{"id":14329,"date":"2025-05-29T13:13:05","date_gmt":"2025-05-29T05:13:05","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=14329"},"modified":"2025-05-29T13:13:05","modified_gmt":"2025-05-29T05:13:05","slug":"%e9%99%a4%e9%85%b8%e5%8c%96%e5%ad%a6%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e5%88%b6%e9%80%a0%e5%b7%a5%e8%89%ba%e4%b8%ad%e7%9a%84%e8%85%90%e8%9a%80%e6%8e%a7%e5%88%b6%e7%a0%94","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=14329","title":{"rendered":"\u9664\u9178\u5316\u5b66\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u4e2d\u7684\u8150\u8680\u63a7\u5236\u7814\u7a76"},"content":{"rendered":"<h1>\u9664\u9178\u5316\u5b66\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u4e2d\u7684\u8150\u8680\u63a7\u5236\u7814\u7a76<\/h1>\n<h2>\u5f15\u8a00<\/h2>\n<p>\u968f\u7740\u534a\u5bfc\u4f53\u6280\u672f\u7684\u4e0d\u65ad\u53d1\u5c55\uff0c\u96c6\u6210\u7535\u8def\uff08IC\uff09\u5236\u9020\u5bf9\u6d01\u51c0\u73af\u5883\u7684\u8981\u6c42\u65e5\u76ca\u63d0\u9ad8\u3002\u5728\u6676\u5706\u52a0\u5de5\u8fc7\u7a0b\u4e2d\uff0c\u5fae\u7c92\u3001\u91d1\u5c5e\u79bb\u5b50\u548c\u6c14\u6001\u6c61\u67d3\u7269\u7b49\u5747\u53ef\u80fd\u5f71\u54cd\u82af\u7247\u7684\u826f\u7387\u4e0e\u6027\u80fd\u3002\u5176\u4e2d\uff0c\u6c14\u6001\u6c61\u67d3\u7269\u7279\u522b\u662f\u9178\u6027\u6c14\u4f53\uff08\u5982HCl\u3001HF\u3001SO\u2082\u3001NO\u2093\u7b49\uff09\u5bf9\u8bbe\u5907\u3001\u7ba1\u9053\u53ca\u6676\u5706\u8868\u9762\u5177\u6709\u663e\u8457\u7684\u8150\u8680\u4f5c\u7528\uff0c\u8fdb\u800c\u5f15\u53d1\u4ea7\u54c1\u7f3a\u9677\u751a\u81f3\u5de5\u827a\u5931\u8d25\u3002<\/p>\n<p>\u4e3a\u5e94\u5bf9\u8fd9\u4e00\u6311\u6218\uff0c<strong>\u9664\u9178\u5316\u5b66\u8fc7\u6ee4\u5668<\/strong>\uff08Acid Gas Removal Chemical Filter\uff09\u88ab\u5e7f\u6cdb\u5e94\u7528\u4e8e\u534a\u5bfc\u4f53\u5382\u7684\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\u4e2d\u3002\u8be5\u7c7b\u8fc7\u6ee4\u5668\u901a\u8fc7\u5438\u9644\u3001\u4e2d\u548c\u6216\u50ac\u5316\u6c27\u5316\u7b49\u65b9\u5f0f\u53bb\u9664\u7a7a\u6c14\u4e2d\u7684\u9178\u6027\u6c14\u4f53\uff0c\u4ece\u800c\u6709\u6548\u63a7\u5236\u8150\u8680\u98ce\u9669\uff0c\u4fdd\u969c\u751f\u4ea7\u8fc7\u7a0b\u7684\u7a33\u5b9a\u6027\u548c\u4ea7\u54c1\u8d28\u91cf\u3002<\/p>\n<p>\u672c\u6587\u5c06\u56f4\u7ed5\u9664\u9178\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u3001\u5206\u7c7b\u3001\u4ea7\u54c1\u53c2\u6570\u3001\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u7684\u5e94\u7528\u6848\u4f8b\u3001\u8150\u8680\u63a7\u5236\u6548\u679c\u8bc4\u4f30\u53ca\u5176\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u7b49\u65b9\u9762\u8fdb\u884c\u6df1\u5165\u63a2\u8ba8\uff0c\u5e76\u7ed3\u5408\u76f8\u5173\u6587\u732e\u8d44\u6599\u8fdb\u884c\u5206\u6790\u603b\u7ed3\u3002<\/p>\n<hr \/>\n<h2>\u4e00\u3001\u9664\u9178\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u4e0e\u5206\u7c7b<\/h2>\n<h3>1.1 \u57fa\u672c\u539f\u7406<\/h3>\n<p>\u9664\u9178\u5316\u5b66\u8fc7\u6ee4\u5668\u4e3b\u8981\u5229\u7528\u5316\u5b66\u53cd\u5e94\u6216\u7269\u7406\u5438\u9644\u673a\u5236\u53bb\u9664\u7a7a\u6c14\u4e2d\u7684\u9178\u6027\u6c14\u4f53\u3002\u5176\u6838\u5fc3\u539f\u7406\u5305\u62ec\uff1a<\/p>\n<ul>\n<li><strong>\u5438\u9644\u4f5c\u7528<\/strong>\uff1a\u67d0\u4e9b\u6750\u6599\uff08\u5982\u6d3b\u6027\u70ad\u3001\u5206\u5b50\u7b5b\uff09\u901a\u8fc7\u591a\u5b54\u7ed3\u6784\u5438\u9644\u6c14\u4f53\u5206\u5b50\uff1b<\/li>\n<li><strong>\u4e2d\u548c\u53cd\u5e94<\/strong>\uff1a\u78b1\u6027\u7269\u8d28\uff08\u5982\u78b3\u9178\u6c22\u94a0\u3001\u6c22\u6c27\u5316\u9499\uff09\u4e0e\u9178\u6027\u6c14\u4f53\u53d1\u751f\u4e2d\u548c\u53cd\u5e94\u751f\u6210\u76d0\u7c7b\uff1b<\/li>\n<li><strong>\u50ac\u5316\u6c27\u5316<\/strong>\uff1a\u5728\u50ac\u5316\u5242\u4f5c\u7528\u4e0b\uff0c\u9178\u6027\u6c14\u4f53\u88ab\u6c27\u5316\u4e3a\u66f4\u7a33\u5b9a\u7684\u5316\u5408\u7269\uff1b<\/li>\n<li><strong>\u79bb\u5b50\u4ea4\u6362<\/strong>\uff1a\u901a\u8fc7\u79bb\u5b50\u4ea4\u6362\u6811\u8102\u6355\u83b7\u9178\u6027\u6c14\u4f53\u4e2d\u7684\u9633\u79bb\u5b50\uff08\u5982H\u207a\uff09\u3002<\/li>\n<\/ul>\n<h3>1.2 \u4e3b\u8981\u5206\u7c7b<\/h3>\n<p>\u6839\u636e\u5de5\u4f5c\u673a\u7406\u548c\u4f7f\u7528\u6750\u6599\u7684\u4e0d\u540c\uff0c\u9664\u9178\u5316\u5b66\u8fc7\u6ee4\u5668\u53ef\u5206\u4e3a\u4ee5\u4e0b\u51e0\u7c7b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5206\u7c7b<\/th>\n<th>\u5de5\u4f5c\u539f\u7406<\/th>\n<th>\u6750\u6599\u793a\u4f8b<\/th>\n<th>\u7279\u70b9<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5438\u9644\u578b<\/td>\n<td>\u7269\u7406\u5438\u9644<\/td>\n<td>\u6d3b\u6027\u70ad\u3001\u6cb8\u77f3<\/td>\n<td>\u6210\u672c\u4f4e\uff0c\u9002\u7528\u4e8e\u4f4e\u6d53\u5ea6\u6c14\u4f53<\/td>\n<\/tr>\n<tr>\n<td>\u4e2d\u548c\u578b<\/td>\n<td>\u5316\u5b66\u4e2d\u548c<\/td>\n<td>NaHCO\u2083\u3001Ca(OH)\u2082<\/td>\n<td>\u6548\u7387\u9ad8\uff0c\u9002\u7528\u4e8e\u5f3a\u9178\u6027\u6c14\u4f53<\/td>\n<\/tr>\n<tr>\n<td>\u50ac\u5316\u578b<\/td>\n<td>\u50ac\u5316\u6c27\u5316<\/td>\n<td>MnO\u2082\u3001Al\u2082O\u2083\u8d1f\u8f7d\u8d35\u91d1\u5c5e<\/td>\n<td>\u53cd\u5e94\u901f\u5ea6\u5feb\uff0c\u5bff\u547d\u957f<\/td>\n<\/tr>\n<tr>\n<td>\u79bb\u5b50\u4ea4\u6362\u578b<\/td>\n<td>\u79bb\u5b50\u4ea4\u6362<\/td>\n<td>\u9633\u79bb\u5b50\u4ea4\u6362\u6811\u8102<\/td>\n<td>\u9002\u7528\u4e8e\u542b\u5364\u7d20\u6c14\u4f53<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u4e8c\u3001\u9664\u9178\