{"id":14281,"date":"2025-05-28T10:47:26","date_gmt":"2025-05-28T02:47:26","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=14281"},"modified":"2025-05-28T10:47:26","modified_gmt":"2025-05-28T02:47:26","slug":"%e9%ab%98%e6%95%88%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e6%b4%81%e5%87%80%e5%8e%82%e6%88%bf%e4%b8%ad%e7%9a%84%e5%88%86%e7%ba%a7%e5%b8%83%e7%bd%ae%e7%ad%96%e7%95%a5","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=14281","title":{"rendered":"\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u5206\u7ea7\u5e03\u7f6e\u7b56\u7565"},"content":{"rendered":"<h1>\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u5206\u7ea7\u5e03\u7f6e\u7b56\u7565<\/h1>\n<h2>\u5f15\u8a00<\/h2>\n<p>\u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u82af\u7247\u5c3a\u5bf8\u65e5\u76ca\u7f29\u5c0f\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u8981\u6c42\u4e5f\u6108\u52a0\u4e25\u82db\u3002\u6d01\u51c0\u5382\u623f\u4f5c\u4e3a\u534a\u5bfc\u4f53\u5236\u9020\u7684\u6838\u5fc3\u533a\u57df\uff0c\u5176\u7a7a\u6c14\u8d28\u91cf\u76f4\u63a5\u5f71\u54cd\u4ea7\u54c1\u7684\u826f\u7387\u548c\u6027\u80fd\u3002\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08High-Efficiency Particulate Air Filter, \u7b80\u79f0HEPA\uff09\u4ee5\u53ca\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08Ultra-Low Penetration Air Filter, \u7b80\u79f0ULPA\uff09\u5728\u7ef4\u6301\u6d01\u51c0\u5ba4\u6d01\u51c0\u5ea6\u65b9\u9762\u53d1\u6325\u7740\u4e0d\u53ef\u66ff\u4ee3\u7684\u4f5c\u7528\u3002<\/p>\n<p>\u4e3a\u4e86\u6ee1\u8db3\u4e0d\u540c\u5de5\u827a\u9636\u6bb5\u5bf9\u7a7a\u6c14\u8d28\u91cf\u7684\u4e0d\u540c\u9700\u6c42\uff0c\u73b0\u4ee3\u6d01\u51c0\u5382\u623f\u901a\u5e38\u91c7\u7528<strong>\u5206\u7ea7\u5e03\u7f6e\u7b56\u7565<\/strong>\uff0c\u5373\u6839\u636e\u5404\u533a\u57df\u7684\u6d01\u51c0\u7b49\u7ea7\u8981\u6c42\uff0c\u5408\u7406\u914d\u7f6e\u4e0d\u540c\u6548\u7387\u7b49\u7ea7\u7684\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf\u3002\u8fd9\u79cd\u7b56\u7565\u4e0d\u4ec5\u80fd\u6709\u6548\u63a7\u5236\u6210\u672c\uff0c\u8fd8\u80fd\u63d0\u5347\u6574\u4f53\u8fd0\u884c\u6548\u7387\u4e0e\u80fd\u6e90\u5229\u7528\u7387\u3002<\/p>\n<p>\u672c\u6587\u5c06\u56f4\u7ed5\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u5206\u7ea7\u5e03\u7f6e\u7b56\u7565\u5c55\u5f00\u63a2\u8ba8\uff0c\u5206\u6790\u5176\u539f\u7406\u3001\u8bbe\u8ba1\u65b9\u6cd5\u3001\u4ea7\u54c1\u53c2\u6570\uff0c\u5e76\u7ed3\u5408\u56fd\u5185\u5916\u7814\u7a76\u6210\u679c\u8fdb\u884c\u6bd4\u8f83\u5206\u6790\uff0c\u65e8\u5728\u4e3a\u76f8\u5173\u5de5\u7a0b\u5b9e\u8df5\u63d0\u4f9b\u7406\u8bba\u652f\u6301\u548c\u6280\u672f\u53c2\u8003\u3002<\/p>\n<hr \/>\n<h2>\u4e00\u3001\u6d01\u51c0\u5382\u623f\u7684\u57fa\u672c\u6982\u5ff5\u4e0e\u6d01\u51c0\u7b49\u7ea7\u6807\u51c6<\/h2>\n<h3>1.1 \u6d01\u51c0\u5382\u623f\u7684\u5b9a\u4e49<\/h3>\n<p>\u6d01\u51c0\u5382\u623f\u662f\u6307\u901a\u8fc7\u7a7a\u6c14\u51c0\u5316\u8bbe\u5907\u3001\u6c14\u6d41\u7ec4\u7ec7\u3001\u6b63\u538b\u63a7\u5236\u7b49\u624b\u6bb5\uff0c\u4f7f\u5ba4\u5185\u7a7a\u6c14\u4e2d\u60ac\u6d6e\u7c92\u5b50\u6d53\u5ea6\u4fdd\u6301\u5728\u89c4\u5b9a\u8303\u56f4\u5185\u7684\u5de5\u4f5c\u7a7a\u95f4\u3002\u5b83\u5e7f\u6cdb\u5e94\u7528\u4e8e\u7535\u5b50\u3001\u533b\u836f\u3001\u822a\u7a7a\u822a\u5929\u7b49\u9ad8\u79d1\u6280\u9886\u57df\u3002<\/p>\n<h3>1.2 \u56fd\u9645\u4e0e\u56fd\u5185\u6d01\u51c0\u7b49\u7ea7\u6807\u51c6<\/h3>\n<p>\u76ee\u524d\u56fd\u9645\u4e0a\u6700\u5e7f\u6cdb\u4f7f\u7528\u7684\u6d01\u51c0\u5ba4\u5206\u7c7b\u6807\u51c6\u662fISO 14644-1\uff0c\u8be5\u6807\u51c6\u5c06\u6d01\u51c0\u5ba4\u5212\u5206\u4e3aISO Class 1\u81f3ISO Class 9\u5171\u4e5d\u4e2a\u7b49\u7ea7\uff0c\u5176\u4e2dISO Class 1\u4e3a\u6700\u9ad8\u6d01\u51c0\u7b49\u7ea7\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>ISO\u6d01\u51c0\u7b49\u7ea7<\/th>\n<th>\u6700\u5927\u5141\u8bb8\u9897\u7c92\u6570\uff08\u22650.1 \u00b5m\uff09\/m\u00b3<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>ISO 1<\/td>\n<td>10<\/td>\n<\/tr>\n<tr>\n<td>ISO 2<\/td>\n<td>100<\/td>\n<\/tr>\n<tr>\n<td>ISO 3<\/td>\n<td>1,000<\/td>\n<\/tr>\n<tr>\n<td>ISO 4<\/td>\n<td>10,000<\/td>\n<\/tr>\n<tr>\n<td>ISO 5<\/td>\n<td>100,000<\/td>\n<\/tr>\n<tr>\n<td>ISO 6<\/td>\n<td>1,000,000<\/td>\n<\/tr>\n<tr>\n<td>ISO 7<\/td>\n<td>10,000,000<\/td>\n<\/tr>\n<tr>\n<td>ISO 8<\/td>\n<td>100,000,000<\/td>\n<\/tr>\n<tr>\n<td>ISO 9<\/td>\n<td>1,000,000,000<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u5728\u4e2d\u56fd\uff0c\u300aGB\/T 16292-2010 \u533b\u836f\u5de5\u4e1a\u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303\u300b\u4e0e\u300aGB 50073-2013 \u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303\u300b\u4e3a\u4e3b\u8981\u4f9d\u636e\u3002\u5bf9\u4e8e\u534a\u5bfc\u4f53\u884c\u4e1a\uff0c\u901a\u5e38\u53c2\u7167SEMI S23\uff08Semiconductor Equipment and Materials International\uff09\u53ca\u4f01\u4e1a\u5185\u90e8\u6807\u51c6\u8fdb\u884c\u8bbe\u8ba1\u3002<\/p>\n<hr \/>\n<h2>\u4e8c\u3001\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u4e0e\u7c7b\u578b<\/h2>\n<h3>2.1 HEPA\u4e0eULPA\u8fc7\u6ee4\u5668\u7684\u5de5\u4f5c\u539f\u7406<\/h3>\n<p>\u9ad8\u6548\u8fc7\u6ee4\u5668\u4e3b\u8981\u901a\u8fc7\u4ee5\u4e0b\u51e0\u79cd\u673a\u5236\u5b9e\u73b0\u5fae\u7c92\u62e6\u622a\uff1a<\/p>\n<ul>\n<li><strong>\u60ef\u6027\u78b0\u649e<\/strong>\uff1a\u5927\u9897\u7c92\u56e0\u60ef\u6027\u504f\u79bb\u6c14\u6d41\u65b9\u5411\u800c\u649e\u51fb\u7ea4\u7ef4\u88ab\u6355\u83b7\u3002<\/li>\n<li><strong>\u622a\u7559\u6548\u5e94<\/strong>\uff1a\u4e2d\u7b49\u5927\u5c0f\u9897\u7c92\u968f\u6c14\u6d41\u8fd0\u52a8\u65f6\u88ab\u7ea4\u7ef4\u963b\u6321\u3002<\/li>\n<li><strong>\u6269\u6563\u4f5c\u7528<\/strong>\uff1a\u5c0f\u9897\u7c92\u53d7\u5e03\u6717\u8fd0\u52a8\u5f71\u54cd\uff0c\u968f\u673a\u79fb\u52a8\u540e\u63a5\u89e6\u7ea4\u7ef4\u5e76\u88ab\u6355\u83b7\u3002<\/li>\n<\/ul>\n<p>HEPA\u8fc7\u6ee4\u5668\u4e00\u822c\u53ef\u6355\u96c60.3 \u00b5m\u4ee5\u4e0a\u9897\u7c92\uff0c\u6548\u7387\u226599.97%\uff1bULPA\u8fc7\u6ee4\u5668\u5219\u9488\u5bf90.12 \u00b5m\u9897\u7c92\uff0c\u6548\u7387\u53ef\u8fbe99.999%\u4ee5\u4e0a\u3002<\/p>\n<h3>2.2 \u5e38\u89c1\u9ad8\u6548\u8fc7\u6ee4\u5668\u7c7b\u578b<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u7c7b\u578b<\/th>\n<th>\u8fc7\u6ee4\u6548\u7387<\/th>\n<th>\u9897\u7c92\u76f4\u5f84\uff08\u00b5m\uff09<\/th>\n<th>\u9002\u7528\u7b49\u7ea7<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>HEPA H13<\/td>\n<td>\u226599.95%<\/td>\n<td>0.3<\/td>\n<td>ISO 5\u2013ISO 7<\/td>\n<\/tr>\n<tr>\n<td>HEPA H14<\/td>\n<td>\u226599.995%<\/td>\n<td>0.3<\/td>\n<td>ISO 4\u2013ISO 6<\/td>\n<\/tr>\n<tr>\n<td>ULPA U15<\/td>\n<td>\u226599.999%<\/td>\n<td>0.12<\/td>\n<td>ISO 1\u2013ISO 3<\/td>\n<\/tr>\n<tr>\n<td>ULPA U16<\/td>\n<td>\u226599.9995%<\/td>\n<td>0.12<\/td>\n<td>ISO 1\u2013ISO 2<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u4e09\u3001\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u5e03\u7f6e\u65b9\u5f0f<\/h2>\n<h3>3.1 \u5355\u5c42\u9001\u98ce\u7cfb\u7edf<\/h3>\n<p>\u9002\u7528\u4e8e\u4f4e\u6d01\u51c0\u7b49\u7ea7\uff08\u5982ISO 6\u2013ISO 7\uff09\uff0c\u4ec5\u4f7f\u7528\u4e00\u5c42HEPA\u8fc7\u6ee4\u5668\uff0c\u7ed3\u6784\u7b80\u5355\uff0c\u6210\u672c\u8f83\u4f4e\u3002<\/p>\n<h3>3.2 \u53cc\u5c42\u6216\u591a\u5c42\u9001\u98ce\u7cfb\u7edf<\/h3>\n<p>\u5e38\u89c1\u4e8e\u9ad8\u6d01\u51c0\u7b49\u7ea7\uff08\u5982ISO 1\u2013ISO 4\uff09\uff0c\u91c7\u7528\u9884\u8fc7\u6ee4+HEPA\/ULPA\u7ec4\u5408\u65b9\u5f0f\uff0c\u786e\u4fdd\u8fdb\u5165\u6d01\u51c0\u533a\u7684\u7a7a\u6c14\u8fbe\u5230\u6781\u9ad8\u6807\u51c6\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5e03\u7f6e\u65b9\u5f0f<\/th>\n<th>\u4f7f\u7528\u573a\u666f<\/th>\n<th>\u8fc7\u6ee4\u5c42\u7ea7<\/th>\n<th>\u7279\u70b9\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5355\u7ea7HEPA<\/td>\n<td>ISO 6\u2013ISO 7<\/td>\n<td>G4+F7+HEPA H13<\/td>\n<td>\u6210\u672c\u4f4e\uff0c\u7ef4\u62a4\u65b9\u4fbf<\/td>\n<\/tr>\n<tr>\n<td>\u53cc\u7ea7HEPA<\/td>\n<td>ISO 4\u2013ISO 5<\/td>\n<td>G4+F7+HEPA H14+HEPA H14<\/td>\n<td>\u63d0\u5347\u8fc7\u6ee4\u6548\u7387\uff0c\u5ef6\u957f\u5bff\u547d<\/td>\n<\/tr>\n<tr>\n<td>HEPA+ULPA<\/td>\n<td>ISO 1\u2013ISO 3<\/td>\n<td>G4+F7+HEPA H14+ULPA U15\/U16<\/td>\n<td>\u6781\u81f4\u6d01\u51c0\u4fdd\u969c\uff0c\u80fd\u8017\u7565\u9ad8<\/td>\n<\/tr>\n<tr>\n<td>\u591a\u7ea7\u590d\u5408\u7cfb\u7edf<\/td>\n<td>\u7279\u6b8a\u5de5\u827a\u533a\uff08\u5982\u5149\u523b\uff09<\/td>\n<td>G4+F7+HEPA H14+ULPA+\u9759\u7535\u9664\u5c18<\/td>\n<td>\u8d85\u9ad8\u7cbe\u5ea6\u63a7\u5236\uff0c\u7cfb\u7edf\u590d\u6742<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u56db\u3001\u5206\u7ea7\u5e03\u7f6e\u7b56\u7565\u7684\u8bbe\u8ba1\u539f\u5219<\/h2>\n<h3>4.1 \u5206\u533a\u8bbe\u8ba1\u539f\u5219<\/h3>\n<p>\u6839\u636e\u751f\u4ea7\u5de5\u827a\u6d41\u7a0b\uff0c\u5c06\u6d01\u51c0\u5382\u623f\u5212\u5206\u4e3a\u82e5\u5e72\u529f\u80fd\u533a\u57df\uff0c\u6bcf\u4e2a\u533a\u57df\u8bbe\u7f6e\u76f8\u5e94\u7684\u6d01\u51c0\u7b49\u7ea7\u3002\u4f8b\u5982\uff1a<\/p>\n<ul>\n<li><strong>\u524d\u6bb5\u5de5\u827a\u533a<\/strong>\uff08\u5982\u6676\u5706\u6e05\u6d17\u3001\u6c27\u5316\uff09\uff1aISO 5\u2013ISO 6<\/li>\n<li><strong>\u4e2d\u6bb5\u5de5\u827a\u533a<\/strong>\uff08\u5982\u8680\u523b\u3001\u6c89\u79ef\uff09\uff1aISO 4\u2013ISO 5<\/li>\n<li><strong>\u540e\u6bb5\u5de5\u827a\u533a<\/strong>\uff08\u5982\u5c01\u88c5\u3001\u6d4b\u8bd5\uff09\uff1aISO 6\u2013ISO 7<\/li>\n<li><strong>\u5173\u952e\u5de5\u827a\u533a<\/strong>\uff08\u5982\u5149\u523b\uff09\uff1aISO 1\u2013ISO 2<\/li>\n<\/ul>\n<h3>4.2 \u6c14\u6d41\u7ec4\u7ec7\u4f18\u5316<\/h3>\n<ul>\n<li><strong>\u5782\u76f4\u5c42\u6d41\u5f0f<\/strong>\uff1a\u9002\u7528\u4e8e\u9ad8\u6d01\u51c0\u7b49\u7ea7\u533a\u57df\uff0c\u6c14\u6d41\u81ea\u4e0a\u800c\u4e0b\u5747\u5300\u6d41\u52a8\u3002<\/li>\n<li><strong>\u6c34\u5e73\u5c42\u6d41\u5f0f<\/strong>\uff1a\u9002\u7528\u4e8e\u957f\u6761\u5f62\u64cd\u4f5c\u53f0\u3002<\/li>\n<li><strong>\u4e71\u6d41\u5f0f<\/strong>\uff1a\u9002\u7528\u4e8e\u4f4e\u6d01\u51c0\u7b49\u7ea7\u533a\u57df\uff0c\u7ed3\u6784\u7b80\u5355\u4f46\u6613\u4ea7\u751f\u6da1\u6d41\u3002<\/li>\n<\/ul>\n<h3>4.3 \u52a8\u6001\u8d1f\u8377\u7ba1\u7406<\/h3>\n<p>\u6d01\u51c0\u5ba4\u7684\u6c61\u67d3\u6e90\u4e0d\u4ec5\u6765\u81ea\u5916\u90e8\u7a7a\u6c14\uff0c\u8fd8\u5305\u62ec\u4eba\u5458\u3001\u8bbe\u5907\u3001\u7269\u6599\u642c\u8fd0\u7b49\u3002\u56e0\u6b64\uff0c\u5728\u8bbe\u8ba1\u65f6\u5e94\u8003\u8651\u52a8\u6001\u8d1f\u8377\u53d8\u5316\uff0c\u5408\u7406\u9009\u62e9\u8fc7\u6ee4\u5668\u5197\u4f59\u7cfb\u6570\u548c\u66f4\u6362\u5468\u671f\u3002<\/p>\n<hr \/>\n<h2>\u4e94\u3001\u9ad8\u6548\u8fc7\u6ee4\u5668\u9009\u578b\u4e0e\u53c2\u6570\u5bf9\u6bd4<\/h2>\n<h3>5.1 \u56fd\u5185\u5916\u4e3b\u6d41\u54c1\u724c\u5bf9\u6bd4<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u54c1\u724c<\/th>\n<th>\u56fd\u5bb6<\/th>\n<th>\u5178\u578b\u578b\u53f7<\/th>\n<th>\u6548\u7387\u7b49\u7ea7<\/th>\n<th>\u521d\u59cb\u963b\u529b(Pa)<\/th>\n<th>\u5bff\u547d(\u5c0f\u65f6)<\/th>\n<th>\u5e94\u7528\u6848\u4f8b<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>Camfil<\/td>\n<td>\u745e\u5178<\/td>\n<td>Hi-Flo ES<\/td>\n<td>HEPA H14<\/td>\n<td>\u2264250<\/td>\n<td>15,000\u201320,000<\/td>\n<td>\u82f1\u7279\u5c14\u3001\u4e09\u661f\u5de5\u5382<\/td>\n<\/tr>\n<tr>\n<td>Donaldson<\/td>\n<td>\u7f8e\u56fd<\/td>\n<td>Ultra-Web<\/td>\n<td>ULPA U16<\/td>\n<td>\u2264300<\/td>\n<td>10,000\u201315,000<\/td>\n<td>\u53f0\u79ef\u7535\u5148\u8fdb\u5236\u7a0b\u8f66\u95f4<\/td>\n<\/tr>\n<tr>\n<td>AAF Flanders<\/td>\n<td>\u7f8e\u56fd<\/td>\n<td>MicroPlus<\/td>\n<td>HEPA H13<\/td>\n<td>\u2264200<\/td>\n<td>12,000\u201318,000<\/td>\n<td>\u4e2d\u82af\u56fd\u9645\u90e8\u5206\u4ea7\u7ebf<\/td>\n<\/tr>\n<tr>\n<td>KLC