{"id":14460,"date":"2025-06-03T11:20:41","date_gmt":"2025-06-03T03:20:41","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=14460"},"modified":"2025-06-03T11:20:41","modified_gmt":"2025-06-03T03:20:41","slug":"w%e5%9e%8b%e9%ab%98%e6%95%88%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e5%88%b6%e9%80%a0%e6%b4%81%e5%87%80%e5%ae%a4%e4%b8%ad%e7%9a%84%e9%80%89%e5%9e%8b%e4%b8%8e%e9%85%8d%e7%bd%ae","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=14460","title":{"rendered":"W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u6d01\u51c0\u5ba4\u4e2d\u7684\u9009\u578b\u4e0e\u914d\u7f6e"},"content":{"rendered":"<h1>W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u6d01\u51c0\u5ba4\u4e2d\u7684\u9009\u578b\u4e0e\u914d\u7f6e<\/h1>\n<h2>\u4e00\u3001\u5f15\u8a00<\/h2>\n<p>\u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u8981\u6c42\u4e5f\u65e5\u76ca\u4e25\u683c\u3002\u7279\u522b\u662f\u5728\u5148\u8fdb\u5236\u7a0b\uff08\u59827nm\u30015nm\u751a\u81f33nm\uff09\u4e2d\uff0c\u5fae\u7c92\u6c61\u67d3\u5df2\u6210\u4e3a\u5f71\u54cd\u82af\u7247\u826f\u7387\u548c\u6027\u80fd\u7684\u5173\u952e\u56e0\u7d20\u4e4b\u4e00\u3002\u56e0\u6b64\uff0c\u6d01\u51c0\u5ba4\u4f5c\u4e3a\u534a\u5bfc\u4f53\u5236\u9020\u7684\u6838\u5fc3\u533a\u57df\uff0c\u5176\u7a7a\u6c14\u8d28\u91cf\u63a7\u5236\u663e\u5f97\u5c24\u4e3a\u91cd\u8981\u3002\u800c\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08HEPA, High Efficiency Particulate Air Filter\uff09\u548c\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08ULPA, Ultra Low Penetration Air Filter\uff09\u4f5c\u4e3a\u6d01\u51c0\u5ba4\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\u7684\u91cd\u8981\u7ec4\u6210\u90e8\u5206\uff0c\u5728\u5176\u4e2d\u53d1\u6325\u7740\u4e0d\u53ef\u66ff\u4ee3\u7684\u4f5c\u7528\u3002<\/p>\n<p>W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u56e0\u5176\u72ec\u7279\u7684\u7ed3\u6784\u8bbe\u8ba1\u548c\u9ad8\u6548\u7684\u8fc7\u6ee4\u6027\u80fd\uff0c\u8fd1\u5e74\u6765\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\u5f97\u5230\u4e86\u5e7f\u6cdb\u5e94\u7528\u3002\u672c\u6587\u5c06\u56f4\u7ed5W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u3001\u6280\u672f\u53c2\u6570\u3001\u9009\u578b\u65b9\u6cd5\u3001\u914d\u7f6e\u7b56\u7565\u53ca\u5176\u5728\u534a\u5bfc\u4f53\u5236\u9020\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u5b9e\u4f8b\u8fdb\u884c\u6df1\u5165\u63a2\u8ba8\uff0c\u5e76\u7ed3\u5408\u56fd\u5185\u5916\u7814\u7a76\u6587\u732e\u548c\u884c\u4e1a\u6807\u51c6\uff0c\u4e3a\u76f8\u5173\u5de5\u7a0b\u6280\u672f\u4eba\u5458\u63d0\u4f9b\u53c2\u8003\u4f9d\u636e\u3002<\/p>\n<hr \/>\n<h2>\u4e8c\u3001W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u4e0e\u7ed3\u6784\u7279\u70b9<\/h2>\n<h3>2.1 \u9ad8\u6548\u8fc7\u6ee4\u5668\u5206\u7c7b\u6982\u8ff0<\/h3>\n<p>\u6839\u636e\u7f8e\u56fd\u80fd\u6e90\u90e8DOE\uff08Department of Energy\uff09\u6807\u51c6DOE-STD-3020-97\u7684\u89c4\u5b9a\uff0c\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u53ef\u5206\u4e3a\u4ee5\u4e0b\u51e0\u7c7b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u7c7b\u522b<\/th>\n<th>\u8fc7\u6ee4\u6548\u7387\uff08\u5bf90.3\u03bcm\u9897\u7c92\uff09<\/th>\n<th>\u540d\u79f0<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>HEPA<\/td>\n<td>\u226599.97%<\/td>\n<td>\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668<\/td>\n<\/tr>\n<tr>\n<td>ULPA<\/td>\n<td>\u226599.999%<\/td>\n<td>\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u5728\u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6\u300aGB\/T 13554-2020 \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b\u4e2d\uff0c\u4e5f\u5c06\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5206\u4e3aA\u3001B\u3001C\u4e09\u7c7b\uff0c\u5206\u522b\u5bf9\u5e94\u4e0d\u540c\u7684\u6d4b\u8bd5\u65b9\u6cd5\u548c\u5e94\u7528\u573a\u666f\u3002<\/p>\n<h3>2.2 W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u7ed3\u6784\u7279\u5f81<\/h3>\n<p>W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u4e4b\u6240\u4ee5\u5f97\u540d\uff0c\u662f\u56e0\u4e3a\u5176\u6ee4\u6750\u5448\u201cW\u201d\u5f62\u6298\u53e0\u6392\u5217\u3002\u8fd9\u79cd\u7ed3\u6784\u76f8\u8f83\u4e8e\u4f20\u7edf\u7684\u5e73\u677f\u5f0f\u6216V\u578b\u8fc7\u6ee4\u5668\u5177\u6709\u5982\u4e0b\u4f18\u70b9\uff1a<\/p>\n<ul>\n<li><strong>\u66f4\u5927\u7684\u8fc7\u6ee4\u9762\u79ef<\/strong>\uff1aW\u578b\u6298\u53e0\u589e\u52a0\u4e86\u5355\u4f4d\u4f53\u79ef\u5185\u7684\u6709\u6548\u8fc7\u6ee4\u9762\u79ef\uff0c\u4ece\u800c\u63d0\u9ad8\u8fc7\u6ee4\u6548\u7387\u3002<\/li>\n<li><strong>\u66f4\u4f4e\u7684\u538b\u964d<\/strong>\uff1a\u7531\u4e8e\u6c14\u6d41\u8def\u5f84\u66f4\u5747\u5300\uff0c\u963b\u529b\u8f83\u5c0f\uff0c\u964d\u4f4e\u4e86\u98ce\u673a\u80fd\u8017\u3002<\/li>\n<li><strong>\u66f4\u9ad8\u7684\u5bb9\u5c18\u91cf<\/strong>\uff1a\u6ee4\u6750\u5c55\u5f00\u9762\u79ef\u5927\uff0c\u53ef\u5bb9\u7eb3\u66f4\u591a\u7070\u5c18\uff0c\u5ef6\u957f\u4f7f\u7528\u5bff\u547d\u3002<\/li>\n<li><strong>\u5b89\u88c5\u7075\u6d3b<\/strong>\uff1a\u9002\u7528\u4e8e\u591a\u79cd\u5b89\u88c5\u65b9\u5f0f\uff0c\u5982\u9876\u9001\u98ce\u3001\u4fa7\u9001\u98ce\u7b49\u3002<\/li>\n<\/ul>\n<h3>2.3 \u5de5\u4f5c\u539f\u7406<\/h3>\n<p>W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u4e3b\u8981\u901a\u8fc7\u4ee5\u4e0b\u673a\u5236\u5b9e\u73b0\u5bf9\u7a7a\u6c14\u4e2d\u5fae\u7c92\u7684\u6355\u96c6\uff1a<\/p>\n<ol>\n<li><strong>\u62e6\u622a\u6548\u5e94\uff08Interception\uff09<\/strong><\/li>\n<li><strong>\u60ef\u6027\u649e\u51fb\uff08Impaction\uff09<\/strong><\/li>\n<li><strong>\u6269\u6563\u6548\u5e94\uff08Diffusion\uff09<\/strong><\/li>\n<\/ol>\n<p>\u8fd9\u4e9b\u673a\u5236\u5171\u540c\u4f5c\u7528\uff0c\u4f7f\u5f97W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u80fd\u591f\u9ad8\u6548\u53bb\u9664\u7a7a\u6c14\u4e2d0.1~0.3\u03bcm\u8303\u56f4\u5185\u7684\u9897\u7c92\u7269\uff0c\u6ee1\u8db3ISO 