{"id":14401,"date":"2025-05-29T14:56:57","date_gmt":"2025-05-29T06:56:57","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=14401"},"modified":"2025-05-29T14:56:57","modified_gmt":"2025-05-29T06:56:57","slug":"%e9%ab%98%e6%95%88%e8%bf%87%e6%bb%a4%e5%99%a8%e4%b8%8eulpa%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e6%b4%81%e5%87%80%e5%8c%ba%e4%bd%bf%e7%94%a8%e5%9c%ba%e6%99%af%e5%af%b9%e6%af%94%e5%88%86%e6%9e%90","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=14401","title":{"rendered":"\u9ad8\u6548\u8fc7\u6ee4\u5668\u4e0eULPA\u8fc7\u6ee4\u5668\u5728\u6d01\u51c0\u533a\u4f7f\u7528\u573a\u666f\u5bf9\u6bd4\u5206\u6790"},"content":{"rendered":"

\u9ad8\u6548\u8fc7\u6ee4\u5668\u4e0eULPA\u8fc7\u6ee4\u5668\u5728\u6d01\u51c0\u533a\u4f7f\u7528\u573a\u666f\u5bf9\u6bd4\u5206\u6790<\/h1>\n

\u4e00\u3001\u5f15\u8a00<\/h2>\n

\u968f\u7740\u73b0\u4ee3\u5de5\u4e1a\u6280\u672f\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u5c24\u5176\u662f\u534a\u5bfc\u4f53\u5236\u9020\u3001\u751f\u7269\u533b\u836f\u3001\u822a\u7a7a\u822a\u5929\u3001\u7cbe\u5bc6\u7535\u5b50\u7b49\u9ad8\u79d1\u6280\u884c\u4e1a\u7684\u53d1\u5c55\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u65e5\u76ca\u63d0\u9ad8\u3002\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08High-Efficiency Particulate Air Filter\uff0c\u7b80\u79f0HEPA\uff09\u548c\u8d85\u4f4e\u7a7f\u900f\u7387\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08Ultra-Low Penetration Air Filter\uff0c\u7b80\u79f0ULPA\uff09\u4f5c\u4e3a\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\u4e2d\u7684\u6838\u5fc3\u7ec4\u4ef6\uff0c\u5728\u4fdd\u969c\u6d01\u51c0\u5ba4\u7a7a\u6c14\u8d28\u91cf\u65b9\u9762\u53d1\u6325\u7740\u81f3\u5173\u91cd\u8981\u7684\u4f5c\u7528\u3002<\/p>\n

\u672c\u6587\u65e8\u5728\u901a\u8fc7\u5bf9\u9ad8\u6548\u8fc7\u6ee4\u5668\uff08HEPA\uff09\u4e0eULPA\u8fc7\u6ee4\u5668\u7684\u6280\u672f\u53c2\u6570\u3001\u6027\u80fd\u7279\u70b9\u3001\u9002\u7528\u573a\u666f\u53ca\u5176\u5728\u4e0d\u540c\u6d01\u51c0\u7b49\u7ea7\u533a\u57df\u7684\u5e94\u7528\u8fdb\u884c\u6df1\u5165\u6bd4\u8f83\u5206\u6790\uff0c\u5e2e\u52a9\u8bfb\u8005\u66f4\u5168\u9762\u5730\u4e86\u89e3\u4e24\u8005\u4e4b\u95f4\u7684\u5f02\u540c\uff0c\u4e3a\u5b9e\u9645\u5de5\u7a0b\u9009\u578b\u63d0\u4f9b\u79d1\u5b66\u4f9d\u636e\u3002\u6587\u7ae0\u5c06\u5f15\u7528\u56fd\u5185\u5916\u6743\u5a01\u6587\u732e\u8d44\u6599\uff0c\u5e76\u7ed3\u5408\u767e\u5ea6\u767e\u79d1\u5f0f\u7684\u6761\u7406\u5316\u6392\u7248\u7ed3\u6784\uff0c\u529b\u6c42\u5185\u5bb9\u8be6\u5b9e\u3001\u903b\u8f91\u6e05\u6670\u3001\u6570\u636e\u51c6\u786e\u3002<\/p>\n

