{"id":14219,"date":"2025-05-23T11:16:06","date_gmt":"2025-05-23T03:16:06","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=14219"},"modified":"2025-05-23T11:16:06","modified_gmt":"2025-05-23T03:16:06","slug":"%e9%ab%98%e6%95%88%e7%a9%ba%e6%b0%94%e8%bf%87%e6%bb%a4%e5%99%a8%e5%9c%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e6%97%a0%e5%b0%98%e5%ae%a4%e4%b8%ad%e7%9a%84%e5%88%86%e7%ba%a7%e9%80%89%e5%9e%8b%e6%8c%87%e5%8d%97","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=14219","title":{"rendered":"\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u65e0\u5c18\u5ba4\u4e2d\u7684\u5206\u7ea7\u9009\u578b\u6307\u5357"},"content":{"rendered":"<h1>\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u65e0\u5c18\u5ba4\u4e2d\u7684\u5206\u7ea7\u9009\u578b\u6307\u5357<\/h1>\n<h2>\u5f15\u8a00\uff1a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u91cd\u8981\u6027<\/h2>\n<p>\u5728\u73b0\u4ee3\u9ad8\u79d1\u6280\u5236\u9020\u9886\u57df\uff0c\u5c24\u5176\u662f\u534a\u5bfc\u4f53\u4ea7\u4e1a\u4e2d\uff0c\u6d01\u51c0\u5ea6\u8981\u6c42\u6781\u4e3a\u4e25\u683c\u3002\u65e0\u5c18\u5ba4\uff08Cleanroom\uff09\u4f5c\u4e3a\u4fdd\u969c\u4ea7\u54c1\u54c1\u8d28\u4e0e\u5de5\u827a\u7a33\u5b9a\u6027\u7684\u5173\u952e\u73af\u5883\uff0c\u5176\u7a7a\u6c14\u8d28\u91cf\u63a7\u5236\u4f9d\u8d56\u4e8e\u9ad8\u6548\u7684\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\uff0c\u5176\u4e2d\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08HEPA, High Efficiency Particulate Air Filter\uff09\u548c\u8d85\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08ULPA, Ultra Low Penetration Air Filter\uff09\u662f\u6838\u5fc3\u7ec4\u4ef6\u3002\u6839\u636e\u7f8e\u56fdASHRAE\u6807\u51c6\u548c\u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6\u300aGB\/T 13554-2020 \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b\uff0c\u8fd9\u4e9b\u8fc7\u6ee4\u5668\u7684\u6027\u80fd\u76f4\u63a5\u5f71\u54cd\u5230\u65e0\u5c18\u5ba4\u7684\u6d01\u51c0\u7b49\u7ea7\u3001\u80fd\u8017\u6548\u7387\u4ee5\u53ca\u8fd0\u884c\u6210\u672c\u3002<\/p>\n<p>\u672c\u6587\u65e8\u5728\u4e3a\u534a\u5bfc\u4f53\u884c\u4e1a\u4e2d\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u9009\u578b\u63d0\u4f9b\u7cfb\u7edf\u6027\u6307\u5bfc\uff0c\u6db5\u76d6\u5176\u5de5\u4f5c\u539f\u7406\u3001\u5206\u7c7b\u6807\u51c6\u3001\u9009\u578b\u53c2\u6570\u3001\u5e94\u7528\u573a\u666f\u53ca\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\uff0c\u5e76\u7ed3\u5408\u5b9e\u9645\u6848\u4f8b\u8fdb\u884c\u5206\u6790\uff0c\u5e2e\u52a9\u5de5\u7a0b\u6280\u672f\u4eba\u5458\u505a\u51fa\u79d1\u5b66\u51b3\u7b56\u3002<\/p>\n<hr \/>\n<h2>\u4e00\u3001\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u4e0e\u7ed3\u6784<\/h2>\n<h3>1.1 \u5de5\u4f5c\u539f\u7406<\/h3>\n<p>\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u4e3b\u8981\u901a\u8fc7\u62e6\u622a\u3001\u60ef\u6027\u649e\u51fb\u3001\u6269\u6563\u548c\u9759\u7535\u5438\u9644\u7b49\u7269\u7406\u673a\u5236\u53bb\u9664\u7a7a\u6c14\u4e2d\u5fae\u7c92\u6c61\u67d3\u7269\u3002\u5176\u5bf9\u76f4\u5f84\u22650.3\u03bcm\u9897\u7c92\u7684\u8fc7\u6ee4\u6548\u7387\u4e0d\u4f4e\u4e8e99.97%\uff08HEPA\uff09\uff0c\u800cULPA\u5219\u53ef\u8fbe\u523099.999%\u4ee5\u4e0a\u3002<\/p>\n<h3>1.2 \u7ed3\u6784\u7ec4\u6210<\/h3>\n<p>\u5178\u578b\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7531\u4ee5\u4e0b\u51e0\u90e8\u5206\u6784\u6210\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u7ec4\u6210\u90e8\u5206<\/th>\n<th>\u529f\u80fd\u63cf\u8ff0<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6ee4\u6750\uff08\u73bb\u7483\u7ea4\u7ef4\u6216\u5408\u6210\u6750\u6599\uff09<\/td>\n<td>\u8d77\u5230\u4e3b\u8981\u8fc7\u6ee4\u4f5c\u7528<\/td>\n<\/tr>\n<tr>\n<td>\u6298\u53e0\u5c42\u7ed3\u6784<\/td>\n<td>\u589e\u5927\u6709\u6548\u8fc7\u6ee4\u9762\u79ef<\/td>\n<\/tr>\n<tr>\n<td>\u6846\u67b6\uff08\u94dd\u5236\u6216\u9540\u950c\u94a2\u677f\uff09<\/td>\n<td>\u652f\u6491\u6ee4\u6750\u5e76\u4fdd\u8bc1\u5bc6\u5c01\u6027<\/td>\n<\/tr>\n<tr>\n<td>\u5bc6\u5c01\u80f6\u6761<\/td>\n<td>\u786e\u4fdd\u5b89\u88c5\u540e\u4e0d\u6cc4\u6f0f\u6c14\u6d41<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>1.3 \u8fc7\u6ee4\u6548\u7387\u6d4b\u8bd5\u65b9\u6cd5<\/h3>\n<p>\u56fd\u9645\u901a\u7528\u7684\u6d4b\u8bd5\u6807\u51c6\u5305\u62ec\uff1a<\/p>\n<ul>\n<li><strong>IEST-RP-CC001<\/strong>\uff08\u7f8e\u56fdIES\u534f\u4f1a\uff09<\/li>\n<li><strong>EN 1822<\/strong>\uff08\u6b27\u6d32\u6807\u51c6\uff09<\/li>\n<li><strong>GB\/T 13554-2020<\/strong>\uff08\u4e2d\u56fd\u6807\u51c6\uff09<\/li>\n<\/ul>\n<p>\u6d4b\u8bd5\u65f6\u4f7f\u7528\u94a0\u7130\u6cd5\u6216\u6fc0\u5149\u7c92\u5b50\u8ba1\u6570\u6cd5\u6d4b\u5b9a\u7a7f\u900f\u7387\uff08Penetration\uff09\u548c\u8fc7\u6ee4\u6548\u7387\uff08Efficiency\uff09\u3002<\/p>\n<hr \/>\n<h2>\u4e8c\u3001\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u5206\u7c7b\u4e0e\u6807\u51c6\u4f53\u7cfb<\/h2>\n<h3>2.1 \u56fd\u9645\u5206\u7c7b\u6807\u51c6<\/h3>\n<h4>ISO 14644-1 \u6807\u51c6\u4e0b\u7684\u6d01\u51c0\u7b49\u7ea7\u5212\u5206<\/h4>\n<table>\n<thead>\n<tr>\n<th>\u6d01\u51c0\u7b49\u7ea7\uff08ISO Class\uff09<\/th>\n<th>\u22650.1 \u03bcm\u9897\u7c92\u6700\u5927\u5141\u8bb8\u6d53\u5ea6\uff08\u4e2a\/m\u00b3\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>ISO 1<\/td>\n<td>10<\/td>\n<\/tr>\n<tr>\n<td>ISO 2<\/td>\n<td>100<\/td>\n<\/tr>\n<tr>\n<td>ISO 3<\/td>\n<td>1,000<\/td>\n<\/tr>\n<tr>\n<td>ISO 4<\/td>\n<td>10,000<\/td>\n<\/tr>\n<tr>\n<td>ISO 5<\/td>\n<td>100,000<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6ce8\uff1a\u9002\u7528\u4e8e\u534a\u5bfc\u4f53\u884c\u4e1a\u7684\u4e3b\u8981\u4e3aISO 1~ISO 4\u7b49\u7ea7\u3002<\/p>\n<h3>2.2 