{"id":14106,"date":"2025-05-07T15:13:25","date_gmt":"2025-05-07T07:13:25","guid":{"rendered":"https:\/\/www.textile-fabric.com\/?p=14106"},"modified":"2025-05-07T15:13:25","modified_gmt":"2025-05-07T07:13:25","slug":"%e7%ae%b1%e5%bc%8f%e6%b4%bb%e6%80%a7%e7%82%ad%e8%bf%87%e6%bb%a4%e5%99%a8%e5%8d%8a%e5%af%bc%e4%bd%93%e5%8e%82%e6%88%bf%e6%b4%81%e5%87%80%e7%a9%ba%e6%b0%94%e8%bf%87%e6%bb%a4%e7%b3%bb%e7%bb%9f","status":"publish","type":"post","link":"https:\/\/www.textile-fabric.com\/?p=14106","title":{"rendered":"\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u534a\u5bfc\u4f53\u5382\u623f\u6d01\u51c0\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf"},"content":{"rendered":"<h1>\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5382\u623f\u6d01\u51c0\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf\u4e2d\u7684\u5e94\u7528\u7814\u7a76<\/h1>\n<h2>\u4e00\u3001\u5f15\u8a00<\/h2>\n<p>\u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u65e5\u76ca\u63d0\u9ad8\u3002\u5c24\u5176\u662f\u5728\u5148\u8fdb\u5236\u7a0b\u8282\u70b9\uff08\u59827nm\u30015nm\u53ca\u4ee5\u4e0b\uff09\u4e2d\uff0c\u5fae\u7c92\u6c61\u67d3\u548c\u6c14\u4f53\u6c61\u67d3\u7269\u7684\u5f71\u54cd\u5df2\u6210\u4e3a\u5236\u7ea6\u826f\u7387\u63d0\u5347\u7684\u91cd\u8981\u56e0\u7d20\u4e4b\u4e00\u3002\u56e0\u6b64\uff0c\u6d01\u51c0\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf\u4f5c\u4e3a\u4fdd\u969c\u534a\u5bfc\u4f53\u751f\u4ea7\u73af\u5883\u8d28\u91cf\u7684\u6838\u5fc3\u8bbe\u5907\uff0c\u5176\u6027\u80fd\u76f4\u63a5\u5f71\u54cd\u5230\u82af\u7247\u5236\u9020\u7684\u7a33\u5b9a\u6027\u548c\u53ef\u9760\u6027\u3002<\/p>\n<p>\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\uff08Box-type Activated Carbon Filter\uff09\u56e0\u5176\u9ad8\u6548\u5438\u9644\u6709\u673a\u6325\u53d1\u6027\u5316\u5408\u7269\uff08VOCs\uff09\u3001\u9178\u78b1\u6027\u6c14\u4f53\u3001\u81ed\u6c27\u7b49\u6c14\u6001\u6c61\u67d3\u7269\u7684\u80fd\u529b\uff0c\u5728\u534a\u5bfc\u4f53\u5382\u623f\u6d01\u51c0\u5ba4\u73af\u5883\u4e2d\u5f97\u5230\u4e86\u5e7f\u6cdb\u5e94\u7528\u3002\u672c\u6587\u5c06\u4ece\u4ea7\u54c1\u539f\u7406\u3001\u7ed3\u6784\u8bbe\u8ba1\u3001\u6280\u672f\u53c2\u6570\u3001\u5e94\u7528\u573a\u666f\u3001\u9009\u578b\u65b9\u6cd5\u3001\u7ef4\u62a4\u7ba1\u7406\u7b49\u591a\u4e2a\u65b9\u9762\u8fdb\u884c\u7cfb\u7edf\u5206\u6790\uff0c\u5e76\u7ed3\u5408\u56fd\u5185\u5916\u7814\u7a76\u6210\u679c\u4e0e\u5b9e\u9645\u5de5\u7a0b\u6848\u4f8b\uff0c\u63a2\u8ba8\u5176\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u7a7a\u6c14\u7cfb\u7edf\u4e2d\u7684\u5173\u952e\u4f5c\u7528\u3002<\/p>\n<hr \/>\n<h2>\u4e8c\u3001\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u7684\u57fa\u672c\u539f\u7406\u4e0e\u5206\u7c7b<\/h2>\n<h3>2.1 \u5de5\u4f5c\u539f\u7406<\/h3>\n<p>\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u662f\u4e00\u79cd\u4ee5\u6d3b\u6027\u70ad\u4e3a\u4e3b\u8981\u5438\u9644\u6750\u6599\u7684\u7a7a\u6c14\u51c0\u5316\u88c5\u7f6e\u3002\u5176\u5de5\u4f5c\u539f\u7406\u57fa\u4e8e\u7269\u7406\u5438\u9644\u548c\u5316\u5b66\u5438\u9644\u4e24\u79cd\u673a\u5236\uff1a<\/p>\n<ul>\n<li><strong>\u7269\u7406\u5438\u9644<\/strong>\uff1a\u901a\u8fc7\u6d3b\u6027\u70ad\u8868\u9762\u4e30\u5bcc\u7684\u5fae\u5b54\u7ed3\u6784\u5bf9\u6c14\u4f53\u5206\u5b50\u8fdb\u884c\u6355\u83b7\uff1b<\/li>\n<li><strong>\u5316\u5b66\u5438\u9644<\/strong>\uff1a\u901a\u8fc7\u6539\u6027\u5904\u7406\u540e\u7684\u6d3b\u6027\u70ad\u5bf9\u7279\u5b9a\u6c14\u4f53\uff08\u5982H\u2082S\u3001NH\u2083\u3001Cl\u2082\u7b49\uff09\u8fdb\u884c\u9009\u62e9\u6027\u53cd\u5e94\u53bb\u9664\u3002<\/li>\n<\/ul>\n<p>\u6d3b\u6027\u70ad\u5177\u6709\u6781\u5927\u7684\u6bd4\u8868\u9762\u79ef\uff08\u901a\u5e38\u5927\u4e8e1000 m\u00b2\/g\uff09\uff0c\u80fd\u591f\u6709\u6548\u5438\u9644\u591a\u79cd\u6709\u5bb3\u6c14\u4f53\u5206\u5b50\uff0c\u4ece\u800c\u8fbe\u5230\u51c0\u5316\u7a7a\u6c14\u7684\u76ee\u7684\u3002<\/p>\n<h3>2.2 \u5206\u7c7b\u65b9\u5f0f<\/h3>\n<p>\u6839\u636e\u7528\u9014\u548c\u6280\u672f\u7279\u70b9\uff0c\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u53ef\u5206\u4e3a\u4ee5\u4e0b\u51e0\u7c7b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u7c7b\u522b<\/th>\n<th>\u7279\u70b9<\/th>\n<th>\u5e94\u7528\u573a\u666f<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u666e\u901a\u578b<\/td>\n<td>\u672a\u7ecf\u8fc7\u7279\u6b8a\u6539\u6027\u5904\u7406\uff0c\u9002\u7528\u4e8e\u4e00\u822cVOCs\u53bb\u9664<\/td>\n<td>\u529e\u516c\u697c\u3001\u533b\u9662\u901a\u98ce\u7cfb\u7edf<\/td>\n<\/tr>\n<tr>\n<td>\u9178\u6027\u6c14\u4f53\u4e13\u7528\u578b<\/td>\n<td>\u542b\u6709\u78b1\u6027\u6dfb\u52a0\u5242\uff0c\u5982\u6c22\u6c27\u5316\u94be\u3001\u78b3\u9178\u94a0\u7b49<\/td>\n<td>\u534a\u5bfc\u4f53\u5382\u5e9f\u6c14\u5904\u7406<\/td>\n<\/tr>\n<tr>\n<td>\u78b1\u6027\u6c14\u4f53\u4e13\u7528\u578b<\/td>\n<td>\u542b\u6709\u9178\u6027\u6dfb\u52a0\u5242\uff0c\u5982\u786b\u9178\u94dc\u3001\u78f7\u9178\u76d0\u7b49<\/td>\n<td>\u5b9e\u9a8c\u5ba4\u6392\u98ce\u7cfb\u7edf<\/td>\n<\/tr>\n<tr>\n<td>\u81ed\u6c27\u53bb\u9664\u578b<\/td>\n<td>\u7ecf\u8fc7\u50ac\u5316\u5904\u7406\uff0c\u589e\u5f3a\u5bf9O\u2083\u7684\u5206\u89e3\u80fd\u529b<\/td>\n<td>\u5149\u523b\u533a\u3001\u6e05\u6d17\u95f4\u7b49\u654f\u611f\u533a\u57df<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u4e09\u3001\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u7684\u6280\u672f\u53c2\u6570\u4e0e\u6027\u80fd\u6307\u6807<\/h2>\n<p>\u4e3a\u6ee1\u8db3\u534a\u5bfc\u4f53\u884c\u4e1a\u9ad8\u6807\u51c6\u7684\u7a7a\u6c14\u8d28\u91cf\u63a7\u5236\u9700\u6c42\uff0c\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u9700\u5177\u5907\u4f18\u5f02\u7684\u5438\u9644\u6548\u7387\u3001\u4f4e\u963b\u529b\u3001\u957f\u5bff\u547d\u7b49\u7279\u70b9\u3002\u4ee5\u4e0b\u662f\u5e38\u89c1\u7684\u6280\u672f\u53c2\u6570\u4e0e\u6027\u80fd\u6307\u6807\uff1a<\/p>\n<h3>3.1 \u4e3b\u8981\u6280\u672f\u53c2\u6570<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570\u540d\u79f0<\/th>\n<th>\u63cf\u8ff0<\/th>\n<th>\u5e38\u89c1\u503c\u8303\u56f4<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u521d\u671f\u538b\u5dee<\/td>\n<td>\u8fc7\u6ee4\u5668\u521d\u59cb\u8fd0\u884c\u65f6\u7684\u963b\u529b<\/td>\n<td>&lt;100 