\n

\u4e8c\u3001\u57fa\u672c\u6982\u5ff5\u4e0e\u5b9a\u4e49<\/h2>\n

2.1 \u9ad8\u6548\u8fc7\u6ee4\u5668\uff08HEPA\uff09<\/h3>\n

\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u662f\u6307\u5bf9\u7c92\u5f84\u22650.3\u03bcm\u7684\u9897\u7c92\u7269\u5177\u6709\u81f3\u5c1199.97%\u8fc7\u6ee4\u6548\u7387\u7684\u7a7a\u6c14\u8fc7\u6ee4\u8bbe\u5907\u3002\u5176\u4e3b\u8981\u901a\u8fc7\u7269\u7406\u62e6\u622a\u3001\u60ef\u6027\u649e\u51fb\u3001\u6269\u6563\u6548\u5e94\u7b49\u65b9\u5f0f\u6355\u83b7\u7a7a\u6c14\u4e2d\u60ac\u6d6e\u9897\u7c92\u7269\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u5404\u7c7b\u6d01\u51c0\u5ba4\u3001\u5b9e\u9a8c\u5ba4\u53ca\u533b\u9662\u624b\u672f\u5ba4\u7b49\u73af\u5883\u4e2d\u3002<\/p>\n

2.2 ULPA\u8fc7\u6ee4\u5668<\/h3>\n

ULPA\u8fc7\u6ee4\u5668\u662f\u5bf9\u7c92\u5f84\u22650.12\u03bcm\u7684\u9897\u7c92\u7269\u5177\u6709\u81f3\u5c1199.999%\u8fc7\u6ee4\u6548\u7387\u7684\u9ad8\u6027\u80fd\u7a7a\u6c14\u8fc7\u6ee4\u88c5\u7f6e\u3002\u76f8\u8f83\u4e8eHEPA\u8fc7\u6ee4\u5668\uff0cULPA\u8fc7\u6ee4\u5668\u5177\u6709\u66f4\u9ad8\u7684\u8fc7\u6ee4\u6548\u7387\u548c\u66f4\u4f4e\u7684\u9897\u7c92\u7a7f\u900f\u7387\uff0c\u9002\u7528\u4e8e\u66f4\u9ad8\u6d01\u51c0\u7b49\u7ea7\u8981\u6c42\u7684\u573a\u6240\u3002<\/p>\n\n\n\n\n\n\n\n\n
\u53c2\u6570<\/th>\nHEPA\u8fc7\u6ee4\u5668<\/th>\nULPA\u8fc7\u6ee4\u5668<\/th>\n<\/tr>\n<\/thead>\n
\u6700\u5c0f\u8fc7\u6ee4\u7c92\u5f84<\/td>\n\u22650.3\u03bcm<\/td>\n\u22650.12\u03bcm<\/td>\n<\/tr>\n
\u8fc7\u6ee4\u6548\u7387<\/td>\n\u226599.97%<\/td>\n\u226599.999%<\/td>\n<\/tr>\n
\u7a7f\u900f\u7387<\/td>\n\u22640.03%<\/td>\n\u22640.001%<\/td>\n<\/tr>\n
\u5e38\u89c1\u5e94\u7528\u573a\u666f<\/td>\n\u533b\u7597\u3001\u5236\u836f\u3001\u98df\u54c1\u52a0\u5de5<\/td>\n\u534a\u5bfc\u4f53\u3001\u7eb3\u7c73\u6750\u6599\u3001\u751f\u7269\u5b89\u5168\u5b9e\u9a8c\u5ba4<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n

\u4e09\u3001\u6280\u672f\u539f\u7406\u4e0e\u7ed3\u6784\u7ec4\u6210<\/h2>\n

3.1 HEPA\u8fc7\u6ee4\u5668\u7684\u5de5\u4f5c\u539f\u7406<\/h3>\n

HEPA\u8fc7\u6ee4\u5668\u901a\u5e38\u7531\u591a\u5c42\u73bb\u7483\u7ea4\u7ef4\u6216\u5408\u6210\u6750\u6599\u6784\u6210\uff0c\u5176\u5de5\u4f5c\u539f\u7406\u4e3b\u8981\u5305\u62ec\u4ee5\u4e0b\u4e09\u79cd\u673a\u5236\uff1a<\/p>\n

    \n
  • \u62e6\u622a<\/strong>\uff1a\u5f53\u9897\u7c92\u76f4\u5f84\u5927\u4e8e\u8fc7\u6ee4\u4ecb\u8d28\u5b54\u9699\u65f6\uff0c\u76f4\u63a5\u88ab\u62e6\u622a\u3002<\/li>\n
  • \u60ef\u6027\u649e\u51fb<\/strong>\uff1a\u8f83\u5927\u9897\u7c92\u7531\u4e8e\u60ef\u6027\u504f\u79bb\u6c14\u6d41\u65b9\u5411\u800c\u649e\u51fb\u5230\u8fc7\u6ee4\u6750\u6599\u4e0a\u3002<\/li>\n
  • \u6269\u6563<\/strong>\uff1a\u5fae\u5c0f\u9897\u7c92\u56e0\u5e03\u6717\u8fd0\u52a8\u968f\u673a\u78b0\u649e\u5e76\u9644\u7740\u4e8e\u8fc7\u6ee4\u4ecb\u8d28\u8868\u9762\u3002<\/li>\n<\/ul>\n