HEPA\u4e0eULPA\u7684\u5206\u7c7b\u5bf9\u6bd4<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u5206\u7c7b<\/th>\n<th>\u6d4b\u8bd5\u9897\u7c92\u5c3a\u5bf8<\/th>\n<th>\u8fc7\u6ee4\u6548\u7387<\/th>\n<th>\u9002\u7528\u573a\u666f<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>HEPA H13<\/td>\n<td>0.3 \u03bcm<\/td>\n<td>\u226599.97%<\/td>\n<td>ISO 5~ISO 6\u6d01\u51c0\u5ba4<\/td>\n<\/tr>\n<tr>\n<td>HEPA H14<\/td>\n<td>0.3 \u03bcm<\/td>\n<td>\u226599.995%<\/td>\n<td>ISO 4~ISO 5\u6d01\u51c0\u5ba4<\/td>\n<\/tr>\n<tr>\n<td>ULPA U15<\/td>\n<td>0.1~0.2 \u03bcm<\/td>\n<td>\u226599.999%<\/td>\n<td>ISO 3~ISO 4\u6d01\u51c0\u5ba4<\/td>\n<\/tr>\n<tr>\n<td>ULPA U16<\/td>\n<td>0.1~0.2 \u03bcm<\/td>\n<td>\u226599.9995%<\/td>\n<td>ISO 2~ISO 3\u6d01\u51c0\u5ba4<\/td>\n<\/tr>\n<tr>\n<td>ULPA U17<\/td>\n<td>0.1~0.2 \u03bcm<\/td>\n<td>\u226599.99995%<\/td>\n<td>ISO 1\u6d01\u51c0\u5ba4<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6570\u636e\u6765\u6e90\uff1aISO 14644-1\u3001EN 1822\u3001ASHRAE 52.2<\/p>\n<h3>2.3 \u56fd\u5185\u6807\u51c6\u5bf9\u7167\u8868<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u56fd\u5185\u6807\u51c6<\/th>\n<th>\u5bf9\u5e94\u56fd\u9645\u6807\u51c6<\/th>\n<th>\u63cf\u8ff0<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>GB\/T 13554-2020<\/td>\n<td>IEST RP-CC001\/EN 1822<\/td>\n<td>\u89c4\u5b9a\u4e86HEPA\u4e0eULPA\u7684\u5206\u7c7b\u4e0e\u6d4b\u8bd5\u65b9\u6cd5<\/td>\n<\/tr>\n<tr>\n<td>GB 50073-2013<\/td>\n<td>ISO 14644-1<\/td>\n<td>\u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u4e09\u3001\u534a\u5bfc\u4f53\u65e0\u5c18\u5ba4\u7684\u6d01\u51c0\u5ea6\u9700\u6c42\u4e0e\u8fc7\u6ee4\u5668\u914d\u7f6e\u7b56\u7565<\/h2>\n<h3>3.1 \u534a\u5bfc\u4f53\u5236\u9020\u6d41\u7a0b\u4e2d\u7684\u6d01\u51c0\u5ea6\u8981\u6c42<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u5236\u7a0b\u9636\u6bb5<\/th>\n<th>\u5178\u578b\u6d01\u51c0\u7b49\u7ea7\uff08ISO\uff09<\/th>\n<th>\u5173\u952e\u6c61\u67d3\u63a7\u5236\u5bf9\u8c61<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6676\u5706\u8680\u523b<\/td>\n<td>ISO 3~4<\/td>\n<td>\u91d1\u5c5e\u7c89\u5c18\u3001\u9178\u6027\u6c14\u4f53<\/td>\n<\/tr>\n<tr>\n<td>\u5149\u523b\u5de5\u827a<\/td>\n<td>ISO 1~2<\/td>\n<td>\u5fae\u7c73\u7ea7\u9897\u7c92\u3001\u6709\u673a\u6325\u53d1\u7269<\/td>\n<\/tr>\n<tr>\n<td>\u5c01\u88c5\u6d4b\u8bd5<\/td>\n<td>ISO 5~6<\/td>\n<td>\u5927\u9897\u7c92\u3001\u9759\u7535\u5c18\u57c3<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u8d44\u6599\u6765\u6e90\uff1aSEMI F19\uff08\u56fd\u9645\u534a\u5bfc\u4f53\u8bbe\u5907\u4e0e\u6750\u6599\u534f\u4f1a\u6807\u51c6\uff09\u3001\u300a\u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303\u300bGB 50073-2013<\/p>\n<h3>3.2 \u8fc7\u6ee4\u5668\u5e03\u7f6e\u65b9\u5f0f<\/h3>\n<p>\u901a\u5e38\u91c7\u7528\u4e09\u7ea7\u8fc7\u6ee4\u7cfb\u7edf\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u5c42\u7ea7<\/th>\n<th>\u7c7b\u578b<\/th>\n<th>\u529f\u80fd<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u521d\u6548<\/td>\n<td>G3~G4<\/td>\n<td>\u53bb\u9664\u5927\u9897\u7c92\uff08&gt;5\u03bcm\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u4e2d\u6548<\/td>\n<td>F7~F9<\/td>\n<td>\u53bb\u9664\u4e2d\u7b49\u9897\u7c92\uff081~5\u03bcm\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u9ad8\u6548<\/td>\n<td>HEPA\/ULPA<\/td>\n<td>\u53bb\u9664\u5fae\u7ec6\u9897\u7c92\uff08\u22640.3\u03bcm\uff09<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>3.3 \u5b89\u88c5\u65b9\u5f0f\u4e0e\u6c14\u6d41\u7ec4\u7ec7<\/h3>\n<p>\u5e38\u89c1\u5b89\u88c5\u65b9\u5f0f\u5305\u62ec\u9876\u9001\u98ce\u3001\u4fa7\u9001\u98ce\u548cFFU\uff08\u98ce\u673a\u8fc7\u6ee4\u5355\u5143\uff09\u6a21\u5757\u5316\u5b89\u88c5\u3002FFU\u56e0\u5176\u7075\u6d3b\u5e03\u5c40\u3001\u6613\u4e8e\u7ef4\u62a4\uff0c\u5728\u9ad8\u6d01\u51c0\u7b49\u7ea7\u73af\u5883\u4e2d\u5e94\u7528\u5e7f\u6cdb\u3002<\/p>\n<hr \/>\n<h2>\u56db\u3001\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u5173\u952e\u6280\u672f\u53c2\u6570\u4e0e\u9009\u578b\u4f9d\u636e<\/h2>\n<h3>4.1 \u4e3b\u8981\u6280\u672f\u53c2\u6570\u5217\u8868<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570\u540d\u79f0<\/th>\n<th>\u542b\u4e49\u8bf4\u660e<\/th>\n<th>\u63a8\u8350\u503c\u8303\u56f4<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u521d\u59cb\u963b\u529b<\/td>\n<td>\u521d\u59cb\u538b\u964d\uff0c\u5f71\u54cd\u98ce\u673a\u80fd\u8017<\/td>\n<td>\u2264250 Pa\uff08HEPA\uff09\uff1b\u2264300 Pa\uff08ULPA\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u989d\u5b9a\u98ce\u91cf<\/td>\n<td>\u8bbe\u8ba1\u6d41\u91cf\uff0c\u51b3\u5b9a\u8fc7\u6ee4\u9762\u79ef<\/td>\n<td>800~1500 m\u00b3\/h<\/td>\n<\/tr>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387<\/td>\n<td>\u5bf9\u7279\u5b9a\u7c92\u5f84\u9897\u7c92\u7684\u6355\u96c6\u7387<\/td>\n<td>\u226599.97%\uff08HEPA\uff09\uff1b\u226599.999%\uff08ULPA\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u5bb9\u5c18\u91cf<\/td>\n<td>\u53ef\u5bb9\u7eb3\u7070\u5c18\u603b\u91cf<\/td>\n<td>\u2265500 g<\/td>\n<\/tr>\n<tr>\n<td>\u6cc4\u6f0f\u7387<\/td>\n<td>\u68c0\u6d4b\u5bc6\u5c01\u6027\u6307\u6807<\/td>\n<td>&lt;0.01%<\/td>\n<\/tr>\n<tr>\n<td>\u6750\u8d28\u8010\u6e29\u6027<\/td>\n<td>\u8010\u9ad8\u6e29\u80fd\u529b<\/td>\n<td>\u226480\u00b0C\uff08\u5e38\u89c4\uff09\uff1b\u2264300\u00b0C\uff08\u9ad8\u6e29\u578b\uff09<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>4.2 \u9009\u578b\u53c2\u8003\u56e0\u7d20<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u56e0\u7d20<\/th>\n<th>\u5f71\u54cd<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6d01\u51c0\u7b49\u7ea7<\/td>\n<td>\u51b3\u5b9a\u8fc7\u6ee4\u5668\u7c7b\u578b\uff08HEPA\/ULPA\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u6c14\u6d41\u901f\u5ea6<\/td>\n<td>\u5f71\u54cd\u8fc7\u6ee4\u5668\u6570\u91cf\u4e0e\u6392\u5e03\u5bc6\u5ea6<\/td>\n<\/tr>\n<tr>\n<td>\u6c61\u67d3\u6e90\u7279\u6027<\/td>\n<td>\u51b3\u5b9a\u662f\u5426\u9700\u8981\u9884\u5904\u7406\u6216\u591a\u7ea7\u8fc7\u6ee4<\/td>\n<\/tr>\n<tr>\n<td>\u66f4\u6362\u5468\u671f<\/td>\n<td>\u5f71\u54cd\u8fd0\u7ef4\u6210\u672c\u4e0e\u505c\u673a\u65f6\u95f4<\/td>\n<\/tr>\n<tr>\n<td>\u6210\u672c\u9884\u7b97<\/td>\n<td>\u5305\u62ec\u91c7\u8d2d\u3001\u5b89\u88c5\u4e0e\u7ef4\u62a4\u8d39\u7528<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>4.3 \u9009\u578b\u8ba1\u7b97\u793a\u4f8b<\/h3>\n<p>\u4ee5\u67d0\u6676\u5706\u5382\u6d01\u51c0\u5ba4\u4e3a\u4f8b\uff0c\u603b\u9762\u79ef\u4e3a500\u33a1\uff0c\u9ad8\u5ea6\u4e3a3m\uff0c\u8981\u6c42\u6d01\u51c0\u7b49\u7ea7\u4e3aISO 3\u7ea7\uff0c\u6362\u6c14\u6b21\u6570\u8bbe\u5b9a\u4e3a60\u6b21\/\u5c0f\u65f6\u3002<\/p>\n<p>\u8ba1\u7b97\u603b\u98ce\u91cf\uff1a<br \/>\n$$<br \/>\nQ = A times h times n = 500 times 3 times 60 = 90,000 text{ m}^3\/text{h}<br \/>\n$$<\/p>\n<p>\u82e5\u5355\u53f0ULPA FFU\u989d\u5b9a\u98ce\u91cf\u4e3a1200 m\u00b3\/h\uff0c\u5219\u6240\u9700\u6570\u91cf\u4e3a\uff1a<br \/>\n$$<br \/>\nN = frac{Q}{q} = frac{90,000}{1200} = 75 text{ \u53f0}<br \/>\n$$<\/p>\n<hr \/>\n<h2>\u4e94\u3001\u56fd\u5185\u5916\u4e3b\u6d41\u5382\u5546\u4e0e\u4ea7\u54c1\u5bf9\u6bd4\u5206\u6790<\/h2>\n<h3>5.1 \u56fd\u5916\u77e5\u540d\u5382\u5546<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u5382\u5546<\/th>\n<th>\u56fd\u5bb6<\/th>\n<th>\u4ee3\u8868\u4ea7\u54c1<\/th>\n<th>\u7279\u70b9<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>Camfil\uff08\u5eb7\u6590\u5c14\uff09<\/td>\n<td>\u745e\u5178<\/td>\n<td>Hi-Flo MSA\u7cfb\u5217<\/td>\n<td>\u4f4e\u963b\u9ad8\u5bb9\u5c18\uff0c\u9002\u7528\u4e8eFFU\u7cfb\u7edf<\/td>\n<\/tr>\n<tr>\n<td>Donaldson\uff08\u5510\u7eb3\u68ee\uff09<\/td>\n<td>\u7f8e\u56fd<\/td>\n<td>Ultra-Web\u00ae HEPA<\/td>\n<td>\u7eb3\u7c73\u7ea4\u7ef4\u589e\u5f3a\u6ee4\u6750<\/td>\n<\/tr>\n<tr>\n<td>Freudenberg\uff08\u5f17\u52b3\u6069\u970d\u592b\uff09<\/td>\n<td>\u5fb7\u56fd<\/td>\n<td>Viledon ULPA<\/td>\n<td>\u6781\u4f4e\u6cc4\u6f0f\u7387\uff0c\u9002\u5408\u5149\u523b\u95f4<\/td>\n<\/tr>\n<tr>\n<td>Pall Corporation<\/td>\n<td>\u7f8e\u56fd<\/td>\n<td>Aerex ULPA<\/td>\n<td>\u8010\u9ad8\u6e29\u3001\u5316\u5b66\u8150\u8680\u6027\u5f3a<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>5.2 \u56fd\u5185\u4e3b\u8981\u54c1\u724c<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u54c1\u724c<\/th>\n<th>\u6240\u5c5e\u4f01\u4e1a<\/th>\n<th>\u4ee3\u8868\u4ea7\u54c1<\/th>\n<th>\u5e94\u7528\u7279\u70b9<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u82cf\u5dde\u5b89\u6cf0\u7a7a\u6c14\u6280\u672f\u6709\u9650\u516c\u53f8<\/td>\n<td>\u6e05\u6d01\u79d1\u6280\u4f01\u4e1a<\/td>\n<td>AT-H14\u7cfb\u5217<\/td>\n<td>\u56fd\u4ea7\u66ff\u4ee3\u4e3b\u529b\uff0c\u6027\u4ef7\u6bd4\u9ad8<\/td>\n<\/tr>\n<tr>\n<td>\u4e0a\u6d77\u4e9a\u6838\u51c0\u5316\u8bbe\u5907\u6709\u9650\u516c\u53f8<\/td>\n<td>\u51c0\u5316\u8bbe\u5907\u5236\u9020\u5546<\/td>\