22642470<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u5728\u8be5\u6807\u51c6\u4e0b\uff0c\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u591a\u7528\u4e8eISO 6\uff5eISO 7\u7ea7\u522b\u7684\u524d\u6bb5\u5904\u7406\u6216\u4f5c\u4e3aHEPA\u8fc7\u6ee4\u5668\u7684\u524d\u7f6e\u4fdd\u62a4\u5c42\uff0c\u4ee5\u5ef6\u957f\u540e\u8005\u7684\u4f7f\u7528\u5bff\u547d\u5e76\u964d\u4f4e\u6574\u4f53\u8fd0\u884c\u6210\u672c\u3002<\/p>\n<hr \/>\n<h2>\u56db\u3001\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u5fae\u7535\u5b50\u6d01\u51c0\u7cfb\u7edf\u4e2d\u7684\u914d\u7f6e\u7b56\u7565<\/h2>\n<h3>4.1 \u591a\u7ea7\u8fc7\u6ee4\u7cfb\u7edf\u67b6\u6784<\/h3>\n<p>\u73b0\u4ee3\u6d01\u51c0\u5ba4\u666e\u904d\u91c7\u7528\u201c\u521d\u6548\u2192\u4e2d\u6548\u2192\u4e9a\u9ad8\u6548\u2192\u9ad8\u6548\u201d\u56db\u7ea7\u8fc7\u6ee4\u7cfb\u7edf\uff0c\u5177\u4f53\u529f\u80fd\u5982\u4e0b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u8fc7\u6ee4\u5c42\u7ea7<\/th>\n<th>\u529f\u80fd\u5b9a\u4f4d<\/th>\n<th>\u5e38\u7528\u7c7b\u578b<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u521d\u6548\u8fc7\u6ee4\u5668<\/td>\n<td>\u62e6\u622a\u5927\u9897\u7c92\u7070\u5c18\uff0c\u4fdd\u62a4\u540e\u7eed\u8bbe\u5907<\/td>\n<td>\u91d1\u5c5e\u7f51\u3001\u65e0\u7eba\u5e03\u888b\u5f0f<\/td>\n<\/tr>\n<tr>\n<td>\u4e2d\u6548\u8fc7\u6ee4\u5668<\/td>\n<td>\u53bb\u9664\u4e2d\u7b49\u5927\u5c0f\u9897\u7c92\uff0c\u63d0\u9ad8\u7cfb\u7edf\u7a33\u5b9a\u6027<\/td>\n<td>\u888b\u5f0f\u3001\u677f\u5f0f<\/td>\n<\/tr>\n<tr>\n<td>\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668<\/td>\n<td>\u5b9e\u73b0\u9ad8\u6548\u9884\u8fc7\u6ee4\uff0c\u964d\u4f4eHEPA\u8d1f\u62c5<\/td>\n<td>\u888b\u5f0f\u3001\u6298\u53e0\u5f0f<\/td>\n<\/tr>\n<tr>\n<td>\u9ad8\u6548\u8fc7\u6ee4\u5668<\/td>\n<td>\u63d0\u4f9b\u6700\u7ec8\u6d01\u51c0\u7a7a\u6c14\u8f93\u51fa<\/td>\n<td>HEPA\/ULPA<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6b64\u7ed3\u6784\u53ef\u6709\u6548\u5206\u62c5\u5404\u5c42\u7ea7\u7684\u8fc7\u6ee4\u538b\u529b\uff0c\u63d0\u5347\u6574\u4f53\u7cfb\u7edf\u7684\u7a33\u5b9a\u6027\u548c\u7ecf\u6d4e\u6027\u3002<\/p>\n<h3>4.2 \u5e94\u7528\u5b9e\u4f8b\u5206\u6790<\/h3>\n<p>\u4ee5\u67d0\u56fd\u5185\u5927\u578b\u6676\u5706\u5382\u4e3a\u4f8b\uff0c\u5176\u6d01\u51c0\u8f66\u95f4\u91c7\u7528\u5982\u4e0b\u914d\u7f6e\u65b9\u6848\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5c42\u7ea7<\/th>\n<th>\u578b\u53f7<\/th>\n<th>\u54c1\u724c<\/th>\n<th>\u6548\u7387\uff08\u22650.5\u03bcm\uff09<\/th>\n<th>\u521d\u59cb\u963b\u529b\uff08Pa\uff09<\/th>\n<th>\u4f7f\u7528\u5468\u671f<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u521d\u6548<\/td>\n<td>G4<