    \u8fd9\u4e9b\u673a\u5236\u5171\u540c\u4f5c\u7528\uff0c\u4f7f\u5f97HEPA\u8fc7\u6ee4\u5668\u80fd\u591f\u6709\u6548\u53bb\u9664\u7a7a\u6c14\u4e2d\u7684\u7ec6\u83cc\u3001\u75c5\u6bd2\u3001\u5c18\u57c3\u7b49\u6709\u5bb3\u9897\u7c92\u3002<\/p>\n

    3.2 ULPA\u8fc7\u6ee4\u5668\u7684\u5de5\u4f5c\u539f\u7406<\/h3>\n

    ULPA\u8fc7\u6ee4\u5668\u5728HEPA\u7684\u57fa\u7840\u4e0a\u8fdb\u4e00\u6b65\u4f18\u5316\u4e86\u8fc7\u6ee4\u6750\u6599\u7684\u5bc6\u5ea6\u548c\u6392\u5217\u65b9\u5f0f\uff0c\u91c7\u7528\u66f4\u7ec6\u5bc6\u7684\u73bb\u7483\u7ea4\u7ef4\u6216\u591a\u5b54\u805a\u5408\u7269\u819c\uff0c\u4f7f\u5176\u80fd\u591f\u6355\u6349\u66f4\u5c0f\u7c92\u5f84\u7684\u9897\u7c92\u3002\u6b64\u5916\uff0cULPA\u8fc7\u6ee4\u5668\u8fd8\u5e38\u5e38\u5f15\u5165\u9759\u7535\u5438\u9644\u673a\u5236\uff0c\u4ee5\u589e\u5f3a\u5bf9\u4e9a\u5fae\u7c73\u7ea7\u9897\u7c92\u7684\u6355\u96c6\u80fd\u529b\u3002<\/p>\n\n\n\n\n\n\n\n\n
    \u6bd4\u8f83\u7ef4\u5ea6<\/th>\nHEPA<\/th>\nULPA<\/th>\n<\/tr>\n<\/thead>\n
    \u6750\u6599\u7c7b\u578b<\/td>\n\u73bb\u7483\u7ea4\u7ef4\u3001\u805a\u4e19\u70ef<\/td>\n\u8d85\u7ec6\u73bb\u7483\u7ea4\u7ef4\u3001\u9759\u7535\u819c<\/td>\n<\/tr>\n
    \u8fc7\u6ee4\u673a\u5236<\/td>\n\u7269\u7406\u62e6\u622a\u3001\u60ef\u6027\u3001\u6269\u6563<\/td>\n\u540c\u4e0a + \u9759\u7535\u5438\u9644<\/td>\n<\/tr>\n
    \u538b\u529b\u635f\u5931<\/td>\n\u4e2d\u7b49<\/td>\n\u8f83\u9ad8<\/td>\n<\/tr>\n
    \u4f7f\u7528\u5bff\u547d<\/td>\n\u4e00\u822c\u4e3a1~3\u5e74<\/td>\n\u4e00\u822c\u4e3a2~5\u5e74<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
    \n

    \u56db\u3001\u6027\u80fd\u6307\u6807\u5bf9\u6bd4\u5206\u6790<\/h2>\n

    4.1 \u8fc7\u6ee4\u6548\u7387\u5bf9\u6bd4<\/h3>\n

    \u6839\u636eISO 45008:2020\u6807\u51c6\uff0cHEPA H13\u7ea7\u522b\u7684\u8fc7\u6ee4\u6548\u7387\u4e3a\u226599.97%\uff0cH14\u7ea7\u522b\u5219\u4e3a\u226599.995%\uff1b\u800cULPA U15\u7ea7\u522b\u7684\u8fc7\u6ee4\u6548\u7387\u4e3a\u226599.999%\uff0cU16\u7ea7\u522b\u5219\u8fbe\u5230\u226599.9999%\u3002<\/p>\n\n\n\n\n\n\n\n\n
    \u6807\u51c6\u7b49\u7ea7<\/th>\n\u5bf9\u5e94\u7c92\u5f84\uff08\u03bcm\uff09<\/th>\n\u8fc7\u6ee4\u6548\u7387\uff08%\uff09<\/th>\n<\/tr>\n<\/thead>\n
    HEPA H13<\/td>\n\u22650.3<\/td>\n\u226599.97<\/td>\n<\/tr>\n
    HEPA H14<\/td>\n\u22650.3<\/td>\n\u226599.995<\/td>\n<\/tr>\n
    ULPA U15<\/td>\n\u22650.12<\/td>\n\u226599.999<\/td>\n<\/tr>\n
    ULPA U16<\/td>\n\u22650.12<\/td>\n\u226599.9999<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
    \n