Pa<\/td>\n<\/tr>\n<tr>\n<td>\u6700\u7ec8\u538b\u5dee<\/td>\n<td>\u8fbe\u5230\u66f4\u6362\u5468\u671f\u65f6\u7684\u6700\u5927\u5141\u8bb8\u538b\u5dee<\/td>\n<td>400\u2013600 Pa<\/td>\n<\/tr>\n<tr>\n<td>\u98ce\u91cf\u8303\u56f4<\/td>\n<td>\u9002\u7528\u7684\u7a7a\u6c14\u6d41\u91cf\u8303\u56f4<\/td>\n<td>500\u201310,000 m\u00b3\/h<\/td>\n<\/tr>\n<tr>\n<td>\u8fc7\u6ee4\u6548\u7387\uff08\u9488\u5bf9VOCs\uff09<\/td>\n<td>\u5bf9\u5e38\u89c1\u6709\u673a\u7269\u7684\u53bb\u9664\u7387<\/td>\n<td>&gt;90%<\/td>\n<\/tr>\n<tr>\n<td>\u4f7f\u7528\u5bff\u547d<\/td>\n<td>\u6b63\u5e38\u5de5\u51b5\u4e0b\u4f7f\u7528\u65f6\u95f4<\/td>\n<td>6\u201324\u4e2a\u6708<\/td>\n<\/tr>\n<tr>\n<td>\u6d3b\u6027\u70ad\u586b\u5145\u91cf<\/td>\n<td>\u5355\u4f4d\u4f53\u79ef\u5185\u6d3b\u6027\u70ad\u88c5\u586b\u5bc6\u5ea6<\/td>\n<td>300\u2013500 kg\/m\u00b3<\/td>\n<\/tr>\n<tr>\n<td>\u6750\u8d28<\/td>\n<td>\u5916\u58f3\u6750\u8d28\uff0c\u9632\u706b\u7b49\u7ea7<\/td>\n<td>\u9540\u950c\u94a2\u677f\/\u4e0d\u9508\u94a2\uff0cB1\u7ea7\u9632\u706b<\/td>\n<\/tr>\n<tr>\n<td>\u5de5\u4f5c\u6e29\u5ea6<\/td>\n<td>\u8bbe\u5907\u5141\u8bb8\u8fd0\u884c\u6e29\u5ea6\u8303\u56f4<\/td>\n<td>-10\u2103\uff5e80\u2103<\/td>\n<\/tr>\n<tr>\n<td>\u76f8\u5bf9\u6e7f\u5ea6<\/td>\n<td>\u63a8\u8350\u8fd0\u884c\u6e7f\u5ea6\u8303\u56f4<\/td>\n<td>\u226480% RH<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>3.2 \u6027\u80fd\u6d4b\u8bd5\u6807\u51c6<\/h3>\n<p>\u56fd\u9645\u4e0a\u5e38\u7528\u7684\u6027\u80fd\u6d4b\u8bd5\u6807\u51c6\u5305\u62ec\uff1a<\/p>\n<ul>\n<li><strong>ASHRAE Standard 145-2011<\/strong>\uff1a\u7528\u4e8e\u6d4b\u5b9a\u6c14\u6001\u6c61\u67d3\u7269\u53bb\u9664\u6548\u7387\uff1b<\/li>\n<li><strong>EN 779:2012<\/strong>\uff1a\u6b27\u6d32\u7a7a\u6c14\u8fc7\u6ee4\u5668\u5206\u7ea7\u6807\u51c6\uff1b<\/li>\n<li><strong>GB\/T 14295-2008<\/strong>\uff1a\u4e2d\u56fd\u56fd\u5bb6\u6807\u51c6\u300a\u7a7a\u6c14\u8fc7\u6ee4\u5668\u300b\uff1b<\/li>\n<li><strong>JIS B 9908:2011<\/strong>\uff1a\u65e5\u672c\u5de5\u4e1a\u6807\u51c6\u7a7a\u6c14\u8fc7\u6ee4\u5668\u6d4b\u8bd5\u65b9\u6cd5\u3002<\/li>\n<\/ul>\n<hr \/>\n<h2>\u56db\u3001\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5382\u623f\u4e2d\u7684\u5e94\u7528<\/h2>\n<h3>4.1 \u534a\u5bfc\u4f53\u5382\u623f\u6d01\u51c0\u7a7a\u6c14\u7cfb\u7edf\u7684\u7ec4\u6210<\/h3>\n<p>\u534a\u5bfc\u4f53\u5382\u623f\u6d01\u51c0\u7a7a\u6c14\u7cfb\u7edf\u4e00\u822c\u7531\u4ee5\u4e0b\u51e0\u4e2a\u90e8\u5206\u7ec4\u6210\uff1a<\/p>\n<ol>\n<li><strong>\u65b0\u98ce\u5904\u7406\u5355\u5143\uff08Fresh Air Handling Unit\uff09<\/strong><\/li>\n<li><strong>\u9884\u8fc7\u6ee4\u6bb5\uff08Pre-filter\uff09<\/strong><\/li>\n<li><strong>\u9ad8\u6548\u8fc7\u6ee4\u6bb5\uff08HEPA\/ULPA Filter\uff09<\/strong><\/li>\n<li><strong>\u5316\u5b66\u8fc7\u6ee4\u6bb5\uff08Chemical Filter \/ Gas Phase Filter\uff09<\/strong><\/li>\n<li><strong>\u98ce\u673a\u7cfb\u7edf\uff08Fan System\uff09<\/strong><\/li>\n<li><strong>\u63a7\u5236\u7cfb\u7edf\uff08Control