n<td>YH-ULPA-U16<\/td>\n<td>\u9002\u7528\u4e8e\u9ad8\u7aef\u5c01\u88c5\u7ebf<\/td>\n<\/tr>\n<tr>\n<td>\u5e7f\u4e1c\u827e\u79d1\u6280\u672f\u80a1\u4efd\u6709\u9650\u516c\u53f8<\/td>\n<td>\u667a\u6167\u5efa\u7b51\u670d\u52a1\u5546<\/td>\n<td>AK-HEPA-13<\/td>\n<td>\u667a\u80fd\u76d1\u63a7\u529f\u80fd\u96c6\u6210<\/td>\n<\/tr>\n<tr>\n<td>\u6df1\u5733\u5e02\u91d1\u9f0e\u73af\u4fdd\u79d1\u6280\u6709\u9650\u516c\u53f8<\/td>\n<td>\u73af\u4fdd\u79d1\u6280\u516c\u53f8<\/td>\n<td>JD-ULPA-U15<\/td>\n<td>\u8010\u8150\u8680\u3001\u6297\u8001\u5316<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>5.3 \u4ea7\u54c1\u53c2\u6570\u5bf9\u6bd4\u8868\uff08\u8282\u9009\uff09<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u54c1\u724c<\/th>\n<th>\u7c7b\u578b<\/th>\n<th>\u6548\u7387<\/th>\n<th>\u521d\u59cb\u963b\u529b(Pa)<\/th>\n<th>\u5bb9\u5c18\u91cf(g)<\/th>\n<th>\u4ef7\u683c(\u5143\/\u53f0)<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>Camfil Hi-Flo MSA<\/td>\n<td>HEPA H14<\/td>\n<td>\u226599.995%<\/td>\n<td>220<\/td>\n<td>600<\/td>\n<td>\uffe58000<\/td>\n<\/tr>\n<tr>\n<td>Pall Aerex ULPA<\/td>\n<td>ULPA U16<\/td>\n<td>\u226599.9995%<\/td>\n<td>280<\/td>\n<td>550<\/td>\n<td>\uffe512000<\/td>\n<\/tr>\n<tr>\n<td>\u82cf\u5dde\u5b89\u6cf0AT-H14<\/td>\n<td>HEPA H14<\/td>\n<td>\u226599.995%<\/td>\n<td>230<\/td>\n<td>580<\/td>\n<td>\uffe55500<\/td>\n<\/tr>\n<tr>\n<td>\u4e9a\u6838YH-ULPA-U16<\/td>\n<td>ULPA U16<\/td>\n<td>\u226599.9995%<\/td>\n<td>290<\/td>\n<td>520<\/td>\n<td>\uffe59000<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u6ce8\uff1a\u6570\u636e\u6765\u6e90\u4e8e\u5404\u5382\u5546\u5b98\u7f51\u4e0e\u516c\u5f00\u62db\u6807\u6587\u4ef6\u3002<\/p>\n<hr \/>\n<h2>\u516d\u3001\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u5e94\u7528\u5b9e\u4f8b\u4e0e\u6548\u679c\u8bc4\u4f30<\/h2>\n<h3>6.1 \u5b9e\u4f8b\u4e00\uff1a\u67d012\u82f1\u5bf8\u6676\u5706\u5382\u6d01\u51c0\u5ba4\u6539\u9020\u9879\u76ee<\/h3>\n<p><strong>\u80cc\u666f<\/strong>\uff1a\u539f\u6d01\u51c0\u5ba4\u4f7f\u7528HEPA H13\u8fc7\u6ee4\u5668\uff0c\u6d01\u51c0\u7b49\u7ea7\u4e3aISO 4\uff0c\u56e0\u5149\u523b\u5de5\u827a\u5347\u7ea7\u9700\u63d0\u5347\u81f3ISO 2\u7ea7\u3002<\/p>\n<p><strong>\u89e3\u51b3\u65b9\u6848<\/strong>\uff1a<\/p>\n<ul>\n<li>\u66f4\u6362\u4e3aULPA U17\u8fc7\u6ee4\u5668\uff1b<\/li>\n<li>\u589e\u8bbeFFU\u6570\u91cf\u81f3\u6bcf\u5e73\u65b9\u7c731.2\u53f0\uff1b<\/li>\n<li>\u52a0\u88c5VOCs\u9884\u5904\u7406\u6a21\u5757\u3002<\/li>\n<\/ul>\n<p><strong>\u6548\u679c\u8bc4\u4f30<\/strong>\uff1a<\/p>\n<ul>\n<li>\u6d01\u51c0\u5ea6\u8fbe\u6807ISO 2\uff1b<\/li>\n<li>\u8fd0\u884c\u80fd\u8017\u964d\u4f4e8%\uff1b<\/li>\n<li>\u6ee4\u82af\u66f4\u6362\u5468\u671f\u5ef6\u957f\u81f318\u4e2a\u6708\u3002<\/li>\n<\/ul>\n<h3>6.2 \u5b9e\u4f8b\u4e8c\uff1a\u67d0\u5148\u8fdb\u5c01\u88c5\u5382\u6d01\u51c0\u8f66\u95f4\u5efa\u8bbe<\/h3>\n<p><strong>\u80cc\u666f<\/strong>\uff1a\u65b0\u5efa\u6d01\u51c0\u8f66\u95f4\uff0c\u76ee\u6807\u6d01\u51c0\u7b49\u7ea7\u4e3aISO 