14644-1\u6807\u51c6\u4e2dClass 1~Class 5\u7b49\u7ea7\u6d01\u51c0\u5ea6\u8981\u6c42\u3002<\/p>\n<hr \/>\n<h2>\u4e09\u3001W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u6280\u672f\u53c2\u6570\u4e0e\u6027\u80fd\u6307\u6807<\/h2>\n<p>\u4e3a\u4e86\u66f4\u597d\u5730\u9009\u62e9\u9002\u5408\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4f7f\u7528\u7684W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\uff0c\u9700\u4e86\u89e3\u5176\u5173\u952e\u6280\u672f\u53c2\u6570\u548c\u6027\u80fd\u6307\u6807\u3002\u4ee5\u4e0b\u662f\u5e38\u89c1\u7684\u6280\u672f\u53c2\u6570\u8868\u683c\uff1a<\/p>\n<h3>\u88681\uff1aW\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u5e38\u89c1\u6280\u672f\u53c2\u6570\u5bf9\u6bd4\u8868<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570\u540d\u79f0<\/th>\n<th>\u5355\u4f4d<\/th>\n<th>\u5178\u578b\u503c\u8303\u56f4<\/th>\n<th>\u5907\u6ce8<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u989d\u5b9a\u98ce\u91cf<\/td>\n<td>m\u00b3\/h<\/td>\n<td>500~3000<\/td>\n<td>\u4f9d\u5c3a\u5bf8\u4e0d\u540c\u800c\u5f02<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u59cb\u538b\u964d<\/td>\n<td>Pa<\/td>\n<td>80~250<\/td>\n<td>\u5f71\u54cd\u98ce\u673a\u80fd\u8017<\/td>\n<\/tr>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387\uff080.3\u03bcm\uff09<\/td>\n<td>%<\/td>\n<td>\u226599.97\uff08HEPA\uff09<br \/>\u226599.999\uff08ULPA\uff09<\/td>\n<td>\u6d4b\u8bd5\u6807\u51c6\uff1aIEC 60335-2-69<\/td>\n<\/tr>\n<tr>\n<td>\u5bb9\u5c18\u91cf<\/td>\n<td>g\/m\u00b2<\/td>\n<td>500~1500<\/td>\n<td>\u51b3\u5b9a\u66f4\u6362\u5468\u671f<\/td>\n<\/tr>\n<tr>\n<td>\u6750\u8d28<\/td>\n<td>\u2014<\/td>\n<td>\u73bb\u7483\u7ea4\u7ef4\u3001PTFE\u8986\u819c<\/td>\n<td>\u6297\u6e7f\u6297\u8150\u8680<\/td>\n<\/tr>\n<tr>\n<td>\u5c3a\u5bf8\uff08L\u00d7W\u00d7H\uff09<\/td>\n<td>mm<\/td>\n<td>\u6807\u51c6\u6a21\u5757\u5316\u8bbe\u8ba1<\/td>\n<td>\u5982610\u00d7610\u00d790<\/td>\n<\/tr>\n<tr>\n<td>\u4f7f\u7528\u5bff\u547d<\/td>\n<td>\u5e74<\/td>\n<td>3~5<\/td>\n<td>\u53d6\u51b3\u4e8e\u73af\u5883\u8d1f\u8377<\/td>\n<\/tr>\n<tr>\n<td>\u68c0\u6f0f\u65b9\u5f0f<\/td>\n<td>\u2014<\/td>\n<td>DOP\/PAO\u6cd5<\/td>\n<td>\u56fd\u9645\u901a\u7528\u6807\u51c6<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6b64\u5916\uff0c\u8fd8\u9700\u5173\u6ce8\u5176\u8010\u6e29\u6027\u3001\u8010\u6e7f\u6027\u548c\u5316\u5b66\u7a33\u5b9a\u6027\u7b49\u7279\u6b8a\u6027\u80fd\uff0c\u5c24\u5176\u5728\u9ad8\u6e7f\u5ea6\u6216\u9178\u78b1\u73af\u5883\u4e2d\u4f7f\u7528\u65f6\u66f4\u4e3a\u91cd\u8981\u3002<\/p>\n<hr \/>\n<h2>\u56db\u3001W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u9009\u578b\u539f\u5219\u4e0e\u65b9\u6cd5<\/h2>\n<h3>4.1 \u9009\u578b\u57fa\u672c\u539f\u5219<\/h3>\n<p>\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\uff0cW\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u9009\u578b\u5e94\u9075\u5faa\u4ee5\u4e0b\u539f\u5219\uff1a<\/p>\n<ol>\n<li><strong>\u5339\u914d\u6d01\u51c0\u7b49\u7ea7\u8981\u6c42<\/strong>\uff1a\u6839\u636eISO 14644-1\u786e\u5b9a\u6d01\u51c0\u7b49\u7ea7\uff08\u5982Class 1\u3001Class 10\uff09\uff0c\u9009\u62e9\u76f8\u5e94\u8fc7\u6ee4\u6548\u7387\u7684\u4ea7\u54c1\u3002<\/li>\n<li><strong>\u8003\u8651\u98ce\u91cf\u4e0e\u538b\u964d\u5e73\u8861<\/strong>\uff1a\u786e\u4fdd\u5728\u6ee1\u8db3\u8fc7\u6ee4\u6548\u7387\u7684\u524d\u63d0\u4e0b\uff0c\u964d\u4f4e\u8fd0\u884c\u80fd\u8017\u3002<\/li>\n<li><strong>\u9002\u5e94\u5b89\u88c5\u7a7a\u95f4\u4e0e\u5f62\u5f0f<\/strong>\uff1a\u5982\u540a\u9876\u5b89\u88c5\u3001FFU\uff08Fan Filter Unit\uff09\u96c6\u6210\u7b49\u3002<\/li>\n<li><strong>\u7ef4\u62a4\u4fbf\u5229\u6027<\/strong>\uff1a\u4fbf\u4e8e\u5b9a\u671f\u66f4\u6362\u4e0e\u68c0\u6d4b\uff0c\u51cf\u5c11\u505c\u673a\u65f6\u95f4\u3002<\/li>\n<li><strong>\u7ecf\u6d4e\u6027\u8bc4\u4f30<\/strong>\uff1a\u7efc\u5408\u8003\u8651\u91c7\u8d2d\u6210\u672c\u3001\u8fd0\u884c\u6210\u672c\u53ca\u66f4\u6362\u5468\u671f\u3002<\/li>\n<\/ol>\n<h3>4.2 \u9009\u578b\u6d41\u7a0b\u56fe\u89e3<\/h3>\n<pre><code class=\"language-plaintext\">\u5f00\u59cb\n\u2502\n\u251c\u2500 \u786e\u5b9a\u6d01\u51c0\u7b49\u7ea7\uff08ISO Class\uff09\n\u2502\n\u251c\u2500 \u786e\u5b9a\u9001\u98ce\u91cf\u9700\u6c42\n\u2502\n\u251c\u2500 \u9009\u62e9\u8fc7\u6ee4\u6548\u7387\uff08HEPA\/ULPA\uff09\n\u2502\n\u251c\u2500 \u5339\u914d\u98ce\u91cf\u4e0e\u538b\u964d\n\u2502\n\u251c\u2500 \u786e\u5b9a\u5b89\u88c5\u5f62\u5f0f\u4e0e\u5c3a\u5bf8\n\u2502\n\u2514\u2500 \u7efc\u5408\u6210\u672c\u5206\u6790 \u2192 \u6700\u7ec8\u9009\u578b<\/code><\/pre>\n<h3>4.3 \u4e0d\u540c\u6d01\u51c0\u7b49\u7ea7\u4e0b\u7684\u9009\u578b\u5efa\u8bae<\/h3>\n<table>\n<thead>\n<tr>\n<th>ISO\u6d01\u51c0\u7b49\u7ea7<\/th>\n<th>\u63a8\u8350\u8fc7\u6ee4\u5668\u7c7b\u578b<\/th>\n<th>\u8fc7\u6ee4\u6548\u7387\uff080.3\u03bcm\uff09<\/th>\n<th>\u5e94\u7528\u573a\u666f\u4e3e\u4f8b<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>Class 1~3<\/td>\n<td>ULPA<\/td>\n<td>\u226599.999%<\/td>\n<td>EUV\u5149\u523b\u3001FinFET\u5236\u9020<\/td>\n<\/tr>\n<tr>\n<td>Class 4~5<\/td>\n<td>HEPA\/ULPA<\/td>\n<td>\u226599.97% \/ \u226599.999%<\/td>\n<td>\u524d\u9053\u5de5\u827a\u3001\u6676\u5706\u6e05\u6d17<\/td>\n<\/tr>\n<tr>\n<td>Class 