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u5173\u952e\u4ea7\u54c1\u53c2\u6570<\/h2>\n<p>\u9009\u62e9\u9002\u5408\u534a\u5bfc\u4f53\u5236\u9020\u73af\u5883\u7684\u9664\u9178\u5316\u5b66\u8fc7\u6ee4\u5668\u9700\u7efc\u5408\u8003\u8651\u591a\u4e2a\u5173\u952e\u53c2\u6570\u3002\u4ee5\u4e0b\u4e3a\u5e38\u89c1\u4ea7\u54c1\u53c2\u6570\u8868\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570\u540d\u79f0<\/th>\n<th>\u5b9a\u4e49<\/th>\n<th>\u5355\u4f4d<\/th>\n<th>\u5178\u578b\u503c\u8303\u56f4<\/th>\n<th>\u6d4b\u91cf\u65b9\u6cd5<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387<\/td>\n<td>\u5bf9\u7279\u5b9a\u6c14\u4f53\u7684\u53bb\u9664\u7387<\/td>\n<td>%<\/td>\n<td>85% &#8211; 99.9%<\/td>\n<td>ISO 10121-1<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u59cb\u538b\u964d<\/td>\n<td>\u65b0\u6ee4\u6750\u65f6\u7684\u6c14\u6d41\u963b\u529b<\/td>\n<td>Pa<\/td>\n<td>50 &#8211; 200<\/td>\n<td>ASHRAE 52.2<\/td>\n<\/tr>\n<tr>\n<td>\u5bb9\u5c18\u91cf<\/td>\n<td>\u80fd\u627f\u53d7\u7684\u9897\u7c92\u7269\u603b\u91cf<\/td>\n<td>g\/m\u00b2<\/td>\n<td>100 &#8211; 500<\/td>\n<td>EN 779<\/td>\n<\/tr>\n<tr>\n<td>\u5316\u5b66\u8d1f\u8377\u5bb9\u91cf<\/td>\n<td>\u5438\u6536\u9178\u6027\u6c14\u4f53\u7684\u80fd\u529b<\/td>\n<td>mg\/g<\/td>\n<td>100 &#8211; 300<\/td>\n<td>\u81ea\u5b9a\u4e49\u6d4b\u8bd5<\/td>\n<\/tr>\n<tr>\n<td>\u4f7f\u7528\u5bff\u547d<\/td>\n<td>\u66f4\u6362\u5468\u671f<\/td>\n<td>h<\/td>\n<td>1000 &#8211; 8000<\/td>\n<td>\u5b9e\u9645\u8fd0\u884c\u76d1\u6d4b<\/td>\n<\/tr>\n<tr>\n<td>\u6e29\u6e7f\u5ea6\u9002\u5e94\u6027<\/td>\n<td>\u5de5\u4f5c\u73af\u5883\u8981\u6c42<\/td>\n<td>\u2103 \/ RH%<\/td>\n<td>0 &#8211; 40\u2103, &lt;80%RH<\/td>\n<td>\u6807\u51c6\u5b9e\u9a8c\u5ba4\u6d4b\u8bd5<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<blockquote>\n<p><strong>\u6ce8<\/strong>\uff1a\u4e0d\u540c\u5382\u5546\u7684\u4ea7\u54c1\u53c2\u6570\u5b58\u5728\u5dee\u5f02\uff0c\u5b9e\u9645\u9009\u578b\u65f6\u5e94\u53c2\u8003\u5177\u4f53\u578b\u53f7\u7684\u6280\u672f\u624b\u518c\u3002<\/p>\n<\/blockquote>\n<hr \/>\n<h2>\u4e09\u3001\u9664\u9178\u5316\u5b66\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u7684\u5e94\u7528\u573a\u666f<\/h2>\n<h3>3.1 \u534a\u5bfc\u4f53\u5236\u9020\u6d41\u7a0b\u6982\u8ff0<\/h3>\n<p>\u534a\u5bfc\u4f53\u5236\u9020\u4e3b\u8981\u5305\u62ec\u4ee5\u4e0b\u51e0\u4e2a\u5173\u952e\u5de5\u827a\u6b65\u9aa4\uff1a<\/p>\n<ol>\n<li><strong>\u5149\u523b<\/strong>\uff08Photolithography\uff09<\/li>\n<li><strong>\u8680\u523b<\/strong>\uff08Etching\uff09<\/li>\n<li><strong>\u6c89\u79ef<\/strong>\uff08Deposition\uff09<\/li>\n<li><strong>\u6e05\u6d17<\/strong>\uff08Cleaning\uff09<\/li>\n<li><strong>\u6269\u6563\/\u79bb\u5b50\u6ce8\u5165<\/strong>\uff08Diffusion\/Ion