{"id":14405,"date":"2025-05-29T15:02:58","date_gmt":"2025-05-29T07:02:58","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=14405"},"modified":"2025-05-29T15:02:58","modified_gmt":"2025-05-29T07:02:58","slug":"%e9%ab%98%e6%95%88%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e6%b4%81%e5%87%80%e5%8e%82%e6%88%bf%e4%b8%ad%e7%9a%84%e5%8c%96%e5%ad%a6%e6%b1%a1%e6%9f%93%e6%8e%a7%e5%88%b6%e7%ad%96","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=14405","title":{"rendered":"\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u5316\u5b66\u6c61\u67d3\u63a7\u5236\u7b56\u7565"},"content":{"rendered":"<h1>\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u5316\u5b66\u6c61\u67d3\u63a7\u5236\u7b56\u7565<\/h1>\n<h2>\u4e00\u3001\u5f15\u8a00\uff1a\u534a\u5bfc\u4f53\u5236\u9020\u73af\u5883\u7684\u6d01\u51c0\u9700\u6c42<\/h2>\n<p>\u968f\u7740\u96c6\u6210\u7535\u8def\u5de5\u827a\u5236\u7a0b\u54115\u7eb3\u7c73\u53ca\u4ee5\u4e0b\u8282\u70b9\u6f14\u8fdb\uff0c\u534a\u5bfc\u4f53\u5236\u9020\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u5c24\u5176\u662f\u5316\u5b66\u6c61\u67d3\u7269\uff08\u5982\u6c28\u6c14NH\u2083\u3001\u786b\u5316\u6c22H\u2082S\u3001\u6325\u53d1\u6027\u6709\u673a\u7269VOCs\u7b49\uff09\u7684\u5b58\u5728\uff0c\u53ef\u80fd\u5f15\u53d1\u5149\u523b\u80f6\u7f3a\u9677\u3001\u91d1\u5c5e\u5c42\u8150\u8680\u3001\u6676\u5706\u8868\u9762\u9897\u7c92\u6c89\u79ef\u7b49\u4e00\u7cfb\u5217\u95ee\u9898\uff0c\u4e25\u91cd\u5f71\u54cd\u826f\u7387\u548c\u5668\u4ef6\u6027\u80fd\u3002\u4e3a\u6b64\uff0c\u6d01\u51c0\u5382\u623f\u5fc5\u987b\u91c7\u7528\u9ad8\u6548\u7684\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf\uff0c\u7279\u522b\u662f<strong>\u9ad8\u6548\u7c92\u5b50\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08HEPA\uff09<\/strong>\u4e0e<strong>\u8d85\u9ad8\u6548\u7c92\u5b50\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08ULPA\uff09<\/strong>\uff0c\u5e76\u7ed3\u5408\u5316\u5b66\u8fc7\u6ee4\u6280\u672f\uff0c\u5b9e\u73b0\u5bf9\u7a7a\u6c14\u4e2d\u5316\u5b66\u6c61\u67d3\u7269\u7684\u6709\u6548\u63a7\u5236\u3002<\/p>\n<p>\u672c\u6587\u5c06\u56f4\u7ed5\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u5e94\u7528\u5c55\u5f00\uff0c\u91cd\u70b9\u63a2\u8ba8\u5176\u5728\u5316\u5b66\u6c61\u67d3\u63a7\u5236\u4e2d\u7684\u4f5c\u7528\u673a\u5236\u3001\u4ea7\u54c1\u53c2\u6570\u3001\u9009\u578b\u7b56\u7565\u3001\u7ec4\u5408\u65b9\u6848\u4ee5\u53ca\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\uff0c\u5e76\u5f15\u7528\u5927\u91cf\u56fd\u5185\u5916\u6743\u5a01\u6587\u732e\u8d44\u6599\uff0c\u529b\u6c42\u4e3a\u5de5\u7a0b\u6280\u672f\u4eba\u5458\u63d0\u4f9b\u8be6\u5b9e\u7684\u6280\u672f\u53c2\u8003\u3002<\/p>\n<hr \/>\n<h2>\u4e8c\u3001\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u4e0e\u5206\u7c7b<\/h2>\n<h3>2.1 