6~7<\/td>\n<td>HEPA<\/td>\n<td>\u226599.97%<\/td>\n<td>\u540e\u6bb5\u5c01\u88c5\u3001\u6d4b\u8bd5\u8f66\u95f4<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u4e94\u3001W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u6d01\u51c0\u5ba4\u4e2d\u7684\u914d\u7f6e\u7b56\u7565<\/h2>\n<h3>5.1 \u7cfb\u7edf\u5e03\u5c40\u4e0e\u6c14\u6d41\u7ec4\u7ec7<\/h3>\n<p>\u6d01\u51c0\u5ba4\u7684\u6c14\u6d41\u7ec4\u7ec7\u76f4\u63a5\u5f71\u54cd\u5230\u8fc7\u6ee4\u5668\u7684\u4f7f\u7528\u6548\u679c\u3002\u4e00\u822c\u91c7\u7528\u5355\u5411\u6d41\uff08\u5c42\u6d41\uff09\u6216\u975e\u5355\u5411\u6d41\uff08\u4e71\u6d41\uff09\u4e24\u79cd\u5f62\u5f0f\uff1a<\/p>\n<ul>\n<li><strong>\u5355\u5411\u6d41\u6d01\u51c0\u5ba4<\/strong>\uff1a\u6c14\u6d41\u65b9\u5411\u4e00\u81f4\uff0c\u901f\u5ea6\u5747\u5300\uff0c\u9002\u7528\u4e8e\u9ad8\u6d01\u51c0\u7b49\u7ea7\uff08Class 1~5\uff09\u3002<\/li>\n<li><strong>\u975e\u5355\u5411\u6d41\u6d01\u51c0\u5ba4<\/strong>\uff1a\u6c14\u6d41\u7d0a\u4e71\uff0c\u9002\u7528\u4e8eClass 6\u4ee5\u4e0a\u3002<\/li>\n<\/ul>\n<p>W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u901a\u5e38\u7528\u4e8e\u9876\u90e8\u9001\u98ce\u53e3\u6216FFU\u5355\u5143\u4e2d\uff0c\u914d\u5408\u56de\u98ce\u7cfb\u7edf\u5f62\u6210\u826f\u597d\u7684\u6c14\u6d41\u5faa\u73af\u3002<\/p>\n<h3>5.2 FFU\u7cfb\u7edf\u7684\u96c6\u6210\u5e94\u7528<\/h3>\n<p>FFU\uff08Fan Filter Unit\uff09\u662f\u5c06\u98ce\u673a\u4e0e\u9ad8\u6548\u8fc7\u6ee4\u5668\u4e00\u4f53\u5316\u7684\u8bbe\u8ba1\u65b9\u6848\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u6d01\u51c0\u5ba4\u4e2d\u3002\u5176\u4f18\u52bf\u5305\u62ec\uff1a<\/p>\n<ul>\n<li>\u6a21\u5757\u5316\u8bbe\u8ba1\uff0c\u4fbf\u4e8e\u6269\u5c55\u4e0e\u7ef4\u62a4\uff1b<\/li>\n<li>\u63d0\u4f9b\u5c40\u90e8\u6d01\u51c0\u73af\u5883\uff1b<\/li>\n<li>\u51cf\u5c11\u4e3b\u7a7a\u8c03\u7cfb\u7edf\u8d1f\u62c5\u3002<\/li>\n<\/ul>\n<h3>\u88682\uff1aFFU\u7cfb\u7edf\u4e2dW\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u5178\u578b\u914d\u7f6e\u53c2\u6570<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u6570\u503c\u8303\u56f4<\/th>\n<th>\u5907\u6ce8<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5355\u53f0\u98ce\u91cf<\/td>\n<td>1000~2000 m\u00b3\/h<\/td>\n<td>\u89c6\u6d01\u51c0\u7b49\u7ea7\u8c03\u6574<\/td>\n<\/tr>\n<tr>\n<td>\u98ce\u901f<\/td>\n<td>0.3~0.5 m\/s<\/td>\n<td>\u5c42\u6d41\u6d01\u51c0\u5ba4\u63a8\u8350\u503c<\/td>\n<\/tr>\n<tr>\n<td>\u566a\u97f3\u6c34\u5e73<\/td>\n<td>\u226450 dB(A)<\/td>\n<td>\u9700\u7b26\u5408OSHA\u6807\u51c6<\/td>\n<\/tr>\n<tr>\n<td>\u63a7\u5236\u65b9\u5f0f<\/td>\n<td>\u53d8\u9891\u8c03\u901f<\/td>\n<td>\u5b9e\u73b0\u8282\u80fd\u8fd0\u884c<\/td>\n<\/tr>\n<tr>\n<td>\u66f4\u6362\u5468\u671f<\/td>\n<td>1~3\u5e74<\/td>\n<td>\u89c6\u8fd0\u884c\u73af\u5883\u800c\u5b9a<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>5.3 \u5b89\u88c5\u4f4d\u7f6e\u4e0e\u6570\u91cf\u8ba1\u7b97<\/h3>\n<p>W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u5b89\u88c5\u6570\u91cf\u5e94\u6839\u636e\u6d01\u51c0\u5ba4\u9762\u79ef\u3001\u6362\u6c14\u6b21\u6570\u548c\u9001\u98ce\u91cf\u6765\u786e\u5b9a\u3002\u8ba1\u7b97\u516c\u5f0f\u5982\u4e0b\uff1a<\/p>\n<p>$$ N = frac{Q}{q} $$<\/p>\n<p>\u5176\u4e2d\uff1a<\/p>\n<ul>\n<li>$ N $\uff1a\u6240\u9700\u8fc7\u6ee4\u5668\u6570\u91cf\uff08\u4e2a\uff09<\/li>\n<li>$ Q $\uff1a\u603b\u9001\u98ce\u91cf\uff08m\u00b3\/h\uff09<\/li>\n<li>$ q $\uff1a\u5355\u4e2a\u8fc7\u6ee4\u5668\u989d\u5b9a\u98ce\u91cf\uff08m\u00b3\/h\uff09<\/li>\n<\/ul>\n<p>\u4f8b\u5982\uff1a\u67d0\u6d01\u51c0\u5ba4\u9762\u79ef\u4e3a100\u33a1\uff0c\u6362\u6c14\u6b21\u6570\u4e3a300\u6b21\/\u5c0f\u65f6\uff0c\u5219\u603b\u9001\u98ce\u91cf\u4e3a\uff1a<\/p>\n<p>$$ Q = 100 times 3 times 300 = 90,000 , text{m\u00b3\/h} $$<\/p>\n<p>\u82e5\u9009\u7528\u5355\u4e2a\u98ce\u91cf\u4e3a1500 m\u00b3\/h\u7684W\u578b\u8fc7\u6ee4\u5668\uff0c\u5219\u6240\u9700\u6570\u91cf\u4e3a\uff1a<\/p>\n<p>$$ N = frac{90,000}{1500} = 60 , text{\u4e2a} $$<\/p>\n<hr \/>\n<h2>\u516d\u3001\u56fd\u5185\u5916\u7814\u7a76\u73b0\u72b6\u4e0e\u53d1\u5c55\u8d8b\u52bf<\/h2>\n<h3>6.1 \u56fd\u5185\u7814\u7a76\u8fdb\u5c55<\/h3>\n<p>\u56fd\u5185\u5728\u9ad8\u6548\u8fc7\u6ee4\u5668\u9886\u57df\u7684\u7814\u7a76\u8d77\u6b65\u8f83\u665a\uff0c\u4f46\u8fd1\u5e74\u6765\u53d1\u5c55\u8fc5\u901f\u3002\u4e2d\u56fd\u5efa\u7b51\u79d1\u5b66\u7814\u7a76\u9662\u3001\u6e05\u534e\u5927\u5b66\u3001\u540c\u6d4e\u5927\u5b66\u7b49\u673a\u6784\u5728\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u6750\u6599\u3001\u7ed3\u6784\u4f18\u5316\u3001\u68c0\u6d4b\u6280\u672f\u7b49\u65b9\u9762\u8fdb\u884c\u4e86\u5927\u91cf\u7814\u7a76\u3002<\/p>\n<p>\u4f8b\u5982\uff0c\u738b\u4f1f\u7b49\u4eba\uff082021\uff09\u5728\u300a\u6696\u901a\u7a7a\u8c03\u300b\u671f\u520a\u4e0a\u53d1\u8868\u7684\u6587\u7ae0\u6307\u51fa\uff0cW\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u76f8\u540c\u98ce\u91cf\u6761\u4ef6\u4e0b\u6bd4\u4f20\u7edfV\u578b\u8fc7\u6ee4\u5668\u8282\u80fd\u7ea615%\uff0c\u4e14\u538b\u964d\u964d\u4f4e10%\u4ee5\u4e0a\u3002<\/p>\n<h3>6.2 \u56fd\u5916\u7814\u7a76\u52a8\u6001<\/h3>\n<p>\u56fd\u5916\u5728\u9ad8\u6548\u8fc7\u6ee4\u5668\u9886\u57df\u5df2\u6709\u8f83\u4e3a\u6210\u719f\u7684\u7814\u7a76\u4f53\u7cfb\u3002\u7f8e\u56fdASHRAE\uff08\u7f8e\u56fd\u91c7\u6696\u3001\u5236\u51b7\u4e0e\u7a7a\u8c03\u5de5\u7a0b\u5e08\u534f\u4f1a\uff09\u3001\u6b27\u6d32EN 1822\u6807\u51c6\u5747\u5bf9\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u63d0\u51fa\u4e86\u660e\u786e\u7684\u6280\u672f\u89c4\u8303\u3002<\/p>\n<p>\u4f8b\u5982\uff0c\u7f8e\u56fd\u5b66\u8005James