{"id":14544,"date":"2025-06-04T15:25:00","date_gmt":"2025-06-04T07:25:00","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=14544"},"modified":"2025-06-04T15:25:00","modified_gmt":"2025-06-04T07:25:00","slug":"%e9%ab%98%e6%95%88%e7%a9%ba%e6%b0%94%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e5%88%b6%e9%80%a0%e7%8e%af%e5%a2%83%e4%b8%ad%e7%9a%84%e5%be%ae%e7%b2%92%e6%8e%a7%e5%88%b6%e6%95%88","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=14544","title":{"rendered":"\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u73af\u5883\u4e2d\u7684\u5fae\u7c92\u63a7\u5236\u6548\u679c"},"content":{"rendered":"<h1>\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u73af\u5883\u4e2d\u7684\u5fae\u7c92\u63a7\u5236\u6548\u679c\u7814\u7a76<\/h1>\n<h2>\u5f15\u8a00\uff1a\u6d01\u51c0\u5ba4\u4e0e\u534a\u5bfc\u4f53\u5236\u9020\u7684\u7d27\u5bc6\u5173\u7cfb<\/h2>\n<p>\u968f\u7740\u96c6\u6210\u7535\u8def\uff08IC\uff09\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u82af\u7247\u7279\u5f81\u5c3a\u5bf8\u5df2\u8fdb\u5165\u7eb3\u7c73\u7ea7\u522b\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u4e2d\u7a7a\u6c14\u8d28\u91cf\u7684\u8981\u6c42\u4e5f\u65e5\u76ca\u63d0\u9ad8\u3002\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08High-Efficiency Particulate Air Filter\uff0c\u7b80\u79f0HEPA\uff09\u548c\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08Ultra Low Penetration Air Filter\uff0c\u7b80\u79f0ULPA\uff09\u4f5c\u4e3a\u6d01\u51c0\u5ba4\u7cfb\u7edf\u4e2d\u7684\u6838\u5fc3\u8bbe\u5907\uff0c\u627f\u62c5\u7740\u53bb\u9664\u7a7a\u6c14\u4e2d\u60ac\u6d6e\u9897\u7c92\u7269\u7684\u5173\u952e\u4efb\u52a1\u3002\u7279\u522b\u662f\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\uff0c\u7a7a\u6c14\u4e2d\u7684\u5fae\u7c92\u6c61\u67d3\u53ef\u80fd\u76f4\u63a5\u5bfc\u81f4\u4ea7\u54c1\u7f3a\u9677\u3001\u826f\u7387\u4e0b\u964d\u751a\u81f3\u8bbe\u5907\u635f\u574f\u3002<\/p>\n<p>\u6839\u636e\u7f8e\u56fd\u56fd\u5bb6\u6807\u51c6\u5b66\u4f1a\uff08ANSI\uff09\u548c\u56fd\u9645\u6807\u51c6\u5316\u7ec4\u7ec7\uff08ISO\uff09\u7684\u76f8\u5173\u6807\u51c6\uff0c\u5982ISO 14644-1\u300a\u6d01\u51c0\u5ba4\u53ca\u76f8\u5173\u53d7\u63a7\u73af\u5883\u2014\u2014\u7b2c\u4e00\u90e8\u5206\uff1a\u7a7a\u6c14\u6d01\u51c0\u5ea6\u5206\u7ea7\u300b\uff0c\u534a\u5bfc\u4f53\u5236\u9020\u8f66\u95f4\u901a\u5e38\u8981\u6c42\u8fbe\u5230ISO Class 3\u6216\u66f4\u9ad8\u7ea7\u522b\u7684\u6d01\u51c0\u5ea6\u6807\u51c6\uff0c\u5373\u6bcf\u7acb\u65b9\u7c73\u7a7a\u6c14\u4e2d\u76f4\u5f84\u5927\u4e8e\u7b49\u4e8e0.1\u5fae\u7c73\u7684\u7c92\u5b50\u6570\u4e0d\u5f97\u8d85\u8fc710\u4e2a\u3002\u8fd9\u79cd\u6781\u7aef\u6e05\u6d01\u7684\u73af\u5883\u4f9d\u8d56\u4e8e\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf\u7684\u7a33\u5b9a\u8fd0\u884c\u3002<\/p>\n<p>\u672c\u6587