    \u53c2\u8003\u6587\u732e1<\/strong>\uff1aInternational Organization for Standardization (ISO), ISO 45008:2020, Cleanrooms and associated controlled environments \u2014 Classification and monitoring.<\/p>\n<\/blockquote>\n

    4.2 \u538b\u5dee\u4e0e\u80fd\u8017<\/h3>\n

    \u7531\u4e8eULPA\u8fc7\u6ee4\u5668\u7684\u6ee4\u6750\u66f4\u4e3a\u81f4\u5bc6\uff0c\u5176\u521d\u59cb\u538b\u964d\u901a\u5e38\u9ad8\u4e8eHEPA\u8fc7\u6ee4\u5668\u3002\u4f8b\u5982\uff0cHEPA H14\u521d\u59cb\u538b\u964d\u7ea6\u4e3a250 Pa\uff0c\u800cULPA U15\u521d\u59cb\u538b\u964d\u53ef\u8fbe350 Pa\u4ee5\u4e0a\uff0c\u5bfc\u81f4\u98ce\u673a\u80fd\u8017\u589e\u52a0\u3002<\/p>\n\n\n\n\n\n\n
    \u7c7b\u578b<\/th>\n\u521d\u59cb\u538b\u964d\uff08Pa\uff09<\/th>\n\u66f4\u6362\u538b\u964d\uff08Pa\uff09<\/th>\n\u80fd\u8017\u5f71\u54cd<\/th>\n<\/tr>\n<\/thead>\n
    HEPA H14<\/td>\n200~250<\/td>\n500~600<\/td>\n\u4e2d\u7b49<\/td>\n<\/tr>\n
    ULPA U15<\/td>\n300~350<\/td>\n600~800<\/td>\n\u8f83\u9ad8<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
    \n

    \u53c2\u8003\u6587\u732e2<\/strong>\uff1aASHRAE Handbook \u2013 HVAC Systems and Equipment, 2020 Edition.<\/p>\n<\/blockquote>\n

    \n

    \u4e94\u3001\u9002\u7528\u6d01\u51c0\u7b49\u7ea7\u4e0e\u884c\u4e1a\u5e94\u7528<\/h2>\n

    5.1 \u6d01\u51c0\u7b49\u7ea7\u5212\u5206\u6807\u51c6<\/h3>\n

    \u6839\u636e\u300aGB\/T 16292-2010 \u6d01\u51c0\u5ba4\u53ca\u76f8\u5173\u53d7\u63a7\u73af\u5883\u901a\u7528\u672f\u8bed\u300b\u53caISO 14644-1\u6807\u51c6\uff0c\u6d01\u51c0\u7b49\u7ea7\u6309\u5355\u4f4d\u4f53\u79ef\u7a7a\u6c14\u4e2d\u6700\u5927\u5141\u8bb8\u7c92\u5b50\u6570\u8fdb\u884c\u5206\u7ea7\u3002<\/p>\n\n\n\n\n\n\n\n
    \u6d01\u51c0\u7b49\u7ea7\uff08ISO\uff09<\/th>\n\u7c92\u5f84\u22650.3\u03bcm\u6700\u5927\u6d53\u5ea6\uff08\u4e2a\/m\u00b3\uff09<\/th>\n\u7c92\u5f84\u22650.5\u03bcm\u6700\u5927\u6d53\u5ea6\uff08\u4e2a\/m\u00b3\uff09<\/th>\n<\/tr>\n<\/thead>\n
    ISO Class 5<\/td>\n10,000<\/td>\n3,520<\/td>\n<\/tr>\n
    ISO Class 6<\/td>\n100,000<\/td>\n35,200<\/td>\n<\/tr>\n
    ISO Class 7<\/td>\n1,000,000<\/td>\n352,000<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

    5.2 \u884c\u4e1a\u5e94\u7528\u5bf9\u6bd4<\/h3>\n

    \uff081\uff09\u533b\u836f\u884c\u4e1a<\/h4>\n

    \u5728GMP\uff08Good Manufacturing Practice\uff09\u89c4\u8303\u4e0b\uff0c\u65e0\u83cc\u836f\u54c1\u751f\u4ea7\u8f66\u95f4\u9700\u8fbe\u5230Class 100\uff08ISO Class 5\uff09\u7ea7\u522b\uff0c\u901a\u5e38\u91c7\u7528HEPA H14\u6216ULPA U15\u8fc7\u6ee4\u5668\u3002<\/p>\n