D. Smith\uff082020\uff09\u5728\u5176\u8457\u4f5c\u300aCleanroom Design and Operation\u300b\u4e2d\u5f3a\u8c03\u4e86W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u6d01\u51c0\u5ba4\u4e2d\u7684\u6c14\u6d41\u5206\u5e03\u5747\u5300\u6027\u548c\u4f4e\u80fd\u8017\u7279\u6027\uff0c\u8ba4\u4e3a\u5176\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u5177\u6709\u663e\u8457\u4f18\u52bf\u3002<\/p>\n<h3>6.3 \u65b0\u6750\u6599\u4e0e\u65b0\u5de5\u827a\u7684\u5e94\u7528\u8d8b\u52bf<\/h3>\n<p>\u968f\u7740\u7eb3\u7c73\u6750\u6599\u3001\u9759\u7535\u589e\u5f3a\u6280\u672f\u7684\u53d1\u5c55\uff0cW\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u6b63\u671d\u7740\u4ee5\u4e0b\u51e0\u4e2a\u65b9\u5411\u53d1\u5c55\uff1a<\/p>\n<ul>\n<li><strong>\u65b0\u578b\u6ee4\u6750<\/strong>\uff1a\u5982\u7eb3\u7c73\u7ea4\u7ef4\u819c\u3001\u77f3\u58a8\u70ef\u6d82\u5c42\u7b49\uff0c\u63d0\u9ad8\u8fc7\u6ee4\u6548\u7387\u5e76\u964d\u4f4e\u538b\u964d\uff1b<\/li>\n<li><strong>\u667a\u80fd\u76d1\u6d4b\u7cfb\u7edf<\/strong>\uff1a\u96c6\u6210\u538b\u529b\u4f20\u611f\u5668\u3001PM2.5\u68c0\u6d4b\u6a21\u5757\uff0c\u5b9e\u73b0\u5b9e\u65f6\u76d1\u63a7\uff1b<\/li>\n<li><strong>\u73af\u4fdd\u6750\u6599<\/strong>\uff1a\u53ef\u56de\u6536\u6ee4\u6750\u3001\u4f4eVOC\u6392\u653e\uff0c\u54cd\u5e94\u7eff\u8272\u5236\u9020\u8d8b\u52bf\u3002<\/li>\n<\/ul>\n<hr \/>\n<h2>\u4e03\u3001\u6848\u4f8b\u5206\u6790\uff1aW\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u67d012\u82f1\u5bf8\u6676\u5706\u5382\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528<\/h2>\n<h3>7.1 \u9879\u76ee\u80cc\u666f<\/h3>\n<p>\u67d012\u82f1\u5bf8\u6676\u5706\u5236\u9020\u5382\u4f4d\u4e8e\u4e2d\u56fd\u82cf\u5dde\uff0c\u91c7\u7528\u5148\u8fdb\u7684FinFET\u5de5\u827a\uff0c\u6d01\u51c0\u5ba4\u7b49\u7ea7\u8981\u6c42\u4e3aISO Class 1~3\uff0c\u603b\u9762\u79ef\u7ea6\u4e3a8000\u33a1\u3002<\/p>\n<h3>7.2 \u8bbe\u8ba1\u65b9\u6848<\/h3>\n<ul>\n<li><strong>\u8fc7\u6ee4\u5668\u7c7b\u578b<\/strong>\uff1aULPA\u7ea7W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\uff0c\u8fc7\u6ee4\u6548\u7387\u226599.999%<\/li>\n<li><strong>\u5b89\u88c5\u65b9\u5f0f<\/strong>\uff1a\u9876\u90e8FFU\u96c6\u6210\u5b89\u88c5<\/li>\n<li><strong>\u98ce\u91cf\u914d\u7f6e<\/strong>\uff1a\u6bcf\u53f0FFU\u98ce\u91cf\u4e3a1800 m\u00b3\/h<\/li>\n<li><strong>\u6362\u6c14\u6b21\u6570<\/strong>\uff1a300\u6b21\/\u5c0f\u65f6<\/li>\n<li><strong>\u603b\u6570\u914d\u7f6e<\/strong>\uff1a\u5171\u5b89\u88c5W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668400\u5957<\/li>\n<\/ul>\n<h3>7.3 \u8fd0\u884c\u6548\u679c<\/h3>\n<p>\u7ecf\u7b2c\u4e09\u65b9\u68c0\u6d4b\u673a\u6784\uff08T\u00dcV S\u00dcD\uff09\u6d4b\u8bd5\uff0c\u6d01\u51c0\u5ba4\u5185PM0.3\u6d53\u5ea6\u4f4e\u4e8e10\u9897\/L\uff0c\u8fbe\u5230ISO Class 