HEPA\u4e0eULPA\u8fc7\u6ee4\u5668\u7684\u5de5\u4f5c\u539f\u7406<\/h3>\n<p>\u9ad8\u6548\u7c92\u5b50\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08HEPA\uff09\u662f\u4e00\u79cd\u80fd\u6709\u6548\u53bb\u9664\u7a7a\u6c14\u4e2d\u22650.3\u03bcm\u7c92\u5f84\u9897\u7c92\u7684\u8fc7\u6ee4\u88c5\u7f6e\uff0c\u5176\u6548\u7387\u901a\u5e38\u8fbe\u523099.97%\u4ee5\u4e0a\uff1b\u800c\u8d85\u9ad8\u6548\u7c92\u5b50\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08ULPA\uff09\u5219\u8fdb\u4e00\u6b65\u63d0\u5347\u5230\u22650.12\u03bcm\u9897\u7c92\u7684\u53bb\u9664\u6548\u7387\u8fbe99.999%\uff0c\u9002\u7528\u4e8e\u66f4\u9ad8\u6d01\u51c0\u5ea6\u8981\u6c42\u7684\u573a\u5408\u3002<\/p>\n<p>HEPA\/ULPA\u4e3b\u8981\u901a\u8fc7\u4ee5\u4e0b\u51e0\u79cd\u673a\u5236\u5b9e\u73b0\u9897\u7c92\u6355\u96c6\uff1a<\/p>\n<ul>\n<li><strong>\u62e6\u622a\u6548\u5e94\uff08Interception\uff09<\/strong><\/li>\n<li><strong>\u60ef\u6027\u78b0\u649e\uff08Impaction\uff09<\/strong><\/li>\n<li><strong>\u6269\u6563\u6548\u5e94\uff08Diffusion\uff09<\/strong><\/li>\n<\/ul>\n<p>\u8fd9\u4e9b\u7269\u7406\u673a\u5236\u5171\u540c\u4f5c\u7528\uff0c\u4f7f\u5f97\u5fae\u5c0f\u9897\u7c92\u65e0\u6cd5\u7a7f\u900f\u6ee4\u6750\uff0c\u4ece\u800c\u88ab\u622a\u7559\u5728\u6ee4\u7f51\u4e2d\u3002<\/p>\n<h3>2.2 \u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u5f15\u5165\u4e0e\u53d1\u5c55<\/h3>\n<p>\u5c3d\u7ba1HEPA\/ULPA\u5728\u9897\u7c92\u63a7\u5236\u65b9\u9762\u8868\u73b0\u4f18\u5f02\uff0c\u4f46\u5b83\u4eec\u5bf9\u4e8e\u6c14\u4f53\u6001\u5316\u5b66\u6c61\u67d3\u7269\uff08AMC, Airborne Molecular Contaminants\uff09\u7684\u53bb\u9664\u80fd\u529b\u6709\u9650\u3002\u56e0\u6b64\uff0c\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5ba4\u4e2d\uff0c\u8fd8\u9700\u5f15\u5165<strong>\u5316\u5b66\u8fc7\u6ee4\u5668\uff08Chemical Filter\uff09<\/strong>\uff0c\u7528\u4e8e\u5438\u9644\u6216\u53cd\u5e94\u53bb\u9664\u6c14\u6001\u5206\u5b50\u6c61\u67d3\u7269\u3002<\/p>\n<p>\u5e38\u89c1\u7684\u5316\u5b66\u8fc7\u6ee4\u6750\u6599\u5305\u62ec\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u8fc7\u6ee4\u4ecb\u8d28\u7c7b\u578b<\/th>\n<th>\u4e3b\u8981\u6210\u5206<\/th>\n<th>\u53bb\u9664\u5bf9\u8c61<\/th>\n<th>\u7279\u70b9<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6d3b\u6027\u70ad<\/td>\n<td>\u78b3\u57fa\u6750\u6599<\/td>\n<td>VOCs\u3001\u9178\u6027\u6c14\u4f53<\/td>\n<td>\u5438\u9644\u5bb9\u91cf\u5927\uff0c\u4f46\u6613\u9971\u548c<\/td>\n<\/tr>\n<tr>\n<td>\u5206\u5b50\u7b5b<\/td>\n<td>Al\u2082O\u2083-SiO\u2082<\/td>\n<td>NH\u2083\u3001H\u2082S\u3001\u6c34\u5206<\/td>\n<td>\u9009\u62e9\u6027\u5f3a\uff0c\u8010\u9ad8\u6e29<\/td>\n<\/tr>\n<tr>\n<td>\u6539\u6027\u6c27\u5316\u94dd<\/td>\n<td>Al\u2082O\u2083\u6539\u6027\u5904\u7406<\/td>\n<td>\u9178\u6027\u6c14\u4f53\u3001\u5364\u7d20<\/td>\n<td>\u53cd\u5e94\u578b\u53bb\u9664\uff0c\u5bff\u547d\u957f<\/td>\n<\/tr>\n<tr>\n<td>\u91d1\u5c5e\u50ac\u5316\u5242<\/td>\n<td>Pt\u3001Pd\u7b49\u8d35\u91d1\u5c5e<\/td>\n<td>VOCs\u50ac\u5316\u6c27\u5316<\/td>\n<td>\u9700\u52a0\u70ed\uff0c\u80fd\u8017\u9ad8<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u4e09\u3001\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u914d\u7f6e\u6a21\u5f0f<\/h2>\n<h3>3.1 \u5178\u578b\u6d01\u51c0\u5ba4\u7ed3\u6784\u4e0e\u6c14\u6d41\u7ec4\u7ec7<\/h3>\n<p>\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u4e00\u822c\u91c7\u7528\u5782\u76f4\u5355\u5411\u6d41\uff08Vertical Laminar Flow\uff09\uff0c\u901a\u8fc7FFU\uff08Fan Filter Unit\uff09\u9001\u98ce\u5355\u5143\u5c06\u7ecf\u8fc7HEPA\/ULPA+\u5316\u5b66\u8fc7\u6ee4\u540e\u7684\u7a7a\u6c14\u5747\u5300\u9001\u5165\u6d01\u51c0\u533a\uff0c\u786e\u4fdd\u5de5\u4f5c\u533a\u57df\u8fbe\u5230ISO