4\u3002<\/p>\n<p><strong>\u9009\u578b\u65b9\u6848<\/strong>\uff1a<\/p>\n<ul>\n<li>\u9009\u7528\u56fd\u4ea7ULPA U15\u8fc7\u6ee4\u5668\uff1b<\/li>\n<li>\u642d\u914d\u4e2d\u6548F8+\u521d\u6548G4\u9884\u5904\u7406\uff1b<\/li>\n<li>\u91c7\u7528\u667a\u80fd\u63a7\u5236\u7cfb\u7edf\u5b9e\u73b0\u538b\u529b\u5dee\u4e0e\u98ce\u91cf\u81ea\u52a8\u8c03\u8282\u3002<\/li>\n<\/ul>\n<p><strong>\u8fd0\u884c\u7ed3\u679c<\/strong>\uff1a<\/p>\n<ul>\n<li>\u6d01\u51c0\u5ea6\u7a33\u5b9a\u5728ISO 4\u7ea7\uff1b<\/li>\n<li>\u5e74\u5747\u7ef4\u62a4\u6210\u672c\u8f83\u8fdb\u53e3\u65b9\u6848\u4e0b\u964d30%\uff1b<\/li>\n<li>\u7cfb\u7edf\u54cd\u5e94\u901f\u5ea6\u5feb\uff0c\u9002\u5e94\u591a\u73ed\u6b21\u751f\u4ea7\u9700\u6c42\u3002<\/li>\n<\/ul>\n<hr \/>\n<h2>\u4e03\u3001\u53d1\u5c55\u8d8b\u52bf\u4e0e\u524d\u6cbf\u6280\u672f\u5c55\u671b<\/h2>\n<h3>7.1 \u667a\u80fd\u5316\u4e0e\u6570\u5b57\u5316\u8d8b\u52bf<\/h3>\n<p>\u968f\u7740\u5de5\u4e1a4.0\u63a8\u8fdb\uff0c\u8d8a\u6765\u8d8a\u591a\u7684\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf\u5f00\u59cb\u96c6\u6210\u4f20\u611f\u5668\u4e0e\u7269\u8054\u7f51\u6a21\u5757\uff0c\u5b9e\u73b0\u5b9e\u65f6\u76d1\u6d4b\u4e0e\u8fdc\u7a0b\u63a7\u5236\u3002\u4f8b\u5982\uff1a<\/p>\n<ul>\n<li>\u538b\u5dee\u62a5\u8b66\u7cfb\u7edf\uff1b<\/li>\n<li>\u9897\u7c92\u8ba1\u6570\u53cd\u9988\uff1b<\/li>\n<li>\u81ea\u52a8\u6e05\u6d01\u4e0e\u66f4\u6362\u63d0\u9192\u3002<\/li>\n<\/ul>\n<h3>7.2 \u65b0\u578b\u6750\u6599\u7684\u7814\u53d1<\/h3>\n<p>\u8fd1\u5e74\u6765\uff0c\u7eb3\u7c73\u7ea4\u7ef4\u3001\u78b3\u7eb3\u7c73\u7ba1\u3001\u77f3\u58a8\u70ef\u6d82\u5c42\u7b49\u65b0\u578b\u6750\u6599\u88ab\u5f15\u5165\u9ad8\u6548\u8fc7\u6ee4\u5668\u7814\u53d1\uff0c\u663e\u8457\u63d0\u5347\u4e86\u8fc7\u6ee4\u6548\u7387\u4e0e\u8010\u4e45\u6027\u3002\u4f8b\u5982\uff1a<\/p>\n<ul>\n<li>\u7f8e\u56fdDonaldson\u516c\u53f8\u7684Ultra-Web\u00ae\u7eb3\u7c73\u7ea4\u7ef4\u6280\u672f\uff1b<\/li>\n<li>\u4e2d\u56fd\u6e05\u534e\u5927\u5b66\u7814\u53d1\u7684\u77f3\u58a8\u70ef\u589e\u5f3a\u590d\u5408\u6ee4\u6750\u3002<\/li>\n<\/ul>\n<h3>7.3 \u7eff\u8272\u8282\u80fd\u65b9\u5411<\/h3>\n<p>\u901a\u8fc7\u4f18\u5316\u7ed3\u6784\u8bbe\u8ba1\u3001\u964d\u4f4e\u521d\u59cb\u963b\u529b\u3001\u63d0\u9ad8\u4f7f\u7528\u5bff\u547d\u7b49\u65b9\u5f0f\u51cf\u5c11\u80fd\u8017\u3002\u5982Camfil\u63a8\u51fa\u7684Hi-Flo\u7cfb\u5217\uff0c\u6bd4\u4f20\u7edfHEPA\u8282\u7701\u7ea620%\u80fd\u8017\u3002<\/p>\n<hr \/>\n<h2>\u516b\u3001\u7ed3\u8bba\u4e0e\u5efa\u8bae\uff08\u7565\uff09<\/h2>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>GB\/T 13554-2020. \u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668 [S]. \u5317\u4eac: \u4e2d\u56fd\u6807\u51c6\u51fa\u7248\u793e, 2020.<\/li>\n<li>GB 50073-2013. \u6d01\u51c0\u5382\u623f\u8bbe\u8ba1\u89c4\u8303 [S]. \u5317\u4eac: \u4e2d\u56fd\u8ba1\u5212\u51fa\u7248\u793e, 2013.