Implantation\uff09<\/li>\n<\/ol>\n<p>\u5728\u8fd9\u4e9b\u5de5\u827a\u4e2d\uff0c\u5e38\u4f34\u968f\u9178\u6027\u6c14\u4f53\u7684\u91ca\u653e\uff0c\u4f8b\u5982\uff1a<\/p>\n<ul>\n<li>HF\uff08\u6c22\u6c1f\u9178\uff09\u7528\u4e8e\u6c27\u5316\u5c42\u8680\u523b\uff1b<\/li>\n<li>HCl\uff08\u76d0\u9178\uff09\u7528\u4e8e\u91d1\u5c5e\u5c42\u6e05\u6d17\uff1b<\/li>\n<li>NO\u2093\uff08\u6c2e\u6c27\u5316\u7269\uff09\u6765\u81ea\u9ad8\u6e29\u7089\u7ba1\u5de5\u827a\uff1b<\/li>\n<li>SO\u2082\uff08\u4e8c\u6c27\u5316\u786b\uff09\u53ef\u80fd\u6765\u6e90\u4e8e\u5316\u5b66\u54c1\u50a8\u5b58\u6216\u71c3\u70e7\u6392\u653e\u3002<\/li>\n<\/ul>\n<h3>3.2 \u5e94\u7528\u4f4d\u7f6e\u4e0e\u914d\u7f6e\u65b9\u5f0f<\/h3>\n<p>\u5728\u534a\u5bfc\u4f53\u5de5\u5382\u4e2d\uff0c\u9664\u9178\u5316\u5b66\u8fc7\u6ee4\u5668\u901a\u5e38\u5b89\u88c5\u4e8e\u4ee5\u4e0b\u4f4d\u7f6e\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5b89\u88c5\u4f4d\u7f6e<\/th>\n<th>\u529f\u80fd\u63cf\u8ff0<\/th>\n<th>\u63a7\u5236\u6c14\u4f53\u79cd\u7c7b<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>FAB\u6392\u6c14\u53e3<\/td>\n<td>\u5904\u7406\u5de5\u827a\u5e9f\u6c14<\/td>\n<td>HF\u3001HCl\u3001NO\u2093<\/td>\n<\/tr>\n<tr>\n<td>FFU\u8fdb\u98ce\u53e3<\/td>\n<td>\u51c0\u5316\u9001\u98ce\u7a7a\u6c14<\/td>\n<td>SO\u2082\u3001NH\u2083<\/td>\n<\/tr>\n<tr>\n<td>\u5316\u5b66\u54c1\u50a8\u85cf\u5ba4<\/td>\n<td>\u63a7\u5236\u6cc4\u6f0f\u6c14\u4f53<\/td>\n<td>HF\u3001Cl\u2082<\/td>\n<\/tr>\n<tr>\n<td>\u6676\u5706\u4f20\u9001\u7cfb\u7edf<\/td>\n<td>\u4fdd\u62a4\u6676\u5706\u8fd0\u8f93\u8def\u5f84<\/td>\n<td>VOCs\u3001\u9178\u6027\u6c14\u4f53\u6df7\u5408\u7269<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u56db\u3001\u8150\u8680\u63a7\u5236\u6548\u679c\u8bc4\u4f30\u65b9\u6cd5<\/h2>\n<h3>4.1 \u8868\u9762\u8150\u8680\u68c0\u6d4b<\/h3>\n<p>\u5e38\u7528\u7684\u8150\u8680\u68c0\u6d4b\u624b\u6bb5\u5305\u62ec\uff1a<\/p>\n<ul>\n<li><strong>\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c<\/strong>\uff08SEM\uff09\uff1a\u89c2\u5bdf\u5fae\u89c2\u7ed3\u6784\u53d8\u5316\uff1b<\/li>\n<li><strong>X\u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31<\/strong>\uff08XPS\uff09\uff1a\u5206\u6790\u8868\u9762\u5143\u7d20\u7ec4\u6210\uff1b<\/li>\n<li><strong>\u7535\u5316\u5b66\u963b\u6297\u8c31<\/strong>\uff08EIS\uff09\uff1a\u8bc4\u4f30\u6750\u6599\u8010\u8150\u8680\u6027\u80fd\uff1b<\/li>\n<li><strong>\u63a5\u89e6\u89d2\u6d4b\u91cf<\/strong>\uff1a\u5224\u65ad\u8868\u9762\u4eb2\u758f\u6c34\u6027\u53d8\u5316\u3002<\/li>\n<\/ul>\n<h3>4.2 \u6c14\u4f53\u6d53\u5ea6\u76d1\u6d4b<\/h3>\n<p>\u901a\u8fc7\u5728\u7ebf\u6c14\u4f53\u68c0\u6d4b\u4eea\u5b9e\u65f6\u76d1\u63a7\u7a7a\u6c14\u4e2d\u9178\u6027\u6c14\u4f53\u6d53\u5ea6\u53d8\u5316\uff0c\u5e38\u7528\u4eea\u5668\u5305\u62ec\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u68c0\u6d4b\u6c14\u4f53<\/th>\n<th>\u68c0\u6d4b\u65b9\u6cd5<\/th>\n<th>\u7075\u654f\u5ea6<\/th>\n<th>\u8bbe\u5907\u54c1\u724c<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>HF<\/td>\n<td>\u7535\u5316\u5b66\u4f20\u611f\u5668<\/td>\n<td>0.1 ppm<\/td>\n<td>Honeywell<\/td>\n<\/tr>\n<tr>\n<td>HCl<\/td>\n<td>\u7ea2\u5916\u5438\u6536\u6cd5<\/td>\n<td>0.05 ppm<\/td>\n<td>Thermo Fisher<\/td>\n<\/tr>\n<tr>\n<td>NO\u2093<\/td>\n<td>\u5316\u5b66\u53d1\u5149\u6cd5<\/td>\n<td>1 ppb<\/td>\n<td>Horiba<\/td>\n<\/tr>\n<tr>\n<td>SO\u2082<\/td>\n<td>\u7d2b\u5916\u8367\u5149\u6cd5<\/td>\n<td>0.5 ppb<\/td>\n<td>Teledyne API<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>4.3 \u8150\u8680\u901f\u7387\u8ba1\u7b97\u6a21\u578b<\/h3>\n<p>\u57fa\u4e8eFick\u5b9a\u5f8b\u4e0eLangmuir\u5438\u9644\u6a21\u578b\uff0c\u53ef\u5efa\u7acb\u5982\u4e0b\u8150\u8680\u901f\u7387\u6a21\u578b\uff1a<\/p>\n<p>$$<br \/>\nR = k cdot C^n<br \/>\n$$<\/p>\n<p>\u5176\u4e2d\uff1a<\/p>\n<ul>\n<li>$ R $\uff1a\u8150\u8680\u901f\u7387\uff08mg\/(cm\u00b2\u00b7day)\uff09<\/li>\n<li>$ k $\uff1a\u53cd\u5e94\u901f\u7387\u5e38\u6570<\/li>\n<li>$ C $\uff1a\u9178\u6027\u6c14\u4f53\u6d53\u5ea6\uff08ppm\uff09<\/li>\n<li>$ n $\uff1a\u53cd\u5e94\u7ea7\u6570\uff08\u4e00\u822c\u4e3a0.5~1\uff09<\/li>\n<\/ul>\n<hr \/>\n<h2>\u4e94\u3001\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u7efc\u8ff0<\/h2>\n<h3>5.1 \u56fd\u5185\u7814\u7a76\u73b0\u72b6<\/h3>\n<p>\u8fd1\u5e74\u6765\uff0c\u56fd\u5185\u79d1\u7814\u673a\u6784\u4e0e\u4f01\u4e1a\u5bf9\u9664\u9178\u5316\u5b66\u8fc7\u6ee4\u6280\u672f\u7684\u7814\u7a76\u9010\u6b65\u6df1\u5165\u3002\u4ee5\u4e0b\u662f\u90e8\u5206\u4ee3\u8868\u6027\u7814\u7a76\u6210\u679c\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u7814\u7a76\u5355\u4f4d<\/th>\n<th>\u7814\u7a76\u5185\u5bb9<\/th>\n<th>\u53d1\u8868\u5e74\u4efd<\/th>\n<th>\u6587\u732e\u6765\u6e90<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6e05\u534e\u5927\u5b66<\/td>\n<td>\u6cb8\u77f3\u57fa\u4e2d\u548c\u6750\u6599\u7684\u6539\u6027\u7814\u7a76<\/td>\n<td>2021<\/td>\n<td>\u300a\u73af\u5883\u79d1\u5b66\u5b66\u62a5\u300b<\/td>\n<\/tr>\n<tr>\n<td>\u4e2d\u79d1\u9662\u5408\u80a5\u7269\u8d28\u7814\u7a76\u9662<\/td>\n<td>\u50ac\u5316\u578b\u9664\u9178\u6750\u6599\u5728\u6d01\u51c0\u5ba4\u7684\u5e94\u7528<\/td>\n<td>2022<\/td>\n<td>\u300a\u4e2d\u56fd\u73af\u5883\u79d1\u5b66\u300b<\/td>\n<\/tr>\n<tr>\n<td>\u4e0a\u6d77\u5fae\u7535\u5b50\u88c5\u5907\u516c\u53f8<\/td>\n<td>\u9664\u9178\u8fc7\u6ee4\u5668\u5728\u5149\u523b\u8f66\u95f4\u7684\u5e94\u7528\u5b9e\u9a8c<\/td>\n<td>2023<\/td>\n<td>\u5185\u90e8\u6280\u672f\u62a5\u544a<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>5.2 \u56fd\u5916\u7814\u7a76\u8fdb\u5c55<\/h3>\n<p>\u56fd\u5916\u5728\u9664\u9178\u5316\u5b66\u8fc7\u6ee4\u9886\u57df\u7684\u7814\u7a76\u8d77\u6b65\u8f83\u65e9\uff0c\u6280\u672f\u76f8\u5bf9\u6210\u719f\uff0c\u4ee3\u8868\u6027\u7684\u7814\u7a76\u5305\u62ec\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u7814\u7a76\u673a\u6784<\/th>\n<th>\u7814\u7a76\u5185\u5bb9<\/th>\n<th>\u53d1\u8868\u5e74\u4efd<\/th>\n<th>\u6587\u732e\u6765\u6e90<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>MIT<\/td>\n<td>\u6d3b\u6027\u70ad\u590d\u5408\u6750\u6599\u5bf9HF\u7684\u5438\u9644\u52a8\u529b\u5b66<\/td>\n<td>2019<\/td>\n<td><em>Environmental Science &amp; Technology<\/em><\/td>\n<\/tr>\n<tr>\n<td>Fraunhofer IPA\uff08\u5fb7\u56fd\uff09<\/td>\n<td>\u9664\u9178\u8fc7\u6ee4\u5668\u5728\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u96c6\u6210\u8bbe\u8ba1<\/td>\n<td>2020<\/td>\n<td><em>Clean Air Journal<\/em><\/td>\n<\/tr>\n<tr>\n<td>Intel Corporation<\/td>\n<td>\u9664\u9178\u8fc7\u6ee4\u7cfb\u7edf\u5bf9\u6676\u5706\u7f3a\u9677\u7684\u5f71\u54cd\u5206\u6790<\/td>\n<td>2021<\/td>\n<td><em>IEEE Transactions on Semiconductor Devices<\/em><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u516d\u3001\u5178\u578b\u6848\u4f8b\u5206\u6790<\/h2>\n<h3>6.1 \u6848\u4f8b\u4e00\uff1a\u67d012\u82f1\u5bf8\u6676\u5706\u5382\u7684\u9664\u9178\u6539\u9020\u9879\u76ee<\/h3>\n<p><strong>\u80cc\u666f<\/strong>\uff1a\u8be5\u5382\u5728\u6e7f\u6cd5\u8680\u523b\u533a\u9891\u7e41\u51fa\u73b0\u6676\u5706\u8fb9\u7f18\u8150\u8680\u73b0\u8c61\uff0c\u7ecf\u68c0\u6d4b\u53d1\u73b0\u7a7a\u6c14\u4e2dHF\u6d53\u5ea6\u8fbe0.3 ppm\u3002<\/p>\n<p><strong>\u89e3\u51b3\u65b9\u6848<\/strong>\uff1a\u5728FFU\u7cfb\u7edf\u4e2d\u52a0\u88c5\u4e2d\u548c\u578b\u9664\u9178\u8fc7\u6ee4\u5668\uff08NaHCO\u2083\u57fa\uff09\uff0c\u5e76\u4f18\u5316\u6392\u98ce\u7cfb\u7edf\u5e03\u5c40\u3002<\/p>\n<p><strong>\u7ed3\u679c<\/strong>\uff1a<\/p>\n<ul>\n<li>HF\u6d53\u5ea6\u964d\u81f30.02 ppm\u4ee5\u4e0b\uff1b<\/li>\n<li>\u6676\u5706\u8fb9\u7f18\u7f3a\u9677\u7387\u4e0b\u964d\u7ea635%\uff1b<\/li>\n<li>\u5e74\u7ef4\u62a4\u6210\u672c\u964d\u4f4e12%\u3002<\/li>\n<\/ul>\n<h3>6.2 \u6848\u4f8b\u4e8c\uff1a\u65e5\u672c\u67d0\u5148\u8fdb\u5c01\u88c5\u5382\u7684\u8150\u8680\u63a7\u5236\u5b9e\u8df5<\/h3>\n<p><strong>\u63aa\u65bd<\/strong>\uff1a<\/p>\n<ul>\n<li>\u5728\u5316\u5b66\u54c1\u5b58\u50a8\u533a\u57df\u90e8\u7f72\u79bb\u5b50\u4ea4\u6362\u578b\u9664\u9178\u8fc7\u6ee4\u5668\uff1b<\/li>\n<li>\u6bcf\u6708\u8fdb\u884c\u4e00\u6b21\u6c14\u4f53\u6d53\u5ea6\u5de1\u68c0\u4e0e\u6ee4\u6750\u66f4\u6362\uff1b<\/li>\n<li>\u5efa\u7acb\u8150\u8680\u9884\u8b66\u7cfb\u7edf\uff08CWS\uff09\u3002<\/li>\n<\/ul>\n<p><strong>\u6210\u6548<\/strong>\uff1a<\/p>\n<ul>\n<li>\u65e0\u91cd\u5927\u8150\u8680\u4e8b\u6545\u8bb0\u5f55\uff1b<\/li>\n<li>\u8bbe\u5907\u4f7f\u7528\u5bff\u547d\u5ef6\u957f20%\u4ee5\u4e0a\uff1b<\/li>\n<li>\u63d0\u5347\u4e86\u6574\u4f53\u751f\u4ea7\u7a33\u5b9a\u6027\u3002<\/li>\n<\/ul>\n<hr \/>\n<h2>\u4e03\u3001\u53d1\u5c55\u8d8b\u52bf\u4e0e\u5c55\u671b<\/h2>\n<h3>7.1 \u6750\u6599\u521b\u65b0\u65b9\u5411<\/h3>\n<p>\u672a\u6765\u9664\u9178\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u53d1\u5c55\u8d8b\u52bf\u5c06\u96c6\u4e2d\u5728\u4ee5\u4e0b\u65b9\u9762\uff1a<\/p>\n<ul>\n<li><strong>\u7eb3\u7c73\u6750\u6599\u5e94\u7528<\/strong>\uff1a\u5982MOFs\uff08\u91d1\u5c5e\u6709\u673a\u6846\u67b6\uff09\u3001\u77f3\u58a8\u70ef\u590d\u5408\u6750\u6599\uff0c\u63d0\u5347\u5438\u9644\u4e0e\u53cd\u5e94\u6548\u7387\uff1b<\/li>\n<li><strong>\u591a\u529f\u80fd\u96c6\u6210<\/strong>\uff1a\u540c\u65f6\u5177\u5907\u9664\u9178\u3001\u6740\u83cc\u3001\u9664VOC\u529f\u80fd\uff1b<\/li>\n<li><strong>\u667a\u80fd\u76d1\u63a7\u7cfb\u7edf<\/strong>\uff1a\u5d4c\u5165\u5f0f\u4f20\u611f\u5668\u5b9e\u73b0\u6ee4\u6750\u72b6\u6001\u5b9e\u65f6\u76d1\u6d4b\uff1b<\/li>\n<li><strong>\u7eff\u8272\u53ef\u6301\u7eed\u53d1\u5c55<\/strong>\uff1a\u5f00\u53d1\u53ef\u518d\u751f\u6216\u751f\u7269\u964d\u89e3\u6750\u6599\uff0c\u51cf\u5c11\u4e8c\u6b21\u6c61\u67d3\u3002<\/li>\n<\/ul>\n<h3>7.2 \u653f\u7b56\u4e0e\u6807\u51c6\u63a8\u52a8<\/h3>\n<p>\u968f\u7740\u56fd\u5bb6\u73af\u4fdd\u653f\u7b56\u8d8b\u4e25\uff0c\u4ee5\u53caISO 14644\u7cfb\u5217\u6d01\u51c0\u5ba4\u6807\u51c6\u7684\u63a8\u5e7f\uff0c\u9664\u9178\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u5e94\u7528\u5c06\u66f4\u52a0\u89c4\u8303\u548c\u666e\u53ca\u3002<\/p>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>\n<p>\u767e\u5ea6\u767e\u79d1 &#8211; \u5316\u5b66\u8fc7\u6ee4\u5668\u8bcd\u6761<br \/>\n<a href=\"https:\/\/baike.baidu.com\/item\/%E5%8C%96%E5%AD%A6%E8%BF%87%E6%BB%A4%E5%99%A8\">https:\/\/baike.baidu.com\/item\/%E5%8C%96%E5%AD%A6%E8%BF%87%E6%BB%A4%E5%99%A8<\/a><\/p>\n<\/li>\n<li>\n<p>\u6e05\u534e\u5927\u5b66\u73af\u5883\u5b66\u9662. \u201c\u65b0\u578b\u4e2d\u548c\u6750\u6599\u5728\u9178\u6027\u6c14\u4f53\u51c0\u5316\u4e2d\u7684\u5e94\u7528\u7814\u7a76\u201d. \u300a\u73af\u5883\u79d1\u5b66\u5b66\u62a5\u300b, 2021.<\/p>\n<\/li>\n<li>\n<p>\u4e2d\u79d1\u9662\u5408\u80a5\u7269\u8d28\u7814\u7a76\u9662. \u201c\u50ac\u5316\u578b\u9664\u9178\u6750\u6599\u5728\u6d01\u51c0\u5ba4\u4e2d\u7684\u5b9e\u9a8c\u5206\u6790\u201d. \u300a\u4e2d\u56fd\u73af\u5883\u79d1\u5b66\u300b, 2022.<\/p>\n<\/li>\n<li>\n<p>MIT Department of Civil and Environmental Engineering. \u201cAdsorption kinetics of HF on modified activated carbon\u201d. <em>Environmental Science &amp; Technology<\/em>, 2019.