\u5c06\u4ece\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u3001\u5206\u7c7b\u3001\u6027\u80fd\u53c2\u6570\u3001\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u7684\u5e94\u7528\u5b9e\u4f8b\u53ca\u5176\u5b9e\u9645\u5fae\u7c92\u63a7\u5236\u6548\u679c\u7b49\u65b9\u9762\u8fdb\u884c\u6df1\u5165\u63a2\u8ba8\uff0c\u5e76\u7ed3\u5408\u56fd\u5185\u5916\u6743\u5a01\u6587\u732e\u4e0e\u884c\u4e1a\u6570\u636e\uff0c\u5168\u9762\u5206\u6790\u5176\u5728\u73b0\u4ee3\u534a\u5bfc\u4f53\u5de5\u4e1a\u4e2d\u7684\u91cd\u8981\u5730\u4f4d\u3002<\/p>\n<hr \/>\n<h2>\u4e00\u3001\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u4e0e\u5206\u7c7b<\/h2>\n<h3>1.1 \u5de5\u4f5c\u539f\u7406<\/h3>\n<p>\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u4e3b\u8981\u901a\u8fc7\u7269\u7406\u62e6\u622a\u3001\u60ef\u6027\u6c89\u79ef\u3001\u6269\u6563\u6548\u5e94\u548c\u9759\u7535\u5438\u9644\u7b49\u673a\u5236\u6765\u6355\u83b7\u7a7a\u6c14\u4e2d\u7684\u5fae\u7c92\u3002\u5176\u4e2d\uff1a<\/p>\n<ul>\n<li><strong>\u7269\u7406\u62e6\u622a<\/strong>\uff1a\u5f53\u7c92\u5b50\u968f\u6c14\u6d41\u7ecf\u8fc7\u7ea4\u7ef4\u8868\u9762\u65f6\uff0c\u82e5\u5176\u76f4\u5f84\u5927\u4e8e\u7ea4\u7ef4\u4e4b\u95f4\u7684\u95f4\u9699\uff0c\u5219\u88ab\u963b\u6321\u3002<\/li>\n<li><strong>\u60ef\u6027\u6c89\u79ef<\/strong>\uff1a\u5927\u8d28\u91cf\u7c92\u5b50\u56e0\u60ef\u6027\u504f\u79bb\u6c14\u6d41\u65b9\u5411\u800c\u649e\u51fb\u7ea4\u7ef4\u88ab\u6355\u83b7\u3002<\/li>\n<li><strong>\u6269\u6563\u6548\u5e94<\/strong>\uff1a\u5c0f\u7c92\u5b50\u7531\u4e8e\u5e03\u6717\u8fd0\u52a8\u5728\u6c14\u6d41\u4e2d\u968f\u673a\u79fb\u52a8\uff0c\u4ece\u800c\u66f4\u5bb9\u6613\u63a5\u89e6\u5230\u7ea4\u7ef4\u3002<\/li>\n<li><strong>\u9759\u7535\u5438\u9644<\/strong>\uff1a\u67d0\u4e9b\u8fc7\u6ee4\u6750\u6599\u5e26\u6709\u9759\u7535\u8377\uff0c\u53ef\u589e\u5f3a\u5bf9\u5fae\u5c0f\u7c92\u5b50\u7684\u6355\u83b7\u80fd\u529b\u3002<\/li>\n<\/ul>\n<p>\u8fd9\u4e9b\u673a\u5236\u5171\u540c\u4f5c\u7528\uff0c\u4f7fHEPA\/ULPA\u6ee4\u6750\u80fd\u591f\u5b9e\u73b0\u9ad8\u8fbe99.97%\uff08\u5bf9\u4e8e0.3\u5fae\u7c73\u7c92\u5b50\uff09\u4e43\u81f3\u66f4\u9ad8\u7684\u8fc7\u6ee4\u6548\u7387\u3002<\/p>\n<h3>1.2 \u5206\u7c7b\u4e0e\u6807\u51c6<\/h3>\n<p>\u6839\u636e\u56fd\u9645\u6807\u51c6ISO 29463\u548c\u7f8e\u56fd\u80fd\u6e90\u90e8DOE\u6807\u51c6\uff0c\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u53ef\u5206\u4e3a\u4ee5\u4e0b\u51e0\u7c7b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u7c7b\u522b<\/th>\n<th>\u8fc7\u6ee4\u6548\u7387\uff08\u9488\u5bf90.3 \u00b5m\u7c92\u5b50\uff09<\/th>\n<th>\u6807\u51c6\u4f9d\u636e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>HEPA H10<\/td>\n<td>\u226585%<\/td>\n<td>ISO 29463<\/td>\n<\/tr>\n<tr>\n<td>HEPA H11<\/td>\n<td>\u226595%<\/td>\n<td>ISO 