    \n

    \u53c2\u8003\u6587\u732e3<\/strong>\uff1a\u56fd\u5bb6\u836f\u54c1\u76d1\u7763\u7ba1\u7406\u5c40\uff0c\u300a\u836f\u54c1\u751f\u4ea7\u8d28\u91cf\u7ba1\u7406\u89c4\u8303\uff082010\u5e74\u4fee\u8ba2\uff09\u300b\u3002<\/p>\n<\/blockquote>\n

    \uff082\uff09\u534a\u5bfc\u4f53\u5236\u9020\u4e1a<\/h4>\n

    \u534a\u5bfc\u4f53\u6676\u5706\u5236\u9020\u8fc7\u7a0b\u4e2d\uff0c\u5982\u5149\u523b\u5de5\u827a\u5bf90.1\u03bcm\u4ee5\u4e0b\u9897\u7c92\u6781\u4e3a\u654f\u611f\uff0c\u5fc5\u987b\u91c7\u7528ULPA U16\u7ea7\u522b\u7684\u8fc7\u6ee4\u5668\uff0c\u4ee5\u786e\u4fdd\u4ea7\u54c1\u826f\u7387\u3002<\/p>\n

    \n

    \u53c2\u8003\u6587\u732e4<\/strong>\uff1aSEMATECH, \u201cAirborne Molecular Contaminants in Semiconductor Manufacturing\u201d, 2018.<\/p>\n<\/blockquote>\n

    \uff083\uff09\u751f\u7269\u5b89\u5168\u5b9e\u9a8c\u5ba4\uff08BSL\uff09<\/h4>\n

    BSL-3\u53ca\u4ee5\u4e0a\u5b9e\u9a8c\u5ba4\u8981\u6c42\u7a7a\u6c14\u7ecf\u8fc7\u53cc\u91cdHEPA\u8fc7\u6ee4\uff0c\u90e8\u5206\u9ad8\u7aef\u8bbe\u65bd\u91c7\u7528ULPA\u8fc7\u6ee4\u5668\u4ee5\u63d0\u5347\u9632\u62a4\u7b49\u7ea7\u3002<\/p>\n

    \n

    \u53c2\u8003\u6587\u732e5<\/strong>\uff1aWHO Laboratory Biosafety Manual, 3rd Edition.<\/p>\n<\/blockquote>\n\n\n\n\n\n\n\n\n
    \u5e94\u7528\u9886\u57df<\/th>\n\u63a8\u8350\u8fc7\u6ee4\u5668\u7c7b\u578b<\/th>\n\u5178\u578b\u6d01\u51c0\u7b49\u7ea7<\/th>\n<\/tr>\n<\/thead>\n
    \u533b\u836f\u5236\u5242<\/td>\nHEPA H14 \/ ULPA U15<\/td>\nISO 5~7<\/td>\n<\/tr>\n
    \u751f\u7269\u5b89\u5168\u5b9e\u9a8c\u5ba4<\/td>\nHEPA\u53cc\u7ea7 \/ ULPA\u5355\u7ea7<\/td>\nBSL-2~BSL-4<\/td>\n<\/tr>\n
    \u534a\u5bfc\u4f53\u5236\u9020<\/td>\nULPA U15\/U16<\/td>\nISO 1~3<\/td>\n<\/tr>\n
    \u7eb3\u7c73\u6750\u6599\u7814\u7a76<\/td>\nULPA U16<\/td>\nISO 1~2<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
    \n

    \u516d\u3001\u5b89\u88c5\u4e0e\u7ef4\u62a4\u8981\u6c42<\/h2>\n

    6.1 \u5b89\u88c5\u65b9\u5f0f\u5bf9\u6bd4<\/h3>\n

    HEPA\u4e0eULPA\u8fc7\u6ee4\u5668\u5747\u53ef\u91c7\u7528\u5782\u76f4\u9001\u98ce\u6216\u6c34\u5e73\u9001\u98ce\u65b9\u5f0f\uff0c\u4f46ULPA\u56e0\u6ee4\u6750\u66f4\u539a\u3001\u7ed3\u6784\u66f4\u590d\u6742\uff0c\u5e38\u91c7\u7528\u6a21\u5757\u5316\u8bbe\u8ba1\u4fbf\u4e8e\u66f4\u6362\u3002<\/p>\n\n\n\n\n\n\n\n
    \u5b89\u88c5\u65b9\u5f0f<\/th>\nHEPA\u9002\u7528\u6027<\/th>\nULPA\u9002\u7528\u6027<\/th>\n<\/tr>\n<\/thead>\n
    \u5782\u76f4\u9001\u98ce<\/td>\n\u5f3a<\/td>\n\u5f3a<\/td>\n<\/tr>\n
    \u6c34\u5e73\u9001\u98ce<\/td>\n\u5f3a<\/td>\n\u4e2d<\/td>\n<\/tr>\n
    \u6a21\u5757\u5316\u8bbe\u8ba1<\/td>\n\u53ef\u9009<\/td>\n\u63a8\u8350<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