\/td>\n<td>Camfil<\/td>\n<td>&gt;80%<\/td>\n<td>\u226440<\/td>\n<td>1\uff5e2\u4e2a\u6708<\/td>\n<\/tr>\n<tr>\n<td>\u4e2d\u6548<\/td>\n<td>F7<\/td>\n<td>Donaldson<\/td>\n<td>&gt;90%<\/td>\n<td>\u226480<\/td>\n<td>3\uff5e6\u4e2a\u6708<\/td>\n<\/tr>\n<tr>\n<td>\u4e9a\u9ad8\u6548<\/td>\n<td>F9<\/td>\n<td>AAF<\/td>\n<td>&gt;98%<\/td>\n<td>\u2264100<\/td>\n<td>6\uff5e12\u4e2a\u6708<\/td>\n<\/tr>\n<tr>\n<td>\u9ad8\u6548<\/td>\n<td>H13<\/td>\n<td>Freudenberg<\/td>\n<td>&gt;99.97%<\/td>\n<td>\u2264250<\/td>\n<td>1\uff5e2\u5e74<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u8be5\u914d\u7f6e\u5b9e\u73b0\u4e86\u826f\u597d\u7684\u7a7a\u6c14\u6d01\u51c0\u6548\u679c\uff0c\u6ee1\u8db3ISO 5\u7ea7\u6d01\u51c0\u8981\u6c42\uff0c\u540c\u65f6\u964d\u4f4e\u4e86\u540e\u671f\u7ef4\u62a4\u9891\u7387\u548c\u6210\u672c\u3002<\/p>\n<hr \/>\n<h2>\u4e94\u3001\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u5bf9\u5fae\u7535\u5b50\u5236\u9020\u4e1a\u7a7a\u6c14\u8d28\u91cf\u7684\u5177\u4f53\u5f71\u54cd<\/h2>\n<h3>5.1 \u5bf9\u9897\u7c92\u7269\u53bb\u9664\u7387\u7684\u5f71\u54cd<\/h3>\n<p>\u7814\u7a76\u8868\u660e\uff0c\u4f7f\u7528\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u540e\uff0c\u7a7a\u6c14\u4e2d\u22650.5\u03bcm\u9897\u7c92\u7269\u7684\u53bb\u9664\u7387\u53ef\u8fbe98%\u4ee5\u4e0a\uff0c\u663e\u8457\u6539\u5584\u6d01\u51c0\u5ba4\u5185\u7684\u9897\u7c92\u6c61\u67d3\u72b6\u51b5\u3002\u4f8b\u5982\uff0cWang et al.\uff082021\uff09\u5728\u300aIndoor Air Quality and Cleanroom Technology\u300b\u4e2d\u6307\u51fa\uff0c\u5728\u5f15\u5165F9\u7ea7\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u540e\uff0c\u67d012\u82f1\u5bf8\u6676\u5706\u5382\u7684\u5e73\u5747\u9897\u7c92\u6d53\u5ea6\u4e0b\u964d\u4e86\u7ea682%\uff0c\u8fbe\u5230ISO 6\u7ea7\u6807\u51c6\u3002<\/p>\n<h3>5.2 \u5bf9\u8bbe\u5907\u7ef4\u62a4\u5468\u671f\u7684\u5ef6\u957f<\/h3>\n<p>\u7531\u4e8e\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u6709\u6548\u62e6\u622a\u4e86\u5927\u90e8\u5206\u4e2d\u7b49\u9897\u7c92\u7269\uff0c\u4f7f\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u8d1f\u8f7d\u663e\u8457\u51cf\u5c11\uff0c\u4ece\u800c\u5ef6\u957f\u4e86\u5176\u66f4\u6362\u5468\u671f\u3002\u636e\u53f0\u6e7e\u67d0\u9762\u677f\u5382\u5546\u7684\u6570\u636e\u663e\u793a\uff0c\u5728\u5f15\u5165\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u540e\uff0cHEPA\u6ee4\u7f51\u7684\u66f4\u6362\u5468\u671f\u4ece\u539f\u6765\u768410\u4e2a\u6708\u5ef6\u957f\u81f314\u4e2a\u6708\uff0c\u8282\u7701\u4e86\u7ea630%\u7684\u8fd0\u7ef4\u6210\u672c\u3002<\/p>\n<h3>5.3 \u5bf9\u80fd\u8017\u4e0e\u8fd0\u884c\u6210\u672c\u7684\u5f71\u54cd<\/h3>\n<p>\u867d\u7136\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u672c\u8eab\u4f1a\u5e26\u6765\u4e00\u5b9a\u7684\u98ce\u963b\uff0c\u4f46\u5176\u9ad8\u6548\u7684\u9897\u7c92\u53bb\u9664\u80fd\u529b\u51cf\u5c11\u4e86\u7cfb\u7edf\u9891\u7e41\u6e05\u6d01\u548c\u66f4\u6362\u7684\u9891\u7387\uff0c\u4ece\u800c\u964d\u4f4e\u4e86\u6574\u4f53\u80fd\u8017\u3002\u7f8e\u56fdASHRAE\uff082019\uff09\u7684\u7814\u7a76\u8868\u660e\uff0c\u5408\u7406\u914d\u7f6e\u7684\u591a\u7ea7\u8fc7\u6ee4\u7cfb\u7edf\u53ef\u4f7f\u6d01\u51c0\u7a7a\u8c03\u7cfb\u7edf\u7684\u5e74\u80fd\u8017\u964d\u4f4e10%\uff5e15%\u3002<\/p>\n<hr \/>\n<h2>\u516d\u3001\u56fd\u5185\u5916\u7814\u7a76\u73b0\u72b6\u4e0e\u53d1\u5c55\u8d8b\u52bf<\/h2>\n<h3>6.1 \u56fd\u5185\u7814\u7a76\u8fdb\u5c55<\/h3>\n<p>\u8fd1\u5e74\u6765\uff0c\u6211\u56fd\u5728\u7a7a\u6c14\u8fc7\u6ee4\u5668\u9886\u57df\u7684\u7814\u7a76\u53d6\u5f97\u957f\u8db3\u8fdb\u6b65\u3002\u6e05\u534e\u5927\u5b66\u3001\u5317\u4eac\u5de5\u4e1a\u5927\u5b66\u7b49\u9ad8\u6821\u5728\u65b0\u578b\u6ee4\u6750\u7814\u53d1\u65b9\u9762\u53d6\u5f97\u4e86\u591a\u9879\u6210\u679c\u3002\u4f8b\u5982\uff0c\u674e\u6653\u4e1c\u7b49\uff082020\uff09\u5728\u300a\u6d01\u51c0\u4e0e\u7a7a\u8c03\u6280\u672f\u300b\u671f\u520a\u4e2d\u63d0\u51fa\u4e86\u4e00\u79cd\u57fa\u4e8e\u7eb3\u7c73\u7ea4\u7ef4\u7684\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u6750\u6599\uff0c\u5176\u8fc7\u6ee4\u6548\u7387\u8fbe99.5%\uff0c\u4e14\u521d\u59cb\u963b\u529b\u4ec5\u4e3a85 Pa\uff0c\u663e\u793a\u51fa\u826f\u597d\u7684\u5e94\u7528\u524d\u666f\u3002<\/p>\n<p>\u6b64\u5916\uff0c\u56fd\u5185\u4f01\u4e1a\u5982AAF\u3001Camfil\u4e2d\u56fd\u5206\u516c\u53f8\u4e5f\u5728\u672c\u5730\u5316\u751f\u4ea7\u548c\u5b9a\u5236\u670d\u52a1\u65b9\u9762\u52a0\u5927\u6295\u5165\uff0c\u63a8\u52a8\u4e86\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u56fd\u5185\u5e02\u573a\u7684\u666e\u53ca\u3002<\/p>\n<h3>6.2 \u56fd\u5916\u7814\u7a76\u52a8\u6001<\/h3>\n<p>\u56fd\u5916\u5728\u7a7a\u6c14\u8fc7\u6ee4\u6280\u672f\u65b9\u9762\u7684\u7814\u7a76\u8d77\u6b65\u8f83\u65e9\uff0c\u5df2\u5f62\u6210\u8f83\u4e3a\u6210\u719f\u7684\u4ea7\u4e1a\u4f53\u7cfb\u3002\u4f8b\u5982\uff0c\u5fb7\u56fd\u66fc\u80e1\u9ed8\u5c14\uff08MANN+HUMMEL\uff09\u516c\u53f8\u5f00\u53d1\u7684\u6a21\u5757\u5316\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u7cfb\u7edf\uff0c\u5177\u6709\u81ea\u52a8\u76d1\u6d4b\u548c\u62a5\u8b66\u529f\u80fd\uff0c\u6781\u5927\u63d0\u5347\u4e86\u7cfb\u7edf\u7684\u667a\u80fd\u5316\u6c34\u5e73\u3002<\/p>\n<p>\u7f8e\u56fd\u52a0\u5dde\u5927\u5b66\u4f2f\u514b\u5229\u5206\u6821\u7684Kamens\u6559\u6388\u56e2\u961f\uff082022\uff09\u7814\u7a76\u6307\u51fa\uff0c\u7ed3\u5408UV-C\u706d\u83cc\u4e0e\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u590d\u5408\u51c0\u5316\u7cfb\u7edf\uff0c\u53ef\u6709\u6548\u6740\u706d\u7a7a\u6c14\u4e2d99%\u4ee5\u4e0a\u7684\u5fae\u751f\u7269\uff0c\u9002\u7528\u4e8e\u5bf9\u751f\u7269\u6d01\u51c0\u6709\u7279\u6b8a\u8981\u6c42\u7684\u5fae\u7535\u5b50\u6d01\u51c0\u5ba4\u3002<\/p>\n<hr \/>\n<h2>\u4e03\u3001\u672a\u6765\u53d1\u5c55\u65b9\u5411\u4e0e\u5efa\u8bae<\/h2>\n<h3>7.1 \u65b0\u6750\u6599\u4e0e\u65b0\u5de5\u827a\u7684\u5e94\u7528<\/h3>\n<p>\u672a\u6765\uff0c\u968f\u7740\u7eb3\u7c73\u6750\u6599\u3001\u9759\u7535\u7eba\u4e1d\u6280\u672f\u7684\u53d1\u5c55\uff0c\u66f4\u9ad8\u6548\u7387\u3001\u66f4\u4f4e\u963b\u529b\u7684\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u6750\u6599\u5c06\u4e0d\u65ad\u6d8c\u73b0\u3002\u4f8b\u5982\u77f3\u58a8\u70ef\u6d82\u5c42\u6ee4\u6750\u3001\u4eff\u751f\u7ea4\u7ef4\u7ed3\u6784\u7b49\u65b0\u578b\u6750\u6599\u6709\u671b\u8fdb\u4e00\u6b65\u63d0\u5347\u8fc7\u6ee4\u6027\u80fd\u3002<\/p>\n<h3>7.2 \u667a\u80fd\u5316\u4e0e\u6570\u5b57\u5316\u5347\u7ea7<\/h3>\n<p>\u501f\u52a9\u7269\u8054\u7f51\uff08IoT\uff09\u548c\u5927\u6570\u636e\u5206\u6790\u6280\u672f\uff0c\u672a\u6765\u7684\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u5c06\u5177\u5907\u5b9e\u65f6\u76d1\u6d4b\u3001\u8fdc\u7a0b\u8bca\u65ad\u548c\u81ea\u52a8\u9884\u8b66\u529f\u80fd\uff0c\u63d0\u5347\u7cfb\u7edf\u8fd0\u884c\u7684\u5b89\u5168\u6027\u4e0e\u53ef\u63a7\u6027\u3002<\/p>\n<h3>7.3 \u653f\u7b56\u652f\u6301\u4e0e\u884c\u4e1a\u6807\u51c6\u5b8c\u5584<\/h3>\n<p>\u5efa\u8bae\u56fd\u5bb6\u76f8\u5173\u90e8\u95e8\u52a0\u5feb\u5236\u5b9a\u66f4\u7ec6\u5316\u7684\u8fc7\u6ee4\u5668\u5206\u7c7b\u6807\u51c6\u548c\u6d4b\u8bd5\u89c4\u7a0b\uff0c\u63a8\u52a8\u884c\u4e1a\u5065\u5eb7\u53d1\u5c55\u3002\u540c\u65f6\u9f13\u52b1\u4f01\u4e1a\u5f00\u5c55\u7eff\u8272\u5236\u9020\u4e0e\u56de\u6536\u5229\u7528\u7814\u7a76\uff0c\u63d0\u5347\u73af\u4fdd\u6c34\u5e73\u3002<\/p>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>GB\/T 14295-2008. \u7a7a\u6c14\u8fc7\u6ee4\u5668[S].  <\/li>\n<li>GB 50073-2013. \u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303[S].  <\/li>\n<li>Wang, Y., Liu, J., &amp; Zhang, H. (2021). <em>Indoor Air Quality and Cleanroom Technology<\/em>. Beijing: China Environmental Publishing House.  <\/li>\n<li>ASHRAE. (2019). <em>ASHRAE Handbook\u2014HVAC Applications<\/em>. Atlanta: ASHRAE Inc.  <\/li>\n<li>Kamens, R.M., et al. (2022). &quot;Combined UV-C and Filtration Systems for Semiconductor Cleanrooms.&quot; <em>Journal of Aerosol Science<\/em>, 161, 105765.  <\/li>\n<li>\u674e\u6653\u4e1c, \u738b\u78ca, \u5218\u82b3. (2020). &quot;\u7eb3\u7c73\u7ea4\u7ef4\u7a7a\u6c14\u8fc7\u6ee4\u6750\u6599\u7684\u7814\u7a76\u8fdb\u5c55.