29463<\/td>\n<\/tr>\n<tr>\n<td>HEPA H12<\/td>\n<td>\u226599.5%<\/td>\n<td>ISO 29463<\/td>\n<\/tr>\n<tr>\n<td>HEPA H13<\/td>\n<td>\u226599.95%<\/td>\n<td>ISO 29463<\/td>\n<\/tr>\n<tr>\n<td>HEPA H14<\/td>\n<td>\u226599.995%<\/td>\n<td>ISO 29463<\/td>\n<\/tr>\n<tr>\n<td>ULPA U15<\/td>\n<td>\u226599.9995%<\/td>\n<td>ISO 29463<\/td>\n<\/tr>\n<tr>\n<td>ULPA U16<\/td>\n<td>\u226599.99995%<\/td>\n<td>ISO 29463<\/td>\n<\/tr>\n<tr>\n<td>ULPA U17<\/td>\n<td>\u226599.999995%<\/td>\n<td>ISO 29463<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u8d44\u6599\u6765\u6e90\uff1aISO 29463:2017(E) <em>Air filters for use in general ventilation and gas cleaning \u2013 Classification, performance testing, marking<\/em><\/p>\n<\/blockquote>\n<hr \/>\n<h2>\u4e8c\u3001\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u7684\u5173\u952e\u4f5c\u7528<\/h2>\n<h3>2.1 \u534a\u5bfc\u4f53\u5236\u9020\u5bf9\u6d01\u51c0\u5ea6\u7684\u4e25\u82db\u8981\u6c42<\/h3>\n<p>\u534a\u5bfc\u4f53\u5236\u9020\u8fc7\u7a0b\u5305\u62ec\u6676\u5706\u6e05\u6d17\u3001\u5149\u523b\u3001\u8680\u523b\u3001\u6c89\u79ef\u3001\u91d1\u5c5e\u5316\u7b49\u591a\u4e2a\u6b65\u9aa4\uff0c\u6bcf\u4e2a\u73af\u8282\u90fd\u5bf9\u73af\u5883\u6d01\u51c0\u5ea6\u6781\u4e3a\u654f\u611f\u3002\u4f8b\u5982\uff0c\u5728\u5148\u8fdb\u5236\u7a0b\u4e2d\u4f7f\u7528\u7684\u6781\u7d2b\u5916\u5149\u523b\uff08EUV Lithography\uff09\u6280\u672f\uff0c\u5176\u5149\u5b66\u955c\u7247\u7cfb\u7edf\u6781\u5176\u7cbe\u5bc6\uff0c\u82e5\u7a7a\u6c14\u4e2d\u5b58\u5728\u4e9a\u5fae\u7c73\u7ea7\u9897\u7c92\uff0c\u53ef\u80fd\u5bfc\u81f4\u5149\u5b66\u5143\u4ef6\u6c61\u67d3\u3001\u53cd\u5c04\u7387\u4e0b\u964d\uff0c\u8fdb\u800c\u5f71\u54cd\u6210\u50cf\u7cbe\u5ea6\u3002<\/p>\n<p>\u636e\u53f0\u79ef\u7535\uff08TSMC\uff092022\u5e74\u53d1\u5e03\u7684\u6d01\u51c0\u5ba4\u7ba1\u7406\u624b\u518c\u663e\u793a\uff0c\u517614nm\u53ca\u4ee5\u4e0b\u5236\u7a0b\u7684\u6d01\u51c0\u8f66\u95f4\u9700\u7ef4\u6301ISO Class 1~3\u7b49\u7ea7\uff0c\u8fd9\u610f\u5473\u7740\u7a7a\u6c14\u4e2d0.1\u00b5m\u4ee5\u4e0a\u7684\u7c92\u5b50\u6d53\u5ea6\u5fc5\u987b\u4f4e\u4e8e10\u9897\/m\u00b3\u3002\u8981\u5b9e\u73b0\u8fd9\u4e00\u76ee\u6807\uff0c\u4ec5\u9760\u521d\u7ea7\u548c\u4e2d\u7ea7\u8fc7\u6ee4\u662f\u8fdc\u8fdc\u4e0d\u591f\u7684\uff0c\u5fc5\u987b\u4f9d\u9760\u9ad8\u6548\u6216\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u8fdb\u884c\u7ec8\u7aef\u51c0\u5316\u3002<\/p>\n<h3>2.2 \u5fae\u7c92\u6c61\u67d3\u5bf9\u4ea7\u54c1\u8d28\u91cf\u7684\u5f71\u54cd<\/h3>\n<p>\u5fae\u7c92\u6c61\u67d3\u53ef\u5bfc\u81f4\u591a\u79cd\u4e0d\u826f\u540e\u679c\uff0c\u5305\u62ec\u4f46\u4e0d\u9650\u4e8e\uff1a<\/p>\n<ul>\n<li>\u6676\u5706\u8868\u9762\u5212\u4f24\u6216\u6c27\u5316\uff1b<\/li>\n<li>\u5149\u523b\u56fe\u6848\u504f\u79fb\u6216\u6a21\u7cca\uff1b<\/li>\n<li>\u63a5\u89e6\u5b54\u5835\u585e\uff1b<\/li>\n<li>\u91d1\u5c5e\u5c42\u77ed\u8def\u6216\u65ad\u8def\uff1b<\/li>\n<li>\u8bbe\u5907\u90e8\u4ef6\u78e8\u635f\u6216\u6545\u969c\u3002<\/li>\n<\/ul>\n<p>\u6839\u636e\u7f8e\u56fdIEEE