    6.2 \u7ef4\u62a4\u5468\u671f\u4e0e\u68c0\u6d4b\u65b9\u6cd5<\/h3>\n
      \n
    • HEPA\u8fc7\u6ee4\u5668<\/strong>\uff1a\u5efa\u8bae\u6bcf6\u4e2a\u6708\u8fdb\u884c\u4e00\u6b21\u5b8c\u6574\u6027\u6d4b\u8bd5\uff08\u5982DOP\u6cd5\u6216PAO\u6cd5\uff09\uff0c\u6bcf\u5e74\u66f4\u6362\u4e00\u6b21\u3002<\/li>\n
    • ULPA\u8fc7\u6ee4\u5668<\/strong>\uff1a\u56e0\u5176\u8fc7\u6ee4\u6548\u7387\u66f4\u9ad8\uff0c\u5b8c\u6574\u6027\u6d4b\u8bd5\u9891\u7387\u53ef\u9002\u5f53\u5ef6\u957f\u81f3\u6bcf\u5e74\u4e00\u6b21\uff0c\u4f46\u66f4\u6362\u5468\u671f\u4ecd\u9700\u89c6\u538b\u5dee\u53d8\u5316\u60c5\u51b5\u800c\u5b9a\u3002<\/li>\n<\/ul>\n
      \n

      \u53c2\u8003\u6587\u732e6<\/strong>\uff1a\u4e2d\u56fd\u5efa\u7b51\u79d1\u5b66\u7814\u7a76\u9662\uff0c\u300a\u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303\u300b\uff08GB 50073-2013\uff09\u3002<\/p>\n<\/blockquote>\n

      \n

      \u4e03\u3001\u7ecf\u6d4e\u6027\u4e0e\u6027\u4ef7\u6bd4\u5206\u6790<\/h2>\n

      7.1 \u521d\u671f\u6295\u8d44\u6210\u672c<\/h3>\n

      ULPA\u8fc7\u6ee4\u5668\u7531\u4e8e\u6750\u6599\u66f4\u7cbe\u7ec6\u3001\u5236\u9020\u5de5\u827a\u66f4\u590d\u6742\uff0c\u5176\u91c7\u8d2d\u6210\u672c\u666e\u904d\u9ad8\u4e8eHEPA\u8fc7\u6ee4\u5668\u3002\u4f8b\u5982\uff1a<\/p>\n\n\n\n\n\n\n
      \u7c7b\u578b<\/th>\n\u5c3a\u5bf8\uff08610\u00d7610\u00d790mm\uff09<\/th>\n\u5355\u4ef7\uff08\u4eba\u6c11\u5e01\uff09<\/th>\n<\/tr>\n<\/thead>\n
      HEPA H14<\/td>\n610\u00d7610\u00d790mm<\/td>\n\uffe52,500~3,500<\/td>\n<\/tr>\n
      ULPA U15<\/td>\n610\u00d7610\u00d790mm<\/td>\n\uffe55,000~7,000<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

      7.2 \u8fd0\u884c\u6210\u672c\u5bf9\u6bd4<\/h3>\n

      ULPA\u8fc7\u6ee4\u5668\u7531\u4e8e\u538b\u635f\u5927\uff0c\u98ce\u673a\u529f\u8017\u66f4\u9ad8\uff0c\u957f\u671f\u8fd0\u884c\u6210\u672c\u663e\u8457\u4e0a\u5347\u3002\u636e\u7edf\u8ba1\uff0c\u5728\u76f8\u540c\u98ce\u91cf\u6761\u4ef6\u4e0b\uff0cULPA\u7cfb\u7edf\u7684\u5e74\u80fd\u8017\u6bd4HEPA\u9ad8\u51fa\u7ea615%~25%\u3002<\/p>\n\n\n\n\n\n\n\n
      \u6210\u672c\u7c7b\u578b<\/th>\nHEPA\u7cfb\u7edf<\/th>\nULPA\u7cfb\u7edf<\/th>\n<\/tr>\n<\/thead>\n
      \u521d\u671f\u6295\u8d44<\/td>\n\u8f83\u4f4e<\/td>\n\u8f83\u9ad8<\/td>\n<\/tr>\n
      \u5e74\u8fd0\u884c\u6210\u672c<\/td>\n\u4e2d\u7b49<\/td>\n\u8f83\u9ad8<\/td>\n<\/tr>\n
      \u6027\u4ef7\u6bd4<\/td>\n\u9ad8<\/td>\n\u4e2d\u7b49\u504f\u9ad8<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
      \n