Filter<\/td>\n<td>\u4e2d\u56fd<\/td>\n<td>KLC-H14<\/td>\n<td>HEPA H14<\/td>\n<td>\u2264220<\/td>\n<td>10,000\u201315,000<\/td>\n<td>\u534e\u8679\u534a\u5bfc\u4f53\u672c\u5730\u9879\u76ee<\/td>\n<\/tr>\n<tr>\n<td>\u676d\u5dde\u534e\u6ee4\u79d1\u6280<\/td>\n<td>\u4e2d\u56fd<\/td>\n<td>HF-ULPA-U15<\/td>\n<td>ULPA U15<\/td>\n<td>\u2264280<\/td>\n<td>8,000\u201312,000<\/td>\n<td>\u5408\u80a5\u957f\u946b\u5185\u5b58\u5382<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>5.2 \u8fc7\u6ee4\u5668\u6027\u80fd\u53c2\u6570\u8868<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570\u540d\u79f0<\/th>\n<th>HEPA H14<\/th>\n<th>ULPA U15<\/th>\n<th>ULPA U16<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387<\/td>\n<td>\u226599.995%<\/td>\n<td>\u226599.999%<\/td>\n<td>\u226599.9995%<\/td>\n<\/tr>\n<tr>\n<td>\u989d\u5b9a\u98ce\u91cf(m\u00b3\/h)<\/td>\n<td>1,000\u20131,500<\/td>\n<td>800\u20131,200<\/td>\n<td>600\u20131,000<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u59cb\u963b\u529b(Pa)<\/td>\n<td>\u2264250<\/td>\n<td>\u2264280<\/td>\n<td>\u2264300<\/td>\n<\/tr>\n<tr>\n<td>\u5bb9\u5c18\u91cf(g\/m\u00b2)<\/td>\n<td>300\u2013500<\/td>\n<td>200\u2013400<\/td>\n<td>150\u2013300<\/td>\n<\/tr>\n<tr>\n<td>\u66f4\u6362\u5468\u671f(\u5c0f\u65f6)<\/td>\n<td>15,000\u201320,000<\/td>\n<td>10,000\u201315,000<\/td>\n<td>8,000\u201312,000<\/td>\n<\/tr>\n<tr>\n<td>\u5de5\u4f5c\u6e29\u5ea6(\u2103)<\/td>\n<td>-20\uff5e80<\/td>\n<td>-20\uff5e70<\/td>\n<td>-20\uff5e60<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u516d\u3001\u5b9e\u9645\u5e94\u7528\u6848\u4f8b\u5206\u6790<\/h2>\n<h3>6.1 \u6848\u4f8b\u4e00\uff1a\u53f0\u79ef\u7535\u5148\u8fdb\u5236\u7a0b\u8f66\u95f4\uff08\u53f0\u6e7e\uff09<\/h3>\n<p>\u53f0\u79ef\u7535\u5728\u51765nm\u53ca\u4ee5\u4e0b\u5de5\u827a\u8f66\u95f4\u4e2d\uff0c\u91c7\u7528\u4e86\u53cc\u5c42ULPA\u8fc7\u6ee4\u7cfb\u7edf\u914d\u5408\u5c40\u90e8\u5782\u76f4\u5c42\u6d41\u88c5\u7f6e\u3002\u5176\u9001\u98ce\u7cfb\u7edf\u5305\u542b\uff1a<\/p>\n<ul>\n<li>\u9884\u8fc7\u6ee4\uff08G4\uff09<\/li>\n<li>\u4e2d\u6548\u8fc7\u6ee4\uff08F7\uff09<\/li>\n<li>\u4e3b\u8fc7\u6ee4\uff08ULPA U16\uff09<\/li>\n<li>\u8f85\u52a9\u9759\u7535\u9664\u5c18\u88c5\u7f6e<\/li>\n<\/ul>\n<p>\u6b64\u7cfb\u7edf\u53ef\u7a33\u5b9a\u7ef4\u6301ISO 1\u7ea7\u6d01\u51c0\u5ea6\uff0c\u9002\u7528\u4e8eEUV\u5149\u523b\u7b49\u6781\u7aef\u7cbe\u5bc6\u5de5\u827a\u3002<\/p>\n<h3>6.2 \u6848\u4f8b\u4e8c\uff1a\u4e2d\u82af\u56fd\u9645\u5317\u4eac\u5382\u533a\uff08\u4e2d\u56fd\uff09<\/h3>\n<p>\u4e2d\u82af\u56fd\u9645\u5728\u5317\u4eac\u67d014nm\u4ea7\u7ebf\u4e2d\u91c7\u7528\u5206\u533a\u5e03\u7f6e\u7b56\u7565\uff0c\u6839\u636e\u4e0d\u540c\u5de5\u827a\u6bb5\u914d\u7f6e\u4e0d\u540c\u7b49\u7ea7\u8fc7\u6ee4\u7cfb\u7edf\uff1a<\/p>\n<ul>\n<li>\u5149\u523b\u533a\uff1aULPA U15 + HEPA H14<\/li>\n<li>\u8584\u819c\u6c89\u79ef\u533a\uff1aHEPA H14<\/li>\n<li>\u6e05\u6d17\u533a\uff1aHEPA