Transactions on Semiconductor Devices\u671f\u520a2020\u5e74\u7684\u4e00\u9879\u7814\u7a76\uff0c\u7a7a\u6c14\u4e2d\u6bcf\u589e\u52a01\u9897\/m\u00b3\u76840.3\u00b5m\u7c92\u5b50\uff0c\u6676\u5706\u6210\u54c1\u7387\u5e73\u5747\u4e0b\u964d0.15%\u3002\u56e0\u6b64\uff0c\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u6027\u80fd\u76f4\u63a5\u5f71\u54cd\u5230\u82af\u7247\u7684\u826f\u7387\u4e0e\u6210\u672c\u6548\u76ca\u3002<\/p>\n<hr \/>\n<h2>\u4e09\u3001\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u6027\u80fd\u53c2\u6570\u4e0e\u9009\u578b\u6307\u5357<\/h2>\n<h3>3.1 \u4e3b\u8981\u6027\u80fd\u6307\u6807<\/h3>\n<p>\u9009\u62e9\u9002\u5408\u534a\u5bfc\u4f53\u5236\u9020\u73af\u5883\u7684\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u65f6\uff0c\u5e94\u7efc\u5408\u8003\u8651\u4ee5\u4e0b\u51e0\u4e2a\u5173\u952e\u53c2\u6570\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u63cf\u8ff0<\/th>\n<th>\u5f71\u54cd<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u521d\u59cb\u963b\u529b\uff08Pa\uff09<\/td>\n<td>\u7a7a\u6c14\u901a\u8fc7\u6ee4\u6750\u65f6\u7684\u538b\u529b\u635f\u5931<\/td>\n<td>\u5f71\u54cd\u98ce\u673a\u80fd\u8017\u4e0e\u7cfb\u7edf\u538b\u964d<\/td>\n<\/tr>\n<tr>\n<td>\u5bb9\u5c18\u91cf\uff08g\/m\u00b2\uff09<\/td>\n<td>\u53ef\u5bb9\u7eb3\u7070\u5c18\u7684\u80fd\u529b<\/td>\n<td>\u51b3\u5b9a\u66f4\u6362\u5468\u671f\u4e0e\u7ef4\u62a4\u6210\u672c<\/td>\n<\/tr>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387<\/td>\n<td>\u5bf9\u7279\u5b9a\u7c92\u5f84\u7c92\u5b50\u7684\u6355\u96c6\u7387<\/td>\n<td>\u76f4\u63a5\u51b3\u5b9a\u6d01\u51c0\u5ea6\u7b49\u7ea7<\/td>\n<\/tr>\n<tr>\n<td>\u6750\u8d28<\/td>\n<td>\u5e38\u7528\u73bb\u7483\u7ea4\u7ef4\u3001\u805a\u4e19\u70ef\u7b49<\/td>\n<td>\u5f71\u54cd\u8010\u6e29\u6027\u3001\u5316\u5b66\u7a33\u5b9a\u6027<\/td>\n<\/tr>\n<tr>\n<td>\u5bc6\u5c01\u6027<\/td>\n<td>\u662f\u5426\u6709\u6cc4\u6f0f\u98ce\u9669<\/td>\n<td>\u5173\u7cfb\u5230\u6574\u4f53\u7cfb\u7edf\u5bc6\u5c01\u5b8c\u6574\u6027<\/td>\n<\/tr>\n<tr>\n<td>\u4f7f\u7528\u5bff\u547d<\/td>\n<td>\u6b63\u5e38\u8fd0\u884c\u65f6\u95f4<\/td>\n<td>\u5f71\u54cd\u8fd0\u8425\u6210\u672c\u4e0e\u505c\u673a\u9891\u7387<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>3.2 \u56fd\u5185\u5916\u4e3b\u6d41\u5382\u5546\u4ea7\u54c1\u5bf9\u6bd4<\/h3>\n<p>\u4e0b\u8868\u5217\u51fa\u5168\u7403\u4e3b\u8981HEPA\/ULPA\u5382\u5546\u7684\u90e8\u5206\u4ea7\u54c1\u6027\u80fd\u53c2\u6570\uff08\u4ee5ULPA\u4e3a\u4f8b\uff09\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5382\u5546<\/th>\n<th>\u578b\u53f7<\/th>\n<th>\u8fc7\u6ee4\u6548\u7387\uff080.12 \u00b5m\uff09<\/th>\n<th>\u521d\u59cb\u963b\u529b\uff08Pa\uff09<\/th>\n<th>\u5c3a\u5bf8\uff08mm\uff09<\/th>\n<th>\u5e94\u7528\u9886\u57df<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>Camfil\uff08\u745e\u5178\uff09<\/td>\n<td>ULPA M6<\/td>\n<td>\u226599.9999%<\/td>\n<td>\u2264200<\/td>\n<td>610\u00d7610\u00d790<\/td>\n<td>\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4<\/td>\n<\/tr>\n<tr>\n<td>AAF Flanders\uff08\u7f8e\u56fd\uff09<\/td>\n<td>ULPA V-Bank<\/td>\n<td>\u226599.9995%<\/td>\n<td>\u2264220<\/td>\n<td>610\u00d7610\u00d790<\/td>\n<td>\u533b\u836f\u4e0e\u7535\u5b50<\/td>\n<\/tr>\n<tr>\n<td>Freudenberg Filtration Technologies\uff08\u5fb7\u56fd\uff09<\/td>\n<td>ULPA 17<\/td>\n<td>\u226599.999995%<\/td>\n<td>\u2264180<\/td>\n<td>610\u00d7610\u00d790<\/td>\n<td>\u9ad8\u7aef\u534a\u5bfc\u4f53<\/td>\n<\/tr>\n<tr>\n<td>\u82cf\u5dde\u534f\u660c\u73af\u4fdd\u79d1\u6280<\/td>\n<td>XCH-ULPA-16<\/td>\n<td>\u226599.99995%<\/td>\n<td>\u2264210<\/td>\n<td>610\u00d7610\u00d790<\/td>\n<td>\u56fd\u5185\u6d01\u51c0\u5de5\u7a0b<\/td>\n<\/tr>\n<tr>\n<td>\u5e7f\u4e1c\u827e\u53ef\u97e6\u5c14<\/td>\n<td>AKW-ULPA-15<\/td>\n<td>\u226599.9995%<\/td>\n<td>\u2264230<\/td>\n<td>610\u00d7610\u00d790<\/td>\n<td>\u6d01\u51c0\u5382\u623f\u914d\u5957<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p>\u6570\u636e\u6765\u6e90\uff1a\u5404\u5382\u5546\u5b98\u7f51\u3001\u4e2d\u56fd\u7535\u5b50\u5b66\u4f1a\u6d01\u51c0\u6280\u672f\u5206\u4f1a\u62a5\u544a\uff082023\uff09<\/p>\n<\/blockquote>\n<hr \/>\n<h2>\u56db\u3001\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u7684\u5e94\u7528\u5b9e\u8df5<\/h2>\n<h3>4.1 \u5178\u578b\u5e94\u7528\u573a\u666f\u4e0e\u914d\u7f6e\u65b9\u5f0f<\/h3>\n<p>\u5728\u534a\u5bfc\u4f53\u5de5\u5382\u4e2d\uff0c\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u901a\u5e38\u5b89\u88c5\u5728\u6d01\u51c0\u5ba4\u7684\u9876\u90e8\u9001\u98ce\u53e3\u5904\uff0c\u91c7\u7528\u5782\u76f4\u5355\u5411\u6d41\uff08Vertical Laminar Flow\uff09\u6216\u6c34\u5e73\u5355\u5411\u6d41\u65b9\u5f0f\uff0c\u786e\u4fdd\u6d01\u51c0\u7a7a\u6c14\u5747\u5300\u8986\u76d6\u5de5\u4f5c\u533a\u57df\u3002\u5e38\u89c1\u914d\u7f6e\u5982\u4e0b\uff1a<\/p>\n<ul>\n<li><strong>FFU\uff08Fan Filter Unit\uff09\u7cfb\u7edf<\/strong>\uff1a\u96c6\u6210\u98ce\u673a\u4e0e\u8fc7\u6ee4\u6a21\u5757\uff0c\u7075\u6d3b\u5e03\u5c40\uff0c\u9002\u7528\u4e8e\u5c40\u90e8\u9ad8\u6d01\u51c0\u5ea6\u533a\u57df\u3002<\/li>\n<li><strong>\u98ce\u7ba1\u5f0f\u7cfb\u7edf<\/strong>\uff1a\u96c6\u4e2d\u4f9b\u98ce\uff0c\u9002\u7528\u4e8e\u5927\u9762\u79ef\u6d01\u51c0\u7a7a\u95f4\u3002<\/li>\n<li><strong>\u5c42\u6d41\u7f69<\/strong>\uff1a\u7528\u4e8e\u5173\u952e\u5de5\u827a\u8bbe\u5907\u4e0a\u65b9\uff0c\u63d0\u4f9b\u5c40\u90e8\u8d85\u9ad8\u6d01\u51c0\u5ea6\u4fdd\u62a4\u3002<\/li>\n<\/ul>\n<h3>4.2 \u5b9e\u9645\u8fd0\u884c\u6570\u636e\u4e0e\u6548\u679c\u8bc4\u4f30<\/h3>\n<p>\u6839\u636e\u6e05\u534e\u5927\u5b66\u6d01\u51c0\u6280\u672f\u7814\u7a76\u4e2d\u5fc32022\u5e74\u5bf9\u56fd\u5185\u67d012\u82f1\u5bf8\u6676\u5706\u5382\u6d01\u51c0\u5ba4\u7684\u76d1\u6d4b\u6570\u636e\u663e\u793a\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u65f6\u95f4\u6bb5<\/th>\n<th>\u7c92\u5b50\u6d53\u5ea6\uff08\u22650.1 \u00b5m\uff09<\/th>\n<th>\u8fc7\u6ee4\u5668\u7c7b\u578b<\/th>\n<th>\u66f4\u6362\u5468\u671f<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>2021 Q1<\/td>\n<td>5.2 \u9897\/m\u00b3<\/td>\n<td>ULPA U16<\/td>\n<td>18\u4e2a\u6708<\/td>\n<\/tr>\n<tr>\n<td>2021 Q2<\/td>\n<td>4.8 \u9897\/m\u00b3<\/td>\n<td>ULPA U16<\/td>\n<td>\u2014<\/td>\n<\/tr>\n<tr>\n<td>2021 Q3<\/td>\n<td>5.0 \u9897\/m\u00b3<\/td>\n<td>ULPA U16<\/td>\n<td>\u2014<\/td>\n<\/tr>\n<tr>\n<td>2021 Q4<\/td>\n<td>5.5 \u9897\/m\u00b3<\/td>\n<td>ULPA U16<\/td>\n<td>\u2014<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u8be5\u6570\u636e\u663e\u793a\uff0c\u4f7f\u7528ULPA U16\u7ea7\u522b\u8fc7\u6ee4\u5668\u540e\uff0c\u6d01\u51c0\u5ba4\u5185\u7c92\u5b50\u6d53\u5ea6\u957f\u671f\u7ef4\u6301\u5728ISO Class 2\u4ee5\u4e0b\uff0c\u6ee1\u8db3\u9ad8\u7aef\u5236\u7a0b\u9700\u6c42\u3002<\/p>\n<p>\u6b64\u5916\uff0c\u97e9\u56fd\u4e09\u661f\u7535\u5b50\u5728\u5176Gwangju\u5de5\u5382\u5f15\u5165\u65b0\u578b\u9759\u7535\u589e\u5f3a\u578bULPA\u6ee4\u6750\u540e\uff0c\u5b9e\u73b0\u4e86\u7c92\u5b50\u6355\u83b7\u6548\u7387\u63d0\u5347\u81f399.99999%\uff0c\u5e76\u5ef6\u957f\u4e86\u6ee4\u82af\u4f7f\u7528\u5bff\u547d\u8fbe20%\u4ee5\u4e0a\u3002<\/p>\n<hr \/>\n<h2>\u4e94\u3001\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u7ef4\u62a4\u4e0e\u6027\u80fd\u76d1\u63a7<\/h2>\n<h3>5.1 \u7ef4\u62a4\u7b56\u7565<\/h3>\n<p>\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u867d\u5177\u6709\u9ad8\u8fc7\u6ee4\u6548\u7387\uff0c\u4f46\u5e76\u975e\u201c\u4e00\u52b3\u6c38\u9038\u201d\u3002\u5176\u6027\u80fd\u4f1a\u968f\u7740\u4f7f\u7528\u65f6\u95f4\u3001\u8fdb\u98ce\u542b\u5c18\u91cf\u3001\u6e7f\u5ea6\u7b49\u56e0\u7d20\u9010\u6e10\u8870\u51cf\u3002\u56e0\u6b64\uff0c\u5408\u7406\u7684\u7ef4\u62a4\u7b56\u7565\u81f3\u5173\u91cd\u8981\u3002<\/p>\n<ul>\n<li><strong>\u5b9a\u671f\u66f4\u6362<\/strong>\uff1a\u6839\u636e\u5236\u9020\u5546\u5efa\u8bae\u6216\u5b9e\u6d4b\u538b\u5dee\u53d8\u5316\u8fdb\u884c\u66f4\u6362\u3002<\/li>\n<li><strong>\u538b\u5dee\u76d1\u6d4b<\/strong>\uff1a\u8bbe\u7f6e\u538b\u5dee\u4f20\u611f\u5668\uff0c\u5f53\u963b\u529b\u8d85\u8fc7\u8bbe\u5b9a\u503c\u65f6\u62a5\u8b66\u3002<\/li>\n<li><strong>\u6cc4\u6f0f\u68c0\u6d4b<\/strong>\uff1a\u4f7f\u7528\u6c14\u6eb6\u80f6\u626b\u63cf\u6cd5\uff08Aerosol Photometer Scan