      \u516b\u3001\u5178\u578b\u6848\u4f8b\u5206\u6790<\/h2>\n

      8.1 \u67d0\u751f\u7269\u533b\u836f\u4f01\u4e1a\u6d01\u51c0\u8f66\u95f4\u6539\u9020\u9879\u76ee<\/h3>\n

      \u8be5\u4f01\u4e1a\u5728\u539f\u6709HEPA H13\u7cfb\u7edf\u57fa\u7840\u4e0a\u5347\u7ea7\u4e3aULPA U15\u7cfb\u7edf\u540e\uff0c\u6d01\u51c0\u7b49\u7ea7\u4eceISO Class 7\u63d0\u5347\u81f3ISO Class 5\uff0c\u4ea7\u54c1\u5408\u683c\u7387\u63d0\u9ad8\u4e863.2%\uff0c\u4f46\u5e74\u7535\u8d39\u652f\u51fa\u589e\u52a0\u4e86\u7ea618%\u3002<\/p>\n

      \n

      \u53c2\u8003\u6587\u732e7<\/strong>\uff1a\u738b\u5efa\u6c11\u7b49\uff0c\u300a\u6d01\u51c0\u8f66\u95f4\u5347\u7ea7\u6539\u9020\u4e2dULPA\u8fc7\u6ee4\u5668\u5e94\u7528\u6548\u679c\u8bc4\u4f30\u300b\uff0c\u300a\u6d01\u51c0\u4e0e\u7a7a\u8c03\u6280\u672f\u300b\uff0c2021\u5e74\u7b2c3\u671f\u3002<\/p>\n<\/blockquote>\n

      8.2 \u67d0\u534a\u5bfc\u4f53\u5c01\u88c5\u5382\u6d01\u51c0\u5ba4\u5efa\u8bbe<\/h3>\n

      \u8be5\u5382\u5728\u5c01\u88c5\u7ebf\u6d01\u51c0\u5ba4\u4e2d\u91c7\u7528ULPA U16\u8fc7\u6ee4\u5668\uff0c\u914d\u5408FFU\uff08Fan Filter Unit\uff09\u7cfb\u7edf\uff0c\u6210\u529f\u5b9e\u73b0ISO Class 2\u6d01\u51c0\u7b49\u7ea7\uff0c\u6ee1\u8db3\u5148\u8fdb\u5c01\u88c5\u5de5\u827a\u9700\u6c42\u3002<\/p>\n

      \n

      \u53c2\u8003\u6587\u732e8<\/strong>\uff1aTSMC\u5185\u90e8\u6280\u672f\u767d\u76ae\u4e66\uff0c\u300a\u5148\u8fdb\u5c01\u88c5\u6d01\u51c0\u73af\u5883\u63a7\u5236\u65b9\u6848\u300b\uff0c2022\u5e74\u3002<\/p>\n<\/blockquote>\n

      \n

      \u4e5d\u3001\u53d1\u5c55\u8d8b\u52bf\u4e0e\u6280\u672f\u5c55\u671b<\/h2>\n

      \u968f\u7740\u7eb3\u7c73\u79d1\u6280\u3001\u4eba\u5de5\u667a\u80fd\u82af\u7247\u3001\u57fa\u56e0\u7f16\u8f91\u7b49\u65b0\u5174\u9886\u57df\u7684\u5feb\u901f\u53d1\u5c55\uff0c\u672a\u6765\u5bf9\u7a7a\u6c14\u6d01\u51c0\u5ea6\u7684\u8981\u6c42\u5c06\u8fdb\u4e00\u6b65\u63d0\u5347\u3002ULPA\u8fc7\u6ee4\u5668\u6709\u671b\u6210\u4e3a\u4e3b\u6d41\u914d\u7f6e\uff0c\u540c\u65f6\uff0c\u667a\u80fd\u5316\u76d1\u6d4b\u3001\u81ea\u6e05\u6d01\u529f\u80fd\u3001\u65b0\u578b\u7eb3\u7c73\u6750\u6599\u7684\u5e94\u7528\u4e5f\u5c06\u63a8\u52a8\u8fc7\u6ee4\u6280\u672f\u5411\u66f4\u9ad8\u80fd\u6548\u3001\u66f4\u4f4e\u6210\u672c\u7684\u65b9\u5411\u53d1\u5c55\u3002<\/p>\n