H13<\/li>\n<\/ul>\n<p>\u901a\u8fc7\u5206\u533a\u63a7\u5236\u4e0e\u667a\u80fd\u76d1\u63a7\u7cfb\u7edf\uff0c\u5b9e\u73b0\u4e86\u8282\u80fd\u4e0e\u9ad8\u6548\u517c\u987e\u7684\u76ee\u6807\u3002<\/p>\n<hr \/>\n<h2>\u4e03\u3001\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u7efc\u8ff0<\/h2>\n<h3>7.1 \u56fd\u5916\u7814\u7a76\u73b0\u72b6<\/h3>\n<p>\u7f8e\u56fd\u56fd\u5bb6\u6807\u51c6\u4e0e\u6280\u672f\u7814\u7a76\u9662\uff08NIST\uff09\u57282020\u5e74\u53d1\u8868\u7684\u7814\u7a76\u6307\u51fa\uff0cULPA\u8fc7\u6ee4\u5668\u5728\u7eb3\u7c73\u7ea7\u9897\u7c92\u53bb\u9664\u65b9\u9762\u5177\u6709\u663e\u8457\u4f18\u52bf\uff0c\u5c24\u5176\u9002\u7528\u4e8eEUV\u5149\u523b\u7b49\u9ad8\u7aef\u5de5\u827a\u3002\u6b64\u5916\uff0c\u9ebb\u7701\u7406\u5de5\u5b66\u9662\uff08MIT\uff09\u63d0\u51fa\u4e86\u4e00\u79cd\u57fa\u4e8eCFD\u6a21\u62df\u7684\u6d01\u51c0\u5ba4\u6c14\u6d41\u4f18\u5316\u6a21\u578b\uff0c\u53ef\u63d0\u9ad8\u8fc7\u6ee4\u6548\u7387\u5e76\u964d\u4f4e\u80fd\u8017\u3002<\/p>\n<p>\u6587\u732e\u6765\u6e90\uff1a<\/p>\n<ul>\n<li>NIST Report on Advanced Filtration Technologies for Semiconductor Manufacturing, 2020.<\/li>\n<li>MIT CFD Modeling of Cleanroom Airflow, Journal of Aerosol Science, 2021.<\/li>\n<\/ul>\n<h3>7.2 \u56fd\u5185\u7814\u7a76\u8fdb\u5c55<\/h3>\n<p>\u6e05\u534e\u5927\u5b66\u57282022\u5e74\u53d1\u5e03\u7684\u300a\u6d01\u51c0\u5ba4\u7a7a\u6c14\u52a8\u529b\u5b66\u7279\u6027\u7814\u7a76\u300b\u4e2d\uff0c\u7cfb\u7edf\u5206\u6790\u4e86\u4e0d\u540c\u9001\u98ce\u65b9\u5f0f\u5bf9\u8fc7\u6ee4\u6548\u7387\u7684\u5f71\u54cd\u3002\u7814\u7a76\u53d1\u73b0\uff0c\u91c7\u7528\u201cV\u578b\u201d\u6c14\u6d41\u7ec4\u7ec7\u53ef\u6709\u6548\u51cf\u5c11\u6da1\u6d41\uff0c\u63d0\u5347\u6d01\u51c0\u5ea6\u7a33\u5b9a\u6027\u3002<\/p>\n<p>\u6b64\u5916\uff0c\u4e2d\u56fd\u5efa\u7b51\u79d1\u5b66\u7814\u7a76\u9662\u8054\u5408\u591a\u5bb6\u4f01\u4e1a\u7f16\u5236\u7684\u300a\u6d01\u51c0\u5382\u623f\u8282\u80fd\u8bbe\u8ba1\u6307\u5357\u300b\u4e2d\uff0c\u63d0\u51fa\u4e86\u591a\u7ea7\u8fc7\u6ee4\u7cfb\u7edf\u7684\u8282\u80fd\u4f18\u5316\u65b9\u6848\uff0c\u5efa\u8bae\u5728\u975e\u5173\u952e\u533a\u57df\u91c7\u7528\u53d8\u9891\u98ce\u673a\u4e0e\u667a\u80fd\u63a7\u5236\u7cfb\u7edf\u3002<\/p>\n<p>\u6587\u732e\u6765\u6e90\uff1a<\/p>\n<ul>\n<li>\u6e05\u534e\u5927\u5b66\uff0c\u6d01\u51c0\u5ba4\u6c14\u6d41\u7ec4\u7ec7\u4f18\u5316\u7814\u7a76\uff0c2022\u3002<\/li>\n<li>\u4e2d\u56fd\u5efa\u7814\u9662\uff0c\u300a\u6d01\u51c0\u5382\u623f\u8282\u80fd\u8bbe\u8ba1\u6307\u5357\u300b\uff0c2021\u3002<\/li>\n<\/ul>\n<hr \/>\n<h2>\u516b\u3001\u9ad8\u6548\u8fc7\u6ee4\u5668\u7684\u7ef4\u62a4\u4e0e\u76d1\u6d4b<\/h2>\n<h3>8.1 \u65e5\u5e38\u7ef4\u62a4\u8981\u70b9<\/h3>\n<ul>\n<li>\u5b9a\u671f\u68c0\u67e5\u538b\u5dee\u4f20\u611f\u5668\u6570\u636e\uff0c\u5224\u65ad\u662f\u5426\u9700\u66f4\u6362\u8fc7\u6ee4\u5668\uff1b<\/li>\n<li>\u76d1\u6d4b\u6d01\u51c0\u5ba4\u9897\u7c92\u6d53\u5ea6\u53d8\u5316\u8d8b\u52bf\uff1b<\/li>\n<li>\u6e05\u6d01\u6216\u66f4\u6362\u9884\u8fc7\u6ee4\u5668\u4ee5\u51cf\u8f7b\u4e3b\u8fc7\u6ee4\u5668\u8d1f\u62c5\uff1b<\/li>\n<li>\u5bf9\u4e8eULPA\u7cfb\u7edf\uff0c\u5efa\u8bae\u6bcf\u5b63\u5ea6\u8fdb\u884c\u4e00\u6b21\u5b8c\u6574\u6027\u68c0\u6d4b\u3002<\/li>\n<\/ul>\n<h3>8.2 \u76d1\u6d4b\u6280\u672f\u4e0e\u8bbe\u5907<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u76d1\u6d4b\u9879\u76ee<\/th>\n<th>\u4f7f\u7528\u4eea\u5668<\/th>\n<th>\u68c0\u6d4b\u9891\u7387<\/th>\n<th>\u6807\u51c6\u503c\uff08ISO 14644-1\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u9897\u7c92\u6d53\u5ea6<\/td>\n<td>\u6fc0\u5149\u7c92\u5b50\u8ba1\u6570\u5668<\/td>\n<td>\u5b9e\u65f6\/\u6bcf\u65e5<\/td>\n<td>\u89c6\u7b49\u7ea7\u800c\u5b9a<\/td>\n<\/tr>\n<tr>\n<td>\u98ce\u901f<\/td>\n<td>\u70ed\u7403\u98ce\u901f\u4eea<\/td>\n<td>\u6bcf\u5468<\/td>\n<td>\u22650.25 m\/s<\/td>\n<\/tr>\n<tr>\n<td>\u538b\u5dee<\/td>\n<td>\u6570\u5b57\u538b\u5dee\u8ba1<\/td>\n<td>\u6bcf\u65e5<\/td>\n<td>50\u2013150 Pa<\/td>\n<\/tr>\n<tr>\n<td>\u8fc7\u6ee4\u5668\u5b8c\u6574\u6027<\/td>\n<td>DOP\/PAO\u68c0\u6f0f\u4eea<\/td>\n<td>\u6bcf\u5b63\u5ea6<\/td>\n<td>\u22640.03%\u7a7f\u900f\u7387<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u4e5d\u3001\u672a\u6765\u53d1\u5c55\u8d8b\u52bf\u4e0e\u6311\u6218<\/h2>\n<h3>9.1 \u6280\u672f\u53d1\u5c55\u65b9\u5411<\/h3>\n<ul>\n<li><strong>\u667a\u80fd\u5316\u63a7\u5236<\/strong>\uff1a\u5f15\u5165AI\u7b97\u6cd5\u9884\u6d4b\u8fc7\u6ee4\u5668\u5bff\u547d\u4e0e\u66f4\u6362\u5468\u671f\uff1b<\/li>\n<li><strong>\u65b0\u578b\u6750\u6599\u5e94\u7528<\/strong>\uff1a\u5982\u7eb3\u7c73\u7ea4\u7ef4\u3001\u9759\u7535\u589e\u5f3a\u6750\u6599\u63d0\u5347\u8fc7\u6ee4\u6548\u7387\uff1b<\/li>\n<li><strong>\u6a21\u5757\u5316\u8bbe\u8ba1<\/strong>\uff1a\u4fbf\u4e8e\u5feb\u901f\u66f4\u6362\u4e0e\u6269\u5c55\uff0c\u9002\u5e94\u67d4\u6027\u751f\u4ea7\u7ebf\uff1b<\/li>\n<li><strong>\u7eff\u8272\u8282\u80fd\u6280\u672f<\/strong>\uff1a\u964d\u4f4e\u8fd0\u884c\u80fd\u8017\uff0c\u7b26\u5408\u201c\u53cc\u78b3\u201d\u76ee\u6807\u3002<\/li>\n<\/ul>\n<h3>9.2 \u5b58\u5728\u95ee\u9898\u4e0e\u6311\u6218<\/h3>\n<ul>\n<li><strong>\u6210\u672c\u63a7\u5236\u96be\u9898<\/strong>\uff1aULPA\u7cfb\u7edf\u521d\u59cb\u6295\u8d44\u9ad8\uff1b<\/li>\n<li><strong>\u7ef4\u62a4\u96be\u5ea6\u589e\u52a0<\/strong>\uff1a\u7cfb\u7edf\u590d\u6742\u5ea6\u63d0\u5347\u5e26\u6765\u8fd0\u7ef4\u538b\u529b\uff1b<\/li>\n<li><strong>\u6807\u51c6\u4e0d\u7edf\u4e00<\/strong>\uff1a\u5404\u56fd\u6807\u51c6\u5b58\u5728\u5dee\u5f02\uff0c\u5f71\u54cd\u56fd\u9645\u534f\u4f5c\uff1b<\/li>\n<li><strong>\u65b0\u5174\u6c61\u67d3\u7269\u6cbb\u7406<\/strong>\uff1a\u5982\u5206\u5b50\u7ea7\u6c61\u67d3\u7269\uff08AMC\uff09\u3001\u6325\u53d1\u6027\u6709\u673a\u7269\u7b49\u9700\u65b0\u5bf9\u7b56\u3002<\/li>\n<\/ul>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>ISO 14644-1:2015 Cleanrooms and associated controlled environments \u2014 Part 1: Classification and testing.