<\/li>\n<li>ISO 14644-1:2015. Cleanrooms and associated controlled environments \u2014 Part 1: Classification and monitoring of air cleanliness by particle concentration [S].<\/li>\n<li>EN 1822:2009. High efficiency air filters (HEPA and ULPA) \u2013 Testing, classification and marking [S].<\/li>\n<li>ASHRAE Standard 52.2-2017. Method of Testing General Ventilation Air-Cleaning Devices for Removal Efficiency by Particle Size [S].<\/li>\n<li>SEMI F19-1103. Guide for Classification of Semiconductor Manufacturing Facility Cleanrooms Based on ISO 14644-1 [S].<\/li>\n<li>Camfil. Product Catalogue \u2013 Hi-Flo MSA Series [EB\/OL]. <a href=\"https:\/\/www.camfil.com\/\">https:\/\/www.camfil.com\/<\/a><\/li>\n<li>Pall Corporation. Aerex ULPA Filters [EB\/OL]. <a href=\"https:\/\/www.pall.com\/\">https:\/\/www.pall.com\/<\/a><\/li>\n<li>\u82cf\u5dde\u5b89\u6cf0\u7a7a\u6c14\u6280\u672f\u6709\u9650\u516c\u53f8. AT\u7cfb\u5217\u9ad8\u6548\u8fc7\u6ee4\u5668\u8bf4\u660e\u4e66 [Z]. \u82cf\u5dde, 2022.<\/li>\n<li>\u6e05\u534e\u5927\u5b66\u73af\u5883\u5b66\u9662. \u65b0\u578b\u7eb3\u7c73\u6750\u6599\u5728\u9ad8\u6548\u8fc7\u6ee4\u5668\u4e2d\u7684\u5e94\u7528\u7814\u7a76 [J]. \u73af\u5883\u79d1\u5b66\u4e0e\u6280\u672f, 2021, 44(5): 123-130.<\/li>\n<\/ol>\n<hr \/>\n<p><em>\u672c\u6587\u5185\u5bb9\u57fa\u4e8e\u516c\u5f00\u8d44\u6599\u6574\u7406\u64b0\u5199\uff0c\u5f15\u7528\u5185\u5bb9\u5747\u5df2\u6ce8\u660e\u6765\u6e90\u3002\u5982\u6d89\u53ca\u7248\u6743\u95ee\u9898\uff0c\u8bf7\u53ca\u65f6\u8054\u7cfb\u4f5c\u8005\u5904\u7406\u3002<\/em><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u65e0\u5c18\u5ba4\u4e2d\u7684\u5206\u7ea7\u9009\u578b\u6307\u5357 \u5f15\u8a00\uff1a\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\u7684\u91cd\u8981\u6027 \u5728\u73b0\u4ee3\u9ad8\u79d1\u6280\u5236\u9020\u9886\u57df\uff0c\u5c24\u5176\u662f\u534a\u5bfc\u4f53\u4ea7\u4e1a\u4e2d\uff0c\u6d01\u51c0\u5ea6\u8981\u6c42\u6781\u4e3a\u4e25\u683c\u3002\u65e0\u5c18\u5ba4\uff08Cleanroom\uff09\u4f5c\u4e3a\u4fdd\u969c\u4ea7\u54c1\u54c1\u8d28\u4e0e\u5de5\u827a\u7a33\u5b9a\u6027\u7684\u5173\u952e\u73af\u5883\uff0c\u5176\u7a7a\u6c14\u8d28\u91cf\u63a7\u5236\u4f9d\u8d56\u4e8e\u9ad8\u6548\u7684\u7a7a\u6c14\u51c0\u5316\u7cfb\u7edf\uff0c\u5176\u4e2d\u9ad8\u6548\u7a7a\u6c14\u8fc7\u6ee4\u5668\uff08HEPA, High Efficiency Particulate Air Filter\uff09\u548c\u8d85&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-14219","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14219","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=14219"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14219\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=14219"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=14219"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=14219"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}