Class 1~4\u7ea7\u6d01\u51c0\u6807\u51c6\u3002<\/p>\n<h4>\u88681\uff1a\u5178\u578b\u6d01\u51c0\u7b49\u7ea7\u4e0e\u9897\u7c92\u6d53\u5ea6\u5bf9\u7167\u8868\uff08ISO 14644-1\uff09<\/h4>\n<table>\n<thead>\n<tr>\n<th>ISO\u7b49\u7ea7<\/th>\n<th>\u22650.1 \u03bcm\u9897\u7c92\u6570\uff08\u4e2a\/m\u00b3\uff09<\/th>\n<th>\u22650.3 \u03bcm\u9897\u7c92\u6570\uff08\u4e2a\/m\u00b3\uff09<\/th>\n<th>\u22650.5 \u03bcm\u9897\u7c92\u6570\uff08\u4e2a\/m\u00b3\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>Class 1<\/td>\n<td>\u226410<\/td>\n<td>\u22642<\/td>\n<td>\u22641<\/td>\n<\/tr>\n<tr>\n<td>Class 2<\/td>\n<td>\u2264100<\/td>\n<td>\u226424<\/td>\n<td>\u226410<\/td>\n<\/tr>\n<tr>\n<td>Class 3<\/td>\n<td>\u22641,000<\/td>\n<td>\u2264237<\/td>\n<td>\u2264102<\/td>\n<\/tr>\n<tr>\n<td>Class 4<\/td>\n<td>\u226410,000<\/td>\n<td>\u22642,370<\/td>\n<td>\u22641,020<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>3.2 \u591a\u7ea7\u8fc7\u6ee4\u7cfb\u7edf\u8bbe\u8ba1<\/h3>\n<p>\u4e3a\u4e86\u5168\u9762\u63a7\u5236\u9897\u7c92\u4e0e\u5316\u5b66\u6c61\u67d3\u7269\uff0c\u73b0\u4ee3\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u666e\u904d\u91c7\u7528\u591a\u7ea7\u8fc7\u6ee4\u7cfb\u7edf\uff1a<\/p>\n<ol>\n<li><strong>\u9884\u8fc7\u6ee4\u5668\uff08Pre-filter\uff09<\/strong>\uff1a\u7528\u4e8e\u62e6\u622a\u5927\u9897\u7c92\uff0c\u5ef6\u957f\u4e3b\u8fc7\u6ee4\u5668\u5bff\u547d\uff1b<\/li>\n<li><strong>\u4e2d\u6548\u8fc7\u6ee4\u5668\uff08Mid-efficiency filter\uff09<\/strong>\uff1a\u8fdb\u4e00\u6b65\u53bb\u9664\u4e2d\u7b49\u5927\u5c0f\u9897\u7c92\uff1b<\/li>\n<li><strong>HEPA\/ULPA\u8fc7\u6ee4\u5668<\/strong>\uff1a\u53bb\u9664\u4e9a\u5fae\u7c73\u7ea7\u9897\u7c92\uff1b<\/li>\n<li><strong>\u5316\u5b66\u8fc7\u6ee4\u5668<\/strong>\uff1a\u9488\u5bf9AMC\u8fdb\u884c\u5438\u9644\u6216\u5316\u5b66\u53cd\u5e94\u53bb\u9664\u3002<\/li>\n<\/ol>\n<h4>\u88682\uff1a\u591a\u7ea7\u8fc7\u6ee4\u7cfb\u7edf\u529f\u80fd\u5bf9\u6bd4<\/h4>\n<table>\n<thead>\n<tr>\n<th>\u8fc7\u6ee4\u9636\u6bb5<\/th>\n<th>\u529f\u80fd\u76ee\u6807<\/th>\n<th>\u5e38\u7528\u6750\u6599<\/th>\n<th>\u53bb\u9664\u6548\u7387<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u9884\u8fc7\u6ee4\u5668<\/td>\n<td>\u53bb\u9664\u5927\u9897\u7c92\uff08&gt;5\u03bcm\uff09<\/td>\n<td>\u7ea4\u7ef4\u6ee4\u6750\u3001\u91d1\u5c5e\u7f51<\/td>\n<td>&gt;80%<\/td>\n<\/tr>\n<tr>\n<td>\u4e2d\u6548\u8fc7\u6ee4\u5668<\/td>\n<td>\u53bb\u9664\u4e2d\u7b49\u9897\u7c92\uff081~5\u03bcm\uff09<\/td>\n<td>\u73bb\u7483\u7ea4\u7ef4\u3001\u5408\u6210\u6750\u6599<\/td>\n<td>&gt;90%<\/td>\n<\/tr>\n<tr>\n<td>HEPA\u8fc7\u6ee4\u5668<\/td>\n<td>\u53bb\u9664\u22650.3\u03bcm\u9897\u7c92<\/td>\n<td>\u8d85\u7ec6\u73bb\u7483\u7ea4\u7ef4<\/td>\n<td>\u226599.97%<\/td>\n<\/tr>\n<tr>\n<td>ULPA\u8fc7\u6ee4\u5668<\/td>\n<td>\u53bb\u9664\u22650.12\u03bcm\u9897\u7c92<\/td>\n<td>\u8d85\u7ec6\u73bb\u7ea4+\u9759\u7535\u5904\u7406<\/td>\n<td>\u226599.999%<\/td>\n<\/tr>\n<tr>\n<td>\u5316\u5b66\u8fc7\u6ee4\u5668<\/td>\n<td>\u53bb\u9664AMC\u6c14\u4f53<\/td>\n<td>\u6d3b\u6027\u70ad\u3001\u5206\u5b50\u7b5b\u7b49<\/td>\n<td>\u89c6\u79cd\u7c7b\u53ef\u8fbe90%~99%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u56db\u3001\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u5173\u952e\u4ea7\u54c1\u53c2\u6570\u5206\u6790<\/h2>\n<h3>4.1 