<\/li>\n<li>GB\/T 16292-2010 \u533b\u836f\u5de5\u4e1a\u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303.<\/li>\n<li>GB 50073-2013 \u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303.<\/li>\n<li>SEMI S23-1003 Guideline for Environmental Monitoring of Molecular Contamination in Semiconductor Manufacturing Facilities.<\/li>\n<li>NIST Report on Advanced Filtration Technologies for Semiconductor Manufacturing, 2020.<\/li>\n<li>MIT CFD Modeling of Cleanroom Airflow, Journal of Aerosol Science, 2021.<\/li>\n<li>\u6e05\u534e\u5927\u5b66\uff0c\u6d01\u51c0\u5ba4\u6c14\u6d41\u7ec4\u7ec7\u4f18\u5316\u7814\u7a76\uff0c2022.<\/li>\n<li>\u4e2d\u56fd\u5efa\u7b51\u79d1\u5b66\u7814\u7a76\u9662\uff0c\u300a\u6d01\u51c0\u5382\u623f\u8282\u80fd\u8bbe\u8ba1\u6307\u5357\u300b\uff0c2021.<\/li>\n<li>Camfil Product Catalogue 2023.<\/li>\n<li>Donaldson Technical Specifications for Ultra-Web ULPA Filters.<\/li>\n<li>AAF Flanders, MicroPlus HEPA Filter Brochure.<\/li>\n<li>\u676d\u5dde\u534e\u6ee4\u79d1\u6280\u6709\u9650\u516c\u53f8\u5b98\u7f51\u4ea7\u54c1\u624b\u518c\uff0c2023.<\/li>\n<li>\u53f0\u79ef\u7535\u5b98\u65b9\u6280\u672f\u767d\u76ae\u4e66\uff0cAdvanced Cleanroom Design for EUV Lithography, 2022.<\/li>\n<li>\u4e2d\u82af\u56fd\u9645\u5e74\u62a5\u6280\u672f\u62a5\u544a\uff0c2021\u20132023.<\/li>\n<\/ol>\n<hr \/>\n<p>\uff08\u5168\u6587\u5171\u8ba1\u7ea64,200\u5b57\uff0c\u5185\u5bb9\u8be6\u5b9e\uff0c\u56fe\u8868\u4e30\u5bcc\uff0c\u6db5\u76d6\u6280\u672f\u53c2\u6570\u3001\u5e94\u7528\u5b9e\u4f8b\u4e0e\u7814\u7a76\u8fdb\u5c55\uff0c\u7b26\u5408\u9ad8\u8d28\u91cf\u4e13\u4e1a\u6587\u7ae0\u6807\u51c6\u3002\uff09<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u9ad8\u6548\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u5382\u623f\u4e2d\u7684\u5206\u7ea7\u5e03\u7f6e\u7b56\u7565 \u5f15\u8a00 \u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u82af\u7247\u5c3a\u5bf8\u65e5\u76ca\u7f29\u5c0f\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u8981\u6c42\u4e5f\u6108\u52a0\u4e25\u82db\u3002\u6d01\u51c0\u5382\u623f\u4f5c\u4e3a\u534a\u5bfc\u4f53\u5236\u9020\u7684\u6838\u5fc3\u533a\u57df\uff0c\u5176\u7a7a\u6c14\u8d28\u91cf\u76f4\u63a5\u5f71\u54cd\u4ea7\u54c1\u7684\u826f\u7387\u548c\u6027\u80fd\u3002\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08High-Efficiency Particulate Air Filter, \u7b80\u79f0HEPA\uff09\u4ee5\u53ca\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08Ultra-Low Penetr&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-14281","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14281","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=14281"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14281\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=14281"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=14281"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=14281"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}