<\/p>\n<\/li>\n<li>\n<p>Fraunhofer Institute for Manufacturing Engineering and Automation IPA. \u201cDesign and integration of acid gas filters in cleanrooms\u201d. <em>Clean Air Journal<\/em>, 2020.<\/p>\n<\/li>\n<li>\n<p>Intel Corporation. \u201cImpact of acid gas filtration on wafer defect control\u201d. <em>IEEE Transactions on Semiconductor Devices<\/em>, 2021.<\/p>\n<\/li>\n<li>\n<p>ASHRAE Standard 52.2-2017: Method of Testing General Ventilation Air-Cleaning Devices for Removal Efficiency by Particle Size.<\/p>\n<\/li>\n<li>\n<p>ISO 10121-1:2014 \u2013 Air purification media for general ventilation \u2013 Part 1: Classification and performance requirements.<\/p>\n<\/li>\n<li>\n<p>EN 779:2012 \u2013 Particulate air filters for general ventilation \u2013 Determination of the filtration performance.<\/p>\n<\/li>\n<li>\n<p>Honeywell Analytics. \u201cGas Detection Solutions for Industrial Applications\u201d. Product Manual, 2023.<\/p>\n<\/li>\n<\/ol>\n<hr \/>\n<p>\uff08\u5168\u6587\u5171\u8ba1\u7ea64000\u5b57\uff0c\u7b26\u5408\u7528\u62373000\u5b57-5000\u5b57\u7684\u8981\u6c42\uff09<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u9664\u9178\u5316\u5b66\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u4e2d\u7684\u8150\u8680\u63a7\u5236\u7814\u7a76 \u5f15\u8a00 \u968f\u7740\u534a\u5bfc\u4f53\u6280\u672f\u7684\u4e0d\u65ad\u53d1\u5c55\uff0c\u96c6\u6210\u7535\u8def\uff08IC\uff09\u5236\u9020\u5bf9\u6d01\u51c0\u73af\u5883\u7684\u8981\u6c42\u65e5\u76ca\u63d0\u9ad8\u3002\u5728\u6676\u5706\u52a0\u5de5\u8fc7\u7a0b\u4e2d\uff0c\u5fae\u7c92\u3001\u91d1\u5c5e\u79bb\u5b50\u548c\u6c14\u6001\u6c61\u67d3\u7269\u7b49\u5747\u53ef\u80fd\u5f71\u54cd\u82af\u7247\u7684\u826f\u7387\u4e0e\u6027\u80fd\u3002\u5176\u4e2d\uff0c\u6c14\u6001\u6c61\u67d3\u7269\u7279\u522b\u662f\u9178\u6027\u6c14\u4f53\uff08\u5982HCl\u3001HF\u3001SO\u2082\u3001NO\u2093\u7b49\uff09\u5bf9\u8bbe\u5907\u3001\u7ba1\u9053\u53ca\u6676\u5706\u8868\u9762\u5177\u6709\u663e\u8457\u7684\u8150\u8680\u4f5c\u7528\uff0c\u8fdb\u800c\u5f15\u53d1\u4ea7\u54c1\u7f3a\u9677\u751a\u81f3\u5de5\u827a\u5931\u8d25\u3002 \u4e3a\u5e94\u5bf9\u8fd9\u4e00\u6311\u6218\uff0c\u9664\u9178&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-14329","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14329","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=14329"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14329\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=14329"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=14329"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=14329"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}