&quot; <em>\u6d01\u51c0\u4e0e\u7a7a\u8c03\u6280\u672f<\/em>, (3), 45-52.  <\/li>\n<li>ISO 16890:2016. Air filters for general ventilation \u2013 Determination of the filtration efficiency [S].  <\/li>\n<li>EN 779:2012. Particles filter systems for general ventilation \u2013 Determination of the filtration performance [S].  <\/li>\n<li>AAF International. (2021). <em>Technical Guide for Sub-HEPA Filters<\/em>. Retrieved from <a href=\"https:\/\/www.aafinternational.com\">https:\/\/www.aafinternational.com<\/a>  <\/li>\n<li>Camfil Group. (2022). <em>Air Filtration Solutions for Electronics Manufacturing<\/em>. Retrieved from <a href=\"https:\/\/www.camfil.com\">https:\/\/www.camfil.com<\/a>  <\/li>\n<\/ol>\n<hr \/>\n<p><em>\u6ce8\uff1a\u672c\u6587\u6240\u8ff0\u89c2\u70b9\u4e0d\u4ee3\u8868\u4efb\u4f55\u7279\u5b9a\u5382\u5bb6\u7acb\u573a\uff0c\u5f15\u7528\u6570\u636e\u5747\u6765\u81ea\u516c\u5f00\u8d44\u6599\u4e0e\u5b66\u672f\u6587\u732e\u3002<\/em><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u4e9a\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u5fae\u7535\u5b50\u5236\u9020\u4e1a\u7a7a\u6c14\u8d28\u91cf\u63a7\u5236\u4e2d\u7684\u5e94\u7528\u7814\u7a76 \u5f15\u8a00\uff1a\u5fae\u7535\u5b50\u5236\u9020\u5bf9\u7a7a\u6c14\u8d28\u91cf\u7684\u9ad8\u8981\u6c42 \u968f\u7740\u534a\u5bfc\u4f53\u3001\u96c6\u6210\u7535\u8def\u3001\u5e73\u677f\u663e\u793a\u7b49\u5fae\u7535\u5b50\u6280\u672f\u7684\u98de\u901f\u53d1\u5c55\uff0c\u5236\u9020\u5de5\u827a\u65e5\u76ca\u7cbe\u5bc6\u5316\uff0c\u4ea7\u54c1\u7ebf\u5bbd\u4e0d\u65ad\u7f29\u5c0f\u81f3\u7eb3\u7c73\u7ea7\u522b\u3002\u8fd9\u4e00\u8d8b\u52bf\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u63d0\u51fa\u4e86\u524d\u6240\u672a\u6709\u7684\u9ad8\u6807\u51c6\u3002\u7a7a\u6c14\u4e2d\u7684\u5c18\u57c3\u7c92\u5b50\u3001\u7ec6\u83cc\u3001\u6325\u53d1\u6027\u6709\u673a\u7269\uff08VOCs\uff09\u53ca\u91d1\u5c5e\u79bb\u5b50\u7b49\u6c61\u67d3\u7269\uff0c\u5373\u4f7f\u4ee5\u6781\u4f4e\u6d53\u5ea6\u5b58\u5728\uff0c\u4e5f\u53ef\u80fd\u5bfc\u81f4\u82af\u7247\u7f3a\u9677\u3001\u7535\u8def\u77ed\u8def\u6216\u8bbe&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-14561","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14561","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=14561"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14561\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=14561"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=14561"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=14561"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}