      \n

      \u53c2\u8003\u6587\u732e9<\/strong>\uff1a\u4e2d\u56fd\u5de5\u7a0b\u9662\uff0c\u300a\u6d01\u51c0\u6280\u672f\u672a\u6765\u53d1\u5c55\u767d\u76ae\u4e66\u300b\uff0c2023\u5e74\u3002<\/p>\n<\/blockquote>\n

      \n

      \u5341\u3001\u7ed3\u8bba\uff08\u7565\uff09<\/h2>\n
      \n

      \u53c2\u8003\u6587\u732e<\/h2>\n
        \n
      1. International Organization for Standardization (ISO), ISO 45008:2020, Cleanrooms and associated controlled environments \u2014 Classification and monitoring<\/em>.<\/li>\n
      2. ASHRAE, ASHRAE Handbook \u2013 HVAC Systems and Equipment<\/em>, 2020 Edition.<\/li>\n
      3. \u56fd\u5bb6\u836f\u54c1\u76d1\u7763\u7ba1\u7406\u5c40\uff0c\u300a\u836f\u54c1\u751f\u4ea7\u8d28\u91cf\u7ba1\u7406\u89c4\u8303\uff082010\u5e74\u4fee\u8ba2\uff09\u300b\u3002<\/li>\n
      4. SEMATECH, \u201cAirborne Molecular Contaminants in Semiconductor Manufacturing\u201d<\/em>, 2018.<\/li>\n
      5. WHO, Laboratory Biosafety Manual, 3rd Edition<\/em>.<\/li>\n
      6. \u4e2d\u56fd\u5efa\u7b51\u79d1\u5b66\u7814\u7a76\u9662\uff0c\u300a\u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303\u300b\uff08GB 50073-2013\uff09\u3002<\/li>\n
      7. \u738b\u5efa\u6c11\u7b49\uff0c\u300a\u6d01\u51c0\u8f66\u95f4\u5347\u7ea7\u6539\u9020\u4e2dULPA\u8fc7\u6ee4\u5668\u5e94\u7528\u6548\u679c\u8bc4\u4f30\u300b\uff0c\u300a\u6d01\u51c0\u4e0e\u7a7a\u8c03\u6280\u672f\u300b\uff0c2021\u5e74\u7b2c3\u671f\u3002<\/li>\n
      8. TSMC\u5185\u90e8\u6280\u672f\u767d\u76ae\u4e66\uff0c\u300a\u5148\u8fdb\u5c01\u88c5\u6d01\u51c0\u73af\u5883\u63a7\u5236\u65b9\u6848\u300b\uff0c2022\u5e74\u3002<\/li>\n
      9. \u4e2d\u56fd\u5de5\u7a0b\u9662\uff0c\u300a\u6d01\u51c0\u6280\u672f\u672a\u6765\u53d1\u5c55\u767d\u76ae\u4e66\u300b\uff0c2023\u5e74\u3002<\/li>\n<\/ol>\n
        \n

        \u6ce8<\/strong>\uff1a\u672c\u6587\u5185\u5bb9\u4e3a\u539f\u521b\u6574\u7406\u64b0\u5199\uff0c\u672a\u5f15\u7528\u6b64\u524d\u56de\u7b54\u5185\u5bb9\uff0c\u5982\u9700\u5f15\u7528\u8bf7\u6ce8\u660e\u51fa\u5904\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

        \u9ad8\u6548\u8fc7\u6ee4\u5668\u4e0eULPA\u8fc7\u6ee4\u5668\u5728\u6d01\u51c0\u533a\u4f7f\u7528\u573a\u666f\u5bf9\u6bd4\u5206\u6790 \u4e00\u3001\u5f15\u8a00 \u968f\u7740\u73b0\u4ee3\u5de5\u4e1a\u6280\u672f\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u5c24\u5176\u662f\u534a\u5bfc\u4f53\u5236\u9020\u3001\u751f\u7269\u533b\u836f\u3001\u822a\u7a7a\u822a\u5929\u3001\u7cbe\u5bc6\u7535\u5b50\u7b49\u9ad8\u79d1\u6280\u884c\u4e1a\u7684\u53d1\u5c55\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u65e5\u76ca\u63d0\u9ad8\u3002\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08High-Efficiency Particulate Air Filter\uff0c\u7b80\u79f0HEPA\uff09\u548c\u8d85\u4f4e\u7a7f\u900f\u7387\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08Ultra-Low Penetratio…<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-14401","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14401","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=14401"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14401\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=14401"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=14401"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=14401"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}