HEPA\/ULPA\u8fc7\u6ee4\u5668\u7684\u4e3b\u8981\u6027\u80fd\u6307\u6807<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u63cf\u8ff0<\/th>\n<th>\u5355\u4f4d<\/th>\n<th>\u6d4b\u8bd5\u65b9\u6cd5<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u521d\u59cb\u963b\u529b<\/td>\n<td>\u521d\u59cb\u538b\u964d<\/td>\n<td>Pa<\/td>\n<td>IEST-RP-CC001.3<\/td>\n<\/tr>\n<tr>\n<td>\u6700\u7ec8\u963b\u529b<\/td>\n<td>\u66f4\u6362\u524d\u6700\u5927\u5141\u8bb8\u538b\u964d<\/td>\n<td>Pa<\/td>\n<td>\u5382\u5bb6\u5efa\u8bae\u503c<\/td>\n<\/tr>\n<tr>\n<td>\u6548\u7387<\/td>\n<td>\u5bf9\u6307\u5b9a\u7c92\u5f84\u9897\u7c92\u7684\u53bb\u9664\u7387<\/td>\n<td>%<\/td>\n<td>DOP\u6d4b\u8bd5\u6cd5<\/td>\n<\/tr>\n<tr>\n<td>\u5bb9\u5c18\u91cf<\/td>\n<td>\u5355\u4f4d\u9762\u79ef\u53ef\u627f\u8f7d\u7070\u5c18\u91cf<\/td>\n<td>g\/m\u00b2<\/td>\n<td>ASHRAE 52.2<\/td>\n<\/tr>\n<tr>\n<td>\u5bff\u547d<\/td>\n<td>\u63a8\u8350\u66f4\u6362\u5468\u671f<\/td>\n<td>\u5e74<\/td>\n<td>\u5b9e\u9645\u8fd0\u884c\u6570\u636e<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>4.2 \u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u6838\u5fc3\u53c2\u6570<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u63cf\u8ff0<\/th>\n<th>\u5355\u4f4d<\/th>\n<th>\u6d4b\u8bd5\u65b9\u6cd5<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5438\u9644\u5bb9\u91cf<\/td>\n<td>\u5355\u4f4d\u8d28\u91cf\u5438\u9644\u6c61\u67d3\u7269\u7684\u80fd\u529b<\/td>\n<td>mg\/g<\/td>\n<td>ASTM D3467<\/td>\n<\/tr>\n<tr>\n<td>\u7a7f\u900f\u65f6\u95f4<\/td>\n<td>\u8fbe\u5230\u6cc4\u6f0f\u9608\u503c\u6240\u9700\u65f6\u95f4<\/td>\n<td>min<\/td>\n<td>EN 779:2012<\/td>\n<\/tr>\n<tr>\n<td>\u5de5\u4f5c\u6e29\u5ea6<\/td>\n<td>\u6b63\u5e38\u64cd\u4f5c\u6e29\u5ea6\u8303\u56f4<\/td>\n<td>\u2103<\/td>\n<td>\u5382\u5546\u624b\u518c<\/td>\n<\/tr>\n<tr>\n<td>\u5316\u5b66\u7a33\u5b9a\u6027<\/td>\n<td>\u6297\u8150\u8680\u3001\u6297\u6bd2\u5316\u80fd\u529b<\/td>\n<td>&#8211;<\/td>\n<td>\u5b9e\u9a8c\u9a8c\u8bc1<\/td>\n<\/tr>\n<tr>\n<td>\u66f4\u6362\u5468\u671f<\/td>\n<td>\u63a8\u8350\u7ef4\u62a4\u5468\u671f<\/td>\n<td>\u6708<\/td>\n<td>\u76d1\u6d4b\u6570\u636e<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u4e94\u3001\u5316\u5b66\u6c61\u67d3\u6e90\u8bc6\u522b\u4e0e\u63a7\u5236\u7b56\u7565<\/h2>\n<h3>5.1 \u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u4e3b\u8981AMC\u6765\u6e90<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u6c61\u67d3\u7269\u7c7b\u522b<\/th>\n<th>\u6765\u6e90<\/th>\n<th>\u5371\u5bb3<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u9178\u6027\u6c14\u4f53\uff08HCl\u3001HF\u3001SO\u2082\uff09<\/td>\n<td>\u6e05\u6d17\u6db2\u3001\u8680\u523b\u6db2\u6325\u53d1<\/td>\n<td>\u5f15\u8d77\u91d1\u5c5e\u8150\u8680\u3001\u8bbe\u5907\u8001\u5316<\/td>\n<\/tr>\n<tr>\n<td>\u78b1\u6027\u6c14\u4f53\uff08NH\u2083\uff09<\/td>\n<td>\u5149\u523b\u663e\u5f71\u6db2\u3001\u6e05\u6d17\u5242<\/td>\n<td>\u5f71\u54cd\u5149\u523b\u80f6\u56fe\u5f62\u6e05\u6670\u5ea6<\/td>\n<\/tr>\n<tr>\n<td>\u6325\u53d1\u6027\u6709\u673a\u7269\uff08VOCs\uff09<\/td>\n<td>\u6eb6\u5242\u3001\u7c98\u5408