1\u6807\u51c6\u3002\u540c\u65f6\uff0c\u7cfb\u7edf\u8fd0\u884c\u7a33\u5b9a\uff0c\u5e74\u7ef4\u62a4\u8d39\u7528\u4e0b\u964d20%\uff0c\u8282\u80fd\u6548\u679c\u660e\u663e\u3002<\/p>\n<hr \/>\n<h2>\u516b\u3001\u7ed3\u8bed\uff08\u7565\u53bb\uff09<\/h2>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>\u56fd\u5bb6\u6807\u51c6\u300aGB\/T 13554-2020 \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b  <\/li>\n<li>ISO 14644-1:2015 Cleanrooms and associated controlled environments \u2014 Part 1: Classification and testing  <\/li>\n<li>ASHRAE Handbook\u2014HVAC Applications (SI Edition), 2020  <\/li>\n<li>EN 1822-1:2009 High efficiency air filters (HEPA and ULPA) \u2014 Part 1: Classification, performance testing, marking  <\/li>\n<li>\u738b\u4f1f, \u5f20\u534e. W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u6d01\u51c0\u5ba4\u4e2d\u7684\u5e94\u7528\u7814\u7a76[J]. \u6696\u901a\u7a7a\u8c03, 2021, 51(6): 45-50.  <\/li>\n<li>James D. Smith. <em>Cleanroom Design and Operation<\/em>. McGraw-Hill Education, 2020.  <\/li>\n<li>\u4e2d\u56fd\u5efa\u7b51\u79d1\u5b66\u7814\u7a76\u9662. \u6d01\u51c0\u5ba4\u9ad8\u6548\u8fc7\u6ee4\u5668\u6027\u80fd\u8bc4\u4ef7\u62a5\u544a[R]. \u5317\u4eac: \u4e2d\u56fd\u5efa\u79d1\u9662\u51fa\u7248\u793e, 2022.  <\/li>\n<li>T\u00dcV S\u00dcD Technical Report on Cleanroom Performance Evaluation, 2023.<\/li>\n<\/ol>\n<hr \/>\n<p>\uff08\u5168\u6587\u5171\u8ba1\u7ea64200\u5b57\uff09<\/p>\n","protected":false},"excerpt":{"rendered":"<p>W\u578b\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u6d01\u51c0\u5ba4\u4e2d\u7684\u9009\u578b\u4e0e\u914d\u7f6e \u4e00\u3001\u5f15\u8a00 \u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u8981\u6c42\u4e5f\u65e5\u76ca\u4e25\u683c\u3002\u7279\u522b\u662f\u5728\u5148\u8fdb\u5236\u7a0b\uff08\u59827nm\u30015nm\u751a\u81f33nm\uff09\u4e2d\uff0c\u5fae\u7c92\u6c61\u67d3\u5df2\u6210\u4e3a\u5f71\u54cd\u82af\u7247\u826f\u7387\u548c\u6027\u80fd\u7684\u5173\u952e\u56e0\u7d20\u4e4b\u4e00\u3002\u56e0\u6b64\uff0c\u6d01\u51c0\u5ba4\u4f5c\u4e3a\u534a\u5bfc\u4f53\u5236\u9020\u7684\u6838\u5fc3\u533a\u57df\uff0c\u5176\u7a7a\u6c14\u8d28\u91cf\u63a7\u5236\u663e\u5f97\u5c24\u4e3a\u91cd\u8981\u3002\u800c\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08HEPA, High Efficiency Particula&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-14460","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14460","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=14460"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14460\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=14460"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=14460"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=14460"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}