System\uff09<\/strong><\/li>\n<\/ol>\n<p>\u5176\u4e2d\uff0c<strong>\u5316\u5b66\u8fc7\u6ee4\u6bb5<\/strong>\u662f\u63a7\u5236\u6c14\u6001\u6c61\u67d3\u7269\u7684\u5173\u952e\u73af\u8282\uff0c\u800c\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u6b63\u662f\u8be5\u73af\u8282\u4e2d\u7684\u6838\u5fc3\u7ec4\u4ef6\u3002<\/p>\n<h3>4.2 \u4e3b\u8981\u5e94\u7528\u533a\u57df<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u533a\u57df<\/th>\n<th>\u6c61\u67d3\u7269\u7c7b\u578b<\/th>\n<th>\u5e94\u7528\u9700\u6c42<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5149\u523b\u533a\uff08Photolithography Area\uff09<\/td>\n<td>\u5f02\u620a\u9187\u3001\u4e59\u9178\u4e59\u916f\u3001\u4e19\u916e\u7b49VOCs<\/td>\n<td>\u8981\u6c42\u6781\u9ad8\u7eaf\u5ea6\uff0c\u9632\u6b62\u5149\u523b\u80f6\u5931\u6548<\/td>\n<\/tr>\n<tr>\n<td>\u6e05\u6d17\u533a\uff08Cleaning Area\uff09<\/td>\n<td>HF\u3001HNO\u2083\u3001HCl\u7b49\u9178\u6027\u6c14\u4f53<\/td>\n<td>\u9700\u914d\u5907\u9178\u6027\u6c14\u4f53\u4e13\u7528\u6d3b\u6027\u70ad<\/td>\n<\/tr>\n<tr>\n<td>\u8680\u523b\u533a\uff08Etching Area\uff09<\/td>\n<td>Cl\u2082\u3001F\u2082\u3001CF\u2084\u7b49\u8150\u8680\u6027\u6c14\u4f53<\/td>\n<td>\u9700\u9ad8\u5438\u9644\u5bb9\u91cf\u4e0e\u6297\u8150\u8680\u5916\u58f3<\/td>\n<\/tr>\n<tr>\n<td>CVD\/PVD\u533a<\/td>\n<td>NH\u2083\u3001SiH\u2084\u3001PH\u2083\u7b49\u6c14\u4f53<\/td>\n<td>\u9700\u5b9a\u5236\u5316\u6539\u6027\u6d3b\u6027\u70ad\u914d\u65b9<\/td>\n<\/tr>\n<tr>\n<td>\u5c01\u88c5\u533a\uff08Packaging Area\uff09<\/td>\n<td>\u6709\u673a\u6eb6\u5242\u6b8b\u7559<\/td>\n<td>\u9ad8\u6548VOCs\u53bb\u9664\u80fd\u529b<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>4.3 \u5b9e\u9645\u5e94\u7528\u6548\u679c\u5206\u6790<\/h3>\n<p>\u6839\u636eTSMC\u5728\u53f0\u6e7e\u67d0\u6676\u5706\u5382\u7684\u5b9e\u9645\u8fd0\u884c\u6570\u636e\uff082021\u5e74\u62a5\u544a\uff09\uff0c\u5728\u5176\u6d01\u51c0\u7cfb\u7edf\u4e2d\u914d\u7f6e\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u540e\uff0c\u7a7a\u6c14\u4e2d\u5f02\u620a\u9187\u6d53\u5ea6\u4ece\u521d\u59cb\u7684150 ppb\u964d\u81f3&lt;5 ppb\uff0c\u663e\u8457\u63d0\u9ad8\u4e86\u5149\u523b\u5de5\u827a\u7684\u7a33\u5b9a\u6027\u3002<\/p>\n<p>\u6b64\u5916\uff0c\u82f1\u7279\u5c14\uff08Intel\uff09\u5728\u7f8e\u56fd\u4e9a\u5229\u6851\u90a3\u5dde\u5de5\u5382\u4e5f\u91c7\u7528\u4e86\u591a\u7ea7\u6d3b\u6027\u70ad\u8fc7\u6ee4\u7ec4\u5408\u65b9\u6848\uff0c\u6210\u529f\u5c06\u7a7a\u6c14\u4e2d\u603b\u6709\u673a\u78b3\uff08TOC\uff09\u542b\u91cf\u63a7\u5236\u57280.1 ppm\u4ee5\u4e0b\uff0c\u7b26\u5408\u5176EHS\uff08Environment, Health &amp; Safety\uff09\u6807\u51c6\u3002<\/p>\n<hr \/>\n<h2>\u4e94\u3001\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u7684\u9009\u578b\u4e0e\u8bbe\u8ba1\u8981\u70b9<\/h2>\n<h3>5.1 \u9009\u578b\u539f\u5219<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u539f\u5219<\/th>\n<th>\u8bf4\u660e<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u6839\u636e\u6c61\u67d3\u7269\u79cd\u7c7b\u9009\u62e9\u5438\u9644\u6750\u6599<\/td>\n<td>\u5982\u9178\u6027\u6c14\u4f53\u9009\u7528\u78b1\u6027\u6d3b\u6027\u70ad\uff0c\u53cd\u4e4b\u4ea6\u7136<\/td>\n<\/tr>\n<tr>\n<td>\u6839\u636e\u98ce\u91cf\u786e\u5b9a\u8fc7\u6ee4\u5668\u5c3a\u5bf8<\/td>\n<td>\u4fdd\u8bc1\u6c14\u6d41\u5747\u5300\u5206\u5e03\uff0c\u907f\u514d\u5c40\u90e8\u7a7f\u900f<\/td>\n<\/tr>\n<tr>\n<td>\u6839\u636e\u7a7a\u95f4\u5e03\u5c40\u9009\u62e9\u5b89\u88c5\u65b9\u5f0f<\/td>\n<td>\u5782\u76f4\u6216\u6c34\u5e73\u5b89\u88c5\u5e94\u8003\u8651\u68c0\u4fee\u901a\u9053\u4e0e\u7a7a\u95f4\u9650\u5236<\/td>\n<\/tr>\n<tr>\n<td>\u6839\u636e\u8fd0\u884c\u6210\u672c\u9009\u62e9\u66f4\u6362\u5468\u671f<\/td>\n<td>\u7ed3\u5408\u6d3b\u6027\u70ad\u5438\u9644\u5bb9\u91cf\u4e0e\u7ecf\u6d4e\u6027\u8bc4\u4f30<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h3>5.2 \u5b89\u88c5\u4e0e\u7ef4\u62a4\u5efa\u8bae<\/h3>\n<table>\n<thead>\n<tr>\n<th>\u9879\u76ee<\/th>\n<th>\u5efa\u8bae\u5185\u5bb9<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u5b89\u88c5\u4f4d\u7f6e<\/td>\n<td>\u5b89\u88c5\u4e8eHEPA\u524d\u6bb5\uff0c\u907f\u514d\u9897\u7c92\u5835\u585e\u5f71\u54cd\u4f7f\u7528\u5bff\u547d<\/td>\n<\/tr>\n<tr>\n<td>\u66f4\u6362\u5468\u671f<\/td>\n<td>\u6bcf6\u201312\u4e2a\u6708\u5b9a\u671f\u68c0\u6d4b\u5e76\u66f4\u6362\uff0c\u4f9d\u636e\u538b\u5dee\u53d8\u5316\u5224\u65ad<\/td>\n<\/tr>\n<tr>\n<td>\u5b89\u5168\u9632\u62a4<\/td>\n<td>\u914d\u5907\u6d3b\u6027\u70ad\u6cc4\u6f0f\u62a5\u8b66\u7cfb\u7edf\uff0c\u9632\u6b62\u4e8c\u6b21\u6c61\u67d3<\/td>\n<\/tr>\n<tr>\n<td>\u5e9f\u5f03\u5904\u7406<\/td>\n<td>\u6309\u7167\u5371\u9669\u5e9f\u7269\u7ba1\u7406\u6761\u4f8b\u8fdb\u884c\u5408\u89c4\u5904\u7f6e<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u516d\u3001\u56fd\u5185\u5916\u7814\u7a76\u8fdb\u5c55\u4e0e\u5178\u578b\u6848\u4f8b\u5206\u6790<\/h2>\n<h3>6.1 \u56fd\u5916\u7814\u7a76\u73b0\u72b6<\/h3>\n<p>\u7f8e\u56fd\u73af\u5883\u4fdd\u62a4\u7f72\uff08EPA\uff09\u5728\u5176\u53d1\u5e03\u7684\u300aGas Phase Air Cleaning Devices for Indoor Air Quality\u300b\u62a5\u544a\u4e2d\u6307\u51fa\uff0c\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u5bf9VOCs\u7684\u53bb\u9664\u6548\u7387\u53ef\u8fbe90%\u4ee5\u4e0a\uff0c\u5c24\u5176\u9002\u7528\u4e8e\u529e\u516c\u573a\u6240\u548c\u7535\u5b50\u5382\u623f\u3002<\/p>\n<p>\u9ebb\u7701\u7406\u5de5\u5b66\u9662\uff08MIT\uff09\u6750\u6599\u79d1\u5b66\u5b9e\u9a8c\u5ba4\u5bf9\u4e0d\u540c\u7c7b\u578b\u7684\u6d3b\u6027\u70ad\u8fdb\u884c\u4e86\u6bd4\u8f83\u5b9e\u9a8c\uff0c\u7ed3\u679c\u663e\u793a\uff0c\u7ecfKOH\u6d3b\u5316\u5904\u7406\u7684\u6930\u58f3\u6d3b\u6027\u70ad\u5728\u5438\u9644\u7532\u82ef\u65b9\u9762\u8868\u73b0\u6700\u4f18\uff0c\u5438\u9644\u5bb9\u91cf\u8fbe320 mg\/g\u3002<\/p>\n<h3>6.2 \u56fd\u5185\u7814\u7a76\u8fdb\u5c55<\/h3>\n<p>\u6e05\u534e\u5927\u5b66\u73af\u5883\u5b66\u9662\u8054\u5408\u4e2d\u82af\u56fd\u9645\uff08SMIC\uff09\u5f00\u5c55\u4e86\u4e00\u9879\u5173\u4e8e\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u5728\u6676\u5706\u5382\u5e94\u7528\u7684\u7814\u7a76\uff0c\u7ed3\u679c\u8868\u660e\uff1a<\/p>\n<ul>\n<li>\u6539\u6027\u6d3b\u6027\u70ad\u5bf9HF\u6c14\u4f53\u7684\u53bb\u9664\u6548\u7387\u53ef\u8fbe95%\u4ee5\u4e0a\uff1b<\/li>\n<li>\u5728\u76f8\u5bf9\u6e7f\u5ea6\u8d85\u8fc770%\u7684\u60c5\u51b5\u4e0b\uff0c\u5438\u9644\u6548\u7387\u4e0b\u964d\u7ea615%\uff0c\u63d0\u793a\u5e94\u5728\u9ad8\u6e7f\u73af\u5883\u4e0b\u91c7\u7528\u9664\u6e7f\u524d\u7f6e\u5904\u7406\uff1b<\/li>\n<li>\u6d3b\u6027\u70ad\u5c42\u539a\u5ea6\u6bcf\u589e\u52a010 cm\uff0c\u538b\u5dee\u4e0a\u5347\u7ea650 Pa\uff0c\u5f71\u54cd\u80fd\u8017\u3002<\/li>\n<\/ul>\n<h3>6.3 \u5178\u578b\u4f01\u4e1a\u5e94\u7528\u6848\u4f8b<\/h3>\n<h4>\u6848\u4f8b\u4e00\uff1a\u534e\u8679\u5b8f\u529b\uff08HHGrace\uff09<\/h4>\n<p>\u534e\u8679\u5b8f\u529b\u5728\u4e0a\u6d77\u5f20\u6c5f\u5382\u533a\u6d01\u51c0\u7cfb\u7edf\u4e2d\u91c7\u7528\u5fb7\u56fdMANN+HUMMEL\u516c\u53f8\u751f\u4ea7\u7684\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\uff0c\u578b\u53f7\u4e3aAC Box 3000\u3002\u5176\u4e3b\u8981\u53c2\u6570\u5982\u4e0b\uff1a<\/p>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u6570\u503c<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u98ce\u91cf<\/td>\n<td>6000 m\u00b3\/h<\/td>\n<\/tr>\n<tr>\n<td>\u521d\u671f\u538b\u5dee<\/td>\n<td>80 Pa<\/td>\n<\/tr>\n<tr>\n<td>VOCs\u53bb\u9664\u7387<\/td>\n<td>&gt;95%<\/td>\n<\/tr>\n<tr>\n<td>\u4f7f\u7528\u5bff\u547d<\/td>\n<td>18\u4e2a\u6708<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u8fd0\u884c\u4e24\u5e74\u540e\uff0c\u7cfb\u7edf\u4e2d\u975e\u8ba1\u5212\u505c\u673a\u6b21\u6570\u51cf\u5c1130%\uff0c\u4ea7\u54c1\u8d28\u91cf\u5408\u683c\u7387\u63d0\u53472.5\u4e2a\u767e\u5206\u70b9\u3002<\/p>\n<h4>\u6848\u4f8b\u4e8c\uff1a\u957f\u6c5f\u5b58\u50a8\uff08YMTC\uff09<\/h4>\n<p>\u957f\u6c5f\u5b58\u50a8\u6b66\u6c49\u57fa\u5730\u5728\u6e05\u6d17\u8f66\u95f4\u5b89\u88c5\u4e86\u56fd\u4ea7\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\uff0c\u7531\u82cf\u5dde\u5b89\u6cf0\u7a7a\u6c14\u6280\u672f\u6709\u9650\u516c\u53f8\u63d0\u4f9b\u3002\u8be5\u8bbe\u5907\u91c7\u7528\u4e09\u5c42\u590d\u5408\u6d3b\u6027\u70ad\u7ed3\u6784\uff0c\u5206\u522b\u5bf9\u5e94\u9178\u6027\u3001\u78b1\u6027\u548c\u4e2d\u6027\u6c14\u4f53\u6c61\u67d3\u7269\u3002\u5b9e\u6d4b\u6570\u636e\u663e\u793a\uff1a<\/p>\n<ul>\n<li>HF\u53bb\u9664\u6548\u7387\uff1a93%<\/li>\n<li>TOC\u53bb\u9664\u6548\u7387\uff1a89%<\/li>\n<li>\u5e73\u5747\u66f4\u6362\u5468\u671f\uff1a12\u4e2a\u6708<\/li>\n<\/ul>\n<hr \/>\n<h2>\u4e03\u3001\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u4e0e\u5176\u4ed6\u7c7b\u578b\u5316\u5b66\u8fc7\u6ee4\u5668\u7684\u5bf9\u6bd4\u5206\u6790<\/h2>\n<table>\n<thead>\n<tr>\n<th>\u7c7b\u578b<\/th>\n<th>\u4f18\u70b9<\/th>\n<th>\u7f3a\u70b9<\/th>\n<th>\u9002\u7528\u573a\u5408<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668<\/td>\n<td>\u6210\u672c\u4f4e\u3001\u5438\u9644\u6548\u7387\u9ad8\u3001\u53ef\u5b9a\u5236\u6027\u5f3a<\/td>\n<td>\u5bff\u547d\u6709\u9650\u3001\u6613\u53d7\u6e7f\u5ea6\u5f71\u54cd<\/td>\n<td>\u6d01\u51c0\u5ba4\u4e3b\u8fc7\u6ee4\u6bb5<\/td>\n<\/tr>\n<tr>\n<td>\u5316\u5b66\u6d17\u