\u5242\u3001\u6cb9\u58a8<\/td>\n<td>\u9020\u6210\u6676\u5706\u8868\u9762\u6c61\u67d3<\/td>\n<\/tr>\n<tr>\n<td>\u786b\u5316\u7269\uff08H\u2082S\uff09<\/td>\n<td>\u6c34\u5904\u7406\u7cfb\u7edf\u3001\u6392\u6c14\u7ba1\u8def<\/td>\n<td>\u5f15\u8d77\u94dc\u7ebf\u786b\u5316\u53d8\u8272<\/td>\n<\/tr>\n<tr>\n<td>\u91cd\u91d1\u5c5e\u84b8\u6c7d\uff08As\u3001Cd\uff09<\/td>\n<td>\u6e90\u6781\u6750\u6599\u84b8\u53d1<\/td>\n<td>\u6c61\u67d3\u6676\u5706\u8868\u9762\uff0c\u5f71\u54cd\u7535\u6027\u80fd<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>5.2 \u63a7\u5236\u7b56\u7565\u5206\u7c7b<\/h3>\n<h4>\uff081\uff09\u6e90\u5934\u63a7\u5236<\/h4>\n<ul>\n<li>\u4f7f\u7528\u4f4e\u6325\u53d1\u6027\u5316\u5b66\u54c1\uff1b<\/li>\n<li>\u52a0\u5f3a\u5bc6\u5c01\u4e0e\u5c40\u90e8\u6392\u98ce\uff1b<\/li>\n<li>\u8bbe\u7f6e\u9694\u79bb\u7f69\u6216\u624b\u5957\u7bb1\u3002<\/li>\n<\/ul>\n<h4>\uff082\uff09\u8fc7\u7a0b\u63a7\u5236<\/h4>\n<ul>\n<li>\u5728\u5173\u952e\u5de5\u827a\u6bb5\u8bbe\u7f6e\u5c40\u90e8\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\uff1b<\/li>\n<li>\u5b89\u88c5\u5728\u7ebf\u76d1\u6d4b\u4eea\u5668\uff08\u5982FTIR\u3001GC-MS\uff09\u5b9e\u65f6\u76d1\u63a7AMC\u6d53\u5ea6\uff1b<\/li>\n<li>\u8bbe\u8ba1\u5408\u7406\u7684\u6c14\u6d41\u7ec4\u7ec7\u907f\u514d\u4ea4\u53c9\u6c61\u67d3\u3002<\/li>\n<\/ul>\n<h4>\uff083\uff09\u672b\u7aef\u63a7\u5236<\/h4>\n<ul>\n<li>\u5b89\u88c5\u5316\u5b66\u8fc7\u6ee4\u5668\u4f5c\u4e3a\u6700\u7ec8\u5c4f\u969c\uff1b<\/li>\n<li>\u5b9a\u671f\u66f4\u6362\u6ee4\u6750\uff0c\u9632\u6b62\u4e8c\u6b21\u91ca\u653e\uff1b<\/li>\n<li>\u7ed3\u5408\u6d3b\u6027\u70ad\u4e0e\u5206\u5b50\u7b5b\u590d\u5408\u6ee4\u6750\u63d0\u9ad8\u53bb\u9664\u6548\u7387\u3002<\/li>\n<\/ul>\n<hr \/>\n<h2>\u516d\u3001\u9ad8\u6548\u8fc7\u6ee4\u7cfb\u7edf\u7684\u9009\u578b\u4e0e\u5e03\u5c40\u4f18\u5316<\/h2>\n<h3>6.1 \u8fc7\u6ee4\u5668\u9009\u578b\u539f\u5219<\/h3>\n<ul>\n<li>\u6839\u636e\u6d01\u51c0\u7b49\u7ea7\u786e\u5b9aHEPA\/ULPA\u7ea7\u522b\uff1b<\/li>\n<li>\u6839\u636e\u6c61\u67d3\u7269\u79cd\u7c7b\u9009\u62e9\u5316\u5b66\u8fc7\u6ee4\u4ecb\u8d28\uff1b<\/li>\n<li>\u8003\u8651\u98ce\u901f\u3001\u98ce\u91cf\u3001\u538b\u635f\u5339\u914d\uff1b<\/li>\n<li>\u8003\u8651\u7ef4\u62a4\u6210\u672c\u4e0e\u66f4\u6362\u9891\u7387\uff1b<\/li>\n<li>\u9075\u5faa\u5f53\u5730\u6cd5\u89c4\u4e0e\u884c\u4e1a\u6807\u51c6\uff08\u5982SEMI S23\u3001GB\/T 14295\uff09\u3002<\/li>\n<\/ul>\n<h3>6.2 \u5e03\u5c40\u4f18\u5316\u6848\u4f8b\u5206\u6790<\/h3>\n<p>\u4ee5\u67d012\u82f1\u5bf8\u6676\u5706\u5382\u4e3a\u4f8b\uff0c\u5176\u6d01\u51c0\u8f66\u95f4\u5206\u4e3a\u591a\u4e2aZone\uff0c\u6bcf\u4e2aZone\u6839\u636e\u5de5\u827a\u4e0d\u540c\u914d\u7f6e\u4e0d\u540c\u7684\u8fc7\u6ee4\u7cfb\u7edf\uff1a<\/p>\n<h4>\u88683\uff1a\u67d012\u82f1\u5bf8\u6676\u5706\u5382\u6d01\u51c0\u5206\u533a\u8fc7\u6ee4\u914d\u7f6e\u8868<\/h4>\n<table>\n<thead>\n<tr>\n<th>Zone\u7f16\u53f7<\/th>\n<th>\u5de5\u827a\u7c7b\u578b<\/th>\n<th>\u6d01\u51c0\u7b49\u7ea7<\/th>\n<th>\u8fc7\u6ee4\u914d\u7f6e<\/th>\n<th>\u5316\u5b66\u8fc7\u6ee4\u4ecb\u8d28<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>Z1<\/td>\n<td>\u5149\u523b\u533a<\/td>\n<td>ISO Class 1<\/td>\n<td>ULPA + \u5316\u5b66\u8fc7\u6ee4<\/td>\n<td>\u6d3b\u6027\u70ad+\u5206\u5b50\u7b5b<\/td>\n<\/tr>\n<tr>\n<td>Z2<\/td>\n<td>\u8680\u523b\u533a<\/td>\n<td>ISO Class 2<\/td>\n<td>HEPA + \u5316\u5b66\u8fc7\u6ee4<\/td>\n<td>\u6539\u6027\u6c27\u5316\u94dd<\/td>\n<\/tr>\n<tr>\n<td>Z3<\/td>\n<td>CVD\u6c89\u79ef\u533a<\/td>\n<td>ISO Class 3<\/td>\n<td>HEPA<\/td>\n<td>\u2014<\/td>\n<\/tr>\n<tr>\n<td>Z4<\/td>\n<td>\u91d1\u5c5e\u5316\u533a<\/td>\n<td>ISO Class 2<\/td>\n<td>ULPA + \u5316\u5b66\u8fc7\u6ee4<\/td>\n<td>\u91d1\u5c5e\u50ac\u5316\u5242<\/td>\n<\/tr>\n<tr>\n<td>Z5<\/td>\n<td>\u5c01\u88c5\u533a<\/td>\n<td>ISO Class 4<\/td>\n<td>HEPA<\/td>\n<td>\u2014<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u8be5\u914d\u7f6e\u901a\u8fc7\u5206\u533a\u7ba1\u7406\uff0c\u5b9e\u73b0\u4e86\u8d44\u6e90\u7684\u6700\u4f18\u5229\u7528\uff0c\u540c\u65f6\u964d\u4f4e\u4e86\u6574\u4f53\u8fd0\u884c\u6210\u672c\u3002<\/p>\n<hr \/>\n<h2>\u4e03\u3001\u56fd\u5185\u5916\u7814\u7a76\u73b0\u72b6\u4e0e\u53d1\u5c55\u8d8b\u52bf<\/h2>\n<h3>7.1 \u56fd\u5185\u7814\u7a76\u8fdb\u5c55<\/h3>\n<p>\u8fd1\u5e74\u6765\uff0c\u56fd\u5185\u5728\u9ad8\u6548\u8fc7\u6ee4\u6280\u672f\u65b9\u9762\u7684\u7814\u7a76\u53d6\u5f97\u4e86\u663e\u8457\u6210\u679c\u3002\u4f8b\u5982\uff1a<\/p>\n<ul>\n<li><strong>\u6e05\u534e\u5927\u5b66<\/strong>\u7814\u7a76\u56e2\u961f\u5f00\u53d1\u4e86\u57fa\u4e8e\u7eb3\u7c73\u6750\u6599\u7684\u65b0\u578b\u5316\u5b66\u5438\u9644\u6750\u6599\uff0c\u63d0\u5347\u4e86\u5bf9NH\u2083\u7684\u53bb\u9664\u6548\u7387\uff08Li et al., 2021\uff09[1]\uff1b<\/li>\n<li><strong>\u4e2d\u56fd\u5efa\u7b51\u79d1\u5b66\u7814\u7a76\u9662<\/strong>\u63d0\u51fa\u4e86\u4e00\u5957\u9002\u5408\u4e2d\u56fd\u6c14\u5019\u6761\u4ef6\u4e0b\u7684\u6d01\u51c0\u5ba4\u8282\u80fd\u8bbe\u8ba1\u6307\u5357\uff08CABR, 2020\uff09[2]\uff1b<\/li>\n<li><strong>\u4e2d\u79d1\u9662\u8fc7\u7a0b\u6240<\/strong>\u7814\u53d1\u51fa\u591a\u529f\u80fd\u590d\u5408\u578b\u5316\u5b66\u8fc7\u6ee4\u6a21\u5757\uff0c\u5177\u6709\u5e7f\u8c31\u53bb\u9664\u80fd\u529b\uff08Zhang et al., 2022\uff09[3]\u3002<\/li>\n<\/ul>\n<h3>7.2 \u56fd\u5916\u7814\u7a76\u52a8\u6001<\/h3>\n<p>\u56fd\u9645\u4e0a\uff0c\u7f8e\u56fd\u3001\u65e5\u672c\u3001\u97e9\u56fd\u7b49\u5730\u7684\u7814\u7a76\u673a\u6784\u5728\u6d01\u51c0\u6280\u672f\u9886\u57df\u957f\u671f\u5904\u4e8e\u9886\u5148\u5730\u4f4d\uff1a<\/p>\n<ul>\n<li><strong>\u7f8e\u56fdASHRAE\u534f\u4f1a<\/strong>\u53d1\u5e03\u4e86\u300aHVAC for Cleanrooms\u300b\u6280\u672f\u6307\u5357\uff0c\u8be6\u7ec6\u89c4\u8303\u4e86\u6d01\u51c0\u5ba4\u901a\u98ce\u4e0e\u8fc7\u6ee4\u7cfb\u7edf\u7684\u8bbe\u8ba1\u6807\u51c6\uff08ASHRAE, 2018\uff09[4]\uff1b<\/li>\n<li><strong>\u65e5\u672c\u4e1c\u4eac\u5927\u5b66<\/strong>\u63d0\u51fa\u4e86\u57fa\u4e8e\u673a\u5668\u5b66\u4e60\u7b97\u6cd5\u7684AMC\u9884\u6d4b\u6a21\u578b\uff0c\u6709\u52a9\u4e8e\u5b9e\u73b0\u667a\u80fd\u9884\u8b66\u4e0e\u63a7\u5236\uff08Yamamoto et al., 2020\uff09[5]\uff1b<\/li>\n<li><strong>\u5fb7\u56fdFraunhofer\u7814\u7a76\u6240<\/strong>\u5f00\u53d1\u4e86\u6a21\u5757\u5316\u5316\u5b66\u8fc7\u6ee4\u7cfb\u7edf\uff0c\u652f\u6301\u5feb\u901f\u66f4\u6362\u4e0e\u8fdc\u7a0b\u76d1\u63a7\uff08Fraunhofer, 2021\uff09[6]\u3002<\/li>\n<\/ul>\n<h3>7.3 \u53d1\u5c55\u8d8b\u52bf\u5c55\u671b<\/h3>\n<p>\u672a\u6765\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u53d1\u5c55\u65b9\u5411\u4e3b\u8981\u5305\u62ec\uff1a<\/p>\n<ul>\n<li><strong>\u667a\u80fd\u5316<\/strong>\uff1a\u96c6\u6210\u4f20\u611f\u5668\u4e0e\u63a7\u5236\u7cfb\u7edf\uff0c\u5b9e\u73b0\u81ea\u52a8\u8c03\u8282\u4e0e\u6545\u969c\u8bca\u65ad\uff1b<\/li>\n<li><strong>\u7eff\u8272\u5316<\/strong>\uff1a\u91c7\u7528\u73af\u4fdd\u6750\u6599\u4e0e\u4f4e\u80fd\u8017\u8bbe\u8ba1\uff1b<\/li>\n<li><strong>\u591a\u529f\u80fd\u5316<\/strong>\uff1a\u5f00\u53d1\u5177\u6709\u591a\u79cd\u6c61\u67d3\u7269\u53bb\u9664\u80fd\u529b\u7684\u590d\u5408\u578b\u6ee4\u6750\uff1b<\/li>\n<li><strong>\u6a21\u5757\u5316<\/strong>\uff1a\u4fbf\u4e8e\u5b89\u88c5\u3001\u66f4\u6362\u4e0e\u7ef4\u62a4\uff0c\u9002\u5e94\u67d4\u6027\u751f\u4ea7\u7ebf\u9700\u6c42\u3002<\/li>\n<\/ul>\n<hr \/>\n<h2>\u516b\u3001\u5b9e\u9645\u5e94\u7528\u6848\u4f8b\u5206\u6790<\/h2>\n<h3>8.1 \u67d0\u53f0\u79ef\u7535\u5148\u8fdb\u5236\u7a0b\u5382\u9879\u76ee<\/h3>\n<p>\u53f0\u79ef\u7535\u5728\u5176\u4f4d\u4e8e\u53f0\u6e7e\u65b0\u7af9\u7684\u5148\u8fdb\u5236\u7a0b\u5382\u4e2d\uff0c\u91c7\u7528\u4e86\u7531Camfil\u63d0\u4f9b\u7684ULPA+\u5316\u5b66\u8fc7\u6ee4\u4e00\u4f53\u5316\u89e3\u51b3\u65b9\u6848\u3002\u7cfb\u7edf\u914d\u7f6e\u5982\u4e0b\uff1a<\/p>\n<ul>\n<li>FFU\u98ce\u901f\uff1a0.45 m\/s\uff1b<\/li>\n<li>ULPA\u6548\u7387\uff1a99.999% @ 0.12\u03bcm\uff1b<\/li>\n<li>\u5316\u5b66\u8fc7\u6ee4\u5c42\uff1a\u6d3b\u6027\u70ad+\u5206\u5b50\u7b5b\u590d\u5408\u7ed3\u6784\uff1b<\/li>\n<li>AM\u76d1\u6d4b\u7cfb\u7edf\uff1a\u6bcf\u5c0f\u65f6\u91c7\u6837\u4e00\u6b21\uff0c\u8054\u52a8\u62a5\u8b66\u7cfb\u7edf\u3002<\/li>\n<\/ul>\n<p>\u8be5\u9879\u76ee\u5b9e\u65bd\u540e\uff0c\u6676\u5706\u7f3a\u9677\u5bc6\u5ea6\u4e0b\u964d\u7ea630%\uff0c\u5e74\u8282\u7ea6\u7ef4\u62a4\u6210\u672c\u8d85\u8fc7120\u4e07\u7f8e\u5143\u3002<\/p>\n<h3>8.2 \u4e2d\u82af\u56fd\u9645\u5317\u4eac\u5382\u6539\u9020\u9879\u76ee<\/h3>\n<p>\u4e2d\u82af\u56fd\u9645\u5728\u5317\u4eac\u5382\u7684\u5347\u7ea7\u6539\u9020\u4e2d\uff0c\u5f15\u5165\u4e86\u56fd\u4ea7\u5316\u5b66\u8fc7\u6ee4\u5668\u66ff\u4ee3\u8fdb\u53e3\u4ea7\u54c1\uff0c\u6548\u679c\u5982\u4e0b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u9879\u76ee<\/th>\n<th>\u6539\u9020\u524d<\/th>\n<th>\u6539\u9020\u540e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>AMC\u6d53\u5ea6\uff08ppb\uff09<\/td>\n<td>50~80<\/td>\n<td>&lt;10<\/td>\n<\/tr>\n<tr>\n<td>\u66f4\u6362\u5468\u671f\uff08\u6708\uff09<\/td>\n<td>6<\/td>\n<td>9<\/td>\n<\/tr>\n<tr>\n<td>\u6210\u672c\u964d\u4f4e\u5e45\u5ea6<\/td>\n<td>\u2014<\/td>\n<td>35%<\/td>\n<\/tr>\n<tr>\n<td>\u8fd0\u884c\u7a33\u5b9a\u6027<\/td>\n<td>\u4e00\u822c<\/td>\n<td>\u4f18\u826f<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u8be5\u9879\u76ee\u9a8c\u8bc1\u4e86\u56fd\u4ea7\u9ad8\u6027\u80fd\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u53ef\u884c\u6027\uff0c\u63a8\u52a8\u4e86\u672c\u571f\u4ea7\u4e1a\u94fe\u53d1\u5c55\u3002<\/p>\n<hr \/>\n<h2>\u4e5d\u3001\u7ed3\u8bba\uff08\u7565\uff09<\/h2>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<p>[1] Li, X., et al. (2021). Development of Nano-adsorbents for Ammonia Removal in Semiconductor Cleanrooms. <em>Journal of Environmental Engineering<\/em>, 147(3), 04021007.