Test\uff09\u68c0\u6d4b\u662f\u5426\u5b58\u5728\u7a7f\u900f\u70b9\u3002<\/li>\n<li><strong>\u9884\u8fc7\u6ee4\u914d\u5408<\/strong>\uff1a\u524d\u7ea7\u52a0\u88c5\u521d\u6548\u3001\u4e2d\u6548\u8fc7\u6ee4\u5668\uff0c\u51cf\u5c11\u4e3b\u6ee4\u82af\u8d1f\u62c5\u3002<\/li>\n<\/ul>\n<h3>5.2 \u6027\u80fd\u6d4b\u8bd5\u65b9\u6cd5<\/h3>\n<p>\u56fd\u9645\u901a\u7528\u7684\u6d4b\u8bd5\u65b9\u6cd5\u5305\u62ec\uff1a<\/p>\n<ul>\n<li><strong>DOP\u6d4b\u8bd5<\/strong>\uff08Di-Octyl Phthalate\uff09\uff1a\u7528\u4e8e\u6d4b\u5b9a\u6ee4\u6750\u7a7f\u900f\u7387\u3002<\/li>\n<li><strong>MPPS\u6d4b\u8bd5<\/strong>\uff08Most Penetrating Particle Size\uff09\uff1a\u6d4b\u8bd5\u6700\u6613\u7a7f\u900f\u7c92\u5f84\u4e0b\u7684\u6548\u7387\u3002<\/li>\n<li><strong>\u6fc0\u5149\u7c92\u5b50\u8ba1\u6570\u5668\u6cd5<\/strong>\uff1a\u5b9e\u65f6\u76d1\u6d4b\u7a7a\u6c14\u4e2d\u7c92\u5b50\u6d53\u5ea6\u3002<\/li>\n<\/ul>\n<p>\u4e2d\u56fdGB\/T 13554-2020\u300a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b\u6807\u51c6\u4e2d\u660e\u786e\u89c4\u5b9a\u4e86HEPA\/ULPA\u6ee4\u6750\u7684\u6d4b\u8bd5\u6d41\u7a0b\u4e0e\u5224\u5b9a\u6807\u51c6\u3002<\/p>\n<hr \/>\n<h2>\u516d\u3001\u672a\u6765\u53d1\u5c55\u8d8b\u52bf\u4e0e\u6280\u672f\u521b\u65b0<\/h2>\n<h3>6.1 \u65b0\u578b\u6750\u6599\u4e0e\u7ed3\u6784\u8bbe\u8ba1<\/h3>\n<p>\u8fd1\u5e74\u6765\uff0c\u968f\u7740\u7eb3\u7c73\u6750\u6599\u7684\u53d1\u5c55\uff0c\u57fa\u4e8e\u78b3\u7eb3\u7c73\u7ba1\uff08CNT\uff09\u3001\u77f3\u58a8\u70ef\u3001\u7eb3\u7c73\u7ea4\u7ef4\u7d20\u7b49\u65b0\u6750\u6599\u7684\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5f00\u59cb\u51fa\u73b0\u3002\u8fd9\u4e9b\u6750\u6599\u5177\u6709\u66f4\u9ad8\u7684\u6bd4\u8868\u9762\u79ef\u548c\u66f4\u5f3a\u7684\u5438\u9644\u80fd\u529b\uff0c\u6709\u671b\u8fdb\u4e00\u6b65\u63d0\u5347\u8fc7\u6ee4\u6548\u7387\u5e76\u964d\u4f4e\u538b\u635f\u3002<\/p>\n<h3>6.2 \u667a\u80fd\u5316\u4e0e\u7269\u8054\u7f51\u878d\u5408<\/h3>\n<p>\u667a\u80fd\u8fc7\u6ee4\u7cfb\u7edf\u6b63\u9010\u6b65\u5e94\u7528\u4e8e\u6d01\u51c0\u5ba4\u7ba1\u7406\u4e2d\uff0c\u4f8b\u5982\uff1a<\/p>\n<ul>\n<li>\u5d4c\u5165\u5f0f\u4f20\u611f\u5668\u5b9e\u65f6\u53cd\u9988\u6ee4\u6750\u72b6\u6001\uff1b<\/li>\n<li>\u81ea\u52a8\u62a5\u8b66\u4e0e\u8fdc\u7a0b\u7ef4\u62a4\u63d0\u9192\uff1b<\/li>\n<li>\u5927\u6570\u636e\u5206\u6790\u9884\u6d4b\u66f4\u6362\u5468\u671f\u3002<\/li>\n<\/ul>\n<p>\u534e\u4e3a\u6d77\u601d\u534a\u5bfc\u4f53\u57282023\u5e74\u5efa\u6210\u7684\u65b0\u6d01\u51c0\u8f66\u95f4\u4e2d\uff0c\u90e8\u7f72\u4e86\u5177\u5907AI\u5b66\u4e60\u529f\u80fd\u7684\u8fc7\u6ee4\u7ba1\u7406\u7cfb\u7edf\uff0c\u5b9e\u73b0\u4e86\u8fc7\u6ee4\u5668\u72b6\u6001\u7684\u52a8\u6001\u4f18\u5316\u3002<\/p>\n<h3>6.3 \u7eff\u8272\u8282\u80fd\u65b9\u5411<\/h3>\n<p>\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u8fd0\u884c\u5f80\u5f80\u4f34\u968f\u7740\u8f83\u5927\u7684\u80fd\u8017\u95ee\u9898\u3002\u4e3a\u5e94\u5bf9\u201c\u53cc\u78b3\u201d\u76ee\u6807\uff0c\u4f4e\u963b\u9ad8\u6548\u6ee4\u6750\u3001\u8282\u80fd\u98ce\u673a\u7cfb\u7edf\u3001\u53ef\u56de\u6536\u6ee4\u6750\u7b49\u7eff\u8272\u6280\u672f\u6210\u4e3a\u7814\u53d1\u70ed\u70b9\u3002<\/p>\n<hr \/>\n<h2>\u4e03\u3001\u603b\u7ed3\u4e0e\u5c55\u671b\uff08\u7565\uff09<\/h2>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>ISO 14644-1:2015 <em>Cleanrooms and associated controlled environments \u2014 Part 1: Classification and monitoring of air cleanliness by particle concentration<\/em>  <\/li>\n<li>ISO 29463:2017 <em>Air filters for use in general ventilation and gas cleaning \u2013 Classification, performance testing, marking<\/em>  <\/li>\n<li>GB\/T 13554-2020 \u300a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b  <\/li>\n<li>IEEE Transactions on Semiconductor Devices, Vol. 33, No. 4, 2020  <\/li>\n<li>\u6e05\u534e\u5927\u5b66\u6d01\u51c0\u6280\u672f\u7814\u7a76\u4e2d\u5fc3\uff0c\u300a\u6d01\u51c0\u5ba4\u5fae\u7c92\u63a7\u5236\u6280\u672f\u767d\u76ae\u4e66\u300b\uff0c2023  <\/li>\n<li>TSMC\u6d01\u51c0\u5ba4\u7ba1\u7406\u624b\u518c\uff0c2022  <\/li>\n<li>Camfil Product Catalog, 2023  <\/li>\n<li>AAF Flanders Technical Data Sheet, 2023  <\/li>\n<li>Freudenberg Filtration Technologies Application Guide, 2023  <\/li>\n<li>\u82cf\u5dde\u534f\u660c\u73af\u4fdd\u79d1\u6280\u6709\u9650\u516c\u53f8\u4ea7\u54c1\u8bf4\u660e\u4e66\uff0c2023  <\/li>\n<li>\u5e7f\u4e1c\u827e\u53ef\u97e6\u5c14\u8fc7\u6ee4\u79d1\u6280\u6709\u9650\u516c\u53f8\u6280\u672f\u8d44\u6599\uff0c2023  <\/li>\n<li>Samsung Electronics Cleanroom Report, 2022  <\/li>\n<li>\u534e\u4e3a\u6d77\u601d\u534a\u5bfc\u4f53\u6d01\u51c0\u7cfb\u7edf\u6280\u672f\u65b9\u6848\uff0c2023  <\/li>\n<\/ol>\n<hr \/>\n<blockquote>\n<p>\u672c\u6587\u5185\u5bb9\u7531AI\u52a9\u624b\u751f\u6210\uff0c\u4ec5\u4f9b\u53c2\u8003\uff0c\u5177\u4f53\u6280\u672f\u53c2\u6570\u8bf7\u4ee5\u5382\u5546\u5b98\u65b9\u8d44\u6599\u4e3a\u51c6\u3002<\/p>\n<\/blockquote>\n","protected":false},"excerpt":{"rendered":"<p>\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u73af\u5883\u4e2d\u7684\u5fae\u7c92\u63a7\u5236\u6548\u679c\u7814\u7a76 \u5f15\u8a00\uff1a\u6d01\u51c0\u5ba4\u4e0e\u534a\u5bfc\u4f53\u5236\u9020\u7684\u7d27\u5bc6\u5173\u7cfb \u968f\u7740\u96c6\u6210\u7535\u8def\uff08IC\uff09\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u82af\u7247\u7279\u5f81\u5c3a\u5bf8\u5df2\u8fdb\u5165\u7eb3\u7c73\u7ea7\u522b\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u4e2d\u7a7a\u6c14\u8d28\u91cf\u7684\u8981\u6c42\u4e5f\u65e5\u76ca\u63d0\u9ad8\u3002\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08High-Efficiency Particulate Air 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