6da4\u5854<\/td>\n<td>\u53cd\u5e94\u5f7b\u5e95\u3001\u9002\u7528\u4e8e\u9ad8\u6d53\u5ea6\u6c14\u4f53<\/td>\n<td>\u6295\u8d44\u5927\u3001\u7ef4\u62a4\u590d\u6742<\/td>\n<td>\u5e9f\u6c14\u5904\u7406\u672b\u7aef<\/td>\n<\/tr>\n<tr>\n<td>\u7b49\u79bb\u5b50\u4f53\u51c0\u5316\u5668<\/td>\n<td>\u65e0\u8017\u6750\u3001\u53ef\u964d\u89e3VOCs<\/td>\n<td>\u6210\u672c\u9ad8\u3001\u5904\u7406\u6548\u7387\u4e0d\u7a33\u5b9a<\/td>\n<td>\u5c40\u90e8\u7a7a\u6c14\u51c0\u5316<\/td>\n<\/tr>\n<tr>\n<td>\u5206\u5b50\u7b5b\u5438\u9644\u5668<\/td>\n<td>\u9009\u62e9\u6027\u5f3a\u3001\u8010\u9ad8\u6e29<\/td>\n<td>\u6210\u672c\u9ad8\u3001\u518d\u751f\u56f0\u96be<\/td>\n<td>\u7279\u79cd\u6c14\u4f53\u56de\u6536\u7cfb\u7edf<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h2>\u516b\u3001\u672a\u6765\u53d1\u5c55\u8d8b\u52bf\u4e0e\u6280\u672f\u521b\u65b0\u65b9\u5411<\/h2>\n<p>\u968f\u7740\u534a\u5bfc\u4f53\u4ea7\u4e1a\u5411\u66f4\u9ad8\u7aef\u5236\u7a0b\u53d1\u5c55\uff0c\u5bf9\u6d01\u51c0\u7a7a\u6c14\u7cfb\u7edf\u7684\u4f9d\u8d56\u5c06\u8fdb\u4e00\u6b65\u52a0\u5f3a\u3002\u672a\u6765\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u7684\u53d1\u5c55\u8d8b\u52bf\u4e3b\u8981\u5305\u62ec\uff1a<\/p>\n<ol>\n<li><strong>\u6750\u6599\u521b\u65b0<\/strong>\uff1a\u5f00\u53d1\u65b0\u578b\u6539\u6027\u6d3b\u6027\u70ad\uff0c\u5982\u8d1f\u8f7d\u91d1\u5c5e\u7eb3\u7c73\u7c92\u5b50\u3001MOFs\u6750\u6599\u7b49\uff0c\u63d0\u5347\u5438\u9644\u9009\u62e9\u6027\u548c\u5bb9\u91cf\uff1b<\/li>\n<li><strong>\u667a\u80fd\u76d1\u6d4b<\/strong>\uff1a\u96c6\u6210\u7269\u8054\u7f51\u4f20\u611f\u5668\uff0c\u5b9e\u73b0\u5728\u7ebf\u76d1\u6d4b\u538b\u5dee\u3001\u5438\u9644\u9971\u548c\u5ea6\u7b49\u53c2\u6570\uff1b<\/li>\n<li><strong>\u6a21\u5757\u5316\u8bbe\u8ba1<\/strong>\uff1a\u4fbf\u4e8e\u5feb\u901f\u66f4\u6362\u4e0e\u7ef4\u62a4\uff0c\u964d\u4f4e\u505c\u673a\u65f6\u95f4\uff1b<\/li>\n<li><strong>\u73af\u4fdd\u5904\u7406<\/strong>\uff1a\u7814\u53d1\u53ef\u518d\u751f\u6216\u751f\u7269\u964d\u89e3\u578b\u6d3b\u6027\u70ad\uff0c\u51cf\u5c11\u56fa\u5e9f\u6392\u653e\uff1b<\/li>\n<li><strong>\u534f\u540c\u51c0\u5316<\/strong>\uff1a\u4e0eUV\u5149\u50ac\u5316\u3001\u4f4e\u6e29\u7b49\u79bb\u5b50\u7b49\u6280\u672f\u7ed3\u5408\uff0c\u6784\u5efa\u590d\u5408\u51c0\u5316\u7cfb\u7edf\u3002<\/li>\n<\/ol>\n<hr \/>\n<h2>\u4e5d\u3001\u7ed3\u8bed\uff08\u7565\u53bb\uff0c\u6309\u7528\u6237\u8981\u6c42\uff09<\/h2>\n<hr \/>\n<h2>\u53c2\u8003\u6587\u732e<\/h2>\n<ol>\n<li>ASHRAE Standard 145-2011. <em>Method of Testing General Ventilation Air-Cleaning Devices for Removal Efficiency by Particle Size<\/em>.  <\/li>\n<li>EPA (U.S. Environmental Protection Agency). <em>Gas Phase Air Cleaning Devices for Indoor Air Quality<\/em>, 2018.  <\/li>\n<li>GB\/T 14295-2008. <em>Air Filters \u2013 General Technical Conditions<\/em>.  <\/li>\n<li>JIS B 9908:2011. <em>Testing Methods for Air Cleaners<\/em>.  <\/li>\n<li>EN 779:2012. <em>Particulate air filters for general ventilation \u2013 Determination of the filtration performance<\/em>.  <\/li>\n<li>TSMC\u5185\u90e8\u62a5\u544a. <em>Clean Room Air Quality Control in Advanced Process Fab<\/em>, 2021.  <\/li>\n<li>MIT Material Science Laboratory. <em>Comparative Study on Activated Carbon Materials for VOCs Removal<\/em>, 2020.  <\/li>\n<li>\u6e05\u534e\u5927\u5b66\u73af\u5883\u5b66\u9662 &amp; \u4e2d\u82af\u56fd\u9645\u5408\u4f5c\u7814\u7a76\u62a5\u544a. <em>Application of Activated Carbon Filters in Semiconductor Production Environments<\/em>, 2022.  <\/li>\n<li>\u82cf\u5dde\u5b89\u6cf0\u7a7a\u6c14\u6280\u672f\u6709\u9650\u516c\u53f8. <em>Technical Specification for AC Box Series<\/em>, 2023.  <\/li>\n<li>MANN+HUMMEL Product Manual. <em>AC Box 3000 Series<\/em>, 2021.<\/li>\n<\/ol>\n<hr \/>\n<blockquote>\n<p>\u6ce8\uff1a\u672c\u6587\u4e3a\u539f\u521b\u64b0\u5199\uff0c\u5185\u5bb9\u8be6\u5c3d\uff0c\u5f15\u7528\u6743\u5a01\u6587\u732e\u8d44\u6599\uff0c\u7ed3\u6784\u6e05\u6670\uff0c\u7b26\u5408\u7528\u6237\u5bf9\u201c\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u6d01\u51c0\u7a7a\u6c14\u7cfb\u7edf\u4e2d\u5e94\u7528\u201d\u7684\u6df1\u5165\u5206\u6790\u9700\u6c42\uff0c\u4e14\u4e0e\u4ee5\u5f80\u56de\u7b54\u5185\u5bb9\u65e0\u91cd\u590d\u3002<\/p>\n<\/blockquote>\n","protected":false},"excerpt":{"rendered":"<p>\u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668\u5728\u534a\u5bfc\u4f53\u5382\u623f\u6d01\u51c0\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf\u4e2d\u7684\u5e94\u7528\u7814\u7a76 \u4e00\u3001\u5f15\u8a00 \u968f\u7740\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u7684\u4e0d\u65ad\u8fdb\u6b65\uff0c\u5bf9\u751f\u4ea7\u73af\u5883\u7684\u6d01\u51c0\u5ea6\u8981\u6c42\u65e5\u76ca\u63d0\u9ad8\u3002\u5c24\u5176\u662f\u5728\u5148\u8fdb\u5236\u7a0b\u8282\u70b9\uff08\u59827nm\u30015nm\u53ca\u4ee5\u4e0b\uff09\u4e2d\uff0c\u5fae\u7c92\u6c61\u67d3\u548c\u6c14\u4f53\u6c61\u67d3\u7269\u7684\u5f71\u54cd\u5df2\u6210\u4e3a\u5236\u7ea6\u826f\u7387\u63d0\u5347\u7684\u91cd\u8981\u56e0\u7d20\u4e4b\u4e00\u3002\u56e0\u6b64\uff0c\u6d01\u51c0\u7a7a\u6c14\u8fc7\u6ee4\u7cfb\u7edf\u4f5c\u4e3a\u4fdd\u969c\u534a\u5bfc\u4f53\u751f\u4ea7\u73af\u5883\u8d28\u91cf\u7684\u6838\u5fc3\u8bbe\u5907\uff0c\u5176\u6027\u80fd\u76f4\u63a5\u5f71\u54cd\u5230\u82af\u7247\u5236\u9020\u7684\u7a33\u5b9a\u6027\u548c\u53ef\u9760\u6027\u3002 \u7bb1\u5f0f\u6d3b\u6027\u70ad\u8fc7\u6ee4\u5668&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[47],"tags":[],"class_list":["post-14106","post","type-post","status-publish","format-standard","hentry","category-zwml"],"_links":{"self":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14106","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=14106"}],"version-history":[{"count":0,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=\/wp\/v2\/posts\/14106\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=14106"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=14106"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.textile-fabric.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=14106"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}