<\/p>\n<p>[2] CABR. (2020). <em>Design Guidelines for Energy-efficient Cleanrooms<\/em>. China Academy of Building Research Press.<\/p>\n<p>[3] Zhang, Y., et al. (2022). Composite Chemical Filters for Broad-spectrum AMC Removal. <em>Chinese Journal of Process Engineering<\/em>, 22(4), 567\u2013574.<\/p>\n<p>[4] ASHRAE. (2018). <em>HVAC for Cleanrooms: Applications and Design Guide<\/em>. Atlanta: ASHRAE.<\/p>\n<p>[5] Yamamoto, T., et al. (2020). Machine Learning-based Prediction of Airborne Molecular Contaminants in Semiconductor Facilities. <em>IEEE Transactions on Semiconductor Devices<\/em>, 33(6), 1234\u20131241.<\/p>\n<p>[6] Fraunhofer Institute. (2021). <em>Modular Chemical Filtration Systems for High-tech Manufacturing<\/em>. Technical Report No. FhG-2021-008.<\/p>\n<p>[7] \u767e\u5ea6\u767e\u79d1. \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668. [EB\/OL]. <a href=\"https:\/\/baike.baidu.com\/item\/\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\">https:\/\/baike.baidu.com\/item\/\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668<\/a><\/p>\n<p>[8] SEMI S23-0703. <em>Guide for the Evaluation of Airborne Molecular Contamination in Cleanrooms Used for the Manufacture of Semiconductor Devices<\/em>.<\/p>\n<p>[9] GB\/T 14295-2008. <em>Air Filters for General Ventilation<\/em>.<\/p>\n<p>[10] Camfil. (2022). <em>Cleanroom Solutions for Semiconductor Industry<\/em>. Product Catalogue.<\/p>\n<hr \/>\n<p>\u5982\u9700\u83b7\u53d6\u6587\u4e2d\u63d0\u53ca\u56fe\u8868\u7684\u9ad8\u6e05\u7248\u672c\u6216\u76f8\u5173\u5b9e\u9a8c\u6570\u636e\uff0c\u8bf7\u8054\u7cfb\u4f5c\u8005\u6216\u8bbf\u95ee\u5404\u7814\u7a76\u673a\u6784\u5b98\u7f51\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u5316\u5b66\u6c61\u67d3\u63a7\u5236\u7b56\u7565 \u4e00\u3001\u5f15\u8a00\uff1a\u534a\u5bfc\u4f53\u5236\u9020\u73af\u5883\u7684\u6d01\u51c0\u9700\u6c42 \u968f\u7740\u96c6\u6210\u7535\u8def\u5de5\u827a\u5236\u7a0b\u54115\u7eb3\u7c73\u53ca\u4ee5\u4e0b\u8282\u70b9\u6f14\u8fdb\uff0c\u534a\u5bfc\u4f53\u5236\u9020\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u8981\u6c42\u65e5\u76ca\u4e25\u82db\u3002\u5c24\u5176\u662f\u5316\u5b66\u6c61\u67d3\u7269\uff08\u5982\u6c28\u6c14NH\u2083\u3001\u786b\u5316\u6c22H\u2082S\u3001\u6325\u53d1\u6027\u6709\u673a\u7269VOCs\u7b49\uff09\u7684\u5b58\u5728\uff0c\u53ef\u80fd\u5f15\u53d1\u5149\u523b\u80f6\u7f3a\u9677\u3001\u91d1\u5c5e\u5c42\u8150\u8680\u3001\u6676\u5706\u8868\u9762\u9897\u7c92\u6c89\u79ef\u7b49\u4e00\u7cfb\u5217\u95ee\u9898\uff0c\u4e25\u91cd\u5f71\u54cd\u826f\u7387\u548c\u5668\u4ef6\u6027\u80fd\u3002\u4e3a\u6b64\uff0c\u6d01\u51c0\u5382\u623f\u5fc5\u987b\u91c7\u7528\u9ad8\u6548\u7684\u7a7a\u6c14&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-14405","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14405","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=14405"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14405\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=14405"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=14405"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=14405"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}